CN104483048A - Insulated silicon resistance pressure sensor - Google Patents
Insulated silicon resistance pressure sensor Download PDFInfo
- Publication number
- CN104483048A CN104483048A CN201410802856.0A CN201410802856A CN104483048A CN 104483048 A CN104483048 A CN 104483048A CN 201410802856 A CN201410802856 A CN 201410802856A CN 104483048 A CN104483048 A CN 104483048A
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- sensor
- pressure
- sensistor
- pressure transducer
- core
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Abstract
The invention relates to an insulated silicon resistance pressure sensor. A sensor casing and a core supporting piece are integrally connected by the aid of an insulated and temperature-resistant material in a rigid seal manner. The pressure sensor is simple in structure, and the insulation strength is enhanced. According to the sensor, a core part of the silicon piezoresistive sensor and the metal casing are structurally isolated from each other through a high-strength, high-insulation and high-temperature-resistance material, an insulating pad and the like, so that the requirement for the high electric strength is met. By the aid of the structural design, both the electric strength and a high-electrostatic-protection function can be realized, the sensor is simple in structure, convenient to assemble and suitable for mass production, and the cost can be reduced.
Description
Technical field
The present invention relates to pressure sensor technique field, particularly the improvement of metallic silicon resistance pressure transmitter.
Background technology
Pressure transducer is of a great variety, a kind of typical pressure transducer is as ceramic sensor element, and this sensor shortcoming is that overload, bursting property are poor, if improve overload, bursting property, just must use metal base pressure transducer, but metal base pressure transducer electrical insulation properties is poor.
Summary of the invention
The object of the invention is to design a kind of insulated metal sensistor pressure transducer, to overcome the poor defect of existing sensor electric insulation Performance Ratio.
A kind of insulated metal sensistor pressure transducer, is characterized in that: outer sensor housing and core support part by insulating, temperature-resistant material rigid seal connects as one.Core support part is fastenedly connected with pressure core parts; And be connected by insulation spacer between outer sensor housing with circuit module.Pressure sensor core parts have stress relief grooves.Pressure core parts are fastened on core support parts from the bottom to top.
A kind of pressure sensor structure provided by the invention, structure is simple, enhances dielectric strength.This patent provides the modes such as metallic silicon piezoresistance sensor core component and metal shell are insulated by high strength, height by a kind of sensor structure, high-temperature resistant material, insulating mat isolates, thus achieves high electric strength requirement.It can solve electrical equipment intensity and high antistatic protection function by structural design simultaneously, and its structure is simple, easy to assembly, is suitable for producing in enormous quantities, and can reduces costs.
Accompanying drawing explanation
Fig. 1 is structural representation of the present invention.
Embodiment
As shown in Figure 1, a kind of pressure sensor structure, comprises for detected pressures, is fixed on the metallic silicon pressure drag core component on compression fittings parts by web member.Outer sensor housing 3 is bonding by high strength, high temperature resistant adhesives 4 with core support part 5; Pressure core parts 6 and core support part 5 are fastenedly connected; And be connected by insulation spacer 2 between circuit module 1 with outer sensor housing 3.Metallic silicon pressure drag core component is connected in outer sensor housing by high strength, high insulation, high-temperature resistant material, thus core component and shell divide is come, and considerably increases dielectric strength.Insulation spacer is used to isolate between circuit module parts and core component.Circuit module and core component are by circuit module ground conductive.
Completely and shell isolation, the glass of isolated part employing high insulation resistance and insulating trip, substantially increase resistance to electrical equipment intensity and an electrostatic performance of core component to metallic silicon pressure drag core component of the present invention.
Claims (5)
1. an insulated metal sensistor pressure transducer, is characterized in that: outer sensor housing (3) and core support part (5) by insulating, heatproof adhesive material (4) rigid seal connects as one.
2. insulated metal sensistor pressure transducer according to claim 1, is characterized in that core support part (5) is fastenedly connected with pressure core parts (6); And be connected by insulation spacer (2) between outer sensor housing (3) with circuit module (1).
3. insulated metal sensistor pressure transducer according to claim 1, is characterized in that pressure sensor core parts (6) have stress relief grooves (9).
4. insulated metal sensistor pressure transducer according to claim 1, is characterized in that pressure core parts (6) are fastened on core support parts (5) from the bottom to top.
5. insulated metal sensistor pressure transducer according to claim 1, is characterized in that described adhesive material is glass or high strength, high temperature resistant sealing resin.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410802856.0A CN104483048A (en) | 2014-10-16 | 2014-12-19 | Insulated silicon resistance pressure sensor |
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410550615 | 2014-10-16 | ||
| CN2014105506151 | 2014-10-16 | ||
| CN201410802856.0A CN104483048A (en) | 2014-10-16 | 2014-12-19 | Insulated silicon resistance pressure sensor |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN104483048A true CN104483048A (en) | 2015-04-01 |
Family
ID=52757618
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201410802856.0A Pending CN104483048A (en) | 2014-10-16 | 2014-12-19 | Insulated silicon resistance pressure sensor |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN104483048A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US10598559B2 (en) | 2017-06-29 | 2020-03-24 | Rosemount Inc. | Pressure sensor assembly |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2539161Y (en) * | 2002-05-10 | 2003-03-05 | 赵建立 | Silicon piezoresistive type pressure sensor with flange structure |
| CN201116891Y (en) * | 2007-08-31 | 2008-09-17 | 上海飞恩微电子有限公司 | Silicon piezoresistance pressure sensor sealing assembly |
| CN101493371A (en) * | 2008-01-21 | 2009-07-29 | 昆山双桥传感器测控技术有限公司 | Antiradiation pressure sensor |
| CN102023066A (en) * | 2010-05-31 | 2011-04-20 | 昆山双桥传感器测控技术有限公司 | Universal pressure sensor of automobile |
| CN202255734U (en) * | 2011-08-17 | 2012-05-30 | 中国电子科技集团公司第四十八研究所 | Pressure sensitive core |
| CN204405237U (en) * | 2014-10-16 | 2015-06-17 | 大连睿科电子有限公司 | A kind of insulated metal sensistor pressure transducer |
-
2014
- 2014-12-19 CN CN201410802856.0A patent/CN104483048A/en active Pending
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2539161Y (en) * | 2002-05-10 | 2003-03-05 | 赵建立 | Silicon piezoresistive type pressure sensor with flange structure |
| CN201116891Y (en) * | 2007-08-31 | 2008-09-17 | 上海飞恩微电子有限公司 | Silicon piezoresistance pressure sensor sealing assembly |
| CN101493371A (en) * | 2008-01-21 | 2009-07-29 | 昆山双桥传感器测控技术有限公司 | Antiradiation pressure sensor |
| CN102023066A (en) * | 2010-05-31 | 2011-04-20 | 昆山双桥传感器测控技术有限公司 | Universal pressure sensor of automobile |
| CN202255734U (en) * | 2011-08-17 | 2012-05-30 | 中国电子科技集团公司第四十八研究所 | Pressure sensitive core |
| CN204405237U (en) * | 2014-10-16 | 2015-06-17 | 大连睿科电子有限公司 | A kind of insulated metal sensistor pressure transducer |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US10598559B2 (en) | 2017-06-29 | 2020-03-24 | Rosemount Inc. | Pressure sensor assembly |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| RJ01 | Rejection of invention patent application after publication |
Application publication date: 20150401 |