CN104296520A - Exhaust system and method of vacuum drying chamber - Google Patents
Exhaust system and method of vacuum drying chamber Download PDFInfo
- Publication number
- CN104296520A CN104296520A CN201310300807.2A CN201310300807A CN104296520A CN 104296520 A CN104296520 A CN 104296520A CN 201310300807 A CN201310300807 A CN 201310300807A CN 104296520 A CN104296520 A CN 104296520A
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- vacuum drying
- drying chamber
- exhaust
- exhaust pump
- chamber
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Abstract
The invention discloses an exhaust system and method of a vacuum drying chamber. The exhaust system of the vacuum drying chamber comprises a plurality of exhaust openings and an exhaust pump, wherein the exhaust openings are formed outside the vacuum drying chamber; the exhaust pump is connected with the exhaust openings through exhaust pipes. The exhaust method of the vacuum drying chamber includes the steps that when a base plate to be dried is placed in the vacuum drying cavity, exhausting is conducted through the exhaust pump; when the vacuum drying chamber is closed, the exhaust pump is stopped from conducting exhausting; when the dried base plate is taken out of the vacuum drying chamber, exhausting is conducted through the exhaust pump. In conclusion, the multiple exhaust openings are formed outside the vacuum drying cavity, so that when the base plate is stored in and taken out of the cavity, the volatile gas of the dissolved matter of high concentration in the cavity can be discharged through the multiple exhaust openings formed outside the vacuum drying cavity, and the harm to the environment generated in the storing and taking process of the base plate is reduced.
Description
Technical field
The present invention relates to display fabrication techniques field, particularly relate to a kind of gas extraction system and method for vacuum drying chamber.
Background technology
Figure 1 shows that a kind of schematic diagram of existing vacuum drying chamber, with reference to figure 1, chamber 12 is made up of upper cavity 13 and lower chamber 14.General existing vacuum drying chamber interior is provided with exhaust outlet, the volatilization gas of the dissolved matter of high concentration in chamber can be discharged.But pick and place in the process of substrate 9 at chamber 12, the volatilization gas still having the dissolved matter of part high concentration spills in the air of vacuum chamber 12.So, will to the environmental danger around chamber.
Summary of the invention
The object of the present invention is to provide a kind of vacuum drying chamber vent system, pick and place in the process of substrate in order to solve existing vacuum drying chamber at chamber, the volatilization gas of the dissolved matter of part high concentration spills in the air outside vacuum chamber, and then can to the problem of the environmental danger around chamber.
A kind of vacuum drying chamber vent of the present invention system, wherein, comprising: multiple exhaust outlet, is arranged on outside vacuum drying chamber; Exhaust pump, connects the plurality of exhaust outlet by blast pipe.
Vacuum drying chamber vent system according to an embodiment of the invention, wherein, vacuum drying chamber vent system also comprises: PLC, for controlling this exhaust pump switch.
Vacuum drying chamber vent system according to an embodiment of the invention, wherein, the plurality of exhaust outlet is around the arranged outside of this vacuum drying chamber.
Vacuum drying chamber vent system according to an embodiment of the invention, wherein, this exhaust outlet the plurality of is arranged on discharge chamber, and this discharge chamber is around the arranged outside of this lower chamber, and discharge chamber connects this blast pipe, and this blast pipe connects this exhaust pump.
Vacuum drying chamber vent system according to an embodiment of the invention, wherein, is provided with valve between this blast pipe and this exhaust pump.
Vacuum drying chamber vent system according to an embodiment of the invention, wherein, this valve is electric control valve; One PLC, for controlling the switch of this electric control valve.
Present invention also offers a kind of method of vacuum drying chamber vent, wherein, this method is realized by above-mentioned vacuum drying chamber vent system, and the method comprises: when substrate to be dried being put into this vacuum drying chamber, be exhausted by this exhaust pump.
Present invention also offers a kind of method of vacuum drying chamber vent, wherein, after vacuum drying chamber is closed, stop being exhausted by this exhaust pump; When dried substrate is taken out from this vacuum drying chamber, be exhausted by this exhaust pump.
The method of vacuum drying chamber vent according to an embodiment of the invention, wherein, controls this exhaust pump switch by PLC, starts to control this exhaust pump or stops exhaust.
The method of vacuum drying chamber vent according to an embodiment of the invention, wherein, by the lower chamber arranged outside of the plurality of exhaust outlet around this vacuum drying chamber.
The method of vacuum drying chamber vent according to an embodiment of the invention, wherein, be arranged on this discharge chamber by this exhaust outlet the plurality of, by the arranged outside of this discharge chamber around this lower chamber, discharge chamber connects this blast pipe, and this blast pipe connects this exhaust pump.
The method of vacuum drying chamber vent according to an embodiment of the invention, wherein, is arranged on valve between this blast pipe and this exhaust pump, opens this valve, then begin through this exhaust pump and be exhausted; Close this valve, then stop being exhausted by this exhaust pump.
The method of vacuum drying chamber vent according to an embodiment of the invention, wherein, this valve is chosen as electric control valve, and controls the switch of this electric control valve by PLC.
In sum, the present invention is by the multiple exhaust outlet of the outer setting of vacuum drying chamber, make to pick and place in the process of substrate at chamber, by multiple exhaust outlets of the outside of vacuum drying chamber, the volatilization gas of the dissolved matter of high concentration in chamber can be discharged, decrease issuable environmental hazard in the process.
Accompanying drawing explanation
Figure 1 shows that a kind of schematic diagram of existing vacuum drying chamber;
Figure 2 shows that the schematic diagram of vacuum drying chamber vent system of the present invention;
Fig. 3 is the vacuum drying chamber vent system state diagram of substrate when putting into vacuum chamber;
Fig. 4 is the state diagram after vacuum drying chamber is closed;
Fig. 5 is the vacuum drying chamber vent system state diagram of substrate after vacuum chamber takes out.
Detailed description of the invention
Figure 2 shows that the schematic diagram of vacuum drying chamber vent system of the present invention, as shown in Figure 2, vacuum drying chamber vent system of the present invention comprises: multiple exhaust outlet 5, exhaust pump 1, exhaust pump valve 8, vacuum chamber 2, discharge chamber 6 and blast pipe 7.Vacuum chamber 2 comprises upper cavity part 3 and lower cavity part 4.
With reference to figure 2, the syndeton of the vacuum drying chamber vent system of the present embodiment is that discharge chamber 6 is around the arranged outside of the lower cavity part 3 of vacuum chamber 2.Discharge chamber 6 is provided with multiple exhaust outlet 5.Discharge chamber 6 connects blast pipe 7, and blast pipe 7 is connected with exhaust pump 1.Blast pipe 7 can be arranged valve 8 to control the break-make of blast pipe 7.
For one preferably embodiment, can be not shown by a PLC() connect exhaust pump 1 to control the switch of exhaust pump 1.In addition, when arranging valve 8, valve 8 can be set to electrically operated valve, and PLC is connected with electrically operated valve 8, so, also control the switch of electrically operated valve 8 by PLC.
Self be equipped with PLC because existing vacuum chamber 2 is general, therefore above-mentioned PLC controls to exhaust pump 1 and/or electrically operated valve after the PLC of vacuum chamber 2 self can be adopted to programme.
Present invention also offers a kind of method of vacuum drying chamber vent, the method for the present embodiment adopts the vacuum drying chamber vent system of above-described embodiment.
Fig. 3 is the vacuum drying chamber vent system state diagram of substrate when putting into vacuum chamber; Fig. 4 is the state diagram after vacuum drying chamber is closed; Fig. 5 is the vacuum drying chamber vent system state diagram of substrate after vacuum chamber takes out.
The method of vacuum drying chamber vent comprises:
With reference to figure 3, when substrate 9 to be dried is put into vacuum drying chamber 2, begin through exhaust pump 1 and be exhausted;
As blast pipe being provided with valve 8, then controlling to open valve 8 simultaneously and start exhaust.
With reference to figure 4, the upper cavity part 3 controlling vacuum drying chamber 2 closes, and after vacuum drying process starts, closes exhaust pump 1 to save electric energy;
Meanwhile, if valve 8 is electrically operated valve, can simultaneously valve-off 8.
With reference to figure 5, then after drying process completes, by dried substrate 9 when vacuum drying chamber 2 takes out, begin through exhaust pump 1 and be exhausted;
As blast pipe being provided with valve 8, then controlling to open valve 8 simultaneously and start exhaust.
After substrate 8 takes out, after waiting for that vacuum drying chamber 2 has been vented, close exhaust pump 1.
Wherein, all by after PLC programming, above-mentioned electrically operated valve 8 and exhaust pump 1 can be controlled.
In sum, the present invention is by the multiple exhaust outlet of the outer setting of vacuum drying chamber, make to pick and place in the process of substrate at chamber, by multiple exhaust outlets of the outside of vacuum drying chamber, the volatilization gas of the dissolved matter of high concentration in chamber can be discharged, decrease issuable environmental hazard in the process.
Although exemplary embodiment describe the present invention with reference to several, should be appreciated that term used illustrates and exemplary and nonrestrictive term.Spirit of the present invention or essence is not departed from because the present invention can specifically implement in a variety of forms, so be to be understood that, above-described embodiment is not limited to any aforesaid details, and should explain widely in the spirit and scope that claims limit, therefore fall into whole change in claim or its equivalent scope and remodeling and all should be claims and contained.
Claims (13)
1. a vacuum drying chamber vent system, is characterized in that, comprising:
Multiple exhaust outlet, is arranged on outside vacuum drying chamber;
Exhaust pump, connects the plurality of exhaust outlet by blast pipe.
2. vacuum drying chamber vent system as claimed in claim 1, wherein, vacuum drying chamber vent system also comprises: PLC, for controlling the opening and closing of this exhaust pump.
3. vacuum drying chamber vent system as claimed in claim 1, wherein, the plurality of exhaust outlet is around the arranged outside of this vacuum drying chamber.
4. vacuum drying chamber vent system as claimed in claim 3, wherein, this exhaust outlet the plurality of is arranged on discharge chamber, and this discharge chamber is around the arranged outside of this lower chamber, and discharge chamber connects this blast pipe, and this blast pipe connects this exhaust pump.
5. vacuum drying chamber vent system as claimed in claim 1, wherein, is provided with valve between this blast pipe and this exhaust pump.
6. vacuum drying chamber vent system as claimed in claim 5, wherein, this valve is electric control valve; Also comprise: a PLC, for controlling the switch of this electric control valve.
7. a method for vacuum drying chamber vent, is characterized in that, vacuum drying chamber vent system comprises, multiple exhaust outlet, and be arranged on outside vacuum drying chamber, exhaust pump connects the plurality of exhaust outlet by blast pipe; The method of vacuum drying chamber vent comprises:
When substrate to be dried being put into this vacuum drying chamber, be exhausted by this exhaust pump.
8. the method for vacuum drying chamber vent as claimed in claim 7, wherein,
After vacuum drying chamber is closed, stop being exhausted by this exhaust pump;
When dried substrate is taken out from this vacuum drying chamber, be exhausted by this exhaust pump.
9. the method for vacuum drying chamber vent as claimed in claim 7, wherein, controls the opening and closing of this exhaust pump by PLC.
10. the method for vacuum drying chamber vent as claimed in claim 7, wherein, by the lower chamber arranged outside of the plurality of exhaust outlet around this vacuum drying chamber.
The method of 11. vacuum drying chamber vent as claimed in claim 10, wherein, be arranged on this discharge chamber by this exhaust outlet the plurality of, by the arranged outside of this discharge chamber around this lower chamber, discharge chamber connects this blast pipe, and this blast pipe connects this exhaust pump.
The method of 12. vacuum drying chamber vent as claimed in claim 7, wherein, is arranged on valve between this blast pipe and this exhaust pump, opens this valve, then begin through this exhaust pump and be exhausted; Close this valve, then stop being exhausted by this exhaust pump.
13. vacuum drying chamber vent systems as claimed in claim 12, wherein, this valve is chosen as electric control valve, and controls the switch of this electric control valve by PLC.
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310300807.2A CN104296520A (en) | 2013-07-17 | 2013-07-17 | Exhaust system and method of vacuum drying chamber |
| TW102128738A TW201504588A (en) | 2013-07-17 | 2013-08-09 | System and method for draining air from a vacuum desiccation cavity |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310300807.2A CN104296520A (en) | 2013-07-17 | 2013-07-17 | Exhaust system and method of vacuum drying chamber |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN104296520A true CN104296520A (en) | 2015-01-21 |
Family
ID=52316357
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201310300807.2A Pending CN104296520A (en) | 2013-07-17 | 2013-07-17 | Exhaust system and method of vacuum drying chamber |
Country Status (2)
| Country | Link |
|---|---|
| CN (1) | CN104296520A (en) |
| TW (1) | TW201504588A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105928324A (en) * | 2015-02-26 | 2016-09-07 | 东丽工程株式会社 | Decompression drying apparatus and substrate processing system |
| JP2018040512A (en) * | 2016-09-06 | 2018-03-15 | 株式会社Ｓｃｒｅｅｎホールディングス | Decompression drying apparatus, decompression drying system and decompression drying method |
Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2000181079A (en) * | 1998-12-16 | 2000-06-30 | Tokyo Electron Ltd | Substrate treating device |
| JP2005329303A (en) * | 2004-05-19 | 2005-12-02 | Mitsubishi Chemicals Corp | Method of manufacturing sheet type coated member, vacuum drying method and vacuum drying apparatus |
| CN1781614A (en) * | 2004-11-29 | 2006-06-07 | 精工爱普生株式会社 | Reduced pressure drying apparatus |
| CN101598908A (en) * | 2008-06-05 | 2009-12-09 | 东京毅力科创株式会社 | Decompression dry device |
| CN101829647A (en) * | 2009-03-11 | 2010-09-15 | 东丽工程株式会社 | Decompression drying device |
| CN102074456A (en) * | 2009-10-16 | 2011-05-25 | 东京毅力科创株式会社 | Decompression drying apparatus |
| CN102628639A (en) * | 2012-05-09 | 2012-08-08 | 常州广为仪器科技有限公司 | Vacuum drying device and vacuum drying control method |
-
2013
- 2013-07-17 CN CN201310300807.2A patent/CN104296520A/en active Pending
- 2013-08-09 TW TW102128738A patent/TW201504588A/en unknown
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2000181079A (en) * | 1998-12-16 | 2000-06-30 | Tokyo Electron Ltd | Substrate treating device |
| JP2005329303A (en) * | 2004-05-19 | 2005-12-02 | Mitsubishi Chemicals Corp | Method of manufacturing sheet type coated member, vacuum drying method and vacuum drying apparatus |
| CN1781614A (en) * | 2004-11-29 | 2006-06-07 | 精工爱普生株式会社 | Reduced pressure drying apparatus |
| CN101598908A (en) * | 2008-06-05 | 2009-12-09 | 东京毅力科创株式会社 | Decompression dry device |
| CN101829647A (en) * | 2009-03-11 | 2010-09-15 | 东丽工程株式会社 | Decompression drying device |
| CN102074456A (en) * | 2009-10-16 | 2011-05-25 | 东京毅力科创株式会社 | Decompression drying apparatus |
| CN102628639A (en) * | 2012-05-09 | 2012-08-08 | 常州广为仪器科技有限公司 | Vacuum drying device and vacuum drying control method |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105928324A (en) * | 2015-02-26 | 2016-09-07 | 东丽工程株式会社 | Decompression drying apparatus and substrate processing system |
| JP2018040512A (en) * | 2016-09-06 | 2018-03-15 | 株式会社Ｓｃｒｅｅｎホールディングス | Decompression drying apparatus, decompression drying system and decompression drying method |
Also Published As
| Publication number | Publication date |
|---|---|
| TW201504588A (en) | 2015-02-01 |
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Application publication date: 20150121 |