CN104378904B - Radio frequency plasma chamber meeting mechanism that negative hydrogen ions are generated through plasmas - Google Patents

Radio frequency plasma chamber meeting mechanism that negative hydrogen ions are generated through plasmas Download PDF

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CN104378904B
CN104378904B CN201410666230.1A CN201410666230A CN104378904B CN 104378904 B CN104378904 B CN 104378904B CN 201410666230 A CN201410666230 A CN 201410666230A CN 104378904 B CN104378904 B CN 104378904B
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chamber
source region
coil
plasma chamber
air inlet
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CN104378904A (en
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高飞
王友年
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Dalian University of Technology
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Dalian University of Technology
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    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02EREDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E30/00Energy generation of nuclear origin
    • Y02E30/10Nuclear fusion reactors

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Abstract

The invention relates to a radio frequency plasma chamber meeting the mechanism that negative hydrogen ions are generated through plasmas and belongs to the field of neutral beam heating in the controlled magnetic confinement nuclear fusion auxiliary heating technology. According to the radio frequency plasma chamber, the upper end of a discharging source region chamber is connected with a first air inlet and a preionization electrode flange in a sealing mode, and the lower end of the discharging source region chamber is fixedly sealed in the middle of a sealing cover at the upper portion of a diffusion chamber; the sealing cover at the upper portion of the diffusion chamber is provided with a second air inlet, and the lower end of the diffusion chamber is fixedly sealed to a bottom plate. A discharging coil is wound in the middle of the outer side of the discharging source region chamber, and the upper end and the lower end of the discharging coil are each provided with a first magnetic field coil; a second magnetic field coil generating a radial field is arranged at the bottom of the diffusion chamber. Through the radio frequency plasma chamber, the top of the diffusion chamber can be supplemented with fresh hydrogen; after the hydrogen collides with high-energy electrons diffused down from a source region, the density of excited vibrational-state hydrogen molecules in the plasmas in the diffusion region is increased, the electron temperature is decreased, and the probability that the negative hydrogen ions are generated in the plasmas is increased.

Description

A kind of body produces the plasma chamber of negative hydrogen ion mechanism
Technical field
The present invention relates to a kind of body produces the plasma chamber of negative hydrogen ion mechanism, auxiliary for controlled magnetic confinement nuclear fusion Help the neutral beam heating art in heating technique.
Background technology
Controlled magnetic confinement nuclear fusion is to solve one of most promising solution of human future energy problem.Although people The research of over half a century is carried out to controlled magnetic confinement fusion plasma, but still has been faced with many challenging problems.Its One of be how magnetic confinement fusion plasma to be maintained for a long time the extreme temperature of 1.5 hundred million degrees centigrade.And Magnetic confinement fusion plasma is maintained so high temperature, depend merely on Ohmic heating also not all right it is necessary to adopt secondary auxiliary Heater meanses, such as neutral beam heating and radio frequency Wave heating.Wherein, neutral beam injection technique, as a kind of post bake means, is Realize one of key technology of magnetic confinement nuclear fusion.Compared with traditional cation electron gun, high-power RF sensing ion source can To produce high density beam of negative hydrogen, drastically increase the efficiency of ion beam neutralization.But at present for H- ion source Development be scarcely out of swaddling-clothes, therefore the present inventor devise a set of can carry out body produce anion mechanism plasma Chamber.
Content of the invention
Produce negative hydrogen ion in order to realize body, the invention provides a kind of body produces the plasma chamber of negative hydrogen ion mechanism Room, this plasma chamber is able to maintain that and meets the plasma producing negative hydrogen ion.
The technical solution that the present invention adopts is: a kind of body produces the plasma chamber of negative hydrogen ion mechanism, wait from Daughter chamber is using electric discharge source region cavity, diffusion region cavity, electric discharge source region cavity seal lid, diffusion region cavity closure and base plate Constitute, described electric discharge source region chamber capping is provided with metal baffle axial location governor motion, top observe with measurement window, the One air inlet and preionization bias platform, the outer cylinder surface of electric discharge source region cavity is wound around discharge coil, upper in discharge coil First field coil is respectively placed at lower two ends, and diffusion region cavity closure is provided with the second air inlet and sealing structure, diffusion The periphery of area's cavity is provided with multiple sides standing motionless as if facing a wall and examines and measurement window and second field coil, is provided with bottom and observes on base plate With measurement window and gas outlet.
Described metal baffle axial location governor motion includes guide post, adjusting nut, rotary flange, the ripple for sealing Stricture of vagina pipe and metal baffle;When adjusting adjusting nut, rotary flange slides on the guide bar, so that corrugated tube is deformed, positioned at ripple Support bar in pipe drives metal baffle to move, and changes the distance of metal baffle and base plate.
Described preionization bias platform adopts metal flange, insulating barrier and metal bar construction;On the bottom surface of metal flange Have the sealing edge of a knife, edge has for being fixed to the bolt hole on electric discharge source region cavity seal lid;Described metal bar is close successively Sealing is scheduled on insulating barrier metal flange and electric discharge source region cavity seal lid.
The coil turn n of described discharge coil is 1-6, when coil turn n is more than 2, the spacing between coil turn and circle Using equal or unequal.
The end of described first air inlet and the second air inlet is using annular uniform flow air inlet pipe.
The invention has the beneficial effects as follows: the plasma chamber that this body produces negative hydrogen ion mechanism includes source region chamber of discharging Room and diffusion chamber, are provided with metal baffle axial location governor motion, the first air inlet and survey in electric discharge source region chamber capping Mensuration orchid window and preionization bias platform;Diffusion chamber capping is provided with the second air inlet and sealing flange;In electric discharge source region The metal baffle of within the chamber passes through the adjustment of the adjusting nut of axial location governor motion, and rotary flange slides on the guide bar, So that corrugated tube is deformed, the connecting rod in corrugated tube moves, change the distance of metal baffle and diffusion chamber base plate, that is, change Electric discharge source region chamber plasma produces the height in area.This reative cell in an experiment can efficiently control electric discharge source region grade from The electron density of daughter, electron temperature;And the hydrogen of the density, electron temperature and vibration excited state of extended cavity chamber piasma Molecular density, such that it is able to create the plasma environment producing negative hydrogen ion, produces highdensity negative hydrogen ion.
Brief description
Fig. 1 is a kind of structure chart of the plasma chamber that body produces negative hydrogen ion mechanism.
Fig. 2 is a enlarged drawing in Fig. 1.
Fig. 3 is the structure chart that preionization biases platform.
In figure: 1, the second field coil, 2, diffusion region cavity closure, the 3, second air inlet, the 4, first field coil, 5, Electric discharge source region cavity seal lid, 6, metal baffle axial location governor motion, 6a, guide post, 6b, adjusting nut, 6c, Mobile Method Orchid, 6d, corrugated tube, 6e, metal baffle, 6f, support bar, 7, top observe and measurement window, the 8, first air inlet, 9, preionization Bias platform, 10, electric discharge source region cavity, 11, discharge coil, 12, sealing structure, 13, metallic shield, 14, side standing motionless as if facing a wall examines and survey Amount window, 15, diffusion region cavity, 16, gas outlet, 17, experiment pallet, 18, bottom observe and measurement window, 19, base plate, 20, Metal flange, 21, the sealing edge of a knife, 22, insulating barrier, 23, metal bar, 24, bolt hole.
Specific embodiment
Fig. 1,2 show that a kind of body produces the structure chart of the plasma chamber of negative hydrogen ion.In figure, vacuum chamber adopts Electric discharge source region cavity 10, electric discharge source region cavity seal lid 5, diffusion region cavity 15, diffusion region cavity closure 2 and base plate 19 structure Become.Wherein, electric discharge source region chamber is located at diffusion chamber top, is then attached to test on pallet 17.Electric discharge source region cavity 10 Around be wound around discharge coil 11 and place two field coils 4, and top be provided with top observe with measurement window 7, first enter QI KOU 8, preionization bias platform 9 and metal baffle axial location governor motion 6.It is provided with 6 side standings motionless as if facing a wall around diffusion region cavity 15 Examine and measurement window 14 and the second field coil 1, and be provided with the second air inlet 3 in top cover.Base plate 19 is provided with gas outlet 16 Observe and measurement window 18 with bottom.Metal baffle axial location governor motion 6 includes guide post 6a, adjusting nut 6b, movement Flange 6c, the corrugated tube 6d keeping vacuum chamber sealing and metal baffle 6e.During adjustment adjusting nut 6a, rotary flange 6c is leading Slide on bar 6b, so that corrugated tube 6d is deformed, the support bar 6f in corrugated tube drives metal baffle 6e to move, and changes metal Baffle plate 6e and the distance of diffusion chamber base plate 19.
Fig. 3 shows that preionization biases the structure chart of platform.Preionization bias platform 9 adopt metal flange 20, insulating barrier 22 with And metal bar 23 is constituted.The sealing edge of a knife 21 is had on the bottom surface of metal flange 20, edge has for being fixed to source region chamber Bolt hole 24 in capping 5;Metal bar 23 is sealedly connected in insulating barrier 22, metal flange 20 and source region chamber capping 5 successively.
Using above-mentioned technical scheme, the plasma chamber that this body produces negative hydrogen ion mechanism will discharge outside source region cavity Discharge coil by matching network connect the high-power source of low frequency radio frequency, then metal baffle 6e connect publicly, preionization is inclined Present a theatrical performance as the last item on a programme 9 by matching network connection high-frequency small power source, the first air inlet 8 is passed through appropriate working gas hydrogen, the second air inlet 3 Equally it is passed through appropriate working gas hydrogen, then the first field coil 4 and the second field coil 1 be all in normal operating conditions, The hydrogen plasma of high electron density, high electron temperature so just can be produced in electric discharge source region chamber;And in diffusion chamber Interior just can form low electron temperature, higher electron density and the hydrogen molecule being in vibration excited state and highdensity negative hydrogen from Son.Then connect anion body in this plasma chamber bottom and draw the line that grid just can draw negative hydrogen ion, with regard to energy Form H- ion source.
In a word, the present invention can occur in generation negative hydrogen ion in bulk plasmon.

Claims (4)

1. a kind of plasma chamber of body generation negative hydrogen ion mechanism, plasma chamber employing electric discharge source region cavity (10), Diffusion region cavity (15), electric discharge source region cavity seal lid (5), diffusion region cavity closure (2) and base plate (19) composition, described put Power supply area chamber capping (5) be provided with metal baffle axial location governor motion (6), top observe with measurement window (7), first Air inlet (8) and preionization bias platform (9), the outer cylinder surface of electric discharge source region cavity (10) is wound around discharge coil (11), The upper and lower ends of discharge coil (11) respectively place first field coil (4), and diffusion region cavity closure (2) is provided with second Air inlet (3) and sealing structure (12), the periphery of diffusion region cavity (15) be provided with multiple sides standing motionless as if facing a wall examine with measurement window (14) and One the second field coil (1), is provided with bottom on base plate (19) and observes and measurement window (18) and gas outlet (16);Its feature Be: described metal baffle axial location governor motion (6) include guide post (6a), adjusting nut (6b), rotary flange (6c), Corrugated tube (6d) for sealing and metal baffle (6e);When adjusting adjusting nut (6a), rotary flange (6c) is in guide post (6b) upper slip, makes corrugated tube (6d) deform, and the support bar (6f) in corrugated tube drives metal baffle (6e) mobile, changes Metal baffle (6e) and the distance of base plate (19).
2. a kind of body according to claim 1 produce negative hydrogen ion mechanism plasma chamber it is characterised in that: institute Stating preionization bias platform (9) adopts metal flange (20), insulating barrier (22) and metal bar (23) to constitute;In metal flange (20) Bottom surface on have the sealing edge of a knife (21), edge has for being fixed to the bolt hole in electric discharge source region cavity seal lid (5) (24);Described metal bar (23) seals successively and is fixed on insulating barrier (22), metal flange (20) and electric discharge source region cavity seal lid (5) on.
3. a kind of body according to claim 1 produce negative hydrogen ion mechanism plasma chamber it is characterised in that: The coil turn n of described discharge coil (11) is 1-6, and when coil turn n is more than 2, the spacing between coil turn and circle adopts Equal or unequal.
4. a kind of body according to claim 1 produce negative hydrogen ion mechanism plasma chamber it is characterised in that: institute State the first air inlet (8) and the end of the second air inlet (3) adopts annular uniform flow air inlet pipe.
CN201410666230.1A 2014-11-20 2014-11-20 Radio frequency plasma chamber meeting mechanism that negative hydrogen ions are generated through plasmas Active CN104378904B (en)

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CN106298425B (en) * 2016-11-04 2017-09-29 大连理工大学 Improve the plasma chamber of plasma radial uniformity
CN109195298B (en) * 2018-09-06 2020-03-03 西安交通大学 Negative hydrogen ion generating device and method
CN110418488A (en) * 2019-08-26 2019-11-05 大连理工大学 A kind of radio frequency discharge H- ion source chamber
CN113301706A (en) * 2021-05-24 2021-08-24 东华理工大学 External simple radio frequency discharge strong current proton source device for cyclotron

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JP2000098070A (en) * 1998-09-18 2000-04-07 Japan Atom Energy Res Inst Method and device for measuring and detecting quantity of cesium in cesium oven in negative ion source of neutral beam injection device
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CN204231739U (en) * 2014-11-20 2015-03-25 大连理工大学 A kind of plasma chamber producing negative hydrogen ion mechanism

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Publication number Priority date Publication date Assignee Title
US3742219A (en) * 1971-06-23 1973-06-26 Atomic Energy Commission High energy neutral particle beam source
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JP2000098070A (en) * 1998-09-18 2000-04-07 Japan Atom Energy Res Inst Method and device for measuring and detecting quantity of cesium in cesium oven in negative ion source of neutral beam injection device
CN1447865A (en) * 2000-07-10 2003-10-08 尤纳克西斯美国公司 Double scanning thin film processing system
CN204231739U (en) * 2014-11-20 2015-03-25 大连理工大学 A kind of plasma chamber producing negative hydrogen ion mechanism

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