CN104498890A - Liquid filling system for anti-fouling film coating - Google Patents
Liquid filling system for anti-fouling film coating Download PDFInfo
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- CN104498890A CN104498890A CN201410786745.5A CN201410786745A CN104498890A CN 104498890 A CN104498890 A CN 104498890A CN 201410786745 A CN201410786745 A CN 201410786745A CN 104498890 A CN104498890 A CN 104498890A
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- liquid
- valve
- medicine
- metering valve
- displacement metering
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/246—Replenishment of source material
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- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Coating Apparatus (AREA)
- Feeding, Discharge, Calcimining, Fusing, And Gas-Generation Devices (AREA)
Abstract
The invention relates to the field of vacuum film coating, especially relates to a liquid filling system for anti-fouling film coating and particularly relates to a device suitable for accurately measuring and filling a liquid-state material. The liquid filling system is characterized by at least comprising one dosing device, wherein the dosing device is composed of a dosing controller, a displacement metering valve and a dripping valve; the chemical liquid inlet of the displacement metering valve is communicated with an anti-fouling film material chemical liquid bottle; the chemical liquid outlet of the displacement metering valve is communicated with the dripping valve; the dripping opening of the dripping valve is connected into a crucible; the dosing controller is connected with the displacement metering valve and the dripping valve and used for controlling the displacement metering valve and the dripping valve respectively. The liquid filling system disclosed by the invention has the advantage that automatic vacuum dosing without the need of opening a cavity and breaking a vacuum can be carried out.
Description
Technical field
The present invention relates to field of vacuum coating, particularly relate to the liquid feeding system for anti-soil film plated film, be particularly applicable to liquid towards material and carry out accurate measurement and the device of filling.
Background technology
Anti-soil film has been applied in the multiple sealed cell such as touch-screen and camera lens.Especially, along with the development of information technology, market is for the demand rapid growth of touch-screen product in recent years.In order to increase the anti-fouling effect of the multiple photovoltaic based on touch-screen, being coated with anti-soil film on its surface has become requisite operation.
At present, anti-soil film generally adopts vacuum deposition method to carry out plated film.In order to tackle the surge of the market requirement, research and development level of automation continous way anti-soil film filming equipment that is high, that can realize uninterrupted production becomes and becomes more and more important.Anti-soil film plated film starting material can be adsorbed on by antifouling coating materials the solid tablet that carrier is formed, and can also be anti-soil film stoste.Wherein liquid antifouling coating materials is with its low cost be easy to accurate quantification and become the preferred of continuous coating.For the liquid-adding device of the antifouling coating materials of the liquid state in continous way coating equipment, there is the liquid-adding device adopting differential metering at present.But, there is following inconvenience in it: a, and each dosing setting regulates inconvenient, and along with the consumption of medicine bottle dose, the medicine precision of dripping relying on pressure reduction to control easily changes; B, under high vacuum transition vacuum tightness unstable, easily leak; C, because the volatility of anti-soil film organic solution and viscosity are comparatively large, when there being air contact, the medicine drop port of liquid-adding device easily blocks, need to solve by maintaining frequently.
Summary of the invention
The object of the invention is according to above-mentioned the deficiencies in the prior art, provide the liquid feeding system for anti-soil film plated film, the dosing plated film of accurate quantification is carried out by regulates liquid volumetric quantity liquid towards Coating Materials, to improve plated film precision, reducing the high cost because using solid-state tablet to cause, automatic ration can be realized, reliable closedown is not leaked.
The object of the invention realizes being completed by following technical scheme:
A kind of liquid feeding system for anti-soil film plated film, liquid in antifouling coating materials medicinal liquid bottle is filled in crucible, it is characterized in that: described liquid feeding system at least comprises a set of chemicals dosing plant, described chemicals dosing plant is made up of dosing controller, positive-displacement metering valve and medicine dripping valve, the liquid import of described positive-displacement metering valve is communicated with described antifouling coating materials medicinal liquid bottle, the medicine liquid outlet of described positive-displacement metering valve is communicated with described medicine dripping valve, the medicine drop port of described medicine dripping valve leads to described crucible, and described dosing controller is positive-displacement metering valve and described medicine dripping valve described in connection control respectively.
Described liquid feeding system comprises the described chemicals dosing plant of some covers, and the liquid import of the described positive-displacement metering valve in the described chemicals dosing plant of some covers is all communicated with described antifouling coating materials medicinal liquid bottle.
Described medicine dripping valve has Drainage pipe, the upper opening of described Drainage pipe is communicated with the medicine liquid outlet of described positive-displacement metering valve, the lower openings of described Drainage pipe is medicine drop port, in described medicine dripping valve, be positioned at described Drainage pipe upper opening place and be provided with a seal plug, control rising and falling of described seal plug by the described fluid controller that adds.
A needle seal is fixedly connected with bottom described seal plug, the Internal periphery shape of described needle seal and described Drainage pipe, size are coincide adaptive, the length of described needle seal is not less than the length of described Drainage pipe, and when described seal plug is plugged in the upper opening of described Drainage pipe, the end head of described needle seal stretches out in described medicine drop port.
Describedly add fluid controller controls the medicine liquid outlet of described positive-displacement metering valve keying by two-position five-way valve, and make this switching motion keep synchronous with the action of rising and falling of described seal plug.
Advantage of the present invention is: can carry out automatization, without the need to vacuum breaker dosing of beginning to speak, the dosing plated film of accurate quantification can be carried out by liquid towards Coating Materials, not only increase plated film precision, reduce the high cost because using solid-state tablet to cause simultaneously, effectively prevent under vacuum drip that medicine leaks, pressure instability and affect the phenomenon of quality of forming film, effectively to prevent blocking, exempt the cost of frequent maintenance maintenance, improve equipment mobility.
Accompanying drawing explanation
Fig. 1 is the first structural representation of the present invention;
Fig. 2 is the second structural representation of the present invention;
Fig. 3 is the structural representation of medicine dripping valve in the present invention.
Embodiment
Feature of the present invention and other correlated characteristic are described in further detail by embodiment below in conjunction with accompanying drawing, so that the understanding of technician of the same trade:
As Figure 1-3, marking 1-17 in figure is: upper industrial computer 1, add fluid controller 2, positive-displacement metering valve 3, liquid entrance 4, antifouling coating materials medicinal liquid bottle 5, medicine liquid outlet 6, medicine dripping valve 7, needle seal 8, crucible 9, Drainage pipe 10, two-position five-way valve 11, liquid line 12, pilot piping 13, gas piping 14, pressurized air gangway 15, seal plug 16, medicine drop port 17.
Embodiment one: as shown in Figure 1, is used for being used for holding in the crucible 9 of liquid when the liquid in antifouling coating materials medicinal liquid bottle 5 is filled into vacuum plating for the liquid feeding system of anti-soil film plated film in the present embodiment.Liquid feeding system comprises a set of liquid-adding device adding fluid controller 2 and be made up of positive-displacement metering valve 3 and medicine dripping valve 7.This liquid-adding device has transfusion line, pneumatic wire and control line, wherein transfusion line refers to the pipeline of transmission plated film liquid, pneumatic wire is the gas motion path in system, and these gases are the power of liquid motion, and control line refers to the circuit that by-pass valve control parts open and close.
Transfusion line: the liquid entrance 4 of positive-displacement metering valve 3 is communicated with to realize aspiration medicinal liquid by liquid line 12 formation with antifouling coating materials medicinal liquid bottle 5, and the medicine liquid outlet 6 of positive-displacement metering valve 3 is connected to realize transmitting liquid by liquid line 12 with the upper opening of the Drainage pipe 10 in medicine dripping valve 7.Positive-displacement metering valve 3 accurately can be set chemical feeding quantity.The accurate measurement of anti-soil film stoste plays an important role for coating effects, and amount of liquid medicine is inaccurate will cause anti-soil film thickness abnormity, affect the optical characteristics of optical element.The placement location of lower openings (medicine drop port 30) the aligning crucible 9 of Drainage pipe 10 adds injecting medical liquid to complete.
Pneumatic wire: the liquid entrance 4 on positive-displacement metering valve 3 is communicated with by gas piping 14 with two-position five-way valve 11 respectively with medicine liquid outlet 6 and medicine dripping valve 7, two-position five-way valve 11 extraneous enters tracheae by adding fluid controller 2 connection control and being communicated with.The liquid entrance 4 of positive-displacement metering valve 3 is also connected with antifouling coating materials medicinal liquid bottle 5, and antifouling coating materials medicinal liquid bottle 5 is communicated with one and enters tracheae, and this enters tracheae in order to be pressed in positive-displacement metering valve 3 by liquid entrance 4 by liquid.The gas that liquid in positive-displacement metering valve 3 is inputted by two-position five-way valve 11 is pressed in medicine dripping valve 7.The keying of medicine liquid outlet 6 and medicine dripping valve 7 keeps synchronous, and when namely medicine liquid outlet 6 is opened, medicine dripping valve 7 has been opened simultaneously and carried out liquid feeding to crucible 9.
Control line: add fluid controller 2 by each liquid volume added (amount of liquid medicine) in pilot piping 13 accurately connection control set volume formula metering valve 3.Add the working order that fluid controller 2 also controls two-position five-way valve 11, by controlling two-position five-way valve 11 with the adding procedure of accurately controlling medicinal liquid.
As shown in Figure 3, the bottom of medicine dripping valve 7 offers the Drainage pipe 10 of a hollow, the upper opening of Drainage pipe 10 is connected to transmit liquid with the medicine liquid outlet 6 of positive-displacement metering valve 3, the lower openings of Drainage pipe 10 is medicine drop port 17, medicine drop port 17 aims at crucible 9, plating solution container when crucible 9 is plated film.Have seal plug 16 above Drainage pipe 10 in hollow, seal plug 16 controls upper and lower rising and falling by two-position five-way valve 11, and the rising of seal plug 16, the action that falls act on and open or the upper opening of shutoff Drainage pipe 10.Adjacent facets between Drainage pipe 10 and seal plug 16 is provided with inclined-plane in correspondence with each other, is formed mutually spacing when contacting with each other with the adjacent facets both realizing, with ensure seal plug 16, the action that falls all can open or the upper opening of shutoff Drainage pipe 10 completely.The bottom of seal plug 16 is fixedly connected with a needle seal 8, the Internal periphery shape of the outer contour shape of needle seal 8, size and Drainage pipe 10, size are coincide adaptive, the length of needle seal 8 is not less than the length of Drainage pipe 10, when seal plug 16 controls to fall to being plugged in the upper opening of Drainage pipe 10 by two-position five-way valve 11, the end head of needle seal 8 stretches out in the medicine drop port 17 of Drainage pipe 10, and now Drainage pipe 10 is by needle seal 8 shutoff sealing completely.Medicine dripping valve 7 side is connected with gas piping 14, and gas piping 14 is the pneumatic wire of two-position five-way valve 11 pneumatic control seal plug 16.
The present embodiment is in the specific implementation: add fluid controller 2 when reality uses, can be aided with some upper control machines 1 and carry out instruction control, such as PLC upper computer or computer etc.
Add fluid controller 2 for the accurate setting to each liquid volume added, receive the instruction of upper industrial computer 1 simultaneously and coordinate dosing at appointment moment control positive-displacement metering valve 3 with medicine dripping valve 7.Positive-displacement metering valve 3 accurately can be set chemical feeding quantity.Medicine dripping valve 7 and positive-displacement metering valve 3 synchronization action; After dosing, medicine dripping valve 7 closes Leakage prevention automatically.Add fluid controller 2 by micro-chip as treater, man-machine interaction setting liquid volume added to be carried out by touch-screen, above connect an industrial computer instruction, and allow positive-displacement metering valve 3 and shut-off valve work asynchronously by predetermined set.The principle of work of positive-displacement metering valve 3 regulates dosing volume, suction quantitative volume liquid in to-and-fro movement by screw mandrel.Medicine dripping valve 7 coordinates the switch of positive-displacement metering valve and switch, avoids leaking; Simultaneously in medicine dripping valve 7, the fit structure of seal plug 16 and needle seal 8 can plating solution crystallization causes in Automatic clearance Drainage pipe 10 blocking.
The present embodiment has following workflow in the specific implementation:
1) upper industrial computer 1 sends and inhales medicine instruction, and add the liquid entrance 4 that fluid controller 2 controls positive-displacement metering valve 3 and open, after it aspirates quantitative liquid from anti-soil film stoste bottle 5, its liquid entrance 4 is closed.
2) upper industrial computer 1 sends dosing instruction, and add the medicine liquid outlet 6 that fluid controller 2 controls positive-displacement metering valve 3 and open, be injected into after in medicine dripping valve 7 until quantitative liquid, its medicine liquid outlet 6 is closed.
3) meanwhile, the liquid import of medicine dripping valve 7 controls to open by two-position five-way valve 11, seal plug 16 in medicine dripping valve 7 and needle seal 8 is controlled upwards mentions, liquid is injected into medicine dripping valve 7, after plunger exhausts the fluid into crucible 9, the needle seal 8 of medicine dripping valve 7 end head inserts apocenosis passage 10, completes an Automatic clearance passage.The needle seal 8 of medicine dripping valve end for Drainage pipe open and turn off with the medicine liquid outlet 6 of positive-displacement metering valve 3 open with turn off synchronous.
Wherein 2), 3) two steps carry out simultaneously, this is synchronously under the control adding fluid controller 2, is realized by two-position five-way valve 11.
Embodiment two: the difference that the present embodiment compares embodiment one is: liquid feeding system comprises the two cover liquid-adding devices adding fluid controller 2 and be made up of positive-displacement metering valve 3 and medicine dripping valve 7, namely upper industrial computer 1 can be comprised by a set of fluid controller 2(that adds) control two cover liquid-adding devices, often the positive-displacement metering valve 3 overlapped in liquid-adding device forms with antifouling coating materials medicinal liquid bottle 5 in parallel and is communicated with, and can extract plated film liquid respectively from same antifouling coating materials medicinal liquid bottle 5.And often overlap identical all with embodiment one of the mode of connection of remaining part in liquid-adding device, control mode and mode of operation, repeat no longer one by one.
Although elaborate the design of the object of the invention and embodiment with reference to accompanying drawing with above-described embodiment, but those of ordinary skill in the art can recognize, under the precondition not departing from claim limited range, still various improvement and conversion can be made to the present invention, as: adopt rly. or some other control modes to control volume rotary metering valve 3 or medicine dripping valve 7, increase and decrease the quantity etc. of the liquid-adding device be made up of positive-displacement metering valve 3 and medicine dripping valve 7, therefore do not repeat one by one at this.
Claims (5)
1. the liquid feeding system for anti-soil film plated film, liquid in antifouling coating materials medicinal liquid bottle is filled in crucible, it is characterized in that: described liquid feeding system at least comprises a set of chemicals dosing plant, described chemicals dosing plant is by dosing controller, positive-displacement metering valve and medicine dripping valve are formed, the liquid import of described positive-displacement metering valve is communicated with described antifouling coating materials medicinal liquid bottle, the medicine liquid outlet of described positive-displacement metering valve is communicated with described medicine dripping valve, the medicine drop port of described medicine dripping valve leads to described crucible, described dosing controller is positive-displacement metering valve and described medicine dripping valve described in connection control respectively.
2. a kind of liquid feeding system for anti-soil film plated film according to claim 1, it is characterized in that: described liquid feeding system comprises the described chemicals dosing plant of some covers, the liquid import of the described positive-displacement metering valve in the described chemicals dosing plant of some covers is all communicated with described antifouling coating materials medicinal liquid bottle.
3. a kind of liquid feeding system for anti-soil film plated film according to claim 1, it is characterized in that: described medicine dripping valve has Drainage pipe, the upper opening of described Drainage pipe is communicated with the medicine liquid outlet of described positive-displacement metering valve, the lower openings of described Drainage pipe is medicine drop port, in described medicine dripping valve, be positioned at described Drainage pipe upper opening place and be provided with a seal plug, control rising and falling of described seal plug by the described fluid controller that adds.
4. a kind of liquid feeding system for anti-soil film plated film according to claim 3, it is characterized in that: bottom described seal plug, be fixedly connected with a needle seal, the Internal periphery shape of described needle seal and described Drainage pipe, size are coincide adaptive, the length of described needle seal is not less than the length of described Drainage pipe, and when described seal plug is plugged in the upper opening of described Drainage pipe, the end head of described needle seal stretches out in described medicine drop port.
5. a kind of liquid feeding system for anti-soil film plated film according to claim 3, it is characterized in that: described in add fluid controller controls the medicine liquid outlet of described positive-displacement metering valve keying by two-position five-way valve, and make this switching motion keep synchronous with the action of rising and falling of described seal plug.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410786745.5A CN104498890B (en) | 2014-12-18 | 2014-12-18 | Liquid filling system for anti-fouling film coating |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410786745.5A CN104498890B (en) | 2014-12-18 | 2014-12-18 | Liquid filling system for anti-fouling film coating |
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| Publication Number | Publication Date |
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| CN104498890A true CN104498890A (en) | 2015-04-08 |
| CN104498890B CN104498890B (en) | 2017-02-22 |
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| CN201410786745.5A Active CN104498890B (en) | 2014-12-18 | 2014-12-18 | Liquid filling system for anti-fouling film coating |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105104068A (en) * | 2015-08-19 | 2015-12-02 | 安徽九禾农业发展有限公司 | Lemon planting method |
| CN109848005A (en) * | 2019-04-02 | 2019-06-07 | 深圳德诚达光电材料有限公司 | Vacuum coating equipment adds plated film pharmaceutical water systems automatically |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109718965A (en) * | 2017-10-30 | 2019-05-07 | 蓝思科技（长沙）有限公司 | A kind of control method and system spraying liquid coating materials |
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| US20130340678A1 (en) * | 2012-06-25 | 2013-12-26 | Tokyo Electron Limited | Gas supply apparatus and film forming apparatus |
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| CN204369983U (en) * | 2014-12-18 | 2015-06-03 | 光驰科技(上海)有限公司 | For the liquid feeding system of anti-soil film plated film |
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- 2014-12-18 CN CN201410786745.5A patent/CN104498890B/en active Active
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN1950541A (en) * | 2004-05-27 | 2007-04-18 | 塞德拉伯有限公司 | Method and apparatus for vacuum deposition by vaporizing metals and metal alloys |
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| US20130340678A1 (en) * | 2012-06-25 | 2013-12-26 | Tokyo Electron Limited | Gas supply apparatus and film forming apparatus |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105104068A (en) * | 2015-08-19 | 2015-12-02 | 安徽九禾农业发展有限公司 | Lemon planting method |
| CN109848005A (en) * | 2019-04-02 | 2019-06-07 | 深圳德诚达光电材料有限公司 | Vacuum coating equipment adds plated film pharmaceutical water systems automatically |
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| CN104498890B (en) | 2017-02-22 |
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