CN1045231C - Ceramic diaphragm structure having convex diaphragm portion and method of producing the same - Google Patents
Ceramic diaphragm structure having convex diaphragm portion and method of producing the same Download PDFInfo
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- CN1045231C CN1045231C CN95109697A CN95109697A CN1045231C CN 1045231 C CN1045231 C CN 1045231C CN 95109697 A CN95109697 A CN 95109697A CN 95109697 A CN95109697 A CN 95109697A CN 1045231 C CN1045231 C CN 1045231C
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Classifications
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
- H04R17/00—Piezoelectric transducers; Electrostrictive transducers
- H04R17/04—Gramophone pick-ups using a stylus; Recorders using a stylus
- H04R17/08—Gramophone pick-ups using a stylus; Recorders using a stylus signals being recorded or played back by vibration of a stylus in two orthogonal directions simultaneously
Abstract
A ceramic film structure element comprises a ceramic substrate (4; 28, 30) having at least one window (6; 36) and a ceramic diaphragm portion (8; 26) superposing on the ceramic substrate for closing each window. The ceramic substrate and the ceramic diaphragm portion are sintered together to form a coherent mass. The diaphragm portion has at least one convex shape (10) and protrudes outwards, in a direction away from the corresponding window. The invention also provides a method of producing the ceramic film structure element by which a convexity is formed on the process of sintering the ceramic substrate and the ceramic diaphragm portion.
Description
The present invention relates to a kind of ceramic diaphragm structure, and a kind of method of making this diaphragm structure.Exactly, this invention relates to a kind of like this ceramic diaphragm structure, and this diaphragm structure is characterised in that the shape of a diaphragm portion or its a plurality of portions.
Diaphragm structure has been widely used for various types of transducers, for example, this structure has one to have a window that passes substrate and form or the substrate or the base plate of opening at least, with one form by a kind of flexible material and be suitable in order to seal the diaphragm plate of this window or a plurality of windows, so that a diaphragm portion or a plurality of portion are provided.In recent years, this class diaphragm structure is used for the piezoelectric actuator more and more.When this diaphragm structure during as the element of a transducer, this transducer has the bending of this diaphragm portion that is used for surveying this diaphragm structure or the appropriate device of deflection displacement, and this displacement is to be caused by the object that this transducer will be measured.When this diaphragm structure is used as the element of a piezoelectric actuator, piezoelectric/electrostrictive film element institute's bending that this diaphragm portion of this structure is formed on this diaphragm portion or deflection are so that improve pressure in the pressure chamber that forms in this diaphragm structure.
Aforesaid this diaphragm structure can be made like this, promptly form one by as this substrate of base plate or bearing and one by this substrate support and be provided with the integral body that the film spare of this diaphragm is formed.In order to improve functional reliability, and raising thermal endurance and corrosion resistance, proposed to form this diaphragm structure as a kind of bulk ceramics body of firing, be used for a kind of pressure sensor or a kind of piezoelectric actuator, as belong to the application's assignee's United States Patent (USP) the 4th, 894, No. 635 (corresponding to Japanese patent application 63-292032 number), and in the Japan Patent that proposes of this trustee 5-49270 number disclosed like that.
The general such formation of aforesaid bulk ceramics diaphragm structure, it is superimposed promptly the living ceramic substrate of a window that has a suitable shape and one to be used for sealing the thin living potsherd of this window, has the integral body at the diaphragm portion of this window of one of opposed opening of window sealing and gives birth to ceramic laminated structure so form one.Then this life laminated construction is fired into the integral membrane chip architecture.The present inventor finds, during ablating work procedure, may indent be out of shape or depression at the diaphragm portion that its window upper section that is positioned at this living ceramic substrate forms by giving birth to potsherd, or undermined because of splitting level.Be harmful in function and the work of the depression of diaphragm portion and crackle, cause the functional reliability of reduction the former plan of this diaphragm.
Aforesaid ceramic diaphragm structure is typically provided with a flat diaphragm portion or a plurality of portion.Yet, the very difficult natural resonance frequency that improves such flat diaphragm.In addition, flat diaphragm does not show sufficiently high mechanical strength, thereby makes the thickness that is difficult to reduce diaphragm.Moreover sintering goes out the electrode film that forms, piezoelectric film etc. in this flat diaphragm portion unsatisfactorily.
Thereby, first purpose of the present invention is to provide a kind of ceramic diaphragm structure that does not have depression and crackle at its diaphragm portion, guarantee natural resonance frequency and high mechanical properties that this diaphragm portion significantly improves, do not influence the sintering of the various films that form on this diaphragm portion, all these cause improving the functional reliability of this diaphragm structure.
Second purpose of the present invention is to provide a kind of making a kind of like this method of diaphragm structure as mentioned above.
A kind of ceramic diaphragm structure is provided according to an aspect of the present invention, this structure comprises a ceramic substrate that at least one window is arranged, with one superimposed in described ceramic substrate so that seal the ceramic film plate of described at least one window, described diaphragm plate is fired to form an integral sintered body with described ceramic substrate, described diaphragm plate comprises respectively at least one diaphragm portion that aligns with described at least one window, and this structure is characterised in that:
In described at least one diaphragm portion each is all outwards outstanding along the direction of leaving the window of a correspondence in described at least one window, to form a kind of convex shape.
In this ceramic diaphragm structure that constitutes according to the present invention as mentioned above, each diaphragm portion is outwards outstanding to form a kind of convex shape along the direction of leaving respective window.Thereby, compare with the par of a routine, the diaphragm portion of this structure shows the natural resonance frequency that significantly improves, and improved overcome the intensity of force that applies from a side facing to this window.In addition, this diaphragm portion does not influence with a kind of film formation method such as the sintering of the film that forms on the outer surface of this diaphragm portion (as electrode film and piezoelectric film), guarantees the high-quality and the high workload reliability of resulting ceramic diaphragm structure.
Ceramic diaphragm structure according to the present invention is a lamination-type, thereby allows to form on the unit area of plane of this structure the bigger diaphragm portion of quantity.In addition, this diaphragm structure of sintered body formation guarantees to be higher than reliability and is easy to handle as a whole, and can design its diaphragm portion on request.Moreover, can control the overhang of these diaphragm portions at an easy rate, and can reduce the thickness of these diaphragm portions significantly, the production efficiency that has guaranteed to improve.
Aforesaid ceramic diaphragm structure can be advantageously used in piezo-electric/electrostrictive membrane type element, the membrane component functional reliability that has guaranteed to significantly improve.Thereby this diaphragm structure is advantageously used in actuator, display device, filter, pick-up, sounding body (as loud speaker), various transducer, various oscillator resonator.
In a kind of optimised form aspect more than of the present invention, this ceramic film plate is formed by a kind of material, this material comprise a kind of from by stabilizing zirconia, PSZ, aluminium oxide, and the category formed of their mixture the main component selected.
In the another kind of optimised form of this invention, this ceramic substrate and this ceramic film plate have the average grain size that is not more than 5 μ m.In addition, at least one diaphragm portion of pointing out above can have the thickness that is not more than 30 μ m, and can be made up of a kind of DB with relative density of at least 90%.
A kind of method of making aforesaid this ceramic diaphragm junction structure is provided according to another aspect of the present invention, and the method comprising the steps of: (a) living ceramic substrate that has a window at least of preparation; (b) living ceramic sheet of preparation; (c) this life ceramic sheet superimposed in this living ceramic substrate sealing this window or those windows, thereby the ceramic laminated structure of life of an integral body is provided; And (d) the ceramic laminated structure of this life is fired into an integral sintered body, so that this life ceramic sheet provides a diaphragm portion that aligns with this (those) window respectively at least, each diaphragm portion forms convex shape when firing the ceramic laminated structure of this life, so that this diaphragm portion is outwards outstanding along the direction of leaving respective window.
In said method, this living ceramic substrate is given birth to preferably preparation like this of ceramic sheet with this, so that pre-sintering temperature and the shrinkage of each satisfies following formula in this living substrate and the living thin slice:
S (substrate)-S (thin slice) 〉=-0.08{T
70(substrate)-T
70(thin slice) }-1
0≤T
70(substrate)-T
70(thin slice)≤300
S (substrate)-S (thin slice)≤20
In the formula, this living ceramic substrate and this life ceramic sheet shrinkage (%) separately when S (substrate) and S (thin slice) representative are fired under the temperature that this life laminated construction is finally fired with living thin slice independently of each other when this living substrate, and T in the formula
70(substrate) and T
70(thin slice) represent the shrinkage of this living ceramic substrate and this life ceramic sheet (when firing independently of each other) reach respectively S (substrate) and S (thin slice) 70% the time separately pre-sintering temperature (℃).
In a kind of optimised form aspect more than of the present invention, this life ceramic sheet comprises a kind of material of selecting from the category of being made up of PSZ, fully stabilized zirconia, aluminium oxide and their mixture after firing preceding or firing.This life ceramic sheet has the average particle size particle size of 0.05 to 1.0 μ m.Can in this material, add and be no more than 30% additive.
A kind of method of making aforesaid ceramic diaphragm structure is provided according to a further aspect of the invention, and the method comprising the steps of:
Prepare a living ceramic substrate that at least one window is arranged;
Prepare a thin potsherd of giving birth to;
Described living ceramic sheet superimposed in described living ceramic substrate so that seal described at least one window, provide integral body to give birth to laminated construction whereby; And
Described living laminated construction is fired into an integral sintered body, so that described living ceramic sheet provides respectively at least one diaphragm portion that aligns with described at least one window, in described at least one diaphragm portion each all forms convex shape when firing described living laminated construction, so that described each diaphragm portion is all outwards outstanding along the direction of leaving the window of a correspondence in described at least one window
Wherein said living ceramic substrate and described living ceramic sheet prepare like this, so that pre-sintering temperature and the shrinkage of each satisfies following formula in this living substrate and the living thin slice:
S (substrate)-S (thin slice) 〉=-0.08{T
70(substrate)-T
70(thin slice) }-1
0≤T
70(substrate)-T
70(thin slice)≤300
In S (substrate)-S (thin slice)≤20 formula, when S (substrate) and S (thin slice) representative are fired under the temperature that described living laminated construction is finally fired with living thin slice independently of each other when this living substrate, described living ceramic substrate and described living ceramic sheet shrinkage (%) separately, described shrinkage is to calculate according to measured lengths in the plane of this living substrate or thin slice, and T in the formula
70(substrate) and T
70(thin slice) representative during described living ceramic substrate and described living ceramic sheet are fired independently of each other, the shrinkage of described living ceramic substrate and described living ceramic sheet reach respectively S (substrate) and S (thin slice) 70% o'clock separately pre-sintering temperature (℃).
By reading the following detailed description to some current most preferred embodiments of this invention when considering in conjunction with the accompanying drawings, above and optional purpose of the present invention, feature and advantage will be better understood, in these accompanying drawings:
Fig. 1 is a cutaway view, represents an embodiment of a kind of ceramic diaphragm structure of the present invention;
Fig. 2 is the upward view of this diaphragm structure of Fig. 1;
Fig. 3 is a perspective view, and a step in the manufacturing process of this diaphragm structure of presentation graphs 1 is superimposed on a living ceramic substrate a living ceramic sheet in this step;
Fig. 4 is a cutaway view, turgidly this diaphragm structure of presentation graphs 1 major part;
Fig. 5 is a curve chart, is illustrated in this life ceramic sheet and the difference Δ S of the shrinkage between this living ceramic substrate and the difference Δ T of pre-sintering temperature of this diaphragm structure that is fired into Fig. 1
70Relation;
Fig. 6 is a cutaway view, and the example according to a kind of piezo-electric/electrostrictive membrane type element of this ceramic diaphragm structure of the present invention is used in expression;
Fig. 7 is the decomposition diagram of this piezo-electric/electrostrictive membrane type element of Fig. 6;
Fig. 8 is a cutaway view, and expression has the example of another piezo-electric/electrostrictive membrane type element of five-layer structure.
In this ceramic diaphragm structure that constitutes according to the present invention as mentioned above, this thin slice sheet portion integrally forms so that seal the window of this substrate on this ceramic substrate, so that this diaphragm portion is outwards outstanding along the direction of leaving this window, and forms a kind of convex shape.Referring to Fig. 1 and Fig. 2, will an embodiment of this ceramic diaphragm structure of the present invention be described.This embodiment has a window that passes this ceramic substrate.
As shown in Fig. 1 and Fig. 2, the composition of a diaphragm structure 2 that integrally forms comprises one of superimposed opposed major surfaces in this ceramic substrate 4 of the ceramic substrate of a rectangular window that has an appropriate size or opening 6 or base 4 and so that seal the thin ceramic film plate 8 of one of the opposed opening of this window 6.This diaphragm plate 8 comprises one when watching and the diaphragm portion 10 that aligns of this window 6 of this ceramic substrate 4 in the plane of this diaphragm plate 8.In order to make this diaphragm structure 2, superimposed on a living substrate 14 that provides this ceramic substrate 4 a living ceramic sheet that provides this diaphragm plate 8 12, so that seal a window 16 of this living substrate 14 as shown in Figure 3, and these give birth to thin slice and living substrate 12,14 interosculate by hot pressing, so that provide an integral body to give birth to laminated construction.Then, this life lamination result is fired into as shown in fig. 1 this integral membrane chip architecture 2.In this life ceramic sheet 12 and this living ceramic substrate 14 each can be by forming a plurality of thin slice or substrate stack with littler one-tenth-value thickness 1/10.Be noted that the shape of this window 6 of this diaphragm structure 2, in other words, the shape of this diaphragm portion 10 never is limited to rectangular shape as shown in this embodiment, but can suitably select according to the application scenario of this diaphragm structure 2 or purposes.For example, this diaphragm portion 10 can have circle, polygon or an elliptical shape, and these difform a kind of combinations are perhaps arranged.
In diaphragm structure 2 of the present invention, diaphragm portion 10 has convex shape, and is perhaps in other words outwards outstanding along the direction of leaving window 6, as representing turgidly among Fig. 4.This diaphragm portion 10 of appearance had not both had the yet flawless that caves in like this, and, with a planar patch portion different, as to show the natural resonance frequency that has significantly improved and the improved intensity that overcomes external force, and do not influence the sintering of the film that on these diaphragm portion 10 outer surfaces, forms.This makes this diaphragm structure 2 find more various application or purposes that be far away.In this connection, the natural resonance frequency f of this diaphragm plate 8 that vibrates at work and (H/A
2)
Proportional, wherein 2A is the overall diameter of diaphragm plate 8, and H is the overhang of this diaphragm portion 10, and E is the Young's modulus of this diaphragm material, and p is the density of this diaphragm material.So this natural resonance frequency f can come to change by hope by the standout of controlling this diaphragm portion 10.More particularly, the rigidity with this diaphragm plate 8 of less thickness can strengthen by the overhang that increases this diaphragm portion 10, thereby improves the natural resonance frequency of this diaphragm portion 10.
In aforesaid diaphragm structure 2, the overhang of the diaphragm portion 10 of tool convex shape can suitably determine according to the concrete application or the purposes of this diaphragm structure 2.In order to guarantee above-mentioned effect of the present invention, the overhang of the core of this diaphragm portion 10 (h) (or maximum overhang) is to the percentage of the length (m) of the short lines at window 6 centers by this ceramic substrate 4, in other words, by (y=(h/m) * 100) expressed outstanding percentage, be controlled so as to and be not less than 1%.Should give prominence to the upper limit of percentage (y) and also can suitably determine, generally be about 50%.
In the diaphragm structure 2 that constitutes according to the present invention, be used for forming material suitably selection from various known ceramic materials of ceramic substrate 4 and ceramic film plate 8.In general, ceramic film plate 8 is formed by the material with a kind of main component of selecting from mullite, beryllium oxide, sharp brilliant chamber, titanium dioxide, aluminium nitride, silicon nitride, stabilizing zirconia, PSZ, aluminium oxide and their mixture.In these ceramic materials, stabilizing zirconia, PSZ, aluminium oxide or their mixture are preferably adopted.The disclosed a kind of material that is the inventor in Japanese patent application 5-270912 number that particularly advantageously uses, this material comprises the partially stabilized zirconia by adding yittrium oxide or other compounds as a kind of main component, and this material has mainly by tetragonal or two kinds of cubical combinations of cubic at least crystalline phase and monocline crystalline phase or the crystalline phase of mixing to form.Make thermal endurance and the corrosion resistance that diaphragm plate 8 shows high mechanical properties and height by above-mentioned material, and when little thickness, be highly flexible, thereby a kind of diaphragm structure efficiently is provided.In order to realize the globality of diaphragm structure 2, wish that one of above-mentioned material that ceramic substrate 4 usefulness are identical with ceramic film plate 8 employees forms.Yet substrate 4 also can be formed as glass ceramics or cordierite and so on by other ceramic materials.
In order to guarantee the sufficiently high mechanical strength of this diaphragm structure 2, wish that the ceramic material that is used for ceramic substrate 4 and ceramic film plate 8 (diaphragm portion 10) has the following crystallite dimension of 5 μ m, preferably below the 3 μ m, and 1 μ m is following better.In view of its vibration characteristics, provide the thickness of the diaphragm plate 8 of diaphragm portion 10 to wish to control to and be not more than 30 μ m, be preferably in 3 to 20 mu m ranges.In view of intensity, Young's modulus and other characteristics of diaphragm material, wish that also it is more than 90% that the density of diaphragm plate 8 is specified to relative density (bulk density/solid density), preferably more than 95%, and more than 98% better.
The thickness of the ceramic substrate 4 of diaphragm structure 2 and agglutinating property are not limited to any specific scope, and can suitably determine according to the concrete application or the purposes of diaphragm structure 2.Though this ceramic substrate 4 can be made up of the perhaps many subgrades of individual layer as mentioned above, this substrate 4 is preferably by making with the identical or similar ceramic material of diaphragm plate 8 employees, with the reliability that guarantees that between substrate 4 and plate 8 junction has been improved.
The ceramic diaphragm structure 2 of Gou Chenging can be made of one of known the whole bag of tricks of professional and technical personnel as mentioned above.What particularly advantageously adopt is a kind of method that comprises following processing step (a) to (d):
Beginning, preparation has the living ceramic substrate 14 of a window 16 at least in first step (a), as shown in Figure 3, and prepares the living ceramic sheet 12 with less thickness in second step (b).Can suitably adopt aforesaid ceramic material to form this life ceramic sheet 12 and living ceramic substrate 14.Exactly, giving birth to ceramic sheet 12 is preferably formed by a kind of like this material, this material comprises a kind of main component of selecting from PSZ, fully stabilized zirconia, aluminium oxide and their mixture, perhaps formed by a kind of like this material, this material provides one of above-mentioned all materials after it is fired.The ceramic material that is used for living thin slice 12 is the powder type with average particle size particle size of 0.05 to 1.0 μ m.This ceramic material is mixed to be prepared into mud or paste with suitable adhesive, plasticizer, dispersant, sintering aid, organic solvent etc. in the known manner.Then, for example pass through known method,, this mud or paste are formed living ceramic sheet 12 and the living ceramic substrate 14 with predetermined thickness separately perhaps by printing with scraper plate machine, calender or contrary roll-coater.In case of necessity, a plurality of thin green sheets can laminations or are superimposed together, perhaps the living thin slice of initial preparation can cutting, machine work, punching or handle with additive method, have the thickness wanted and the living thin slice 12 and the living substrate 14 of shape to provide.
When the thin green sheet lamination is formed living ceramic sheet 12 or living ceramic substrate 14, can a bonding subgrade be set at the joint that adjacent a slice is given birth to thin slice.This bonding subgrade is formed by mud, paste and so on, and these mud, paste and so on mainly comprise above-mentioned adhesive, plasticizer, solvent or their mixture, and aforesaid ceramic powders.The lamination of book raw cook can be realized in next step as described below (c).
In third step (c), superimposed mutually the living ceramic sheet 12 and the living ceramic substrate 14 of preparation like this, so that a living laminated construction to be provided.More particularly, thin livings ceramic sheet 12 superimposed in living ceramic substrate 14 so that closed window 16, and thereon, thereby form whole living laminated construction by heat pressure adhesive.Can between living thin slice 12 and living substrate 14, an aforesaid bonding subgrade be set.
In next step (d), this life laminated construction that obtains like this is fired into an integral sintered body, this sintered body has a diaphragm portion 10 that becomes with 16 pairs of positive forms of window of this living ceramic substrate 14.When sintering should be given birth to laminated construction, this diaphragm portion 10 was outside, and is promptly outstanding along the direction of leaving window 16 (6), to form convex shape as shown in figs. 1 and 4.Firing temperature generally is controlled within the scope that is in 1200 ℃ to 1700 ℃, preferably is within 1300 ℃ to 1600 ℃ the scope.
In order when firing this integral body life laminated construction, to make the diaphragm portion 10 of living ceramic sheet 12 outwards outstanding, by suitably selecting to be used for giving birth to the ceramic material of thin slice 12 and living substrate 14, the particle size of selected ceramic powder, and the kind of the additive such as adhesive, dispersant and sintering aid and quantity control the sintering velocity and the shrinkage of living ceramic sheet 12 and living substrate 14.According to an aspect of the present invention, giving birth to the pre-sintering temperature of ceramic sheet 12 and living ceramic substrate 14 and shrinkage is specified to and satisfies following formula (1)-(1 "):
S (substrate)-S (thin slice) 〉=-0.08{T
70(substrate)-T
70(thin slice) }-1
(1)
0≤T
70(substrate)-T
70(thin slice)≤300 (1 ')
S (substrate)-S (thin slice)≤20 (1 ")
In the formula, S (substrate) and S (thin slice) representative is this living ceramic substrate and this life ceramic sheet shrinkage (%) separately when in these substrates and the thin slice each is fired under the temperature identical with the final firing temperature of giving birth to laminated construction, and these shrinkages are that basis length during measurement in the plane of this substrate or thin slice is calculated.T
70(substrate) and T
70(thin slice) represent the shrinkage of this living ceramic substrate and this life ceramic sheet (when firing independently of each other) reach respectively S (substrate) and S (thin slice) 70% the time pre-sintering temperature (℃).So, when firing this laminated construction of being made up of living ceramic sheet 12 and living ceramic substrate 14, this diaphragm portion 10 is outwards outstanding effectively.
Aforesaid shrinkage is expressed with ((length A-length B)/length A) * 100 (%), and wherein length A is the length when firing preceding the measurement, and length B is the length when firing the back measurement.Those length B of this substrate and thin slice measures after this substrate and thin slice are fired independently of each other.Above-mentioned these length (length A and length B) are in the plane of this thin slice or substrate, promptly always measure along the predetermined party vertical with their thickness direction with the major surfaces in parallel of this thin slice or substrate.Above-mentioned pre-sintering temperature T
70(substrate) or T
70(thin slice) indicates and this substrate and thin slice independently fired in the process of (not being with laminated construction), the shrinkage of calculating by aforesaid mode reaches (S (substrate) or S (thin slice)) * 0.7 (%) or the temperature (0.7S%) time, wherein S be when by be used for firing this substrate of recording when identical temperature control profile of this diaphragm structure or figure are fired not their laminations and to this substrate or thin slice or total shrinkage ratio of thin slice.In addition, T shows the agglutinating property of this substrate or thin slice, should be controlled to make the thin sintering velocity of potsherd 12 or sintering velocity or the sintering rate that sintering rate is higher than living ceramic substrate 12 of giving birth to.Even satisfy this condition, resulting diaphragm structure also not necessarily has a convex diaphragm portion, and may have a planar patch portion, and this depends on the shrinkage (S) when measuring under final firing temperature.So, have convex diaphragm portion in order to guarantee diaphragm structure, must satisfy the S that shows in formula (1), (1 '), (1 ") and all above-mentioned relations between the T.
If excessive in the agglutinating property difference of giving birth between ceramic sheet 12 and the living ceramic substrate 14, in other words, (T
70(substrate)-T
70(thin slice)) value is greater than 300, and then the convex shape of diaphragm portion can become unstable, perhaps can form crackle in diaphragm portion.As mentioned above, S represent when when this substrate and thin slice are fired into the integral membrane chip architecture when firing in these sheets each under the actual temperature that adopts, the shrinkage of this living substrate or thin slice.If shrinkage has big difference between this life ceramic sheet 12 and substrate 14, in other words, the value of (S (substrate)-S (thin slice)) is greater than 20, and then this diaphragm structure can warpage arrive largely after it is fired, and perhaps can form crackle in diaphragm plate 8.
In the method for making ceramic diaphragm structure according to the present invention, for the high stability of the convex shape that guarantees this diaphragm portion and prevent or reduce the warpage of diaphragm structure 2 and after it is fired, in diaphragm plate 8, keep residual stress, give birth to ceramic sheet 12 and living ceramic substrate 14 and preferably be prepared into and satisfy following formula (2), (2 ') and (2 ").
S (substrate)-S (thin slice) 〉=-0.08{T
70(substrate)-T
70(thin slice) }+0.8
(2)
100≤T
70(substrate)-T
70(thin slice)≤200 (2 ')
S (substrate)-S (thin slice)≤10 (2 ") give birth to ceramic sheet 12 and living ceramic substrate 14 be prepared into satisfy following formula (3), (3 ') and (3 ") then better.
S (substrate)-S (thin slice) 〉=-0.08{T
70(substrate)-T
70(thin slice) }+0.8
(3)
10≤T
70(substrate)-T
70(thin slice)≤100 (3 ')
S (substrate)-S (thin slice)≤5 (3 ")
By above formula (1) to the differential of the difference of the shrinkage of (3 ") defined and pre-sintering temperature in Fig. 5.
According to the second method of making the ceramic diaphragm structure that constitutes according to the present invention, in following step (e), fired then according to the living laminated construction of integral body that processing step (a) to (c) obtains, so that an integral sintered body to be provided, wherein diaphragm portion (10) becomes with 16 pairs of positive forms of window of this ceramic substrate.In next step (f), in to the sintered body heating that obtains like this, diaphragm portion (10) is applied a pressure, so that diaphragm portion (10) is outside, promptly outstanding along the direction of leaving window 16 (6).
In the processing step (f) of second method, earlier being equal to or less than this sintered body of heating under a kind of temperature of this sintering temperature substantially, so that this sintered body can be out of shape.Then, can apply such as from the mechanical force of suitable anchor clamps to diaphragm portion (10), perhaps fluid pressure is so that cause the outwards outstanding amount that draft or that want (h) of this diaphragm portion (10).Yet, in view of comparing higher production efficiency is arranged with the second method of above firm description, preferably adopt to comprise that the first method of step (a)-(d) makes diaphragm structure 2.
The ceramic diaphragm structure 2 that obtains like this according to the present invention does not have depression, crackle and other defect at its diaphragm portion 10, guarantees outstanding quality and very high functional reliability.In addition, this diaphragm portion 10 provides very high mechanical strength and has significantly improved natural resonance frequency, and does not influence the sintering of the film that forms on the outer surface of this part 10.Therefore, this diaphragm structure 2 can be advantageously used in various uses, such as transducer and actuator.In addition, because the superior character of used ceramic material wherein, this diaphragm structure 2 can be advantageously used for a device that requires highly corrosion resistant, conduit etc., and the part of the various sniffers such as a foil gauge, so that a corrosion resistant pressure sensor that is used for monitoring internal pressure or other parameters of this device or conduit is provided.This diaphragm structure 2 also can share with a drive source such as air pressure or push rod, so that an actuator is provided, this actuator provides bigger displacement with lower frequency.
Ceramic diaphragm structure of the present invention is advantageously used in a kind of piezo-electric/electrostrictive membrane type element, wherein forms a piezoelectric unit on one of opposed major surfaces of the diaphragm portion of this structure.Exactly, this diaphragm structure is advantageously used in the piezo-electric/electrostrictive membrane type element of monocrystalline or other types, these elements are used for producing or surveying the displacement or the power of bending, skew or deflection form, and are used for actuator, filter, display device, acceleration transducer, vibrating sensor, shock transducer, converter, pick-up, sounding body (as loud speaker), various resonator or the oscillator of power device or communication device.The example of piezo-electric/electrostrictive membrane type element that Fig. 6 schematically draws an embodiment comprising ceramic diaphragm structure of the present invention, and Fig. 7 is the decomposition diagram of this membrane component.This piezo-electric/electrostrictive membrane type element 20 has a diaphragm structure 22 and is arranged in some piezoelectric unit (P/E unit hereinafter referred to as) 24 on this diaphragm structure 22 as shown in these figures.More particularly, these P/E unit 24 are bonded in and are integrally formed on the outer surface of each diaphragm portion of this structure 22.When work, these P/E unit 24 are used for causing that according to the voltage that these P/E unit 24 are applied those corresponding diaphragm portions of this structure 22 are offset or distortion.
More specifically describe, the diaphragm structure 22 that constitutes according to the present invention has a kind of laminated construction, and its composition comprises that 28 and one thin of 26, connecting plates of shut (diaphragm portion) (substrate) are clipped in the dividing plate 30 between this shut 26 and this connecting plate 28.These plates 26,28,30 are formed by the suitable ceramic material of zirconia and so on.Connecting plate 28 has a plurality of ditch through holes 32 (being three holes 32 in the present embodiment), and these holes are vertically left predetermined interval mutually along plate 28, as shown in Figure 7.These ditch through holes 32 are linked up with extraneous.Dividing plate 30 has a plurality of square window of passing it and forming or perforate 36 (being three windows 36 in the present embodiment).These windows 36 vertically leave predetermined interval mutually along dividing plate 30.Dividing plate 30 is superimposed like this on connecting plate 28, and those ditch through holes 32 that promptly pass connecting plate 28 formation lead to each window 36.Though only a ditch through hole 32 is set in the present embodiment for each window 36, can two above ditch through holes be set for each window 36, decide on the concrete purposes of this piezo-electric/electrostrictive membrane type element 20.The shape of ditch through hole 32, position and size also can suitably be determined on request, decide on the purposes of this membrane component 20.Above-mentioned shut 26 is superimposed in the opposed major surfaces of this dividing plate 30 on the one side away from connecting plate 28, so that seal all windows 36 of this dividing plate 30.By this configuration, in diaphragm structure 22, form a plurality of pressure chambers 38, so that these pressure chambers 38 are linked up with the space beyond the structure 22 through ditch through hole 32 maintenances separately.Though the composition of this diaphragm structure 22 comprises three layers of overall structure, be shut 26 (diaphragm), dividing plate 30 (substrate) and connecting plate 28 (substrate), but diaphragm structure of the present invention also can be formed with four layers or other multilayer overall structures more than four layers, as shown in Figure 8.
As mentioned above, diaphragm structure 22 forms an integral body and fires or sintered body, and this sintered body is mainly made by the suitable ceramic material of zirconia and so on and some arranged outwards promptly along the outstanding diaphragm portion (26) of the direction of leaving those windows 36.In order to make this diaphragm structure 22, use at the beginning by such as the mud or the paste of suitable ceramic material, adhesive and solvent preparation form all living thin slices by the general machine that uses such as scraper plate machine, contrary roll-coater or screen process press.These are given birth to thin slices and stand cutting, machine work, punching or other processing on demand then, so that form those windows 36 and ditch through hole 32, thereby and provide and provide the blank of plate 26,28,30 separately.Then, the mutual lamination of these base grains also together, become as a whole living laminated construction by heat pressure adhesive.After this, this life laminated construction is fired into integral membrane chip architecture 22, so that makes those diaphragm portions as the part of shut 26 to meal projection or outstanding by one of said method.
P/E unit 24 forms on the outer surface of the shut 26 of this diaphragm structure 22, and these unit 24 and pressure chamber 38 separately align when consequently watching in the plane parallel with the outer surface of plate 26.Each P/E unit 24 comprises a bottom electrode 40,42 and top electrodes 44 of a piezoelectric layer (P/E layer hereinafter referred to as), they by this order with suitable film formation method lamination be formed on the convex external surface of corresponding diaphragm portion of this shut 26.For these P/E unit 24, special recommendation adopt as with 5-29675 number corresponding U.S. Patent application the 08/239th common co-pending of entrusting to the trustee of present patent application of Japanese patent application, in No. 856 and United States Patent (USP) the 5th, a kind of piezoelectric/electrostrictive film element that proposes in 210, No. 455.
Any in the upper/ lower electrode film 44,40 of each P/E unit 24 and the P/E layer 42 usefulness various known method, comprise such as silk screen printing, the thick-film formation method spraying, immerse and being coated with and the film formation method such as ion beam method, sputtering deposit, vacuum vapor deposition, ion plating, chemical vapor deposition and plating, be formed on the outer surface of corresponding diaphragm portion of shut 26 of this diaphragm structure 22.The material that is used for forming electrode film 40,44 and P/E layer 42 can suitably be selected in disclosed those materials from various known materials with above-mentioned common U.S. Patent application co-pending.The thickness of the P/E unit of being made up of electrode film 40,44 and P/E layer 42 is generally 100 μ m or following.The thickness of each electrode film 40,44 is generally 20 μ m or following, best 5 μ m or following.The thickness of P/E layer 42 is preferably 50 μ m or following, and is better in 3 μ m to 40 mu m ranges, can stand enough big deflection displacement by apply a lower voltage to it so that be formed with the diaphragm portion of P/E unit 24 on it.
In the piezo-electric/electrostrictive membrane type element 20 that constitutes like this, wherein those E/P unit 24 are integrally formed on the diaphragm portion separately (26) of this diaphragm structure 22, this diaphragm portion (26) stands the deflection displacement effectively when 24 operations of the P/E unit of correspondence, pressure in this pressure chamber 38 raises thus, so that the fluid in this pressure chamber 38 is discharged from this chamber 38.
In the example of above-mentioned use according to diaphragm structure of the present invention, the all diaphragm portions (26) that have all P/E unit on it form convex shape, or outwards outstanding, thereby show effective rigidity, mechanical strength and natural resonance frequency that has improved, cause the work response that significantly improves.In addition, convex diaphragm portion (26) does not influence the sintering of the film of this P/E layer 42 on the outer surface that is formed on this diaphragm portion (26) and so on, and the displacement that converts corresponding diaphragm portion (26) efficiently to of the strain that occurs in this P/E unit 24 and pressure.In addition, when a plurality of P/E unit 24 is simultaneously operated, compare with a P/E unit 24 operated occasions are only arranged, the displacement of each diaphragm portion does not reduce basically.So displacement that should (these) diaphragm portion does not change because of the difference of the mode of operation of this (these) P/E unit 24, guarantees the displacement of this piezo-electric/electrostrictive membrane type element 20 and the height homogeneity of quality.This membrane component of Gou Chenging also can be as the transducer of the voltage signal that produces deflection displacement that an indication detects at this diaphragm portion place or power as mentioned above.
Though ceramic diaphragm structure of the present invention is advantageously used for parts of the piezo-electric/electrostrictive membrane type element of above example, but should be noted that, this diaphragm structure also can be used for the piezo-electric/electrostrictive membrane type element of other types, or is used for such as loud speaker, transducer, oscillator, resonator, filter, display device and transducer.In addition, this diaphragm structure can be advantageously used for parts of the piezoelectric actuator of monocrystalline, twin crystal or other types, these actuators are used for servo displacement component, pulsed drive motor and ultrasonic motor, control work " described in the application foundation of piezoelectric actuator 〉=(gloomy northern publishing house publishes) as the infield constitution of Japanese industry technique center.
Example
In order further to illustrate principle of the present invention, will some example of ceramic diaphragm structure of the present invention be described.Yet be noted that the present invention is not limited to the details of following example, but can implement that the professional and technical personnel can carry out these changes, modification and improvement and not depart from the scope of the present invention with various changes, modification and improvement.
Embodiment 1
Originally, prepare the test piece number 1-36 of 12 kinds of ceramic material samples (A-L) with the diaphragm structure 22 that is formed for the piezo-electric/electrostrictive membrane type element 20 as shown in Fig. 6 and Fig. 7.Though a spot of aluminium oxide works to promote this ceramic material sintering in adding this ceramic material (zirconia) to the time, the aluminium oxide of crossing volume hinders or hinders sintering.
Table 1
| Ceramic material | Additive | Amount of additives (weight %) | |
| A | Use 3mol% Y 2O 3Partially stabilized zirconia | Al 2O 3 | 0.5 |
| B | Al 2O 3 | 0.25 | |
| C | Al 2O 3 | 0.15 | |
| D | Al 2O 3 | 0 | |
| E | Use 3mol% Y 2O 3Partially stabilized zirconia | Al 2O 3 | 40 |
| F | Al 2O 3 | 20 | |
| G | Al 2O 3 | 10 | |
| H | Use 8mol%Y 2O 3Complete stable zirconia | Al 2O 3 | 0.5 |
| I | Al 2O 3 | 0 | |
| J | Aluminium oxide | ---- | ---- |
| K | Mullite | ---- | ---- |
| L | Spinelle | ---- | ---- |
Then, the Sample A-L with above-mentioned ceramic material forms the living thin slice with different-thickness value by a kind of commonsense method.The livings thin slice that forms like this stands cutting, machine work, punching and other are handled on demand then, so that be formed for some life bodies of shut 26, connecting plate 28 and dividing plate 30 of each test specimen of the diaphragm structure 22 of the piezo-electric/electrostrictive membrane type element 20 as shown in Fig. 6 and Fig. 7.By be the selected ceramic powder of 100 parts of volumes and total amount 60 parts of volumes as the polyvinyl butyral resin of adhesive with as the dibutyl phthalate of plasticizer, a kind of dispersant (on demand) that comprises anhydro sorbitol, and the toluene as solvent of 500 parts of volumes mixes with the mixture of isopropyl alcohol (volume 50: 50) and prepares the thickener that is used for forming these raw cooks.These compositions mixed 5 to 20 hours in a ball milling, resulting then thickener stands the degassing to be handled, so that form the living thin slice of drafting with a kind of scraper plate method, the thickener that is used in the living thin slice of shut 26 has the viscosity of 2000CPS and the thickener that is used for the living thin slice of connecting plate 28 and dividing plate 30 has the viscosity of 20000CPS.By adjust the time that these compositions mix in ball milling, perhaps adding anhydro sorbitol is dispersant is used for those living bodies of plate 26,28,30 with control density, perhaps give birth to the final firing temperature that thin slice finally is fired into plate 26,28,30, the shrinkage of those living thin slices that control obtains like this by controlling those.Incorporation time is long more, and then shrinkage is more little.Contain the dispersant of anhydro sorbitol by interpolation, or reduce the final firing temperature when firing those raw cooks, also reduce this shrinkage.
Give birth to thin slices by use those that state that ceramic material A is used for shut 26, connecting plate 28 and dividing plate 30 to L shaped one-tenth with upper type, so that the diaphragm structure 22 that has the test piece number 1-36 of combination of materials separately as shown in following table 2 and table 3 to be provided.For every kind of test specimen, it is superimposed mutually that those that are used for shut 26, connecting plate 28 and dividing plate 30 are given birth to thin slices, then under 100 ℃ with 200kgf/cm
2Hot pressing 1 minute is so that provide an integral body to give birth to laminated construction.In these test specimens, those living bodies that are used for connecting plate 28 and dividing plate 30 are to be formed by identical living thin slice.This integral body laminated construction that obtains like this as below kept three hours under the firing temperature as shown in table 4 and the table 5, thereby be fired into the diaphragm structure of drafting 22.For the test specimen with even number, the window 36 of the dividing plate 30 of diaphragm structure 22, or diaphragm portion have the circle of diameter 2mm.On the other hand, for the test specimen with odd number, window 36 or diaphragm portion have the rectangle of 0.5mm * 0.7mm.Each test specimen has three windows, and they leave the interval of 0.3mm mutually.In the occasion of rectangular window, the direction setting that the interval of this 0.3mm is extended along the minor face (0.5mm) of this rectangle.In table 4 below and the table 5, also express the living body that is used for shut 26 and be used for connecting plate 28 and the living body of dividing plate 30 between separately the difference of pre-sintering temperature and shrinkage poor, these difference are not used Δ T
70=T
70(substrate)-T
70(thin slice) and Δ S=S (substrate)-S (thin slice) expresses.
To ten samples of every kind of test specimen of the diaphragm structure that obtains like this, check the shape and the crackle of those diaphragm portions (26), and have the sample of convex diaphragm portion for those, evaluate the stability of this convex shape according to the variation of overhang.In other words, measure the overhang of the diaphragm portion of ten samples, and every kind of test specimen evaluation is become " outstanding ", " well " or " generally " according to the variation of this overhang in the middle of these ten samples." outstanding " refers to less variation, and " well " refers to medium variation, and " generally " refers to bigger variation.Evaluation result also is shown in table 4 and the table 5.
| Test piece number | Shut 26 | Connecting | ||||
| 1) | Particle size (μ m) | Thickness (μ m) 2) | 1) | Particle size (μ m) | Thickness (μ m) 3) | |
| * 1 | A | 0.05 | 13 | A | 0.7 | 100 |
| 2 | A | 0.05 | 13 | A | 1.0 | 100 |
| 3 | A | 0.05 | 13 | A | 1.0 | 100 |
| * 4 | A | 0.05 | 13 | G | 1.0 | 100 |
| 5 | A | 0.4 | 5 | G | 0.4 | 100 |
| 6 | A | 0.4 | 15 | G | 0.4 | 300 |
| 7 | A | 0.4 | 30 | G | 0.4 | 1000 |
| 8 | A | 0.4 | 10 | A | 0.4 | 300 |
| 9 | A | 0.4 | 10 | B | 0.4 | 300 |
| 10 | A | 0.4 | 10 | F | 0.2 | 300 |
| 11 | A | 0.4 | 10 | G | 0.4 | 300 |
| 12 | A | 0.4 | 10 | E | 0.2 | 300 |
| 13 | A | 0.4 | 10 | L | 0.05 | 300 |
| 14 | A | 0.4 | 13 | B | 0.7 | 100 |
| 15 | A | 0.4 | 13 | D | 0.4 | 100 |
| 16 | A | 0.4 | 13 | E | 0.2 | 100 |
| 17 | A | 0.4 | 13 | K | 0.2 | 100 |
| 18 | A | 0.7 | 10 | D | 0.7 | 300 |
| 19 | A | 0.7 | 10 | E | 0.2 | 300 |
| 20 | A | 0.7 | 10 | L | 0.02 | 300 |
Table 3
* reference examples 1) ceramic material 2) thickness 3 of shut 26 after it is fired) connecting plate 28 and the gross thickness of dividing plate 30 after they are fired
| Test piece number | Shut 26 | Connecting | ||||
| 1) | Particle size (μ m) | Thickness (μ m) 2) | 1) | Particle size (μ m) | Thickness (μ m) 3) | |
| 21 | A | 0.7 | 10 | L | 0.05 | 300 |
| 22 | B | 0.05 | 13 | K | 0.2 | 100 |
| *23 | B | 0.2 | 13 | K | 0.4 | 100 |
| *24 | B | 0.4 | 10 | J | 0.2 | 300 |
| *25 | B | 0.4 | 10 | A | 0.4 | 300 |
| 26 | B | 1.0 | 10 | K | 0.2 | 300 |
| 27 | B | 1.0 | 10 | K | 0.05 | 300 |
| *28 | C | 1.0 | 10 | K | 0.05 | 300 |
| *29 | D | 0.2 | 10 | A | 0.7 | 300 |
| 30 | D | 0.05 | 13 | D | 1.0 | 100 |
| 31 | F | 0.2 | 13 | F | 0.4 | 300 |
| *32 | H | 1.0 | 13 | L | 0.05 | 100 |
| 33 | H | 0.4 | 13 | I | 0.4 | 100 |
| 34 | I | 0.2 | 13 | H | 1.0 | 300 |
| 35 | J | 0.2 | 10 | J | 0.2 | 300 |
| 36 | B | 0.4 | 10 | C | 0.4 | 300 |
Table 4
*Reference examples
| Test piece number | ΔT 70 (℃) | ΔS (％) | Firing temperature (℃) | Diaphragm shapes | The stability of | |
| *1 | 150 | -15 | 1350 | Smooth | ----- | |
| 2 | 200 | -15 | 1450 | Convex surface | Well | |
| 3 | 200 | -17 | 1425 | Convex surface | Generally | |
| *4 | 260 | -25 | 1400 | Smooth | ----- | |
| 5 | 60 | 2 | 1450 | | Outstanding | |
| 6 | 60 | 1 | 1450 | Convex surface | Outstanding | |
| 7 | 60 | -2 | 1450 | | Outstanding | |
| 8 | 0 | -1 | 1450 | Convex surface | Generally | |
| 9 | 10 | 5 | 1450 | | Outstanding | |
| 10 | 10 | 0 | 1450 | Convex surface | Outstanding | |
| 11 | 60 | 2 | 1450 | | Outstanding | |
| 12 | 60 | 8 | 1450 | Convex surface | Well | |
| 13 | 250 | 13 | 1550 | Convex surface | Generally | |
| 14 | 60 | 0 | 1450 | Convex surface | Outstanding | |
| 15 | 100 | 0 | 1450 | | Outstanding | |
| 16 | 60 | 6 | 1550 | Convex surface | Well | |
| 17 | 210 | 0 | 1600 | Convex surface | Generally | |
| 18 | 150 | -5 | 1500 | Convex surface | Well | |
| 19 | 10 | 10 | 1450 | | Well | |
| 20 | 100 | 18 | 1550 | Convex surface | Generally |
Table 5
*Reference examples
| Test piece number | ΔT 70 (℃) | ΔS (％) | Firing temperature (℃) | Diaphragm shapes | The stability of convex shape | |
| 21 | 200 | 10 | 1600 | | Well | |
| 22 | 300 | 0 | 1600 | Convex surface | Generally | |
| *23 | 350 | 0 | 1650 | Crackle | ----- | |
| *24 | -10 | 7 | 1450 | Concave surface | ----- | |
| *25 | -10 | -1 | 1450 | Concave surface | ----- | |
| 26 | 100 | 12 | 1600 | Concave surface | Generally | |
| 27 | 0 | 15 | 1500 | Convex surface | Generally | |
| *28 | -10 | 15 | 1500 | Concave surface | ----- | |
| *29 | 70 | -10 | 1450 | Smooth | ----- | |
| 30 | 300 | -25 | 1500 | Convex surface | Generally | |
| 31 | 100 | -7 | 1475 | | Outstanding | |
| *32 | 150 | 21 | 1600 | Crackle | ----- | |
| 33 | 100 | 5 | 1500 | Concave surface | Outstanding | |
| 34 | 120 | -9 | 1450 | Convex surface | Generally | |
| 35 | 0 | 5 | 1450 | Convex surface | Generally | |
| 36 | 10 | 1 | 1450 | Convex surface | Outstanding |
Can understand from above result, when the living body that is used for shut 26 and the living body of the dividing plate 30 that is used for connecting plate 28 are selected so that satisfied difference Δ T about pre-sintering temperature in above combination
70With the formula (1) of the difference Δ S of shrinkage, when (1 ') and (1 "), the diaphragm portion of resulting diaphragm structure 22 (26) is advantageously eliminated crackle and depression, and forms convex shape, and is promptly outwards outstanding along the direction of leaving window 36.
Example 2
With with test piece number 1 in employee's identical materials made the another kind of example that has planar patch portion (26) but do not comprise the diaphragm structure 22 of connecting plate 28.Then, an aluminium oxide pin that has a convex shape is inserted each window 36 of this diaphragm structure 22 that obtains like this, so that this aluminium oxide pin applies a thrust to the inner surface of the diaphragm portion (26) of correspondence.Under this aluminium oxide pin insertion situation wherein, this diaphragm structure 22 was fired under 1350 ℃ three hours again, so that a diaphragm structure 22 that has convex diaphragm portion (26) is provided like this.With regard to this diaphragm structure 22 of stability assessment of the convex shape of these diaphragm portions, the result is " generally ".
The embodiment that covers those windows by this diaphragm portion wherein fully introduces the present invention, but the present invention also goes for the occasion that this diaphragm portion ground covers this window.
Claims (12)
1. ceramic diaphragm structure, this structure comprises that has at least one window (6; 36) ceramic substrate (4; 28; 30) and one superimposed in described ceramic substrate so that seal the ceramic film plate (8 of described at least one window; 26), described diaphragm plate is fired forming an integral sintered body with described ceramic substrate, and described diaphragm plate comprises respectively at least one diaphragm portion (10) that aligns with described at least one window, and this structure is characterised in that:
In described at least one diaphragm portion each is all outwards outstanding along the direction of leaving the window of a correspondence in described at least one window, to form a kind of convex shape.
2. ceramic diaphragm structure according to claim 1, wherein said ceramic film plate is formed by a kind of material, this material comprise a kind of from by stabilizing zirconia, PSZ, aluminium oxide, and the category formed of their mixture the main component selected.
3. ceramic diaphragm structure according to claim 1 and 2, wherein said ceramic substrate and described ceramic film plate have the average grain size that is not more than 5 μ m.
4. according to any one described ceramic diaphragm structure in claim 1 or 2, wherein said at least one diaphragm portion has the thickness that is not more than 30 μ m.
5. according to any one described ceramic diaphragm structure in claim 1 or 2, wherein said at least one diaphragm portion is made up of a kind of DB with relative density (bulk density/solid density) of at least 90%.
6. according to any one described ceramic diaphragm structure in claim 1 or 2, in wherein said at least one diaphragm portion each is all outwards outstanding, so that by the overhang h of the core of expressed described each diaphragm portion of y=(h/m) * 100 the percentage y of the length m of the short lines at the center by the described corresponding window in described at least one window is not less than 1%.
7. method of making ceramic diaphragm structure according to claim 1, the method comprising the steps of:
Prepare a living ceramic substrate (14) that at least one window (16) is arranged;
Prepare a thin potsherd (12) of giving birth to;
Described living ceramic sheet superimposed in described living ceramic substrate so that seal described at least one window, provide integral body to give birth to laminated construction whereby; And
Described living laminated construction is fired into an integral sintered body, so that described living ceramic sheet provides respectively at least one diaphragm portion (10) that aligns with described at least one window, in described at least one diaphragm portion each all forms convex shape when firing described living laminated construction, so that described each diaphragm portion is all outwards outstanding along the direction of leaving the window of a correspondence in described at least one window
Wherein said living ceramic substrate and described living ceramic sheet prepare like this, so that pre-sintering temperature and the shrinkage of each satisfies following formula in this living substrate and the living thin slice:
S (substrate)-S (thin slice) 〉=-0.08{T
70(substrate)-T
70(thin slice) }-1
0≤T
70(substrate)-T
70(thin slice)≤300
In S (substrate)-S (thin slice)≤20 formula, when S (substrate) and S (thin slice) representative are fired under the temperature that described living laminated construction is finally fired with living thin slice independently of each other when this living substrate, described living ceramic substrate and described living ceramic sheet shrinkage (%) separately, described shrinkage is to calculate according to measured lengths in the plane of this living substrate or thin slice, and T in the formula
70(substrate) and T
70(thin slice) representative during described living ceramic substrate and described living ceramic sheet are fired independently of each other, the shrinkage of described living ceramic substrate and described living ceramic sheet reach respectively S (substrate) and S (thin slice) 70% o'clock separately pre-sintering temperature (℃).
8. method according to claim 7, wherein said living ceramic substrate and described living ceramic sheet are prepared to and satisfy following formula:
S (substrate)-S (thin slice) 〉=-0.08{T
70(substrate)-T
70(thin slice) }+0.8
10≤T
70(substrate)-T
70(thin slice)≤200
S (substrate)-S (thin slice)≤10
9. method according to claim 8, wherein said living ceramic substrate and described living ceramic sheet are prepared to and satisfy following formula:
S (substrate)-S (thin slice) 〉=-0.08{T
70(substrate)-T
70(thin slice) }+0.8
10≤T
70(substrate)-T
70(thin slice)≤100
S (substrate)-S (thin slice)≤5
10. according to the method for claim 7-9 described in any one, wherein said living ceramic sheet before or after firing, comprise a kind of from by stabilizing zirconia, PSZ, aluminium oxide, and the category formed of their mixture the material selected, described material has the average particle size particle size of 0.05 to 1.0 μ m.
11., fired under the temperature of wherein said living laminated construction in 1200 ℃ to 1700 ℃ scopes according to the method for claim 7-9 described in any one.
12. a method of making according to the ceramic diaphragm structure described in the claim 1, the method comprising the steps of:
Prepare a living ceramic substrate (14) that at least one window (16) is arranged;
Prepare a thin potsherd (12) of giving birth to;
Described living ceramic sheet superimposed in described living ceramic substrate so that seal described at least one window, provide integral body to give birth to laminated construction whereby;
Described living laminated construction is fired into an integral sintered body, so that described living ceramic sheet at least one diaphragm portion (10) of providing respectively described at least one window with described living ceramic substrate to align; And
In the described integral sintered body of heating, each in described at least one diaphragm portion applies a pressure, so that described each diaphragm portion is all outwards outstanding along the direction of leaving the window of a correspondence in described at least one window.
Applications Claiming Priority (6)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18920394 | 1994-08-11 | ||
| JP189203/94 | 1994-08-11 | ||
| JP24117294A JP3162584B2 (en) | 1994-02-14 | 1994-10-05 | Piezoelectric / electrostrictive film element and method of manufacturing the same |
| JP241172/94 | 1994-10-05 | ||
| JP24431794A JP3366132B2 (en) | 1994-06-03 | 1994-10-07 | Ceramic diaphragm structure and method of manufacturing the same |
| JP244317/94 | 1994-10-07 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1119632A CN1119632A (en) | 1996-04-03 |
| CN1045231C true CN1045231C (en) | 1999-09-22 |
Family
ID=27326143
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN95109697A Expired - Fee Related CN1045231C (en) | 1994-08-11 | 1995-07-31 | Ceramic diaphragm structure having convex diaphragm portion and method of producing the same |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN1045231C (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0813254B1 (en) * | 1996-06-14 | 2001-10-17 | Ngk Insulators, Ltd. | Method for producing ceramic diaphragm structure |
| CN102941730B (en) * | 2012-08-27 | 2015-12-09 | 宁波凯普电子有限公司 | Ultrathin piezoelectric ceramic green compact diaphragm lamination sintering is every stick and painting method thereof |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0549270A (en) * | 1990-07-26 | 1993-02-26 | Ngk Insulators Ltd | Piezoelectric/electrostrictive actuator |
| EP0572230A2 (en) * | 1992-05-27 | 1993-12-01 | Ngk Insulators, Ltd. | Piezoelectric/electrostrictive actuator having integral ceramic base member and film-type piezoelectric/electrostrictive element(s) |
-
1995
- 1995-07-31 CN CN95109697A patent/CN1045231C/en not_active Expired - Fee Related
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0549270A (en) * | 1990-07-26 | 1993-02-26 | Ngk Insulators Ltd | Piezoelectric/electrostrictive actuator |
| EP0572230A2 (en) * | 1992-05-27 | 1993-12-01 | Ngk Insulators, Ltd. | Piezoelectric/electrostrictive actuator having integral ceramic base member and film-type piezoelectric/electrostrictive element(s) |
Also Published As
| Publication number | Publication date |
|---|---|
| CN1119632A (en) | 1996-04-03 |
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