CN104034495A - Vacuum leak detection method and vacuum leak detection system for containers - Google Patents

Vacuum leak detection method and vacuum leak detection system for containers Download PDF

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Publication number
CN104034495A
CN104034495A CN201310070907.0A CN201310070907A CN104034495A CN 104034495 A CN104034495 A CN 104034495A CN 201310070907 A CN201310070907 A CN 201310070907A CN 104034495 A CN104034495 A CN 104034495A
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Prior art keywords
airtight chamber
vacuum
vacuum leak
bleed
container
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CN201310070907.0A
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Chinese (zh)
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王业洲
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Truking Technology Ltd
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Truking Technology Ltd
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Priority to CN201310070907.0A priority Critical patent/CN104034495A/en
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Abstract

The invention discloses a vacuum leak detection method and a vacuum leak detection system for containers. The vacuum leak detection method comprises the steps of placing a container to be detected in an airtight chamber, quantitatively pumping the airtight chamber, detecting the vacuum degree in the airtight chamber and judging whether the container leaks after a preset period of time, and the like. The vacuum leak detection system comprises an air pump, an airtight chamber used for accommodating an object to be detected, and a pumping channel connecting the air pump and the airtight chamber. A detection device used for detecting the vacuum degree is connected to the pumping channel. The vacuum leak detection system further comprises a quantitative control assembly used for control. The vacuum leak detection method and the vacuum leak detection system of the invention have the advantages of accurate and reliable detection, high detection precision, and the like.

Description

A kind of vacuum leak hunting method and vacuum leak detecting system of container
Technical field
The present invention relates to vacuum leak hunting technical field, be specifically related to a kind of vacuum leak hunting method and vacuum leak detecting system of container.
Background technology
In field of pharmaceutical machinery, plastic ampoule blowing embedding all-in-one train line mainly contains and extrudes system bottle the production procedure of plastic ampoule, embedding, the operations such as clout excision and leak detection, be sent to embedding station and complete after filling and sealing extruding ampoule bottle card that system bottle station makes, be resent to the excision (also can cut out and twist off groove at die cutting working position simultaneously) that die cutting working position carries out bottle card clout, the bottle card of excision clout is resent to leak detection station and hunts leak, so that the substandard product that has leakage is rejected, finally obtain having the bottle card finished product (single ampoule bottle can be twisted off out from bottle card finished product when use) of multiple ampoule bottles.
At present plastic ampoule bottle card being hunted leak is all generally to adopt vacuum leak hunting method, as shown in Figure 1, when prior art is carried out vacuum leak hunting to plastic ampoule, first plastic ampoule to be checked is placed in the suitable airtight chamber of a volume 1, then adopt aspiration pump 2(vacuum pump) take fast the air in airtight chamber 1 away, make the certain vacuum tightness (Fc represents by negative pressure) of the interior formation of airtight chamber 1, vacuum tightness in airtight chamber 1 shows by pressure vacuum gauge 3, wait for after setting-up time Tc, the variation of airtight chamber's 1 interior vacuum tightness is responded to by pressure transducer 4, pressure transducer 4 can feed back to PLC by pressure signal, if pressure transducer 4 detects that it (is between Fi and Fc that the interior vacuum tightness of airtight chamber 1 still remains in the threshold value of setting after Tc, Fi is that plastic ampoule does not exist the minimum vacuum tightness allowing while leakage), illustrate that plastic ampoule does not exist leakage, for specification product, PLC does not send the instruction of controlling rejection device action, otherwise illustrate that plastic ampoule exists leakage, for substandard product, PLC sends the action of instruction control rejection device, this substandard product is rejected.
But, there is a very serious drawback in existing vacuum detecting method, it is only confined to occur there is finedraw or pore that the plastic ampoule of little leakage hunts leak, while there is large leakage situation when plastic ampoule badly broken, cannot detect, cause this kind of plastic ampoule to be mistaken for specification product.Referring to Fig. 2, the change curve of vacuum tightness in airtight chamber when a represents plastic ampoule without leakage, the change curve of vacuum tightness in airtight chamber when b represents that plastic ampoule exists little leakage, the change curve of vacuum tightness in airtight chamber when line c represents to have great Lou, can find out in the time that plastic ampoule exists gross leak in airtight chamber that vacuum tightness is still between Fi and Fc.This is due in the situation that plastic ampoule exists large leakage, when airtight chamber is vacuumized, in plastic ampoule, also can form fast subnormal ambient, vacuum tightness in plastic ampoule is identical with the vacuum tightness in airtight chamber, after elapsed time Tc, vacuum tightness in airtight chamber still can keep in allowed limits, thereby causes erroneous judgement.
Summary of the invention
The technical problem to be solved in the present invention is to overcome the deficiency that prior art exists, provide a kind of detection accurately and reliably, vacuum leak hunting method and the vacuum leak detecting system of container that accuracy of detection is high.
For solving the problems of the technologies described above, the present invention by the following technical solutions:
A vacuum leak hunting method for container, comprises the following steps:
(1) container to be checked is placed in to an airtight chamber;
(2) airtight chamber is quantitatively bled, make formation negative pressure in airtight chamber;
(3) keep airtight chamber's sealing, after waiting for Preset Time, detect the vacuum tightness in airtight chamber, and the vacuum tightness of detection and predetermined threshold value are compared, judge according to comparative result whether container exists leakage, basis for estimation is, if the vacuum tightness detecting is in predetermined threshold value, container is without leakage, otherwise container exists and leaks.
As vacuum leak hunting further improvements in methods of the present invention:
Described container is plastic ampoule, and the volume that described rate of air sucked in required of quantitatively bleeding is less than airtight chamber deducts volume of a container to be checked.
Vacuum leak detecting system of the present invention comprises aspiration pump, is used for holding the airtight chamber of examining object and connecting the bleed-off passage of aspiration pump and airtight chamber, and a pick-up unit is connected on bleed-off passage, also comprises the quantitative Control Component for controlling rate of air sucked in required.
Further improvement as vacuum leak detecting system of the present invention:
Described quantitative Control Component is flowmeter.
Described flowmeter is located at the endpiece of aspiration pump.
The endpiece of described aspiration pump is also provided with safety valve.
Described airtight chamber is coordinated and is formed by the first counterpart and the second counterpart, and described the first counterpart is provided with the cavity of an end opening, and described the second counterpart fits in the openend of described cavity, and is provided with O-ring seal between the first counterpart and the second counterpart.
Described detection components is pressure vacuum gauge and/or pressure transducer.
Described bleed-off passage be provided with have connect bleed, bleed when aspiration pump after the operation valve of pressurize and pressurize final vacuum triple functions.
Described airtight chamber is provided with multiple, and each airtight chamber all connects a bleed-off passage, and all bleed-off passages are directly connected with aspiration pump or are connected with aspiration pump by a main channel.
Compared with prior art, the invention has the advantages that: the vacuum leak hunting method of container of the present invention can detect the container that has large leakage situation, avoids the generation of flase drop, than traditional detection method, it detects accurately and reliably, accuracy of detection is high.Vacuum leak hunting of the present invention mechanism is simple in structure, easy to implement.
Brief description of the drawings
Fig. 1 is the structural representation of existing vacuum leak detecting system.
Fig. 2 is the schematic diagram of existing vacuum leak hunting method.
Fig. 3 is the sequential chart of vacuum leak hunting method of the present invention.
Fig. 4 is the schematic diagram of vacuum leak hunting method of the present invention.
Fig. 5 is the structural representation of vacuum leak detecting system embodiment 1 of the present invention.
Fig. 6 is the structural representation of vacuum leak detecting system embodiment 2 of the present invention.
Fig. 7 is the structural representation of vacuum leak detecting system embodiment 3 of the present invention.
Marginal data:
1, airtight chamber; 2, aspiration pump; 3, pressure vacuum gauge; 4, pressure transducer; 5, flowmeter; 6, safety valve; 7, the first counterpart; 8, the second counterpart; 9, bleed-off passage; 10, plastic ampoule; 11, operation valve; 12, O-ring seal; 13, main channel.
Embodiment
Below with reference to the drawings and specific embodiments, the present invention is described in further detail.
As shown in Figures 3 to 5, the vacuum leak hunting method of the present embodiment container, for the leak detection of plastic ampoule 10, comprises the following steps,
(1) plastic ampoule 10 to be checked is placed in to the suitable airtight chamber of a volume 1;
(2) airtight chamber 1 is quantitatively bled, the volume that rate of air sucked in required is less than airtight chamber 1 deducts the volume of plastic ampoule 10, only pumps the air of airtight chamber's 1 interior part, makes the interior formation negative pressure of airtight chamber 1;
(3) keep airtight chamber 1 to seal, wait for after preset time T c, detect the vacuum tightness in airtight chamber 1, and the vacuum tightness of detection and predetermined threshold value are compared, judge according to comparative result whether plastic ampoule 10 exists leakage, basis for estimation is, if the vacuum tightness detecting is in predetermined threshold value, plastic ampoule 10 nothings are leaked, otherwise plastic ampoule 10 exists leakage.
Above-mentioned preset time T c and predetermined threshold value are all determined according to parameters such as the volume of the volume of airtight chamber 1, plastic ampoule 10 and the rates of air sucked in required to airtight chamber 1 (vacuum tightness after bleeding).
Vacuum leak hunting method of the present invention adopts the method for quantitatively bleeding to make the interior formation negative pressure of airtight chamber 1, owing to quantitatively bleeding as pumping the air of airtight chamber's 1 interior fixed amount, and the volume that rate of air sucked in required is less than airtight chamber 1 deducts the volume of plastic ampoule 10, after having bled, in airtight chamber 1, still retain portion of air, but can form a negative pressure, there is certain vacuum tightness.Suppose that plastic ampoule 10 is without leaking, in the space after at every turn quantitatively bleeding between airtight chamber 1 and plastic ampoule 10 to have amount constant, the vacuum tightness in airtight chamber 1 is a fixed value.If plastic ampoule 10 exists large leakage, in quantitatively bleeding, the encapsulant in plastic ampoule 10 enters the space between airtight chamber 1 and plastic ampoule 10, makes low vacuum in airtight chamber 1 in aforesaid fixed value.If plastic ampoule 10 exists little leakage, after quantitatively bleeding, the material to be encapsulated in plastic ampoule 10 can enter airtight chamber 1 slowly, and the vacuum tightness in final airtight chamber 1 also can be lower than aforementioned fixed value after preset time T c.
Referring to Fig. 4, when in figure, Fc represents plastic ampoule 10 without leakage, vacuum tightness after airtight chamber 1 is quantitatively bled, Fi represents after preset time T c, judge plastic ampoule 10 without leak the minimum vacuum tightness in the airtight chamber that allows 1, the predetermined threshold value of the present embodiment is vacuum tightness being greater than Fi, is less than a scope of Fc.The change curve of airtight chamber's 1 interior vacuum tightness when a is plastic ampoule 10 nothing leakage in figure, visible a line is all positioned on Fi within the whole Tc time period, i.e. and the variation of airtight chamber's 1 interior vacuum tightness remains in predetermined threshold, and there is not leakage in plastic ampoule 10; In figure, b is the change curve of plastic ampoule 10 airtight chamber 1 interior vacuum tightness while there is little leakage, visible b line forms and intersects with Fi, within the Tc time, the material to be encapsulated in plastic ampoule 10 has entered airtight chamber 1 slowly, causes the interior vacuum tightness of airtight chamber 1 to drop to below Fi; In figure, c is the change curve of plastic ampoule 10 airtight chamber's 1 interior vacuum tightness while there is gross leak, visible c line was all positioned under Fi in the whole Tc time period after bleeding, after quantitatively bleeding, the material to be encapsulated of plastic ampoule 10 enters airtight chamber 1 fast, makes the vacuum tightness in airtight chamber 1 not reach all the time Fi.
As can be seen here, the vacuum leak hunting method of container of the present invention not only can detect the container that has little leakage, can also detect and have the large container leaking, can avoid the generation of flase drop completely, than traditional detection method, it detects accurately and reliably, accuracy of detection is high, does not have the problem of flase drop.
vacuum leak detecting system embodiment 1:
As shown in Figure 5, the vacuum leak detecting system of the present embodiment comprises aspiration pump 2, is used for holding the airtight chamber 1 of examining object (plastic ampoule 10) and connecting the bleed-off passage 9 of aspiration pump 2 and airtight chamber 1, on bleed-off passage 9, be connected with a pick-up unit for detection of vacuum tightness, on bleed-off passage 9, be also provided with the quantitative Control Component for controlling rate of air sucked in required, this quantitative Control Component adopts flowmeter 5.When work, aspiration pump 2 is bled to airtight chamber 1, and controls the amount of bleeding by flowmeter 5; Pick-up unit detects the vacuum tightness detecting in airtight chamber 1.
In the present embodiment, pick-up unit is a pressure vacuum gauge 3 and a pressure transducer 4, and wherein, pressure transducer 4 can detect the vacuum tightness in airtight chamber 1, and by signal feedback to control gear, pressure vacuum gauge 3 can directly show the vacuum tightness in airtight chamber 1.In other embodiments, pick-up unit can be only also a pressure vacuum gauge 3 or be only a pressure transducer 4.
In the present embodiment, flowmeter 5 is located at the endpiece (gas outlet) of aspiration pump 2.Meanwhile, the endpiece of aspiration pump 2 is also provided with safety valve 6, to guarantee that in exhaust pipe, pressure is relatively stable, is convenient to realize the precision of quantitatively bleeding and controlling rate of air sucked in required.As shown in Figure 5, aspiration pump 2, flowmeter 5 and safety valve 6 set gradually along bleed-off passage 9.
In the present embodiment, airtight chamber 1 is coordinated and is formed by the first counterpart 7 and the second counterpart 8, specifically, the first counterpart 7 is provided with the cavity of an end opening, the second counterpart 8 fits in the openend of cavity, between the first counterpart 7 and the second counterpart 8, is provided with O-ring seal 12, in the time that the first counterpart 7 and the second counterpart 8 coordinate, O-ring seal 12 is compressed by the first counterpart 7 and the second counterpart 8, thereby forms airtight chamber 1.
In the present embodiment, bleed-off passage 9 is communicated with airtight chamber 1 through the second counterpart 8, and as shown in Figure 5, the second counterpart 8 is provided with and is communicated with airtight chamber 1 and outside passage, and this passage is as a part for bleed-off passage 9.In other embodiments, bleed-off passage 9 also can be communicated with airtight chamber 1 through the first counterpart 7.
vacuum leak detecting system embodiment 2:
As shown in Figure 6, the vacuum leak detecting system of the present embodiment is substantially the same manner as Example 1, different, and the present embodiment is also provided with an operation valve 11 on bleed-off passage 9, and operation valve 11 can be controlled the break-make of bleed-off passage 9, and it can adopt solenoid valve.In the time that operation valve 11 is communicated with bleed-off passage 9, can vacuumize airtight chamber 1, in the time that operation valve 11 disconnects bleed-off passage 9, can carry out pressurize to the airtight chamber 1 after bleeding, after having detected, then control operation valve 11 and be communicated with bleed-off passage 9 and can carry out exhaust.
vacuum leak detecting system embodiment 3:
As shown in Figure 7, the present embodiment is substantially the same manner as Example 2, different is, in the vacuum leak detecting system of the present embodiment, be provided with altogether four airtight chamber 1, each airtight chamber 1 all connects a bleed-off passage 9, and all bleed-off passages 9 are connected with aspiration pump 2 by a main channel 13, and main channel 13 is communicated with the entrance point (air intake opening) of aspiration pump 2, one end of each bleed-off passage 9 is communicated with airtight chamber 1, and the other end is communicated with main channel 13.On every bleed-off passage 9, be equipped with a pressure vacuum gauge 3, pressure transducer 4 and an operation valve 11, when use, aspiration pump 2 vacuumizes four airtight chamber 1 simultaneously.On every bleed-off passage 9, pressure vacuum gauge 3 and pressure transducer 4 detect the vacuum tightness of corresponding airtight chamber 1, and 11 of operation valves are controlled the break-make of corresponding bleed-off passage 9.The vacuum leak detecting system of the present embodiment can be hunted leak to multiple examining objects simultaneously.In other embodiments, four bleed-off passages 9 also can be distinguished directly and be connected with aspiration pump 2.
The above is only the preferred embodiment of the present invention, and protection scope of the present invention is also not only confined to above-described embodiment, and all technical schemes belonging under thinking of the present invention all belong to protection scope of the present invention.Should propose, for those skilled in the art, improvements and modifications without departing from the principles of the present invention, these improvements and modifications also should be considered as protection scope of the present invention.

Claims (10)

1. a vacuum leak hunting method for container, comprises the following steps:
(1) container to be checked is placed in to an airtight chamber;
(2) airtight chamber is quantitatively bled, make formation negative pressure in airtight chamber;
(3) keep airtight chamber's sealing, after waiting for Preset Time, detect the vacuum tightness in airtight chamber, and the vacuum tightness of detection and predetermined threshold value are compared, judge according to comparative result whether container exists leakage, basis for estimation is, if the vacuum tightness detecting is in predetermined threshold value, container is without leakage, otherwise container exists and leaks.
2. the vacuum leak hunting method of container according to claim 1, is characterized in that: described container is plastic ampoule, and the volume that described rate of air sucked in required of quantitatively bleeding is less than airtight chamber deducts volume of a container to be checked.
3. a vacuum leak detecting system, described vacuum leak detecting system comprises aspiration pump, is used for holding the airtight chamber of examining object and connecting the bleed-off passage of aspiration pump and airtight chamber, one is connected on bleed-off passage for detection of the pick-up unit of vacuum tightness, it is characterized in that: also comprise the quantitative Control Component for controlling rate of air sucked in required.
4. vacuum leak detecting system according to claim 3, is characterized in that: described quantitative Control Component is flowmeter.
5. vacuum leak detecting system according to claim 4, is characterized in that: described flowmeter is located at the endpiece of aspiration pump.
6. vacuum leak detecting system according to claim 3, is characterized in that: the endpiece of described aspiration pump is also provided with safety valve.
7. vacuum leak detecting system according to claim 3, it is characterized in that: described airtight chamber is coordinated and formed by the first counterpart and the second counterpart, described the first counterpart is provided with the cavity of an end opening, described the second counterpart fits in the openend of described cavity, and is provided with O-ring seal between the first counterpart and the second counterpart.
8. vacuum leak detecting system according to claim 3, is characterized in that: described pick-up unit is pressure vacuum gauge and/or pressure transducer.
9. vacuum leak detecting system according to claim 3, is characterized in that: described bleed-off passage be provided with have connect bleed, bleed when aspiration pump after the operation valve of pressurize and pressurize final vacuum triple functions.
10. according to the vacuum leak detecting system described in any one in claim 3 to 9, it is characterized in that: described airtight chamber is provided with multiple, each airtight chamber all connects a bleed-off passage, and all bleed-off passages are directly connected with aspiration pump or are connected with aspiration pump by a main channel.
CN201310070907.0A 2013-03-06 2013-03-06 Vacuum leak detection method and vacuum leak detection system for containers Pending CN104034495A (en)

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104236826A (en) * 2014-09-26 2014-12-24 清华大学 Bagged product tightness detection device and method
CN104309603A (en) * 2014-09-30 2015-01-28 联合汽车电子有限公司 Method for diagnosing air leakage of vacuum air suction system for providing vacuum degree of brake system
CN104713685A (en) * 2015-02-10 2015-06-17 湖南省精一自动化有限公司 Vacuum box type leakage inspector and inspection method
CN104913193A (en) * 2015-06-30 2015-09-16 宜昌江峡船用机械有限责任公司 Leakage detection method and device for inner container of interlayer low-temperature container
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WO2016045150A1 (en) * 2014-09-28 2016-03-31 深圳市华星光电技术有限公司 Vacuum cavity seal performance testing method
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CN106017828A (en) * 2016-06-22 2016-10-12 苏州艾酷玛赫设备制造有限公司 Airtight type air tightness detection apparatus
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Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19653770A1 (en) * 1996-12-21 1998-06-25 Thyssen Vakuum Isolationstechn Gas tightness measuring method for structural element with inner space enclosed by wall parts
CN1965220A (en) * 2004-06-07 2007-05-16 检测机械(第二)集团有限公司 An apparatus and method for testing flexible packages for defects
CN101495848A (en) * 2006-07-27 2009-07-29 因菲康有限公司 Leakage seeker
CN101883974A (en) * 2007-12-01 2010-11-10 因菲康有限公司 Method and device for tightness testing
CN102426079A (en) * 2011-10-28 2012-04-25 清华大学 Simulation system and method for leakage detection of space station by using direction gauge
CN202362120U (en) * 2011-12-09 2012-08-01 天津市亚安科技股份有限公司 Device for quickly detecting air tightness
CN202372317U (en) * 2011-11-07 2012-08-08 安徽皖仪科技股份有限公司 Device for detecting overall leak rate in accumulated way
CN102914412A (en) * 2012-10-17 2013-02-06 上海宏力半导体制造有限公司 Detecting device and detecting method for air tightness of processing cavity

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19653770A1 (en) * 1996-12-21 1998-06-25 Thyssen Vakuum Isolationstechn Gas tightness measuring method for structural element with inner space enclosed by wall parts
CN1965220A (en) * 2004-06-07 2007-05-16 检测机械(第二)集团有限公司 An apparatus and method for testing flexible packages for defects
CN101495848A (en) * 2006-07-27 2009-07-29 因菲康有限公司 Leakage seeker
CN101883974A (en) * 2007-12-01 2010-11-10 因菲康有限公司 Method and device for tightness testing
CN102426079A (en) * 2011-10-28 2012-04-25 清华大学 Simulation system and method for leakage detection of space station by using direction gauge
CN202372317U (en) * 2011-11-07 2012-08-08 安徽皖仪科技股份有限公司 Device for detecting overall leak rate in accumulated way
CN202362120U (en) * 2011-12-09 2012-08-01 天津市亚安科技股份有限公司 Device for quickly detecting air tightness
CN102914412A (en) * 2012-10-17 2013-02-06 上海宏力半导体制造有限公司 Detecting device and detecting method for air tightness of processing cavity

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
梁志刚等: "大容积容器真空氦质谱检漏技术研究", 《中国科技信息》 *

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CN108132125B (en) * 2017-11-23 2020-09-11 吕从祥 Sealing test method and sealing tester for automobile electronic control unit shell
CN108132125A (en) * 2017-11-23 2018-06-08 吕从祥 A kind of vehicle electronic control unit housing seal test method and sealing test instrument
CN108645561A (en) * 2018-06-01 2018-10-12 西安西电变压器有限责任公司 Vacuum degree harvester, vacuum-degree monitoring component and method
CN108953131A (en) * 2018-07-11 2018-12-07 北汽福田汽车股份有限公司 The method and apparatus for detecting electric vacuum pump system leak
CN108953131B (en) * 2018-07-11 2020-01-10 北汽福田汽车股份有限公司 Method and apparatus for detecting leakage in an electric vacuum pump system
CN109307574A (en) * 2018-10-31 2019-02-05 四川泛华航空仪表电器有限公司 A kind of air tightness tester
CN109827718B (en) * 2019-03-14 2019-11-08 北京卫星环境工程研究所 The verifying device and verification method of the pressure maintaining leak detection scheme in spacecraft launching site channel
CN109827718A (en) * 2019-03-14 2019-05-31 北京卫星环境工程研究所 The verifying device and verification method of the pressure maintaining leak detection scheme in spacecraft launching site channel
CN111535610A (en) * 2020-05-20 2020-08-14 南京恒瑞工程技术有限公司 Negative-pressure glue injection construction method
CN111535610B (en) * 2020-05-20 2022-04-19 南京恒瑞工程技术有限公司 Negative-pressure glue injection construction method
CN111929012A (en) * 2020-07-03 2020-11-13 安徽皖仪科技股份有限公司 Soft package air tightness detection system and method
CN112284651A (en) * 2020-09-29 2021-01-29 张家港富瑞深冷科技有限公司 Method for detecting interlayer vacuum degree of low-temperature storage tank
CN112729727A (en) * 2020-12-15 2021-04-30 长沙君成包装机械有限公司 Vacuum leakage detection system in packaging container and process method
CN114543714A (en) * 2022-02-17 2022-05-27 源卓微电子装备(常德)有限公司 Detection device and detection method for adsorption abnormity of vacuum chuck

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Application publication date: 20140910