CN204302488U - A kind of compound cursor type grating and range-measurement system thereof - Google Patents
A kind of compound cursor type grating and range-measurement system thereof Download PDFInfo
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- CN204302488U CN204302488U CN201420827109.8U CN201420827109U CN204302488U CN 204302488 U CN204302488 U CN 204302488U CN 201420827109 U CN201420827109 U CN 201420827109U CN 204302488 U CN204302488 U CN 204302488U
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Abstract
The utility model discloses a kind of compound cursor type grating and range-measurement system thereof, a kind of compound cursor type grating, it is characterized in that, comprise top-down vernier main scale grating, major-minor grating boundary structure and the secondary chi grating of vernier, the secondary chi grating of described vernier main scale grating and vernier is all the long grating of equal length and the strain line density of one of them is N bar/mm, and another strain line density is (N-1) bar/mm.Due to the compound cursor type grating adopting grating strain line to differ 1, make two of grating frequency spectrums produce a small difference, thus improve the segmentation of grating when not improving grating strain line, certainty of measurement is improved, and structure is simply more practical.
Description
Technical field
The utility model relates to a kind of compound cursor type grating and range-measurement system thereof.
Background technology
Grating technology has been widely used in the photoelectric instrument such as precision length measurement, angle measurement at present.General laser measurement mode mainly utilizes laser range finder to measure, and mainly contains two kinds, impulse method and phase method.Impulse method sends moment of light pulse and light pulse arrive target and the time difference returning receiver by target calculates target range by measuring laser instrument.Phase method is the measurement that the utilization range information contained by phase difference launched between continuous laser signal and Received signal strength realizes to target range.
Traditional grating primarily of scale grating and grating reading head two parts composition, be utilize the transmission of light, optical detection device that diffraction phenomena is made, this kind of texture ranging precision is not high.
Utility model content
For the problems referred to above, the utility model provides a kind of compound cursor type grating and range-measurement system thereof, the advantage have noncontact, precision is high, structure is simple, being convenient for measuring.
For realizing above-mentioned technical purpose, reach above-mentioned technique effect, the utility model is achieved through the following technical solutions:
A kind of compound cursor type grating, it is characterized in that, comprise top-down vernier main scale grating, major-minor grating boundary structure and the secondary chi grating of vernier, the secondary chi grating of described vernier main scale grating and vernier is all the long grating of equal length and the strain line density of one of them is N bar/mm, and another strain line density is (N-1) bar/mm.
A kind of range-measurement system based on compound cursor type grating, comprise LASER Light Source and the CCD being arranged on object under test side, transmission grating is provided with in turn between LASER Light Source and object under test, wave filter, it is characterized in that, compound cursor type grating is also provided with between object under test and wave filter, described compound cursor type grating comprises top-down vernier main scale grating, major-minor grating boundary structure and the secondary chi grating of vernier, the secondary chi grating of described vernier main scale grating and vernier is all the long grating of equal length and the strain line density of one of them is N bar/mm, another strain line density is (N-1) bar/mm, laser is successively through transmission grating, wave filter, compound cursor type optical grating diffraction is to object under test and obtain final diffraction spectrum image by CCD.
Compound cursor type grating, based on cursor principle, is made up of the grating compound of two kinds of strain line density difference, 1/mm, when not improving grating strain line, improves range accuracy.
The beneficial effects of the utility model are: a kind of compound cursor type grating and range-measurement system thereof, due to the compound cursor type grating adopting grating strain line to differ 1, two of grating frequency spectrums are made to produce a small difference, thus the segmentation of grating is improve when not improving grating strain line, certainty of measurement is improved, and structure is simply more practical.The advantage there is noncontact, precision is high, structure is simple, being convenient for measuring.
Accompanying drawing explanation
Fig. 1 is the structural representation of a kind of compound cursor type of the utility model grating;
Fig. 2 is the structural representation of the utility model based on the range-measurement system of compound cursor type grating;
The mark implication of accompanying drawing is as follows:
1: major-minor grating line of demarcation; 2: vernier main scale grating; 3: the secondary chi grating of vernier; 4: LASER Light Source; 5: transmission grating; 6: wave filter; 7: compound cursor type grating; 8: a plane of object under test; 9:CCD.
Detailed description of the invention
Below in conjunction with accompanying drawing and specific embodiment, technical solutions of the utility model are described in further detail, to make those skilled in the art better can understand the utility model being implemented, but illustrated embodiment is not as to restriction of the present utility model.
As shown in Figure 1, it is a kind of structural representation of compound cursor type grating 7, comprise top-down vernier main scale grating 2, major-minor grating boundary structure and the secondary chi grating 3 of vernier, here for the ease of distinguishing, two of upper and lower compound gratings are referred to as vernier main scale grating 2 and the secondary chi grating 3 of vernier, namely transverse direction in Fig. 1 is major-minor grating boundary structure, can be such as the major-minor grating line of demarcation 1 in wire, can be also other non-transparent parts, play compartmentation.
Described vernier main scale grating 2 and the secondary chi grating 3 of vernier are all long gratings of equal length, and wherein namely long grating represents that the strain line of grating is parallel to each other, and the spacing (i.e. pitch) of each strain line is equal.The strain line density of one in the secondary chi grating 3 of vernier main scale grating 2 and vernier is N bar/mm, and another strain line density is (N-1) bar/mm, and wherein N is positive integer.As seen from Figure 1: vernier main scale grating 2 is identical with the secondary chi grating 3 of vernier length in the horizontal direction, and the strain line density of vernier main scale grating 2 is (N-1) bar/mm, and the strain line density of the secondary chi grating 3 of vernier is N bar/mm.
Based on a range-measurement system for compound cursor type grating 7, as shown in Figure 2, comprise LASER Light Source 4 and the CCD9 being arranged on object under test side, wherein LASER Light Source 4 can be semiconductor laser.Transmission grating 5, wave filter 6 is provided with in turn between LASER Light Source 4 and object under test, compound cursor type grating 7 is also provided with between object under test and wave filter 6, wherein the concrete structure of compound cursor type grating 7 is see above-mentioned text description and Fig. 1, does not repeat them here.
It should be noted that, preferred object under test includes at least one plane, because planar structure can ensure the accuracy of distance measuring structure, if object under test surface does not have planar structure, then error is comparatively large, is therefore applicable to the range measurement of the object having a planar structure at least based on the range-measurement system of compound cursor type grating 7.
Laser is diffracted into object under test through transmission grating 5, wave filter 6, compound cursor type grating 7 and obtains final diffraction spectrum image by CCD9 successively, and CCD9 records the frequency spectrum of compound cursor type grating 7.Wherein, preferred filter 6 for obtain the difraction spectrum after transmission grating 5 ± 1 grade of spectrum, can pass through perforate on wave filter 6, also can be any local transparent element.Laser is by first time of transmission grating 5 after diffraction, after filtered device 6 filters, right ± 1 grade spectrum carries out re-diffraction respectively by the vernier main scale grating 2 of compound cursor type grating 7 and the secondary chi grating 3 of vernier, the light of two bundle symmetries is by after compound cursor type grating 7, from diffraction principle, compound cursor type grating 7 can produce two kinds of spectrograms, and the order of spectrum of two gratings can produce certain dislocation, the dislocation difference that two the spectrum one-levels formed by measurement compound cursor type grating 7 are secondary, just the distance between compound cursor type grating 7 and a plane 8 of object under test can be drawn by formulae discovery, it can be manual calculation, also computing unit can be utilized to calculate, when use computing unit carries out calculating formula, CCD9 obtains final diffraction spectrum image and sends computing unit to and carries out image procossing and calculating.
For ease of understanding the utility model, first the principle of compound cursor type grating 7 is remarked additionally.
For the frequency spectrum of compound cursor type grating 7, grating equation can be expressed by following formula:
d
ix
i/l＝mλ，
In formula, d
irepresent the cycle of grating, m is spectrum level time, and λ represents the wavelength of laser, x
irepresent the position of spectrum level time, i=1,2 vernier main scale grating 2 and vernier secondary chi grating 3 parts representing compound cursor type grating 7 respectively, l represents the distance between compound cursor type grating 7 and a plane 8 of object under test.
1 grade after diffraction spectrum is carried out by compound cursor type grating 7 for laser:
Vernier main scale grating 2 part:
x
1＝λl/d
1。
Vernier secondary chi grating 3 part:
x
2＝λl/d
2。
Upper two formulas are subtracted each other:
When the strain line number of the secondary chi grating 3 of vernier main scale grating 2 and vernier is respectively n and (n-1), d
1=1/n, d
2time=1/ (n-1), can obtain:
From above formula, survey relative to one block of common grating the situation that diffraction spectra measures same distance, carry out measurement with compound cursor type grating 7 and improve precision.
When adopting high order frequency spectrum m level time:
From the above, when taking the spectrum of more high-order to measure, accuracy can improve further, but the restricted cause more weak with more high order spectrum light intensity, level time can not be too high, otherwise after being not suitable for CCD9 shooting spectrogram, computing unit carries out image processing.
Due to the compound cursor type grating 7 adopting grating strain line to differ 1, make two of grating frequency spectrums produce a small difference, thus improve the segmentation of grating when not improving grating strain line, certainty of measurement is improved, and structure is simply more practical.
These are only preferred embodiment of the present utility model; not thereby the scope of the claims of the present utility model is limited; every utilize the utility model description and accompanying drawing content to do equivalent structure or equivalent flow process conversion; or be directly or indirectly used in the technical field that other are relevant, be all in like manner included in scope of patent protection of the present utility model.
Claims (6)
1. a compound cursor type grating, it is characterized in that, comprise top-down vernier main scale grating (2), major-minor grating boundary structure and secondary chi grating (3) of vernier, secondary chi grating (3) of described vernier main scale grating (2) and vernier is all the long grating of equal length and the strain line density of one of them is N bar/mm, and another strain line density is (N-1) bar/mm.
2. the range-measurement system based on compound cursor type grating, comprise LASER Light Source (4) and be arranged on the CCD (9) of object under test side, transmission grating (5) is provided with in turn between LASER Light Source (4) and object under test, wave filter (6), it is characterized in that, compound cursor type grating (7) is also provided with between object under test and wave filter (6), described compound cursor type grating (7) comprises top-down vernier main scale grating (2), major-minor grating boundary structure and secondary chi grating (3) of vernier, secondary chi grating (3) of described vernier main scale grating (2) and vernier is all the long grating of equal length and the strain line density of one of them is N bar/mm, another strain line density is (N-1) bar/mm, laser is successively through transmission grating (5), wave filter (6), compound cursor type grating (7) is diffracted into object under test and obtains final diffraction spectrum image by CCD (9).
3. a kind of range-measurement system based on compound cursor type grating according to claim 2, is characterized in that, described LASER Light Source (4) is semiconductor laser.
4. a kind of range-measurement system based on compound cursor type grating according to claim 3, is characterized in that, described wave filter (6) for obtain difraction spectrum after transmission grating (5) ± 1 grade of spectrum.
5. a kind of range-measurement system based on compound cursor type grating according to claim 4, is characterized in that, described CCD (9) is connected with computing unit.
6. a kind of range-measurement system based on compound cursor type grating according to claim 2-5 any one, it is characterized in that, described object under test includes at least one plane.
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104459677A (en) * | 2014-12-23 | 2015-03-25 | 苏州江奥光电科技有限公司 | Combined vernier grating and ranging system thereof |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104459677A (en) * | 2014-12-23 | 2015-03-25 | 苏州江奥光电科技有限公司 | Combined vernier grating and ranging system thereof |
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