CN104317056B - A kind of optical system picture element Infrared Heating compensation device - Google Patents
A kind of optical system picture element Infrared Heating compensation device Download PDFInfo
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- CN104317056B CN104317056B CN201410588549.7A CN201410588549A CN104317056B CN 104317056 B CN104317056 B CN 104317056B CN 201410588549 A CN201410588549 A CN 201410588549A CN 104317056 B CN104317056 B CN 104317056B
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- light
- infrared heating
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/09—Beam shaping, e.g. changing the cross-sectional area, not otherwise provided for
- G02B27/0927—Systems for changing the beam intensity distribution, e.g. Gaussian to top-hat
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/0081—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00 with means for altering, e.g. enlarging, the entrance or exit pupil
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/09—Beam shaping, e.g. changing the cross-sectional area, not otherwise provided for
- G02B27/0905—Dividing and/or superposing multiple light beams
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Mounting And Adjusting Of Optical Elements (AREA)
- Lasers (AREA)
Abstract
A kind of optical system picture element Infrared Heating compensation device belongs to the optics picture element of optical system and compensates field, it is therefore intended that solve the problem that prior art construction is complicated, compensation precision is low and compensation Zernike aberration composition item number is limited.Being fixed with optical element on the picture frame of the present invention, n light is expanded device and is separately fixed in the laser facula light hole of picture frame by flange；Infrared Heating compensates system and covers on optical table entirely through acrylic cover, and Infrared Heating compensates system and includes laser instrument and n group heating system, and laser emitting light is in n group heating system is incided in spectroscope light splitting and total reflective mirror respectively；The light transmitting device of n group heating system expands device by abutment sleeve with light and is connected, incide light in heating system after light beam power attenuating device is decayed again light transmitting device and light through outgoing radiation direction can be regulated expand device and be irradiated on optical element, it is achieved picture element compensates.
Description
Technical field
The optics picture element that the invention belongs to optical system compensates field, is specifically related to a kind of optical system picture element red
External heat compensation device.
Background technology
Along with the fast development of field of optical applications, optical system resolution constantly carries with the requirement of productivity ratio
Height, the increase of number of lenses, the increase of exposure dose can be efficiently modified resolution and the production of optical system
Rate, but the employing of aforesaid way inevitably introduces the aberration of optical system, causes optical system to meet not
Design objective, this allows for optical system picture element Infrared Heating compensation device and becomes necessary.
Optical system picture element compensation technique of the prior art has passive compensation technique based on structure optimization, also
Have an active compensation techniques based on distorting lens, wherein passive compensation technique use two be arranged symmetrically with asymmetric
Radiator structure, to improve the heat conduction heat exchange efficiency of the subregion of picture frame and eyeglass, so that the temperature of eyeglass
Degree distribution changes, and then changes wavefront, and passive compensation technique compensates Zernike (Ze Nike) aberration and becomes subitem
Several and limited in one's ability, and compensation precision is relatively low；Compensate as required based on distorting lens active compensation techniques
Composition, specifies region imposed load power on eyeglass or picture frame so that eyeglass is deformed, and then compensates ripple
Before, this technical pattern is complicated, expensive, compensates Zernike aberration composition item number limited.
Summary of the invention
It is an object of the invention to propose a kind of optical system picture element Infrared Heating compensation device, solve existing skill
The structure that art exists is complicated, compensation precision is low and compensates the problem that Zernike aberration composition item number is limited.
For achieving the above object, a kind of optical system picture element Infrared Heating compensation device of the present invention include picture frame,
Flange, light expand device, optical table, Infrared Heating compensation system and acrylic cover；Described picture frame
On be fixed with optical element, n laser facula light hole of picture frame circumference uniform distribution, n described light expands device
It is separately fixed in laser facula light hole by flange；
Being provided with Infrared Heating on described optical table and compensate system, described Infrared Heating compensates system entirety and leads to
Crossing acrylic cover and cover on optical table, Infrared Heating compensates system and includes laser instrument and n group heating system,
1st～n-1 group structure identical, including spectroscope, light beam power attenuating device, outgoing radiation direction can be regulated
Light transmitting device and abutment sleeve, n-th group includes total reflective mirror, light beam power attenuating device, can adjust
The light transmitting device in joint emergent ray direction and abutment sleeve；Described laser emitting light is through spectroscope light splitting
And total reflective mirror incides in n group heating system respectively；
The light transmitting device of described n group heating system expands device by abutment sleeve with described light and is connected,
The central ray of described light transmitting device outlet outgoing and described light expand the axis coaxle of device, incident
Light in heating system after light beam power attenuating device is decayed again through outgoing radiation direction can be regulated
Light transmitting device and light expand device and are irradiated on described optical element, it is achieved picture element compensates.
Described picture frame is annular, and described laser facula light hole diameter expands device clear aperature more than light,
Described flange is bolted on the flange datum clamp face of described laser facula light hole, described light
Expand the central ray of the device outgoing angle theta with the normal direction of irradiated optical element surface intersection point equal to optics
The material of element is at the Brewster's angle of laser instrument place infrared band.
The value of described n is: n >=2.
Described optical element is diaphotoscope or reflecting mirror.
It is fixed with optical element on described picture frame refer specifically to gluing fixing or grip.
Described infrared light supply refers specifically to infrared band P polarization light continuous wave laser.
Described light beam power attenuating device refers specifically to serial adjustable pad or the polarizer；Described spectroscope is concrete
Refer to light splitting plain film or Amici prism.
The described light transmitting device that can regulate outgoing radiation direction refers specifically to real core fibre external member or leaded light
Arm；Described light expands device and refers specifically to beam expanding lens or collimating mirror.
Described light is expanded device and is connected by matched in clearance with flange；It is fixed with described that described light expands device
Position bush whorl connects.
Described Infrared Heating compensates system exit hot spot and is radiated at the upper surface of optical element, lower surface, logical light
In aperture or outside clear aperature.
The invention have the benefit that in a kind of optical system picture element Infrared Heating compensation device of the present invention and swash
Light device output p-polarization light, is divided into multi beam light path through spectroscope and total reflective mirror, and every Shu Guang is respectively through continuously
Adjustable attenuator carries out light beam power and quantity regulating, realizes light any direction by real core fibre external member
Transmission, and spot energy distribution is transformed to be uniformly distributed, and every light is through abutment sleeve, it is achieved light
Fine external member is directed at beam expanding lens light path and transmission, by the regulation of beam expanding lens so that spot diameter produces corresponding
Change, is regulated by flange, it is achieved the control of facula position.
For the optical element of this device, with hot spot power, spot diameter, number of spots, facula position it is
Input function, with represent optical component surface shape 37 Zernike coefficients as object function, set up transmission letter
Number, the face shape index compensated by needs, solve required hot spot power, spot diameter, number of spots,
Facula position；According to above-mentioned algorithm acquired results, regulation laser instrument and serial adjustable pad, it is achieved hot spot
The control of power；By regulating the operating distance between solid core fibres external member and beam expanding lens, and beam expanding lens
Enlargement ratio, it is achieved the control of spot diameter；The control of number of spots is realized by serial adjustable pad；
The control of facula position is realized by the regulation of flange direction；Infrared based on above control realization optical system picture element
Heating compensation.The present invention realizes the regulation of optical element temperature based on infrared light supply heating and then changes optical element
The picture element active compensation techniques device of wavefront, this apparatus structure design difficulty is moderate, compensates Zernike aberration and becomes
Subitem number and ability are relatively strong, and compensation precision is higher, it is adaptable to picture element requires higher precision optical system.
Accompanying drawing explanation
Fig. 1 be the present invention a kind of optical system picture element Infrared Heating compensation device in mirror group structural representation；
Fig. 2 is a kind of optical system picture element Infrared Heating compensation device mid-infrared heating compensation system of the present invention
Schematic diagram；
Fig. 3 is the irradiation hot spot schematic diagram of a kind of optical system picture element Infrared Heating compensation device of the present invention；
Wherein: 1, optical element, 2, picture frame, 201, laser facula light hole, 3, flange, 4, expand
Mirror, 5, optical table, 6, acrylic cover, 7, laser instrument, 8, heating system, 801, spectroscope,
802, serial adjustable pad, 803, optical fiber external member, 804, abutment sleeve, 805, total reflective mirror.
Detailed description of the invention
Below in conjunction with the accompanying drawings embodiments of the present invention are described further.
Seeing accompanying drawing 1, accompanying drawing 2 and accompanying drawing 3, a kind of optical system picture element Infrared Heating of the present invention compensates dress
Put and include that picture frame 2, flange 3, beam expanding lens 4, optical table 5, Infrared Heating compensate system and acrylic cover
Son 6；Optical element 1 it is fixed with on described picture frame 2,2 laser facula light holes 201 of picture frame 2 circumference uniform distribution,
2 described beam expanding lens 4 are separately fixed in laser facula light hole 201 by flange 3；
Being provided with Infrared Heating on described optical table 5 and compensate system, it is overall that described Infrared Heating compensates system
Covering on optical table 5 by acrylic cover 6, Infrared Heating compensates system and includes laser instrument 7 and 2 groups
Heating system 8, the 1st group of structure includes spectroscope 801, serial adjustable pad 802, optical fiber external member 803
With abutment sleeve 804, the 2nd group includes total reflective mirror 805, serial adjustable pad 802, optical fiber external member 803
With abutment sleeve 804；Described laser instrument 7 emergent light is through spectroscope 801 light splitting and total reflective mirror 805 incidence respectively
In 2 groups of heating systems 8；
The optical fiber external member 803 of described 2 groups of heating systems 8 is by abutment sleeve 804 with described beam expanding lens 4 even
Connecing, described optical fiber external member 803 exports the central ray of outgoing and the axis coaxle of described beam expanding lens 4, incident
Light in heating system 8 after serial adjustable pad 802 is decayed again through optical fiber external member 803 with expand
Mirror 4 is irradiated on described optical element 1, it is achieved picture element compensates.
Described picture frame 2 is annular, and described laser facula light hole 201 diameter is more than beam expanding lens 4 light hole
Footpath, described flange 3 is bolted on the flange datum clamp face of described laser facula light hole 201,
Described light expands the angle of the central ray of device outgoing and the normal direction of irradiated optical element 1 surface intersection point
θ is equal to the material Brewster's angle at laser instrument 7 place infrared band of optical element 1.
Described optical element 1 is diaphotoscope or reflecting mirror.
It is fixed with optical element 1 on described picture frame 2 refer specifically to gluing fixing or grip.
Described spectroscope 801 refers specifically to light splitting plain film or Amici prism.
Described beam expanding lens 4 is connected by matched in clearance with flange 3；Described beam expanding lens 4 and described abutment sleeve
804 is threaded.
Described Infrared Heating compensates system exit hot spot and is radiated at the upper surface of optical element 1, lower surface, leads to
In light aperture or outside clear aperature.
A kind of optical system picture element Infrared Heating compensation device of the present invention is radiated on optical element 1 surface
Hot spot is two power, diameter, quantity and position-adjustable, and the equally distributed controlled thermal source of energy.
By the regulation power of emergent light spot, diameter, quantity and position, the temperature of optical element 1 can be changed
Distribution and wavefront；The wavefront knots modification of described optical element 1 is described by Zernike multinomial, and then realizes
The Zernike aberration compensation of optical system.
It is more than the detailed description of the invention of the present invention, but limitation of the present invention absolutely not, any in present invention essence
The change done in the range of god or equivalence are replaced and are all contained in protection scope of the present invention.
Claims (10)
1. an optical system picture element Infrared Heating compensation device, it is characterised in that include picture frame (2), method
Blue (3), light expand device, optical table (5), Infrared Heating compensation system and acrylic cover (6)；
Being fixed with optical element (1) on described picture frame (2), n laser facula of picture frame (2) circumference uniform distribution goes out light
Hole (201), n described light expands device and is separately fixed at laser facula light hole (201) by flange (3)
In；
Being provided with Infrared Heating on described optical table (5) and compensate system, it is whole that described Infrared Heating compensates system
Body covers on optical table (5) by acrylic cover (6), and Infrared Heating compensates system and includes laser instrument
(7) and n group heating system (8), the 1st～n-1 group structure identical, including spectroscope (801), light beam merit
Rate attenuating device, the light transmitting device that outgoing radiation direction can be regulated and abutment sleeve (804), n-th
Group include total reflective mirror (805), light beam power attenuating device, can regulate outgoing radiation direction light transmission
Device and abutment sleeve (804)；Described laser instrument (7) emergent light is through spectroscope (801) light splitting and is all-trans
Mirror (805) incides in n group heating system (8) respectively；
The light transmitting device of described n group heating system (8) is by abutment sleeve (804) and described light
Expanding device to connect, the central ray of described light transmitting device outlet outgoing expands device with described light
Axis coaxle, incides the light in heating system (8) after light beam power attenuating device is decayed again through permissible
Light transmitting device and the light of regulation outgoing radiation direction expand device and are irradiated on described optical element (1),
Realize picture element to compensate.
A kind of optical system picture element Infrared Heating compensation device the most according to claim 1, its feature exists
In, described picture frame (2) is annular, and described laser facula light hole (201) diameter expands more than light
Device clear aperature, described flange (3) is bolted on described laser facula light hole (201)
On flange datum clamp face, described light expands central ray and the irradiated optical element (1) of device outgoing
The angle theta of the normal direction of surface intersection point is equal to the material of optical element (1) at laser instrument (7) place infrared waves
The Brewster's angle of section.
A kind of optical system picture element Infrared Heating compensation device the most according to claim 1, its feature exists
In, the value of described n is: n >=2.
A kind of optical system picture element Infrared Heating compensation device the most according to claim 1, its feature exists
In, described optical element (1) is diaphotoscope or reflecting mirror.
A kind of optical system picture element Infrared Heating compensation device the most according to claim 1, its feature exists
In, described picture frame (2) is fixed with optical element (1) and refers specifically to gluing fixing or grip.
A kind of optical system picture element Infrared Heating compensation device the most according to claim 1, its feature exists
In, described laser instrument (7) refers specifically to infrared band P polarization light continuous wave laser.
A kind of optical system picture element Infrared Heating compensation device the most according to claim 1, its feature exists
In, described light beam power attenuating device refers specifically to serial adjustable pad (802) or the polarizer；Described light splitting
Mirror (801) refers specifically to light splitting plain film or Amici prism.
A kind of optical system picture element Infrared Heating compensation device the most according to claim 1, its feature exists
In, the described light transmitting device that can regulate outgoing radiation direction refers specifically to real core fibre external member (803)
Or light-conducting arm；Described light expands device and refers specifically to beam expanding lens (4) or collimating mirror.
A kind of optical system picture element Infrared Heating compensation device the most according to claim 1, its feature exists
In, described light is expanded device and is connected by matched in clearance with flange (3)；Described light expands device and institute
State abutment sleeve (804) threaded.
A kind of optical system picture element Infrared Heating compensation device the most according to claim 1, its feature
Be, from the hot spot of laser facula light hole outgoing be radiated at the upper surface of optical element (1), lower surface,
In clear aperature or outside clear aperature.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410588549.7A CN104317056B (en) | 2014-10-27 | 2014-10-27 | A kind of optical system picture element Infrared Heating compensation device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410588549.7A CN104317056B (en) | 2014-10-27 | 2014-10-27 | A kind of optical system picture element Infrared Heating compensation device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN104317056A CN104317056A (en) | 2015-01-28 |
| CN104317056B true CN104317056B (en) | 2016-10-26 |
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| CN201410588549.7A Active CN104317056B (en) | 2014-10-27 | 2014-10-27 | A kind of optical system picture element Infrared Heating compensation device |
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Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102280800A (en) * | 2010-06-10 | 2011-12-14 | 中国科学院福建物质结构研究所 | Laser thermal effect compensating system |
| CN203241607U (en) * | 2011-12-27 | 2013-10-16 | 河南中光学集团有限公司 | Infrared continuous zooming lens optical system |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2004157445A (en) * | 2002-11-08 | 2004-06-03 | Ricoh Co Ltd | Wavefront aberration compensating mirror and optical pickup |
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2014
- 2014-10-27 CN CN201410588549.7A patent/CN104317056B/en active Active
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102280800A (en) * | 2010-06-10 | 2011-12-14 | 中国科学院福建物质结构研究所 | Laser thermal effect compensating system |
| CN203241607U (en) * | 2011-12-27 | 2013-10-16 | 河南中光学集团有限公司 | Infrared continuous zooming lens optical system |
Non-Patent Citations (1)
| Title |
|---|
| 透镜主动光学的像差补偿性能;孙振 等;《光电工程》;20120831;第39卷(第8期);第118-122页 * |
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| CN104317056A (en) | 2015-01-28 |
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Effective date of registration: 20190829 Address after: Room 601-10, 6th floor, No. 2, Jingyuan Beijie, Beijing Economic and Technological Development Zone, Daxing District, Beijing, 100176 Patentee after: Beijing Guowang Optical Technology Co., Ltd. Address before: 130033 southeast Lake Road, Jilin, Changchun, No. 3888 Patentee before: Changchun Inst. of Optics and Fine Mechanics and Physics, Chinese Academy of Sci |
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