CN104457724A - Hemispherical resonant gyro reading base structure with high reliability and preparation method - Google Patents
Hemispherical resonant gyro reading base structure with high reliability and preparation method Download PDFInfo
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- CN104457724A CN104457724A CN201410819473.4A CN201410819473A CN104457724A CN 104457724 A CN104457724 A CN 104457724A CN 201410819473 A CN201410819473 A CN 201410819473A CN 104457724 A CN104457724 A CN 104457724A
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- spherical shell
- read
- metallic diaphragm
- electrode
- pedestal
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
- G01C19/567—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using the phase shift of a vibration node or antinode
- G01C19/5691—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using the phase shift of a vibration node or antinode of essentially three-dimensional vibrators, e.g. wine glass-type vibrators
Abstract
The invention discloses a hemispherical resonant gyro reading base structure with high reliability and a preparation method. The hemispherical resonant gyro reading base structure comprises a spherical shell which is circumferentially connected integrally to form a smooth surface; the surface of the spherical shell is coated with a metal membrane layer; eight separation lines are etched on the metal membrane layer at equal intervals so as to radially separate the metal membrane layer into eight mutually insulated regions; a reading electrode is etched on the metal membrane layer of each region; the metal membrane layer outside the reading electrode of each region forms a bucking electrode. According to the invention, the operation is simple; the time of the processing working procedure and the membrane coating working procedure is shortened; the generation of redundancy is reduced; the production efficiency and the success rate of the reading base are improved greatly; the performances of the hemispherical resonant gyro can be improved.
Description
Technical field
The present invention relates to the responsive meter unit of hemispherical reso nance gyroscope, specifically refer to that responsive gauge outfit reads structural design of pedestal and preparation method thereof, reading the reliability of pedestal, belonging to hemispherical reso nance gyroscope technical field for improving hemispherical reso nance gyroscope.
Background technology
Hemispherical reso nance gyroscope has many good qualities compared with classical spinning top, particularly have structure simple, without the unique advantage such as wearing terrain and movement-less part, being subjected to the great attention in domestic and international inertia field in recent years, is one of promising gyroscope of following most.
The responsive gauge outfit of hemispherical reso nance gyroscope forms by encouraging cover 1, reading pedestal 3 and harmonic oscillator 5 three parts Fine Boring, is provided with exciting electrode 2 in excitation cover 1, and as shown in Figure 1, harmonic oscillator 5 inside surface and reading pedestal 3 outside surface eight read-out electrodes 4 form little electric capacity.Static-electronic driving harmonic oscillator is vibrative while, by the change between read-out electrode 4 and harmonic oscillator 5 electric capacity, detect the vibration displacement of harmonic oscillator, extract the control signal such as amplitude, phase place, frequency of harmonic oscillator.The capacitance variations read between the structure of pedestal 3 design and harmonic oscillator 5 is directly linked to the extraction of the control signal such as amplitude, phase place of harmonic oscillator, affects the Performance And Reliability of whole responsive gauge outfit.
Hemispherical reso nance gyroscope reads pedestal sphere and is separated into eight parts by separation trough, every part plates metallic diaphragm, form eight independently electrodes, then split at the enterprising column electrode of metallic diaphragm by laser etching techniques, its partition graph is circular, be called read-out electrode, form electric capacity with harmonic oscillator Internal Spherical Surface, the metallic diaphragm of circular outer forms guarded electrode as electrode screening.There is following shortcoming in existing reading base construction and technique processing method:
1, the slot segmentation in the middle of each read-out electrode causes mechanical processing technique loaded down with trivial details, and each seamed edge causes the generation of molecule fifth wheel due to reasons such as processing, transport, assemblings.
2, read the slot segmentation of pedestal when plated film, need to ensure do not have rete or a small amount of rete to be coated in slot segmentation by the design of fixture, to ensure eight electrode mutually insulateds, therefore slot segmentation needs to block and shield, and causes coating clamp to design complicated; Easily produce micro-crack in Fixture assembly process simultaneously and collapse limit phenomenon, or due to fit-up gap excessive, when plated film, impact reads the coating of base-plates surface metal level.
3, the circular configuration of read-out electrode is limited, and useful area is less, affects the gain stability of hemispherical reso nance gyroscope.
4, the technique such as machining, plated film reading pedestal adds extra difficulty, affects the yield rate of this device, reduces working (machining) efficiency simultaneously.
Summary of the invention
For prior art above shortcomings, a kind of hemispherical reso nance gyroscope is the object of the present invention is to provide to read pedestal and preparation method, the present invention is simple to operate, shorten manufacturing procedure and filming process time, reduce the generation of fifth wheel, greatly improve and read pedestal production efficiency and success ratio, the performance of hemispherical reso nance gyroscope can be improved.
To achieve these goals, the technical solution used in the present invention is as follows:
The hemispherical reso nance gyroscope that a kind of reliability improves reads base construction, comprise spherical shell, described spherical shell is circumferentially connecting as one and is forming level and smooth surface, at spherical shell metal-plated membrane layer on the surface, equidistantly on metallic diaphragm be etched with eight separator bars, metallic diaphragm to be divided into diametrically eight regions insulated from each other, the metallic diaphragm in each region is etched with read-out electrode, the metallic diaphragm outside the read-out electrode of each region forms guarded electrode.
Described read-out electrode shape is trapezoidal or fan ring-shaped, and trapezoidal waist extends outward as far as possible.
The hemispherical reso nance gyroscope that reliability improves reads a pedestal preparation method, and step is as follows,
1) processing reads pedestal spherical shell part, and spherical shell upper end horizontal resection forms annular end face, and spherical shell, circumferentially without the need to segmentation, retains its integrality;
2) even plating layer of metal rete on spherical shell periphery;
3) circumferentially utilize laser etching techniques to etch the figure of all read-out electrodes at metallic diaphragm, then go out radial line at two read-out electrode intermediate etch, to split metallic diaphragm circumferentially, ensure the resistance value insulation of all guarded electrodes.
Compared to existing technology, the present invention has following beneficial effect:
1, cancel slot segmentation, keep complete spherical shell, simplified processing process, reduce the generation source of fifth wheel, improve the reliability reading pedestal.
2, due to spherical shell surface integral plated film, therefore coating clamp simplicity of design, the phenomenon on limit can not be cracked and collapse in Fixture assembly and coating process, improve the stability reading pedestal.
3, can reduce the assembly technology error of coating clamp and reading pedestal, fit-up gap is effectively controlled, and reads the homogeneity of base-plates surface coating metal layer, batch and holding consistency is good.
4, cancel slot segmentation, be conducive to the surface area increasing guarded electrode, the useful area also corresponding increase of its read-out electrode, improves the gain stability of gyro.
5, reduce to read the machining of pedestal, the difficulty of coating process, improve working (machining) efficiency and the yield rate of device.
In a word, the present invention meets hemispherical resonant gyro to the various performance parameters read required by pedestal, improves the reliability of gyro, reduces the production cost reading pedestal, simple to operation, shortens the time reading pedestal and produce.
Accompanying drawing explanation
The responsive gauge head structure schematic diagram of Fig. 1-hemispherical reso nance gyroscope.
Fig. 2-the present invention reads base electrode and to optimize structure figure.
Embodiment
The present invention optimizes the reading base construction of hemispherical reso nance gyroscope, reduces procedure of processing, simplifies coating process, cancels, the slot segmentation read between pedestal eight guarded electrodes by its being made of one of spherical shell state.Read pedestal for new construction, simplify coating clamp and coating process, coating clamp is designed to globality and consistance, reduces the coating process time.In concrete laser etching process process, change the figure of read-out electrode, change into trapezoidal or fan ring-shaped figure by original circle, increase useful area.The insulation of guarded electrode simultaneously adopts laser etching techniques by its physical isolation, and prevent mutual coupling and interference, it is optimized structure as shown in Figure 2.
Hemispherical reso nance gyroscope of the present invention reads reliability design and the preparation method of pedestal, comprise read pedestal structure optimization, guarded electrode and read-out electrode etching make.By the structure optimization to reading pedestal, the useful area simplifying coating process, increase read-out electrode, improve the Performance And Reliability of gyro, its concrete steps are as follows:
1, the structural design of pedestal is read
When structural design, cancel slot segmentation, keep the integrality of sphere, save the time of processing needed for slot segmentation.
2, coating clamp and coating process is simplified
After cancelling slot segmentation, sphere keeps consistency, and the part of former slot segmentation does not need to block and shield, and coating clamp also keeps integrality, simplifies coating clamp and coating process, shortens the coating process time.
3, the useful area of read-out electrode is increased
Owing to cancelling slot segmentation, spherical shell can keep consistency, and the surface area of housing increases, redesign and optimize read-out electrode and guarded electrode, read-out electrode figure is changed into trapezoidal or fan ring by circle, and useful area increases about 20%, and the gain stability of gyro improves at least one the order of magnitude.And the mutually insulated of eight guarded electrodes, then adopt the lines being designed to more than a 0.4mm width between adjacent, ensure that insulation resistance is at more than 500M Ω, eliminates intercoupling and disturbing of each guarded electrode.
4, Performance Detection and checking
Read pedestal according to after technology enforcement of the present invention, as indicated with 2, in the responsive gauge outfit Performance Detection of half spherical top, its performance parameter gain stability improves a more than magnitude, have no coupling and the interference of guarded electrode, do not cause the generation of fifth wheel because reading pedestal, the reliability reading pedestal is greatly improved and improves.
The laser separation of read-out electrode and guarded electrode is carried out on surface after completing rete coating.The machining time of prior art is longer, and the phenomenon that seamed edge collapses limit is relatively more serious, and whole sphere more former technology process time of the present invention shortens 1/4, there is not the phenomenon that seamed edge collapses limit.The present invention cancels slot segmentation, that eliminates seamed edge collapses side effect, simplify coating process, improve the reliability reading pedestal, increase the useful area of read-out electrode, the gain stability improving the Performance And Reliability, particularly gyro of gyro improves, and can meet the requirement of Gyro Precision and engineer applied completely.
Innovative point of the present invention is the useful area cancelled slot segmentation and change read-out electrode, namely keeps the consistance of the spherical shell reading pedestal, increases the useful area of read-out electrode, improve the reliability reading pedestal.The present invention can avoid seamed edge to collapse the fifth wheel of limit generation, simplifies mechanical processing technique and coating process, shortens the development and production cycle.
The structural design, etched features, etching technics etc. of this reading pedestal reliability are all by the analog simulation of corresponding software, and the operability of its technique, adaptability and reliability are all greatly improved.
The above embodiment of the present invention is only for example of the present invention is described, and is not the restriction to embodiments of the present invention.For those of ordinary skill in the field, other multi-form change and variations can also be made on the basis of the above description.Here cannot give exhaustive to all embodiments.Every belong to technical scheme of the present invention the apparent change of amplifying out or variation be still in the row of protection scope of the present invention.
Claims (3)
1. the hemispherical reso nance gyroscope of a reliability raising reads base construction, comprise spherical shell, it is characterized in that: described spherical shell is circumferentially connecting as one and forming level and smooth surface, at spherical shell metal-plated membrane layer on the surface, equidistantly on metallic diaphragm be etched with eight separator bars, metallic diaphragm to be divided into diametrically eight regions insulated from each other, the metallic diaphragm in each region is etched with read-out electrode, and the metallic diaphragm outside the read-out electrode of each region forms guarded electrode.
2. the hemispherical reso nance gyroscope that reliability according to claim 1 improves reads base construction, it is characterized in that: described read-out electrode shape is trapezoidal or fan ring-shaped.
3. the hemispherical reso nance gyroscope that reliability improves reads a pedestal preparation method, it is characterized in that: step is as follows,
1) processing reads pedestal spherical shell part, and spherical shell upper end horizontal resection forms annular end face, and spherical shell, circumferentially without the need to segmentation, retains its integrality;
2) even plating layer of metal rete on spherical shell periphery;
3) circumferentially utilize laser etching techniques to etch the figure of all read-out electrodes at metallic diaphragm, then go out radial line at two read-out electrode intermediate etch, to split metallic diaphragm circumferentially, ensure the resistance value insulation of all guarded electrodes.
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Cited By (3)
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CN109506640A (en) * | 2018-11-20 | 2019-03-22 | 上海航天控制技术研究所 | A kind of oscillation gyro automatic assembling apparatus and its method |
CN112414389A (en) * | 2020-11-20 | 2021-02-26 | 中国电子科技集团公司第二十六研究所 | Harmonic oscillator of hemispherical resonator gyroscope and signal acquisition structure thereof |
CN117260002A (en) * | 2023-11-20 | 2023-12-22 | 西安精谐科技有限责任公司 | Hemispherical resonant gyro electrode based on laser processing and processing method and system |
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CN109506640A (en) * | 2018-11-20 | 2019-03-22 | 上海航天控制技术研究所 | A kind of oscillation gyro automatic assembling apparatus and its method |
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CN117260002A (en) * | 2023-11-20 | 2023-12-22 | 西安精谐科技有限责任公司 | Hemispherical resonant gyro electrode based on laser processing and processing method and system |
CN117260002B (en) * | 2023-11-20 | 2024-02-09 | 西安精谐科技有限责任公司 | Hemispherical resonant gyro electrode based on laser processing and processing method and system |
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Application publication date: 20150325 |