CN104317116B - Electric control liquid-crystal light divergence microlens array chip on basis of graphene electrodes - Google Patents

Electric control liquid-crystal light divergence microlens array chip on basis of graphene electrodes Download PDF

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CN104317116B
CN104317116B CN201410576694.3A CN201410576694A CN104317116B CN 104317116 B CN104317116 B CN 104317116B CN 201410576694 A CN201410576694 A CN 201410576694A CN 104317116 B CN104317116 B CN 104317116B
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liquid crystal
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microlens array
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CN104317116A (en
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张新宇
罗俊
佟庆
雷宇
桑红石
张天序
谢长生
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Huazhong University of Science and Technology
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    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333Constructional arrangements; Manufacturing methods
    • G02F1/1343Electrodes
    • G02F1/13439Electrodes characterised by their electrical, optical, physical properties; materials therefor; method of making
    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/13306Circuit arrangements or driving methods for the control of single liquid crystal cells
    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333Constructional arrangements; Manufacturing methods
    • G02F1/1337Surface-induced orientation of the liquid crystal molecules, e.g. by alignment layers
    • G02F1/133711Surface-induced orientation of the liquid crystal molecules, e.g. by alignment layers by organic films, e.g. polymeric films
    • G02F1/133723Polyimide, polyamide-imide
    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/29Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the position or the direction of light beams, i.e. deflection

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  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Liquid Crystal (AREA)
  • Optical Modulation, Optical Deflection, Nonlinear Optics, Optical Demodulation, Optical Logic Elements (AREA)

Abstract

本发明公开了一种基于纳米石墨烯电极的电控液晶光发散微透镜阵列芯片,包括驱控信号输入端口、以及石墨烯液晶散光微透镜阵列,石墨烯液晶散光微透镜阵列为m×n元,石墨烯液晶散光微透镜阵列采用液晶夹层结构,且下上层之间顺次设置有第一基片、图案化石墨烯电极、第一液晶定向层、液晶层、第二液晶定向层、石墨烯电极、第二基片,图案化石墨烯电极和石墨烯电极分别制作在第一基片和第二基片上,图案化石墨烯电极是由m×n个以微圆环隔离并以微线连接的微圆形石墨烯有序排布构成,从图案化石墨烯电极和石墨烯电极分别延伸出一根金属电极引线。本发明器件寿命长,可靠性高,易与常规光学光电机械结构耦合,环境适应性好等特点。

The invention discloses an electronically controlled liquid crystal light divergence microlens array chip based on nano-graphene electrodes, including a drive control signal input port and a graphene liquid crystal astigmatism microlens array, and the graphene liquid crystal astigmatism microlens array is m×n elements , the graphene liquid crystal astigmatism microlens array adopts a liquid crystal interlayer structure, and a first substrate, a patterned graphene electrode, a first liquid crystal alignment layer, a liquid crystal layer, a second liquid crystal alignment layer, a graphene The electrode, the second substrate, the patterned graphene electrode and the graphene electrode are fabricated on the first substrate and the second substrate respectively, and the patterned graphene electrode is separated by m×n micro rings and connected by micro wires The micro-circular graphene is arranged in an orderly manner, and a metal electrode lead is extended from the patterned graphene electrode and the graphene electrode respectively. The device of the invention has the characteristics of long service life, high reliability, easy coupling with conventional optical, photoelectric and mechanical structures, good environmental adaptability and the like.

Description

一种基于石墨烯电极的电控液晶光发散微透镜阵列芯片An electronically controlled liquid crystal light-diverging microlens array chip based on graphene electrodes

技术领域technical field

本发明属于光学精密测量与控制技术领域,更具体地,涉及一种基于石墨烯电极的电控液晶光发散微透镜阵列芯片。The invention belongs to the technical field of optical precision measurement and control, and more specifically relates to an electronically controlled liquid crystal light divergence microlens array chip based on graphene electrodes.

背景技术Background technique

近些年来,电控液晶微透镜技术发展迅速,在光束的电控汇聚、发散、整形、准直、调焦、摆焦、与光敏阵列和LED阵列耦合甚至集成、构建特殊光功能结构等方面,展现了良好的发展前景。已呈现的典型功能包括:(一)在阵列化液晶微结构上施加电驱控信号,所能执行的光汇聚、光发散或特征相位变换等,可在任意波束状态下展开、凝固或调变;(二)电控液晶微结构的光束变换作用受先验知识或光束处理结果的约束、干预或引导;(三)执行控光操作的微米级厚度电控液晶材料其时间响应常数目前已达到亚毫秒级,实验室级的已快至微秒级,可满足常规的动态控光需求。目前,如何进一步发展控光能力更强,反应更为迅速,可靠性更高、使用寿命更长,成本更低以及环境友好的液晶微透镜技术,已成为新的研发热点。In recent years, electronically controlled liquid crystal microlens technology has developed rapidly, in the aspects of electronically controlled convergence, divergence, shaping, collimation, focusing, focusing, coupling and even integration with photosensitive arrays and LED arrays, and construction of special light functional structures. , showing good prospects for development. The typical functions that have been presented include: (1) Applying electric driving control signals on the arrayed liquid crystal microstructure, the light convergence, light divergence, or characteristic phase transformation that can be performed can be expanded, solidified, or modulated in any beam state (2) The beam transformation effect of the electronically controlled liquid crystal microstructure is constrained, intervened or guided by prior knowledge or beam processing results; (3) The time response constant of the micron-scale thickness electronically controlled liquid crystal material that performs the light control operation has reached The sub-millisecond level, the laboratory level is as fast as the microsecond level, which can meet the conventional dynamic light control needs. At present, how to further develop liquid crystal microlens technology with stronger light control ability, faster response, higher reliability, longer service life, lower cost and environmental friendliness has become a new research and development hotspot.

迄今为止,基于贵金属合金膜电极在微米厚度液晶材料中构建空间电场,驱控液晶执行控光处理的缺陷主要表现在以下方面:(一)基于膜合金材料的电极必须具有足够的厚度来承载用于激励加载在液晶材料上的空间电场的薄层正、负空间电荷区,使液晶分子呈现特定的偶极空间排布形态;(二)厚度较大的膜合金电极在交变电场中呈现较大的面形阻抗,使器件中的图案化面电极对间所激励的微米级深度空间电场存在基于位形的空间不均匀性;(三)膜合金电极具有较强的热效应,长时间的热累积会抑制分布在液晶初始定向结构附近的液晶分子活性,降低电驱控作用下的液晶分子定向排布效能以及相应的电控介电能力,另外也会进一步增大金属电极阻抗,影响器件的电控响应灵敏度;(四)膜合金电极呈现窄带光选通性和谱透射不均匀性;(五)受电场驱动使能态提高的电子会从金属膜电极中溢出,穿透液晶初始定向结构的电子在进入液晶材料后,通过与液晶分子的极性基团中和,降低液晶材料的介电能力;(六)贵金属合金材料价格高,在材料生产和液晶器件制作环节中存在环境污染等。进入新世纪以来,发展具有纳米厚度、高电导、低热效和宽谱适应性的面电极技术,受到广泛关注。So far, based on the precious metal alloy film electrode to build a space electric field in the liquid crystal material with a thickness of micron, the defects of controlling the liquid crystal to perform light control treatment are mainly manifested in the following aspects: (1) The electrode based on the film alloy material must have sufficient thickness to carry It is used to excite the positive and negative space charge regions of the thin layer of the space electric field loaded on the liquid crystal material, so that the liquid crystal molecules present a specific dipole spatial arrangement; The large surface impedance makes the micron-scale deep space electric field excited between the patterned surface electrode pairs in the device have spatial inhomogeneity based on configuration; (3) The film alloy electrode has a strong thermal effect, and the long-term thermal Accumulation will inhibit the activity of liquid crystal molecules distributed near the initial orientation structure of the liquid crystal, reduce the efficiency of liquid crystal molecule orientation arrangement under the action of electric drive control and the corresponding electric control dielectric capacity, and will further increase the impedance of the metal electrode, affecting the performance of the device. Electrically controlled response sensitivity; (4) The film alloy electrode presents narrow-band optical gating and spectral transmission inhomogeneity; (5) The electrons driven by the electric field to increase the energy state will overflow from the metal film electrode and penetrate the initial orientation structure of the liquid crystal After the electrons enter the liquid crystal material, they neutralize the polar groups of the liquid crystal molecules to reduce the dielectric capacity of the liquid crystal material; (6) The price of precious metal alloy materials is high, and there is environmental pollution in the production of materials and liquid crystal devices. . Since the beginning of the new century, the development of surface electrode technology with nanometer thickness, high electrical conductivity, low thermal efficiency and wide-spectrum adaptability has attracted extensive attention.

诞生于世纪之交的石墨烯技术近些年得到了快速发展,迄今为止已展现出极为优良的电载体特性,如电子或空穴等载流子在石墨烯中几乎可以自由穿行所展现的超强导电和极低电阻性,一般仅吸收不超过3%的可见光和红外波的超高透光性和超宽谱适应性,在室温下传递电子的速度远快于目前已知的各种导电材料所展现的超高电子迁移率,基于六边形网状连接的纳米厚度单层或多层套叠架构所显示的超强结构稳定性、牢固性、柔韧性、耐腐蚀性和抗强场扰动能力,基于二维网状结构所展现的与目前已知的大多数光学、光电子和微电子材料极佳的结构匹配与耦合性。基于纳米石墨烯膜在电极构建方面所展现的潜在优势,构建基于石墨烯模的电控液晶微透镜技术,在发展先进的光学精密测量与控制技术方面,具有迫切需求。Graphene technology, which was born at the turn of the century, has developed rapidly in recent years and has so far exhibited excellent electrical carrier properties, such as the ultra-superior properties that carriers such as electrons or holes can travel almost freely in graphene. Strong conductivity and extremely low resistance, generally only absorb no more than 3% of visible light and infrared waves, ultra-high light transmittance and ultra-wide spectrum adaptability, and the speed of transferring electrons at room temperature is much faster than that of various known conductive materials. The ultra-high electron mobility exhibited by the material, based on the nano-thickness single-layer or multi-layer nested architecture of the hexagonal network connection, shows the super structural stability, firmness, flexibility, corrosion resistance and strong field resistance The perturbation ability is based on the excellent structural matching and coupling exhibited by the two-dimensional network structure with most currently known optical, optoelectronic and microelectronic materials. Based on the potential advantages of nano-graphene film in electrode construction, the construction of electronically controlled liquid crystal microlens technology based on graphene film has an urgent need in the development of advanced optical precision measurement and control technology.

发明内容Contents of the invention

针对现有技术的以上缺陷或改进需求,本发明提供了一种基于石墨烯电极的电控液晶光发散微透镜阵列芯片,其可实现微圆光孔阵图案化光场的电控成形与精细调变,易与其它光学光电机械结构耦合,环境适应性好。Aiming at the above defects or improvement needs of the prior art, the present invention provides an electronically controlled liquid crystal light divergence microlens array chip based on graphene electrodes, which can realize electronically controlled shaping and fine adjustment of the patterned light field of the micro-circular light hole array Changeable, easy to couple with other optical optoelectronic mechanical structures, good environmental adaptability.

为实现上述目的,按照本发明的一个方面,提供了一种基于纳米石墨烯电极的电控液晶光发散微透镜阵列芯片,包括驱控信号输入端口、以及石墨烯液晶散光微透镜阵列,石墨烯液晶散光微透镜阵列为m×n元,其中m、n均为大于1的整数,石墨烯液晶散光微透镜阵列采用液晶夹层结构,且下上层之间顺次设置有第一基片、图案化石墨烯电极、第一液晶定向层、液晶层、第二液晶定向层、石墨烯电极、第二基片,图案化石墨烯电极和石墨烯电极分别制作在第一基片和第二基片上,图案化石墨烯电极是由m×n个以微圆环隔离并以微线连接的微圆形石墨烯有序排布构成,从图案化石墨烯电极和石墨烯电极分别延伸出一根金属电极引线,并接入驱控信号输入端口的两端,驱控信号输入端口用于为图案化石墨烯电极和石墨烯电极提供电压信号。In order to achieve the above object, according to one aspect of the present invention, an electronically controlled liquid crystal light divergence microlens array chip based on nano-graphene electrodes is provided, including a drive control signal input port, and a graphene liquid crystal astigmatism microlens array, graphene The liquid crystal astigmatism microlens array is m×n elements, wherein m and n are both integers greater than 1, and the graphene liquid crystal astigmatism microlens array adopts a liquid crystal sandwich structure, and the first substrate, patterned The graphene electrode, the first liquid crystal alignment layer, the liquid crystal layer, the second liquid crystal alignment layer, the graphene electrode, the second substrate, the patterned graphene electrode and the graphene electrode are made on the first substrate and the second substrate respectively, The patterned graphene electrode is composed of m×n micro-circular graphene isolated by micro-rings and connected by micro-wires. A metal electrode extends from the patterned graphene electrode and the graphene electrode respectively. The lead wires are connected to both ends of the input port of the driving control signal, and the input port of the driving control signal is used to provide voltage signals for the patterned graphene electrode and the graphene electrode.

优选地,光波进入石墨烯液晶散光微透镜阵列后,被离散化成子入射波束阵,各子入射波束与受控电场激励下的液晶分子相互作用,被发散成微圆环界定的微光孔子波场,并经耦合形成微光孔阵透射波束从芯片输出。Preferably, after light waves enter the graphene liquid crystal astigmatism microlens array, they are discretized into sub-incident beam arrays, and each sub-incident beam interacts with liquid crystal molecules under the excitation of a controlled electric field, and is diverged into micro-optic hole sub-waves defined by micro rings Field, and through coupling to form a micro-optical aperture array transmission beam output from the chip.

优选地,所述芯片还包括芯片壳体,石墨烯液晶散光微透镜阵列位于芯片壳体内并与其固连,石墨烯液晶散光微透镜阵列的光入射面和光出射面,通过芯片壳体的顶面和底面开窗裸露出来,驱控信号输入端口设置在芯片壳体上,并通过芯片壳体的侧面开孔裸露在外。Preferably, the chip also includes a chip housing, the graphene liquid crystal astigmatism microlens array is located in the chip housing and is fixedly connected to it, and the light incident surface and the light exit surface of the graphene liquid crystal astigmatism microlens array pass through the top surface of the chip housing and the bottom surface are exposed through windows, and the drive control signal input port is arranged on the chip casing and exposed outside through the side opening of the chip casing.

优选地,第一液晶定向层和第二液晶定向层均由聚酰亚胺制成。Preferably, both the first liquid crystal alignment layer and the second liquid crystal alignment layer are made of polyimide.

优选地,第一基片和第二基片具有相同光学材质。Preferably, the first substrate and the second substrate have the same optical material.

总体而言,通过本发明所构思的以上技术方案与现有技术相比,能够取得下列有益效果:Generally speaking, compared with the prior art, the above technical solutions conceived by the present invention can achieve the following beneficial effects:

1、能够电控成形与调变微光孔阵光场:本发明采用石墨烯电极驱控液晶材料进行阵列化散光,具有将出射波束高效凝固在特定形态或调变到预定形态的优点。1. Capable of electronically controlling the shaping and modulating the light field of micro-optical hole arrays: the present invention uses graphene electrodes to drive and control liquid crystal materials for arrayed astigmatism, which has the advantage of efficiently freezing the outgoing beam in a specific shape or modulating it to a predetermined shape.

2、波谱范围宽:基于石墨烯材料的宽光谱高透光特性,芯片具有波谱范围宽的优点。2. Wide spectral range: Based on the wide spectrum and high light transmission characteristics of graphene materials, the chip has the advantage of wide spectral range.

3、控制效能高器件寿命长:由于采用具有超强导电和控电特征的石墨烯模制作电极,排除了电子离子等对液晶材料极化行为的影响,器件具有电控效能高寿命长的优点。3. High control efficiency and long device life: due to the use of graphene molds with super-conductive and electric control characteristics to make electrodes, the influence of electronic ions on the polarization behavior of liquid crystal materials is eliminated, and the device has the advantages of high electrical control efficiency and long life. .

4、智能化:通过调变加载在石墨烯电极上的电驱控信号,对图案化透射光场其波束形态的构建与调变操作,可在先验知识或波场图案特征的约束、干预或引导下展开,具有智能化特征。4. Intelligent: By modulating the electric drive control signal loaded on the graphene electrode, the construction and modulation operation of the beam shape of the patterned transmitted light field can be restricted and intervened in prior knowledge or wave field pattern characteristics. Or expand under guidance, with intelligent features.

5、使用方便:本发明的控光芯片主体为封装在芯片壳体内的石墨烯液晶散光微透镜阵列,在光路中配置方便,易与常规光学光电机械结构等匹配耦合。5. Easy to use: the main body of the light control chip of the present invention is a graphene liquid crystal astigmatism microlens array packaged in the chip shell, which is convenient to configure in the optical path, and is easy to match and couple with conventional optical, optoelectronic and mechanical structures.

附图说明Description of drawings

图1是本发明基于石墨烯电极的电控液晶光发散微透镜阵列芯片的结构示意图;Fig. 1 is the structural representation of the electronically controlled liquid crystal light divergence microlens array chip based on the graphene electrode of the present invention;

图2是本发明石墨烯液晶散光微透镜阵列的结构示意图;Fig. 2 is the structural representation of graphene liquid crystal astigmatism microlens array of the present invention;

图3是本发明基于石墨烯液晶散光微透镜进行光束变换的示意图。Fig. 3 is a schematic diagram of light beam conversion based on the graphene liquid crystal astigmatism microlens of the present invention.

在所有附图中,相同的附图标记用来表示相同的元件或结构,其中:Throughout the drawings, the same reference numerals are used to designate the same elements or structures, wherein:

1-驱控信号输入端口,2-石墨烯液晶散光微透镜阵列,3-芯片壳体。1-drive control signal input port, 2-graphene liquid crystal astigmatism microlens array, 3-chip housing.

具体实施方式detailed description

为了使本发明的目的、技术方案及优点更加清楚明白,以下结合附图及实施例,对本发明进行进一步详细说明。应当理解,此处所描述的具体实施例仅仅用以解释本发明,并不用于限定本发明。此外,下面所描述的本发明各个实施方式中所涉及到的技术特征只要彼此之间未构成冲突就可以相互组合。In order to make the object, technical solution and advantages of the present invention clearer, the present invention will be further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described here are only used to explain the present invention, not to limit the present invention. In addition, the technical features involved in the various embodiments of the present invention described below can be combined with each other as long as they do not constitute a conflict with each other.

如图1所示,本发明基于石墨烯电极的电控液晶光发散微透镜阵列芯片包括驱控信号输入端口、石墨烯液晶散光微透镜阵列2、以及芯片壳体3。As shown in FIG. 1 , the electronically controlled liquid crystal light divergence microlens array chip based on graphene electrodes of the present invention includes a drive signal input port, a graphene liquid crystal astigmatism microlens array 2 , and a chip housing 3 .

石墨烯液晶散光微透镜阵列2位于芯片壳体3内并与其固连。The graphene liquid crystal astigmatism microlens array 2 is located in the chip housing 3 and is fixedly connected thereto.

石墨烯液晶散光微透镜阵列的光入射面和光出射面,通过芯片壳体3的顶面和底面开窗裸露出来。The light incident surface and the light outgoing surface of the graphene liquid crystal astigmatism microlens array are exposed through opening windows on the top surface and the bottom surface of the chip housing 3 .

驱控信号输入端口1设置在芯片壳体3上,并通过芯片壳体3的侧面开孔裸露在外。The driving signal input port 1 is arranged on the chip case 3 and exposed outside through the side opening of the chip case 3 .

石墨烯液晶散光微透镜阵列为m×n元,其中m、n均为大于1的整数。各液晶散光微透镜中互连的由微圆环隔离的中心微圆形石墨烯以及微圆环外的石墨烯材料被同步加电。The graphene liquid crystal astigmatism microlens array has m×n elements, where m and n are both integers greater than 1. The interconnected central micro-circular graphene isolated by the micro-annulus in each liquid crystal astigmatism micro-lens and the graphene material outside the micro-annulus are powered on synchronously.

光波进入石墨烯液晶散光微透镜阵列2后,按照微透镜的规模和排布情况被离散化成子入射波束阵,各子入射波束与受控电场激励下的液晶分子相互作用,被发散成由微圆光环界定的微光孔子波场并经耦合形成微光孔阵透射波束从芯片输出。After the light wave enters the graphene liquid crystal astigmatism microlens array 2, it is discretized into sub-incident beam arrays according to the scale and arrangement of the micro-lenses, and each sub-incident beam interacts with liquid crystal molecules excited by a controlled electric field, and is diverged into The sub-wave field of the micro-optic hole defined by the circular light ring is coupled to form a micro-optic hole array transmission beam that is output from the chip.

如图2所示,本发明实施例的石墨烯液晶散光微透镜阵列采用液晶夹层结构,且下上层之间顺次设置有第一基片、图案化石墨烯电极、第一液晶定向层、液晶层、第二液晶定向层、石墨烯电极、第二基片。As shown in Figure 2, the graphene liquid crystal astigmatism microlens array of the embodiment of the present invention adopts a liquid crystal sandwich structure, and a first substrate, a patterned graphene electrode, a first liquid crystal alignment layer, a liquid crystal layer, a second liquid crystal alignment layer, a graphene electrode, and a second substrate.

图案化石墨烯电极和石墨烯电极分别制作在具有相同光学材质的第一基片和第二基片上。The patterned graphene electrode and the graphene electrode are fabricated on the first substrate and the second substrate with the same optical material respectively.

第一液晶定向层和第二液晶定向层均由聚酰亚胺制成,但应理解定向层材料并不局限于此,也可以是其它可形成纳米级深度和宽度的沟道材料。Both the first liquid crystal alignment layer and the second liquid crystal alignment layer are made of polyimide, but it should be understood that the alignment layer material is not limited thereto, and may also be other channel materials capable of forming nanoscale depth and width.

图案化石墨烯电极由m×n个以微圆环隔离并以微线联通的微圆形石墨烯有序排布构成。The patterned graphene electrode is composed of m×n micro-circular graphene isolated by micro-rings and connected by micro-wires.

从图案化石墨烯电极和石墨烯电极分别延伸出一根金属电极引线,接入驱控信号输入端口1的两端,各元微透镜中的图案化石墨烯电极被同步加电。A metal electrode lead is respectively extended from the patterned graphene electrode and the graphene electrode, and connected to both ends of the drive control signal input port 1, and the patterned graphene electrodes in each element microlens are powered on synchronously.

如图3所示,本发明的基于石墨烯液晶散光微透镜进行光束发散作用,通过加载在图案化石墨烯电极和石墨烯电极间的电压信号V实现,图中也给出了局部发散光场其典型的微圆光孔和发散光束的虚焦长与虚焦斑特征。为增强光束处理能力,在第一基片和第二基片的光入射面和光出射面分别制有同种材质的增透膜。As shown in Figure 3, the graphene liquid crystal astigmatism microlens of the present invention carries out beam divergence, which is realized by loading a voltage signal V between the patterned graphene electrode and the graphene electrode, and the local divergent light field is also shown in the figure The virtual focal length and virtual focal spot characteristics of its typical microcircular aperture and divergent beam. In order to enhance the light beam processing capability, anti-reflection coatings of the same material are respectively formed on the light incident surface and the light exit surface of the first substrate and the second substrate.

为使本领域技术人员更好地理解本发明,下面结合图1至图3说明本发明实施例的基于石墨烯电极的电控液晶光发散微透镜阵列芯片的工作原理。In order for those skilled in the art to better understand the present invention, the working principle of the electronically controlled liquid crystal light-diverging microlens array chip based on graphene electrodes according to the embodiment of the present invention will be described below with reference to FIGS. 1 to 3 .

基于石墨烯电极的电控液晶光发散微透镜阵列芯片被置于测试光路中,或被置于由主镜构成的光学系统的焦面处也可弱离焦配置。The electronically controlled liquid crystal light divergence microlens array chip based on graphene electrodes is placed in the test light path, or placed at the focal plane of the optical system composed of the primary mirror, and can also be configured with weak defocus.

将信号线接入驱控信号输入端口,将电压信号输入和加载在电控液晶光发散微透镜阵列上。The signal line is connected to the input port of the driving control signal, and the voltage signal is input and loaded on the electronically controlled liquid crystal light-diverging microlens array.

光束进入石墨烯液晶散光微透镜阵列后,与液晶分子相互作用后呈阵列化发散态。加载在石墨烯电极上的电压信号在图案化石墨烯电极和石墨烯电极间激励起空间电场,驱控所填充的液晶材料形成具有特定折射率空间分布形态的功能化液晶结构。通过每单元液晶微透镜的光束变换作用所构建的子发散光场,由特定孔径微圆环界定的中心暗斑形微光孔构成。其圆环亮度、孔径以及孔内消光比等,随驱控信号均方幅度或频率的变化而改变。After the light beam enters the graphene liquid crystal astigmatism microlens array, it interacts with the liquid crystal molecules and becomes arrayed and divergent. The voltage signal loaded on the graphene electrode excites a space electric field between the patterned graphene electrode and the graphene electrode, and drives the filled liquid crystal material to form a functional liquid crystal structure with a specific refractive index spatial distribution. The sub-divergent light field constructed by the light beam transformation effect of each unit liquid crystal micro-lens is composed of a central dark spot-shaped micro-optical hole defined by a micro-circle with a specific aperture. The brightness of the ring, the aperture and the extinction ratio in the hole, etc., change with the change of the mean square amplitude or frequency of the driving control signal.

从相邻微透镜出射的发散光场经耦合形成微光孔阵透射光场并从芯片输出。石墨烯液晶散光微透镜包括液晶材料、液晶定向层、石墨烯电极、金属电极引线、光学基片和增透膜等。液晶材料的上下两表面依次覆盖液晶定向层、石墨烯电极、基片和增透膜。The divergent light field emitted from the adjacent microlenses is coupled to form the transmitted light field of the micro-optical hole array and output from the chip. The graphene liquid crystal astigmatism microlens includes liquid crystal material, liquid crystal alignment layer, graphene electrode, metal electrode lead, optical substrate and anti-reflection film, etc. The upper and lower surfaces of the liquid crystal material are sequentially covered with a liquid crystal alignment layer, a graphene electrode, a substrate and an antireflection film.

本领域的技术人员容易理解,以上所述仅为本发明的较佳实施例而已,并不用以限制本发明,凡在本发明的精神和原则之内所作的任何修改、等同替换和改进等,均应包含在本发明的保护范围之内。It is easy for those skilled in the art to understand that the above descriptions are only preferred embodiments of the present invention, and are not intended to limit the present invention. Any modifications, equivalent replacements and improvements made within the spirit and principles of the present invention, All should be included within the protection scope of the present invention.

Claims (5)

1. a kind of microlens array chip is dissipated based on the electrically-controlled liquid crystal light of Graphene electrodes, including control signal input port, And Graphene liquid crystal astigmatism microlens array it is characterised in that
Graphene liquid crystal astigmatism microlens array is m × n unit, and wherein m, n are the integer more than 1;
Graphene liquid crystal astigmatism microlens array adopt be sequentially arranged between sandwiching liquid crystal structure, and lower upper strata the first substrate, Patterned Graphene electrodes, the first liquid crystal alignment layer, liquid crystal layer, the second liquid crystal alignment layer, Graphene electrodes, the second substrate;
Patterned Graphene electrodes and Graphene electrodes are produced on the first substrate and the second substrate;
Patterned Graphene electrodes are with the isolation of micro- annulus the micro-circle Graphene ordered arrangement with micro-line connection by m × n Constitute;
Each extend over out a metal electrode lead from patterned Graphene electrodes and Graphene electrodes, and it is defeated to access driving control signal The two ends of inbound port;
It is patterned Graphene electrodes that control signal input port is used for and Graphene electrodes provide voltage signal;
Outside the center micro-circle Graphene isolated by micro- annulus interconnecting in each Graphene liquid crystal astigmatism lenticule and micro- annulus Grapheme material synchronously powered up.
2. electrically-controlled liquid crystal light according to claim 1 dissipates microlens array chip it is characterised in that light wave enters graphite After alkene liquid crystal astigmatism microlens array, it is discretized into sub- incident wave beam battle array, under each sub- incident wave beam is encouraged with controlled electrical field Liquid crystal molecule interacts, and is diverged to low-light Confucius's wave field that micro- annulus defines, and coupled formation low-light hole battle array transmitted wave Bundle is from chip output.
3. electrically-controlled liquid crystal light according to claim 1 dissipate microlens array chip it is characterised in that
Described chip also includes chip housing;
Graphene liquid crystal astigmatism microlens array is located in chip housing and is connected with it;
The light entrance face of Graphene liquid crystal astigmatism microlens array and light-emitting face, are opened a window by the top surface and bottom surface of chip housing Exposed out;
Control signal input port is arranged in chip housing, and exposed outside by the lateral opening hole of chip housing.
4. electrically-controlled liquid crystal light according to claim 1 dissipates microlens array chip it is characterised in that the first liquid crystal aligning Layer and the second liquid crystal alignment layer are made by polyimides.
5. electrically-controlled liquid crystal light according to claim 1 dissipates microlens array chip it is characterised in that the first substrate and Two substrates have identical optical material.
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Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1367399A (en) * 2001-08-14 2002-09-04 中国科学院长春光学精密机械与物理研究所 Continuous vari-focus Fresnel microlens array device
CN101462717A (en) * 2007-12-17 2009-06-24 三星电子株式会社 Single crystalline graphene sheet and process of preparing the same
WO2012133029A1 (en) * 2011-03-28 2012-10-04 ソニー株式会社 Transparent electroconductive film, heater, touch panel, solar cell, organic el device, liquid crystal device, and electrical paper
CN103534204A (en) * 2011-03-29 2014-01-22 国立大学法人蔚山科学技术大学校产学协力团 Graphene sheet, transparent electrode including graphene sheet, active layer, and display device, electronic device, photovoltaic device, battery, solar cell, and dye-sensitized solar cell employing transparent electrode
CN204129387U (en) * 2014-10-24 2015-01-28 华中科技大学 A kind of electrically-controlled liquid crystal light based on Graphene electrodes disperses microlens array chip

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20120108233A (en) * 2011-03-23 2012-10-05 삼성전자주식회사 Active optical device and display apparatus including the same

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1367399A (en) * 2001-08-14 2002-09-04 中国科学院长春光学精密机械与物理研究所 Continuous vari-focus Fresnel microlens array device
CN101462717A (en) * 2007-12-17 2009-06-24 三星电子株式会社 Single crystalline graphene sheet and process of preparing the same
WO2012133029A1 (en) * 2011-03-28 2012-10-04 ソニー株式会社 Transparent electroconductive film, heater, touch panel, solar cell, organic el device, liquid crystal device, and electrical paper
CN103534204A (en) * 2011-03-29 2014-01-22 国立大学法人蔚山科学技术大学校产学协力团 Graphene sheet, transparent electrode including graphene sheet, active layer, and display device, electronic device, photovoltaic device, battery, solar cell, and dye-sensitized solar cell employing transparent electrode
CN204129387U (en) * 2014-10-24 2015-01-28 华中科技大学 A kind of electrically-controlled liquid crystal light based on Graphene electrodes disperses microlens array chip

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