CN104478224A - Method for forming acid-etching quartz pendulous reed flexible beam - Google Patents

Abstract

The invention relates to the field of quartz pendulum manufacture, in particular to a method for forming a flexible beam of a quartz pendulum by acid etching. The forming method of the acid-etched quartz pendulum flexible beam comprises the following steps: the first step: putting the well-equipped quartz pendulum flexible beam into the first hydrofluoric acid solution, and under the first temperature condition, Perform rapid etching until the flexible beam of the quartz pendulum plate reaches the first preset thickness; the second step: put the flexible beam of the quartz pendulum plate with the first preset thickness into the second hydrofluoric acid solution, at the second temperature Under the conditions, carry out slow etching until the flexible beam of the quartz pendulum plate reaches the second preset thickness; wherein: the concentration of the first hydrofluoric acid solution is greater than the concentration of the second hydrofluoric acid solution, and the concentration of the first hydrofluoric acid solution The concentration is less than 22mol/L; the first temperature is higher than the second temperature. The forming method of acid-etching the flexible beam of the quartz pendulum plate shortens the acid etching time of the flexible beam of the quartz pendulum plate; the thickness of the flexible beam of the quartz pendulum plate can be controlled accurately.

Description

A method for forming flexible beams of acid-etched quartz pendulum plates

technical field

The invention relates to the field of manufacturing flexible beams of quartz swing plates, in particular to a method for forming flexible beams of quartz swing plates by acid etching.

Background technique

The quartz pendulum flexible beam is the core component of the quartz flexible accelerometer. The quartz flexible accelerometer is mainly used in the inertial navigation system. Its main performance indicators include range, resolution, bias repeatability, scale factor repeatability and Linearity, etc., the range and resolution of its performance indicators are determined by the thickness and surface quality of the flexible beam of the quartz pendulum.

At present, the known forming method of the flexible beam of the quartz pendulum plate is to use the chemical reaction of hydrofluoric acid and quartz glass to reduce the thickness of the flexible beam of the quartz pendulum plate, so as to reduce the stiffness and realize flexible bending. After engraving the plane of the pendulum plate, use a special acid-etching mold and a fluorosilicone rubber mask to protect the rest except the flexible beam of the quartz pendulum plate, and place it in a hydrofluoric acid solution of a certain concentration and temperature for acid etching The thickness of the flexible beam of the quartz pendulum plate is estimated by measuring the acid etching amount of the “companion plate” to calculate the acid etching rate, which is the “one-step” forming method of the flexible beam of the quartz pendulum plate. The acid etching rate of the "one-step method" is about 1.3um/min, and the amount of thinning required for the processing of the quartz pendulum flexible beam is 690um, which takes 530min. This method not only takes a long time to acid-etch the flexible beam of the quartz pendulum plate, but also has low precision.

Contents of the invention

In order to overcome the disadvantages of poor thickness control accuracy and long time-consuming of the quartz pendulum flexible beam caused by the "one-step" forming of the acid-etched quartz pendulum flexible beam, the present invention provides an acid-etched quartz pendulum flexible beam. The forming method of the flexible beam, which can not only improve the thickness control accuracy of the quartz pendulum flexible beam to ±1um, but also greatly reduce the reaction time.

The purpose of the present invention and the solution to its technical problems are achieved by adopting the following technical solutions.

A method for forming a flexible beam of a quartz pendulum by acid etching, comprising the following steps:

The first step: Put the flexible beam of the quartz pendulum plate into the first hydrofluoric acid solution, and perform rapid etching under the first temperature condition until the flexible beam of the quartz pendulum plate reaches the first preset value. thickness;

Step 2: Put the flexible beam of the quartz pendulum plate with the first preset thickness into the second hydrofluoric acid solution, and perform slow etching under the second temperature condition until the quartz pendulum plate is flexible. the beam reaches a second preset thickness;

Wherein: the concentration of the first hydrofluoric acid solution is greater than the concentration of the second hydrofluoric acid solution, and the concentration of the first hydrofluoric acid solution is less than 22mol/L;

The first temperature is higher than the second temperature.

Preferably,

18-22mol/L of the concentration of the first hydrofluoric acid solution;

The concentration of the second hydrofluoric acid solution is 10-15 mol/L.

Preferably,

The first temperature is 50-70°C;

The second temperature is 20-30°C.

Preferably,

In the rapid etching process, the first glass companion is placed in the first hydrofluoric acid solution, and the first acid of the first glass companion in the first hydrofluoric acid solution is calculated Etching rate, the first preset time for estimating and testing the first preset thickness;

In the slow etching process, put a second glass companion in the second hydrofluoric acid solution, by calculating the second glass companion in the second hydrofluoric acid solution The acid etching rate is estimated and tested for a second preset time for the second preset thickness.

Preferably,

The first preset time is 180-300 minutes;

The second preset time is 30-50 minutes.

Preferably,

Measuring the first preset thickness and the second preset thickness of the quartz pendulum flexible beam through an optical fiber spectroscopic thickness measuring device;

The optical fiber spectrum thickness measuring device includes a fiber optic spectrometer, a light source, a mold fixing base and an optical fiber measuring probe, the fiber optic spectrometer and the light source are respectively connected to the optical fiber measuring probe through an optical fiber, and the mold fixing base is used to fix the quartz pendulum A sheet-wound beam, the optical fiber measuring probe is vertically arranged on one side of the quartz pendulum sheet-wound beam fixed on the mold fixing base.

Preferably,

The first preset thickness is 40-60 μm;

The second preset thickness is 24-28 μm.

Preferably,

The flexible beam of the quartz pendulum plate is molded through a fluorosilicone rubber mask to form the flexible beam of the quartz pendulum plate that has been tooled.

Preferably,

When putting the flexible beam of the quartz pendulum plate with the first predetermined thickness into the second hydrofluoric acid solution, rinse the residual acid solution with deionized water, and dry the surface moisture of the flexible beam of the quartz pendulum plate with a dust-free cloth.

Preferably,

When performing rapid etching, the flexible beam of the quartz pendulum plate is vertically placed in the first hydrofluoric acid solution;

When performing slow etching, the flexible beam of the quartz pendulum is vertically placed in the second hydrofluoric acid solution.

By virtue of the above-mentioned technical scheme, a method for forming the acid-etched quartz pendulum flexible beam proposed by the present invention has at least the following advantages:

1) shorten the acid etching time of the quartz pendulum flexible beam;

2) Avoid the uneven thickness of the flexible beam of the quartz pendulum plate and the burrs on the edge of the glass caused by the acid dissolution of the rubber mask;

3) The thickness of the flexible beam of the quartz pendulum can be precisely controlled.

The above description is only an overview of the technical solutions of the present invention. In order to understand the technical means of the present invention more clearly and implement them according to the contents of the description, the preferred embodiments of the present invention and accompanying drawings are described in detail below.

Description of drawings

Fig. 1 is a process flow diagram of the present invention;

Fig. 2 is the tooling structural diagram of fluorosilicone rubber mask of the present invention and flexible beam with quartz pendulum plate;

Fig. 3 is a schematic structural view of the online thickness measuring device of the present invention.

Detailed ways

In order to further explain the technical means and effects of the present invention to achieve the intended purpose of the invention, the following in conjunction with the accompanying drawings and preferred embodiments, a method for forming a flexible beam of acid-etched quartz pendulum proposed according to the present invention, Details are as follows.

A kind of forming method (see Fig. 1 for specific technical process) of acid-etched quartz pendulum plate flexible beam provided by the present invention, comprises the following steps:

The first step: Put the flexible beam of the quartz pendulum plate into the first hydrofluoric acid solution, and perform rapid etching under the first temperature condition until the flexible beam of the quartz pendulum plate reaches the first preset value. thickness;

Step 2: Put the flexible beam of the quartz pendulum plate with the first preset thickness into the second hydrofluoric acid solution, and perform slow etching under the second temperature condition until the quartz pendulum plate is flexible. The beam reaches the second preset thickness; wherein: the concentration of the first hydrofluoric acid solution is greater than the concentration of the second hydrofluoric acid solution, and the concentration of the first hydrofluoric acid solution is less than 22mol/L; the second hydrofluoric acid solution A temperature is higher than the second temperature.

The rapid etching of the flexible beam of the quartz pendulum plate by the first hydrofluoric acid solution can speed up the reaction time for etching the flexible beam of the quartz pendulum plate to the second preset thickness. Slowly etching the flexible beam of the quartz pendulum plate through the second hydrofluoric acid solution can effectively control the precision of the flexible beam of the quartz pendulum plate to the second preset thickness.

Preferably, the concentration of the first hydrofluoric acid solution is 18-22 mol/L.

Preferably, the concentration of the second hydrofluoric acid solution is 10-15 mol/L.

Preferably, in the present invention, both the first hydrofluoric acid solution and the second hydrofluoric acid solution are configured with superior grade (GR) hydrofluoric acid solution.

Preferably, the content of the superior grade pure (GR) hydrofluoric acid solution is ≥ 40%, and the concentration is about 22.8 mol/L. The superior grade pure (GR) hydrofluoric acid solution is diluted to the required concentration with water or other solvents; the superior grade pure (GR) hydrofluoric acid solution after heating and dilution is fully stirred to make the superior grade pure The concentration and temperature distribution of (GR) hydrofluoric acid solution in the acid etching container is uniform; the acid etching rate calibration can only be carried out after the temperature of the superior grade pure (GR) hydrofluoric acid solution is constant (fluctuation<±0.5°C), and then The acid etching process of the flexible beam of the quartz pendulum plate is carried out.

Preferably, the first temperature is 50-70°C.

Preferably, the second temperature is 20-30°C.

The reaction time depends on the concentration of hydrofluoric acid and the reaction temperature. In the first step, choose 18-22mol/L, 50-70°C, and try to shorten the acid etching time at high temperature and high hydrofluoric acid concentration, and control the acid etching time at Within 5 hours, on the one hand, it saves time compared with the one-step method, and more importantly, it reduces the acid-dissolving phenomenon caused by the rubber mask being soaked in the acid solution for a long time. The temperature should not be higher than 70°C because of the accelerated acid dissolution of rubber at high temperature. In the second step, the temperature is selected to be 20-30° C., the concentration of hydrofluoric acid is 10-15 mol/L, and the acid etching rate is slow, so as to improve the control precision of the thickness of the final flexible beam.

In the existing one-step method, the concentration of hydrofluoric acid is generally 15.6mol/L, and the temperature is 40°C. Under this condition, it takes about 9 to 10 hours to acid-etch the flexible beam of the pendulum piece. Under this condition, the rubber mask After soaking for 9 to 10 hours, the acid-soluble size can reach 2mm, and the edges of the flexible beams caused by this will be irregular and have many burrs after etching. Moreover, since the thickness of the flexible beam of the quartz pendulum is required to be 24-28um, the etching time estimated by the above etching rate cannot accurately control its thickness, and it is very easy to occur that the flexible beam of the quartz pendulum is taken out after the calculated time is reached. The thickness is not within the range of 24-28um, resulting in a low yield of the flexible beam of the quartz pendulum plate; in addition, the fluorosilicone rubber mask is soaked in the hydrofluoric acid solution for 530 minutes and acid-dissolved. There are burrs on the edge, and on the other hand, the acid soluble colloid adheres to the surface of the flexible beam of the quartz pendulum plate, causing uneven acid etching, resulting in poor thickness uniformity of the flexible beam of the quartz pendulum plate.

During rapid etching, the rubber mask will also be acid-dissolved under the conditions of 18-22mol/L, 50-70°C, but due to its short immersion time, the acid-dissolved size is about 0.5mm. During slow etching, under the conditions of 10-15mol/L, 20-30°C, due to the low temperature and concentration of hydrofluoric acid, and the immersion time is less than 1 hour, almost no acid-dissolving phenomenon can be observed.

Preferably, during the rapid etching process, a first glass companion is placed in the first hydrofluoric acid solution, and by calculating the a first acid etch rate, a first preset time for estimating and testing the first preset thickness;

Preferably, during the slow etching process, a second glass companion is placed in the second hydrofluoric acid solution, and by calculating the amount of the second glass companion in the second hydrofluoric acid solution The second acid etching rate is used to estimate and test the second preset thickness for a second preset time.

Specifically, the first preset time is 180-300 minutes; the second preset time is 30-50 minutes.

Therefore, the man-hours required for processing the quartz pendulum plate flexible beam can be greatly shortened.

Preferably, the first preset thickness is 40-60 μm.

Preferably, the second preset thickness is 24-28 μm.

Preferably, the first preset thickness and the second preset thickness of the quartz pendulum flexible beam are measured by an optical fiber spectroscopic thickness measuring device or a micrometer.

Preferably, the flexible beam of the quartz pendulum plate is molded through a fluorosilicone rubber mask to form the flexible beam of the quartz pendulum plate that has been tooled.

The fluorosilicone rubber mask and the tooling structure (see Fig. 2) with the flexible beam of the quartz pendulum plate, the fluorosilicone rubber mask 2 is close to the surface of the flexible beam 1 of the quartz pendulum plate, only The flexible beam 1 of the quartz pendulum plate is hollowed out so that it is exposed to the first hydrofluoric acid solution and the second hydrofluoric acid solution to undergo a chemical reaction, thereby reducing the thickness.

Preferably, the flexible beam of the quartz pendulum plate is molded first with a special acid etching mold and a fluorosilicone rubber mask. In order to ensure the dimensional accuracy and surface quality of the flexible beam of the quartz pendulum plate, the positioning accuracy of the acid etching mold, the fluorosilicone rubber mask, and the flexible beam of the quartz pendulum plate and the The cleanliness of the surface of the flexible beam of the quartz pendulum.

Preferably, when the flexible beam of the quartz pendulum plate with the first preset thickness is put into the second hydrofluoric acid solution, the residual acid solution is rinsed with deionized water, and the moisture on the surface of the flexible beam of the quartz pendulum plate is blotted dry with a dust-free cloth . Therefore, it can be avoided that the flexible beam of the quartz pendulum taken out from the first hydrofluoric acid solution affects the concentration of the second hydrofluoric acid solution due to the first hydrofluoric acid solution remaining on the surface.

Preferably, during the rapid etching process, a first glass companion is placed in the first hydrofluoric acid solution, and by calculating the a first acid etch rate, the time for estimating and testing the first preset thickness;

Preferably, during the slow etching process, a second glass companion is placed in the second hydrofluoric acid solution, and by calculating the amount of the second glass companion in the second hydrofluoric acid solution The second acid etching rate is used to estimate the time for testing the second preset thickness.

Preferably, when performing rapid etching, the flexible beam of the quartz pendulum plate is vertically placed in the first hydrofluoric acid solution.

Preferably, when performing slow etching, the flexible beam of the quartz pendulum plate is vertically placed in the second hydrofluoric acid solution, so as to ensure uniform diffusion of reaction products on both sides of the flexible beam.

The specific working steps include: putting the flexible beam of the quartz swing piece and the first glass companion piece into the first hydrofluoric acid solution, performing rapid etching under the first temperature condition, etching 1 Hours later, the first glass companion was taken out, and the thickness of the first glass companion was measured to calculate the rapid etching rate v1; according to v1, the fast rate at which the flexible beam of the quartz pendulum was thinned to 40-60 μm was estimated. Etching time t1, when the rapid etching time t1 is reached, take it out from the first hydrofluoric acid solution, rinse it with deionized water, and dry the surface moisture of the flexible beam of the quartz pendulum with a dust-free cloth; Measure the thickness of the flexible beam of the quartz pendulum plate, if the measurement result is greater than 60 μm, put it back into the first hydrofluoric acid solution to continue acid etching; if the measurement result is in the range of 40-60 μm, perform slow etching. When etching at a slow rate, put the flexible beam of the quartz pendulum plate and the second glass companion plate that have reached the first preset thickness after rapid etching into the second hydrofluoric acid solution, and under the second temperature condition , to react. After etching for 10 minutes, take out the second glass companion, and measure the thickness of the second glass companion, so as to calculate the slow etching rate v2; according to v2, estimate that the flexible beam of the quartz pendulum is thinned to 24 ~28μm etching time t2, when the second etching time t2 is reached, the flexible beam of the quartz pendulum plate is taken out from the second hydrofluoric acid solution, rinsed with deionized water, and cleaned with a dust-free Dry the moisture on the surface of the flexible beam of the quartz pendulum plate, measure the thickness of the flexible beam of the quartz pendulum plate, if the measurement result is greater than 28 μm, put it back into the second hydrofluoric acid solution to continue acid etching; if the measurement result is 24 ~ 28um Within the range, the slow etching is completed. The quartz pendulum flexible beam is disassembled from the acid etching mold and the rubber mask, cleaned and stored.

The etching rate (v1 and v2) refers to the removal amount of the double-sided thickness of the flexible beam of the quartz pendulum plate per unit time, and the unit is μm/min.

Through the forming method of the acid-etched quartz pendulum flexible beam provided by the present invention, not only can greatly shorten the man-hours required for processing the quartz pendulum flexible beam, but also can precisely control the quartz pendulum plate The thickness of the flexible beam reduces the defective rate in the processing of the quartz pendulum flexible beam, and the repeatability of the thickness of the pendulum plate processed in different batches is high. On the other hand, it can reduce the phenomenon of burrs on the edge of the glass due to acid seepage at the edge of the fluorosilicone rubber mask, and can reduce the phenomenon of uneven acid etching caused by the adhesion of acid sol colloid on the surface of the flexible beam of the quartz pendulum plate, Therefore, the thickness of the flexible beam of the quartz pendulum piece completed by acid etching can be uniform and the edge defects can be reduced.

The method of the present invention for measuring the thickness of the flexible beam of the quartz pendulum plate can be measured by optical fiber or by a micrometer.

Further description will be given below using a flexible beam of a quartz pendulum plate with a thickness of 720 μm. The quartz pendulum flexible beam with a thickness of 720 μm after tooling was reacted according to the above process, and the specific reaction conditions were as follows:

Embodiment 1: the concentration of the first hydrofluoric acid solution is 18.4mol/L, and the concentration of the second hydrofluoric acid solution is 13.5mol/L; the first temperature is 50°C, and the second temperature 30° C.; the first preset thickness is 50 μm, and the second preset thickness is 26 μm.

It can be known through calculation that the fast etching rate v1 is 2.65 μm/min, and the slow etching rate v2 is 0.75 μm/min.

Under the above conditions, the time t1 consumed to reach the first predetermined thickness during the fast etching process is 252 minutes, and the time t2 consumed to reach the second predetermined thickness during the slow etching process is 32 minutes. The flexible beam of the quartz pendulum with a thickness of 720 μm is acid-etched to 26 μm, and the total time consumed is 284 min.

Embodiment 2: the concentration of the first hydrofluoric acid solution is 18.4mol/L, and the concentration of the second hydrofluoric acid solution is 13.5mol/L; the first temperature is 60°C, and the second temperature 25°C; the first preset thickness is 50 μm, and the second preset thickness is 26 μm.

It can be known through calculation that the fast etching rate v1 is 3.23 μm/min, and the slow etching rate v2 is 0.5 μm/min.

Under the above conditions, the time t1 taken to reach the first preset thickness during the fast etching process is 207 minutes, and the time t2 taken to reach the second preset thickness during the slow etching process is 48 minutes. The flexible beam of the quartz pendulum with a thickness of 720 μm is acid-etched to 26 μm, and the total consumption time is 255 min.

Embodiment 3: the concentration of the first hydrofluoric acid solution is 20.7mol/L, and the concentration of the second hydrofluoric acid solution is 13.5mol/L; the first temperature is 65°C, and the second temperature 25°C; the first preset thickness is 50 μm, and the second preset thickness is 26 μm.

It can be known through calculation that the fast etching rate v1 is 3.64 μm/min, and the slow etching rate v2 is 0.5 μm/min.

Under the above conditions, the time t1 taken to reach the first preset thickness during the fast etching process is 184 minutes, and the time t2 taken to reach the second preset thickness during the slow etching process is 48 minutes. The flexible beam of the quartz pendulum with a thickness of 720 μm is acid-etched to 26 μm, and the total time consumed is 232 minutes.

Therefore, we can clearly see that the acid etching of the flexible beam of the quartz pendulum plate with a thickness of 720 μm to 26 μm in the forming method of acid etching the flexible beam of the quartz pendulum plate disclosed in the present invention takes It is 210min～350min. It is far less than the time consumed by acid etching the flexible beam of the quartz pendulum with the same thickness by the "one-step method".

The slow etching rate of the acid-etched quartz pendulum flexible beam disclosed in the present invention is relatively slow, so it is relatively easy to control the time for reaching the second predetermined thickness in the slow etching step. The thickness control accuracy of the quartz pendulum flexible beam can be improved to ±1 μm.

And the reaction time in the first hydrofluoric acid solution is relatively short, so that the uneven thickness of the flexible beam of the quartz pendulum plate and the burr on the edge of the glass caused by the acid dissolution of the rubber mask can be avoided.

The equipment for measuring by optical fiber in the present invention is an online thickness measuring device (see Fig. 3 for details), and the optical fiber spectrum thickness measuring device includes an optical fiber spectrometer 6, a light source 5, a mold fixing base and an optical fiber measuring probe 3, and the optical fiber The spectrometer 6 and the light source are respectively connected to the optical fiber measuring probe 3 via the optical fiber 4, the mold fixing base is used to fix the quartz pendulum plate winding beam 1, and the optical fiber measuring probe 3 is vertically arranged on the mold fixed The quartz pendulum on the base is wound around one side of the beam 1 . The front and rear sides of the quartz pendulum flexible beam 1 all reflect the light source, and the reflected signal is transmitted to the optical fiber spectrometer 6 through the optical fiber 4, and the thickness of the quartz pendulum flexible beam 1 can be obtained through calculation and processing, and its value Displayed and stored in the computer, the first preset time and the second preset time can be calculated by inputting the acid etching rate.

Specifically, the optical fiber 4 connecting the optical fiber spectrometer 6 and the optical fiber measuring probe 3 is a first optical fiber, the optical fiber 4 connecting the light source 5 and the optical fiber measuring probe 3 is a second optical fiber, and the second optical fiber is The light-guiding optical fiber can transmit the light emitted by the light source 5 to the optical fiber measuring probe 3 . When the light at the optical fiber measuring probe 3 is irradiated on the quartz pendulum plate winding beam 1, part of it is reflected by the first surface of the quartz pendulum plate winding beam 1, and the reflection information is transmitted to the optical fiber measurement The probe 3 is then transmitted to the fiber optic spectrometer 6 through the first optical fiber, and a part is reflected by the second surface of the quartz pendulum around the beam 1, and the reflection information is also transmitted to the fiber optic spectrometer 6 through the first optical fiber, and then transmitted to the computer 7. The computer 7 calculates the thickness of the quartz pendulum piece around the flexible beam 1 according to the above reflection information.

Through the arrangement of the optical fiber thickness measuring device, the thickness of the quartz pendulum plate winding beam 1 can be measured, and the thickness measurement accuracy of the quartz pendulum plate winding beam 1 can be improved to ±1 μm.

The above are only preferred embodiments of the present invention, and are not intended to limit the present invention in any form. Any simple modifications, equivalent changes and modifications made to the above embodiments according to the technical essence of the present invention still belong to the present invention. within the scope of the technical solution of the invention.

Claims (10)

1. a forming method of acid etching quartz pendulum plate flexible beam, is characterized in that, comprises the following steps: The first step: Put the flexible beam of the quartz pendulum plate into the first hydrofluoric acid solution, and perform rapid etching under the first temperature condition until the flexible beam of the quartz pendulum plate reaches the first preset value. thickness; Step 2: Put the flexible beam of the quartz pendulum plate with the first preset thickness into the second hydrofluoric acid solution, and perform slow etching under the second temperature condition until the quartz pendulum plate is flexible. the beam reaches a second preset thickness; Wherein: the concentration of the first hydrofluoric acid solution is greater than the concentration of the second hydrofluoric acid solution, and the concentration of the first hydrofluoric acid solution is less than 22mol/L; The first temperature is higher than the second temperature. 2. the forming method of acid etching quartz pendulum piece flexible beam according to claim 1, is characterized in that, 18-22mol/L of the concentration of the first hydrofluoric acid solution; The concentration of the second hydrofluoric acid solution is 10-15 mol/L. 3. the forming method of acid etching quartz pendulum piece flexible beam according to claim 1, is characterized in that, The first temperature is 50-70°C; The second temperature is 20-30°C. 4. the forming method of acid etching quartz pendulum piece flexible beam according to claim 1, is characterized in that, In the rapid etching process, the first glass companion is placed in the first hydrofluoric acid solution, and the first acid of the first glass companion in the first hydrofluoric acid solution is calculated Etching rate, the first preset time for estimating and testing the first preset thickness; In the slow etching process, put a second glass companion in the second hydrofluoric acid solution, by calculating the second glass companion in the second hydrofluoric acid solution The acid etching rate is estimated and tested for a second preset time for the second preset thickness. 5. the forming method of acid etching quartz pendulum piece flexible beam according to claim 4, is characterized in that, The first preset time is 180-300 minutes; The second preset time is 30-50 minutes. 6. the forming method of acid etching quartz pendulum plate flexible beam according to claim 1, is characterized in that, Measuring the first preset thickness and the second preset thickness of the quartz pendulum flexible beam through an optical fiber spectroscopic thickness measuring device; The optical fiber spectrum thickness measuring device includes a fiber optic spectrometer, a light source, a mold fixing base and an optical fiber measuring probe, the fiber optic spectrometer and the light source are respectively connected to the optical fiber measuring probe through an optical fiber, and the mold fixing base is used to fix the quartz pendulum A sheet-wound beam, the optical fiber measuring probe is vertically arranged on one side of the quartz pendulum sheet-wound beam fixed on the mold fixing base. 7. the forming method of acid etching quartz pendulum plate flexible beam according to claim 1, is characterized in that, The first preset thickness is 40-60 μm; The second preset thickness is 24-28 μm. 8. the forming method of acid etching quartz pendulum plate flexible beam according to claim 1, is characterized in that, The flexible beam of the quartz pendulum plate is molded through a fluorosilicone rubber mask to form the flexible beam of the quartz pendulum plate that has been tooled. 9. the forming method of acid etching quartz pendulum plate flexible beam according to claim 1, is characterized in that, When putting the flexible beam of the quartz pendulum plate with the first predetermined thickness into the second hydrofluoric acid solution, rinse the residual acid solution with deionized water, and dry the surface moisture of the flexible beam of the quartz pendulum plate with a dust-free cloth. 10. the forming method of acid etching quartz pendulum plate flexible beam according to claim 1, is characterized in that, When performing rapid etching, the flexible beam of the quartz pendulum plate is vertically placed in the first hydrofluoric acid solution; When performing slow etching, the flexible beam of the quartz pendulum is vertically placed in the second hydrofluoric acid solution.