CN104404621A - Anti-contamination device for inspection window of indium phosphide single crystal furnace - Google Patents
Anti-contamination device for inspection window of indium phosphide single crystal furnace Download PDFInfo
- Publication number
- CN104404621A CN104404621A CN201410689142.3A CN201410689142A CN104404621A CN 104404621 A CN104404621 A CN 104404621A CN 201410689142 A CN201410689142 A CN 201410689142A CN 104404621 A CN104404621 A CN 104404621A
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- CN
- China
- Prior art keywords
- single crystal
- viewing window
- indium phosphide
- union lever
- top cover
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
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- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
- C30B15/20—Controlling or regulating
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
- C30B29/10—Inorganic compounds or compositions
- C30B29/40—AIIIBV compounds wherein A is B, Al, Ga, In or Tl and B is N, P, As, Sb or Bi
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- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Crystallography & Structural Chemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Inorganic Chemistry (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
The invention discloses an anti-contamination device for an inspection window of an indium phosphide single crystal furnace. The anti-contamination device comprises an adjusting handle, a connecting bar, a cylindrical inspection window component, a heating device and a quartz lens, wherein the adjusting handle is arranged above a single crystal furnace top cover; the connecting bar is fixedly connected with the adjusting handle; the quartz lens is fixedly connected with the connecting bar; the cylindrical inspection window component is fixed to the single crystal furnace top cover; the heating device is arranged at the periphery of the lower end of the cylindrical inspection window component; the connecting bar is in rotational connection with the single crystal furnace top cover; the adjusting handle is rotated to enable the connecting bar to rotate and enable the quartz lens and the cylindrical inspection window component to be engaged or disengaged. The anti-contamination device can prevent the inspection window of the indium phosphide single crystal furnace from being polluted by elemental phosphorus or phosphoric acid and realizes real-time monitoring of the inside of the furnace in the indium phosphide material synthesis and monocrystal growth process.
Description
Technical field
The present invention relates to a kind of indium phosphide single crystal stove viewing window anti-pollution device.
Background technology
Indium phosphide (InP) is one of important group Ⅲ-Ⅴ compound semiconductor material, it is a kind of electronic information function material of excellent performance, all be widely used, as aspects such as micro-wave communication, long-distance optical fiber communication, high-conversion rate solar cell, high-frequency element, Guidance & Navigations in civilian and military many high-tech sectors.From the seventies, people start to have turned one's attention to indium phosphide single crystal material.But the popularity of its application is constrained because of problems such as indium phosphide single crystal yield rate are low.Wherein, the contaminated problem of indium phosphide single crystal stove viewing window is the important factor of restriction indium phosphide single crystal yield rate.
The synthesis of indium phosphide and single crystal growing are very difficult.In indium phosphide injection method building-up process, can't realize automatization at present, need workman by synthesis situation in observe and decide stove, take operation measure, therefore, observing clearly is the prerequisite and the prerequisite that obtain high quality indium phosphide.Observe for more aobvious important LEC method indium phosphide single crystal draws clearly, because indium phosphide single crystal growth conditions is harsh.Wherein the frequency of occurrences of dendrite, twin is higher, if in the process of pulling monocrystal, twin and dendrite etc. can be observed and adopt remedial measures in time, greatly will improve the yield rate of monocrystalline.
Indium phosphide single crystal stove viewing window is contaminated mainly contains three sources.The first, in injection method synthesis indium phosphide process, phosphorus gasifies afterwards and melt indium reacts.The phosphorus steam of failing to react can be overflowed from melt, and is attached to furnace wall or the lower position of viewing window equitemperature.The phosphorus particle be attached on viewing window can reduce the light transmission of viewing window, and impact is observed.The second, in indium phosphide single crystal pulling process, the phosphorus steam produced due to indium phosphide dissociation also may be attached on viewing window, and impact is observed.3rd, the oxygen in the phosphorus steam of small portion and atmosphere reacts, and generates P
2o
5.P
2o
5particle has extraordinary water-absorbent, P
2o
5can react by water rapidly and in atmosphere, generate strong phosphoric acid, or metaphosphoric acid.Strong phosphoric acid under high temperature has very strong corrosive nature to quartz, and the quartz surfaces after corrosion is in white.Be attached to the strong phosphoric acid etch quartz viewing system in hot environment in viewing system, cause viewing window contaminated.This pollution is often irreversible.Divide according to pollution category, viewing system is polluted can be divided into two large classes, the first, the pollution of phosphorus simple substance, and this pollution can be eliminated by heating; The second, the pollution of phosphoric acid, this pollution is often difficult to eliminate.
Summary of the invention
Technical problem to be solved by this invention is to provide a kind of indium phosphide single crystal stove viewing window anti-pollution device, phosphorus simple substance or phosphoric acid can be prevented the pollution of indium phosphide single crystal stove viewing window, achieve in indium phosphide synthesis and monocrystalline growing process, situation in stove is monitored in real time.
For solving the problems of the technologies described above, the technical solution used in the present invention is: a kind of indium phosphide single crystal stove viewing window anti-pollution device, comprise regulating handle, union lever, cylindrical viewing window assembly, heating unit, quartz lens sheet, described regulating handle is arranged on above single crystal growing furnace top cover, described union lever is fixedly connected with regulating handle, described quartz lens sheet is fixedly connected with described union lever, described cylindrical viewing window assembly is fixed on single crystal growing furnace top cover, described heating unit is provided with around described cylindrical viewing window assembly lower end, be rotationally connected between union lever and single crystal growing furnace top cover, by rotating regulating handle, union lever is rotated, and make quartz lens sheet and the clutch of cylindrical viewing window assembly.
Further, the seal assembly for preventing high pressure gas leakage is also provided with between described union lever and described single crystal growing furnace top cover.
Further, described heating unit is entwined by molybdenum filament.
Further, quartz lens sheet is twin polishing lens.
Further, described regulating handle, union lever are stainless steel, and quartz lens sheet is high purity quartz material.
The beneficial effect adopting technique scheme to produce is: the present invention can protect cylindrical observation assembly not contaminated by quartz lens sheet, can serve as lens on the other hand.After quartz lens sheet is subject to irreversible membrane fouling, it can be made to remove below cylindrical observation assembly by rotating regulating handle.Operator continues to carry out clear observation in stove by cylindrical observation assembly; By seal assembly, realize in single crystal growing furnace, filling 4MPa high pressure gas, do not reveal; By heating, pollutent phosphorus simple substance is gasified, depart from viewing window surface, thus recover cylindrical observation assembly and quartz lens sheet sharpness; Regulating handle, union lever, single crystal growing furnace top cover adopts stainless steel, prevents acidic substance from corroding, increases the service life; Cylindrical observation assembly, quartz lens sheet adopts high purity quartz material, and quartz has good light transmission and good thermotolerance, and heating unit adopts metal molybdenum material, and molybdenum filament has the strong feature of high temperature resistant and oxidation resistant ability; The present invention can prevent phosphorus simple substance or phosphoric acid to the pollution of indium phosphide single crystal stove viewing window, achieves in indium phosphide synthesis and monocrystalline growing process, monitors in real time situation in stove.
Accompanying drawing explanation
Fig. 1 is structural representation of the present invention;
Wherein: 1, regulating handle, 2, seal assembly, 3, union lever, 4, cylindrical viewing window assembly, 5, heating unit, 6, quartz lens sheet, 7, single crystal growing furnace top cover.
Embodiment
Below in conjunction with the drawings and specific embodiments, the present invention is further detailed explanation.
As shown in Figure 1, the present invention is a kind of indium phosphide single crystal stove viewing window anti-pollution device, comprise regulating handle 1, union lever 3, cylindrical viewing window assembly 4, heating unit 5, quartz lens sheet 6, described regulating handle 1 is arranged on above single crystal growing furnace top cover 7, described union lever 3 is fixedly connected with regulating handle 1, described quartz lens sheet 6 is fixedly connected with described union lever 3, described cylindrical viewing window assembly 4 is fixed on single crystal growing furnace top cover 7, described heating unit 5 is provided with around described cylindrical viewing window assembly 4 lower end, be rotationally connected between union lever 3 and single crystal growing furnace top cover 7, by rotating regulating handle 1, union lever 3 is rotated, and make quartz lens sheet 6 and the clutch of cylindrical viewing window assembly 4, the seal assembly 2 for preventing high pressure gas leakage is also provided with between described union lever 3 and described single crystal growing furnace top cover 7, described heating unit 5 is entwined by molybdenum filament, quartz lens sheet 6 is twin polishing lens, described regulating handle 1, union lever 3 are stainless steel, and quartz lens sheet 6 is high purity quartz material.
Quartz lens sheet of the present invention makes to be bolted to union lever transverse end, and cylindrical observation assembly is surrounded by stainless steel sleeve, is fixed on above single crystal growing furnace top cover, and heating unit is fixed on cylindrical observation assembly lower end.Handle and union lever can be determined angle and rotate, to ensure accurately to dock with cylindrical observation assembly.There is seal assembly between union lever and single crystal growing furnace top cover, prevent high pressure gas leakage.
Heating unit is equipped with in described cylindrical observation assembly lower end, and heating unit is entwined by molybdenum filament.Heating unit can carry out heated baking to cylindrical observation assembly lower end and quartz lens sheet, pollutent phosphorus simple substance can be gasified by heating, departs from viewing window surface, thus recovers cylindrical observation assembly and quartz lens sheet sharpness.Regulating handle angle of rotation can be fixed, and can be rotated to cylindrical observation assembly by quartz lens sheet accurately.By rotating regulating handle, the quartz lens sheet polluted can be realized to remove below cylindrical observation assembly, realize clear observation.
There is seal assembly between described regulating handle and union lever, can sealing function be played, ensure that 4MPa high-pressure atmosphere is not revealed, also can play fixed action to handle and union lever simultaneously.Described quartz lens sheet is twin polishing lens, cylindrical observation assembly can be protected not contaminated on the one hand, can serve as lens on the other hand.After quartz lens sheet is subject to irreversible membrane fouling, it can be made to remove below cylindrical observation assembly by rotating regulating handle.Operator continues to carry out clear observation in stove by cylindrical observation assembly.
Claims (5)
1. an indium phosphide single crystal stove viewing window anti-pollution device, it is characterized in that: comprise regulating handle (1), union lever (3), cylindrical viewing window assembly (4), heating unit (5), quartz lens sheet (6), described regulating handle (1) is arranged on single crystal growing furnace top cover (7) top, described union lever (3) is fixedly connected with regulating handle (1), described quartz lens sheet (6) is fixedly connected with described union lever (3), described cylindrical viewing window assembly (4) is fixed on single crystal growing furnace top cover (7), described heating unit (5) is provided with around described cylindrical viewing window assembly (4) lower end, be rotationally connected between union lever (3) and single crystal growing furnace top cover (7), by rotating regulating handle (1), union lever (3) is rotated, and make quartz lens sheet (6) and the clutch of cylindrical viewing window assembly (4).
2. a kind of indium phosphide single crystal stove viewing window anti-pollution device according to claim 1, is characterized in that: be also provided with the seal assembly (2) for preventing high pressure gas leakage between described union lever (3) and described single crystal growing furnace top cover (7).
3. a kind of indium phosphide single crystal stove viewing window anti-pollution device according to claim 1, is characterized in that: described heating unit (5) is entwined by molybdenum filament.
4. a kind of indium phosphide single crystal stove viewing window anti-pollution device according to claim 1, is characterized in that: quartz lens sheet (6) is twin polishing lens.
5. a kind of indium phosphide single crystal stove viewing window anti-pollution device according to claim 1, it is characterized in that: described regulating handle (1), union lever (3) are stainless steel, quartz lens sheet (6) is high purity quartz material.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410689142.3A CN104404621A (en) | 2014-11-26 | 2014-11-26 | Anti-contamination device for inspection window of indium phosphide single crystal furnace |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410689142.3A CN104404621A (en) | 2014-11-26 | 2014-11-26 | Anti-contamination device for inspection window of indium phosphide single crystal furnace |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN104404621A true CN104404621A (en) | 2015-03-11 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201410689142.3A Pending CN104404621A (en) | 2014-11-26 | 2014-11-26 | Anti-contamination device for inspection window of indium phosphide single crystal furnace |
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| Country | Link |
|---|---|
| CN (1) | CN104404621A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106381524A (en) * | 2016-10-21 | 2017-02-08 | 北京鼎泰芯源科技发展有限公司 | Observation window device based on in-situ synthesis method for InP single crystal furnace |
-
2014
- 2014-11-26 CN CN201410689142.3A patent/CN104404621A/en active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106381524A (en) * | 2016-10-21 | 2017-02-08 | 北京鼎泰芯源科技发展有限公司 | Observation window device based on in-situ synthesis method for InP single crystal furnace |
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Application publication date: 20150311 |
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| RJ01 | Rejection of invention patent application after publication |