CN104483074A - Special helium detection method and special helium detection device of sensing element - Google Patents
Special helium detection method and special helium detection device of sensing element Download PDFInfo
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- CN104483074A CN104483074A CN201410770069.2A CN201410770069A CN104483074A CN 104483074 A CN104483074 A CN 104483074A CN 201410770069 A CN201410770069 A CN 201410770069A CN 104483074 A CN104483074 A CN 104483074A
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- helium
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- tooling base
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Abstract
The invention discloses a special helium detection method and a special helium detection device of a sensing element. The sensing element (5) is placed on a seal ring (4) to be connected with a tooling base (3); the tooling base (3) is connected to a pressurization cover (1); the pressurization cover (1) is connected to a high-pressure air source (9), a pressure release valve (8) and a helium source (7); a helium detection instrument port (11) on the tooling base (3) is connected with a helium detection instrument; vacuumization and detection are carried out through the helium detection instrument; the helium detection instrument is used for applying specified helium pressure in the front of the sensing element (5) after switching to a fine detection state; the sealing property of the sensing element (5) is detected; once detection is completed, air is used for blowing and clearing a pressurization helium pipeline for carrying out the next detection. The helium pressure of about 1.8 MPa is applied to the front of the sensing element, and meanwhile the requirement that the leakage amount of components cannot be greater than 10<-10> mbar.l/s is detected, and the detection efficiency is high.
Description
Technical field
The present invention relates to special helium detecting method and the device of a kind of helium detecting method and device, particularly a kind of sensing element.
Background technology
Diaphragm unit uses as the most critical sensing element in sensor module, and its technical requirement is clear and definite: apply 1.764MPa helium along diaphragm front, simultaneously inspection assembly sealing, and leakage rate is not more than 1.33 × 10
-10mbar.l/s.The checkout equipment measuring small helium leakage only has helium to examine instrument, but require pressurized helium again simultaneously, helium inspection instrument is quite responsive to helium, this just must ensure that helium can not be scurried in equipment or in equipment storage environment while pressurization, otherwise equipment is subject to helium interference, normally cannot judge that whether product hermeticity is qualified, existing pick-up unit be ensure to exert pressure along diaphragm front and the accuracy of testing result very complicated in running program, cause detection efficiency very low, detect a sensing element and at least need 30 minutes.
Summary of the invention
The object of the invention is to, a kind of special helium detecting method and device of sensing element is provided.The present invention applies about 1.8MPa helium pressure in sensing element front, detects that component leakage amount can not be greater than 10 simultaneously
-10the requirement of mbar.l/s, and detection efficiency is high.
Technical scheme of the present invention: a kind of special helium detecting method of sensing element, sensing element is placed on O-ring seal and is connected with tooling base, tooling base connects pressurization lid, pressurization lid connects source of high pressure air, blowdown valve and helium gas source, helium inspection instrument interface on tooling base connects helium inspection instrument, undertaken vacuumizing and detecting by helium inspection instrument, again sensing element front is applied to the helium pressure of regulation after helium inspection instrument is switched to examining state, sensing element sealing is detected, detect one complete after, with air by pressurized helium pipeline to blowing clean, carry out the next one to detect.
The device of the special helium detecting method of aforesaid sensing element, comprise pressurization lid, pressurization lid is provided with connecting interface, and pressurization lid is also connected with tooling base, being connected with the O-ring seal for placing sensing element in tooling base, described tooling base being also provided with helium inspection instrument interface.
In the helium checking device of aforesaid sensing element, described connecting interface is provided with two, and one connects source of high pressure air, and another connecting tee switch, three-way cock is connected with helium gas source with blowdown valve respectively.
In the helium checking device of aforesaid sensing element, described pressurization lid is connected with tooling base by butterfly nut.
In the helium checking device of aforesaid sensing element, between described three-way cock and helium gas source, be connected with tensimeter.
Compared with prior art, the present invention examines being tightly connected of instrument interface by tooling base and helium, the photometric requirement be tightly connected with sensing element and tooling base binding face of tooling base and sensing element, realize applying about 1.8MPa helium pressure in sensing element front, detect that component leakage amount can not be greater than 10 simultaneously
-10the requirement of mbar.l/s, and the method detection efficiency is high, average detected sensing element only needs 8 ~ 10 minutes.
The present invention also has the following advantages:
(1) sensing element indirectly can examine instrument to seal fix with helium, while helium can be facilitated to pressurize.
(2) when helium inspection instrument starts to vacuumize, suction function, on sensing element, makes sensing element be easy to be tightly connected with apparatus of the present invention.
(3) conveniently can apply helium on sensing element, pressure release at any time at the end of detection, and the helium of releasing is put at a distance by tubes rows, the leakage rate completing element while achieving the pressure that adds helium detects.
(4) by carrying out blowing with air to the pipeline after pressure release, can avoid managing interior helium and equipment is disturbed, namely improve and substantially increase detection efficiency.
Accompanying drawing explanation
Fig. 1 is helium of the present invention inspection pressurization frock;
Fig. 2 is pressurization pressure release helium device schematic diagram of the present invention.
Being labeled as in accompanying drawing: 1-pressurizes lid, 2-butterfly nut, 3-tooling base, 4-O-ring seal, 5-sensing element, 6-three-way cock, 7-helium gas source, 8-blowdown valve, 9-source of high pressure air, 10-tensimeter, 11-helium inspection instrument interface, 12-connecting interface.
Embodiment
Embodiment.A kind of device of special helium detecting method of sensing element, as shown in Figures 1 and 2, comprise pressurization lid 1, pressurization lid 1 is provided with connecting interface 12, pressurization lid 1 is also connected with tooling base 3, being connected with the O-ring seal 4 for placing sensing element 5 in tooling base 3, described tooling base 3 being also provided with helium inspection instrument interface 11.
Described connecting interface 12 is provided with two, and one connects source of high pressure air 9, and another connecting tee switch 6, three-way cock 6 is connected with helium gas source 7 with blowdown valve 8 respectively.
Described pressurization lid 1 is connected with tooling base 3 by butterfly nut 2.
Tensimeter 10 is connected with between described three-way cock 6 and helium gas source 7.
Principle of work: as accompanying drawing 1 and accompanying drawing 2, sensing element 5 is placed on O-ring seal 4 and is connected with tooling base 3 by the present invention, and by collar clamped, the helium inspection instrument interface 11 on tooling base 3 is examined instrument with helium and is connected.By helium inspection instrument, sensing element 5 is vacuumized and detected.After leakage rate detection enters examining pattern, pressurization lid 1 is put and tooling base 3 top, seal by O-ring seal, with butterfly nut 2, upper and lower two parts are fastenedly connected, open helium gas source 7 immediately, about 1.8MPa helium pressure is applied to sensing element 5 front, keep pressure 1 ~ 2 minute, observe helium inspection instrument display numerical value, judge whether sensing element 5 exists leakage.Close helium gas source 7, open blowdown valve 8 simultaneously, helium in pipeline is entered in the air of distant place.Butterfly nut in frock 2 part is unscrewed, takes off in pipeline lid 1 part of pressurizeing, arrive the head that outdoor use independent source of high pressure air 9 interface aims at pressurization lid 1 immediately, helium in pipe is drained only.Repeat above-mentioned steps again, carry out the pressurized helium inspection of second sensing element 5.
Claims (5)
1. the special helium detecting method of a sensing element, it is characterized in that: sensing element (5) is placed on O-ring seal (4) and is above connected with tooling base (3), tooling base (3) connects pressurization lid (1), pressurization lid (1) connects source of high pressure air (9), blowdown valve (8) and helium gas source (7), helium inspection instrument interface (11) on tooling base (3) connects helium inspection instrument, undertaken vacuumizing and detecting by helium inspection instrument, again sensing element (5) front is applied to the helium pressure of regulation after helium inspection instrument is switched to examining state, sensing element (5) sealing is detected, detect one complete after, with air by pressurized helium pipeline to blowing clean, carry out the next one to detect.
2. the device of the special helium detecting method of sensing element as claimed in claim 1, it is characterized in that: comprise pressurization lid (1), pressurization lid (1) is provided with connecting interface (12), pressurization lid (1) is also connected with tooling base (3), being connected with the O-ring seal (4) for placing sensing element (5) in tooling base (3), described tooling base (3) being also provided with helium inspection instrument interface (11).
3. the helium checking device of sensing element according to claim 2, it is characterized in that: described connecting interface (12) is provided with two, one connects source of high pressure air (9), and another connecting tee switch (6), three-way cock (6) is connected with helium gas source (7) with blowdown valve (8) respectively.
4. the helium checking device of sensing element according to claim 2, is characterized in that: described pressurization lid (1) is connected with tooling base (3) by butterfly nut (2).
5. the helium checking device of sensing element according to claim 2, is characterized in that: be connected with tensimeter (10) between described three-way cock (6) and helium gas source (7).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410770069.2A CN104483074A (en) | 2014-12-15 | 2014-12-15 | Special helium detection method and special helium detection device of sensing element |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410770069.2A CN104483074A (en) | 2014-12-15 | 2014-12-15 | Special helium detection method and special helium detection device of sensing element |
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| Publication Number | Publication Date |
|---|---|
| CN104483074A true CN104483074A (en) | 2015-04-01 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201410770069.2A Pending CN104483074A (en) | 2014-12-15 | 2014-12-15 | Special helium detection method and special helium detection device of sensing element |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105372013A (en) * | 2015-12-14 | 2016-03-02 | 贵州红林机械有限公司 | Method for finding micro leakage points of helium-filled temperature sensor assembly |
-
2014
- 2014-12-15 CN CN201410770069.2A patent/CN104483074A/en active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105372013A (en) * | 2015-12-14 | 2016-03-02 | 贵州红林机械有限公司 | Method for finding micro leakage points of helium-filled temperature sensor assembly |
| CN105372013B (en) * | 2015-12-14 | 2018-12-04 | 贵州红林机械有限公司 | The method for searching the temperature sensor assembly tiny leakage point full of helium |
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| RJ01 | Rejection of invention patent application after publication |
Application publication date: 20150401 |