CN104316995B - Planar optical waveguide heater based on two-dimentional carbon material and preparation method thereof - Google Patents
Planar optical waveguide heater based on two-dimentional carbon material and preparation method thereof Download PDFInfo
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- CN104316995B CN104316995B CN201410547996.8A CN201410547996A CN104316995B CN 104316995 B CN104316995 B CN 104316995B CN 201410547996 A CN201410547996 A CN 201410547996A CN 104316995 B CN104316995 B CN 104316995B
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- 239000003575 carbonaceous material Substances 0.000 title claims abstract description 106
- 230000003287 optical effect Effects 0.000 title claims abstract description 102
- 238000002360 preparation method Methods 0.000 title claims abstract description 16
- 239000000758 substrate Substances 0.000 claims abstract description 18
- 238000000926 separation method Methods 0.000 claims abstract description 10
- 238000000034 method Methods 0.000 claims description 21
- 230000008569 process Effects 0.000 claims description 11
- 238000001259 photo etching Methods 0.000 claims description 8
- 239000000835 fiber Substances 0.000 claims description 5
- 239000002184 metal Substances 0.000 claims description 4
- 238000005530 etching Methods 0.000 claims description 3
- 229920002120 photoresistant polymer Polymers 0.000 claims description 3
- 238000004528 spin coating Methods 0.000 claims description 3
- 230000005619 thermoelectricity Effects 0.000 claims 1
- 238000010438 heat treatment Methods 0.000 abstract description 10
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 abstract description 4
- 229910052710 silicon Inorganic materials 0.000 abstract description 4
- 239000010703 silicon Substances 0.000 abstract description 4
- 238000005516 engineering process Methods 0.000 abstract description 3
- 238000010304 firing Methods 0.000 abstract 1
- 239000010410 layer Substances 0.000 description 74
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 5
- 230000000694 effects Effects 0.000 description 5
- 239000000463 material Substances 0.000 description 4
- 230000005540 biological transmission Effects 0.000 description 3
- 239000012792 core layer Substances 0.000 description 3
- 230000004044 response Effects 0.000 description 3
- 239000000377 silicon dioxide Substances 0.000 description 3
- 230000003321 amplification Effects 0.000 description 2
- 230000008859 change Effects 0.000 description 2
- 229910052681 coesite Inorganic materials 0.000 description 2
- 229910052906 cristobalite Inorganic materials 0.000 description 2
- 238000001312 dry etching Methods 0.000 description 2
- 238000001459 lithography Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000003199 nucleic acid amplification method Methods 0.000 description 2
- 229910052682 stishovite Inorganic materials 0.000 description 2
- 229910052905 tridymite Inorganic materials 0.000 description 2
- 206010037660 Pyrexia Diseases 0.000 description 1
- 239000004744 fabric Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000002070 nanowire Substances 0.000 description 1
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/0147—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on thermo-optic effects
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/011—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour in optical waveguides, not otherwise provided for in this subclass
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- Physics & Mathematics (AREA)
- Nonlinear Science (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Optical Modulation, Optical Deflection, Nonlinear Optics, Optical Demodulation, Optical Logic Elements (AREA)
- Optical Integrated Circuits (AREA)
Abstract
The invention discloses a kind of planar optical waveguide heater based on two-dimentional carbon material and preparation method thereof.Two contact points comprising covering Two-dimensional Carbon material transparent thermal resistance on a planar lightwave circuit with connection external power source, separation layer, sandwich layer and the Two-dimensional Carbon material transparent thermal resistance that planar optical waveguide is sequentially deposited on substrate by substrate and from bottom to top are constituted, Two-dimensional Carbon material transparent thermal resistance is covered in the side of the sandwich layer upper surface of planar optical waveguide, with sandwich layer directly contact, two contact points are connected to the two ends of Two-dimensional Carbon material transparent thermal resistance through connecting wire respectively.The present invention has the advantages that the efficiency of heating surface is high, it is fast to reach heating-up temperature higher, firing rate, and possesses silicon photonic device preparation technology compatibility, it is adaptable to miniaturized planar lightwave conduction optical device.
Description
Technical field
The present invention relates to a kind of waveguide heater and preparation method thereof, more particularly to planar optical waveguide integrated device neck
A kind of planar optical waveguide heater based on two-dimentional carbon material in domain and preparation method thereof.
Background technology
It is to realize a kind of important means of tunable light device using thermo-optic effect, such as thermo-optical switch, Thermo-optical modulator, adjustable
Humorous optical attenuator, tunable power splitter and Thermo-optic tunability wave filter etc..And thermo-optical device is realized, heater is very
Important.Two contact points of the current heater comprising planar optical waveguide, metallic resistance silk and connection external power source.It is flat
Face fiber waveguide section is as shown in figure 1, by substrate 6 and the separation layer being sequentially deposited at from bottom to top on substrate 7, sandwich layer 8, top covering
9 and metallic resistance silk composition, wherein top covering 9 completely covers sandwich layer 8.The width of the metallic resistance silk formed on top covering 9
Degree is typically larger than the width of transmission line sandwich layer 8.
For this traditional heater, due to needing to introduce thicker between the sandwich layer and thermal resistance of planar optical waveguide
Optical confinement layer（Such as SiO2）, there is the shortcomings of response speed is slow, the efficiency of heating surface is low, power consumption is high.Moreover, it is contemplated that its temperature field is terraced
Degree, the temperature of the temperature well below thermal resistance of this traditional heater center core layer.And due to highest current density etc. because
The admissible metal fever resistance maximum temperature of element limitation is limited.Therefore, adjusted using the maximum of thermo-optical device of this heater
Humorous scope is restricted.
The content of the invention
It is an object of the invention to provide a kind of planar optical waveguide heater based on two-dimentional carbon material and preparation method thereof,
Heating power consumption is low, and heating response is fast, and heating temperature range is big and process is simple.
Technical scheme includes：
First, a kind of planar optical waveguide heater based on two-dimentional carbon material：
Its planar optical waveguide is sequentially deposited at separation layer on substrate, sandwich layer and two-dimentional carbon material by substrate and from bottom to top
Transparent thermal resistance composition, comprising covering Two-dimensional Carbon material transparent thermal resistance on a planar lightwave circuit and the two of connection external power source
Individual contact point, Two-dimensional Carbon material transparent thermal resistance is covered in the side of the sandwich layer upper surface of planar optical waveguide, two contact points point
The two ends of Two-dimensional Carbon material transparent thermal resistance are not connected to through connecting wire.
A described Two-dimensional Carbon material transparent thermal resistance part is covered in the side of the sandwich layer upper surface of planar optical waveguide, separately
A part is covered on the sandwich layer side of planar optical waveguide.
Described Two-dimensional Carbon material transparent thermal resistance is serpentine-like and is partially covered on the sandwich layer upper surface of planar optical waveguide
Side.
Described whole Two-dimensional Carbon material transparent thermal resistances are covered in the sandwich layer upper surface of planar optical waveguide.
Described is covered in the width of the Two-dimensional Carbon material transparent thermal resistance of sandwich layer upper surface less than core in planar optical waveguide
Deviate the center of the sandwich layer of planar optical waveguide in the width of layer, the center of Two-dimensional Carbon material transparent thermal resistance.
2nd, a kind of preparation method of the planar optical waveguide heater based on two-dimentional carbon material, comprises the following steps：
1）Separation layer, sandwich layer are sequentially deposited on substrate, planar optical waveguide is made using photoetching, etching technics；
2）Two-dimentional carbon material is transferred to planar optical waveguide using wet method shifting process, a layer of spin coating on two-dimentional carbon material
Photoresist, the figure of Two-dimensional Carbon material transparent thermal resistance is made of photoetching process, recycles dry etch process to prepare two dimension
The transparent thermal resistance of carbon material；
3）Two-dimensional Carbon material transparent thermal resistance is covered in the side of the sandwich layer upper surface of planar optical waveguide, its center
Deviate the center of sandwich layer, be covered in width of the width on sandwich layer less than sandwich layer；
4）Deposited metal film forms two contact points for connecting external power source, and with Two-dimensional Carbon material transparent thermal resistance
It is connected through connecting wire.
Described step 3）The middle sandwich layer upper table that a Two-dimensional Carbon material transparent thermal resistance part is covered in planar optical waveguide
The side in face, another part is covered in the sandwich layer side of planar optical waveguide.
Described step 3）It is middle to be made Two-dimensional Carbon material transparent thermal resistance snakelike, and it is partially covered on planar optical waveguide
The side of sandwich layer upper surface.
Described step 3）The middle sandwich layer upper table that whole Two-dimensional Carbon material transparent thermal resistances are covered in planar optical waveguide
Face.
Described step 3）In two-dimentional carbon material be monoatomic layer.
The invention has the advantages that：
1. heater of the present invention is due to the sandwich layer directly contact of Two-dimensional Carbon material transparent thermal resistance and planar optical waveguide,
Thicker optical confinement layer need not be introduced, is conducive to improving response speed and the efficiency of heating surface, it is possible to achieve relatively low power consumption.And
And, it is considered to its temperature gradient, the temperature of the temperature of center core layer of the present invention almost with thermal resistance is consistent, using this heater
Thermo-optical device can realize maximum temperature tuning range.
2. Two-dimensional Carbon material transparent thermal resistance of the invention, the width of planar optical waveguide, and its are less than due to its width
The center of the sandwich layer of planar optical waveguide is deviateed in center, therefore can greatly reduce Two-dimensional Carbon material transparent thermal resistance and draw
The optical power loss for entering.
3. Two-dimensional Carbon material transparent thermal resistance of the invention, due to the larger width of use, is partly covered in plane light wave
Above the sandwich layer led, partly it is covered on the side wall of the sandwich layer of planar optical waveguide, without introducing excessive optical power loss, therefore
The technique manufacture difficulty that dry etching makes Two-dimensional Carbon material transparent thermal resistance can be reduced.
4. Two-dimensional Carbon material transparent thermal resistance of the invention, is covered on planar optical waveguide sandwich layer due to snakelike, therefore can
While heating effect is not influenceed, effectively to reduce contact of the Two-dimensional Carbon material transparent thermal resistance with planar optical waveguide long
Degree, reduce introduce optical power loss, and preparation process need not accurately lithography alignment, reduce technique making difficulty
Degree.
5. the present invention has wide range of application, and can be used to being made up of Mach-Zehnder interferometer, micro-resonance loop etc. is more
Plant thermo-optical device, including thermo-optical switch, Thermo-optical modulator, variable optical attenuator, tunable power splitter and Thermo-optic tunability
Wave filter etc..And do not limited by material, can be used for the fiber waveguide of the multiple materials such as silicon, macromolecular material, silica.
Brief description of the drawings
Fig. 1 is the sectional view of traditional heater.
Fig. 2 is the top view of heater of the present invention.
Fig. 3 is that one kind of a-quadrant in Fig. 2 is preferable to carry out amplification plan view.
Fig. 4 is that the one kind of the present invention in the BB ' sections of Fig. 3 is preferable to carry out figure.
Fig. 5 is that the one kind of the present invention in the BB ' sections of Fig. 3 is preferable to carry out figure.
Fig. 6 is that one kind of a-quadrant in Fig. 2 is preferable to carry out amplification plan view.
Fig. 7 is the CC ' sectional views of Fig. 6.
Fig. 8 is the implementation illustration that the present invention is applied to Mach-Zehnder interferometer.
In figure：1st, planar optical waveguide, 2, first make contact, the 3, second contact point, the 4, first connecting wire, the 5, second connection
Wire, 6, substrate, 7, separation layer, 8, sandwich layer, 9, top covering, 10, Two-dimensional Carbon material transparent thermal resistance.
Specific embodiment
The invention will be further described with reference to the accompanying drawings and examples.
Reference picture 2, heater of the invention includes the Two-dimensional Carbon material transparent thermal resistance being covered in planar optical waveguide 1
10 and connection external power source two contact points 2,3, planar optical waveguide 1 is by substrate 6 and is sequentially deposited at from bottom to top on substrate 6
Separation layer 7, sandwich layer 8 and Two-dimensional Carbon material transparent thermal resistance 10 constitute；Two-dimensional Carbon material transparent thermal resistance 10 is partially covered on
The side of the upper surface of sandwich layer 8 of planar optical waveguide 1, because no top covering 9 is covered on sandwich layer 8, so that two-dimentional carbon material
Transparent thermal resistance 10 and the directly contact of sandwich layer 8.
As shown in Fig. 2 two contact points 2,3 are connected to Two-dimensional Carbon material transparent thermal resistance 10 through connecting wire 4,5 respectively
Two ends, first make contact 2 is connected to one end of Two-dimensional Carbon material transparent thermal resistance 1, the second contact point through the first connecting wire 4
3 other ends that Two-dimensional Carbon material transparent thermal resistance 1 is connected to through the second connecting wire 5, two contact points 2,3 are placed on substrate 6.
In order to reduce the technique manufacture difficulty of Two-dimensional Carbon material transparent thermal resistance, as shown in figure 5, present invention two dimension carbon material
Transparent thermal resistance has bigger width, and a part is covered in the side of the upper surface of sandwich layer 8 of planar optical waveguide 1, another portion
Divide the side of sandwich layer 8 for being covered in planar optical waveguide 1, be covered in the width of the width less than sandwich layer 8 of the thermal resistance 10 of the upper surface of sandwich layer 8
Degree.
In order to reduce the optical power loss of the planar optical waveguide that Two-dimensional Carbon material transparent thermal resistance causes, as shown in fig. 6, together
When reduce technique make difficulty, Two-dimensional Carbon material transparent thermal resistance of the present invention is answered serpentine-like and a part is covered in plane light wave
The side of 1 upper surface of sandwich layer 8 is led, another part is completely covered by the side of sandwich layer 8 of planar optical waveguide 1, two contact points 2,3
It is placed on substrate 6, forms resulting device as shown in Figure 7.
In order to reduce the optical power loss of the planar optical waveguide that Two-dimensional Carbon material transparent thermal resistance causes, as shown in figure 4,
Whole Two-dimensional Carbon material transparent thermal resistances 10 can be covered in the side of the upper surface of sandwich layer 8 of planar optical waveguide 1, can so be had
Effect reduces the loss that two-dimentional carbon material thermal resistance absorbs, reduces luminous power to the light field of planar optical waveguide transmission mode.
In order to reduce the optical power loss of the planar optical waveguide that Two-dimensional Carbon material transparent thermal resistance causes, reference picture 3~figure
6, it is covered in width of the width of the Two-dimensional Carbon material transparent thermal resistance 10 of the upper surface of sandwich layer 8 less than sandwich layer 8 in planar optical waveguide 1
The center of the sandwich layer 8 of planar optical waveguide 1 is deviateed in degree, the center of Two-dimensional Carbon material transparent thermal resistance 10, in bias
Position.
The preparation method of apparatus of the present invention, including：
1）Separation layer 7, sandwich layer 8 are sequentially deposited on substrate 6, planar optical waveguide 1 is made using photoetching, etching technics；
2）Two-dimentional carbon material is transferred to planar optical waveguide 1 using wet method shifting process, the spin coating one on two-dimentional carbon material
Layer photoresist, the figure of Two-dimensional Carbon material transparent thermal resistance 10 is formed with photoetching process, recycles dry etch process to prepare
Two-dimensional Carbon material transparent thermal resistance 10；
3）Two-dimensional Carbon material transparent thermal resistance 10 is covered in the side of the upper surface of sandwich layer 8 of planar optical waveguide 1, its center
The center of positional deviation sandwich layer 8, is covered in width of the width on sandwich layer 8 less than sandwich layer 8；
4）Deposited metal film forms two contact points 2,3 for connecting external power source, and hot with Two-dimensional Carbon material transparent
Resistance 10 is connected through connecting wire 4,5, and two contact points 2,3 are placed on substrate 6, forms apparatus of the present invention as shown in Figure 7.
Preferably, it is considered to which dry etching makes the photoetching precision and technology difficulty of Two-dimensional Carbon material transparent thermal resistance, two
The transparent thermal resistance 10 of dimension carbon material can use bigger width, step 3）It is middle to cover the part of Two-dimensional Carbon material transparent thermal resistance 10
In the upper surface of sandwich layer 8 of planar optical waveguide 1, another part is covered on the side of sandwich layer 8 of planar optical waveguide 1, such as Fig. 5, covering
In the width of the width still less than sandwich layer 8 of the thermal resistance 10 of the upper surface of sandwich layer 8.It is flat due to Two-dimensional Carbon material film being transferred to
When in the fiber waveguide of face, Two-dimensional Carbon material film meeting nature is covered on the side wall of the sandwich layer 8 of planar optical waveguide 1, and this design is not
Need accurately photoetching, the difficulty of technique making can be effectively reduced.And, the light field point according to planar optical waveguide transmission mode
Cloth, the Two-dimensional Carbon material transparent thermal resistance being covered on the wall of side will not introduce excessive optical power loss.
Preferably, in order to reduce the optical power loss of the planar optical waveguide that Two-dimensional Carbon material transparent thermal resistance causes, step
3）It is middle to be made Two-dimensional Carbon material transparent thermal resistance 10 snakelike, and it is partially covered on the upper surface of sandwich layer 8 of planar optical waveguide 1.
While not influenceing heating effect, the contact length of Two-dimensional Carbon material transparent thermal resistance 10 and planar optical waveguide 1 can be reduced, from
And effectively reduce the optical power loss of introducing, and preparation process need not accurately lithography alignment, reduce technique making
Difficulty sectional view is shown in Fig. 7.
Step 3）It is middle that Two-dimensional Carbon material transparent thermal resistance 10 may also be the sandwich layer 8 for being all covered in planar optical waveguide 1
The side of upper surface.
It is preferred that step 3）In two-dimentional carbon material be monoatomic layer.
Embodiments of the invention are as follows：
Because the present invention does not need special process, thus can be used for the thermo-optical device of multiple material, structure, with good
Practicality.For example, applying the present invention to reference picture 8 in Mach-Zehnder interferometer, one of interfere arm introduces of the invention
Two-dimentional carbon material heater, can change the optical path difference of MZI two-arm, so as to realize thermo-optical switch or modulation.It is this in Fig. 8 dotted lines
The two-dimentional carbon material heater of invention.Silicon nanowires fiber waveguide is chosen in this examples of implementation.3 μm are formed with silicon substrate 6
Thick SiO2Separation layer 7 and the thick Si sandwich layers 8 of 250nm, the width of Si sandwich layers 8 is 600nm, and the ridge of planar optical waveguide is a height of
250nm, i.e. sandwich layer are cut through.
In this example, Fig. 4 is seen in the top of sandwich layer 8 for being all covered in planar optical waveguide 1, chooses the width of two-dimentional carbon material thermal resistance
It is 100nm to spend, and its center is 250nm with the distance of the center of the sandwich layer 8 of planar optical waveguide 1.Two contact points 2,3
Size be 100 μm of 100 μ m, connecting wire 4,5 is still using the Two-dimensional Carbon material film of monoatomic layer, its length, width
Degree is respectively 2 μm, 500nm, and the spacing of two connecting wires namely the length of thermal resistance are 30 μm.Designed more than, when outer
Plus power be 5mW when, can make planar optical waveguide core layer temperature raise more than 120 degree, the temperature with Two-dimensional Carbon material transparent thermal resistance
Degree is almost consistent, and heating rise time, i.e. temperature change value rises to time required for the 90% of maximum from 0, about
4.4μs.Thus, during heating devices heat of the present invention, the temperature of the temperature of sandwich layer almost with thermal resistance is consistent, using this
The thermo-optical device of heater can realize the temperature tuning range of maximum, with significant technique effect.
Above-mentioned specific embodiment is used for illustrating the present invention, rather than limiting the invention, of the invention
In spirit and scope of the claims, any modifications and changes made to the present invention both fall within protection model of the invention
Enclose.
Claims (10)
1. a kind of planar optical waveguide heater based on two-dimentional carbon material, its planar optical waveguide（1）By substrate（6）With from lower and
On be sequentially deposited at substrate（6）On separation layer（7）, sandwich layer（8）With Two-dimensional Carbon material transparent thermal resistance（10）Composition, its feature
It is：Device is included and is covered in planar optical waveguide（1）On Two-dimensional Carbon material transparent thermal resistance（10）With the two of connection external power source
Individual contact point（2、3）, Two-dimensional Carbon material transparent thermal resistance（10）It is covered in planar optical waveguide（1）Sandwich layer（8）The one of upper surface
Side, two contact points（2、3）Respectively through connecting wire（4、5）It is connected to Two-dimensional Carbon material transparent thermal resistance（10）Two ends.
2. a kind of planar optical waveguide heater based on two-dimentional carbon material according to claim 1, it is characterized in that：It is described
Two-dimensional Carbon material transparent thermal resistance（10）A part is covered in planar optical waveguide（1）Sandwich layer（8）The side of upper surface, it is another
Part is covered in planar optical waveguide（1）Sandwich layer（8）On side.
3. a kind of planar optical waveguide heater based on two-dimentional carbon material according to claim 1 and 2, it is characterized in that：
Described Two-dimensional Carbon material transparent thermal resistance（10）It is serpentine-like and be partially covered on planar optical waveguide（1）Sandwich layer（8）Upper surface
Side.
4. a kind of planar optical waveguide heater based on two-dimentional carbon material according to claim 1, it is characterized in that：All
The Two-dimensional Carbon material transparent thermal resistance（10）It is covered in planar optical waveguide（1）Sandwich layer（8）Upper surface.
5., according to a kind of any described planar optical waveguide heater based on two-dimentional carbon material of claim 1,2,4, it is special
Levying is：Described is covered in sandwich layer（8）The Two-dimensional Carbon material transparent thermal resistance of upper surface（10）Width be less than planar optical waveguide
（1）Upper sandwich layer（8）Width, Two-dimensional Carbon material transparent thermal resistance（10）Center deviate planar optical waveguide（1）Sandwich layer
（8）Center.
6. be used for prepare claim 1 described device a kind of planar optical waveguide heater based on two-dimentional carbon material preparation
Method, it is characterised in that comprise the following steps：
1）By separation layer（7）, sandwich layer（8）It is sequentially deposited at substrate（6）On, it is made planar optical waveguide using photoetching, etching technics
（1）；
2）Two-dimentional carbon material is transferred to planar optical waveguide using wet method shifting process（1）, a layer of spin coating on two-dimentional carbon material
Photoresist, Two-dimensional Carbon material transparent thermal resistance is made of photoetching process（10）Figure, recycle dry etch process prepare
Two-dimensional Carbon material transparent thermal resistance（10）；
3）By Two-dimensional Carbon material transparent thermal resistance（10）It is covered in planar optical waveguide（1）Sandwich layer（8）The side of upper surface, wherein
Heart positional deviation sandwich layer（8）Center, be covered in sandwich layer（8）On width be less than sandwich layer（8）Width；
4）Deposited metal film forms two contact points for connecting external power source（2、3）, and with Two-dimensional Carbon material transparent thermoelectricity
Resistance（10）Through connecting wire（4,5）It is connected.
7. the preparation method of a kind of planar optical waveguide heater based on two-dimentional carbon material according to claim 6, its
It is characterised by：Described step 3）It is middle by Two-dimensional Carbon material transparent thermal resistance（10）A part is covered in planar optical waveguide（1）'s
Sandwich layer（8）The side of upper surface, another part is covered in planar optical waveguide（1）Sandwich layer（8）Side.
8. the preparation method of a kind of planar optical waveguide heater based on two-dimentional carbon material according to claim 6 or 7,
It is characterized in that：Described step 3）It is middle by Two-dimensional Carbon material transparent thermal resistance（10）It is made snakelike, which part is covered in flat
Face fiber waveguide（1）Sandwich layer（8）The side of upper surface.
9. the preparation method of a kind of planar optical waveguide heater based on two-dimentional carbon material according to claim 6, its
It is characterised by：Described step 3）It is middle by whole Two-dimensional Carbon material transparent thermal resistances（10）It is covered in planar optical waveguide（1）'s
Sandwich layer（8）Upper surface.
10. the preparation method of a kind of planar optical waveguide heater based on two-dimentional carbon material according to claim 6, its
It is characterised by：Described step 3）In two-dimentional carbon material be monoatomic layer.
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| CN201410547996.8A CN104316995B (en) | 2014-10-16 | 2014-10-16 | Planar optical waveguide heater based on two-dimentional carbon material and preparation method thereof |
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|---|---|---|---|
| CN201410547996.8A CN104316995B (en) | 2014-10-16 | 2014-10-16 | Planar optical waveguide heater based on two-dimentional carbon material and preparation method thereof |
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| CN100495095C (en) * | 2007-01-24 | 2009-06-03 | 浙江大学 | Micro-heating device used in planar optical waveguide thermo-optic devices and manufacture method therefor |
| CN204178000U (en) * | 2014-10-16 | 2015-02-25 | 浙江大学 | A kind of planar optical waveguide heating arrangement based on Two-dimensional Carbon material |
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