KR102377331B1 - Line beam optic and apparatus for laser lift off using the same - Google Patents

Abstract

The line beam optical system according to the present invention includes a laser generating unit that outputs a light source, a fiber unit that receives the light source output from the laser generating unit and transmits it from one end to the other, and a line beam forming unit having at least one mirror. It can be formed as a line beam having a constant length and thickness through a method such as reflecting the . In this case, since the line beam shaping unit includes a first mirror having a first curvature and a second mirror having a second curvature, the overall line beam optical system can be reduced in weight and size, and a line beam having a length and thickness desired by a user. There is an advantage that can be easily formed.

Description

LINE BEAM OPTIC AND APPARATUS FOR LASER LIFT OFF USING THE SAME

The present invention relates to a line beam optical system and a laser lift-off device including the same.

In general, a laser processing apparatus transmits a laser in the form of a beam by irradiating a laser from a generator that generates a laser for laser processing. A specific configuration of the delivered laser may be selectively arranged by a user, and the shape, power, and range of the laser may be determined through these configurations. Here, the shape of the laser means a shape that can be changed depending on the cross-sectional shape of the laser, such as a Gaussian beam and a flat-top beam. In the case of being transmitted in the form of a beam, a flat top beam in which the power distribution is transmitted more uniformly is preferred. The processing surface of the object to be processed by the flat top laser is processed smoothly, and the influence of heat on the periphery of the processing part can be reduced. However, in the process of being irradiated and delivered in the form of a beam, the uniformity of the output distribution may be lost as the output range of the beam increases.

On the other hand, in order to form such a flat-top beam and a line beam in the form of a rod (line) implemented using the same, conventionally, the optical path is changed through refraction of light incident through various lenses. It was common to induce change. However, in using these components and methods, it is necessary to use a lens having a large diameter in order to obtain a line beam of a user's desired specification, which is an increase in the difficulty of lens processing and an enlargement of the apparatus in constructing an apparatus for forming a line beam. , the burden of an overall cost increase due to an increase in weight, etc.

KR 10-2009-0105423 A

The present invention is to solve the above problems, and to provide a line beam optical system for obtaining a line beam having a length and thickness desired by a user through a line beam shaping unit.

Another object of the present invention is to provide a laser lift-off device that is formed including the characteristics of the provided line beam optical system.

The technical problems of the present invention are not limited to the technical problems mentioned above, and other technical problems not mentioned will be clearly understood by those skilled in the art from the following description.

A line beam optical system according to the present invention forms a line beam having a specific length and thickness by using a laser generating unit, at least one fiber unit transmitting the light source output from the laser generating unit, and the light source transmitted from the fiber unit It may include a line beam forming unit.

In addition, the fiber part may include a core part and a coating part formed to surround the core part, and the light source may be transmitted from one end of the fiber part to the other end through reflection on the inner surface of the coating part and movement through the core part.

In addition, the cross-section of the core part may be formed in a rectangular shape so that the light source output from the laser generator may be molded in the shape of a flat-top beam.

In addition, the line beam forming unit may include at least one reflective mirror to reflect the light source irradiated from the laser generating unit to form a line beam having a specific length and thickness.

In addition, the line beam shaping unit may include a first mirror having a first curvature and adjusting a length of the line beam, and a second mirror having a second curvature and controlling a thickness of the line beam.

The light source may further include a collimating unit for uniformly adjusting a cross section of the light source to be emitted between the fiber unit and the line beam forming unit, and a light collecting unit for condensing the light source.

The line beam passing through the line beam shaping unit may be incident on one surface, and may include a correction unit configured to perform aberration correction by passing through the other surface.

In addition, the compensator may include a double-sided aspherical lens in which an incident surface to which the light source is incident and an output surface to which the light source is output are formed in an aspherical shape, respectively.

In addition, the compensator may include an aspherical lens in which an incident surface to which the light source is incident has a third curvature, and an output surface to which the light source is output is formed in an aspherical shape.

The light source may further include a line beam mixing unit formed between the collimating unit and the correcting unit and passing the light source from one surface to the other surface.

Also, the line beam mixing unit may include at least one micro lens array, and the micro lens array may be convex to the other surface from which the light source is output.

Meanwhile, the laser lift-off apparatus according to the present invention may include a line beam optical system having the above-described characteristics.

By providing the line beam optical system according to the present invention, it is possible to generate a line beam having a uniform energy density, so that various operations using the line beam are easy.

In addition, since the core of the plurality of optical fibers in the fiber part is formed to have a rectangular internal cross-section, the light source output from the laser light source part passes through the fiber part and then it can be molded into a flat-top beam and irradiated. there is an advantage

In addition, by including a line beam forming unit having at least one mirror, the light source output from the fiber unit can be formed to have the length and thickness of the line beam desired by the user, and the angle of the light source can be freely changed in forming the light source and Since a large-sized lens is not required, there is an advantage in that the line beam optical system can be reduced in weight and size.

In addition, through at least one mirror of the line beam forming unit and a correcting unit formed of a spherical or aspherical surface, the user can have the desired length and thickness of the line beam, correcting aberration and clearly forming the end of the line beam There is an advantage.

In addition, by using a laser lift-off device including such a line beam optical system, there is an advantage in that a line beam of a desired standard is formed and the operation is facilitated by irradiating the line beam.

1 is a schematic diagram of a line beam optical system according to the present invention.
2 is a view showing a cross section of a fiber portion in the line beam optical system according to the present invention.
3(a) and 3(b) are graphs of a profile when the light source output by the laser generator is finally formed into a line beam in the line beam optical system according to the present invention.
4 is a view showing the movement of the light source by the line beam shaping unit in the line beam optical system according to the present invention.
5 is a view showing the movement of the light source as a whole in the line beam optical system according to the present invention.
6 is a diagram schematically illustrating a beam shaper module that is an aspect of a line beam shaping unit in a line beam optical system according to the present invention.
7 is a diagram illustrating the formation of a line beam through a beam of light in the line beam optical system according to the present invention.
8 is a conceptual diagram for having a wave in the form of a flat-top beam when a collimated Gaussian beam passes through a correction unit.
9 is a schematic diagram of a line beam mixing unit in the line beam optical system according to the present invention.
FIG. 10 is a view showing that light passing through the collimating unit passes through the line beam mixing unit and the correcting unit and is superimposed on the screen in the line beam optical system according to the present invention.
11 and 12 are schematic views showing a laser lift-off device including a line beam optical system according to the present invention.

Hereinafter, some embodiments of the present invention will be described in detail with reference to exemplary drawings. In adding reference numerals to the components of each drawing, it should be noted that the same components are given the same reference numerals as much as possible even though they are indicated on different drawings. In addition, in describing the embodiment of the present invention, if it is determined that a detailed description of a related known configuration or function interferes with the understanding of the embodiment of the present invention, the detailed description thereof will be omitted.

In describing the components of the embodiment of the present invention, terms such as first, second, A, B, (a), (b), etc. may be used. These terms are only for distinguishing the elements from other elements, and the essence, order, or order of the elements are not limited by the terms. In addition, unless otherwise defined, all terms used herein, including technical or scientific terms, have the same meaning as commonly understood by one of ordinary skill in the art to which the present invention belongs. Terms such as those defined in a commonly used dictionary should be interpreted as having a meaning consistent with the meaning in the context of the related art, and should not be interpreted in an ideal or excessively formal meaning unless explicitly defined in the present application. does not

1 is a schematic diagram of a line beam optical system according to the present invention.

Referring to FIG. 1 , the line beam optical system 1 according to the present invention may include a laser generating unit 10 and at least one fiber unit 20 connected to the laser generating unit. The laser generator 10 refers to a laser generator that outputs a light source, and a user can employ and use a laser generator that outputs light having a required wavelength range. In this case, the light source output from the laser generator may be a UV (ultraviolet) laser beam. For example, the laser generator 10 may be formed of a UV laser having a wavelength of 359 nm and a UV laser having a wavelength of 343 nm. However, the present invention is not limited thereto, and the laser generating unit 10 may be formed of various types of lasers capable of outputting a laser beam in addition to the UV laser.

2 is a view showing a cross section of the fiber unit 20 in the line beam optical system according to the present invention.

Referring to FIG. 2 , the light source output from the laser generating unit 10 may be transmitted to the fiber unit 20 connected to the laser generating unit 10 . The fiber unit 20 may be an optical fiber through which the light source output from the laser generating unit 10 can move. The optical fiber may be applied by selecting the angle of incidence of the light source and the refractive index (index of refraction) of the medium so that the light source moving through the interior is refracted and does not escape by using the total reflection property. The fiber part 20 includes a core part 201 serving as a passage through which the light source passes from one end to the other end, and covering parts 202 and 203 that surround the outer surface of the core part and protect the shape of the core part. may include The coating part 203 may have a cylindrical shape to serve as a protective layer for the outer surface of the fiber part 20 , and an elastic material may be used to prevent physical damage to the core part 201 . For example, the covering portion 203 may be formed using an elastic plastic material such as polyethylene (PE) to protect the core portion 201 from external pressure or impact.

Meanwhile, the covering portion 202 may be formed between the inner peripheral surface of the covering portion 203 and the core portion 201 , and the covering portion 202 is clad with the covering portion 203 and doped with a specific element. (doping) may have been performed. For example, the covering portion 202 may be doped with fluorine (doping with impurities). By doping the coating part 202 , durability, corrosion resistance, etc. of the coating part 202 may be strengthened, or the refractive index difference may be further increased in relation to the core part 201 . At this time, the refractive index of light of the core part 201 is formed to be greater than the refractive index of light of the covering part 202 , so that the light source supplied from the laser generating part 10 to one end of the fiber part 20 is the core part 201 . ) can be transmitted while minimizing the loss of the light source to the other end of the fiber part 20 by total internal reflection.

In addition, the cross-section of the core part 201 may be formed in a rectangular shape so that the light source output from the laser generating unit 10 may be formed in the shape of a flat-top beam. Referring to FIG. 2 , the core part 201 is formed to have a rectangular cross-sectional shape having four corners. The cross-sectional shape of the core part 201 may be, for example, a cross section of 50×100 μm, or a square cross-section of 50×50 μm. In addition, it is not necessarily limited to a rectangle or a square, and any cross section capable of generating a line beam of a flat top shape may be used. By using the core part 201 having a rectangular or square cross section, the light source passing through the fiber part 20 is made into a rectangular flat-top beam having a homogeneity of 80% or more. can make it go away In this way, by using the cross section of the core part 201 of the fiber part 20 that meets the user's intention, the light source passing through the fiber part 20 can generate a flat-top beam. In addition, there is an advantage of easily generating a line beam having a profile desired by the user of the line beam optical system 1 according to the present invention.

Here, the flat top beam is a beam having a uniform energy distribution. Accordingly, an object (not shown) to which the flat top beam is irradiated is affected by energy of a uniform magnitude. Therefore, in the case of using a flat top beam, laser processing of uniform quality is possible, thereby improving the degree of completion of processing. That is, since the light source generated from the laser generating unit 10 is molded into a flat top beam type, the surface of the processing part of the object can be finished smoothly, and the thermal effect of the peripheral part of the processing part can be minimized. Accordingly, the processing perfection of the object to be processed can be improved.

3 (a) and 3 (b) are in the line beam optical system 1 according to the present invention, the light source output by the laser generating unit 10 is finally formed into a line beam (profile) when the profile (profile) is a graph for

Referring to FIGS. 3A and 3B , graphs for the x-axis and y-axis profiles of the line beam are shown. In this case, the x-axis and y-axis correspond to exemplary arbitrary axes. For convenience of description, the longitudinal direction when the line beam is formed in a rectangular shape on the screen on which the line beam is irradiated is the x-axis, and the direction perpendicular to the longitudinal direction is the y-axis. to be defined as In each graph, both ends are formed to have irregularities in a shape close to vertical, and it is preferable that an area having an irradiance of 3.0 or more and an area close to 0 are clearly distinguished. On the other hand, in each graph, for a region having a uniform irradiance of 3.0 or more, the length of the line beam (based on FIG. 3(a)) and the thickness of the line beam (based on FIG. 3(b)) are formed to form a field size size) can be configured. Meanwhile, the length and thickness of this field size may be adjusted by the line beam shaping unit 70 to be described later. The length and thickness of the line beam can be adjusted according to the needs of the user, but in order to perform efficient processing using the line beam, a line having a length of 20 mm or more (based on the x-axis) and a thickness of 3 mm or less (based on the y-axis) It is desirable to allow the beam to be formed.

The connector part 30 may connect the fiber part 20 and the collimating part 40 . The connector unit 30 may be for guiding the light source transmitted from the fiber unit 20 to the collimating unit 40 . To this end, one side of the connector unit 30 may be connected to the fiber unit 20 , and the other side may be connected to the collimating unit 40 .

In addition, the collimating unit 40 may adjust the flat top beam irradiated from the fiber unit 20 to be parallel and enlarged. That is, the collimating unit 40 may be formed to have a uniform cross section in the irradiation direction in which the flat top beam is to be irradiated. After the parallelization of the flat top beam is completed, the beam is transmitted to the condenser 50 to focus light, and the light focused through the condenser 50 passes through the diffuser 60 again, so that the light has a high aspect ratio. It may be output as a line beam having This can change the standard of the line beam by adjusting the divergence angle adjusted to be diverged from the diffuser 60, and before passing the diffuser 60, a thin parallel beam in the form of a flat top beam is converted into a thick parallel beam. It can be converted to output. The connector unit 30 , the collimating unit 40 , the light collecting unit 50 , and the diffusion unit 60 may be formed to be disposed between the fiber unit 20 and the line beam forming unit 70 .

Meanwhile, the laser optical system 1 according to the present invention may further include a line beam shaping unit 70 to generate a line beam having a specific length and thickness with respect to the light source transmitted from the fiber unit 20 . The light source generated from the laser generating unit 10 may be formed from the cross-sectional shape of the core unit 201 of the fiber unit 20, but the light source is aligned through reflection or refraction of the light source itself, so that the user wants a line beam. profile can be obtained.

The line beam shaping unit 70 may include at least one reflective mirror. Conventionally, the length and thickness of the line beam were adjusted using a refractive lens, but in the present invention, the light is reflected using a reflective mirror, and the length and thickness of the entire line beam (exactly the length and thickness of the line beam by the path through which each light beam is reflected) may mean the horizontal length and vertical length of the line beam) may be determined. Due to the feature of having a mirror, it is easy to change the angle of the light incident and reflected on the surface of the mirror, so it is easy to adjust the shape, length and thickness of the line beam to be formed. In addition, when the refraction-type line beam forming method is used, a space having a distance greater than a certain distance is required even after the light has passed through the refraction member (eg, it may be a refraction lens), so the size of the line beam optical system There were problems such as increased optical system manufacturing cost and reduced mobility. However, by using the mirror, which is a reflective member, the travel distance required for light to be formed into a line beam is reduced, and the overall size of the line beam optical system becomes compact. there is.

4 is a diagram illustrating movement of a light source by a line beam shaping unit in the line beam optical system according to the present invention, and FIG. 5 is a diagram illustrating the movement of the light source as a whole in the line beam optical system according to the present invention.

4 and 5, in the line beam optical system according to the present invention, the line beam shaping unit 70 includes a first mirror 701 having a first curvature K1 and adjusting the length of the line beam; A second mirror 702 having a second curvature K2 and adjusting the length of the line beam may be included. When light passes through the diverging unit 60 and is incident on one side or one end of the line beam forming unit 70 , the light is received on the surface of the first mirror 701 included in the line beam forming unit 70 , and the first Light is reflected with respect to the surface of the mirror 701 so as to have the same reflection angle as the incident angle according to the law of reflection, respectively. Meanwhile, the curvature is a value indicating the degree of curvature at each point of a curve or curved surface, and the curvature K is expressed as the reciprocal of the radius of curvature (or radius) r. That is, the curvature K = r ^-1 may be established (actually, the curvature is mainly expressed by the Greek letter κ (kappa), but in the present specification, K will be used for convenience). Therefore, a large curvature means a small radius of curvature. Therefore, if the curvature value is large, it can be determined that the curve is bent much with respect to the degree of bending.

The light reflected by the first mirror 701 is incident on the surface of the second mirror 702 having a second curvature disposed in the propagation path of the reflected light, and the light is reflected to have the same reflection angle as the incident angle according to the reflection law do. The light reflected from the surface of the second mirror 702 may be output to the other end or the other side of the line beam forming unit 70 . On the other hand, the arrangement of the first mirror 701 and the second mirror 702 is not limited, but preferably, a mirror having a convex shape with respect to the traveling direction of light receives light first, and a concave shape with respect to the traveling direction of light is obtained. The branch mirror can then receive the light. In addition, the length of the line beam may be adjusted in the first mirror 701 and the thickness of the line beam may be adjusted in the second mirror 702 , but the present invention is not limited thereto. It is also possible to adjust and allow the length of the line beam in the second mirror 702 to be adjusted.

On the other hand, the line beam forming part 70 including the first mirror 701 having the first curvature K1 and the second mirror 702 having the second curvature K2 is formed, so that each mirror 701 is formed. , 702) by changing the characteristics (representatively, it may be considered to replace the component with a reflective mirror having a different curvature) to obtain a line beam having a length and thickness desired by a user using the line beam optical system 1 It has the advantage of being easy to make.

As an exemplary description, in the line beam optical system 1 according to the present invention, the line beam shaping unit 70 has been described as having a total of two mirrors, the first mirror 701 and the second mirror 702, but is limited thereto. it is not The line beam optical system 1 of the present invention includes a line beam shaping unit 70 having at least one mirror, and thus the line beam shaping unit 70 has one mirror having a curvature K to form one mirror. It will also be possible to configure both the length and thickness of the line beam through this.

6 is a view schematically showing a beam shaper module, which is an aspect of the line beam shaping unit 70 in the line beam optical system 1 according to the present invention.

Referring to FIG. 6 , the line beam shaping unit 70 may be a beam shaper module. The beam shaper module may have a cylindrical structure having various diameters, and may receive a collimated Gaussian beam passing through the collimating unit 40 at one end to form a flat top beam in the beam shaper module. In this case, a profile for a field size such as a length and thickness of a line beam when the flat top beam is irradiated from the screen can be adjusted through the beam shaper module. Profile adjustment may be performed through an adjustment part (typically a ring-shaped adjustment part that can adjust focus, etc. as configured in a camera barrel) formed in the beam shaper module, and accordingly, at least one or more optics formed inside the beam shaper module A line beam having a profile desired by a user may be formed by adjusting a distance, an angular relationship, and the like between elements. On the other hand, at least one optical element formed inside the beam shaper module may be a mirror, a lens, or a combination of a mirror and a lens in the case of a plurality.

7 is a diagram illustrating the formation of a line beam through a beam of light in the line beam optical system according to the present invention.

4, 5 and 7, in the line beam optical system 1 according to the present invention, the line beam passing through the line beam shaping unit 70 is incident on one surface and formed on the optical path to pass through the other surface. A correction unit 80 may be additionally included. The correction unit 80 corrects aberrations depending on the wavelength that may have occurred while the light output from the laser generating unit 10 passes through the components constituting the line beam optical system 1, or the end of the line beam is clearly defined. can be reinforced as much as possible. That is, the compensator 80 may be a refractive lens that makes the line beam incident on one surface and passes and refracts the other surface.

On the other hand, the light passing through the correction unit 80 may be irradiated to the object to be processed using the screen (S) or a line beam. At this time, when the line beam displayed on the screen S is analyzed through beam analysis, as confirmed in FIGS. 3 ( a ) and 3 ( b ) above, a portion having a high intensity forms a single rectangular beam. can confirm that At this time, with respect to the portion where the intensity of the light beam is high, the length may be referred to as the length (Lb) of the line beam, and the thickness (or height) may be referred to as the thickness (Wb) of the line beam.

8 is a conceptual diagram for having a wave in the form of a flat-top beam when a collimated Gaussian beam passes through a correction unit.

Referring to FIG. 8 , the light in the form of a Gaussian beam may be formed into a flat top beam by the correction unit 80 , or a flat top beam may already be formed by the fiber unit 20 , the line beam forming unit 70 , or the like. With respect to the light formed in the form of , the boundary for measuring the length Lb and thickness Wb of the line beam may appear more clearly by making the end of the line beam to be clearly formed. This has the advantage of improving processing accuracy in performing processing using the line beam optical system 1 . That is, in some cases, the compensator 80 may shape the received light source in the form of a flat-top beam, but essentially, it is possible to further improve the homogeneity of the pre-formed flat-top beam. Alternatively, it may serve to improve the edge steepness of both ends of the flat top beam. When the uniformity and kurtosis improvement of the flat top beam are improved, the length (Lb) and thickness (Wb) of the line beam formed on the screen surface become clearer, which will allow for more precise processing using the line beam. There are advantages that can be

The compensator 80 may include a double-sided aspherical lens in which an incident surface (one surface) on which the light source is incident and an output surface (the other surface) on which the light source is output are formed in an aspherical shape, respectively. In the case of a conventional lens, both sides of the lens are formed to have the same curvature with respect to the center of the lens, but in the present invention, the incident surface is formed to be convex with respect to the direction in which light is incident, and the output surface is the direction in which light is output. It may be formed flat with respect to the. In addition, with respect to the incident surface or the output surface of light, the surface may be formed of an aspherical lens that does not have the same curvature for all parts. That is, as the correcting unit 80, a double-sided aspherical lens in which both surfaces are not uniform in curvature may be used, or an aspherical lens in which only one surface has an irregular curvature may be used (however, at this time, the curvature of the other surface is may be K3). The correction unit 80 is formed to have a specific curvature or, if necessary, by using a lens having an aspherical surface, so that the line beam optical system 1 according to the present invention can have a desired profile of the line beam. This is possible.

9 is a schematic diagram of the line beam mixing unit 90 in the line beam optical system according to the present invention, and FIG. 10 is the line beam mixing unit 90 and the beam passing through the collimating unit in the line beam optical system according to the present invention. It is a diagram showing the overlapping on the screen through the government 80.

9 and 10 , the line beam optical system 1 according to the present invention may be formed between the collimating unit 40 and the correcting unit 80, and a line through which a light source is incident from one surface and passes through the other surface. A beam mixer 90 may be further included. The line beam mixing unit 90 serves to refract light incident on one surface and output it to the other surface, like the correction unit 80 , and in this case, the line beam mixing unit 90 includes at least one or more micro lens arrays. and the microlens array may have a convex shape with the other surface on which the light source is output. According to FIGS. 9 and 10 , the line beam mixing unit 90 having a horizontal L, a vertical W, a height H, and one interval of the microlens corresponding to P is parallel-aligned light passing through the collimating unit 40 . The optical path change and phase change may be induced by refraction, and the correction unit 80 may correct aberration and refraction for a plurality of lights passing through the line beam mixing unit 90 . The refracted light may be formed to overlap the screen by Dv, and the overlapped line beam may have a clear shape and a clear profile. The light passing through the line beam mixing unit 90 may be formed in the form of a flat top beam having a uniformity of 90% or more. At this time, the light passing through the line beam mixing unit 90 may be light pre-formed in the form of a flat top beam by the fiber unit 20 or the line beam forming unit 70, but is not necessarily limited thereto. There is no significant difference from the light output from the generator 10 and may be insufficiently processed light. Accordingly, the light output from the laser generator 10 is molded by the elements constituting the line beam optical system 1 according to the present invention, and the processing completion degree of the object to be processed using the line beam generated by the shaping of the light has the advantage of improving

On the other hand, in the method of making the shape of the line beam, there is also a method of using the fiber part 20 , the line beam shaping part 70 , the line beam mixing part 90 , etc. A line beam may be formed by passing the light source output from the generator 10 . At this time, the mask may be formed at various positions of the line beam optical system 1 according to the present invention, but is formed at a position adjacent to the laser generating unit 10 so that the light output from the laser generating unit 10 passes through the mask. While it is preferable to have a rectangular shape as a whole.

11 and 12 are schematic views showing a laser lift-off apparatus 1000 (Laser Lift Off Apparatus) including a line beam optical system according to the present invention.

11 and 12 , the laser lift-off apparatus 1000 according to the present invention may include the line beam optical system 1 described above with reference to FIGS. 1 to 10 . Specifically, the laser lift-off apparatus 1000 may separate the film layer 130 attached to the substrate 110 by the adhesive layer 120 . That is, the line beam optical system 1 may irradiate a line beam in the form of a flat top beam having a high aspect ratio toward the film layer 130 or the substrate 110 layer, and from the line beam optical system 1 . The adhesive layer 120 may be melted by the irradiated line beam to separate the film layer 130 .

The above description is merely illustrative of the technical spirit of the present invention, and various modifications and variations will be possible without departing from the essential characteristics of the present invention by those skilled in the art to which the present invention pertains.

Accordingly, the embodiments disclosed in the present invention are not intended to limit the technical spirit of the present invention, but to explain, and the scope of the technical spirit of the present invention is not limited by these embodiments. The protection scope of the present invention should be construed by the following claims, and all technical ideas within the scope equivalent thereto should be construed as being included in the scope of the present invention.

1: Line beam optics
10: laser generating unit
20: fiber part
201: core part
202: covering part
203: covering part
30: connector part
40: collimating unit
50: light collecting unit
60: beam expander
70: line beam forming part
701: first mirror
702: second mirror
80: correction unit
801: lens
90: line beam mixing unit
1000: laser lift off device
110: substrate
120: adhesive layer
130: film layer
K1: first curvature
K2: second curvature
K3: third curvature
S: screen
LB: Line Beam
Lb: length of line beam
Wb: thickness of line beam

Claims (12)

laser generator;
at least one fiber unit for transmitting the light source output from the laser generating unit; and
A first mirror including at least one reflective mirror to form a line beam having a specific length and thickness by reflecting the light source transmitted from the fiber unit, a first mirror having a first curvature and adjusting the length of the line beam A line beam optical system comprising a; a line beam shaping unit having two curvatures and including at least one of the second mirrors for controlling the thickness of the line beam.
The method according to claim 1,
The fiber part includes a core part and a coating part formed to surround the core part, and the light source is transmitted from one end of the fiber part to the other end through reflection on the inner surface of the coating part and movement through the core part. 3. The method according to claim 2,
A line beam optical system in which the cross-section of the core is formed in a rectangular shape, and the light source output from the laser generator is formed in the shape of a flat-top beam. delete delete The method according to claim 1,
Between the fiber part and the line beam forming part
a collimating unit that uniformly adjusts and diverges the cross section of the light source; and
Line beam optical system further comprising; a light condensing unit for condensing the light source. 7. The method of claim 6,
A line beam optical system including a; a correction unit for entering the line beam that has passed through the line beam forming unit to one surface and passing through the other surface to correct aberration. 8. The method of claim 7,
the correction unit
and a double-sided aspherical lens in which an incident surface to which the light source is incident and an output surface to which the light source is output are respectively formed in an aspherical shape. 8. The method of claim 7,
the correction unit
and an aspherical lens in which an incident surface to which the light source is incident is formed to have a third curvature, and an output surface to which the light source is output is formed in an aspherical shape. 10. The method of claim 9,
The line beam optical system further comprising a; a line beam mixing unit formed between the collimating unit and the compensating unit, the light source is incident from one surface to pass to the other surface. 11. The method of claim 10,
The line beam mixing unit includes at least one micro lens array, wherein the micro lens array is convexly formed on the other surface from which the light source is output. A laser lift-off device comprising the line beam optical system according to any one of claims 1 to 3 and 6 to 11.

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