CN104506059A - Inverter power supply device for high-power gas discharge electronic gun - Google Patents

Inverter power supply device for high-power gas discharge electronic gun Download PDF

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Publication number
CN104506059A
CN104506059A CN201410778975.7A CN201410778975A CN104506059A CN 104506059 A CN104506059 A CN 104506059A CN 201410778975 A CN201410778975 A CN 201410778975A CN 104506059 A CN104506059 A CN 104506059A
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circuit
bipolar transistor
insulated gate
gate bipolar
transformer
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CN104506059B (en
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许海鹰
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AVIC Manufacturing Technology Institute
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AVIC Beijing Aeronautical Manufacturing Technology Research Institute
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    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02M—APPARATUS FOR CONVERSION BETWEEN AC AND AC, BETWEEN AC AND DC, OR BETWEEN DC AND DC, AND FOR USE WITH MAINS OR SIMILAR POWER SUPPLY SYSTEMS; CONVERSION OF DC OR AC INPUT POWER INTO SURGE OUTPUT POWER; CONTROL OR REGULATION THEREOF
    • H02M5/00—Conversion of ac power input into ac power output, e.g. for change of voltage, for change of frequency, for change of number of phases
    • H02M5/40—Conversion of ac power input into ac power output, e.g. for change of voltage, for change of frequency, for change of number of phases with intermediate conversion into dc
    • H02M5/42—Conversion of ac power input into ac power output, e.g. for change of voltage, for change of frequency, for change of number of phases with intermediate conversion into dc by static converters
    • H02M5/44—Conversion of ac power input into ac power output, e.g. for change of voltage, for change of frequency, for change of number of phases with intermediate conversion into dc by static converters using discharge tubes or semiconductor devices to convert the intermediate dc into ac
    • H02M5/453—Conversion of ac power input into ac power output, e.g. for change of voltage, for change of frequency, for change of number of phases with intermediate conversion into dc by static converters using discharge tubes or semiconductor devices to convert the intermediate dc into ac using devices of a triode or transistor type requiring continuous application of a control signal
    • H02M5/458—Conversion of ac power input into ac power output, e.g. for change of voltage, for change of frequency, for change of number of phases with intermediate conversion into dc by static converters using discharge tubes or semiconductor devices to convert the intermediate dc into ac using devices of a triode or transistor type requiring continuous application of a control signal using semiconductor devices only
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02M—APPARATUS FOR CONVERSION BETWEEN AC AND AC, BETWEEN AC AND DC, OR BETWEEN DC AND DC, AND FOR USE WITH MAINS OR SIMILAR POWER SUPPLY SYSTEMS; CONVERSION OF DC OR AC INPUT POWER INTO SURGE OUTPUT POWER; CONTROL OR REGULATION THEREOF
    • H02M1/00—Details of apparatus for conversion
    • H02M1/12—Arrangements for reducing harmonics from ac input or output

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  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Inverter Devices (AREA)

Abstract

The invention provides an inverter power supply device for a high-power gas discharge electronic gun. The inverter power supply device comprises a first-stage rectifying and filtering circuit connected with a 380V power frequency alternating current, a first inverter bridge circuit connected with the first-stage rectifying and filtering circuit, a first voltage conversion and rectifying and filtering circuit connected with the first inverter bridge circuit, a first driving circuit and a first current sampling circuit which are connected with the first inverter bridge circuit, a first PWM (Pulse-Width Modulation) control circuit connected with the first current sampling circuit, a second inverter bridge circuit connected with the first voltage conversion and rectifying and filtering circuit, a second voltage conversion and rectifying and filtering circuit, a second driving circuit and a second current sampling circuit which are connected with the second inverter bridge circuit, a second PWM control circuit and a high voltage sampling circuit. By adopting the inverter power supply device provided by the invention, the interference of the discharge spike pulse of the electronic gun on a common frequency power network can be effectively restrained, and the working stability of a power supply is enhanced.

Description

A kind of inverter power supply device for high-power gas charging electron gun
Technical field
The present invention, about power technique fields, particularly about inverter power supply device technical field, is a kind of inverter power supply device for high-power gas charging electron gun concretely.
Background technology
Electronic torch melting is the melting technique grown up the eighties in 20th century, is a kind of advanced melting technique producing clean metallic.This technology is for smelting the precious metals such as titanium, niobium, molybdenum, platinum, zirconium.At present, the vacuum electron beam cold hearth melting technique of aviation revolving part, structural member titanium alloy material used is brought in air standard by the U.S., and domestic beginning adopts electronic torch melting technology to smelt titanium alloy.The nucleus equipment of electronic torch melting technology is electronic beam current generation systems, mainly comprises electron gun, accelerates high voltage source, beam-control(led) system.
At present, the electron gun of electronic beam current generation systems conventional in electron beam furnace is hot-cathode electric rifle, negative electrode is directly or indirectly heating, produces a large amount of hot electron, and thermionic emission measure can flow through the electric current of filament and bias voltage size realizes by beam-control(led) system by regulating.After hot electron is accelerated by the high voltage electric field applied between cathode in electron gun, anode, high velocity bombardment metal material, becomes heat energy by a large amount of kinetic transformation, makes metal material melting.
The rifle room vacuum level requirements of hot-cathode electric rifle is higher, and General Requirements reaches 10 -3more than Pa, with 10 of smelting furnace indoor -2pa vacuum degree difference is comparatively large, needs independently vacuum system.Life-span of hot cathode is general shorter, and the most long life is tens hours.Frequent replacing negative electrode will affect technological parameter, causes the quality of metal smelt unstable.And under the high metallic vapour environment of metal smelt, conventional hot-cathode electric rifle easily discharges, and is difficult to long-term stable operation.
Gas discharge electron gun belongs to cold-cathode gun, its basic functional principle passes into hydrogen in the chamber of electron gun, oxygen gas mixture, pressure is made to reach a few handkerchief or tens of handkerchief at zero point, at negative electrode, the high pressure of tens kilovolts is applied between anode, at negative electrode, gas discharge is produced between anode, form plasma, cation in plasma bombards water-cooled cathode surface under electric field action, produce secondary electron, electronics in plasma and the secondary electron of cathode emission are by negative electrode, high voltage electric field between anode accelerates, after the electromagnetism collecting system of electron gun focuses on, produce electron beam.
Compared with hot-cathode electric rifle, the electron beam producing method of gas discharge electron gun is unique, and cathode life is long, not strict to vacuum level requirements.At present, single rifle maximum power of gas discharge electron gun reaches 600kW, and cathode life reaches more than 1000 hours, in 10Pa ~ 10 -2pa all can normally work.Gas discharge electron gun does not need independent vacuum system, does not need frequently to change electrode.
The supporting high voltage source of hot-cathode electric rifle not only needs the high-tension circuit accelerating electronics, and needs the circuit of heated cathode, regulates the bias circuit of line.The bias circuit of heated cathode circuit, adjustment line is generally suspended in dozens or even hundreds of kilovolt and accelerates on the high-tension circuit of electronics.Heated cathode circuit is large with the design of transformer manufacturing technology difficulty of the bias circuit regulating line.Because needs circuit is more, make power supply architecture complicated, the space layout between each circuit high-pressure section circuit is unreasonable, and very easily guiding discharge, the equipment that affects normally works.In addition, need multicore high-tension cable to be connected with electron gun by power supply, cable connection terminal structure is complicated, and manufacturing technology difficulty is larger.
Compared with the high voltage source that hot-cathode electric rifle is supporting, the high voltage source of gas discharge electron gun is relatively succinct, only needs a high voltage source for ionized gas and accelerates electronics.
For the hundreds of KW high-power gas charging electron guns be applied in electronic torch melting furnace apparatus, if the pattern of rectification manufactures high voltage source after adopting power frequency boosting, then because step-up transformer power is large, make its volume extremely huge, iron loss, copper loss are serious, and power-efficient is low.Electron gun or high voltage source electric discharge, be directly coupled to former limit by power transformer, cause line voltage fluctuation, and interference miscellaneous equipment normally works.In addition, obtain level and smooth high-voltage dc voltage and export, need Large Copacity LC filter circuit could realize, the manufacture of hv filtering original paper, type selecting are all more difficult.
Adopt inversion transformation technique to manufacture and design the supporting high voltage source of high-power gas charging electron gun, frequency is brought up to a few kHz even tens kHz, effectively can reduce volume of transformer, reduce high voltage source loss.But adopt the high voltage source of rectifying and wave-filtering, inversion boosting, secondary rectifying and wave-filtering Model Design, still the inevitable discharge pulse spike by electron gun or high voltage source high-pressure side is coupled in electrical network.
At present, the supporting high voltage source power of electronic torch melting furnace apparatus high-power electron gun used generally all reaches hundreds of kilowatt, usually at more than 600kW, this just needs primary side current of transformer to reach more than 1000A, be difficult to realize with single power inverting transformer, i.e. enable realization, transformer to manufacture and design difficulty also very big.Primary side current of transformer reaches kilo-ampere, and estimated current capacity is greater than the switch element of 1000A, and operating frequency is all lower, is generally all in noise regions, makes power noise very large.Select the mode of many group inverters parallel connection, although can design requirement be met, need to carry out complicated current-sharing, Pressure and Control, make Power Management Design difficulty very large.
Larger for current beam smelting furnace equipment gases used electric discharge electron gun power, large and the job insecurity of tradition power frequency booster power design and manufacturing technology loss, the feature that needed for conventional inversion transformation technique, high-frequency and high-voltage high-power switch device range of choice is limited, a kind of high voltage inverting power source device used based on the electron beam furnace of large power cold cathode gas discharge electron gun is badly in need of in this area.
Summary of the invention
Larger in order to solve electronic torch melting furnace apparatus of the prior art gases used electric discharge electron gun power, large and the job insecurity of tradition power frequency booster power design and manufacturing technology loss, the difficult problem that needed for conventional inversion transformation technique, high-frequency and high-voltage high-power switch device range of choice is limited, the invention provides a kind of inverter power supply device for high-power gas charging electron gun, have employed two-stage inverter circuit, first order inversion is used for pressure regulation current limliting, the second level is used for inversion boosting, can effectively suppress the pulse of electron gun discharge tip to the interference of common frequency power network, improve the stability of power work.
The object of the invention is, provide a kind of inverter power supply device for high-power gas charging electron gun, described inverter power supply device comprises: first order current rectifying and wave filtering circuit 1 joining with 380V industrial-frequency alternating current; First inverter bridge circuit 2 joining with described first order current rectifying and wave filtering circuit 1; With joining first voltage transformation of described first inverter bridge circuit 2 and current rectifying and wave filtering circuit 3; First drive circuit 10 and first current sampling circuit 11 joining with described first inverter bridge circuit 2; First pwm control circuit 9 joining with described first current sampling circuit 11; With described first voltage transformation and current rectifying and wave filtering circuit 3 and joining first voltage sampling circuit 16 of the first pwm control circuit 9; With described first voltage transformation and the joining second inverter bridge circuit 4 of current rectifying and wave filtering circuit 3; With joining second voltage transformation of described second inverter bridge circuit 4 and current rectifying and wave filtering circuit 5; Second drive circuit 13 and second current sampling circuit 14 joining with described second inverter bridge circuit 4; Second pwm control circuit 12 joining with described second current sampling circuit 14; Respectively with described first pwm control circuit 9 and the joining high pressure sample circuit 7 of the second pwm control circuit 12.
In a preferred embodiment of the invention, described inverter power supply device also comprises: with described second voltage transformation and the joining current-limiting resistance 6 of current rectifying and wave filtering circuit 5; Described 380V industrial-frequency alternating current becomes 500V direct current through described first order current rectifying and wave filtering circuit 1, described 500V direct current through described first inverter bridge circuit 2 inversion, after described first voltage transformation and current rectifying and wave filtering circuit 3, be transformed into the direct current that 0 ~ 500V changes, again through described second inverter bridge circuit 4 inversion, be transformed into the adjustable voltage of 0 ~-30kV through the boosting of described second voltage transformation and current rectifying and wave filtering circuit 5 and rectifying and wave-filtering, export after eventually passing described current-limiting resistance 6.
In a preferred embodiment of the invention, described inverter power supply device also comprises: with described second voltage transformation and the joining line sample circuit 8 of current rectifying and wave filtering circuit 5, for gathering beam current signal, and described beam current signal is fed back to gas mass flow amount control circuit 15 joining with described line sample circuit 8; Described gas mass flow amount control circuit 15, for described beam current signal and the line preset are compared, after PID regulates, export control signal, described control signal is for adjusting the mixed gas flow be input in high-power gas charging electron gun.
In a preferred embodiment of the invention, described first current rectifying and wave filtering circuit 1 comprises: the first rectification circuit connected with the input of power frequency 380V alternating current, and described first rectification circuit is three-phase commutation bridge; The joining filter inductance of positive output end of one end and described first rectification circuit; The other end of described filter inductance is connected in circuit D point, and the negative output terminal of described first rectification circuit connects circuit J point; Be parallel to the filter capacitor between circuit D point and J point.
In a preferred embodiment of the invention, described first inverter bridge circuit 2 comprises the first insulated gate bipolar transistor, the second insulated gate bipolar transistor, the 3rd insulated gate bipolar transistor, the 4th insulated gate bipolar transistor, capacitance and current transformer, wherein, the collector electrode of described first insulated gate bipolar transistor connects with the collector electrode of the 3rd insulated gate bipolar transistor, the emitter of described first insulated gate bipolar transistor connects with the collector electrode of the second insulated gate bipolar transistor, the emitter of described 3rd insulated gate bipolar transistor connects with the collector electrode of the 4th insulated gate bipolar transistor, the emitter of described second insulated gate bipolar transistor connects with the emitter of the 4th insulated gate bipolar transistor, in described capacitance and described first current sampling circuit 11 current transformer coupled in series.
In a preferred embodiment of the invention, described first voltage transformation and current rectifying and wave filtering circuit 3 comprise the first transformer, second transformer, 3rd transformer, 4th transformer and the 5th transformer, second rectification circuit, 3rd rectification circuit, 4th rectification circuit, 5th rectification circuit and the 6th rectification circuit, filter inductance and filter capacitor, described first transformer, second transformer, 3rd transformer, connect successively in the former limit of the 4th transformer and the 5th transformer, described first transformer, second transformer, 3rd transformer, the secondary of the 4th transformer and the 5th transformer connects the second rectification circuit respectively, 3rd rectification circuit, 4th rectification circuit, 5th rectification circuit and the 6th rectification circuit, be attached to a M point after the positive output end of described second rectification circuit, the 3rd rectification circuit, the 4th rectification circuit, the 5th rectification circuit and the 6th rectification circuit is connected in parallel, after the negative output terminal of described second rectification circuit, the 3rd rectification circuit, the 4th rectification circuit, the 5th rectification circuit and the 6th rectification circuit is connected in parallel, be attached to a N point, one end of described filter inductance is connected to M point, and one end is connected to H in addition, described filter capacitor is connected in parallel between circuit H point and circuit N point.
In a preferred embodiment of the invention, described inverter power supply device also comprises the voltage sensor 17 be parallel between H point and N point, obtain voltage signal for the voltage of sampling after described first voltage transformation and current rectifying and wave filtering circuit 3, and described voltage signal is fed back to described first pwm control circuit 9.
In a preferred embodiment of the invention, described first drive circuit 10 is respectively to the first insulated gate bipolar transistor, second insulated gate bipolar transistor, 3rd insulated gate bipolar transistor, 4th insulated gate bipolar transistor exports pwm pulse signal, connect the first insulated gate bipolar transistor, the pwm signal of the 4th insulated gate bipolar transistor is identical, connect the second insulated gate bipolar transistor, the pwm signal of the 3rd insulated gate bipolar transistor is identical, drive the first insulated gate bipolar transistor, pwm signal and driving second insulated gate bipolar transistor of the 4th insulated gate bipolar transistor, the anti-phase connection of pwm signal of the 3rd insulated gate bipolar transistor.
In a preferred embodiment of the invention, described first pwm control circuit 9 comprises outer shroud PID regulating circuit, inner ring PID regulating circuit and PWM regulating circuit, wherein, described PWM regulating circuit, for receiving the current signal that described first current sampling circuit 11 gathers, the current signal described in adjustment is to be less than a set point; Described outer shroud PID regulating circuit, for receiving the high-voltage feedback signal of a high pressure Setting signal and described high pressure sample circuit 7 collection preset, and described high-voltage feedback signal and described high pressure Setting signal are compared, after PID regulates, export the inner ring PID regulating circuit in a regulated voltage signal to described first pwm control circuit 9; Described inner ring PID regulating circuit, for receiving the voltage signal of voltage signal and the described outer shroud PID regulating circuit output gathered by described first voltage sampling circuit 16, after PID process, exports described PWM regulating circuit to by regulated voltage signal; Described PWM regulating circuit, for producing a pwm signal according to described regulated voltage signal, described pwm signal through described first drive circuit 10 to change the first insulated gate bipolar transistor, the second insulated gate bipolar transistor, the 3rd insulated gate bipolar transistor, the 4th insulated gate bipolar transistor in described first inverter bridge circuit 2.
In a preferred embodiment of the invention, described second inverter bridge circuit 4 comprises the 5th insulated gate bipolar transistor, the 6th insulated gate bipolar transistor, the 7th insulated gate bipolar transistor, the 8th insulated gate bipolar transistor, capacitance and current transformer, wherein, the collector electrode of described 5th insulated gate bipolar transistor connects with the collector electrode of the 7th insulated gate bipolar transistor, the emitter of described 5th insulated gate bipolar transistor connects with the collector electrode of the 6th insulated gate bipolar transistor, the emitter of described 7th insulated gate bipolar transistor connects with the collector electrode of the 8th insulated gate bipolar transistor, the emitter of described 6th insulated gate bipolar transistor connects with the emitter of the 8th insulated gate bipolar transistor, in described capacitance and described second current sampling circuit 14 current transformer coupled in series.
In a preferred embodiment of the invention, described second voltage transformation and current rectifying and wave filtering circuit 5 comprise the 6th transformer, 7th transformer, 8th transformer, 9th transformer and the tenth transformer, 7th rectification circuit, 8th rectification circuit, 9th rectification circuit, tenth rectification circuit and the 11 rectification circuit, filter inductance and filter capacitor, described 6th transformer, 7th transformer, 8th transformer, the former limit of the 9th transformer and the tenth transformer is in parallel, described 6th transformer, 7th transformer, 8th transformer, the secondary of the 9th transformer and the tenth transformer connects the 7th rectification circuit respectively, 8th rectification circuit, 9th rectification circuit, tenth rectification circuit and the 11 rectification circuit, the anode of described 7th rectification circuit is connected to the negative terminal of the 8th rectification circuit, the anode of the 8th rectification circuit is connected to the negative terminal of the 9th rectification circuit, the anode of the 9th rectification circuit is connected to the negative terminal of the tenth rectification circuit, the anode of the tenth rectification circuit is connected to the negative terminal of the 11 rectification circuit, the positive ending grounding of the 11 rectification circuit, described filter capacitor is connected in parallel on the described negative terminal of the 7th rectification circuit and the anode of the 11 rectification circuit, the negative terminal of described 7th rectification circuit is connected after described current-limiting resistance 6 and is connected to output.
In a preferred embodiment of the invention, described second drive circuit 10 is respectively to the 5th insulated gate bipolar transistor, 6th insulated gate bipolar transistor, 7th insulated gate bipolar transistor, 8th insulated gate bipolar transistor exports pwm pulse signal, connect the 5th insulated gate bipolar transistor, the pwm signal of the 8th insulated gate bipolar transistor is identical, connect the 6th insulated gate bipolar transistor, the pwm signal of the 7th insulated gate bipolar transistor is identical, drive the 5th insulated gate bipolar transistor, pwm signal and driving the 6th insulated gate bipolar transistor of the 8th insulated gate bipolar transistor, the anti-phase connection of pwm signal of the 7th insulated gate bipolar transistor.
In a preferred embodiment of the invention, described current signal for gathering current signal, and is fed back to described second pwm control circuit 12 by described second current sampling circuit 14.
In a preferred embodiment of the invention, whether described second pwm control circuit 12 is for detecting described current signal more than a set point, when being judged as YES, the 5th insulated gate bipolar transistor in described second inverter bridge circuit 4, 6th insulated gate bipolar transistor, 7th insulated gate bipolar transistor, 8th insulated gate bipolar transistor works in over-current state, when described over-current state is more than 10 μ s, turn off the 5th insulated gate bipolar transistor in described second inverter bridge circuit 4, 6th insulated gate bipolar transistor, 7th insulated gate bipolar transistor, 8th insulated gate bipolar transistor.
In a preferred embodiment of the invention, described high-voltage signal for gathering high-voltage signal, and is fed back to described second pwm control circuit 12 by described high pressure sample circuit 7; Described second pwm control circuit 12, for when detect described high-voltage signal be greater than maximum set value and more than 0.1ms time, then turn off in described second inverter bridge circuit 4
5th insulated gate bipolar transistor, the 6th insulated gate bipolar transistor, the 7th insulated gate bipolar transistor, the 8th insulated gate bipolar transistor, again the pwm signal of full pulsewidth is exported after 1ms, the pwm signal being exported two groups of complementations by described second drive circuit 13 to control the 5th insulated gate bipolar transistor, the 8th insulated gate bipolar transistor and the 6th insulated gate bipolar transistor in described second inverter bridge circuit 4, the 7th insulated gate bipolar transistor replaces on/off
Described second pwm control circuit 12, for when detecting that described high-voltage signal returns to set point, export full pulsewidth, otherwise, when to detect for continuous 5 times described high pressure letter be greater than maximum set value and more than 0.1ms time, exporting PWM duty ratio is 0, closes the 5th insulated gate bipolar transistor in described second level inverter circuit 4, the 6th insulated gate bipolar transistor, the 7th insulated gate bipolar transistor, the 8th insulated gate bipolar transistor, simultaneously output alarm signal.
In a preferred embodiment of the invention, described current-limiting resistance 6 adopts high-power high voltage resistance series-parallel system to obtain.
In a preferred embodiment of the invention, described first transformer, the second transformer, the 3rd transformer, the 4th transformer and the former limit of the 5th transformer and the no-load voltage ratio of secondary are 1:5, and the power of described first transformer, the second transformer, the 3rd transformer, the 4th transformer and the 5th transformer is 60kW.
In a preferred embodiment of the invention, described 6th transformer, the 7th transformer, the 8th transformer, the 9th transformer and the former limit of the tenth transformer and the no-load voltage ratio of secondary are 1:12, and described 6th transformer, the 7th transformer, the 8th transformer, the 9th transformer and the tenth transformer are 60kW.
Beneficial effect of the present invention is, provide a kind of inverter power supply device for high-power gas charging electron gun, it is a kind of high voltage source adopting Novel AC-DC-AC-DC-AC-DC topological circuit structural design to manufacture high-power gas charging electron gun, have employed two-stage inverter circuit, first order inversion is used for pressure regulation current limliting, the second level is used for inversion boosting, can effectively suppress the pulse of electron gun discharge tip to the interference of common frequency power network, ensure high-power gas charging electron gun long-term stable operation, improve the reliability of the high voltage source work of gas discharge electron gun, stability.
For above and other object of the present invention, feature and advantage can be become apparent, preferred embodiment cited below particularly, and coordinate institute's accompanying drawings, be described in detail below.
Accompanying drawing explanation
In order to be illustrated more clearly in the embodiment of the present invention or technical scheme of the prior art, be briefly described to the accompanying drawing used required in embodiment or description of the prior art below, apparently, accompanying drawing in the following describes is only some embodiments of the present invention, for those of ordinary skill in the art, under the prerequisite not paying creative work, other accompanying drawing can also be obtained according to these accompanying drawings.
The circuit block diagram of the execution mode one of a kind of inverter power supply device for high-power gas charging electron gun that Fig. 1 provides for the embodiment of the present invention;
The circuit block diagram of the execution mode two of a kind of inverter power supply device for high-power gas charging electron gun that Fig. 2 provides for the embodiment of the present invention;
The circuit block diagram of the execution mode three of a kind of inverter power supply device for high-power gas charging electron gun that Fig. 3 provides for the embodiment of the present invention;
The topological circuit structure chart of a kind of inverter power supply device for high-power gas charging electron gun that Fig. 4 provides for the embodiment of the present invention;
Fig. 5 (a) is the PWM drive waveforms schematic diagram of IGBT Q1, IGBTQ4 in the first inverter bridge circuit;
Fig. 5 (b) is the PWM drive waveforms schematic diagram of IGBT Q2, IGBTQ3 in the first inverter bridge circuit;
Fig. 5 (c) is the PWM drive waveforms schematic diagram of IGBT Q5, IGBTQ8 in the second inverter bridge circuit;
Fig. 5 (d) is the PWM drive waveforms schematic diagram of IGBT Q6, IGBTQ7 in the second inverter bridge circuit.
Drawing reference numeral:
First order current rectifying and wave filtering circuit---1
First inverter bridge circuit---2
First voltage transformation and current rectifying and wave filtering circuit---3
Second inverter bridge circuit---4
Second voltage transformation and current rectifying and wave filtering circuit---5
Current-limiting resistance---6
High pressure sample circuit---7
Line sample circuit---8
First pwm control circuit---9
First drive circuit---10
First current sampling circuit---11
Second pwm control circuit---12
Second drive circuit---13
Second current sampling circuit---14
Gas mass flow amount control circuit---15
First voltage sampling circuit---16
Voltage sensor---17
Embodiment
Below in conjunction with the accompanying drawing in the embodiment of the present invention, be clearly and completely described the technical scheme in the embodiment of the present invention, obviously, described embodiment is only the present invention's part embodiment, instead of whole embodiments.Based on the embodiment in the present invention, those of ordinary skill in the art, not making the every other embodiment obtained under creative work prerequisite, belong to the scope of protection of the invention.
The present invention relates to a kind of inverter power supply device for high-power gas charging electron gun, specifically, be a kind ofly provide the inverter power supply device of high pressure for high-power gas charging electronic beam current generation systems, particularly relate to a kind of high voltage inverting power source device used based on the electron beam furnace of large power cold cathode gas discharge electron gun.
In order to ensure high-power gas charging electron gun long-term stable operation, improve reliability, the stability of the high voltage source work of gas discharge electron gun, the invention provides a kind of inverter power supply device for high-power gas charging electron gun, is the high voltage source adopting Novel AC-DC-AC-DC-AC-DC topological circuit structural design to manufacture high-power gas charging electron gun.
The circuit block diagram of the execution mode one of a kind of inverter power supply device for high-power gas charging electron gun that Fig. 1 provides for the embodiment of the present invention, as shown in Figure 1, in execution mode one, described inverter power supply device comprises:
First order current rectifying and wave filtering circuit 1 joining with 380V industrial-frequency alternating current;
First inverter bridge circuit 2 joining with described first order current rectifying and wave filtering circuit 1;
With joining first voltage transformation of described first inverter bridge circuit 2 and current rectifying and wave filtering circuit 3;
First drive circuit 10 and first current sampling circuit 11 joining with described first inverter bridge circuit 2;
First pwm control circuit 9 joining with described first current sampling circuit 11;
With described first voltage transformation and current rectifying and wave filtering circuit 3 and joining first voltage sampling circuit 16 of the first pwm control circuit 9;
With described first voltage transformation and the joining second inverter bridge circuit 4 of current rectifying and wave filtering circuit 3;
With joining second voltage transformation of described second inverter bridge circuit 4 and current rectifying and wave filtering circuit 5;
Second drive circuit 13 and second current sampling circuit 14 joining with described second inverter bridge circuit 4;
Second pwm control circuit 12 joining with described second current sampling circuit 14;
Respectively with described first pwm control circuit 9 and the joining high pressure sample circuit 7 of the second pwm control circuit 12.
The circuit block diagram of the execution mode two of a kind of inverter power supply device for high-power gas charging electron gun that Fig. 2 provides for the embodiment of the present invention, as shown in Figure 2, in execution mode two, described inverter power supply device also comprises:
With described second voltage transformation and the joining current-limiting resistance 6 of current rectifying and wave filtering circuit 5;
Described 380V industrial-frequency alternating current becomes 500V direct current through described first order current rectifying and wave filtering circuit 1, described 500V direct current through described first inverter bridge circuit 2 inversion, after described first voltage transformation and current rectifying and wave filtering circuit 3, be transformed into the direct current that 0 ~ 500V changes, again through described second inverter bridge circuit 4 inversion, be transformed into the adjustable voltage of 0 ~-30kV through the boosting of described second voltage transformation and current rectifying and wave filtering circuit 5 and rectifying and wave-filtering, export after eventually passing described current-limiting resistance 6.Be AC-DC-AC-DC-AC-DC from being input to output current mapping mode.
Described current-limiting resistance R3 is the 30 Ω/6kW resistance adopting high-power high voltage resistance series-parallel system to obtain, for reducing discharge pulse spike, protection power source.
The circuit block diagram of the execution mode three of a kind of inverter power supply device for high-power gas charging electron gun that Fig. 3 provides for the embodiment of the present invention, as shown in Figure 3, in execution mode three, described inverter power supply device also comprises:
With described second voltage transformation and the joining line sample circuit 8 of current rectifying and wave filtering circuit 5, for gathering beam current signal, and described beam current signal is fed back to gas mass flow amount control circuit 15 joining with described line sample circuit 8;
Described gas mass flow amount control circuit 15, for described beam current signal and the line preset are compared, after PID regulates, export control signal, described control signal is for adjusting the mixed gas flow be input in high-power gas charging electron gun.
The beam current signal IBf that line sample circuit 8 gathers feeds back to gas mass flow amount control circuit 15, described beam current signal and given line compare, regulate through the PID of gas mass flow amount control circuit, export and control letter conjunction, adjust the mixed gas flow be input in electron gun, make the electronic beam current exported remain stable.
Inverter power supply device maximum power 300kW provided by the invention, for the gas discharge electron gun of other power level, can increase or reduce the transformer in the first voltage transformation and current rectifying and wave filtering circuit and rectification circuit quantity thereof, adjust transformer efficiency in the second voltage transformation and current rectifying and wave filtering circuit and and rectification circuit capacity, and be the first inverter bridge circuit, the suitable insulated gate bipolar transistor matched in the second inverter bridge circuit, make electric source topology circuit key components capacity meet the demand of electron gun.
The topological circuit structure chart of a kind of inverter power supply device for high-power gas charging electron gun that Fig. 4 provides for the embodiment of the present invention, as shown in Figure 4, described first current rectifying and wave filtering circuit 1 comprises:
The first rectification circuit connected with the input of power frequency 380V alternating current, described first rectification circuit is three-phase commutation bridge;
The joining filter inductance of positive output end of one end and described first rectification circuit;
The other end of described filter inductance is connected in circuit D point, and the negative output terminal of described first rectification circuit connects circuit J point;
Be parallel to the filter capacitor between circuit D point and J point.
Namely in the specific embodiment of the present invention, the three-phase commutation bridge that the first rectification circuit MD1 in the first current rectifying and wave filtering circuit 1 is made up of heavy-duty diode; The connecting mode of each several part in first current rectifying and wave filtering circuit, U, V, W input of power frequency 380V alternating current connects 1,2,3 ends of MD1 respectively, "+" output of MD1 and one end of filter inductance L1 are connected in 4, the other end of inductance L 1 is connected in circuit D point, "-" of MD1 connects circuit J point, and filter capacitor C1 is parallel between circuit D point and J point.
As shown in Figure 4, described first inverter bridge circuit 2 comprises the first insulated gate bipolar transistor, the second insulated gate bipolar transistor, the 3rd insulated gate bipolar transistor, the 4th insulated gate bipolar transistor, capacitance and current transformer;
Wherein, the collector electrode of described first insulated gate bipolar transistor connects with the collector electrode of the 3rd insulated gate bipolar transistor, the emitter of described first insulated gate bipolar transistor connects with the collector electrode of the second insulated gate bipolar transistor, the emitter of described 3rd insulated gate bipolar transistor connects with the collector electrode of the 4th insulated gate bipolar transistor, the emitter of described second insulated gate bipolar transistor connects with the emitter of the 4th insulated gate bipolar transistor, in described capacitance and described first current sampling circuit 11 current transformer coupled in series.
Namely, in the specific embodiment of the present invention, the first inverter bridge circuit 2 mainly comprises insulated gate bipolar transistor Q1, insulated gate bipolar transistor Q2, insulated gate bipolar transistor Q3, insulated gate bipolar transistor Q4, capacitance Cx, current transformer Tf1.
Coupling method in first inverter bridge circuit 2 between each element is: the collector electrode C of collector electrode C, IGBT Q3 of IGBT Q1 is connected in circuit D point, the emitter E of IGBT Q1 connects the collector electrode C of IGBT Q2 in circuit A point, the emitter E of IGBTQ3 connects the collector electrode C of IGBT Q4 in circuit B point, the emitter E of IGBT Q2, the emitter E of IGBT Q4 are connected in circuit J point, after capacitance Cx connects with the current transformer Tf1 in the first current sampling circuit, be connected in circuit A point and F point.
As shown in Figure 4, described first voltage transformation and current rectifying and wave filtering circuit 3 comprise the first transformer, the second transformer, the 3rd transformer, the 4th transformer and the 5th transformer, the second rectification circuit, the 3rd rectification circuit, the 4th rectification circuit, the 5th rectification circuit and the 6th rectification circuit, filter inductance and filter capacitor
Connect successively in the former limit of described first transformer, the second transformer, the 3rd transformer, the 4th transformer and the 5th transformer, the secondary of described first transformer, the second transformer, the 3rd transformer, the 4th transformer and the 5th transformer connects the second rectification circuit, the 3rd rectification circuit, the 4th rectification circuit, the 5th rectification circuit and the 6th rectification circuit respectively;
Be attached to a M point after the positive output end of described second rectification circuit, the 3rd rectification circuit, the 4th rectification circuit, the 5th rectification circuit and the 6th rectification circuit is connected in parallel, after the negative output terminal of described second rectification circuit, the 3rd rectification circuit, the 4th rectification circuit, the 5th rectification circuit and the 6th rectification circuit is connected in parallel, be attached to a N point;
One end of described filter inductance is connected to M point, and one end is connected to H in addition;
Described filter capacitor is connected in parallel between circuit H point and circuit N point.
Namely, in the specific embodiment of the present invention, the former limit of transformer T1, T2, T3, T4, T5 of the first voltage transformation and current rectifying and wave filtering circuit 3 and the no-load voltage ratio of secondary are 1:5, and the power of described each transformer is 60kW; After described each transformer primary side is connected successively, the terminal do not connected in the former limit of transformer T1 is connected to circuit B point, the end do not connected in the former limit of transformer T5 is connected to circuit F point, the secondary of described each transformer connects rectification circuit MD2, MD3, MD4, MD5, MD6 respectively, be attached to " M " point after "+" output of each rectification circuit described is connected in parallel, after "-" output of each rectification circuit described is connected in parallel, be attached to " N " point; One end of filter inductance L2 is connected to " M " point, and one end is connected to " H " point in addition, and filter capacitor C2 is connected in parallel between circuit " H " point and circuit " N " point.
As shown in Figure 4, described inverter power supply device also comprises the voltage sensor 17 be parallel between H point and N point, obtain voltage signal for the voltage of sampling after described first voltage transformation and current rectifying and wave filtering circuit 3, and described voltage signal is fed back to described first pwm control circuit 9.
Namely described voltage after the first voltage transformation and current rectifying and wave filtering circuit 3 can be sampled by the voltage sensor 17 be parallel between " H " and " N " point, and the voltage signal UMf of sampling feeds back to the first pwm control circuit 9.
As shown in Figure 4, described first drive circuit 10 is respectively to the first insulated gate bipolar transistor, second insulated gate bipolar transistor, 3rd insulated gate bipolar transistor, 4th insulated gate bipolar transistor exports pwm pulse signal, connect the first insulated gate bipolar transistor, the pwm signal of the 4th insulated gate bipolar transistor is identical, connect the second insulated gate bipolar transistor, the pwm signal of the 3rd insulated gate bipolar transistor is identical, drive the first insulated gate bipolar transistor, pwm signal and driving second insulated gate bipolar transistor of the 4th insulated gate bipolar transistor, the anti-phase connection of pwm signal of the 3rd insulated gate bipolar transistor connects.
Namely the first drive circuit 10 exports 4 road pwm pulse signals, described pwm signal adjustable pulse width.The pwm signal of connection IGBT Q1, IGBT Q4 is identical; The pwm signal of connection IGBT Q2, IGBT Q3 is identical, and anti-phase with the described pwm signal of IGBT Q1, IGBT Q4 that drives.
Fig. 5 (a) is the PWM drive waveforms schematic diagram of IGBT Q1, IGBTQ4 in the first inverter bridge circuit, Fig. 5 (b) is the PWM drive waveforms schematic diagram of IGBT Q2, IGBTQ3 in the first inverter bridge circuit, Fig. 5 (c) is the PWM drive waveforms schematic diagram of IGBT Q5, IGBTQ8 in the second inverter bridge circuit, and Fig. 5 (d) is the PWM drive waveforms schematic diagram of IGBT Q6, IGBTQ7 in the second inverter bridge circuit.SD is wherein Dead Time.
As shown in Figure 4, described first pwm control circuit 9 comprises outer shroud PID regulating circuit, inner ring PID regulating circuit and PWM regulating circuit,
Wherein, described PWM regulating circuit, for receiving the current signal that described first current sampling circuit 11 gathers, the current signal described in adjustment is to be less than a set point;
Described outer shroud PID regulating circuit, for receiving the high-voltage feedback signal that the high pressure Setting signal that presets and described high pressure sample circuit (7) gather, and described high-voltage feedback signal and described high pressure Setting signal are compared, after PID regulates, export the inner ring PID regulating circuit in a regulated voltage signal to described first pwm control circuit 9;
Described inner ring PID regulating circuit, for receiving the voltage signal of voltage signal and the described outer shroud PID regulating circuit output gathered by described first voltage sampling circuit (16), after PID process, regulated voltage signal is exported to described PWM regulating circuit;
Described PWM regulating circuit, for producing a pwm signal according to described regulated voltage signal, described pwm signal through described first drive circuit 10 to change the service time of the first insulated gate bipolar transistor, the second insulated gate bipolar transistor, the 3rd insulated gate bipolar transistor, the 4th insulated gate bipolar transistor in described first inverter bridge circuit 2.
Namely the high-voltage feedback signal UHf that high pressure sample circuit 7 gathers feeds back to the outer shroud PID regulating circuit in the first pwm control circuit, high pressure Setting signal UHg is input to the outer shroud PID regulating circuit in the first pwm control circuit, compare with described high-voltage feedback signal UHf, regulate through PID, the regulated voltage signal Ug produced is input to the inner ring PID regulating circuit in the first pwm control circuit, inner ring PID regulating circuit in described first pwm control circuit receives the voltage signal Umf that the first voltage sampling circuit 16 gathers, after described voltage signal Umf and Ug carries out PID process, by described inner ring PID regulating circuit output voltage conditioning signal Ugg to PWM regulating circuit, the pwm signal that described PWM regulating circuit produces is through the first drive circuit, change the service time of insulated gate bipolar transistor in the first inverter bridge, make the voltage U M after the first voltage transformation and current rectifying and wave filtering circuit adjusted, thus it is adjusted to make to export high pressure UH.
The current signal If1 that first current sampling circuit 11 gathers feeds back to the PWM regulating circuit in the first pwm control circuit, and described PWM regulating circuit detects If1 and whether exceedes set point, if exceeded, reduces PWM pulsewidth, until described electric current I f1 is less than set point.
First pwm control circuit 9 comprises outer shroud PID regulating circuit, inner ring PID regulating circuit, PWM regulating circuit.The current signal If1 of the first current sampling circuit collection feeds back to the PWM regulating circuit in the first pwm control circuit, and described PWM regulating circuit detects If1 and whether exceedes set point, if exceeded, reduces PWM pulsewidth, until described electric current I f1 is less than set point.
As shown in Figure 4, described second inverter bridge circuit 4 comprises the 5th insulated gate bipolar transistor, the 6th insulated gate bipolar transistor, the 7th insulated gate bipolar transistor, the 8th insulated gate bipolar transistor, capacitance and current transformer;
Wherein, the collector electrode of described 5th insulated gate bipolar transistor connects with the collector electrode of the 7th insulated gate bipolar transistor, the emitter of described 5th insulated gate bipolar transistor connects with the collector electrode of the 6th insulated gate bipolar transistor, the emitter of described 7th insulated gate bipolar transistor connects with the collector electrode of the 8th insulated gate bipolar transistor, the emitter of described 6th insulated gate bipolar transistor connects with the emitter of the 8th insulated gate bipolar transistor, in described capacitance and described second current sampling circuit 14 current transformer coupled in series.
Namely the second inverter bridge circuit 4 mainly comprises IGBT Q5, IGBT Q6, IGBT Q7, IGBT Q8, capacitance Cy, current transformer Tf2;
Connection in second inverter bridge circuit 4 between each element is: the collector electrode C of collector electrode C, IGBT Q7 of IGBT Q5 is connected in circuit H point, the emitter E of IGBT Q5 connects the collector electrode C of IGBT Q6 in circuit G point, the emitter E of IGBT Q7 connects the collector electrode C of IGBT Q8 in circuit F point, the emitter E of IGBT Q6, the emitter E of IGBT Q8 are connected in circuit N point, after capacitance Cy connects with the current transformer Tf2 in the second current sampling circuit, be connected in circuit G point and P point.
As shown in Figure 4, described second voltage transformation and current rectifying and wave filtering circuit 5 comprise the 6th transformer, the 7th transformer, the 8th transformer, the 9th transformer and the tenth transformer, the 7th rectification circuit, the 8th rectification circuit, the 9th rectification circuit, the tenth rectification circuit and the 11 rectification circuit, filter inductance and filter capacitor
The former limit of described 6th transformer, the 7th transformer, the 8th transformer, the 9th transformer and the tenth transformer is in parallel, and the secondary of described 6th transformer, the 7th transformer, the 8th transformer, the 9th transformer and the tenth transformer connects the 7th rectification circuit, the 8th rectification circuit, the 9th rectification circuit, the tenth rectification circuit and the 11 rectification circuit respectively;
The anode of described 7th rectification circuit is connected to the negative terminal of the 8th rectification circuit, the anode of the 8th rectification circuit is connected to the negative terminal of the 9th rectification circuit, the anode of the 9th rectification circuit is connected to the negative terminal of the tenth rectification circuit, the anode of the tenth rectification circuit is connected to the negative terminal of the 11 rectification circuit, the positive ending grounding of the 11 rectification circuit;
Described filter capacitor is connected in parallel on the described negative terminal of the 7th rectification circuit and the anode of the 11 rectification circuit;
The negative terminal of described 7th rectification circuit is connected after described current-limiting resistance 6 and is connected to output.
Namely the former limit of transformer T6, T7, T8, T9, T10 of the second voltage transformation and current rectifying and wave filtering circuit 5 and the no-load voltage ratio of secondary are 1:12, and the power of described each transformer is 60kW, after described each transformer primary side parallel connection, one end is connected to " F " point, one end is connected to " P " point in addition, the secondary of described each transformer connects rectification circuit MD7 respectively, MD8, MD9, MD10, MD11, "+" end of rectification circuit MD7 is connected to "-" end of rectification circuit MD8, "+" end of rectification circuit MD8 is connected to "-" end of rectification circuit MD9, "+" end of rectification circuit MD9 is connected to "-" end of rectification circuit MD10, "+" end of rectification circuit MD10 is connected to "-" end of rectification circuit MD11, "+" end ground connection of rectification circuit MD11, filter capacitor C3 is connected in parallel on "-" end of rectification circuit MD7 and "+" end of rectification circuit MD11, output " X " is connected to after "-" end series limiting resistor R3 of rectification circuit MD7.
As shown in Figure 4, described second drive circuit 10 is respectively to the 5th insulated gate bipolar transistor, 6th insulated gate bipolar transistor, 7th insulated gate bipolar transistor, 8th insulated gate bipolar transistor exports pwm pulse signal, connect the 5th insulated gate bipolar transistor, the pwm signal of the 8th insulated gate bipolar transistor is identical, connect the 6th insulated gate bipolar transistor, the pwm signal of the 7th insulated gate bipolar transistor is identical, drive the 5th insulated gate bipolar transistor, pwm signal and driving the 6th insulated gate bipolar transistor of the 8th insulated gate bipolar transistor, the anti-phase connection of pwm signal of the 7th insulated gate bipolar transistor.
As shown in Figure 4, described current signal for gathering current signal, and is fed back to described second pwm control circuit 12 by described second current sampling circuit 14.Whether described second pwm control circuit 12 is for detecting described current signal more than a set point, when being judged as YES, IGBT Q5, IGBT Q6 in described second inverter bridge circuit 4, IGBT Q7, IGBT Q8 work in over-current state, when described over-current state is more than 10 μ s, turn off IGBT Q5, IGBT Q6, IGBT Q7, the IGBT Q8 in described second inverter bridge circuit 4.Namely the current signal If2 that the second current sampling circuit 14 gathers feeds back to the second pwm control circuit, second pwm control circuit detects If2 and whether exceedes set point, if exceeded, then in the second inverter bridge circuit, each IGBT works in over-current state, described over-current state is more than 10 μ s, then turn off all IGBT in the second inverter bridge circuit, over-current state disappears, then recover normal work.
The current signal If2 that second current sampling circuit 14 gathers feeds back to the second pwm control circuit 12, second pwm control circuit detects If2 and whether exceedes set point, if exceeded, then in the second inverter bridge circuit, each IGBT works in over-current state, described over-current state is more than 10 μ s, then turn off all IGBT in the second inverter bridge circuit, over-current state disappears, then recover normal work.
When the second pwm control circuit 12 detects that high-voltage signal UHf is greater than maximum set value more than 0.1ms, then turn off all IGBT in the second inverter bridge circuit, again full pulsewidth is exported after 1ms, when continuous 5 times detect that high-voltage signal UHf is greater than maximum set value more than 0.1ms, then the second pwm control circuit exports PWM duty ratio is 0, close all IGBT in the inverter circuit of the second level, output alarm signal, is fixed a breakdown by manual intervention simultaneously.
As shown in Figure 4, described high-voltage signal for gathering high-voltage signal, and is fed back to described second pwm control circuit 12 by described high pressure sample circuit 7;
Described second pwm control circuit 12, for when detect described high-voltage signal be greater than maximum set value and more than 0.1ms time, then turn off in described second inverter bridge circuit 4
5th insulated gate bipolar transistor, the 6th insulated gate bipolar transistor, the 7th insulated gate bipolar transistor, the 8th insulated gate bipolar transistor, again the pwm signal of full pulsewidth is exported after 1ms, the pwm signal being exported two groups of complementations by described second drive circuit 13 to control the 5th insulated gate bipolar transistor, the 8th insulated gate bipolar transistor and the 6th insulated gate bipolar transistor in described second inverter bridge circuit 4, the 7th insulated gate bipolar transistor replaces on/off
Described second pwm control circuit 12, for when detecting that described high-voltage signal returns to set point, export full pulsewidth, otherwise, when to detect for continuous 5 times described high pressure letter be greater than maximum set value and more than 0.1ms time, exporting PWM duty ratio is 0, closes the 5th insulated gate bipolar transistor in described second level inverter circuit 4, the 6th insulated gate bipolar transistor, the 7th insulated gate bipolar transistor, the 8th insulated gate bipolar transistor, simultaneously output alarm signal.
Namely the high-voltage signal UHf that high pressure sample circuit 7 gathers feeds back to the second pwm control circuit, when the second pwm control circuit detects that high-voltage signal UHf is greater than maximum set value more than 0.1ms, then turn off all IGBT in the second inverter bridge circuit, again the pwm signal of full pulsewidth is exported after 1ms, by the second drive circuit, the pwm signal exporting two groups of complementations controls the IGBT Q5 in the second inverter bridge circuit, IGBT Q8 and IGBT Q6, IGBT Q7 replaces on/off, when the second pwm control circuit detects that high-voltage signal UHf returns to stable set point, then the second pwm control circuit normally exports full pulsewidth.Otherwise when continuous 5 times detect that high-voltage signal UHf is greater than maximum set value more than 0.1ms, then the second pwm control circuit exports PWM duty ratio is 0, closes all IGBT in the inverter circuit of the second level, and output alarm signal, is fixed a breakdown by manual intervention simultaneously.
In sum, the invention provides a kind of inverter power supply device for high-power gas charging electron gun, it is a kind of high voltage source adopting Novel AC-DC-AC-DC-AC-DC topological circuit structural design to manufacture high-power gas charging electron gun, have employed two-stage inverter circuit, first order inversion is used for pressure regulation current limliting, the second level is used for inversion boosting, can effectively suppress the pulse of electron gun discharge tip to the interference of common frequency power network, ensure high-power gas charging electron gun long-term stable operation, improve reliability, the stability of the high voltage source work of gas discharge electron gun.
One of ordinary skill in the art will appreciate that, realize all or part of flow process in above-described embodiment, can have been come by analog circuit or digital circuit.
Those skilled in the art can also recognize that the various functions that the embodiment of the present invention is listed are the designing requirements realizing depending on specific application and whole inverter power supply device by hardware or software.Those skilled in the art for often kind of specifically application, can use the function described in the realization of various method, but this realization can should not be understood to the scope exceeding embodiment of the present invention protection.
Apply specific embodiment in the present invention to set forth principle of the present invention and execution mode, the explanation of above embodiment just understands method of the present invention and core concept thereof for helping; Meanwhile, for one of ordinary skill in the art, according to thought of the present invention, all will change in specific embodiments and applications, in sum, this description should not be construed as limitation of the present invention.

Claims (18)

1. for an inverter power supply device for high-power gas charging electron gun, it is characterized in that, described inverter power supply device comprises:
First order current rectifying and wave filtering circuit (1) joining with 380V industrial-frequency alternating current;
First inverter bridge circuit (2) joining with described first order current rectifying and wave filtering circuit (1);
With joining first voltage transformation of described first inverter bridge circuit (2) and current rectifying and wave filtering circuit (3);
With joining first drive circuit (10) of described first inverter bridge circuit (2) and the first current sampling circuit (11);
With described first current sampling circuit (11) and the joining first pulse width modulation (PWM) control circuit (9) of the first drive circuit (10);
With described first voltage transformation and current rectifying and wave filtering circuit (3) and joining first voltage sampling circuit (16) of the first pwm control circuit (9);
With described first voltage transformation and the joining second inverter bridge circuit (4) of current rectifying and wave filtering circuit (3);
With joining second voltage transformation of described second inverter bridge circuit (4) and current rectifying and wave filtering circuit (5);
With joining second drive circuit (13) of described second inverter bridge circuit (4) and the second current sampling circuit (14);
With described second current sampling circuit (14) and joining second pwm control circuit (12) of the second drive circuit (13);
Respectively with described first pwm control circuit (9) and the joining high pressure sample circuit (7) of the second pwm control circuit (12).
2. the inverter power supply device for high-power gas charging electron gun according to claim 1, is characterized in that, described inverter power supply device also comprises:
With described second voltage transformation and current rectifying and wave filtering circuit (5) joining current-limiting resistance (6);
Described 380V industrial-frequency alternating current becomes 500V direct current through described first order current rectifying and wave filtering circuit (1), described 500V direct current through described first inverter bridge circuit (2) inversion, after described first voltage transformation and current rectifying and wave filtering circuit (3), be transformed into the direct current that 0 ~ 500V changes, again through described second inverter bridge circuit (4) inversion, be transformed into the adjustable voltage of 0 ~-30kV through the boosting of described second voltage transformation and current rectifying and wave filtering circuit (5) and rectifying and wave-filtering, eventually pass described current-limiting resistance (6) and export afterwards.
3. the inverter power supply device for high-power gas charging electron gun according to claim 2, is characterized in that, described inverter power supply device also comprises:
With described second voltage transformation and the joining line sample circuit (8) of current rectifying and wave filtering circuit (5), for gathering beam current signal, and described beam current signal is fed back to gas mass flow amount control circuit (15) joining with described line sample circuit (8);
Described gas mass flow amount control circuit (15), for described beam current signal and the line preset are compared, after PID regulates, export control signal, described control signal is for adjusting the mixed gas flow be input in high-power gas charging electron gun.
4. the inverter power supply device for high-power gas charging electron gun according to Claims 2 or 3, is characterized in that, described first current rectifying and wave filtering circuit (1) comprising:
The first rectification circuit connected with the input of power frequency 380V alternating current, described first rectification circuit is three-phase commutation bridge;
The joining filter inductance of positive output end of one end and described first rectification circuit;
The other end of described filter inductance is connected in circuit D point, and the negative output terminal of described first rectification circuit connects circuit J point;
Be parallel to the filter capacitor between circuit D point and J point.
5. the inverter power supply device for high-power gas charging electron gun according to claim 4, it is characterized in that, described first inverter bridge circuit (2) comprises the first insulated gate bipolar transistor, the second insulated gate bipolar transistor, the 3rd insulated gate bipolar transistor, the 4th insulated gate bipolar transistor, capacitance and current transformer;
Wherein, the collector electrode of described first insulated gate bipolar transistor connects with the collector electrode of the 3rd insulated gate bipolar transistor, the emitter of described first insulated gate bipolar transistor connects with the collector electrode of the second insulated gate bipolar transistor, the emitter of described 3rd insulated gate bipolar transistor connects with the collector electrode of the 4th insulated gate bipolar transistor, the emitter of described second insulated gate bipolar transistor connects with the emitter of the 4th insulated gate bipolar transistor, described capacitance is connected with the current transformer of (11) in described first current sampling circuit.
6. according to claim 1 or 5 for the inverter power supply device of high-power gas charging electron gun, it is characterized in that, described first voltage transformation and current rectifying and wave filtering circuit (3) comprise the first transformer, the second transformer, the 3rd transformer, the 4th transformer and the 5th transformer, the second rectification circuit, the 3rd rectification circuit, the 4th rectification circuit, the 5th rectification circuit and the 6th rectification circuit, filter inductance and filter capacitor
Connect successively in the former limit of described first transformer, the second transformer, the 3rd transformer, the 4th transformer and the 5th transformer, the secondary of described first transformer, the second transformer, the 3rd transformer, the 4th transformer and the 5th transformer connects the second rectification circuit, the 3rd rectification circuit, the 4th rectification circuit, the 5th rectification circuit and the 6th rectification circuit respectively;
Be attached to a M point after the positive output end of described second rectification circuit, the 3rd rectification circuit, the 4th rectification circuit, the 5th rectification circuit and the 6th rectification circuit is connected in parallel, after the negative output terminal of described second rectification circuit, the 3rd rectification circuit, the 4th rectification circuit, the 5th rectification circuit and the 6th rectification circuit is connected in parallel, be attached to a N point;
One end of described filter inductance is connected to M point, and one end is connected to H in addition;
Described filter capacitor is connected in parallel between circuit H point and circuit N point.
7. the inverter power supply device for high-power gas charging electron gun according to claim 6, it is characterized in that, described inverter power supply device also comprises the voltage sensor (17) be parallel between H point and N point, obtain voltage signal for the voltage of sampling after described first voltage transformation and current rectifying and wave filtering circuit (3), and described voltage signal is fed back to described first pwm control circuit (9).
8. the inverter power supply device for high-power gas charging electron gun according to claim 6, it is characterized in that, described first drive circuit (10) is respectively to the first insulated gate bipolar transistor, second insulated gate bipolar transistor, 3rd insulated gate bipolar transistor, 4th insulated gate bipolar transistor exports pwm pulse signal, connect the first insulated gate bipolar transistor, the pwm signal of the 4th insulated gate bipolar transistor is identical, connect the second insulated gate bipolar transistor, the pwm signal of the 3rd insulated gate bipolar transistor is identical, drive the first insulated gate bipolar transistor, pwm signal and driving second insulated gate bipolar transistor of the 4th insulated gate bipolar transistor, the pwm signal of the 3rd insulated gate bipolar transistor is anti-phase.
9. the inverter power supply device for high-power gas charging electron gun according to claim 8, is characterized in that, described first pwm control circuit (9) comprises outer shroud PID regulating circuit, inner ring PID regulating circuit and PWM regulating circuit,
Wherein, described PWM regulating circuit, for receiving the current signal that described first current sampling circuit (11) gathers, the current signal described in adjustment is to be less than a set point;
Described outer shroud PID regulating circuit, for receiving the high-voltage feedback signal that the high pressure Setting signal that presets and described high pressure sample circuit (7) gather, and described high-voltage feedback signal and described high pressure Setting signal are compared, after PID regulates, export the inner ring PID regulating circuit in a regulated voltage signal to described first pwm control circuit (9);
Described inner ring PID regulating circuit, for receiving the voltage signal of voltage signal and the described outer shroud PID regulating circuit output gathered by described first voltage sampling circuit (16), after PID process, regulated voltage signal is exported to described PWM regulating circuit;
Described PWM regulating circuit, for producing a pwm signal according to described regulated voltage signal, described pwm signal through described first drive circuit (10) to change the service time of the first insulated gate bipolar transistor, the second insulated gate bipolar transistor, the 3rd insulated gate bipolar transistor, the 4th insulated gate bipolar transistor in described first inverter bridge circuit (2).
10. the inverter power supply device for high-power gas charging electron gun according to claim 8, it is characterized in that, described second inverter bridge circuit (4) comprises the 5th insulated gate bipolar transistor, the 6th insulated gate bipolar transistor, the 7th insulated gate bipolar transistor, the 8th insulated gate bipolar transistor, capacitance and current transformer;
Wherein, the collector electrode of described 5th insulated gate bipolar transistor connects with the collector electrode of the 7th insulated gate bipolar transistor, the emitter of described 5th insulated gate bipolar transistor connects with the collector electrode of the 6th insulated gate bipolar transistor, the emitter of described 7th insulated gate bipolar transistor connects with the collector electrode of the 8th insulated gate bipolar transistor, the emitter of described 6th insulated gate bipolar transistor connects with the emitter of the 8th insulated gate bipolar transistor, described capacitance is connected with the current transformer of (14) in described second current sampling circuit.
11. inverter power supply devices for high-power gas charging electron gun according to claim 10, it is characterized in that, described second voltage transformation and current rectifying and wave filtering circuit (5) comprise the 6th transformer, the 7th transformer, the 8th transformer, the 9th transformer and the tenth transformer, the 7th rectification circuit, the 8th rectification circuit, the 9th rectification circuit, the tenth rectification circuit and the 11 rectification circuit, filter inductance and filter capacitor
The former limit of described 6th transformer, the 7th transformer, the 8th transformer, the 9th transformer and the tenth transformer is in parallel, and the secondary of described 6th transformer, the 7th transformer, the 8th transformer, the 9th transformer and the tenth transformer connects the 7th rectification circuit, the 8th rectification circuit, the 9th rectification circuit, the tenth rectification circuit and the 11 rectification circuit respectively;
The anode of described 7th rectification circuit is connected to the negative terminal of the 8th rectification circuit, the anode of the 8th rectification circuit is connected to the negative terminal of the 9th rectification circuit, the anode of the 9th rectification circuit is connected to the negative terminal of the tenth rectification circuit, the anode of the tenth rectification circuit is connected to the negative terminal of the 11 rectification circuit, the positive ending grounding of the 11 rectification circuit;
Described filter capacitor is connected in parallel on the described negative terminal of the 7th rectification circuit and the anode of the 11 rectification circuit;
The negative terminal of described 7th rectification circuit is connected after described current-limiting resistance (6) and is connected to output.
12. inverter power supply devices for high-power gas charging electron gun according to claim 11, it is characterized in that, described second drive circuit (10) is respectively to the 5th insulated gate bipolar transistor, 6th insulated gate bipolar transistor, 7th insulated gate bipolar transistor, 8th insulated gate bipolar transistor exports pwm pulse signal, connect the 5th insulated gate bipolar transistor, the pwm signal of the 8th insulated gate bipolar transistor is identical, connect the 6th insulated gate bipolar transistor, the pwm signal of the 7th insulated gate bipolar transistor is identical, drive the 5th insulated gate bipolar transistor, pwm signal and driving the 6th insulated gate bipolar transistor of the 8th insulated gate bipolar transistor, the pwm signal of the 7th insulated gate bipolar transistor is anti-phase.
13. inverter power supply devices for high-power gas charging electron gun according to claim 12, it is characterized in that, described current signal for gathering current signal, and is fed back to described second pwm control circuit (12) by described second current sampling circuit (14).
14. inverter power supply devices for high-power gas charging electron gun according to claim 13, it is characterized in that, whether described second pwm control circuit (12) is for detecting described current signal more than a set point, when being judged as YES, the 5th insulated gate bipolar transistor in described second inverter bridge circuit (4), 6th insulated gate bipolar transistor, 7th insulated gate bipolar transistor, 8th insulated gate bipolar transistor works in over-current state, when described over-current state is more than 10 μ s, turn off the 5th insulated gate bipolar transistor in described second inverter bridge circuit (4), 6th insulated gate bipolar transistor, 7th insulated gate bipolar transistor, 8th insulated gate bipolar transistor.
15. inverter power supply devices for high-power gas charging electron gun according to claim 14, it is characterized in that, described high-voltage signal for gathering high-voltage signal, and is fed back to described second pwm control circuit (12) by described high pressure sample circuit (7);
Described second pwm control circuit (12), for when detect described high-voltage signal be greater than maximum set value and more than 0.1ms time, then turn off the 5th insulated gate bipolar transistor in described second inverter bridge circuit (4), 6th insulated gate bipolar transistor, 7th insulated gate bipolar transistor, 8th insulated gate bipolar transistor, again the pwm signal of full pulsewidth is exported after 1ms, the pwm signal of two groups of complementations is exported to control the 5th insulated gate bipolar transistor in described second inverter bridge circuit (4) by described second drive circuit (13), 8th insulated gate bipolar transistor and the 6th insulated gate bipolar transistor, 7th insulated gate bipolar transistor replaces on/off,
Described second pwm control circuit (12), for when detecting that described high-voltage signal returns to set point, export full pulsewidth, otherwise, when to detect for continuous 5 times described high pressure letter be greater than maximum set value and more than 0.1ms time, exporting PWM duty ratio is 0, close the 5th insulated gate bipolar transistor in described second level inverter circuit (4), the 6th insulated gate bipolar transistor, the 7th insulated gate bipolar transistor, the 8th insulated gate bipolar transistor, simultaneously output alarm signal.
16. inverter power supply devices for high-power gas charging electron gun according to claim 2, is characterized in that, described current-limiting resistance (6) adopts high-power high voltage resistance series-parallel system to obtain.
17. inverter power supply devices for high-power gas charging electron gun according to claim 6, it is characterized in that, described first transformer, the second transformer, the 3rd transformer, the 4th transformer and the former limit of the 5th transformer and the no-load voltage ratio of secondary are 1:5, and the power of described first transformer, the second transformer, the 3rd transformer, the 4th transformer and the 5th transformer is 60kW.
18. inverter power supply devices for high-power gas charging electron gun according to claim 11, it is characterized in that, described 6th transformer, the 7th transformer, the 8th transformer, the 9th transformer and the former limit of the tenth transformer and the no-load voltage ratio of secondary are 1:12, and described 6th transformer, the 7th transformer, the 8th transformer, the 9th transformer and the tenth transformer are 60kW.
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