CN104316204B - A kind of four-step phase-shifting scaling method of high-precision frequency conversion interference - Google Patents
A kind of four-step phase-shifting scaling method of high-precision frequency conversion interference Download PDFInfo
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- CN104316204B CN104316204B CN201410282559.8A CN201410282559A CN104316204B CN 104316204 B CN104316204 B CN 104316204B CN 201410282559 A CN201410282559 A CN 201410282559A CN 104316204 B CN104316204 B CN 104316204B
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Abstract
The present invention relates to a kind of four-step phase-shifting scaling method of high-precision frequency conversion interference.Common phase place frequency conversion phase shift scaling method has the following disadvantages：Random error is big, and only single sampled point is analyzed, it is difficult to eliminates the influence of random error；Lack it is comprehensive, can not comprehensively in reflected measurement all sampled points demarcation situation, therefore its stated accuracy is not high.A kind of four-step phase-shifting scaling method of high-precision frequency conversion interference, specifically includes following steps：Feisuo interference testing light path is built, gathers the original interferogram of reference light and test light, and is stored in computer；The driving voltage of frequency-converted solid state laser is adjusted, changes output wave long value, Acquisition Error interference pattern, is stored in computer；Realize the Accurate Calibration of phase.This method can realize that the Accurate Calibration of phase eliminates influence of the random error to demarcation；Realize the Accurate Calibration of phase.
Description
Technical field
The invention belongs to technical field of optical detection, and in particular to a kind of four-step phase-shifting demarcation side of high-precision frequency conversion interference
Method.
Background technology
Phase shift interference e measurement technology is one of important means of optical surface face type detection.Generally, phase shifting method can divide
For two classes：Hardware phase shift and frequency conversion phase shift.Hardware phase shift interference is typically using promotion piezoelectric ceramics（PZT）, rotatory polarization device
（Wave plate, polarizer）, mobile means such as diffraction grating or tilt flat plate realize phase-modulation.Wherein promote piezoelectric ceramics
（PZT）Phase shift is produced to be most widely used.Frequency conversion phase shift interference is then to realize phase-modulation by the change of light source frequency, its
Light source uses Wavelength tunable laser.This method measurement apparatus is succinct, and reliability is high, only needs a light in measurement process
Source；Measurement accuracy is high, reduces the error as caused by environmental change, eliminates the nonlinearity erron as caused by promoting PZT；
In the interferometry of four-step phase-shifting, phase shift is certain value, i.e. phase-shift phase.And becoming
Frequency interference four-step phase-shifting in, phase shift stepping-in amount not only with wavelength variable quantityIt is relevant, but also and interference cavity lengthHave
Close.DifferentUnder,Value be different, then, the corresponding voltage being carried on laser is also different
's.Therefore, it should which phase is demarcated so that in different cavity lengthUnder, phase-shift phase is, so as to reduce
By the error of phase stepping introducing in interferometry, measurement accuracy is improved.
Common phase place frequency conversion phase shift scaling method is that the data of single sampled point are analyzed, so as to realize phase mark
It is fixed.This method is so allowed for have the following disadvantages：（1）Random error is big, only single sampled point is analyzed, it is difficult to eliminate
The influence of random error；（2）Lack it is comprehensive, can not comprehensively in reflected measurement all sampled points demarcation situation, therefore its
Stated accuracy is not high.
The content of the invention
It is an object of the invention to provide a kind of four-step phase-shifting scaling method of high-precision frequency conversion interference, to solve based on single
The problem of existing precision is not high during individual sampled point demarcation.
In order to solve the above technical problems, the technical scheme is that：A kind of four-step phase-shifting of high-precision frequency conversion interference
Scaling method, specifically include following steps：
(1) Feisuo interference testing light path is built, withCentered on wavelength, gather reference light and test light with CCD camera and exist
Caused interference image, i.e. original interferogram in interference field, and be deposited into computer；
(2) in above-mentioned Feisuo interference testing light path, the driving voltage of frequency-converted solid state laser is adjusted, changes output wave long value：
Order, and, then, adjustmentValue, when being demarcated to t step phase shifts, phase value existsInterior, gathering several has the interference image of different phase displacement errors, and several phase shifts are gathered with CCD camera
Interference image, i.e. error interference pattern, it is stored in computer；
(3) original interference image and error interference image are removed into background respectively, after multiplication, Fourier's change is carried out to it
Change, then it is low-pass filtered after, the intensity level of its low frequency part is summed, phase-shift phase-error curve is obtained after fitting, by asking
The extreme point of the curve is taken, realizes the Accurate Calibration of phase.
The present invention has the advantages that relative to existing method：
（1）This method is studied all sampled points in measurement, that is to say, that view picture interference pattern is carried out comprehensive
Analysis, it is not that spectrum analysis is carried out to single-point, therefore can realizes that the Accurate Calibration of phase eliminates shadow of the random error to demarcation
Ring；Realize the Accurate Calibration of phase；
（2）The demarcation of each step in the present invention is independent, even if back has small calibrated error, is nor affected on
The stated accuracy of next step, therefore stated accuracy is high, the present invention can realize the Accurate Calibration of frequency conversion interference four-step phase-shifting, and it is demarcated
Precision is up to 10-3The order of magnitude.
Brief description of the drawings
Fig. 1 is the theory diagram of the present invention.
Embodiment
A kind of four-step phase-shifting scaling method of high-precision frequency conversion interference, specifically includes following steps：
(1) Feisuo interference testing light path is built, withCentered on wavelength, gather reference light and test light with CCD camera and exist
Caused interference image, i.e. original interferogram in interference field, and be deposited into computer；
(2) in above-mentioned Feisuo interference testing light path, the driving voltage of frequency-converted solid state laser is adjusted, changes output wave long value：
Order, and, then, adjustmentValue, when being demarcated to t step phase shifts, phase value existsInterior, gathering several has the interference image of different phase displacement errors, and several phase shifts are gathered with CCD camera
Interference image, i.e. error interference pattern, it is stored in computer；
(3) original interference image and error interference image are removed into background respectively, after multiplication, Fourier's change is carried out to it
Change, after low-pass filtered, the intensity level of low frequency part is summed, phase-shift phase-error curve is obtained after fitting, by asking for this
The extreme point of curve, realize the Accurate Calibration of phase.
Embodiment：
In frequency conversion phase shift interferometry, when test wavelength isWhen, the light intensity value of a certain sampled point can be with interference field
It is written as form：
（1）
In formula,For background light intensity,For modulate intensity,For interference cavity length.
When test wavelength isWhen, the light intensity value of a certain sampled point can be written as form in interference field：
（2）
In formula,,For phase shift step number, and frequency conversion number,For wavelength
Stepping-in amount.
Above formula can turn to
(3)
In four-step phase-shifting interference, order, above formula can be reduced to
(4)
When in dephasing processes, ifStep produces Phase-shifting Errors, then the light intensity of interference field can be expressed as
(5)
ToWhen walking phase shift and carrying out phase calibration, by theStep phase shifting interference and original interferogram (are i.e. surveyed during t=0
Trying wavelength isInterference pattern) respectively remove background after be multiplied, then have：
(6)
In formula,For its Space Angle frequency,.Fu is carried out to formula (6)
In leaf transformation, obtain：
(7)
Wherein,
From (7) formula, the frequency spectrum after being fourier transformed only includes two kinds of spectrum components, and、、By phase displacement errorInfluence.
For the sake of simplicity, influence of the phase displacement error to low frequency is only considered, analysis has the changing rule of phase displacement error time-frequency spectrum.
Using ideal low-pass filter, processing is filtered to above-mentioned frequency spectrum, removes radio-frequency component, retains zero-frequency composition and is divided
Analysis；
It is for piece image sizeSpectral image, if using error functionRepresent low-pass filtered
The intensity sum of spectral image afterwards, then
(8)
From formula (8), in actual measurement, due to the influence of extraneous factor,Value can not possibly be equal to 0 or, its zero-frequency spectrum is not only distributed only at coordinate (0,0) point, and one be distributed across around (0,0) point
In zonule.Order, and, then in this definition domain,
It there will necessarily be an extreme point so that the phase shift value corresponding to the point is。
When being demarcated to t step phase shifts,Interior, gathering several has different phase shifts
The interference image of error, and above-mentioned processing is carried out to these interference patterns, obtain corresponding error function, by asking
Take error functionExtreme point, you can obtain phase shiftWhen corresponding laser input voltage value.Realize
The Accurate Calibration of frequency conversion phase shift.
If the phase-shift phase of Accurate Calibration is, then phase-shift phase and test wavelengthRelation can be expressed as：
(9)
Pass through above formula, you can draw test waves long value during phase Accurate Calibration.Demarcated according to above-mentioned principle multiplet
Pi/2 phase point, by being fitted a series of this phase point demarcated, you can obtain phase calibration curve.
Claims (1)
- A kind of 1. four-step phase-shifting scaling method of high-precision frequency conversion interference, it is characterised in that：Specifically include following steps：(1) Feisuo interference testing light path is built, withCentered on wavelength, with CCD camera collection reference light interfering with test light Caused interference image, i.e. original interferogram in, and be deposited into computer；(2) in above-mentioned Feisuo interference testing light path, the driving voltage of frequency-converted solid state laser is adjusted, changes output wave long value：Order, and, then, adjustmentValue, when being demarcated to t step phase shifts, phase value existsInterior, gathering several has the interference image of different phase displacement errors, and several phase shifts are gathered with CCD camera Interference image, i.e. error interference pattern, it is stored in computer；(3) original interference image and error interference image are removed into background respectively, after multiplication, Fourier transformation is carried out to it, then After low-pass filtered, the intensity level of its low frequency part is summed, phase-shift phase-error curve is obtained after fitting, by asking for this The extreme point of curve, realize the Accurate Calibration of phase.
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| CN112198494B (en) * | 2019-06-20 | 2023-11-21 | 北京小米移动软件有限公司 | Method, device, system and terminal equipment for calibrating flight time module |
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| CN103335982A (en) * | 2013-06-21 | 2013-10-02 | 中国科学院上海光学精密机械研究所 | Method for measuring optical uniformity of parallel flat plate by utilizing wavelength tuning phase shift interferometer |
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| US6856405B2 (en) * | 2003-03-03 | 2005-02-15 | Phase Shift Technology, Inc. | Non linear phase shift calibration for interferometric measurement of multiple surfaces |
| US7268889B2 (en) * | 2004-09-22 | 2007-09-11 | Corning Incorporated | Phase-resolved measurement for frequency-shifting interferometry |
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| CN103335982A (en) * | 2013-06-21 | 2013-10-02 | 中国科学院上海光学精密机械研究所 | Method for measuring optical uniformity of parallel flat plate by utilizing wavelength tuning phase shift interferometer |
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| An iterative actuator calibration method for accurate;Deok Hwa Hong等;《2012 International Symposium on Optomechatronic Technologies》;20121031;全文 * |
| Wavelength-Tuned Phase-Shifting Calibration Based on the Fourier;Guo Ren-hui等;《2009 IEEE/INFORMAS international conference on service operations,logistics and information》;20091231;全文 * |
| 基于时域傅里叶变换的波长移相算法;于瀛洁等;《计量学报》;20041031;第25卷(第4期);第310-313页 * |
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