CN104440911A - Miniature integrated cleaning robot control system - Google Patents
Miniature integrated cleaning robot control system Download PDFInfo
- Publication number
- CN104440911A CN104440911A CN201410637593.2A CN201410637593A CN104440911A CN 104440911 A CN104440911 A CN 104440911A CN 201410637593 A CN201410637593 A CN 201410637593A CN 104440911 A CN104440911 A CN 104440911A
- Authority
- CN
- China
- Prior art keywords
- module
- axle
- control module
- control system
- robot
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Manipulator (AREA)
Abstract
The invention relates to the field of cleaning robots, and particularly discloses a miniature integrated cleaning robot control system. The miniature integrated cleaning robot control system comprises a robot controller, a rectifying module, an IO control module, a first shaft control module, a second shaft control module, a first shaft driving module, a second shaft driving module, a third shaft driving module, a fourth shaft driving module, an IO switching module and a rear panel integration module. The robot controller is in communication with the first shaft driving module, the second shaft driving module and the IO control module. The IO control module is connected with the IO switching module, and the rear panel integration module is in communication with the IO control module and the robot controller. The first shaft control module controls the first shaft driving module and the second shaft driving module, and the second shaft control module controls the third shaft driving module and the fourth shaft driving module. The first shaft control module and the second shaft control module conducts communication with the rectifying module. The miniature integrated cleaning robot control system can be installed with a robot body integrally, therefore, cost is reduced, and the reliability and the efficiency of the system are improved.
Description
Technical field
The present invention relates to clean-room robot field, particularly small-sized integrated clean-room robot control system.
Background technology
Clean robot is the important component part of IC manufacturing equipment, the automation transmission of wafer can be realized, wafer is very easily broken, this requires that mechanical arm realizes the location of degree of precision together with wafer tray, but due to the reason of manufacturing process, rigging error, the length of mechanical arm and there is gap between initial position and setting value, the wafer tray on mechanical arm well can not be overlapped with wafer at wafer position place, and potential harm served by band.
Existing clean-room robot control system is made up of robot controller, IO plate, I/O interface plate, position control plate, universal driver.Due to needs position control plate and universal driver, cause switch board volume excessive, expose following shortcoming:
(1) very valuable clean room space is taken.
(2) position control module and universal driver need special multicore wire harness to be connected, and increase cost on the one hand, add electric connecting point on the other hand, reduce system reliability.
(3) reduce the real-time of system responses, performing due to instruction and responding link needs to issue control plate in position by robot controller by CAN, controls plate be converted to analog output to universal driver by position.Signal transmissions chain is long, cannot ensure the real-time of system responses.
(4) because universal driver is applied mainly for general business, need to look after various application, parameter instruction does not do better optimization for the typical apply of clean-room robot, better cannot reduce positioning time, reduce torque ripple.
(5) because switch board volume is excessive, cannot with robot body integrative installation technology, the interconnected cable of intermediate demand connects, on the one hand because line impedance causes electric energy loss, on the other hand because interconnected cable needs the link through a lot of motion, the wearing and tearing of easy generation cable, the reliability of long-play influential system.
(6) because switch board volume is excessive, cannot with robot body integrative installation technology, due to the existence of interconnect cable, need some motion place install drag chain additional, drag chain motion time can produce particle, the environment between removing pollutant.
Summary of the invention
The present invention is intended to overcome existing robot control system does not have special purpose driver and position control device, and Signal transmissions chain is long, cannot ensure the technological deficiency of the real-time of system responses, provides a kind of small-sized integrated clean-room robot control system.
For achieving the above object, the present invention is by the following technical solutions: small-sized integrated clean-room robot provided by the invention, comprise control system, robot controller, rectification module, IO control module, also comprise the first axle control module, the second axle control module, the first axle driver module, the second axle driver module, Three-axis drive module, the 4th axle driver module, IO interconnecting module and rear board integration module;
Described robot controller communicates with described first axle driver module, described second axle driver module and described IO control module respectively; Described IO control module is connected with IO interconnecting module, and described rear board integration module communicates with described IO control module, described IO interconnecting module and described robot controller respectively; Described first axle control module controls described first axle driver module and described second axle driver module, and described second axle control module controls described Three-axis drive module and the 4th axle driver module; Described first axle control module and described second axle control module communicate with described rectification module respectively.
In some embodiments, described robot controller, described first axle control module and described second axle control module are communicated by CAN.
In some embodiments, described first axle control module, described second axle control module communicate with described rectification module respectively by CAN.
In some embodiments, described robot controller is connected with teach box.
In some embodiments, described small-sized integrated clean-room robot control system is connected with the motor of clean-room robot body by the motor line of force and brake, motor encoder line and system IO line.
In some embodiments, the motor of described clean-room robot body comprises Z axis motor, shaft rotating motor, R1 telescopic shaft motor, R2 telescopic shaft motor.
Beneficial effect of the present invention is: the present invention adopts special small-sized integrated driver and controller, effectively decreases switch board installation volume, thus can with robot body integrative installation technology, reduce cost, improve system reliability and efficiency; Body and switch board energy integrative installation technology reduce interconnect cable, eliminate the interconnect cable of motion, thus eliminate the particle contamination because drag chain motion produces, and improve the yield rate of wafer; Adopt the small-sized integrated control system that CANOPEN board is interconnected, realizing on pinpoint basis, the system that effectively reduces connects and later maintenance cost.
Accompanying drawing explanation
Fig. 1 is the module map of the small-sized integrated clean-room robot control system of the present invention;
Fig. 2 is the circuit diagram of the present invention's small-sized integrated clean-room robot control system specific embodiment;
Fig. 3 is the small-sized integrated clean-room robot system architecture diagram of the present invention.
Detailed description of the invention
In order to make object of the present invention, technical scheme and advantage clearly understand, below in conjunction with drawings and the specific embodiments, the present invention is further elaborated.Should be appreciated that specific embodiment described herein only in order to explain the present invention, and be not construed as limiting the invention.
Thinking of the present invention is: by using special driving governor and driver in the controls, signal transmission line is shortened, and ensures the real-time of system responses; On the other hand, adopt CANOPEN (the high-rise communications protocol of framework on control area net（CAN） CAN) board interconnected, make body and switch board can integrative installation technology, thus decrease interconnect cable, do not need drag chain, eliminate the particle contamination because drag chain motion produces, improve the yield rate of wafer.
Referring to Fig. 1, is the module map of the small-sized integrated clean-room robot control system of the present invention.Comprise robot controller 1, rectification module 5, IO control module 6, first axle control module 2, second axle control module 3, first axle driver module 41, second axle driver module 42, Three-axis drive module 43, the 4th axle driver module 44, IO interconnecting module 7 and rear board integration module 8.Robot controller 1 is communicated by CAN each other with the first axle driver module 2, second axle driver module 3 and IO control module 6; IO control module 6 is connected with IO interconnecting module 7, and rear board integration module 8 is connected with IO control module 6, IO interconnecting module 7 and robot controller 1 respectively; First axle control module 2 controls the first axle driver module 41 and the second axle driver module 42, second axle control module 3 controls Three-axis drive module 43 and the 4th axle driver module 44; First axle control module 2 and the second axle control module 3 are connected with rectification module 5, respectively for carrying out rectification to signal.
Referring to Fig. 2, is the circuit diagram of the present invention's small-sized integrated clean-room robot control system specific embodiment.Wherein robot controller is connected with the first axle control panel by CAN1 bus, the P2 port of the first axle control panel is connected with the second axle control panel by CAN2 bus, the P2 port of the second axle control panel is connected with IO control panel by CAN3 bus, thus achieves the CAN communication between robot controller, the first axle control panel, the second axle control panel and IO control panel.The P4 port of the first axle control panel is connected with the first axle drive plate J1, and for controlling the first axle drive plate, P5 port is connected with the second axle drive plate J2, for controlling the second axle drive plate.The P4 port of the second axle control panel is connected with the P1 port of Three-axis drive plate J3, and P5 port is connected with the P1 port of the 4th axle drive plate J4, is respectively used to control Three-axis drive plate J3 and the 4th axle drive plate J4.The P7B port of the second axle control panel is connected with rectifier, and the P7A port of the first axle control panel is connected with the P7B port of the second axle control panel, for carrying out rectification to the signal of the first axle control panel and the second axle control panel.IO control panel is connected with IO keyset and rear board circuit board.IO keyset is connected with rear board circuit board.Robot controller is communicated with rear board circuit board by network interface LAN and communication port COM1.
The small-sized integrated clean-room robot control system of the present invention adopts special purpose driver and control panel, decreases multicore wire harness and connects and electric connecting point, improve system reliability.
Referring to Fig. 3, is the small-sized integrated clean-room robot system architecture diagram of the present invention.Main electric cabinet side is control system of the present invention, and it connects the Z axis motor of body, shaft rotating motor, R1 telescopic shaft motor and R2 telescopic shaft motor respectively by the motor line of force and brake, motor encoder line.System IO line connects intrinsic fan.Interconnected by board, by control system and body integrative installation technology, effectively decrease switch board installation volume.
The above the specific embodiment of the present invention, does not form limiting the scope of the present invention.Any various other done by technical conceive of the present invention change and distortion accordingly, all should be included in the protection domain of the claims in the present invention.
Claims (6)
1. a small-sized integrated clean-room robot control system, comprise robot controller, rectification module, IO control module, it is characterized in that, also comprise the first axle control module, the second axle control module, the first axle driver module, the second axle driver module, Three-axis drive module, the 4th axle driver module, IO interconnecting module and rear board integration module;
Described robot controller communicates with described first axle driver module, described second axle driver module and described IO control module respectively; Described IO control module is connected with IO interconnecting module, and described rear board integration module communicates with described IO control module, described IO interconnecting module and described robot controller respectively; Described first axle control module controls described first axle driver module and described second axle driver module, and described second axle control module controls described Three-axis drive module and the 4th axle driver module; Described first axle control module and described second axle control module communicate with described rectification module respectively.
2. small-sized integrated clean-room robot control system as claimed in claim 1, is characterized in that, described robot controller, described first axle control module and described second axle control module are communicated by CAN.
3. small-sized integrated clean-room robot control system as claimed in claim 1, is characterized in that, described first axle control module, described second axle control module communicate with described rectification module respectively by CAN.
4. small-sized integrated clean-room robot control system as claimed in claim 1, it is characterized in that, described robot controller is connected with teach box.
5. small-sized integrated clean-room robot control system as claimed in claim 1, it is characterized in that, described small-sized integrated clean-room robot control system is connected with the motor of clean-room robot body by the motor line of force and brake, motor encoder line and system IO line.
6. small-sized integrated clean-room robot control system as claimed in claim 5, is characterized in that, the motor of described clean-room robot body comprises Z axis motor, shaft rotating motor, R1 telescopic shaft motor, R2 telescopic shaft motor.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410637593.2A CN104440911A (en) | 2014-11-12 | 2014-11-12 | Miniature integrated cleaning robot control system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410637593.2A CN104440911A (en) | 2014-11-12 | 2014-11-12 | Miniature integrated cleaning robot control system |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN104440911A true CN104440911A (en) | 2015-03-25 |
Family
ID=52888059
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201410637593.2A Pending CN104440911A (en) | 2014-11-12 | 2014-11-12 | Miniature integrated cleaning robot control system |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN104440911A (en) |
Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20080091305A1 (en) * | 2005-12-02 | 2008-04-17 | Irobot Corporation | Coverage robot mobility |
| CN101524677A (en) * | 2009-01-09 | 2009-09-09 | 成都广泰实业有限公司 | Eight-axis six-linkage spray coater control system |
| CN201385313Y (en) * | 2009-04-24 | 2010-01-20 | 中国科学院沈阳自动化研究所 | Motor control device for amphibious robot |
| CN102126222A (en) * | 2011-04-27 | 2011-07-20 | 东南大学 | Control system for remote-controlled robot |
| US20120191244A1 (en) * | 2011-01-24 | 2012-07-26 | Samsung Electronics Co., Ltd. | Robot control system and method |
| CN103522289A (en) * | 2013-09-29 | 2014-01-22 | 东莞艾尔发自动化机械有限公司 | Multi-shaft mechanical arm control method and control device |
| CN103586868A (en) * | 2013-11-13 | 2014-02-19 | 中广核检测技术有限公司 | Handheld control device for robot for checking reactor pressure vessel |
| CN103809501A (en) * | 2012-11-08 | 2014-05-21 | 沈阳新松机器人自动化股份有限公司 | Transportation crane control system |
-
2014
- 2014-11-12 CN CN201410637593.2A patent/CN104440911A/en active Pending
Patent Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20080091305A1 (en) * | 2005-12-02 | 2008-04-17 | Irobot Corporation | Coverage robot mobility |
| CN101524677A (en) * | 2009-01-09 | 2009-09-09 | 成都广泰实业有限公司 | Eight-axis six-linkage spray coater control system |
| CN201385313Y (en) * | 2009-04-24 | 2010-01-20 | 中国科学院沈阳自动化研究所 | Motor control device for amphibious robot |
| US20120191244A1 (en) * | 2011-01-24 | 2012-07-26 | Samsung Electronics Co., Ltd. | Robot control system and method |
| CN102126222A (en) * | 2011-04-27 | 2011-07-20 | 东南大学 | Control system for remote-controlled robot |
| CN103809501A (en) * | 2012-11-08 | 2014-05-21 | 沈阳新松机器人自动化股份有限公司 | Transportation crane control system |
| CN103522289A (en) * | 2013-09-29 | 2014-01-22 | 东莞艾尔发自动化机械有限公司 | Multi-shaft mechanical arm control method and control device |
| CN103586868A (en) * | 2013-11-13 | 2014-02-19 | 中广核检测技术有限公司 | Handheld control device for robot for checking reactor pressure vessel |
Non-Patent Citations (1)
| Title |
|---|
| 黄瑞宁、楼云江等: "开放式驱控一体化的工业机器人控制器研发", 《机器人技术与应用》 * |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JP5098936B2 (en) | Servo control device | |
| CN104967381A (en) | Electromagnetic coupling flexible speed adjusting device | |
| KR20130010183A (en) | Robot system using power line communication | |
| CN204613716U (en) | A kind of interface module of multi-motor driving centralized control system | |
| CN107317529A (en) | Closed-loop stepper motor servo-control system based on EtherCAT | |
| CN104440911A (en) | Miniature integrated cleaning robot control system | |
| CN108288929A (en) | The air-conditioner control system in its hotel of the conversion circuit plate and application of BLDC motors | |
| CN204886768U (en) | Extensible multichannel step actuator and extensible multichannel motor control system | |
| CN203278884U (en) | Data communication device of wind power current transformer | |
| CN207281569U (en) | A kind of laminating machine | |
| CN208226855U (en) | Large power semiconductor device drive dynamic control device and series connection power taking structure | |
| CN209088857U (en) | High power density low-speed high-torque motor controller | |
| CN202975747U (en) | Network control system of heavy section car | |
| CN205792068U (en) | The integration powered based on POE drives motor | |
| CN206311940U (en) | A kind of real-time synchronization blind controller system of use EtherCAT agreements | |
| CN207305130U (en) | A kind of integrated patch machine pastes head motor driver | |
| CN203117754U (en) | Servo control system based on connection mode realized by means of communication module | |
| CN103501139A (en) | Permanent magnet synchronous motor coaxial drive system with phase shifting | |
| CN206421190U (en) | Servo-driver and servo drive system | |
| CN206541141U (en) | A kind of four axle controls the control system of integration | |
| CN217213501U (en) | Distributed motor control system | |
| CN215773159U (en) | CAN bus hand wheel controller | |
| CN215735276U (en) | Robot driving and controlling integrated controller | |
| CN107666335A (en) | A kind of isolating coupler | |
| CN111684372B (en) | A encoder, driver, controller and robot for robot |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| C02 | Deemed withdrawal of patent application after publication (patent law 2001) | ||
| WD01 | Invention patent application deemed withdrawn after publication |
Application publication date: 20150325 |