CN104459677B - Combined vernier grating and ranging system thereof - Google Patents
Combined vernier grating and ranging system thereof Download PDFInfo
- Publication number
- CN104459677B CN104459677B CN201410811519.8A CN201410811519A CN104459677B CN 104459677 B CN104459677 B CN 104459677B CN 201410811519 A CN201410811519 A CN 201410811519A CN 104459677 B CN104459677 B CN 104459677B
- Authority
- CN
- China
- Prior art keywords
- grating
- vernier
- cursor type
- range
- compound cursor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
- G01S11/00—Systems for determining distance or velocity not using reflection or reradiation
- G01S11/12—Systems for determining distance or velocity not using reflection or reradiation using electromagnetic waves other than radio waves
Landscapes
- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Engineering & Computer Science (AREA)
- General Physics & Mathematics (AREA)
- Radar, Positioning & Navigation (AREA)
- Remote Sensing (AREA)
- Optical Transform (AREA)
Abstract
The invention discloses a combined vernier grating and a ranging system of the combined vernier grating. The combined vernier grating is characterized by comprising a vernier main scale grating, a main grating and secondary grating dividing structure and a vernier secondary scale grating, wherein the vernier main scale grating, the main grating and secondary grating dividing structure and the vernier secondary scale grating are arranged from top to bottom; the vernier main scale grating and the vernier secondary scale grating are both long gratings with the same length, wherein the line density of one long grating is N pieces/mm, and the line density of the other long grating is (N-1) pieces/mm. By the adoption of the combined vernier grating with the grating line number difference being 1, two frequency spectra of the grating form a tiny difference, so that subdivision of the grating is improved on the condition of not increasing the number of grating lines, the measurement accuracy is improved, and the combined vernier grating is simple in structure and more practical.
Description
Technical field
The present invention relates to a kind of compound cursor type grating and its range-measurement system.
Background technology
Grating technology is widely used in the photoelectric instruments such as precision length measurement, angle measurement at present.General laser measurement mode master
If using laser range finder measurement, mainly having two kinds, impulse method and phase method.Impulse method sends light arteries and veins by Laser Measurement device
The moment of punching and light pulse reach target and calculate target range by the time difference that target returns receiver.Phase method is to utilize
The range information contained by phase contrast between transmitting continuous laser signal and receipt signal is realizing the measurement to target range.
Traditional grating is mainly made up of scale grating and grating reading head two parts, is existing using the transmission of light, diffraction
As the optical detection device made, this kind of texture ranging precision is not high.
Content of the invention
For the problems referred to above, the present invention provides a kind of compound cursor type grating and its range-measurement system, has noncontact, precision
The advantage that height, structure are simple, be convenient for measuring.
For realizing above-mentioned technical purpose, reach above-mentioned technique effect, the present invention is achieved through the following technical solutions：
A kind of compound cursor type grating is it is characterised in that include top-down vernier main scale grating, the boundary of major-minor grating
Structure and vernier secondary chi grating, described vernier main scale grating and vernier secondary chi grating are all the long gratings of equal length and one of
Strain line density be N bar/mm, another strain line density is (N-1) bar/mm.
A kind of range-measurement system based on compound cursor type grating, including LASER Light Source and be arranged on object under test side
CCD, be sequentially arranged between LASER Light Source and object under test transmission grating, wave filter it is characterised in that in object under test and
It is additionally provided with compound cursor type grating, described compound cursor type grating includes top-down vernier main scale light between wave filter
Grid, major-minor grating boundary structure and vernier secondary chi grating, described vernier main scale grating and vernier secondary chi grating are all equal lengths
Long grating and one of strain line density is N bar/mm, another strain line density is (N-1) bar/mm, and laser is successively through thoroughly
Penetrate grating, wave filter, compound cursor type optical grating diffraction obtain final diffraction spectrum image to object under test and by CCD.
Compound cursor type grating is based on cursor principle, is combined by the grating of 1/mm of two kinds of strain line density difference and forms,
In the case of not improving grating strain line, improve range accuracy.
The invention has the beneficial effects as follows：A kind of compound cursor type grating and its range-measurement system, due to using grating strain line phase
Differ from the compound cursor type grating of 1 so that two frequency spectrums of grating produce a small difference, thus not improving grid stroke
The subdivision of grating is improve so that certainty of measurement improves, structure is simply more practical in the case of stricture of vagina.Have noncontact, high precision,
The advantage that structure is simple, be convenient for measuring.
Brief description
Fig. 1 is a kind of structural representation of compound cursor type grating of the present invention；
Fig. 2 is the structural representation of the range-measurement system based on compound cursor type grating for the present invention；
The labelling implication of accompanying drawing is as follows：
1：Major-minor grating demarcation line；2：Vernier main scale grating；3：Vernier secondary chi grating；4：LASER Light Source；5：Transmission grating；
6：Wave filter；7：Compound cursor type grating；8：One plane of object under test；9：CCD.
Specific embodiment
With specific embodiment, technical solution of the present invention is described in further detail below in conjunction with the accompanying drawings, so that ability
The technical staff in domain can be better understood from the present invention and can be practiced, but illustrated embodiment is not as the limit to the present invention
Fixed.
As shown in figure 1, being a kind of structural representation of compound cursor type grating 7, including top-down vernier main scale light
Grid 2, major-minor grating boundary structure and vernier secondary chi grating 3, distinguish herein for being easy to distinguish two gratings being combined up and down
It is referred to as vernier main scale grating 2 and vernier secondary chi grating 3, in Fig. 1 is laterally major-minor grating boundary structure, can be such as
Major-minor grating demarcation line 1 in wire or other non-transparent parts, play compartmentation.
Described vernier main scale grating 2 and vernier secondary chi grating 3 are all the long gratings of equal length, and wherein long grating represents light
The strain line of grid is parallel to each other, and between each strain line, distance (i.e. pitch) is equal.In vernier main scale grating 2 and vernier secondary chi grating 3
The strain line density of one is N bar/mm, and another strain line density is (N-1) bar/mm, and wherein N is positive integer.Can be seen by Fig. 1
Go out：Length in the horizontal direction is identical with vernier secondary chi grating 3 for vernier main scale grating 2, and the strain line density of vernier main scale grating 2
It is (N-1) bar/mm, the strain line density of vernier secondary chi grating 3 is N bar/mm.
A kind of range-measurement system based on compound cursor type grating 7, as shown in Fig. 2 including LASER Light Source 4 and being arranged on to be measured
The CCD9 of object side, wherein LASER Light Source 4 can be semiconductor lasers.Between LASER Light Source 4 and object under test sequentially
It is provided with transmission grating 5, wave filter 6, be additionally provided with compound cursor type grating 7 between object under test and wave filter 6, wherein multiple
The concrete structure closing cursor type grating 7, referring to above-mentioned word description and Fig. 1, will not be described here.
It should be noted that, preferably object under test includes at least one plane, because planar structure can ensure that range finding knot
The degree of accuracy of structure, if object under test surface does not have planar structure, error is larger, therefore based on compound cursor type grating 7
Range-measurement system is applied to the range measurement of at least object of a planar structure.
Laser is diffracted into object under test through transmission grating 5, wave filter 6, compound cursor type grating 7 successively and is obtained by CCD9
Obtain final diffraction spectrum image, the frequency spectrum of the compound cursor type grating 7 of CCD9 record.Wherein, preferred filter 6 is used for obtaining through thoroughly
Penetrate ± 1 grade of spectrum of the diffraction spectrum after grating 5, can be by perforate on wave filter 6 or any local transparent unit
Part.After the first time diffraction of transmission grating 5, after being filtered by wave filter 6, right ± 1 grade of spectrum passes through compound trip to laser respectively
The vernier main scale grating 2 of mark formula grating 7 and vernier secondary chi grating 3 carry out re-diffraction, and the symmetrical light of two bundles is by being combined vernier
After formula grating 7, from diffraction principle, compound cursor type grating 7 can produce two kinds of spectrograms, and the order of spectrum of two gratings
Certain dislocation can be produced, the dislocation difference of the two spectrum one-levels time being formed by the compound cursor type grating 7 of measurement, lead to
Cross formula and calculate the distance between plane 8 that just can draw compound cursor type grating 7 and object under test, can be manual meter
Calculate it is also possible to be calculated using computing unit, when carrying out calculating formula using computing unit, CCD9 obtains final diffraction spectrum figure
As and send computing unit to and carry out image procossing and calculating.
For ease of understanding the present invention, first the principle of compound cursor type grating 7 is remarked additionally.
For the frequency spectrum of compound cursor type grating 7, grating equation can be expressed by following formula:
dixi/ l=m λ,
In formula, diRepresent the cycle of grating, m is spectrum level time, and λ represents the wavelength of laser, xiRepresent the position of spectrum level time
Put, i=1,2 represent vernier main scale grating 2 and vernier secondary chi grating 3 part of compound cursor type grating 7 respectively, and l represents compound
The distance between plane 8 for cursor type grating 7 and object under test.
By laser as a example 1 grade of spectrum after compound cursor type grating 7 carries out diffraction：
Vernier main scale grating 2 part：
x1=λ l/d1.
Vernier secondary chi grating 3 part：
x2=λ l/d2.
Upper two formulas are subtracted each other：
When the strain line number of vernier main scale grating 2 and vernier secondary chi grating 3 is respectively n and (n-1), d1=1/n, d2=1/
(n-1), when, can obtain：
From above formula, survey, with respect to one block of common grating, the situation that diffraction spectra measures same distance, with compound trip
Mark formula grating 7 measures and improves precision.
When using high order frequency spectrum m level time:
From the foregoing, when the spectrum taking higher order measures, degree of accuracy can improve further, but restricted and higher
The level time spectrum weaker reason of light intensity, level is secondary nor too high, is otherwise not suitable for computing unit after CCD9 shoots spectrogram and carries out figure
As digital processing.
Due to differing the compound cursor type grating 7 of 1 using grating strain line so that two frequency spectrums generations one of grating are micro-
Little difference, thus improve the subdivision of grating in the case of not improving grating strain line so that certainty of measurement improves, structure letter
Single more practical.
These are only the preferred embodiments of the present invention, not thereby limit the present invention the scope of the claims, every using this
Equivalent structure or equivalent flow conversion that bright description and accompanying drawing content are made, or it is related to be directly or indirectly used in other
Technical field, be included within the scope of the present invention.
Claims (5)
1. a kind of range-measurement system based on compound cursor type grating, including LASER Light Source（4）Be arranged on object under test side
CCD（9）, in LASER Light Source（4）It has been sequentially arranged transmission grating and object under test between（5）, wave filter（6）It is characterised in that
In object under test and wave filter（6）Between be additionally provided with compound cursor type grating（7）, described compound cursor type grating（7）Including
Top-down vernier main scale grating（2）, major-minor grating boundary structure and vernier secondary chi grating（3）, described vernier main scale grating
（2）With vernier secondary chi grating（3）It is all the long grating of equal length and one of strain line density is N bar/mm, another line
Stricture of vagina density is（N-1）Bar/mm, laser is successively through transmission grating（5）, wave filter（6）, compound cursor type grating（7）It is diffracted into and treat
Survey object and pass through CCD（9）Obtain final diffraction spectrum image.
2. a kind of range-measurement system based on compound cursor type grating according to claim 1 is it is characterised in that described laser
Light source（4）It is semiconductor laser.
3. a kind of range-measurement system based on compound cursor type grating according to claim 2 is it is characterised in that described filtering
Device（6）For obtaining through transmission grating（5）± 1 grade of spectrum of diffraction spectrum afterwards.
4. a kind of range-measurement system based on compound cursor type grating according to claim 3 is it is characterised in that described CCD
（9）It is connected with computing unit.
5. a kind of range-measurement system based on compound cursor type grating according to claim 2-4 any one, its feature exists
In described object under test includes at least one plane.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410811519.8A CN104459677B (en) | 2014-12-23 | 2014-12-23 | Combined vernier grating and ranging system thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410811519.8A CN104459677B (en) | 2014-12-23 | 2014-12-23 | Combined vernier grating and ranging system thereof |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN104459677A CN104459677A (en) | 2015-03-25 |
| CN104459677B true CN104459677B (en) | 2017-02-22 |
Family
ID=52906030
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201410811519.8A Active CN104459677B (en) | 2014-12-23 | 2014-12-23 | Combined vernier grating and ranging system thereof |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN104459677B (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105091747B (en) * | 2015-05-29 | 2017-08-29 | 中国计量学院 | A kind of cursor type grating scale |
| CN112595239A (en) * | 2020-12-11 | 2021-04-02 | 中车长春轨道客车股份有限公司 | Positioning system for automatic coating operation of railway vehicle |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2395251Y (en) * | 1999-06-17 | 2000-09-06 | 张学能 | Pattern displacement sensor |
| US6628851B1 (en) * | 2000-12-20 | 2003-09-30 | Harris Corporation | MEMS reconfigurable optical grating |
| EP1442319B1 (en) * | 2001-11-08 | 2006-08-09 | Siemens Aktiengesellschaft | Laser grid for measuring distance |
| CN200979076Y (en) * | 2006-08-04 | 2007-11-21 | 天津爱天光电子科技有限公司 | Distributed optical fiber oil gas pipeline alarming and sensor device |
| CN204302488U (en) * | 2014-12-23 | 2015-04-29 | 苏州江奥光电科技有限公司 | A kind of compound cursor type grating and range-measurement system thereof |
-
2014
- 2014-12-23 CN CN201410811519.8A patent/CN104459677B/en active Active
Also Published As
| Publication number | Publication date |
|---|---|
| CN104459677A (en) | 2015-03-25 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN105627921B (en) | A kind of the subdivision acquisition system and its measurement method of absolute type encoder | |
| CN103345759B (en) | Accurate detection method for submarine large complex sandwave landforms | |
| Mukherjee et al. | Observed seasonal and intraseasonal variability of the East India Coastal Current on the continental slope | |
| CN106525091A (en) | Fiber grating array sensing demodulation system based on multi-wavelength pulse differential modulation | |
| CN102403247A (en) | Sample Inspection Device And Sample Inspection Method | |
| CN104459677B (en) | Combined vernier grating and ranging system thereof | |
| CN106990402A (en) | A kind of navigation X-band radar wave group detection method based on Wave Theory | |
| CN102252791B (en) | Differential pair grating demodulating technology for fiber grating sensor stress measurement | |
| CN103968864B (en) | For the maximal phase seemingly Match Analysis of the frequency displacement of Measurement accuracy Brillouin spectrum | |
| EP3143425A1 (en) | Multi-target laser distance meter | |
| CN104833381B (en) | Large-capacity weak reflection raster sensing apparatus and method based on single photon technology | |
| CN105871457A (en) | Optical time-domain reflectometer system and measuring and using method thereof | |
| CN103412137B (en) | With speed-measuring method and device in twiddle factor | |
| CN104698466B (en) | remote dynamic target distance measuring device and method | |
| BR112014000491B1 (en) | method and apparatus for obtaining a sensor signal in a fiber optic cable in a downhole and optical network | |
| CN112506031A (en) | High-precision time interval measuring system for laser interference fringe signals | |
| CN104316160A (en) | Underwater sound signal instantaneous frequency demodulation method based on wavelet ridges | |
| CN107024176A (en) | Displacement measurement system and method based on diffraction grating | |
| CN104914439B (en) | A kind of quarter-phase measurement method of ultrasonic ranging | |
| CN103604527A (en) | Method for measuring temperature by using Bragg grating array | |
| CN204302488U (en) | A kind of compound cursor type grating and range-measurement system thereof | |
| CN108592786A (en) | A kind of device and method judging grating scale reference position | |
| CN104697441B (en) | A kind of multiple beam cascades ladder corner reflector laser interferometer | |
| CN105716521B (en) | Increase the devices and methods therefor of frequency domain low-coherent light interferometry range | |
| CN106547024B (en) | For the residual static correction amount estimation method and device of microseism perforation data |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CP03 | Change of name, title or address | ||
| CP03 | Change of name, title or address |
Address after: Room 101, Floor 1, Building 1, No. 15, Jiuzhou Road, Shangcheng District, Hangzhou, Zhejiang Patentee after: Zhejiang Jiangao Photoelectric Technology Co.,Ltd. Address before: 215300 No.232 Yuanfeng Road, Yushan Town, Kunshan City, Suzhou City, Jiangsu Province Patentee before: SUZHOU JIANG'AO OPTOELECTRONICS TECHNOLOGY Co.,Ltd. |