CN104482861B - It is a kind of to measure object length and/or the method for displacement - Google Patents
It is a kind of to measure object length and/or the method for displacement Download PDFInfo
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- CN104482861B CN104482861B CN201410741689.3A CN201410741689A CN104482861B CN 104482861 B CN104482861 B CN 104482861B CN 201410741689 A CN201410741689 A CN 201410741689A CN 104482861 B CN104482861 B CN 104482861B
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Abstract
A kind of method that the present invention provides high-precision long distance shift measurement system and displacement, deformation and length are measured with it, related operation is surveyed by the present invention in that gathering images with two imaging sensors and move, the technical problem that enlargement ratio and object boundary are difficult to accurately judge can be solved.The system of the present invention has the advantages that multifunctional measuring, not only can also measure object deformation with displacement, and with far measuring distance, multiplication factor can arbitrarily set, zoom in or out, the high characteristic of measurement accuracy.The present invention is at 1 meter of measurement distance, and image enlargement ratio is 5:In the case of 1, measurement accuracy is up to 1 micron, and full accuracy is up to 0.1 micron.
Description
Technical field
The present invention relates to metering field, more particularly to a kind of high-precision long distance shift measurement system and measure displacement, deformation with it
With the method for length.
Background technology
For a long time, traveling microscope is always the common method of high precision length measurement.Usual work in this way
Make closer to the distance, visual field is smaller, thus limit its scope of application.
In order to realize distant-range high-precision linear measure longimetry, arisen at the historic moment based on the related displacement measurement system of digital picture.
Its general principle is that the digital picture being marked at before and after object of which movement of pre-production is carried out into related operation, with this calculate by
Survey the displacement of object.
At present, displacement system is moved under remote working condition using Digital Image Correlation Method, is generally divided into two kinds
Situation:(1) object partial enlargement is imaged using microscope equipment, then carries out moving and survey related operation.This method can ensure
Obtained under conditions of operating distance farther out compared with high measurement accuracy.The visual field that this method is obtained is smaller, and to image objects
The more difficult regulation in position.(2) 1 is carried out to object:1 or dwindle into picture.On this condition due to by enlargement ratio and object edge
Boundary is difficult to the influence accurately judged, therefore measurement accuracy is typically more limited, it is assumed that thing is N, error list than the enlargement ratio of picture
Individual pixel dimension is dx, then whole object error is Ndx.Precision is surveyed in order to improve remote move, some scholars are proposed using figure
As the method Decision boundaries of processing, its basic thought is to use boundary operators, such as Laplace operator, extracts image boundary,
Then image boundary is subjected to related operation.This method is influenceed by illumination condition and Boundary extracting algorithm, it is difficult to obtain
Precise and stable experimental result.
The content of the invention
Therefore, measuring the side of displacement, deformation and length the invention provides a kind of high-precision long distance shift measurement system and with it
Method, by the present invention in that gathering image with two imaging sensors and carrying out related operation, so as to solve enlargement ratio and thing
Body border is difficult to the technical problem accurately judged, so as to be obviously improved measurement accuracy.
The technical scheme that the present invention solves above-mentioned technical problem is as follows:
A kind of high-precision long distance shift measurement system, including displacement platform, testee, the first imaging sensor, the second image
Testee, described first image sensor and the second imaging sensor are placed on sensor and computer, institute's translation stage
Placed towards displacement platform, the second imaging sensor front end is placed with aiming eyepiece, described first image sensor and the
Two imaging sensors are communicated with computer, and institute's translation stage is moved by drive device driving, the drive device
Controlled by the computer;
Testee is subjected to displacement under the drive of displacement platform, in displacement process, and testee is passed in the first image
Position in sensor and the second imaging sensor changes, and is always positioned at the first imaging sensor and the second image sensing
Among the visual field of device.
It is preferred that, in addition to mark point described in mark point be located at testee on or the displacement immediately below testee
On platform.
It is preferred that, in addition to mark point described in mark point be located at testee on or the displacement immediately below testee
Described first image sensor carries Varifocal zoom lens on platform.
It is preferred that, in addition to mark point described in mark point be located at testee on or the displacement immediately below testee
The drive device is stepper motor on platform.
Object length and/or the method for displacement are measured using said system, it is characterised in that comprised the following steps:
S1, foundation drive device stroke determine system magnification, and are stored in computer;
S2, aim at object boundary and gather image A1, then gather the overall image A2 of measured object, and two images are passed
Transport to computer;
S3, after object is subjected to displacement, aim at another border of object and simultaneously gather image B1, then gather measured object overall
Image B2, and two images are transmitted to computer;
S4, computer calculate the length of object and/or the displacement of object according to the image gathered in S3, S4.
It is preferred that, also include between the step S2 and S3, drive the object in the first imaging sensor and the second figure
As sensor the visual field among move.
It is preferred that, S4 Computers are according to the image gathered in S2, S3, it is determined that object boundary and generation before being subjected to displacement
The particular location on another border of object after displacement, and according to the first imaging sensor and the CCD pixel chis of the second imaging sensor
Very little and system magnification, calculates the length of object and the displacement of object.
It is preferred that, it will be marked before carrying out S1 on the displacement platform for being arranged on object or being arranged at immediately below object,
Mark point keeps constant with testee relative position in measurement process.
Use the method for above-mentioned systematic survey deformation, it is characterised in that comprise the following steps:
S1, mark point is placed on testee, and object is positioned on stepper motor;
S2, foundation stepper motor stroke determine system magnification, and are stored in computer;
S3, aiming object features region simultaneously gather image A1, the overall image A2 of collection measured object, and two images are passed
Transport to computer;
S4, for object apply pressure, after deforming upon, aim at the same characteristic area of object simultaneously gather image B1, adopt
Collect the overall image B2 of measured object, and two images are transmitted to computer;
S5, computer calculate the deformation quantity of object according to the image gathered in S3, S4.
It is preferred that, the characteristic area is the mark point on testee border or testee.
It is preferred that, S5 Computers are according to the image gathered in S3, S4, in known first imaging sensor and the second image
On the basis of the CCD pixel dimensions of sensor, system magnification, the change in displacement for deforming upon front and rear mark point is calculated
Amount.
The beneficial effects of the invention are as follows:
A kind of method that the present invention provides high-precision long distance shift measurement system and displacement, deformation and length are measured with it, this hair
It is bright to gather image by using two imaging sensors and carry out moving survey related operation, enlargement ratio and object edge can be solved
Boundary is difficult to the technical problem accurately judged.The system of the present invention has the advantages that multifunctional measuring, not only can be with displacement, can also
Object deformation is measured, and with far measuring distance, multiplication factor can arbitrarily set, zoom in or out, and measurement accuracy is high
Characteristic.The present invention is at 1 meter of measurement distance, and image enlargement ratio is 5:In the case of 1, measurement accuracy is up to 1 micron, full accuracy
Up to 0.1 micron.
Brief description of the drawings
A kind of high-precision long distance shift measurement system schematic diagrames of Fig. 1.
Wherein:1- computers, the imaging sensors of 2- first, the imaging sensors of 3- second, 4- aims at eyepiece, and 5- is by stepping electricity
The displacement platform of machine driving, 6- mark points, 7- testees.
Embodiment
To make the object, technical solutions and advantages of the present invention clearer, the present invention is made into one below in conjunction with accompanying drawing
It is described in detail on step ground.
In one embodiment, as shown in figure 1, a kind of high-precision long distance shift measurement system, including displacement platform 5, measured object
Testee 7, institute are placed on body 7, the first imaging sensor 2, the second imaging sensor 3 and computer 1, institute's translation stage 5
State the first imaging sensor 2 and the second imaging sensor 3 is placed towards displacement platform 5, the front end of the second imaging sensor 3 is put
Aiming eyepiece 4 is equipped with, the imaging sensor 3 of described first image sensor 2 and second is communicated with computer 1, the displacement
Platform 5 is moved by driving stepper motor, and the stepper motor is controlled by the computer 1;
Testee 7 is subjected to displacement under the drive of displacement platform 5, in displacement process, and testee 7 is in the first image
Position in the imaging sensor 3 of sensor 2 and second changes, and is always positioned at the first imaging sensor 2 and the second figure
Among the visual field of picture sensor 3.
It is preferred that, in addition to mark point 6.
It is preferred that, the mark point 6 is located on testee 7 or the mark point 6 is located at the position immediately below testee 7
Move on platform 5.
It is preferred that, described first image sensor 2 carries Varifocal zoom lens.
A kind of measurement object length, the method for displacement, comprise the following steps:
S1, mark are arranged on object or are arranged on the displacement platform immediately below object;
S2, foundation stepper motor stroke determine system magnification, and are stored in computer as systematic parameter;
S3, object left margin and gather image A1 using aiming at eyepiece and aim at, then the collection of the first imaging sensor is tested
The overall image A2 of thing, and two images are transmitted to computer;
S4, after object is subjected to displacement, object right margin and gather image B1 using aiming at eyepiece and aiming at, then the first figure
As the image B2 that sensor collection measured object is overall, and two images are transmitted to computer;
S5, computer are according to the image gathered in S3, S4, it may be determined that object left margin before being subjected to displacement and be subjected to displacement
The particular location of object right margin afterwards, in CCD pixel dimensions, the system of known first imaging sensor and the second imaging sensor
On the basis of enlargement ratio, the length of object and the displacement of object can be calculated.
It is preferred that, also include between the step S2 and S3, drive the object in the first imaging sensor and the second figure
As sensor the visual field among move.
A kind of method for measuring deformation, comprises the following steps:
S1, mark point is placed on testee, object is positioned on stepper motor;
S2, foundation stepper motor stroke determine system magnification, and are stored in computer as systematic parameter;
S3, object left margin and gather image A1 using aiming at eyepiece and aim at, then the first imaging sensor collection object
The overall image A2 of measured object, and two images are transmitted to computer;
S4, for object apply pressure, after deforming upon, aim at object left margin using eyepiece is aimed at and gather image
B1, the then overall image B2 of the first imaging sensor collection measured object, and two images are transmitted to computer;
S5, computer are according to the image gathered in S3, S4, it is known that the first imaging sensor and the second imaging sensor
CCD pixel dimensions, system magnification, can calculate the displacement variable for deforming upon front and rear mark point, so as to calculate thing
The deformation quantity of body.
The method of another measurement deformation, comprises the following steps:
S1, mark point is placed on testee, object is positioned on stepper motor;
S2, foundation stepper motor stroke determine system magnification, and are stored in computer as systematic parameter;
S3, object marker point and gather image A1 using aiming at eyepiece and aim at, then the first imaging sensor collection object
The overall image A2 of measured object, and two images are transmitted to computer;
S4, for object apply pressure, after deforming upon, object marker point and image is gathered using aiming at eyepiece and aiming at
B1, the then overall image B2 of the first imaging sensor collection measured object, and two images are transmitted to computer;
S5, computer are according to the image gathered in S3, S4, it is known that the first imaging sensor and the second imaging sensor
CCD pixel dimensions, system magnification, can calculate the displacement variable for deforming upon front and rear mark point, so as to calculate thing
The deformation quantity of body.
Above disclosure is only preferred embodiment of present invention, can not limit the right model of the present invention with this certainly
Enclose, therefore the equivalent variations made according to the claims in the present invention, still belong to the scope that the present invention is covered.
Claims (2)
1. a kind of method for measuring object length and/or displacement, it is characterised in that measured using system object length and/or
Displacement, the system includes displacement platform, testee, the first imaging sensor, the second imaging sensor and computer, described
Testee is placed on displacement platform, described first image sensor and the second imaging sensor are placed towards displacement platform, institute
State the second imaging sensor front end and be placed with aiming eyepiece, described first image sensor and the second imaging sensor and computer
Communicated, institute's translation stage is moved by drive device driving, and the drive device is controlled by the computer;It is tested
Object is subjected to displacement under the drive of displacement platform, in displacement process, and testee is in the first imaging sensor and the second figure
As the position in sensor changes, and be always positioned at the first imaging sensor and the second imaging sensor the visual field it
In;Also include mark point, the mark point is located on testee or on the displacement platform immediately below testee, mark
Point keeps constant with testee relative position in measurement process;
Comprise the following steps:S1, foundation drive device stroke determine system magnification, and are stored in computer;S2, take aim at
Quasi- object boundary simultaneously gathers image A1, then gathers the overall image A2 of measured object, and two images are transmitted to computer;
S3, after object is subjected to displacement, aim at another border of object and simultaneously gather image B1, then gather the overall image B2 of measured object,
And transmit two images to computer;S4, computer are according to the image gathered in S2, S3 and the first imaging sensor and
The CCD pixel dimensions of two imaging sensors, system magnification, calculate the length of object and/or the displacement of object;S4 falls into a trap
Calculation machine is according to the image gathered in S2, S3, it is determined that object boundary before being subjected to displacement and being subjected to displacement another border of rear object
Particular location, and according to the CCD pixel dimensions and system magnification of the first imaging sensor and the second imaging sensor, calculate
Go out the length of object and the displacement of object.
2. it is according to claim 1 measurement object length and/or displacement method, it is characterised in that the step S2 and
Also include between S3, drive the object to be moved among the visual field of the first imaging sensor and the second imaging sensor.
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CN107101584B (en) * | 2017-04-27 | 2020-06-12 | 中国科学院长春光学精密机械与物理研究所 | Object displacement measurement method, device and system based on image recognition |
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CN104034266A (en) * | 2014-06-16 | 2014-09-10 | 中国科学院长春光学精密机械与物理研究所 | Surface microstructure based high-accuracy length detection method |
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Address after: No. 69 Wenqu Road, Wuzhong District, Suzhou City, Jiangsu Province, 215218 Patentee after: SUZHOU INSTITUTE OF METROLOGY Address before: No. 69 Wenqu Road, Wuzhong District, Suzhou City, Jiangsu Province, 215218 Patentee before: SUZHOU INSTITUTE OF MEASUREMENT AND TESTING |
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