CN104384053B - 用于清洗修整器的防溅射装置 - Google Patents
用于清洗修整器的防溅射装置 Download PDFInfo
- Publication number
- CN104384053B CN104384053B CN201410535824.9A CN201410535824A CN104384053B CN 104384053 B CN104384053 B CN 104384053B CN 201410535824 A CN201410535824 A CN 201410535824A CN 104384053 B CN104384053 B CN 104384053B
- Authority
- CN
- China
- Prior art keywords
- plate
- baffle
- swing arm
- injection device
- cleaning
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
- B05B12/00—Arrangements for controlling delivery; Arrangements for controlling the spray area
- B05B12/16—Arrangements for controlling delivery; Arrangements for controlling the spray area for controlling the spray area
- B05B12/32—Shielding elements, i.e. elements preventing overspray from reaching areas other than the object to be sprayed
- B05B12/36—Side shields, i.e. shields extending in a direction substantially parallel to the spray jet
Landscapes
- Cleaning By Liquid Or Steam (AREA)
- Cleaning Implements For Floors, Carpets, Furniture, Walls, And The Like (AREA)
Abstract
Description
Claims (9)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201410535824.9A CN104384053B (zh) | 2014-10-11 | 2014-10-11 | 用于清洗修整器的防溅射装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201410535824.9A CN104384053B (zh) | 2014-10-11 | 2014-10-11 | 用于清洗修整器的防溅射装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN104384053A CN104384053A (zh) | 2015-03-04 |
CN104384053B true CN104384053B (zh) | 2017-02-15 |
Family
ID=52602064
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201410535824.9A Active CN104384053B (zh) | 2014-10-11 | 2014-10-11 | 用于清洗修整器的防溅射装置 |
Country Status (1)
Country | Link |
---|---|
CN (1) | CN104384053B (zh) |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE19931127A1 (de) * | 1999-07-06 | 2001-01-11 | Pondeljak Kastelan Mira | Verfahren zum gleichzeitigen Aufbringen einer Mehrzahl von dünnen, scharf gebündelten Flüssigkeitsstrahlen unter Überdruck auf eine Oberfläche und gleichzeitigem Erzeugen eines Unterdruckes, und Vorrichtung zum Durchführen dieses Verfahrens |
CN2564265Y (zh) * | 2002-09-09 | 2003-08-06 | 彩虹彩色显像管总厂 | 回收防溅注入喷嘴 |
DE102008030779A1 (de) * | 2008-06-28 | 2009-12-31 | Georg Schneider | Sprühmodul für eine Offsetdruckmaschine |
CN103785638A (zh) * | 2012-11-01 | 2014-05-14 | 沈阳芯源微电子设备有限公司 | 清洗晶圆背面的喷出装置 |
-
2014
- 2014-10-11 CN CN201410535824.9A patent/CN104384053B/zh active Active
Also Published As
Publication number | Publication date |
---|---|
CN104384053A (zh) | 2015-03-04 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
C06 | Publication | ||
PB01 | Publication | ||
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
TR01 | Transfer of patent right |
Effective date of registration: 20190620 Address after: 300 350 Building 9, 8 Juxing Road, Haihe Science Park, Jinnan District, Tianjin Patentee after: TIANJIN HWATSING TECHNOLOGY COMPANY LIMITED (HWATSING CO., LTD.) Address before: 100084 Haidian District 100084-82 mailbox in Beijing Patentee before: Tsinghua University |
|
TR01 | Transfer of patent right | ||
CP01 | Change in the name or title of a patent holder |
Address after: 300350, Tianjin City, Jinnan District Science and Technology Park, Hai Hing Road, No. 9, building No. 8 Patentee after: Huahaiqingke Co.,Ltd. Address before: 300350, Tianjin City, Jinnan District Science and Technology Park, Hai Hing Road, No. 9, building No. 8 Patentee before: TSINGHUA University |
|
CP01 | Change in the name or title of a patent holder |