CN104412125B - 测量装置、系统和方法 - Google Patents
测量装置、系统和方法 Download PDFInfo
- Publication number
- CN104412125B CN104412125B CN201380025699.0A CN201380025699A CN104412125B CN 104412125 B CN104412125 B CN 104412125B CN 201380025699 A CN201380025699 A CN 201380025699A CN 104412125 B CN104412125 B CN 104412125B
- Authority
- CN
- China
- Prior art keywords
- light
- modulator
- measuring system
- measurement
- space
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
- G01S17/00—Systems using the reflection or reradiation of electromagnetic waves other than radio waves, e.g. lidar systems
- G01S17/02—Systems using the reflection of electromagnetic waves other than radio waves
- G01S17/06—Systems determining position data of a target
- G01S17/42—Simultaneous measurement of distance and other co-ordinates
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
- G01S17/00—Systems using the reflection or reradiation of electromagnetic waves other than radio waves, e.g. lidar systems
- G01S17/66—Tracking systems using electromagnetic waves other than radio waves
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
- G01B9/02049—Interferometers characterised by particular mechanical design details
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
- G01S17/00—Systems using the reflection or reradiation of electromagnetic waves other than radio waves, e.g. lidar systems
- G01S17/02—Systems using the reflection of electromagnetic waves other than radio waves
- G01S17/06—Systems determining position data of a target
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
- G01S17/00—Systems using the reflection or reradiation of electromagnetic waves other than radio waves, e.g. lidar systems
- G01S17/02—Systems using the reflection of electromagnetic waves other than radio waves
- G01S17/06—Systems determining position data of a target
- G01S17/08—Systems determining position data of a target for measuring distance only
- G01S17/32—Systems determining position data of a target for measuring distance only using transmission of continuous waves, whether amplitude-, frequency-, or phase-modulated, or unmodulated
- G01S17/34—Systems determining position data of a target for measuring distance only using transmission of continuous waves, whether amplitude-, frequency-, or phase-modulated, or unmodulated using transmission of continuous, frequency-modulated waves while heterodyning the received signal, or a signal derived therefrom, with a locally-generated signal related to the contemporaneously transmitted signal
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
- G01S17/00—Systems using the reflection or reradiation of electromagnetic waves other than radio waves, e.g. lidar systems
- G01S17/02—Systems using the reflection of electromagnetic waves other than radio waves
- G01S17/06—Systems determining position data of a target
- G01S17/46—Indirect determination of position data
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
- G01S7/00—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
- G01S7/48—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S17/00
- G01S7/481—Constructional features, e.g. arrangements of optical elements
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
- G01S7/00—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
- G01S7/48—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S17/00
- G01S7/481—Constructional features, e.g. arrangements of optical elements
- G01S7/4817—Constructional features, e.g. arrangements of optical elements relating to scanning
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
- G01S7/00—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
- G01S7/48—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S17/00
- G01S7/481—Constructional features, e.g. arrangements of optical elements
- G01S7/4818—Constructional features, e.g. arrangements of optical elements using optical fibres
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
- G01S7/00—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
- G01S7/48—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S17/00
- G01S7/497—Means for monitoring or calibrating
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- General Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Computer Networks & Wireless Communication (AREA)
- Radar, Positioning & Navigation (AREA)
- Remote Sensing (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Optical Radar Systems And Details Thereof (AREA)
Applications Claiming Priority (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| GB1205563.8 | 2012-03-29 | ||
| GBGB1205563.8A GB201205563D0 (en) | 2012-03-29 | 2012-03-29 | Coordinate measurement system and method |
| GB1300433.8 | 2013-01-10 | ||
| GBGB1300433.8A GB201300433D0 (en) | 2013-01-10 | 2013-01-10 | Measurement Device, System and Method |
| PCT/GB2013/050837 WO2013144648A1 (en) | 2012-03-29 | 2013-03-28 | Measurement device, system and method |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN104412125A CN104412125A (zh) | 2015-03-11 |
| CN104412125B true CN104412125B (zh) | 2019-04-05 |
Family
ID=48143316
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201380025699.0A Active CN104412125B (zh) | 2012-03-29 | 2013-03-28 | 测量装置、系统和方法 |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US9720088B2 (enExample) |
| EP (1) | EP2831625B1 (enExample) |
| JP (1) | JP6198154B2 (enExample) |
| CN (1) | CN104412125B (enExample) |
| ES (1) | ES2865077T3 (enExample) |
| WO (1) | WO2013144648A1 (enExample) |
Families Citing this family (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB201411206D0 (en) * | 2014-06-24 | 2014-08-06 | Sec Dep For Business Innovation & Skills The And Usw Commercial Services Ltd | Dual laser frequency sweep interferometry system and method |
| FR3034189B1 (fr) * | 2015-03-26 | 2020-01-03 | Thales | Procede de mesure de la modulation de frequence d'une source laser |
| CN104793214A (zh) * | 2015-04-24 | 2015-07-22 | 芜湖航飞科技股份有限公司 | 一种激光雷达成像装置 |
| WO2018134618A1 (en) * | 2017-01-19 | 2018-07-26 | Envisics Ltd. | Holographic light detection and ranging |
| DE102017101626B4 (de) * | 2017-01-27 | 2018-09-13 | Carl Zeiss Ag | Vorrichtungen, Verfahren und Probenhalter zum Testen von photonischen integrierten Schaltungen sowie photonische integrierte Schaltungen |
| US10670391B2 (en) * | 2018-10-26 | 2020-06-02 | Northrop Grumman Systems Corporation | Confocal optical protractor |
| CN109855546A (zh) * | 2018-12-26 | 2019-06-07 | 复旦大学 | 一种短相干干涉测量透镜中心厚度的系统和方法 |
| US11693096B2 (en) * | 2019-03-07 | 2023-07-04 | Texas Instruments Incorporated | Lidar with phase light modulator |
| CN113296137B (zh) * | 2020-02-24 | 2023-11-17 | 香港理工大学深圳研究院 | 干涉式形变监测方法、装置和接收机 |
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| GB1010894A (en) | 1962-01-27 | 1965-11-24 | Gullick Ltd | Improvements in or relating to fluid flow control valves |
| US3559937A (en) | 1968-09-26 | 1971-02-02 | Nasa | Optical tracking mount |
| FR2049030B1 (enExample) | 1969-06-20 | 1973-04-06 | Legall Jean Claude | |
| US3809477A (en) | 1972-11-01 | 1974-05-07 | Us Interior | Measuring apparatus for spatially modulated reflected beams |
| US4576481A (en) | 1982-12-13 | 1986-03-18 | Position Orientation Systems, Ltd. | Passive optical position measurement system |
| US4714339B2 (en) | 1986-02-28 | 2000-05-23 | Us Commerce | Three and five axis laser tracking systems |
| US5294980A (en) | 1988-03-24 | 1994-03-15 | Canon Kabushiki Kaisha | Positioning detecting method and apparatus |
| US5253033A (en) | 1990-12-03 | 1993-10-12 | Raytheon Company | Laser radar system with phased-array beam steerer |
| JP2977102B2 (ja) * | 1991-07-12 | 1999-11-10 | 日本電信電話株式会社 | 位置計測装置 |
| CA2143838A1 (en) | 1992-09-09 | 1994-03-17 | Andrew W. Dornbusch | Spatial positioning systems |
| GB2285550B (en) | 1994-01-05 | 1997-09-17 | Creo Products Inc | Optical coordinate measuring system for large objects |
| DE19611595B4 (de) | 1996-03-23 | 2004-02-05 | BODENSEEWERK GERäTETECHNIK GMBH | Suchkopf für zielverfolgende Flugkörper oder Geschosse |
| GB9722068D0 (en) | 1997-10-17 | 1997-12-17 | Secretary Trade Ind Brit | Tracking system |
| DE10029529A1 (de) | 1999-12-23 | 2001-06-28 | Rohwedder Visotech Gmbh | Reflektorsystem zur Positionsbestimmung |
| US20020021139A1 (en) | 2000-06-16 | 2002-02-21 | The Penn State Research Foundation | Molecular probe station |
| DE10108774A1 (de) | 2001-02-23 | 2002-09-05 | Zeiss Carl | Koordinatenmessgerät zum Antasten eines Werkstücks, Tastkopf für ein Koordinatenmessgerät und Verfahren zum Betrieb eines Koordinatenmessgerätes |
| JP2002289243A (ja) | 2001-03-27 | 2002-10-04 | Toyo Eng Corp | 透過水素ガス量測定方法およびその装置 |
| DE10118668B4 (de) | 2001-04-14 | 2004-02-05 | Schott Glas | Koordinatenmeßvorrichtung |
| US7268348B2 (en) | 2002-01-22 | 2007-09-11 | International Business Machines Corporation | Scanning probe for data storage and microscopy |
| US7130059B2 (en) | 2002-06-24 | 2006-10-31 | Light Gage, Inc | Common-path frequency-scanning interferometer |
| EP1640747B1 (en) * | 2003-05-30 | 2012-09-26 | Mitsubishi Denki Kabushiki Kaisha | Coherent laser radar |
| US8242428B2 (en) | 2007-12-06 | 2012-08-14 | The United States Of America As Represented By The Secretary Of The Army | Method and system for lidar using spatial information from a light source in combination with nonspatial information influenced by the subject to derive an image |
| JP2005077379A (ja) * | 2003-09-03 | 2005-03-24 | Denso Corp | レーダ装置 |
| CN101031817B (zh) | 2004-09-30 | 2011-02-09 | Faro科技有限公司 | 测量移动后向反射器的绝对测距仪 |
| US7139446B2 (en) | 2005-02-17 | 2006-11-21 | Metris Usa Inc. | Compact fiber optic geometry for a counter-chirp FMCW coherent laser radar |
| US7532311B2 (en) * | 2005-04-06 | 2009-05-12 | Lockheed Martin Coherent Technologies, Inc. | Efficient lidar with flexible target interrogation pattern |
| WO2006133030A2 (en) | 2005-06-06 | 2006-12-14 | Board Of Regents | Oct using spectrally resolved bandwidth |
| US20060279745A1 (en) | 2005-06-13 | 2006-12-14 | Wenstrand John S | Color imaging system for locating retroreflectors |
| JP4909548B2 (ja) | 2005-09-01 | 2012-04-04 | 株式会社ミツトヨ | 表面形状測定装置 |
| US20070194225A1 (en) | 2005-10-07 | 2007-08-23 | Zorn Miguel D | Coherent electron junction scanning probe interference microscope, nanomanipulator and spectrometer with assembler and DNA sequencing applications |
| US7652275B2 (en) | 2006-07-28 | 2010-01-26 | Mitutoyo Corporation | Non-contact probe control interface |
| JP4232812B2 (ja) * | 2006-10-18 | 2009-03-04 | ソニー株式会社 | 再生装置、再生方法、記録再生装置、記録再生方法、記録装置、記録方法 |
| US9747698B2 (en) * | 2006-10-21 | 2017-08-29 | Sam Stathis | System for accurately and precisely locating and marking a position in space using wireless communications and robotics |
| US8331019B2 (en) * | 2007-01-26 | 2012-12-11 | New York University | Holographic microscopy of holographically trapped three-dimensional nanorod structures |
| NL1035950A1 (nl) * | 2007-09-28 | 2009-03-31 | Asml Netherlands Bv | Radiometric Kirk test. |
| EP2051101B1 (de) | 2007-10-16 | 2011-12-21 | Sick Ag | Optische Sensoranordnung und Verfahren zur optischen Detektion von Objekten |
| US8509879B2 (en) * | 2007-11-06 | 2013-08-13 | The Regents Of The University Of California | Apparatus and method for widefield functional imaging (WiFI) using integrated structured illumination and laser speckle imaging |
| GB0722477D0 (en) | 2007-11-15 | 2007-12-27 | Secretary Trade Ind Brit | Microprobe |
| DE102008014912B4 (de) * | 2008-03-19 | 2023-01-19 | Vorwerk & Co. Interholding Gmbh | Selbsttätig verfahrbares Bodenstaub-Aufsammelgerät |
| GB0902468D0 (en) * | 2009-02-16 | 2009-04-01 | Light Blue Optics Ltd | Optical systems |
| WO2010148284A2 (en) * | 2009-06-18 | 2010-12-23 | Paul Prucnal | Optical sensor array |
| DE102009040863A1 (de) | 2009-09-10 | 2011-03-24 | Carl Zeiss Ag | Vorrichtung, Verfahren und Reflektoranordnung zur Positionsbestimmung |
| GB201013894D0 (en) | 2010-08-19 | 2010-10-06 | Isis Innovation | Apparatus and method for measuring distance |
| CN201900513U (zh) | 2010-11-19 | 2011-07-20 | 二重集团(德阳)重型装备股份有限公司 | 齿轮测量系统及专用手持活动式光学逆反射器 |
| GB201205563D0 (en) | 2012-03-29 | 2012-05-09 | Sec Dep For Business Innovation & Skills The | Coordinate measurement system and method |
-
2013
- 2013-03-28 ES ES13717820T patent/ES2865077T3/es active Active
- 2013-03-28 JP JP2015502457A patent/JP6198154B2/ja active Active
- 2013-03-28 US US14/388,198 patent/US9720088B2/en active Active
- 2013-03-28 WO PCT/GB2013/050837 patent/WO2013144648A1/en not_active Ceased
- 2013-03-28 CN CN201380025699.0A patent/CN104412125B/zh active Active
- 2013-03-28 EP EP13717820.8A patent/EP2831625B1/en active Active
Also Published As
| Publication number | Publication date |
|---|---|
| EP2831625B1 (en) | 2021-02-17 |
| EP2831625A1 (en) | 2015-02-04 |
| WO2013144648A1 (en) | 2013-10-03 |
| JP2015514981A (ja) | 2015-05-21 |
| CN104412125A (zh) | 2015-03-11 |
| ES2865077T3 (es) | 2021-10-14 |
| JP6198154B2 (ja) | 2017-09-20 |
| US9720088B2 (en) | 2017-08-01 |
| US20150055138A1 (en) | 2015-02-26 |
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Legal Events
| Date | Code | Title | Description |
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| C06 | Publication | ||
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Effective date of registration: 20180427 Address after: Meade Sykes Applicant after: NPL Management Ltd Address before: London, England Applicant before: SEC DEP FOR BUSINESS INNOVATION & |
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