CN104372303A - 一种多弧离子镀设备的电弧靶的位置结构 - Google Patents
一种多弧离子镀设备的电弧靶的位置结构 Download PDFInfo
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- CN104372303A CN104372303A CN201410624933.8A CN201410624933A CN104372303A CN 104372303 A CN104372303 A CN 104372303A CN 201410624933 A CN201410624933 A CN 201410624933A CN 104372303 A CN104372303 A CN 104372303A
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- Prior art keywords
- electric arc
- target
- targets
- arc target
- arc
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/46—Sputtering by ion beam produced by an external ion source
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/3464—Sputtering using more than one target
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- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
Abstract
Description
Claims (6)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
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CN201410624933.8A CN104372303B (zh) | 2014-11-10 | 2014-11-10 | 一种多弧离子镀设备的电弧靶的位置结构 |
Applications Claiming Priority (1)
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CN201410624933.8A CN104372303B (zh) | 2014-11-10 | 2014-11-10 | 一种多弧离子镀设备的电弧靶的位置结构 |
Publications (2)
Publication Number | Publication Date |
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CN104372303A true CN104372303A (zh) | 2015-02-25 |
CN104372303B CN104372303B (zh) | 2017-01-18 |
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CN201410624933.8A Active CN104372303B (zh) | 2014-11-10 | 2014-11-10 | 一种多弧离子镀设备的电弧靶的位置结构 |
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CN (1) | CN104372303B (zh) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN109943813A (zh) * | 2019-04-28 | 2019-06-28 | 北京航空航天大学 | 一种Al-Cr金属复合涂层的高通量制备方法 |
CN114481045A (zh) * | 2021-12-22 | 2022-05-13 | 昆山浦元真空技术工程有限公司 | 电弧靶阳极辉光真空镀膜工艺及其所用的设备 |
CN116334536A (zh) * | 2023-03-29 | 2023-06-27 | 东北大学 | 一种高韧性过渡族金属氮化物TiAl(Ni)NX硬质涂层及其制备方法 |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN2700341Y (zh) * | 2003-12-17 | 2005-05-18 | 北京长城钛金公司 | 配屏幕电弧的多功能离子镀膜装置 |
CN2846439Y (zh) * | 2005-12-13 | 2006-12-13 | 深圳国家863计划材料表面工程技术研究开发中心 | 柱状阴极复合离子镀膜设备 |
CN101871094A (zh) * | 2010-06-04 | 2010-10-27 | 广东工业大学 | 一种在多弧离子镀膜机上控制获得合金薄膜的方法及其比例调节器 |
CN204224697U (zh) * | 2014-11-10 | 2015-03-25 | 仪征双环设备制造有限公司 | 一种多弧离子镀设备的电弧靶的位置结构 |
-
2014
- 2014-11-10 CN CN201410624933.8A patent/CN104372303B/zh active Active
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN2700341Y (zh) * | 2003-12-17 | 2005-05-18 | 北京长城钛金公司 | 配屏幕电弧的多功能离子镀膜装置 |
CN2846439Y (zh) * | 2005-12-13 | 2006-12-13 | 深圳国家863计划材料表面工程技术研究开发中心 | 柱状阴极复合离子镀膜设备 |
CN101871094A (zh) * | 2010-06-04 | 2010-10-27 | 广东工业大学 | 一种在多弧离子镀膜机上控制获得合金薄膜的方法及其比例调节器 |
CN204224697U (zh) * | 2014-11-10 | 2015-03-25 | 仪征双环设备制造有限公司 | 一种多弧离子镀设备的电弧靶的位置结构 |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN109943813A (zh) * | 2019-04-28 | 2019-06-28 | 北京航空航天大学 | 一种Al-Cr金属复合涂层的高通量制备方法 |
CN109943813B (zh) * | 2019-04-28 | 2023-03-14 | 北京航空航天大学 | 一种Al-Cr金属复合涂层的高通量制备方法 |
CN114481045A (zh) * | 2021-12-22 | 2022-05-13 | 昆山浦元真空技术工程有限公司 | 电弧靶阳极辉光真空镀膜工艺及其所用的设备 |
CN116334536A (zh) * | 2023-03-29 | 2023-06-27 | 东北大学 | 一种高韧性过渡族金属氮化物TiAl(Ni)NX硬质涂层及其制备方法 |
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CN104372303B (zh) | 2017-01-18 |
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Application publication date: 20150225 Assignee: ASIMCO SHUANGHUAN PISTON RING (YIZHENG) CO., LTD. Assignor: Yizheng Shuanghuan Equipment Manufacturing Co., Ltd. Contract record no.: 2017320000076 Denomination of invention: Position structure of arc targets of multi-arc ion coating apparatus Granted publication date: 20170118 License type: Exclusive License Record date: 20170313 |
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Effective date of registration: 20170328 Address after: 211400 Daqing South Road, Jiangsu, Yangzhou, No. 5, No. Patentee after: ASIMCO SHUANGHUAN PISTON RING (YIZHENG) CO., LTD. Address before: 211400 Yizheng, Jiangsu, Yangtze River East Road, No. 94, No. Patentee before: Yizheng Shuanghuan Equipment Manufacturing Co., Ltd. |