CN104298026B - Wavefront control chip based on electronic control liquid crystal plane micro lens - Google Patents

Wavefront control chip based on electronic control liquid crystal plane micro lens Download PDF

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Publication number
CN104298026B
CN104298026B CN201410577290.6A CN201410577290A CN104298026B CN 104298026 B CN104298026 B CN 104298026B CN 201410577290 A CN201410577290 A CN 201410577290A CN 104298026 B CN104298026 B CN 104298026B
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liquid crystal
wavefront
controlled liquid
sub
layer
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CN104298026A (en
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张新宇
佟庆
雷宇
罗俊
桑红石
谢长生
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Huazhong University of Science and Technology
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Huazhong University of Science and Technology
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    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333Constructional arrangements; Manufacturing methods
    • G02F1/1343Electrodes
    • G02F1/134309Electrodes characterised by their geometrical arrangement
    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/13306Circuit arrangements or driving methods for the control of single liquid crystal cells
    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/29Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the position or the direction of light beams, i.e. deflection

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  • Physics & Mathematics (AREA)
  • Nonlinear Science (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Mathematical Physics (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Geometry (AREA)
  • Liquid Crystal (AREA)

Abstract

The invention discloses a wavefront control chip based on an electronic control liquid crystal plane micro lens. The chip comprises the area relay electronic control liquid crystal plane micro lens. The area relay electronic control liquid crystal plane micro lens comprises a liquid crystal material layer, a first liquid crystal initial orientation layer, a graphical electrode layer, a first substrate, a first antireflection film, a second liquid crystal initial orientation layer, a public electrode layer, a second substrate and a second antireflection film, the first liquid crystal initial orientation layer, the graphical electrode layer, the first substrate and the first antireflection film are sequentially arranged on the upper surface of the liquid crystal material layer, and the second liquid crystal initial orientation layer, the public electrode layer, the second substrate and the second antireflection film are sequentially arranged on the lower surface of the liquid crystal material layer. The public electrode layer is composed of a homogeneous conducting film. The graphical electrode layer is composed of sub-electrodes distributed in an m*n-ary array, each sub-electrode is composed of four strip-shaped conducting films evenly distributed around the circumference in a cross shape, and the strip-shaped conducting films in each sub-electrode are not in contact. Wavefront controlled modulation or solidification or checking or search or tracking and complex wavefront construction can be achieved, and the chip can be coupled with other optical and photoelectric structures and electronic and mechanical devices easily, and is good in environmental suitability.

Description

A kind of wavefront control chip based on electrically-controlled liquid crystal planar microlens
Technical field
The invention belongs to optical precision measurement with control technical field, more particularly, to one based on Face battle array electrically-controlled liquid crystal planar microlens carries out the wavefront control chip of automatically controlled regulation to incident wavefront.
Background technology
Wavefront is the basic physical parameter characterizing light wave, is to control beam pattern and evolved behavior thereof One of key physical key element.Basic as before converging sphere or cylindrical wave, diverging spherical or cylindrical wave Before or plane wave front etc., will guide and constraint light wave spherically or cylinder pack form, sphere or cylinder Dissipate form or parallel beam.It is said that in general, any complicated light wave all can be by based on above-mentioned sphere, cylinder Or plane wave front carry out the wavelet that localization is split to form before matching characterize.Matching wavefront and true ripple Morphological differences between before, depends on the fine and smooth degree of the partitioning scheme before wavelet, segmentation and matching rule. Under not changing sub-emerging wavefront form, structure and matching this premise of rule, before modulation wavelet Inclined degree, will construct based on the new emerging wavefront of matching before wavelet, it is achieved based on wavefront control Light beam management and control.
The wavefront control measure having been widely used at present include: (one) by convex lens or concavees lens or its Combination, obtain solid form is converging or diverging with sphere or non-spherical wavefront;(2) diffraction phase is passed through Structure obtains the relatively-stationary wave beam of wavefront form;(3) by phase type MEMS or its array, base The reflection of form or transmitted light beam before sub-plane wave front Phase delay obtains having certain wave;(4) logical Cross wave beam coupling or interfere, obtaining the transmission light field that wavefront form is relatively limited;(5) humorous by modulation The characteristic size of cavity of shaking or Local Structure, the laser beam that emerging wavefront form is limited;(6) based on electricity The Phase delay effect of control liquid crystal phase-shifter antithetical phrase plane wave front, constructs relatively limited the going out of wavefront form Irradiating light beam.Entered since new century, develop the optical wavefront control technology of little miniaturization, possess based on Phase of light wave flexibly and quick regulation and control build beam configuration, development cost relative moderate little miniature Change wavefront control structure, it has also become the advanced optical precision measurement of development and one important point of control technology , receive significant attention and pay attention to.
Existing wavefront controls the defect of technology and is mainly manifested in following aspect: the lens that (one) shape is fixing Or battery of lens is only capable of building finite size and the sphere of form or non-spherical wavefront, it is impossible to carry out based on office The modulation operation that territory wavefront selects and controls;(2) the phased device of MEMS is because of son based on modulation discretization Plane wave front its inclination or Phase delay degree, be only capable of building the emerging wavefront of limited form;(3) spread out Penetrate phase structure based on antithetical phrase wavefront carry out limited extent phase place adjust, institute energy outgoing wavefront form It is relatively fixed;(4) cannot be carried out the local of wavefront before interfering, based on multi-beam, the complex wave built equally Control and modulation;(5) volume and quality are big, operate relative complex, it is difficult in flexible access light path or With other optical photoconductor structure Couplings;(6) high speed load or the target of wavefront complex shape it are not used to, The controlled wavefront being difficult to carry out local visual field surveys tune, it is difficult to the locality wavefront in visual field is performed solidification Or modulation operation, it is difficult to local area visual field carries out quick wavefront and calls the roll of the contestants in athletic events, searches for or follow the tracks of, it is difficult to entirely Visual field wavefront performs localization segmentation and process etc..
In the last few years, carry out wave beam converter technique achieved with remarkable break-throughs based on electrically-controlled liquid crystal lenticule, A feasible way is provided for solving the problems referred to above.The major function possessed at present includes: (one) Applying electricity on array liquid crystal structure and drive control signal, the convergence of light beam, dissipating can with Phase delay etc. Before any wavelet, place launches, solidifies or modulation;(2) the optical beam transformation effect of liquid crystal microlens is by first Test knowledge or the constraint of wave beam result, intervene or guide, have and wavefront is performed controlled management and control Potentiality.Wavefront can be carried out finely regulating, conversion and based on little miniaturization while it is true, still lack Means build the ability before complex wave.At present, electrically-controlled liquid crystal lenticule skill based on little miniaturization Art realizes the controlled modulation of wavefront and complicated wavefront construction, it has also become optical precision measurement and control technology Continue development faced by difficulties, in the urgent need to new breakthrough.
Summary of the invention
For disadvantages described above or the Improvement requirement of prior art, the invention provides a kind of based on automatically controlled liquid Jinping face lenticular wavefront control chip, can realize the controlled modulation of wavefront, solidify, call the roll of the contestants in athletic events, search Structure before rope or tracking and complex wave, easily with other optical photoconductor structure and electronics and mechanical fill Put coupling, good environmental adaptability.
For achieving the above object, the invention provides a kind of wavefront control chip, it is characterised in that bag Include face battle array electrically-controlled liquid crystal planar microlens;Described battle array electrically-controlled liquid crystal planar microlens includes liquid crystal material Layer, is successively set on the first liquid crystal initial orientation layer of described liquid crystal material layer upper surface, graphically electricity Pole layer, the first substrate and the first anti-reflection film, and it is successively set on described liquid crystal material layer lower surface Second liquid crystal initial orientation layer, common electrode layer, the second substrate and the second anti-reflection film;Described common electrical Pole layer is made up of one layer of homogeneous conducting film;The son electricity that described patterned electrodes layer is distributed by m × n element array Pole is constituted, and each sub-electrode is by circumferentially equally distributed four strips of conductive film structures in cross forked type Becoming, each strips of conductive film in single sub-electrode is not in contact with each other, and each sub-electrode is not in contact with each other, wherein, m, N is the integer more than 1;Described battle array electrically-controlled liquid crystal planar microlens is divided into m × n element array The unit electrically-controlled liquid crystal planar microlens of distribution, described unit electrically-controlled liquid crystal planar microlens and described son Electrode one_to_one corresponding, each sub-electrode is respectively positioned on the center of the unit electrically-controlled liquid crystal planar microlens of correspondence, Form the upper electrode of unit electrically-controlled liquid crystal planar microlens, all unit electrically-controlled liquid crystal planar microlenses Bottom electrode is provided by described common electrode layer.
Preferably, after incident beam enters described battle array electrically-controlled liquid crystal planar microlens, by each unit electricity The control discrete sub-plane wave front different for inclination angle of liquid crystal planer lenticule, each sub-plane wave front and controlled electricity Liquid crystal molecule under field excitation interacts, and forms convergence or inclination or degree of phase shift is controlled Sub-emerging wavefront, each sub-emerging wavefront is coupled into new transmission wavefront from core outside wavefront control chip Sheet exports;Wherein, four strips of conductive films of unit electrically-controlled liquid crystal planar microlens are independently powered up and are driven Control, is carried on four strips of conductive films of unit electrically-controlled liquid crystal planar microlens by independent regulation Driving frequency or the mean square amplitude of control voltage signal, the son of modulation each unit electrically-controlled liquid crystal planar microlens goes out The convergence of ejected wave bundle, inclination or Phase delay degree;Powering up between unit electrically-controlled liquid crystal planar microlens Operate separate and/or collaborative carrying out;Wherein, power-up operations is collaborative carries out referring to the automatically controlled liquid of each unit In brilliant planar microlens, the strips of conductive film of same position drives control voltage signal by one and powers up and drive control.
Preferably, by modulation respectively drive control voltage signal regulation incident beam wavefront, can resist target or Fluctuate before the incident light wave that environment Fluctuation of Light Field and chip vibration introduce.
Preferably, electricity focusing modulation pack wave beam is carried out by described battle array electrically-controlled liquid crystal planar microlens Form, can expand the described chip scope of application to incident irradiance.
Preferably, carry out electric pendulum Jiao's increase or reduce by described battle array electrically-controlled liquid crystal planar microlens to regard , the light field sphere of action of chip described in energy modulation.
Preferably, four strips of conductive films of single sub-electrode around circumferential area and corresponding unit The ratio of the light receiving area of electrically-controlled liquid crystal planar microlens is electrode coefficient, described electrode Coefficient is 4%~16%.
Preferably, described control chip also includes chip carrier;Described battle array electrically-controlled liquid crystal plane is micro- It is connected in mirror is encapsulated in described chip carrier and with described chip carrier, its light entrance face and light-emitting face By on two end faces before and after described chip carrier just to perforate exposed outside;Described chip carrier Side be provided with and multiple drive control signal input port, as described common electrode layer and patterned electrodes The lead outlet of layer, drives control electricity for what input was carried on described battle array electrically-controlled liquid crystal planar microlens Pressure signal.
In general, by the contemplated above technical scheme of the present invention compared with prior art, have Following beneficial effect:
1, the quick modulation of wavefront and solidification.The present invention is based on independent or collaborative power up that to drive the face battle array of control automatically controlled Liquid crystal planer lenticule, it is achieved the wavefront division of incident beam, modulation with couple outgoing, have and will go out Specific modality or the advantage being tuned to predetermined form it is set in before ejected wave.
2, wavefront control mode is flexible.By each strip in unit electrically-controlled liquid crystal planar microlens is led Electrolemma performs independent power-up operations, light beam can perform the solidification of local wavefront or modulation operation, have Wavefront automatically controlled regulative mode feature flexibly.
3, intelligent.By powered-up mode and the signal of telecommunication frequency of modulation face battle array electrically-controlled liquid crystal planar microlens Rate or amplitude, wavefront is controlled operation can priori or the constraint of wavefront measurement result, Intervene or guide lower expansion, there is intelligent feature.
4, control accuracy is high.Owing to using the face battle array liquid crystal that accurate can carry out electricity focusing electric pendulum Jiao operation to put down Face lenticule, has stability and the control accuracy of high structure, electricity and electro-optical parameters, has The advantage that wavefront control accuracy is high.
5, easy to use.A kind of based on electrically-controlled liquid crystal planar microlens the wavefront control chip of the present invention It is made up of the face battle array electrically-controlled liquid crystal planar microlens being encapsulated in chip carrier, patches conveniently, Yi Yuchang The coupling couplings such as rule optical photoconductor frame for movement.
Accompanying drawing explanation
Fig. 1 is the knot based on automatically controlled flat liquid crystal lenticular wavefront control chip of the embodiment of the present invention Structure schematic diagram;
Fig. 2 is the structural representation of face battle array electrically-controlled liquid crystal planar microlens;
Fig. 3 is the structural representation of patterned electrodes layer;
Fig. 4 is that the wavefront control chip based on electrically-controlled liquid crystal planar microlens of the embodiment of the present invention is being surveyed Configuration schematic diagram in examination light path;
Fig. 5 is the power-up operations schematic diagram of unit electrically-controlled liquid crystal planar microlens;
Fig. 6 is the work of the wavefront control chip based on electrically-controlled liquid crystal planar microlens of the embodiment of the present invention Make principle schematic;
Fig. 7 is the transmission wavefront test figure of one embodiment of the invention.
In all of the figs, identical reference is used for representing identical element or structure, wherein: 1-first drives control signal input port, and 2-second drives control signal input port, and 3-the 3rd drives control signal input Port, 4-4 wheel driven control signal input port, 5-the 5th drives control signal input port, and 6-the 6th drives control letter Number input port, 7-the 7th drives control signal input port, and 8-the 8th drives control signal input port, 9-chip Shell, 10-face battle array electrically-controlled liquid crystal planar microlens.
Detailed description of the invention
In order to make the purpose of the present invention, technical scheme and advantage clearer, below in conjunction with accompanying drawing And embodiment, the present invention is further elaborated.Should be appreciated that described herein specifically Embodiment only in order to explain the present invention, is not intended to limit the present invention.Additionally, it is disclosed below Just may be used as long as technical characteristic involved in each embodiment of the present invention does not constitutes conflict each other To be mutually combined.
As it is shown in figure 1, the wavefront based on electrically-controlled liquid crystal planar microlens of the embodiment of the present invention controls core Sheet includes chip carrier 9 dough-making powder battle array electrically-controlled liquid crystal planar microlens 10.Face battle array electrically-controlled liquid crystal plane is micro- Being connected in mirror 10 is encapsulated in chip carrier 9 and with chip carrier 9, its light entrance face and light-emitting face lead to Cross before and after chip carrier 9 on two end faces just to perforate exposed outside.The side of chip carrier 9 Being provided with first to the 8th and drive control signal input port 1 to 8, wherein, each side arranges two and drives control Signal input port.
As in figure 2 it is shown, face battle array electrically-controlled liquid crystal planar microlens 10 includes liquid crystal material layer, set gradually The first liquid crystal initial orientation layer of liquid crystal material layer upper surface, patterned electrodes layer, the first substrate and First anti-reflection film, and be successively set on liquid crystal material layer lower surface the second liquid crystal initial orientation layer, Common electrode layer, the second substrate and the second anti-reflection film.Common electrode layer is made up of one layer of homogeneous conducting film. As it is shown on figure 3, the sub-electrode that patterned electrodes layer is distributed by m × n element array is constituted, (m, n are greatly In the integer of 1), each sub-electrode by circumferentially in cross forked type equally distributed four strips lead Electrolemma is constituted, and each strips of conductive film in single sub-electrode is not in contact with each other, and each sub-electrode is not in contact with each other.
Preferably, patterned electrodes layer and public electrode layer material are tin indium oxide (ITO), its thickness In tens to hundreds of nanometer range.First and second liquid crystal initial orientation layers are passed through by having high light The membrane material of rate is made, and typically such as polyimides (PI), its thickness is micron dimension.First substrate It is optical material of the same race with the second substrate.
The unit that above-mentioned battle array electrically-controlled liquid crystal planar microlens 10 is divided into the distribution of m × n element array is automatically controlled Liquid crystal planer lenticule, unit electrically-controlled liquid crystal planar microlens and sub-electrode one_to_one corresponding, every height electricity Pole is respectively positioned on the center of the unit electrically-controlled liquid crystal planar microlens of correspondence, forms unit electrically-controlled liquid crystal plane Lenticular upper electrode, the bottom electrode of all unit electrically-controlled liquid crystal planar microlenses is carried by common electrode layer Supply.Four strips of conductive films of single sub-electrode around circumferential area and corresponding unit electrically-controlled liquid crystal The ratio of the light receiving area of planar microlens is referred to as electrode coefficient, its representative value 4% to Between 16%.
Utilize the wavefront control chip based on electrically-controlled liquid crystal planar microlens of the embodiment of the present invention, to entering The principle carrying out automatically controlled regulation and the complicated wavefront construction of execution before penetrating light wave is as follows.
In strong laser field environment, wavefront control chip can be placed directly within optical system for testing execution wavefront control System operation;In weak radiation light field environment, wavefront control chip can be placed in the optics being made up of primary mirror At the focal plane of system or carry out weak out of focus configuration, perform wavefront modulation and complicated wavefront construction operation, as Shown in Fig. 4.
As it is shown in figure 5, four strips of conductive films of unit electrically-controlled liquid crystal planar microlens are driven control voltage Signal V1、V2、V3And V4Independently power up and drive control, powering up between unit electrically-controlled liquid crystal planar microlens Operate separate and/or collaborative carrying out.Such as, based on the horizontal and vertical centrage of chip by unit electricity Control liquid crystal planer lenticule is divided in four different regions, and the unit electrically-controlled liquid crystal in the same area is put down The lenticular power-up operations in face is collaborative to be carried out, and i.e. in the same area, each unit electrically-controlled liquid crystal plane is micro- In mirror, the strips of conductive film of same position drives control voltage signal by one and powers up and drive control;In zones of different The power-up operations of unit electrically-controlled liquid crystal planar microlens separate.Specifically, in the same area, In each unit electrically-controlled liquid crystal planar microlens, the strips of conductive film of same position is interconnected by wire and draws Going out, four go between every two one group, are access in two adjacent with this region respectively and drive control signal input Port.Each common electrode layer lead-in wire driven in control signal input port and strips of conductive film lead-in wire composition Control pair, drives control signal input port 1 to 8 by first to the 8th and performs above-mentioned power-up operations.
In liquid crystal material layer, the liquid crystal molecule near liquid crystal initial orientation layer is had parallel groove orientation Liquid crystal initial orientation layer secure anchorage, liquid crystal molecule the driving at space electric field in the middle part of liquid crystal material layer Under Dong, formed the specific refractive index spatial distribution form performing modulation operation before incident light wave.Such as Fig. 6 Shown in, after incident beam entering surface battle array electrically-controlled liquid crystal planar microlens, by each unit electrically-controlled liquid crystal plane The discrete sub-plane wave front different for inclination angle of lenticule, under each sub-plane wave front encourages with controlled electrical field Liquid crystal molecule interacts, the sub-outgoing wave that formation convergence or inclination or degree of phase shift are controlled Before, each sub-emerging wavefront is coupled into new transmission wavefront outside wavefront control chip and exports from chip.Logical That crosses that independent regulation is carried on four strips of conductive films of unit electrically-controlled liquid crystal planar microlens drives control electricity The frequency of pressure signal or mean square amplitude, the sub-outgoing beam of modulation each unit electrically-controlled liquid crystal planar microlens Convergence, inclination or Phase delay degree, the automatically controlled state-1 of equivalence and equivalence as shown in Figure 6 are automatically controlled State-2.
By above-mentioned power-up operations, complete the discrete type before incident light wave is planarized segmentation, Yi Jizi The form of plane incident wavefront or attitude modulation etc..The emergent light wavefront obtained can be set in specific shape State or be tuned to predetermined form, typical emerging wavefront is as shown in Figure 7.
Additionally, the wavefront for target or environment Fluctuation of Light Field and chip vibration introducing fluctuates, pass through The multichannel that modulation is carried on chip drives control voltage signal regulation wavefront, makes chip possess anti-Fluctuation of Light Field And the ability of vibration.For strong laser field or weak radiation light field, put down by the face battle array electrically-controlled liquid crystal in chip Face lenticular electricity focusing function modulation pack beam configuration, makes chip possess wider photoirradiation and is suitable for Scope.Increase by electric pendulum Jiao's function of the face battle array electrically-controlled liquid crystal planar microlens in chip or reduce and regard , making chip possess can the light field sphere of action of modulation.Can also be performed by this wavefront control chip Solidification before Local Wave, redirect, call the roll of the contestants in athletic events, search for or the operation such as tracking.
As it will be easily appreciated by one skilled in the art that and the foregoing is only presently preferred embodiments of the present invention, Not in order to limit the present invention, all made within the spirit and principles in the present invention any amendment, etc. With replacement and improvement etc., should be included within the scope of the present invention.

Claims (6)

1. a wavefront control chip, it is characterised in that include face battle array electrically-controlled liquid crystal planar microlens; Described battle array electrically-controlled liquid crystal planar microlens includes liquid crystal material layer, is successively set on described liquid crystal material First liquid crystal initial orientation layer, patterned electrodes layer, the first substrate and first anti-reflection film of layer upper surface, And it is successively set on the second liquid crystal initial orientation layer of described liquid crystal material layer lower surface, public electrode Layer, the second substrate and the second anti-reflection film;Described common electrode layer is made up of one layer of homogeneous conducting film;Institute Stating the sub-electrode that patterned electrodes layer is distributed by m × n element array to constitute, each sub-electrode is by circumferentially In cross forked type, equally distributed four strips of conductive films are constituted, each strips of conductive in single sub-electrode Film is not in contact with each other, and each sub-electrode is not in contact with each other, and wherein, m, n are the integer more than 1;
Described battle array electrically-controlled liquid crystal planar microlens is divided into the automatically controlled liquid of unit of m × n element array distribution Brilliant planar microlens, described unit electrically-controlled liquid crystal planar microlens and described sub-electrode one_to_one corresponding, often Individual sub-electrode is respectively positioned on the center of the unit electrically-controlled liquid crystal planar microlens of correspondence, forms the automatically controlled liquid of unit The lenticular upper electrode in Jinping face, the bottom electrode of all unit electrically-controlled liquid crystal planar microlenses is by described public affairs Common electrode layer provides;
After incident beam enters described battle array electrically-controlled liquid crystal planar microlens, put down by each unit electrically-controlled liquid crystal The discrete sub-plane wave front different for inclination angle of face lenticule, under each sub-plane wave front encourages with controlled electrical field Liquid crystal molecule interact, formed and converge or tilt or the sub-outgoing that is controlled of degree of phase shift Wavefront, each sub-emerging wavefront is coupled into new transmission wavefront outside wavefront control chip and controls core from wavefront Sheet exports;
Wherein, four strips of conductive films of unit electrically-controlled liquid crystal planar microlens are independently powered up drives control, Control is driven by what independent regulation was carried on four strips of conductive films of unit electrically-controlled liquid crystal planar microlens The frequency of voltage signal or mean square amplitude, the sub-outgoing wave of modulation each unit electrically-controlled liquid crystal planar microlens Convergence, inclination or the Phase delay degree of bundle;Power-up operations between unit electrically-controlled liquid crystal planar microlens Separate and/or collaborative carry out;Wherein, collaborative the carrying out of power-up operations refers to that each unit electrically-controlled liquid crystal is put down In the lenticule of face, the strips of conductive film of same position drives control voltage signal by one and powers up and drive control.
2. wavefront control chip as claimed in claim 1, it is characterised in that respectively driven control by modulation Voltage signal regulation incident beam wavefront, can resist target or environment Fluctuation of Light Field and wavefront controls core Fluctuate before the incident light wave that sheet vibration introduces.
3. wavefront control chip as claimed in claim 1, it is characterised in that by described battle array electricity Control liquid crystal planer lenticule carries out electricity focusing modulation pack beam configuration, can expand described wavefront and control core The sheet scope of application to incident irradiance.
4. wavefront control chip as claimed in claim 1, it is characterised in that by described battle array electricity Control liquid crystal planer lenticule carries out electric pendulum Jiao's increase or reduces visual field, wavefront control chip described in energy modulation Light field sphere of action.
5. the wavefront control chip as according to any one of Claims 1-4, it is characterised in that single Four strips of conductive films of individual sub-electrode around circumferential area micro-with corresponding unit electrically-controlled liquid crystal plane The ratio of the light receiving area of lens is electrode coefficient, and described electrode coefficient is 4%~16%.
6. wavefront control chip as claimed in claim 5, it is characterised in that described wavefront controls core Sheet also includes chip carrier;Described battle array electrically-controlled liquid crystal planar microlens is encapsulated in described chip carrier And be connected with described chip carrier, its light entrance face and light-emitting face are by before and after described chip carrier On two end faces just to perforate exposed outside;The side of described chip carrier is provided with multiple driving and controls letter Number input port, as described common electrode layer and the lead outlet of patterned electrodes layer, is used for inputting Be carried on described battle array electrically-controlled liquid crystal planar microlens drives control voltage signal.
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CN105509894B (en) * 2015-12-07 2019-11-12 华中科技大学 A kind of liquid crystal basic image and wavefront bimodulus electricity are tuned into as detection chip
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