CN202661202U - Metal matrix composite ceramic pressure sensor - Google Patents
Metal matrix composite ceramic pressure sensor Download PDFInfo
- Publication number
- CN202661202U CN202661202U CN 201220252000 CN201220252000U CN202661202U CN 202661202 U CN202661202 U CN 202661202U CN 201220252000 CN201220252000 CN 201220252000 CN 201220252000 U CN201220252000 U CN 201220252000U CN 202661202 U CN202661202 U CN 202661202U
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- metal matrix
- pressure sensor
- matrix composite
- ceramic pressure
- metallic matrix
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Abstract
The utility model relates to a ceramic pressure sensor, and aims to provide a metal matrix composite ceramic pressure sensor which is produced by using a ceramic pressure sensor technology and has a measurement range of 40 to 250 Mpa. The metal matrix composite ceramic pressure sensor comprises a metal matrix consisting of a strain region and an edge supporting region, wherein a similar ceramic insulation layer is arranged on the surface of the metal matrix; and a thick film circuit is arranged on the surface of the similar ceramic insulation layer and comprises a Wheatstone bridge, a temperature compensation circuit and a zero point adjustment circuit which are manufactured on the surface of the insulation layer. The metal matrix is relatively high in anti-overload capacity; the thickness of a deformed part is greater than that of an edge part by reducing a pressed area; under the condition that the edge strength is guaranteed, the overload capacity is relatively high; and the metal matrix composite ceramic pressure sensor has the measurement range of 400 Mpa which is the same as that of a construction thin film.
Description
Technical field
The utility model relates to a kind of ceramic pressure sensor, relates in particular to a kind of metallic matrix composite ceramics pressure transducer.
Background technology
There is no in the market like product, for the above range of 40Mpa, mostly adopt the core body of sputtered film, because this technology at home still can not ripe volume production, substantially rely on from external import, so cost is very high, all will be more than 700 yuan by the transmitter price that the sputtered film core body is made, that have even want more than 1000 yuan, can not satisfy the requirement of producing low-costly and in high volume and using.And the cost of traditional ceramic pressure sensor is very low, and the transmitter price of making is many between 60-200 unit, has obvious cost advantage.But the range maximum of ceramic pressure sensor can only arrive 40Mpa.
So develop a kind of high range performance that had both had sputtered film, the pressure transducer that has again the ceramic thick film cost advantage has very large meaning.
The utility model content
The purpose of this utility model provides a kind of metallic matrix composite ceramics pressure transducer that utilizes the technology production 40Mpa-250Mpa range of ceramic pressure sensor.
In order to address the above problem, the utility model is achieved through the following technical solutions:
Metallic matrix composite ceramics pressure transducer of the present utility model comprises the metallic matrix that is made of strain regions and Support, edge, and the surface of metallic matrix is provided with the class ceramic insulating layer, and the surface of class ceramic insulating layer is provided with thick film circuit.
Further, described class ceramic insulating layer be sintering on metal base surface, the class ceramic insulating layer is formed by the dielectric paste sintering.
Further, described thick film circuit is resistance bridge and the temperature-compensation circuit of making at surface of insulating layer and trims circuit zero point.
Compared with prior art, the beneficial effects of the utility model are: the metallic matrix that the utility model adopts can have higher anti-overload ability, by reducing compression area, can make the Thickness Ratio of the thickness of crushed element and marginal portion larger, when guaranteeing edge strength, larger overload capacity is arranged, can reach the range 400Mpa the same with building film.
Metallic matrix can weld together with shell, and the one, can improve edge strength, as making monoblock type with housing, can cancel the sealing of O type circle, avoid leaking because seal failure produces, good advantage is arranged when detecting inflammable and explosive or toxic gas.
Description of drawings
Fig. 1 is the section of structure of the utility model metallic matrix composite ceramics pressure transducer.
Embodiment
Below in conjunction with drawings and Examples, embodiment of the present utility model is described in further detail.Following examples are used for explanation the utility model, but are not used for limiting scope of the present utility model.
As shown in Figure 1, a kind of metallic matrix composite ceramics pressure transducer, comprise the metallic matrix 1 that is consisted of by strain regions and Support, edge, the surface of metallic matrix 1 is provided with class ceramic insulating layer 2, class ceramic insulating layer 2 is formed by the dielectric paste sintering, class ceramic insulating layer 2 adopts the thick-film technique sintering on metallic matrix 1 surface, and the surface of class ceramic insulating layer 2 is provided with thick film circuit 3, and thick film circuit 3 is at resistance bridge and the temperature-compensation circuit of surface of insulating layer making and trims circuit zero point.
The metallic matrix 1 main function that plays flexible member, it must possess following performance simultaneously: 1. be similar to perfect elasticity in certain range, enough elastic modulus arranged, without creep and hysteresis phenomenon; 2. have enough edge strengths; 3. have good welding performance, 4. with dielectric paste good cleer and peaceful power is arranged, guaranteeing has enough adhesions with insulation course, and close as far as possible thermal expansivity.
Class ceramic insulating layer 2 (being formed by the dielectric paste sintering), it must possess following functions: 1. with matrix good adhesion is arranged, without relative slippage, can not occur peeling off under long-term alternating pressure when matrix is out of shape.2. very high insulativity, insulation resistance is at least greater than 100 megaohms; 3. good surface state is convenient to thick-film technique.4. with the expansion coefficient of matrix phase pairing approximation.
The major function of thick film circuit 3 is the variations that elastomeric mechanically deform are converted into voltage.It must possess the requirement of ceramic thick film pressure transducer.
The above only is preferred implementation of the present utility model; should be understood that; for those skilled in the art; under the prerequisite that does not break away from the utility model know-why; can also make some improvement and modification, these improve and modification also should be considered as protection domain of the present utility model.
Claims (3)
1. metallic matrix composite ceramics pressure transducer, it is characterized in that: comprise the metallic matrix that is made of strain regions and Support, edge, the surface of described metallic matrix is provided with the class ceramic insulating layer, and the surface of described class ceramic insulating layer is provided with thick film circuit.
2. metallic matrix composite ceramics pressure transducer according to claim 1, it is characterized in that: described class ceramic insulating layer is that sintering is on metal base surface.
3. metallic matrix composite ceramics pressure transducer according to claim 1 is characterized in that: described thick film circuit is resistance bridge and the temperature-compensation circuit of making at surface of insulating layer and trims circuit zero point.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201220252000 CN202661202U (en) | 2012-05-31 | 2012-05-31 | Metal matrix composite ceramic pressure sensor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201220252000 CN202661202U (en) | 2012-05-31 | 2012-05-31 | Metal matrix composite ceramic pressure sensor |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN202661202U true CN202661202U (en) | 2013-01-09 |
Family
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 201220252000 Expired - Lifetime CN202661202U (en) | 2012-05-31 | 2012-05-31 | Metal matrix composite ceramic pressure sensor |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN202661202U (en) |
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104697699A (en) * | 2013-12-06 | 2015-06-10 | 长野计器株式会社 | Physical quantity measuring sensor and sensor module |
| CN105222701A (en) * | 2015-10-22 | 2016-01-06 | 桂林电子科技大学 | A kind of strain gauge transducer with acid-alkali-corrosive-resisting performance |
| CN105258842A (en) * | 2015-11-03 | 2016-01-20 | 武汉理工大学 | Thick-film type fiber grating hydraulic sensor for measuring high voltage |
| CN105403244A (en) * | 2014-09-04 | 2016-03-16 | 横河电机株式会社 | Sensor, Strain Sensor, And Pressure Sensor |
| CN106768524A (en) * | 2017-02-20 | 2017-05-31 | 广东海洋大学 | A kind of diaphragm pressure sensor and its manufacture method |
| CN107870054A (en) * | 2016-09-22 | 2018-04-03 | 罗伯特·博世有限公司 | Sense the pressure sensor and its manufacture method of fluid medium pressure |
| CN109987577A (en) * | 2019-03-18 | 2019-07-09 | 西安中星测控有限公司 | A kind of ceramic insulating layer of pressure sensor and preparation method thereof |
| CN112563145A (en) * | 2020-11-26 | 2021-03-26 | 娄底市安地亚斯电子陶瓷有限公司 | Preparation method of ceramic circuit of automobile preparation pressure strain gauge |
-
2012
- 2012-05-31 CN CN 201220252000 patent/CN202661202U/en not_active Expired - Lifetime
Cited By (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104697699A (en) * | 2013-12-06 | 2015-06-10 | 长野计器株式会社 | Physical quantity measuring sensor and sensor module |
| US10113926B2 (en) | 2013-12-06 | 2018-10-30 | Nagano Keiki Co., Ltd. | Ceramic sensor module including diaphragm and cylindrical portion integrated with the diaphragm |
| CN105403244A (en) * | 2014-09-04 | 2016-03-16 | 横河电机株式会社 | Sensor, Strain Sensor, And Pressure Sensor |
| CN105403244B (en) * | 2014-09-04 | 2019-01-15 | 横河电机株式会社 | Strain transducer device |
| CN105222701A (en) * | 2015-10-22 | 2016-01-06 | 桂林电子科技大学 | A kind of strain gauge transducer with acid-alkali-corrosive-resisting performance |
| CN105258842A (en) * | 2015-11-03 | 2016-01-20 | 武汉理工大学 | Thick-film type fiber grating hydraulic sensor for measuring high voltage |
| CN105258842B (en) * | 2015-11-03 | 2018-11-30 | 武汉理工大学 | A kind of thick-film type fiber grating hydrostatic sensor measuring high pressure |
| CN107870054A (en) * | 2016-09-22 | 2018-04-03 | 罗伯特·博世有限公司 | Sense the pressure sensor and its manufacture method of fluid medium pressure |
| US10914648B2 (en) | 2016-09-22 | 2021-02-09 | Robert Bosch Gmbh | Pressure sensor for detecting a pressure of a fluid medium in a measuring chamber |
| CN106768524A (en) * | 2017-02-20 | 2017-05-31 | 广东海洋大学 | A kind of diaphragm pressure sensor and its manufacture method |
| CN109987577A (en) * | 2019-03-18 | 2019-07-09 | 西安中星测控有限公司 | A kind of ceramic insulating layer of pressure sensor and preparation method thereof |
| CN112563145A (en) * | 2020-11-26 | 2021-03-26 | 娄底市安地亚斯电子陶瓷有限公司 | Preparation method of ceramic circuit of automobile preparation pressure strain gauge |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CX01 | Expiry of patent term | ||
| CX01 | Expiry of patent term |
Granted publication date: 20130109 |