CN104399897A - Tool for casting NiCrAlYSi alloy target and casting method - Google Patents
Tool for casting NiCrAlYSi alloy target and casting method Download PDFInfo
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- CN104399897A CN104399897A CN201410743128.7A CN201410743128A CN104399897A CN 104399897 A CN104399897 A CN 104399897A CN 201410743128 A CN201410743128 A CN 201410743128A CN 104399897 A CN104399897 A CN 104399897A
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- nicralysi
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- cooling water
- graphite
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B22—CASTING; POWDER METALLURGY
- B22C—FOUNDRY MOULDING
- B22C9/00—Moulds or cores; Moulding processes
- B22C9/06—Permanent moulds for shaped castings
- B22C9/061—Materials which make up the mould
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B22—CASTING; POWDER METALLURGY
- B22C—FOUNDRY MOULDING
- B22C9/00—Moulds or cores; Moulding processes
- B22C9/06—Permanent moulds for shaped castings
- B22C9/065—Cooling or heating equipment for moulds
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B22—CASTING; POWDER METALLURGY
- B22C—FOUNDRY MOULDING
- B22C9/00—Moulds or cores; Moulding processes
- B22C9/08—Features with respect to supply of molten metal, e.g. ingates, circular gates, skim gates
- B22C9/082—Sprues, pouring cups
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/3407—Cathode assembly for sputtering apparatus, e.g. Target
- C23C14/3414—Metallurgical or chemical aspects of target preparation, e.g. casting, powder metallurgy
Abstract
The invention discloses a tool for casting a NiCrAlYSi alloy target. The tool comprises a steel bucket of which the upper end is opened, wherein a graphite pad plate is arranged above the bottom of the steel bucket; a graphite mold is arranged above the graphite pad plate; an insulated feeder in a matching manner with the graphite mold is arranged at the upper end of the graphite mold; a cooling water tube is wound on the outer wall of the graphite mold in a spiral manner; one end of the cooling water tube penetrates outside the steel bucket and is used as a water inlet; the other end of the cooling water tube penetrates outside the steel bucket and is used as a water outlet; the water inlet is positioned below the water outlet; the space inside the steel bucket and on the outer side of the graphite mold is filled with aluminum oxide sand; the height of the top end of the aluminum oxide sand is no greater than that of the upper end of the graphite mold. In addition, the invention further discloses a method for casting the NiCrAlYSi alloy target by using the tool. The tool disclosed by the invention has the characteristics of simple structure, high use reliability, low cost, high repeated operability and the like.
Description
Technical field
The invention belongs to alloy target material preparing technical field, be specifically related to a kind of frock and casting method of casting NiCrAlYSi alloy target material.
Background technology
Gas turbine, as a kind of dynamic power machine, is widely used in aviation, generating, crude oil and natural gas transport, communications and transportation and metallurgy, the departments such as chemical industry.Gas turbine blades is destroyed by high-temperature oxydation and heat erosion in process under arms, for improving blade service life, ensures the safe and stable operation of gas turbine, adopts protective coating to be the most effective way at present.NiCrAlYSi is common high-temperature protection coating, has good adhesiveness and lower counterdiffusion, and have good resistance to high temperature oxidation, hot corrosion resistance with matrix, and high toughness and thermal fatigue resistance intensity.Be widely used in all kinds of gas turbine hot-end components such as aviation, as turbine rotor blade, parts such as guiding backing, combustion chamber etc.In recent years, along with China's aviation development, the demand of NiCrAlYSi alloy target material increases, and has very important strategic importance simultaneously.
NiCrAlYSi protective coating is that its alloy target material is by spraying methods such as multi-arc ion coating, electro beam physics vapour deposition, sputterings, matrix adds very high back bias voltage, utilize gas discharge to make gas or by the material part ionization of evaporating, gas ion or by evaporated material ion bombardment effects while the evaporated material of NiCrAlYSi alloy target material or reactant are deposited on substrate.So the preparation of NiCrAlYSi alloy target material and quality assurance are the bases that NiCrAlYSi protective coating uses, and are the powerful guarantees of NiCrAlYSi protective coating stability on substrate.The preparation of NiCrAlYSi alloy target material normally adopts vacuum melting and foundry engieering, but production efficiency is lower in preparation process, there is a large amount of shrinkage cavities and the defect such as loose, seriously govern using and developing of NiCrAlYSi protective coating in alloy cast ingot.
NiCrAlYSi is high temperature alloy, in conventional cast process, there is foundry goods local and overall cooling imbalance, destroys the consecutive solidification of melt, in foundry goods, easily produce defect form residual stress as shrinkage cavity and porosity and in foundry goods.So the NiCrAlYSi alloy target material ingot casting prepared can only use the material of bottom 1/3rd, all the other materials can only carry out remelting or directly scrap, and so not only production efficiency is low but also cause material and energy waste.
Summary of the invention
Technical problem to be solved by this invention is for above-mentioned the deficiencies in the prior art, provides a kind of frock of casting NiCrAlYSi alloy target material.This frock has the features such as structure is simple, dependability is high, with low cost, repeating property is strong.This frock arranges insulated feeder in graphite jig upper end, and insulated feeder plays drainage in aluminium alloy casting process, and alloy liquid is incubated, and the aluminium alloy mobility on top is increased; Aluminum oxide sand is set, can the aluminium alloy poured in graphite jig be incubated, reduce the setting rate of aluminium alloy at graphite jig top near inner wall position, the mobility of top aluminium alloy is increased, feeding is carried out to the alloy of bottom; Be wound around cooling water pipe at graphite jig external spiral, can cool graphite jig middle and lower part, heat flow rate during control alloy graining and direction.
For solving the problems of the technologies described above, the technical solution used in the present invention is: a kind of frock of casting NiCrAlYSi alloy target material, it is characterized in that, comprise the steel drum of upper end open, graphite bolster plate is provided with above the bottom of described steel drum, graphite jig is provided with above described graphite bolster plate, the upper end of described graphite jig is provided with the insulated feeder matched with graphite jig, the outer wall spiral winding of described graphite jig has cooling water pipe, one end of described cooling water pipe passes steel drum as water inlet, the other end of cooling water pipe passes steel drum as delivery port, described water inlet is positioned at the below of delivery port, in described steel drum and the outside being positioned at graphite jig is filled with aluminum oxide sand, the tip height of described aluminum oxide sand is no more than the upper end of graphite jig.
Above-mentioned a kind of frock of casting NiCrAlYSi alloy target material, it is characterized in that, the thickness of described graphite bolster plate is 10mm ~ 15mm, and graphite bolster plate is plectane, the cross section of described graphite jig is circular, the diameter 50mm ~ 100mm larger than the external diameter of graphite jig of graphite bolster plate.
Above-mentioned a kind of frock of casting NiCrAlYSi alloy target material, is characterized in that, the top of described graphite bolster plate is provided with the Graphite pad bottom for shutoff graphite jig.
Above-mentioned a kind of frock of casting NiCrAlYSi alloy target material, is characterized in that, the material of described insulated feeder is refractory brick, and the height of insulated feeder is 50mm ~ 70mm.
Above-mentioned a kind of frock of casting NiCrAlYSi alloy target material, it is characterized in that, vertical range between bottom the bottom of described cooling water pipe and graphite jig is 30mm ~ 50mm, the top of cooling water pipe is positioned at graphite jig center up 30mm ~ 50mm, and the pitch of cooling water pipe spiral winding is 2mm ~ 5mm.
Above-mentioned a kind of frock of casting NiCrAlYSi alloy target material, is characterized in that, described cooling water pipe is cross section is square copper pipe, and outside the cross section of described copper pipe, the length of side is 5mm ~ 10mm, and wall thickness is 0.5mm ~ 1mm.
Above-mentioned a kind of frock of casting NiCrAlYSi alloy target material, is characterized in that, the internal diameter of described graphite jig is 50mm ~ 80mm, is highly 200mm ~ 300mm, and wall thickness is 10mm ~ 15mm.
In addition, present invention also offers a kind of method adopting above-mentioned frock to cast NiCrAlYSi alloy target material, it is characterized in that, the method comprises the following steps:
Step one, melting prepare NiCrAlYSi alloy ingot blank;
Step 2, the crucible alloy ingot blank of NiCrAlYSi described in step one is placed in vaccum sensitive stove, and the frock of casting NiCrAlYSi alloy target material is placed in described vaccum sensitive stove, the water inlet of described frock is connected with the water inlet pipe of vaccum sensitive stove, delivery port is connected with the outlet pipe of vaccum sensitive stove, ON cycle cooling water the flow adjusting recirculated cooling water is 0.6L/min ~ 0.9L/min;
Vacuum induction furnace door described in step 3, closedown step 2, is evacuated to 10 to vaccum sensitive stove
-2carrying out heating after Pa makes NiCrAlYSi alloy ingot blank melt completely, obtains aluminium alloy; Then in vaccum sensitive stove, pass into argon gas to the vacuum of vaccum sensitive stove is 0.04MPa ~ 0.05MPa, continue heating, after described aluminium alloy is warming up to 1500 DEG C ~ 1600 DEG C, aluminium alloy is poured in graphite jig continuously along insulated feeder, while pouring into, the flow of recirculated cooling water is increased to 8L/min ~ 10L/min, after the aluminium alloy poured into solidifies completely, close recirculated cooling water, take out frock air cooling, after the demoulding, obtain NiCrAlYSi alloy target material ingot casting;
Step 4, machined is carried out to the alloy target material of NiCrAlYSi described in step 3 ingot casting, obtain NiCrAlYSi alloy target material.
Above-mentioned method, is characterized in that, stops heating vaccum sensitive stove in step 3 before pouring into aluminium alloy.
The present invention compared with prior art has the following advantages:
1, frock of the present invention has the features such as structure is simple, dependability is high, with low cost, repeating property is strong.
2, frock of the present invention arranges insulated feeder in graphite jig upper end, and insulated feeder plays drainage in aluminium alloy casting process, and alloy liquid is incubated, and the aluminium alloy mobility on top is increased.
3, frock of the present invention arranges aluminum oxide sand, can be incubated the aluminium alloy poured in graphite jig, reduces the setting rate of aluminium alloy at graphite jig top near inner wall position, the mobility of top aluminium alloy is increased, carries out feeding to the alloy of bottom; Be wound around cooling water pipe at graphite jig external spiral, and by cooling water pipe winding position further preferably, can cool graphite jig middle and lower part, heat flow rate when controlling alloy graining and direction.
4, frock of the present invention makes aluminium alloy bottom graphite jig preferentially solidify, and top aluminium alloy is due to insulation effect, graphite jig wall setting rate reduces, effectively can increase the mobility of top aluminium alloy, continue to carry out feeding to the alloy of bottom, so make whole alloy cast ingot form consecutive solidification, eliminate the overall shrinkage cavity of ingot casting and the defect such as loose.
5, casting method of the present invention adopts the method for mould insulation and local water-cooled, Temperature Field of Solidifying Alloy in adjustment casting process, the hot-fluid of alloy in process of setting controls, thus formation consecutive solidification, ingot casting crystallization rate is improved, ingot casting liquid cave shoals, intermediate zone size reduces, intra-crystalline structure is refinement more, metal feeding condition is improved, eliminates the defects such as shrinkage cavity in ingot casting, loose, segregation and fire check, improve the production efficiency of NiCrAlYSi alloy target material, the NiCrAlYSi alloy target material quality of casting is high, and uniformity is good.
Below in conjunction with drawings and Examples, technical solution of the present invention is described in further detail.
Accompanying drawing explanation
Fig. 1 is the structural representation that the present invention casts the frock of NiCrAlYSi alloy target material.
Fig. 2 is the outside drawing of the longitudinal cut surface of NiCrAlYSi alloy target material ingot casting that the embodiment of the present invention 4 is cast.
Fig. 3 is the outside drawing of the longitudinal cut surface of NiCrAlYSi alloy target material ingot casting of conventional method casting.
Description of reference numerals:
1-graphite jig; 2-cooling water pipe; 3-Graphite pad;
4-graphite bolster plate; 5-insulated feeder; 6-steel drum;
7-aluminum oxide sand; 8-water inlet; 9-delivery port.
Detailed description of the invention
The frock that the present invention casts NiCrAlYSi alloy target material is described according to following embodiment 1 to embodiment 3:
Embodiment 1
As shown in Figure 1, the frock of the casting NiCrAlYSi alloy target material of the present embodiment, comprise the steel drum 6 of upper end open, graphite bolster plate 4 is provided with above the bottom of described steel drum 6, graphite jig 1 is provided with above described graphite bolster plate 4, the upper end of described graphite jig 1 is provided with the insulated feeder 5 matched with graphite jig 1, the outer wall spiral winding of described graphite jig 1 has cooling water pipe 2, one end of described cooling water pipe 2 passes steel drum 6 as water inlet 8, the other end of cooling water pipe 2 passes steel drum 6 as delivery port 9, described water inlet 8 is positioned at the below of delivery port 9, in described steel drum 6 and the outside being positioned at graphite jig 1 is filled with aluminum oxide sand 7, the tip height of described aluminum oxide sand 7 is no more than the upper end of graphite jig 1.
As shown in Figure 1, in the present embodiment, the thickness of described graphite bolster plate 4 is 10mm, and graphite bolster plate 4 is plectane, and the cross section of graphite jig 1 is circular, the diameter 100mm larger than the external diameter of graphite jig 1 of graphite bolster plate 4.
As shown in Figure 1, in the present embodiment, the top of described graphite bolster plate 4 is provided with the Graphite pad 3 bottom for shutoff graphite jig 1.
As shown in Figure 1, in the present embodiment, the material of described insulated feeder 5 is refractory brick, and the height of insulated feeder 5 is 50mm.
As shown in Figure 1, in the present embodiment, the vertical range between bottom the bottom of described cooling water pipe 2 and graphite jig 1 is 30mm, and the top of cooling water pipe 2 is positioned at graphite jig 1 center up 30mm, and the pitch of cooling water pipe 2 spiral winding is 2mm.
As shown in Figure 1, in the present embodiment, described cooling water pipe 2 for cross section be square copper pipe, outside the cross section of described copper pipe, the length of side is 5mm, and wall thickness is 0.5mm.
As shown in Figure 1, in the present embodiment, the internal diameter of described graphite jig 1 is 50mm, is highly 200mm, and wall thickness is 10mm.
Embodiment 2
The present embodiment is identical with embodiment 1, wherein difference is: the thickness of described graphite bolster plate 4 is 15mm, the diameter 50mm larger than the external diameter of graphite jig 1 of graphite bolster plate 4, the height of insulated feeder 5 is 70mm, vertical range between bottom the bottom of described cooling water pipe 2 and graphite jig 1 is 50mm, the top of cooling water pipe 2 is positioned at graphite jig 1 center up 40mm, the pitch of cooling water pipe 2 spiral winding is 5mm, outside the cross section of described copper pipe, the length of side is 10mm, wall thickness is 1mm, the internal diameter of described graphite jig 1 is 80mm, be highly 300mm, wall thickness is 15mm.
Embodiment 3
The present embodiment is identical with embodiment 1, wherein difference is: the thickness of described graphite bolster plate 4 is 12mm, the diameter 80mm larger than the external diameter of graphite jig 1 of graphite bolster plate 4, the height of insulated feeder 5 is 60mm, vertical range between bottom the bottom of described cooling water pipe 2 and graphite jig 1 is 40mm, the top of cooling water pipe 2 is positioned at graphite jig 1 center up 50mm, the pitch of cooling water pipe 2 spiral winding is 3mm, outside the cross section of described copper pipe, the length of side is 8mm, wall thickness is 0.8mm, the internal diameter of described graphite jig 1 is 60mm, be highly 250mm, wall thickness is 12mm.
The method that the present invention casts NiCrAlYSi alloy target material is described according to following embodiment 4 to embodiment 6:
Embodiment 4
Step one, conventionally melting prepare NiCrAlYSi alloy ingot blank;
Step 2, the crucible alloy ingot blank of NiCrAlYSi described in step one is placed in vaccum sensitive stove, and the frock of embodiment 1 is placed in described vaccum sensitive stove, the water inlet 8 of described frock is connected with the water inlet pipe of vaccum sensitive stove, delivery port 9 is connected with the outlet pipe of vaccum sensitive stove, ON cycle cooling water the flow adjusting recirculated cooling water is 0.6L/min;
Vacuum induction furnace door described in step 3, closedown step 2, is evacuated to 10 to vaccum sensitive stove
-2carrying out heating after Pa makes NiCrAlYSi alloy ingot blank melt completely, obtains aluminium alloy; Then in vaccum sensitive stove, pass into argon gas to the vacuum of vaccum sensitive stove is 0.04MPa, continue heating, stop heating vaccum sensitive stove after described aluminium alloy is warming up to 1500 DEG C, and aluminium alloy is poured in graphite jig 1 along insulated feeder 5 continuously, while pouring into, the flow of recirculated cooling water is increased to 8L/min, after the aluminium alloy poured into solidifies completely, close recirculated cooling water, take out frock air cooling, after the demoulding, obtain NiCrAlYSi alloy target material ingot casting;
Step 4, carry out machined to the alloy target material of NiCrAlYSi described in step 3 ingot casting, the shrinkage cavity of excision ingot casting head, make its light with bottom lathe turning ingot casting and surface, obtaining diameter is 45mm, is highly the NiCrAlYSi alloy target material of 170mm.
Carry out cutting to the NiCrAlYSi alloy target material ingot casting of the present embodiment casting and the NiCrAlYSi alloy target material ingot casting of conventional method casting to detect, the results are shown in Figure 2 and Fig. 3, Fig. 2 is the outside drawing of the longitudinal cut surface of NiCrAlYSi alloy target material ingot casting of the present embodiment casting, Fig. 3 is the outside drawing of the longitudinal cut surface of NiCrAlYSi alloy target material ingot casting of conventional method casting, can obviously find out from figure, adopt the alloy target material inside ingot uniform quality of the method casting of the present embodiment, without shrinkage cavity, loosen, the defect such as segregation and fire check; And the alloy target material inside ingot defect adopting conventional method to cast is serious, cannot use.
Embodiment 5
Step one, conventionally melting prepare NiCrAlYSi alloy ingot blank;
Step 2, the crucible alloy ingot blank of NiCrAlYSi described in step one is placed in vaccum sensitive stove, and the frock of embodiment 2 is placed in described vaccum sensitive stove, the water inlet 8 of described frock is connected with the water inlet pipe of vaccum sensitive stove, delivery port 9 is connected with the outlet pipe of vaccum sensitive stove, ON cycle cooling water the flow adjusting recirculated cooling water is 0.9L/min;
Vacuum induction furnace door described in step 3, closedown step 2, is evacuated to 10 to vaccum sensitive stove
-2carrying out heating after Pa makes NiCrAlYSi alloy ingot blank melt completely, obtains aluminium alloy; Then in vaccum sensitive stove, pass into argon gas to the vacuum of vaccum sensitive stove is 0.05MPa, continue heating, stop heating vaccum sensitive stove after described aluminium alloy is warming up to 1550 DEG C, and aluminium alloy is poured in graphite jig 1 along insulated feeder 5 continuously, while pouring into, the flow of recirculated cooling water is increased to 9L/min, after the aluminium alloy poured into solidifies completely, close recirculated cooling water, take out frock air cooling, after the demoulding, obtain NiCrAlYSi alloy target material ingot casting;
Step 4, carry out machined to the alloy target material of NiCrAlYSi described in step 3 ingot casting, the shrinkage cavity of excision ingot casting head, make its light with bottom lathe turning ingot casting and surface, obtaining diameter is 75mm, be highly 270mm obtain NiCrAlYSi alloy target material.
Carry out cutting to the NiCrAlYSi alloy target material ingot casting of the present embodiment casting to detect, result display alloy target material inside ingot uniform quality, without shrinkage cavity, loosen, the defect such as segregation and fire check.
Embodiment 6
Step one, conventionally melting prepare NiCrAlYSi alloy ingot blank;
Step 2, the crucible alloy ingot blank of NiCrAlYSi described in step one is placed in vaccum sensitive stove, and the frock of embodiment 3 is placed in described vaccum sensitive stove, the water inlet 8 of described frock is connected with the water inlet pipe of vaccum sensitive stove, delivery port 9 is connected with the outlet pipe of vaccum sensitive stove, ON cycle cooling water the flow adjusting recirculated cooling water is 0.8L/min;
Vacuum induction furnace door described in step 3, closedown step 2, is evacuated to 10 to vaccum sensitive stove
-2carrying out heating after Pa makes NiCrAlYSi alloy ingot blank melt completely, obtains aluminium alloy; Then in vaccum sensitive stove, pass into argon gas to the vacuum of vaccum sensitive stove is 0.045MPa, continue heating, stop heating vaccum sensitive stove after described aluminium alloy is warming up to 1600 DEG C, and aluminium alloy is poured in graphite jig 1 along insulated feeder 5 continuously, while pouring into, the flow of recirculated cooling water is increased to 10L/min, after the aluminium alloy poured into solidifies completely, close recirculated cooling water, take out frock air cooling, after the demoulding, obtain NiCrAlYSi alloy target material ingot casting;
Step 4, carry out machined to the alloy target material of NiCrAlYSi described in step 3 ingot casting, the shrinkage cavity of excision ingot casting head, make its light with bottom lathe turning ingot casting and surface, obtaining diameter is 55mm, be highly 220mm obtain NiCrAlYSi alloy target material.
Carry out cutting to the NiCrAlYSi alloy target material ingot casting of the present embodiment casting to detect, result display alloy target material inside ingot uniform quality, without shrinkage cavity, loosen, the defect such as segregation and fire check.
The above; it is only preferred embodiment of the present invention; not any restriction is done to the present invention, every above embodiment is done according to invention technical spirit any simple modification, change and equivalent structure change, all still belong in the protection domain of technical solution of the present invention.
Claims (9)
1. cast the frock of NiCrAlYSi alloy target material for one kind, it is characterized in that, comprise the steel drum (6) of upper end open, graphite bolster plate (4) is provided with above the bottom of described steel drum (6), described graphite bolster plate (4) top is provided with graphite jig (1), the upper end of described graphite jig (1) is provided with the insulated feeder (5) matched with graphite jig (1), the outer wall spiral winding of described graphite jig (1) has cooling water pipe (2), one end of described cooling water pipe (2) passes steel drum (6) as water inlet (8), the other end of cooling water pipe (2) passes steel drum (6) as delivery port (9), described water inlet (8) is positioned at the below of delivery port (9), in described steel drum (6) and the outside being positioned at graphite jig (1) is filled with aluminum oxide sand (7), the tip height of described aluminum oxide sand (7) is no more than the upper end of graphite jig (1).
2. a kind of frock of casting NiCrAlYSi alloy target material according to claim 1, it is characterized in that, the thickness of described graphite bolster plate (4) is 10mm ~ 15mm, graphite bolster plate (4) is plectane, the cross section of described graphite jig (1) is circular, the diameter 50mm ~ 100mm larger than the external diameter of graphite jig (1) of graphite bolster plate (4).
3. a kind of frock of casting NiCrAlYSi alloy target material according to claim 1, is characterized in that, the top of described graphite bolster plate (4) is provided with the Graphite pad (3) for shutoff graphite jig (1) bottom.
4. a kind of frock of casting NiCrAlYSi alloy target material according to claim 1, is characterized in that, the material of described insulated feeder (5) is refractory brick, and the height of insulated feeder (5) is 50mm ~ 70mm.
5. a kind of frock of casting NiCrAlYSi alloy target material according to claim 1, it is characterized in that, vertical range between the bottom of described cooling water pipe (2) and graphite jig (1) bottom is 30mm ~ 50mm, the top of cooling water pipe (2) is positioned at graphite jig (1) center up 30mm ~ 50mm, and the pitch of cooling water pipe (2) spiral winding is 2mm ~ 5mm.
6. a kind of frock of casting NiCrAlYSi alloy target material according to claim 5, is characterized in that, described cooling water pipe (2) for cross section be square copper pipe, outside the cross section of described copper pipe, the length of side is 5mm ~ 10mm, and wall thickness is 0.5mm ~ 1mm.
7. a kind of frock of casting NiCrAlYSi alloy target material according to claim 1, is characterized in that, the internal diameter of described graphite jig (1) is 50mm ~ 80mm, is highly 200mm ~ 300mm, and wall thickness is 10mm ~ 15mm.
8. adopt a method for frock casting NiCrAlYSi alloy target material as claimed in claim 1, it is characterized in that, the method comprises the following steps:
Step one, melting prepare NiCrAlYSi alloy ingot blank;
Step 2, the crucible alloy ingot blank of NiCrAlYSi described in step one is placed in vaccum sensitive stove, and the frock of casting NiCrAlYSi alloy target material is placed in described vaccum sensitive stove, the water inlet (8) of described frock is connected with the water inlet pipe of vaccum sensitive stove, delivery port (9) is connected with the outlet pipe of vaccum sensitive stove, ON cycle cooling water the flow adjusting recirculated cooling water is 0.6L/min ~ 0.9L/min;
Vacuum induction furnace door described in step 3, closedown step 2, is evacuated to 10 to vaccum sensitive stove
-2carrying out heating after Pa makes NiCrAlYSi alloy ingot blank melt completely, obtains aluminium alloy; Then in vaccum sensitive stove, pass into argon gas to the vacuum of vaccum sensitive stove is 0.04MPa ~ 0.05MPa, continue heating, after described aluminium alloy is warming up to 1500 DEG C ~ 1600 DEG C, aluminium alloy is poured in graphite jig (1) along insulated feeder (5) continuously, while pouring into, the flow of recirculated cooling water is increased to 8L/min ~ 10L/min, after the aluminium alloy poured into solidifies completely, close recirculated cooling water, take out frock air cooling, after the demoulding, obtain NiCrAlYSi alloy target material ingot casting;
Step 4, machined is carried out to the alloy target material of NiCrAlYSi described in step 3 ingot casting, obtain NiCrAlYSi alloy target material.
9. method according to claim 8, is characterized in that, stops heating vaccum sensitive stove in step 3 before pouring into aluminium alloy.
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| CN201410743128.7A CN104399897B (en) | 2014-12-07 | 2014-12-07 | A kind of frock and casting method of casting NiCrAlYSi alloy target material |
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| CN201410743128.7A CN104399897B (en) | 2014-12-07 | 2014-12-07 | A kind of frock and casting method of casting NiCrAlYSi alloy target material |
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| CN110158041A (en) * | 2019-07-09 | 2019-08-23 | 中国科学院宁波材料技术与工程研究所 | NiSiAlY coating, preparation method and application |
| CN112570691A (en) * | 2019-09-29 | 2021-03-30 | 京磁材料科技股份有限公司 | Cooling device for preparing magnetron sputtering target by vacuum melting |
| CN112045165A (en) * | 2020-09-04 | 2020-12-08 | 江苏隆达超合金航材有限公司 | Cooling device in casting high-temperature alloy pouring process |
| CN112680626A (en) * | 2020-12-09 | 2021-04-20 | 爱发科电子材料（苏州）有限公司 | Preparation process of copper-aluminum-silicon alloy target material for integrated circuit |
| CN113290212A (en) * | 2021-04-14 | 2021-08-24 | 山西太钢不锈钢股份有限公司 | Method for forming bottom of casting ingot in smelting process of vacuum induction furnace |
| CN115094392A (en) * | 2022-07-06 | 2022-09-23 | 天津华瑞新材料科技有限公司 | Preparation method of fine-grain high-density nickel-chromium-aluminum-yttrium-silicon alloy target material |
| CN115213361A (en) * | 2022-07-26 | 2022-10-21 | 王小川 | Pouring directional solidification process |
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