CN104285309B - Piezoelectric element and possess its piezoelectric vibrating device, portable terminal, sound generator, sound generation device and electronic equipment - Google Patents
Piezoelectric element and possess its piezoelectric vibrating device, portable terminal, sound generator, sound generation device and electronic equipment Download PDFInfo
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- CN104285309B CN104285309B CN201380023907.3A CN201380023907A CN104285309B CN 104285309 B CN104285309 B CN 104285309B CN 201380023907 A CN201380023907 A CN 201380023907A CN 104285309 B CN104285309 B CN 104285309B
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- KDLHZDBZIXYQEI-UHFFFAOYSA-N palladium Chemical compound [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 claims abstract description 32
- 229910052709 silver Inorganic materials 0.000 claims abstract description 30
- 239000004332 silver Substances 0.000 claims abstract description 30
- 239000000470 constituent Substances 0.000 claims abstract description 25
- 229910052763 palladium Inorganic materials 0.000 claims abstract description 16
- BQCADISMDOOEFD-UHFFFAOYSA-N silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 claims description 28
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- 125000004805 propylene group Chemical group [H]C([H])([H])C([H])([*:1])C([H])([H])[*:2] 0.000 description 4
- 210000000845 Cartilage Anatomy 0.000 description 3
- HFGPZNIAWCZYJU-UHFFFAOYSA-N Lead zirconate titanate Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ti+4].[Zr+4].[Pb+2] HFGPZNIAWCZYJU-UHFFFAOYSA-N 0.000 description 3
- 230000015572 biosynthetic process Effects 0.000 description 3
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- 229910052737 gold Inorganic materials 0.000 description 3
- 239000010931 gold Substances 0.000 description 3
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- 206010002855 Anxiety Diseases 0.000 description 2
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- BJQHLKABXJIVAM-UHFFFAOYSA-N Bis(2-ethylhexyl) phthalate Chemical compound CCCCC(CC)COC(=O)C1=CC=CC=C1C(=O)OCC(CC)CCCC BJQHLKABXJIVAM-UHFFFAOYSA-N 0.000 description 2
- 229910003781 PbTiO3 Inorganic materials 0.000 description 2
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- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 2
- 229910000679 solder Inorganic materials 0.000 description 2
- ZTQSAGDEMFDKMZ-UHFFFAOYSA-N 1-butanal Chemical compound CCCC=O ZTQSAGDEMFDKMZ-UHFFFAOYSA-N 0.000 description 1
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- LGRFSURHDFAFJT-UHFFFAOYSA-N Phthalic anhydride Chemical compound C1=CC=C2C(=O)OC(=O)C2=C1 LGRFSURHDFAFJT-UHFFFAOYSA-N 0.000 description 1
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- WHXSMMKQMYFTQS-UHFFFAOYSA-N lithium Chemical compound [Li] WHXSMMKQMYFTQS-UHFFFAOYSA-N 0.000 description 1
- 229910052744 lithium Inorganic materials 0.000 description 1
- JNQQEOHHHGGZCY-UHFFFAOYSA-N lithium;oxygen(2-);tantalum(5+) Chemical compound [Li+].[O-2].[O-2].[O-2].[Ta+5] JNQQEOHHHGGZCY-UHFFFAOYSA-N 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 229920000620 organic polymer Polymers 0.000 description 1
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Abstract
Piezoelectric element that a kind of peeling making surface electrode is inhibited is provided and possesses the piezoelectric vibrating device of this piezoelectric element, portable terminal, sound generator, sound generation device and electronic equipment.The piezo-activator (1) of the present invention is characterised by, comprise piezoelectric element (10), this piezoelectric element (10) possesses: the duplexer (4) of the tabular being laminated mutually with piezoelectric body layer (3) by internal electrode (2), and the surface electrode (5) electrically connected with internal electrode (2) on an interarea of duplexer (4), surface electrode (5) has first area (501) and second area (502), first area (501) is the region with silver as main constituent, second area (502) is as main constituent and to be set to the region connected with piezoelectric body layer (3) with silver and palladium.
Description
Technical field
The present invention relates to be suitable to piezoelectric vibrating device, the piezoelectric element of portable terminal and possess the pressure of this piezoelectric element
Electric vibrating device, portable terminal, sound generator, sound generation device and electronic equipment.
Background technology
As piezoelectric element, on the formation surface, surface by internal electrode with the duplexer of piezoelectric body layer laminated multi-layer
The piezoelectric element of the bimorph type obtained by electrode is known (with reference to patent documentation 1).
Further, the central part on the length direction of the piezoelectric element of bimorph type or one end are fixed on vibration
The piezoelectric vibrating device of plate is known (with reference to patent documentation 2,3).
Citation
Patent documentation
Patent documentation 1:JP JP 2002-10393 publication
Patent documentation 2: International Publication the 2005/004535th
Patent documentation 3:JP JP 2006-238072 publication
The problem that invention is to be solved
Here, the surface electrode on the surface being arranged at piezoelectric element generally uses the Ag electrode after firing, and this surface electricity
The whole face thickness of pole, apparent condition are being identically formed in gamut, so that piezoelectric element is in the range of whole
Substantially evenly it is driven.
But, produced by the displacement of piezoelectric element, stress can apply to surface electrode, thus longer when loosing
During period, the interface between surface electrode and piezoelectric body layer can produce micro-crack and make surface electrode peel off, result is deposited
Unstable anxiety is obtained in displacement quantitative change.
Additionally, about possessing the piezoelectric vibrating device of above-mentioned piezoelectric element, portable terminal, sound generator, sound equipment are sent out
Generating apparatus and electronic equipment, exist owing to the surface electrode of piezoelectric element occurs to peel off thus cannot carry out long-term and stably
The anxiety of driving.
Summary of the invention
The present invention makes in view of said circumstances, its object is to, it is provided that a kind of peeling making surface electrode is inhibited
Piezoelectric element and possess the piezoelectric vibrating device of this piezoelectric element, portable terminal, sound generator, sound generation device
And electronic equipment.
For solving the means of problem
The piezoelectric element of the present invention is characterised by possessing: tabular internal electrode and piezoelectric body layer being laminated mutually
Duplexer；And the surface electrode electrically connected with above-mentioned internal electrode at an interarea of this duplexer, above-mentioned surface electrode
Having first area and second area, above-mentioned first area is the region with silver as main constituent, and above-mentioned second area is with silver palladium
For main constituent and be set to the region connected with above-mentioned piezoelectric body layer.
Additionally, the piezoelectric vibrating device of the present invention is characterised by, have above-mentioned piezoelectric element and with this piezoelectric element
The oscillating plate that engages of another interarea above-mentioned.
Additionally, the portable terminal of the present invention is characterised by, have above-mentioned piezoelectric element, electronic circuit, display, with
And casing, another interarea of above-mentioned piezoelectric element engages with aforementioned display device or above-mentioned casing.
Additionally, the sound generator of the present invention is characterised by having: above-mentioned piezoelectric element；This piezoelectric element is installed
And the oscillating plate vibrated is carried out together with this piezoelectric element by the vibration of this piezoelectric element；And it is arranged at this oscillating plate
The framework of peripheral part.
Additionally, the sound generation device of the present invention is characterised by possessing: above-mentioned sound generator；With this sound equipment of receiving
The casing of generator.
Additionally, the electronic equipment of the present invention is characterised by possessing: above-mentioned sound generator；With this sound generator phase
The electronic circuit connected；And accommodate this electronic circuit and the casing of above-mentioned sound generator；And have and make sound equipment from above-mentioned
The function that sound generator produces.
Invention effect
According to the piezoelectric element of the present invention, surface electrode has first area and second area, and first area is to be with silver
The region of main constituent, second area is as main constituent and to be set to the region connected with above-mentioned piezoelectric body layer, thus with silver and palladium
It is capable of surface electrode to be difficult to peel off and displacement keeps stable for a long time.
Additionally, according to the piezoelectric vibrating device of the present invention, portable terminal, sound generator, sound generation device and
Electronic equipment, it is possible to realize being driven long-term and stably.
Accompanying drawing explanation
Fig. 1 (a) is the brief perspective views of an example of the embodiment of the piezoelectric element representing the present invention, and Fig. 1 (b) is by scheming
The fragmentary cross sectional view that line A-A shown in 1 (a) blocks.
Fig. 2 is the fragmentary cross sectional view of other examples representing Fig. 1 (b).
Fig. 3 is the fragmentary cross sectional view of other examples representing Fig. 1 (b).
Fig. 4 is the brief perspective views of other examples of the embodiment of the piezoelectric element representing the present invention.
Fig. 5 is the brief perspective views of the embodiment of the piezoelectric vibrating device schematically showing the present invention.
Fig. 6 is the brief perspective views of the embodiment of the portable terminal schematically showing the present invention.
Fig. 7 is the fragmentary cross sectional view that line A-A as shown in Figure 6 blocks.
Fig. 8 is the fragmentary cross sectional view that line B-B as shown in Figure 6 blocks.
Fig. 9 (a) is the schematic plan briefly constituted of the embodiment of the sound generator representing the present invention, Fig. 9
B () is the line C-C sectional view (one) of Fig. 9 (a), Fig. 9 (c) is the line C-C sectional view (its two) of Fig. 9 (a).
Figure 10 is the figure of the composition that the embodiment of the sound generation device representing the present invention relates to.
Figure 11 is the figure of the composition that the embodiment of the electronic equipment representing the present invention relates to.
Detailed description of the invention
An example of the embodiment of the piezoelectric element of the present invention is described in detail with reference to accompanying drawings.
Fig. 1 is the brief perspective views of an example of the embodiment of the piezoelectric element representing the present invention, and Fig. 2 (a) is by Fig. 1
B fragmentary cross sectional view that the line A-A shown in () blocks.
The piezoelectric element 10 of the present embodiment shown in Fig. 1 possesses: be laminated mutually with piezoelectric body layer 3 by internal electrode 2
The duplexer 4 of tabular；And the surface electrode 5 electrically connected with internal electrode 2 at an interarea of duplexer 4；Surface electrode 5
Having first area 501 and second area 502, first area 501 is the region with silver as main constituent, second area 502 be with
Silver palladium is main constituent and is set to the region connected with piezoelectric body layer 3.
Internal electrode 2 and piezoelectric body layer 3 phase stacking are formed as tabular by the duplexer 4 constituting piezoelectric element 10, have:
Multiple the most equitant active portion of internal electrode 2 41 and non-active portion 42 in addition, and such as formed
For strip.In the case of piezoelectric element at the display being mounted to portable terminal or casing, as duplexer 4
Length, the most preferably 18mm～28mm, more preferably 22mm～25mm.The width of duplexer 4 such as be preferably 1mm～
6mm, more preferably 3mm～4mm.The thickness of duplexer 4 such as be preferably 0.2mm～1.0mm, more preferably 0.4mm～
0.8mm。
The internal electrode 2 constituting duplexer 4 is formed by the pottery roasting simultaneously with formation piezoelectric body layer 3, and by the 1st
Electrode the 21 and the 2nd electrode 22 is constituted.Such as, the 1st electrode 21 becomes positive pole or negative pole, and the 2nd electrode 22 becomes earthing pole.Make
1st electrode the 21 and the 2nd electrode 22 and piezoelectric body layer 3 alternately stacking and get off to clamp piezoelectric body layer 3 from above, and suitable by stacking
Sequence configures the 1st electrode the 21 and the 2nd electrode 22, thus held piezoelectric body layer 3 between which is applied driving voltage.
Material is formed, it is possible to use such as the leading as main constituent with the silver low with the reactivity of piezoelectric ceramics or silver-palladium alloy as it
Body or the conductor containing copper, platinum etc., but these conductors can also be made to contain ceramic component, glass ingredient.
In the example depicted in figure 1, the end of the 1st electrode the 21 and the 2nd electrode 22 is derived to stacking the most staggeredly
The opposed pairs side of body 4.In the case of piezoelectric element at the display being mounted to portable terminal or casing,
The length of internal electrode 2 is such as preferably 17mm～25mm, more preferably 21mm～24mm.The width of internal electrode 2 is the most excellent
Elect 1mm～5mm as, more preferably 2mm～4mm.The thickness of internal electrode 2 is such as preferably 0.1～5 μm.
The piezoelectric body layer 3 constituting duplexer 4 is formed by the pottery with piezoelectric property, as such pottery, such as
Can use by lead zirconate titanate (PbZrO3-PbTiO3) formed perofskite type oxide, Lithium metaniobate (LiNbO3), lithium tantalate
(LiTaO3) etc..In order to be driven by low-voltage, the thickness of 1 layer of piezoelectric body layer 3 is such as preferably set to 0.01～0.1mm.
Additionally, in order to obtain big bending vibration, preferably there is piezoelectric constant d31 of more than 200pm/V.
An interarea at duplexer 4 is provided with the surface electrode 5 electrically connected with internal electrode 2.Under mode shown in Fig. 1
Surface electrode 5 by the 1st surface electrode 51 of larger area, the 2nd surface electrode the 52 and the 3rd surface electrode 53 of less area
Constitute.Such as, the 1st surface electrode 51 electrically connects with the internal electrode 2 as the 1st electrode 21, the 2nd surface electrode 52 be configured at
The internal electrode 2 as the 2nd electrode 22 of one interarea side electrically connects, the 3rd surface electrode 53 be configured at another interarea side
Internal electrode 2 as the 2nd electrode 22 electrically connects.Piezoelectricity unit at the display being mounted to portable terminal or casing
In the case of part, the length of the 1st surface electrode 51 is such as preferably 17mm～23mm, more preferably 19mm～21mm.1st surface
The width of electrode 51 is such as preferably 1mm～5mm, more preferably 2mm～4mm.2nd surface electrode the 52 and the 3rd surface electrode
The length of 53 is such as preferably set to 1mm～3mm.The width of the 2nd surface electrode the 52 and the 3rd surface electrode 53 is such as preferably set to
0.5mm～1.5mm.
Further, surface electrode 5 has the first area 501 with silver as main constituent and with silver palladium as main constituent and and piezoelectricity
The second area 502 that body layer 3 connects.In other words, surface electrode 5 has first area 501 and second area 502, first area
501 is the region with silver as main constituent, and second area 502 and is set to connect with piezoelectric body layer 3 with silver palladium as main constituent
Region.
Relative to the surface electrode with silver as main constituent such as formed by firing, have such as by roasting simultaneously
And the surface electrode 5 with the silver palladium second area 502 as main constituent formed is securely engaged with piezoelectric body layer 3, clinging force is high.
Therefore, it is possible to be difficult to peel off as surface electrode 5 and displacement keeps stable piezoelectric element for a long time.
Additionally, by being formed in a part for surface electrode 5 with the silver palladium second area 502 as main constituent, thus shape
Become the region that varies in weight without carrying out activity equably with whole face, and in second area 502 (silver and the many portion of palladium
Position) in R0(resonant resistance) uprises, it is possible to contribute to stablizing of displacement.
Particularly, the peeling of the surface electrode 5 when flexible base board 6 described later is engaged in an interarea is suppressed, with soft
Reliability of electrical connection between property substrate 6 is improved.
It addition, between second area 502 and first area 501 at interface between surface electrode 5 and piezoelectric body layer 3
Area ratio for example, 5: 95～30: 70 be effective.Additionally, the volume ratio between second area 502 and first area 501
As being effective for 5: 95～30: 70.
Here, as in figure 2 it is shown, preferably first area 501 covers second area 502.According to this composition, it is possible to make surface electricity
Pole 5 engages securely with piezoelectric body layer 3, it is possible to suppression produces micro-at the interface between surface electrode 5 and piezoelectric body layer 3
Crackle such that it is able to the peeling of suppression surface electrode 5.
Additionally, with silver palladium be main constituent second area 502 be main constituent with silver first area 501 surrounded, institute
Using the surface of surface electrode 5 all by silver as main constituent, voltage is applied evenly to surface electrode 5 overall, and displacement is long
Time keeps stable.
Additionally, although it is not shown, but preferably second area 502 is overlooked lower for round-shaped or elliptical shape, root
According to this composition, there is no corner in periphery from the part without there being stress to concentrate, so displacement can keep within longer period
Stable.
Additionally, as shown in Figure 1 and Figure 2, internal electrode 2 is made up of the 1st electrode the 21 and the 2nd electrode 22, and duplexer 4 has
Have: the 1st electrode the 21 and the 2nd the most equitant active portion of electrode 22 41 and active portion 41 of internal electrode 2
The 1st electrode the 21 and the 2nd the most non-overlapping non-active portion of electrode 22 42, preferably second area 502 in addition
It is in active portion 41.According to this composition, by configuring second area 502 in the active portion 41 carrying out activity well, thus
Become the peeling to suppression surface electrode 5 effectively to configure.
Additionally, as it is shown on figure 3, preferred second area 502 is in the border in active portion 41 and between non-active portion 42
Near.By the position concentrated at stress configuration second area 502, thus become the peeling to suppression surface electrode 5 more added with
The configuration of effect.
It addition, as shown in Figure 4, the piezoelectric element 10 of the present invention can also possess the flexible base board 6 with wiring conductor, with
Via electric conductivity engagement member, surface electrode 5 and the mode of wiring conductor electrical connection are made a part and the layer of flexible base board 6
One interarea of stack 4 engages.
Flexible base board 6 has e.g. buried the flexible printing wiring substrate of 2 wiring conductor, one in resin molding underground
The adapter (not shown) held and be used for and external circuit is connected is connected.
Although electric conductivity engagement member uses conductive adhesive or solder etc., but may be preferred that conductive adhesive
Agent.This is because, such as make by gold, copper, nickel by using or be overplated with the conductive particle dispersion that the resin balls etc. of gold is formed
The conductive adhesive formed in the resins such as propylene resin, epoxy resin, silicones, polyurethane resin or synthetic rubber
Agent, can reduce the stress produced due to vibration compared with solder.It is highly preferred that among conductive adhesive can also be
Anisotropic conductive material.Anisotropic conductive material is by undertaking the conducting particles of electric interlock effect and undertaking the tree of adhesive effect
Fat binding agent is formed.This anisotropic conductive material is owing to can realize conducting in a thickness direction, the most permissible
Realize insulation, so even for the wiring of thin space, electrical short also will not occur between the surface electrode of heteropole such that it is able to
Make the connecting portion miniaturization between flexible base board 6.
Additionally, by advance another interarea of piezoelectric element 10 being set to smooth, thus such as by another interarea with execute
Add the object (oscillating plate the most described later etc.) of vibration when fitting, it is easy to be integrally forming with the object applying vibration and send out
Raw bending vibration, the efficiency as overall bending vibration can be improved.
It addition, the piezoelectric element 10 shown in Fig. 1 is the piezo-activator of so-called bimorph type, it is from surface electrode 5
In the way of an interarea and another interarea become flexure plane, vibration it is curved after accepting the input of the signal of telecommunication, but conduct
The piezo-activator of the present invention, is not limited to bimorph type, it is also possible to be unimorph type (unimorph), by such as
Another interarea making piezo-activator engages (fitting) with oscillating plate described later, even thus unimorph type also can
Enough it is curved vibration.
Then, the manufacture method of the piezoelectric element 10 of present embodiment is described.
First, the ceramic green sheet as piezoelectric body layer 3 is made.Specifically, by the powders calcined of piezoelectric ceramics, by propylene
Binder, plasticizer that the organic polymers such as system, butyral system are formed carry out mixing to make ceramic size.Then, by profit
With doctor-blade casting processes (tape casting) such as doctor blade method (doctor blade), calender roll methods (calender roll), thus
Use this ceramic size to make ceramic green sheet.As long as there is piezoelectric property as piezoelectric ceramics, for instance, it is possible to use by
Lead zirconate titanate (PbZrO3-PbTiO3) perofskite type oxide etc. that formed.Additionally, as plasticizer, it is possible to use phthalandione two
Butyl ester (DBP), dioctyl phthalate (DOP) etc..
Then, the conductive paste as internal electrode 2 is made.Specifically, by adding in the metal dust of silver-palladium alloy
Add hybrid bonding material and plasticizer to make conductive paste.Utilize silk screen print method by this conductive paste with internal electrode 2
Pattern is coated on above-mentioned ceramic green sheet.And then, stacking multi-disc has been printed the ceramic green sheet of this conductive paste, with the temperature of regulation
Degree carries out debinding material process, carries out roasting with the temperature of 900～1200 DEG C afterwards, and uses surface grinding machine etc. to implement at grinding
Manage to become the shape of regulation, thus make internal electrode 2 and the stacking of piezoelectric body layer 3 having possessed alternately stacking
Body 4.
Duplexer 4 is not limited by above-mentioned manufacture method and makes, as long as can make multiple internal electrodes 2 and piezoelectricity
The duplexer 4 that body layer 3 is laminated, it is possible to made by any manufacture method.
Then, on the surface of duplexer 4, utilization forms second area 502 with silver and the palladium conductive paste as main constituent
Pattern.Now, by the pattern of second area 502 is formed as shape desired, thus such as being overlooked down is circular shape
The second area 502 of shape or elliptical shape.
Afterwards, the conducting particles with silver as main constituent and glass are being carried out in the material being obtained by mixing, adding bonding
Material, plasticizer and solvent and produce the conductive paste containing silver-colored glass, utilize silk screen print method etc. with the figure of surface electrode 5
Case is printed this conductive paste containing silver glass in interarea and the side of duplexer 4 and makes it be dried, afterwards with 650～750
DEG C temperature be fired processing, thus form surface electrode 5.
It addition, when surface electrode 5 and internal electrode 2 being electrically connected, the via conductors of through piezoelectric body layer 3 can be formed
It is attached, it is also possible to form side electrode in the side of duplexer 4, it is possible to made by any manufacture method.
Then, use conductive adhesive, flexible printed circuit board 6 is connected to a fixed with piezoelectric element 10 (joint).
First, coating forms conductive adhesive in the position of the regulation of piezoelectric element 10 to utilize the maneuvers such as silk screen printing
Use cream.Afterwards, conductive adhesive cream is made to harden when being docked by flexible printed circuit board 6, thus by flexibility
Circuit board 6 is connected to a fixed with piezoelectric element 10.It addition, conductive adhesive cream can also apply be formed at flexible wired
Substrate 6 side.
Constituting in the case of the resin of conductive adhesive is to be formed by thermoplastic resin, when at piezoelectric element 10 or
After the position coating of the regulation of person's flexible printed circuit board 6 forms conductive adhesive, make piezoelectricity via conductive adhesive
Carry out heating pressurization under the state that element 10 docks mutually with flexible printed circuit board 6, make thermoplastic resin occur to soften and flow,
Recover room temperature afterwards, make thermoplastic resin again harden, thus make flexible printed circuit board 6 be connected with piezoelectric element 10
Fixing.
Here, when wanting the circumference in region equitant with piezoelectric element under overlooking in flexible printed circuit board big
When amount is configured to the conducting particles constituting conductive adhesive, prepare the more conductive adhesive of containing ratio of conducting particles
Cream, forms the many conductive adhesive cream of containing ratio of conducting particles in circumference coating.
Then, use anisotropic conductive component as conductive adhesive in the case of, need control amount of pressurization with
Neighbouring conducting particles is made not contact.
Additionally, conductive adhesive coating is formed at piezoelectric element 10 or flexible printed circuit board 6 by above-mentioned showing
Maneuver, but the sheet clamping of conductive adhesive of lamellar can also be formed in advance in piezoelectric element 10 and flexible cloth
Carry out heating pressurization under state between line substrate 6 to engage.
The piezoelectric vibrating device of present embodiment has piezoelectric element 10 and another with piezoelectric element 10 as shown in Figure 5
The oscillating plate 81 that one interarea engages.
Oscillating plate 81 has the laminal shape of rectangle.Oscillating plate 81 can be adapted to use propylene resin, glass etc. just
Property and elastic big material formed.Additionally, the thickness of oscillating plate 81 is such as set to 0.4mm～1.5mm.
Oscillating plate 81 engages with another interarea of piezoelectric element 10 via engagement member 82.Can be via engagement member
Whole of another interarea is engaged by 82 with oscillating plate 81, it is also possible to engaged in the most whole face.
Engagement member 82 has membranaceous shape.Additionally, engagement member 82 by more soft than oscillating plate 81 and be easier to become
The material of shape is formed, and the elastic modelling quantity such as Young's modulus, rigidity modulus, bulk modulus, rigidity are less than oscillating plate 81.That is,
Engagement member 82 enables oscillating plate 81 to be deformed when vibrating in the driving by piezoelectric element 10, is being applied in
During identical power, bigger deformation can be produced than oscillating plate 81.Further, by another interarea (-z direction of figure of piezoelectric element 10
The interarea of side) integrally it is bonded and fixed to the interarea (interarea of the side ,+z direction of figure) of engagement member 82, by oscillating plate 81
The part of an interarea (interarea of the side ,+z direction of figure) be bonded and fixed to another interarea (-z side of figure of engagement member 82
To the interarea of side).
By using flexible engagement member 82 piezoelectric element 10 and oscillating plate 81 to be engaged, from piezoelectric element
10 when delivering vibration, and flexible engagement member 82 produces bigger deformation than oscillating plate 81.
Now, owing to flexible engagement member 82 can be utilized to relax the shaking of opposite phase from oscillating plate 81 reflection
It is dynamic, so piezoelectric element 10 will not be affected by the vibration of surrounding and can transmit strong vibration to oscillating plate 81.
Wherein, by being made up of at least some of of engagement member 82 viscoelastic body such that it is able to will be from piezoelectricity unit
On the other hand the strong vibration of part 10 transmits to oscillating plate 81, can be absorbed by engagement member 82 and weak be shaken by what oscillating plate 81 reflected
Dynamic, it is preferred in this.It is attached to sticker on the two sides of the base material being made up of non-woven fabrics etc. for instance, it is possible to use
Two-sided tape, comprise the engagement member of the composition having resilient binding agent, and the thickness of these components such as can use
10 μm～2000 μm.
Engagement member 82 can be single component, it is also possible to be the complex being made up of several components.As such
Engagement member 82, for instance, it is possible to be adapted in use to be attached to the double faced adhesive tape of sticker on the two sides of the base material being made up of non-woven fabrics etc.
Carry, have the resilient the most various elastic adhesives of binding agent etc..Additionally, the thickness of engagement member 82 cans be compared to most piezoelectric element 10
The amplitude of bending vibration is big, but due to blocked up, vibration can be made to decay, so being such as set as 0.1mm～0.6mm.Wherein,
In the piezoelectric vibrating device of the present invention, not limiting the material of engagement member 82, engagement member 82 can be by than oscillating plate 81 more
Material that is hard and that be more difficult to deform is formed.Additionally, according to circumstances, it is also possible to it is the composition without engagement member 82.
The piezoelectric vibrating device of this example possessing such composition makes piezoelectric element 10 carry out by being applied in the signal of telecommunication
Bending vibration, thus works as the piezoelectric vibrating device making oscillating plate 81 carry out vibrating.Furthermore it is possible to propped up by not shown
Support component supports the other end (end ,-y direction of figure) on the length direction of oscillating plate 81, the circumference of oscillating plate 81
Deng.
The piezoelectric element 10 that the piezoelectric vibrating device of this example is inhibited owing to making the peeling of surface electrode is constituted,
It is possible to as the piezoelectric vibrating device being driven long-term and stably.
Additionally, oscillating plate 81 is engaged by the piezoelectric vibrating device of this example with another smooth interarea of piezoelectric element 10.
Thereby, it is possible to as the piezoelectric vibrating device that piezoelectric element 10 and oscillating plate 81 are engaged securely.
The portable terminal of present embodiment as shown in Figure 6 to 8, have piezoelectric element 10, electronic circuit (not shown),
Display 91, casing 92, another interarea of piezoelectric element 10 engages with casing 92.It addition, Fig. 6 is to schematically show the present invention
The brief perspective views of portable terminal, Fig. 7 is the fragmentary cross sectional view that line A-A as shown in Figure 6 blocks, and Fig. 8 is by Fig. 6 institute
The fragmentary cross sectional view that the line B-B shown blocks.
Here, flexible engagement member is preferably used, piezoelectric element 10 and casing 92 are engaged.That is, Fig. 7 with
And in Fig. 8, engagement member 82 is flexible engagement member.
By piezoelectric element 10 and casing 92 being engaged by flexible engagement member 82, passing from piezoelectric element 10
When having passed vibration, flexible engagement member 82 is bigger than the deformation of casing 92.
Now, owing to the shaking of opposite phase from casing 92 reflection can be relaxed by flexible engagement member 82
It is dynamic, so piezoelectric element 10 will not be affected by the vibration of surrounding and can transmit strong vibration to casing 92.
Wherein, by being made up of at least some of of engagement member 82 viscoelastic body such that it is able to will be from piezoelectricity unit
The strong vibration of part 10 is transmitted to casing 92, on the other hand can be absorbed, by engagement member 82, the weak vibration reflected by casing 92,
It is preferred on this point.It is attached to the two-sided of sticker on the two sides of the base material being made up of non-woven fabrics etc. for instance, it is possible to use
Adhesive tape, comprising the engagement member of the composition having resilient binding agent, the thickness as these components such as can use 10 μm
～2000 μm.
Further, in this example, piezoelectric element 10 is installed in a part for casing 92 for the lid as display 91, should
A part for casing 92 works as oscillating plate 922.
It addition, show in this example and piezoelectric element 10 engaged with casing 92, but can also be by piezoelectric element 10
Engage with display 91.
Casing 92 has: the casing main body 921 of the box like of 1 face opening, seal the oscillating plate of the opening of casing main body 921
922.This casing 92 (casing main body 921 and oscillating plate 922) can be adapted to use rigidity and the big synthetic resin of spring rate
Formed Deng material.
The circumference of oscillating plate 922 is installed on casing main body 921 via grafting material 93 in vibratile mode.Engage material
Material 93 is formed by material that is more soft than oscillating plate 922 and that be more easily deformed, and Young's modulus, rigidity modulus, volume elasticity
The elastic modelling quantity such as modulus, rigidity are less than oscillating plate 922.That is, grafting material 93 can deform, and being applied in identical power time ratio
The deformation of oscillating plate 922 is big.
Grafting material 93 can be single component, it is also possible to be the complex being made up of several components.As such
Grafting material 93, such as, can be adapted to use the two-sided tape being attached to sticker on the two sides of the base material being made up of non-woven fabrics etc.
Deng.The thickness of grafting material 93 is configured to not vibrate decay because becoming blocked up, such as, be set as 0.1mm～0.6mm.Its
In, in the portable terminal of the present invention, not limiting the material of grafting material 93, grafting material 93 can be by than oscillating plate 922
Material that is harder and that be more difficult to deform is formed.Additionally, according to circumstances, it is also possible to it is the composition without grafting material 93.
As electronic circuit (not shown), for instance, it is possible to illustrate being shown in the image information of display 91, by portable
The acoustic information of terminal transmission carries out circuit and the telecommunication circuit etc. processed.Can be at least 1 in the middle of these circuit, it is possible to
To comprise whole circuit.In addition it is also possible to be the circuit with other functions.And then, it is possible to have multiple electronic circuits.
It addition, electronic circuit is connected with piezoelectric element 10 by not shown connecting wiring.
Display 91 is the display device with the function showing image information, for instance, it is possible to be adapted in use to liquid
The known display such as crystal display, plasma display and organic el display.It addition, display 91 can have tactile
Touch the such input equipment of panel.Additionally, the lid of display 91 (oscillating plate 922) can have the such input of touch panel
Device.And then, overall or display 91 the part of display 91 can work as oscillating plate.
Additionally, the portable terminal of present embodiment is characterised by, makes display 91 or casing 92 produce and pass through ear
The vibration of acoustic information is transmitted in the cartilage in portion or aerial conduction.The portable terminal of this example make oscillating plate (display 91 or
Person's casing 92) directly or contact with ear via other object, it is possible to come by transmitting these vibrations to the cartilage of ear
Transmission acoustic information.That is, oscillating plate (display 91 or casing 92) is made to contact with ear directly or indirectly, it is possible to logical
Cross the cartilage transmitting these vibrations to ear to transmit acoustic information.Thus, for instance, it is possible to also may be used when obtaining the most noisy
To transmit the portable terminal of acoustic information.It addition, the thing between oscillating plate (display 91 or casing 92) and ear
Body can the lid of e.g. portable terminal, can be head type headphones or earpiece formula receiver, as long as vibration can be transmitted
Object can be just any object.Furthermore, it is possible to be the sound by sending from oscillating plate (display 91 or casing 92)
Sound propagates in air, thus transmits the portable terminal of acoustic information.And then, it is also possible to it is by way of transmitting via multiple
The portable terminal of acoustic information.
The piezoelectric element 10 that the portable terminal of this example is inhibited owing to making the peeling of surface electrode is to transmit sound
Message ceases, it is possible to transmit the acoustic information of high-quality long-term and stably.
Additionally, the sound generator 1 of present embodiment has as shown in Figure 9: above-mentioned piezoelectric element 10；Piezoelectricity unit is installed
Part 10 and carry out the oscillating plate 11 vibrated together with piezoelectric element 10 by the vibration of piezoelectric element 10；And it is arranged at vibration
The framework 12 of the peripheral part of plate 11.
Piezoelectric element 10 is to accept the applying of voltage and carries out vibrating thus excited vibrational plate 11 carries out the vibrator that vibrates.
The interarea of piezoelectric element 10 is engaged, by piezoelectric element 10 by binding agents such as epoxy system resin with the interarea of oscillating plate 11
It is curved vibration, thus piezoelectric element 10 can give certain vibration to produce sound to oscillating plate 11.It addition, as making
The length of the piezoelectric element 10 in the case of sound generator 1 is such as preferably 10mm～50mm.The width of piezoelectric element 10
Degree is such as preferably 1mm～20mm.The thickness of piezoelectric element 10 is such as preferably 0.05mm～1.5mm.
Oscillating plate 11 makes its circumference be fixed on framework 12 when producing tension force, can shaking by piezoelectric element 10
Move and vibrate together with piezoelectric element 10.This oscillating plate 11 can use the various material such as resin, metal to be formed, such as
Oscillating plate 3 can be constituted by resin moldings such as the polyethylene of thickness 10～200 μm, polyimides, polypropylene.Resin molding is elastic
The material that the Q-value of rate and machinery is lower than metallic plate etc., so by being made up of oscillating plate 11 resin molding, it is possible to make oscillating plate
11 are curved vibration with large magnitude, make the width of the resonance peak in the frequency characteristic of acoustic pressure widen, height reduction, thus
Reduce resonance peak and the difference of valley (dip).
Framework 12 works as the supporter being supported oscillating plate 11 by the circumference of oscillating plate 11, such as, can use
The various material of metal, the resins etc. such as rustless steel is formed.This framework 12 can be formed, also by a frame component as shown in Fig. 9 (b)
Can be formed by two frame components as shown in Fig. 9 (c).In this case, by being come clamping vibration plate 11, energy by two frame components
Enough make the tension stability of oscillating plate 11.It addition, the thickness of frame component is such as set to 100～5000 μm.
In the sound generator 1 of this example, as shown in Fig. 9 (b) and Fig. 9 (c), the most also have and be set to piezoelectricity unit
The resin bed 13 carrying out at least partially covering on the surface of part 10 and oscillating plate 11.As resin bed 13, it is possible to such as make
With propylene system resin.The effectiveness in vibration suppression of appropriateness can be caused by burying piezoelectric element 10 in such resin bed 13 underground, so
Resonance phenomena can be suppressed, the peak value in the frequency characteristic of acoustic pressure, valley are suppressed less.It addition, such as Fig. 9 (b) and Fig. 9
C shown in (), resin bed 13 can be formed as becoming identical height with framework 12.
When such sound generator 1 is as mentioned above due to the surface electrode of piezoelectric element 10 is difficult to peel off and displacement is long
Between keep stable, it is possible to as the sound generator of excellent durability.
Then, use Figure 10 and Figure 11 to illustrate to be equipped with the sound generation device of sound generator 1 and electronics sets
Standby.Figure 10 is the figure of the composition of the sound generation device 20 representing that embodiment relates to, and Figure 11 represents that embodiment relates to
The figure of the composition of electronic equipment 50.It addition, in both figures, the element needed for explanation is only shown, and is omitted for general
The record of element.
Sound generation device 20 is the so-called such pronunciation device of speaker, as shown in Figure 10, such as, possesses sound equipment and occurs
Device 1 and the casing 30 of receiving sound generator 1.The sound equipment that casing 30 makes sound generator 1 send vibes in inside,
And make sound equipment be radiated to outside from the not shown opening being formed at casing 30.By having such casing 30, it is thus possible to
Enough improve the acoustic pressure at such as low-frequency band.
Additionally, sound generator 1 can be equipped in various electronic equipment 50.Such as, in the most shown Figure 11, if
Electronic equipment 50 is portable phone, the such mobile terminal device of tablet terminal.
As shown in figure 11, electronic equipment 50 possesses electronic circuit 60.Electronic circuit 60 is such as connect by controller 50a, transmission
Receipts portion 50b, press key input section 50c, mike input unit 50d are constituted.Electronic circuit 60 is connected with sound generator 1, and
There is the function exported to sound generator 1 by acoustical signal.Sound generator 1 is based on the sound letter inputted from electronic circuit 60
Number produce sound equipment.
Additionally, electronic equipment 50 possesses: display part 50e, antenna 50f, sound generator 1.Additionally, electronic equipment 50 possesses
Accommodate the casing 40 of these each devices.It addition, in fig. 11, illustrate and contain headed by controller 50a in 1 casing 40
The state of whole each device, but do not limit the receiving mode of each device.In the present embodiment, at least can be by electronics electricity
Road 60 and sound generator 1 are contained in 1 casing 40.
Controller 50a is the control portion of electronic equipment 50.The control based on controller 50a of transmission and reception unit 50b come via
Antenna 50f carries out the transmission reception etc. of data.Press key input section 50c is the entering apparatus of electronic equipment 50, presses operator
Key input operation accepts.Mike input unit 50d is the entering apparatus of electronic equipment 50 equally, defeated to the sound of operator
Enter operation etc. to accept.Display part 50e is the display output device of electronic equipment 50, and control based on controller 50a is entered
The output of row display information.
Further, sound generator 1 carrys out action as the sound equipment output device in electronic equipment 50.It addition, sound generator 1
It is connected with the controller 50a of electronic circuit 60, accepts the applying of voltage that controlled by controller 50a and send sound equipment.
It addition, in fig. 11, if electronic equipment 50 is illustrated for portable termination, but it is not required for
The classification of electronic equipment 50, can apply to have in the various civil equipment of the function sending sound equipment.Such as, slim TV
Machine, vehicle-mounted audio device it is of course possible to, it is possible to use in having the product of " speech " such function sending sound equipment, if
Citing can be then the various products such as vacuum cleaner, washing machine, refrigerator, microwave oven.
Embodiment
The object lesson of the piezoelectric element of the present invention is described.Specifically, the piezoelectricity unit shown in Fig. 1 has been made as shown below
Part.
If piezoelectric element is length 23.5mm, width 3.3mm, the rectangular shape of thickness 0.5mm.Additionally, piezoelectric element
Being set to structure piezoelectric body layer that thickness is 30 μm and internal electrode being alternately laminated, the sum of piezoelectric body layer is set to 16
Layer.Piezoelectric body layer is formed by lead zirconate titanate.Additionally, internal electrode uses the alloy of silver palladium.
After the ceramic green sheet having printed the conductive paste formed by silver palladium is carried out stacking, its pressurization is close to, on rule
Carry out roasting with 1000 DEG C after carrying out defat at a temperature of Ding, obtain stacking sintered body.
Now, carried out the pattern formation of round-shaped second area by silver palladium cream in face, top layer, carry out roasting simultaneously.
Then, to print silver paste than internal electrode in the way of each long 1mm at the two ends of width, it is fired shape
Become surface electrode.
Then, via surface electrode between internal electrode (between the 1st electrode and the 2nd electrode) apply 2kV/mm electric-field strength
The voltage of degree, piezoelectric element is implemented polarization.
Afterwards, on the surface of the piezoelectric element engaged with flexible printed circuit board, coating is formed containing the resin being overplated with gold
Ball is as the conductive adhesive of conducting particles.Now, at the periphery of flexible printed circuit board Yu the equitant region of piezoelectric element
The width in portion be 0.3mm region in coating form the conductive adhesive of conducting particles containing 20vol%, flexible wired
Substrate forms the electric conductivity of the conducting particles containing 10vol% with coating in the region of the inner side in the equitant region of piezoelectric element
Binding agent.
Afterwards, heating pressurization is carried out when being docked by flexible printed circuit board, thus by piezoelectric element and flexible cloth
Piezoelectric element is also fixed on flexible printed circuit board by the conducting of line substrate, thus has made the piezoelectric element (sample of the embodiment of the present invention
Product No.1).It addition, as above-mentioned conductive adhesive, employ conducting in a thickness direction, do not turn in the in-plane direction
Anisotropic conductive material.
Additionally, as comparative example, in addition to the formation process of second area, make and the above-mentioned identical composition of sample No.1
The scope of the present invention outside piezoelectric element (sample No.2).
Further, for each piezoelectric element, via flexible printed circuit board, piezoelectric element is applied with under the frequency of 1kHz
The sine wave signal of valid value ± 10Vrms, is driven test, and result is, sample No.1,2 all obtains the displacement with 100 μm
The bending vibration of amount.
Then, inputting the sine wave signal of virtual value 3V making frequency change between 0.2～5000Hz, confirmation is
The no minimizing that will not produce the displacement caused due to sparking (spark) of flexible printed circuit board composition surface, at this
In the piezoelectric element of the sample No.1 of bright embodiment, can't see the minimizing of displacement.On the other hand, outside the scope of the present invention
In the piezoelectric element of sample No.2, the exception having measured displacement reduces.
Afterwards, it is applied continuously in the sine wave signal of virtual value ± 10Vrms with 100,000 cycles and is driven test.This
The extraneous sample No.2 amount of being subjected to displacement of invention reduces, and when 90,000 cycle, flexible printed circuit board there occurs from piezoelectric element
Peel off.
On the other hand, the piezoelectric element of the sample No.1 of the embodiment of the present invention have passed through 100,000 weeks after dates, does not the most occur
Displacement reduces and proceeds to drive.Additionally, the most do not see the peeling of flexible printed circuit board.
The piezoelectric element of the application of the invention, even if in the case of having carried out the most continuously driving, also will not produce
The problem that raw flexible printed circuit board peels off from piezoelectric element, it is possible to confirm the persistency of excellence.
Symbol description:
10: piezoelectric element
2: internal electrode
21: the 1 electrodes
22: the 2 electrodes
3: piezoelectric body layer
4: duplexer
41: active portion
42: non-active portion
5: surface electrode
51: the 1 surface electrodes
52: the 2 surface electrodes
53: the 3 surface electrodes
501: first area
502: second area
6: flexible printed circuit board
81: oscillating plate
82: engagement member
91: display
92: casing
921: casing main body
922: oscillating plate
93: grafting material
1: sound generator
11: oscillating plate
12: framework
13: resin bed
20: sound generation device
30,40: casing
50: electronic equipment
50a: controller
50b: transmission and reception unit
50c: press key input section
50d: mike input unit
50e: display part
50f: antenna
60: electronic circuit
Claims (12)
1. a piezoelectric element, it is characterised in that possess:
By the duplexer of the tabular that internal electrode and piezoelectric body layer are laminated mutually；With
The surface electrode electrically connected with above-mentioned internal electrode on an interarea of this duplexer,
Above-mentioned surface electrode has first area and second area, and above-mentioned first area is the region with silver as main constituent, above-mentioned
Second area is as main constituent and to be set to the region connected with above-mentioned piezoelectric body layer with silver palladium,
Above-mentioned first area covers above-mentioned second area.
Piezoelectric element the most according to claim 1, it is characterised in that
Above-mentioned second area is overlooked lower for round-shaped or elliptical shape.
3. a piezoelectric element, it is characterised in that possess:
By the duplexer of the tabular that internal electrode and piezoelectric body layer are laminated mutually；With
The surface electrode electrically connected with above-mentioned internal electrode on an interarea of this duplexer,
Above-mentioned surface electrode has first area and second area, and above-mentioned first area is the region with silver as main constituent, above-mentioned
Second area is as main constituent and to be set to the region connected with above-mentioned piezoelectric body layer with silver palladium,
Above-mentioned internal electrode is made up of the 1st electrode and the 2nd electrode, and above-mentioned duplexer has: above-mentioned 1st electricity of above-mentioned internal electrode
Above-mentioned 1st electrode of pole and the above-mentioned 2nd the most equitant active portion of electrode and above-mentioned internal electrode is with above-mentioned
The 2nd the most non-overlapping non-active portion of electrode, above-mentioned second area is positioned in active portion.
Piezoelectric element the most according to claim 3, it is characterised in that
Near above-mentioned second area border in above-mentioned active portion and between above-mentioned non-active portion.
5. a piezoelectric vibrating device, it is characterised in that have:
Piezoelectric element according to any one of Claims 1 to 4；With
The oscillating plate engaged with another interarea of this piezoelectric element.
Piezoelectric vibrating device the most according to claim 5, it is characterised in that
Flexible engagement member is used to be engaged with above-mentioned oscillating plate by above-mentioned piezoelectric element.
7. a portable terminal, it is characterised in that
Have: piezoelectric element, electronic circuit, display and the casing according to any one of Claims 1 to 4,
Another interarea of above-mentioned piezoelectric element engages with aforementioned display device or above-mentioned casing.
Portable terminal the most according to claim 7, it is characterised in that
Flexible engagement member is used to be engaged with aforementioned display device or above-mentioned casing by above-mentioned piezoelectric element.
9. a sound generator, it is characterised in that have:
Piezoelectric element according to any one of Claims 1 to 4；
This piezoelectric element is installed and is carried out the oscillating plate vibrated by the vibration of this piezoelectric element together with this piezoelectric element；
With
It is arranged at the framework of the peripheral part of this oscillating plate.
Sound generator the most according to claim 9, it is characterised in that
There is the resin bed covered at least partially on the surface being set to above-mentioned piezoelectric element and above-mentioned oscillating plate.
11. 1 kinds of sound generation devices, it is characterised in that possess:
Sound generator described in claim 9 or 10；With
Accommodate the casing of this sound generator.
12. 1 kinds of electronic equipments, it is characterised in that possess:
Sound generator described in claim 9 or 10；
The electronic circuit being connected with this sound generator；With
The casing that this electronic circuit and above-mentioned sound generator are accommodated,
Above-mentioned electronic equipment has the function making sound equipment produce from above-mentioned sound generator.
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2012240224 | 2012-10-31 | ||
| JP2012-240224 | 2012-10-31 | ||
| PCT/JP2013/076562 WO2014069138A1 (en) | 2012-10-31 | 2013-09-30 | Piezoelectric element, and piezoelectric vibration device, portable terminal, sound generator, sound generation device and electronic device each of which is provided with piezoelectric element |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN104285309A CN104285309A (en) | 2015-01-14 |
| CN104285309B true CN104285309B (en) | 2016-11-30 |
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ID=
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102450034A (en) * | 2009-01-27 | 2012-05-09 | 太阳诱电株式会社 | Piezoelectric sound generating body |
| EP2854192A1 (en) * | 2012-05-14 | 2015-04-01 | Kyocera Corporation | Piezoelectric actuator, piezoelectric vibration device, and mobile terminal |
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102450034A (en) * | 2009-01-27 | 2012-05-09 | 太阳诱电株式会社 | Piezoelectric sound generating body |
| EP2854192A1 (en) * | 2012-05-14 | 2015-04-01 | Kyocera Corporation | Piezoelectric actuator, piezoelectric vibration device, and mobile terminal |
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