CN104271520A - Sound wave levitation device, sound wave levitation method, plate glass manufacturing apparatus, and plate glass manufacturing method - Google Patents
Sound wave levitation device, sound wave levitation method, plate glass manufacturing apparatus, and plate glass manufacturing method Download PDFInfo
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- CN104271520A CN104271520A CN201380022995.5A CN201380022995A CN104271520A CN 104271520 A CN104271520 A CN 104271520A CN 201380022995 A CN201380022995 A CN 201380022995A CN 104271520 A CN104271520 A CN 104271520A
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- Prior art keywords
- oscillating plate
- sound wave
- glass ribbon
- width
- float
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G54/00—Non-mechanical conveyors not otherwise provided for
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- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B17/00—Forming molten glass by flowing-out, pushing-out, extruding or drawing downwardly or laterally from forming slits or by overflowing over lips
- C03B17/06—Forming glass sheets
- C03B17/061—Forming glass sheets by lateral drawing or extrusion
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65H—HANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
- B65H23/00—Registering, tensioning, smoothing or guiding webs
- B65H23/04—Registering, tensioning, smoothing or guiding webs longitudinally
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B35/00—Transporting of glass products during their manufacture, e.g. hot glass lenses, prisms
- C03B35/14—Transporting hot glass sheets or ribbons, e.g. by heat-resistant conveyor belts or bands
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B35/00—Transporting of glass products during their manufacture, e.g. hot glass lenses, prisms
- C03B35/14—Transporting hot glass sheets or ribbons, e.g. by heat-resistant conveyor belts or bands
- C03B35/22—Transporting hot glass sheets or ribbons, e.g. by heat-resistant conveyor belts or bands on a fluid support bed, e.g. on molten metal
- C03B35/24—Transporting hot glass sheets or ribbons, e.g. by heat-resistant conveyor belts or bands on a fluid support bed, e.g. on molten metal on a gas support bed
- C03B35/246—Transporting continuous glass ribbons
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G2201/00—Indexing codes relating to handling devices, e.g. conveyors, characterised by the type of product or load being conveyed or handled
- B65G2201/02—Articles
- B65G2201/0214—Articles of special size, shape or weigh
- B65G2201/022—Flat
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65H—HANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
- B65H2407/00—Means not provided for in groups B65H2220/00 – B65H2406/00 specially adapted for particular purposes
- B65H2407/40—Means for adding commercial value, e.g. sound producing or logos
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65H—HANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
- B65H2515/00—Physical entities not provided for in groups B65H2511/00 or B65H2513/00
- B65H2515/82—Sound; Noise
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65H—HANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
- B65H2801/00—Application field
- B65H2801/61—Display device manufacture, e.g. liquid crystal displays
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Re-Forming, After-Treatment, Cutting And Transporting Of Glass Products (AREA)
- Glass Compositions (AREA)
- Registering, Tensioning, Guiding Webs, And Rollers Therefor (AREA)
- Jigging Conveyors (AREA)
- Joining Of Glass To Other Materials (AREA)
Abstract
A sound wave levitation device levitates a glass ribbon that is continuously drawn out from a plate glass forming device by radiation pressure of sound waves when the glass ribbon is conveyed, and is provided with: a diaphragm having an upper surface for radiating sound waves to a portion with a temperature of 300-800 DEG C of the glass ribbon with a width of 1-8 m and a plate thickness of a central portion thereof in a width direction of 0.05-3 mm; and a reflector having an upper surface for reflecting sound waves radiated from the lower surface of the diaphragm. The longitudinal direction of the diaphragm is parallel to the width direction of the glass ribbon, and the cross-sectional shape of the upper surface of the diaphragm is an upward protruding shape.
Description
Technical field
The present invention relates to sound wave float-up device, sound wave float method, sheet glass manufacturing installation and sheet glass manufacture method.
Background technology
In the past, as the device flatly carried by the glass ribbon pulled out continuously from sheet glass building mortion, use multiple conveying roller (for example, referring to patent documentation 1).
On the other hand, in recent years, as the technology of bearing objects non-contactly, propose and make oscillating plate vibrator and made the technology (for example, referring to patent documentation 2) that object floats to the top of oscillating plate by the radiation pressure from the sound wave of oscillating plate.
[at first technical literature]
[patent documentation]
[patent documentation 1] Japanese Laid-Open 2009-155164 publication
The flat 7-24415 publication of [patent documentation 2] Japanese Laid-Open
Summary of the invention
[inventing the problem that will solve]
But when being attached with impurity or scar at the periphery of conveying roller, conveying roller often revolves and turns around, and there is the problem causing scar to the lower surface of glass ribbon.
On the other hand, the technology that above-mentioned patent documentation 2 is recorded is to carry out premised on the situation of noncontact supporting to the object of room temperature, and the situation of the object than room temperature high temperature being carried out to noncontact supporting is not mentioned.
The present invention makes in view of above-mentioned problem, its object is to provide a kind of sound wave float-up device of the damage of glass ribbon and sound wave of can suppressing to float method.
[for solving the scheme of problem]
In order to solve above-mentioned problem, a scheme of the present invention provides a kind of sound wave float-up device, when carrying the glass ribbon pulled straight from sheet glass building mortion, utilizes the radiation pressure of sound wave that this glass ribbon is floated, wherein,
Described sound wave float-up device possesses:
Oscillating plate, has and is 1m ~ 8m and the thickness of slab of width central part is temperature in the described glass ribbon of 0.05mm ~ 3mm is the upper surface of the partial radiation sound wave of 300 DEG C ~ 800 DEG C to width; And
Tamper, has the upper surface reflected the sound wave of the lower surface radiation from this oscillating plate,
The length direction of described oscillating plate is parallel with the width of described glass ribbon,
The shape of cross section of the upper surface of described oscillating plate is upwards convex.
In addition, another program of the present invention relates to a kind of sound wave and floats method, when carrying the glass ribbon pulled straight from sheet glass building mortion, utilizes the radiation pressure of sound wave that this glass ribbon is floated, wherein,
Utilize and make width for 1m ~ 8m and the part that temperature the thickness of slab of the width central part described glass ribbon that is 0.05mm ~ 3mm is 300 DEG C ~ 800 DEG C is floated from described oscillating plate from the radiation pressure of the sound wave of the upper surface radiation of oscillating plate, and utilize the sound wave of the upper surface of tamper to the lower surface from described oscillating plate to reflect
The length direction of described oscillating plate is parallel with the width of described glass ribbon,
The shape of cross section of the upper surface of described oscillating plate is upwards convex.
[invention effect]
According to the present invention, a kind of sound wave float-up device of the damage of glass ribbon and sound wave of suppressing is provided to float method.
Accompanying drawing explanation
Side view cutaway drawing when Fig. 1 is the sheet glass manufacturing installation of the sound wave float-up device possessing one embodiment of the present invention stable.
Side view cutaway drawing when Fig. 2 is the starting of sheet glass manufacturing installation 100.
Fig. 3 is the sectional view of the III-III line along Fig. 1.
Fig. 4 is the vertical view of the arrangement representing oscillating plate and support roll.
Fig. 5 is the enlarged view of the major portion representing Fig. 1.
Fig. 6 is the sectional view of the variation 1 representing Fig. 5.
Fig. 7 is the sectional view of the variation 2 representing Fig. 5.
Fig. 8 is the sectional view of the variation 3 representing Fig. 5.
Fig. 9 is the sectional view of the variation 4 representing Fig. 5.
Figure 10 is the sectional view of the variation 5 representing Fig. 5.
Figure 11 is the figure of the variation of the shape representing oscillating plate.
Embodiment
Below, with reference to accompanying drawing, illustrate for implementing mode of the present invention.It should be noted that, in the drawings and in which, same or corresponding the structure same or corresponding label of mark is omitted the description.
Side view cutaway drawing when Fig. 1 is the sheet glass manufacturing installation of the sound wave float-up device possessing one embodiment of the present invention stable.Side view cutaway drawing when Fig. 2 is the starting of sheet glass manufacturing installation 100.Fig. 3 is the sectional view of the III-III line along Fig. 1.Fig. 4 is the vertical view of the arrangement representing oscillating plate and support roll.Fig. 5 is the enlarged view of the major portion representing Fig. 1.In Figure 5, the curvature geometric ratio reality of the flexure of glass ribbon, oscillating plate is illustrated turgidly.
As shown in Figure 1, sheet glass manufacturing installation 100 possesses: dissolved by frit 10 and obtain the dissolver 200 of melten glass 12; The melten glass 12 obtained by dissolver 200 is formed and obtains the building mortion 300 of the glass ribbon 14 of band plate-like.And sheet glass manufacturing installation 100 possesses: the annealing device 400 glass ribbon 14 be shaped by building mortion 300 being carried out to slow cooling; The lifting gear 500 of glass ribbon 14 is carried from building mortion 300 to annealing device 400.Lifting gear 500 is arranged between building mortion 300 and annealing device 400.
Dissolver 200 pairs of frits 10 dissolve and obtain melten glass 12.Dissolver 200 possesses: the dissolving tank 204 of collecting melten glass 12; And above the melten glass 12 be contained in dissolving tank 204, form the burner 206 of flame.The frit 10 dropped into dissolving tank 204 is fused into melten glass 12 gradually by the flame radiation heat formed from burner 206.Melten glass 12 supplies from dissolving tank 204 continuously to building mortion 300.
Building mortion 300 is the devices of the glass ribbon 14 forming fabricated ribbon tabular to the melten glass 12 obtained by dissolver 200.Building mortion 300 also can be such as float forming device.The bath face of melten glass 12 to the molten tin 304 in bath 302 supplies by float forming device continuously, is configured as band plate-like.The glass ribbon 14 be shaped, by the bath face pull-up of lifting gear 500 from molten tin 304, is carried to annealing device 400.
It should be noted that, building mortion 300 is not defined as float forming device, can be such as melt building mortion yet.The inside of melten glass 12 to chute supplies by fusing building mortion continuously, and making to merge shape from the chute melten glass 12 that both sides are overflowed to the left and right at the lower edge of chute is band plate-like.
Lifting gear 500 possesses: be configured in the heat insulating structure body 502 between building mortion 300 and annealing device 400; At the runner 504 of the internal space of heat insulating structure body 502 configuration.Heat insulating structure body 502 is around the transport path of glass ribbon 14.In the inside of heat insulating structure body 502, in order to regulate the temperature of glass ribbon 14, also well heater or water cooler can be set.Runner 504 rotates by not shown rotating machine, by the bath face pull-up of glass ribbon 14 from molten tin 304, carries to annealing device 400.
Annealing device 400 carries out slow cooling to the glass ribbon 14 be shaped by building mortion 300.Annealing device 400 possesses leer 402 and sound wave float-up device 410.It should be noted that, sound wave float-up device 410 can be located at either party in annealing device 400 and lifting gear 500, also can arrange across two sides.
Leer 402 has multiple well heater 402a in inside.Well heater 402a extends abreast with the width of glass ribbon 14 as shown in Figure 3.It should be noted that, well heater 402a also can be divided into multiple along the width of leer 402.Glass ribbon 14 while flatly carried, by slow cooling, takes out of from the outlet of leer 402 in leer 402.Then, glass ribbon 14 is cut into desired size shape, becomes product and sheet glass.
Sound wave float-up device 410 utilizes the radiation pressure of sound wave to make to be floated by the glass ribbon 14 flatly carried in leer 402, supporting glass band 14 non-contactly.
The oscillating plate 411 that sound wave float-up device 410 possesses the sound wave that radiation makes glass ribbon 14 float and the tamper 450 that the sound wave of the lower surface from oscillating plate 411 is reflected.Width W 0 (with reference to Fig. 3, Fig. 4) for 1m ~ 8m and the thickness of slab of width central part is temperature in the glass ribbon 14 of 0.05mm ~ 3mm be 300 DEG C ~ 800 DEG C (are preferably 500 DEG C ~ 800 DEG C, are more preferably 600 DEG C ~ 800 DEG C) part by the sound wave from oscillating plate 411 radiation radiation pressure and float.The above-mentioned plurality of flexible of glass ribbon 14 and easily damaging, therefore preferably utilizes the radiation pressure from the sound wave of oscillating plate 411 to support in a non contact fashion.It should be noted that, oscillating plate 411 floats and uses in order to the part utilizing the radiation pressure of sound wave and make the temperature in glass ribbon 14 be less than 300 DEG C.
The width W 0 of glass ribbon 14 is preferably 2m ~ 6m.The thickness of slab of the width central part of glass ribbon 14 is preferably more than 0.1mm.And the thickness of slab of the width central part of glass ribbon 14 is preferably below 1mm, is more preferably below 0.7mm.
(oscillating plate)
Oscillating plate 411 is vibrator by oscillator 412, carries out flexural vibration and vertically radiative acoustic wave along the vertical direction.Utilize the radiation pressure from oscillating plate 411 sound wave of radiation upward, glass ribbon 14 is floated to the top of oscillating plate 411.
The sound wave formed by the flexural vibration of oscillating plate 411 is preferably standing wave.If row ripple, then sometimes glass ribbon 14 is carried to the direction be not intended to due to the radiation pressure of the sound wave from oscillating plate 411.It should be noted that, by making shape, the configuration optimization of oscillating plate 411, the radiation pressure from the sound wave of oscillating plate 411 also can be utilized to be carried to desired direction by glass ribbon 14.
The frequency of the flexural vibration of oscillating plate 411 is preferably 15kHz ~ 50kHz.When frequency is lower than 15kHz, frequency becomes the zone of audibility of the mankind, and sound becomes the obstacle of operation.More than 50kHz vibration produce power supply, oscillator 412 more difficult in nature.Frequency is more preferably 18kHz ~ 30kHz, and then is preferably 19kHz ~ 25kHz, is particularly preferably 19kHz ~ 21kHz.
The amplitude of the flexural vibration of oscillating plate 411 is preferably 0.25 μm ~ 50 μm.At this, " amplitude " is the maximum displacement in the span centre of oscillation.When amplitude is more than 0.25 μm, glass ribbon 14 fully floats, and when amplitude is below 50 μm, can suppress the breakage of oscillating plate 411 grade.
The length direction of oscillating plate 411 is parallel with the width of glass ribbon 14.The width of oscillating plate 411 relative to the width of glass ribbon 14 and above-below direction vertical.
Length direction one end of oscillating plate 411 is connected with oscillator 412 via vibration transfer member such as loudspeaker 414, intensifier boosters 416.The vibration of oscillator 412 is transmitted to length direction one end of oscillating plate 411 by vibration transfer member.It should be noted that also can there is no vibration transfer member, in this case, oscillating plate 411 is directly connected with oscillator 412.
On the other hand, length direction the other end of oscillating plate 411 becomes free end.It should be noted that, length direction the other end of oscillating plate 411 also can be anchor portion, also can be connected with oscillator 412 via vibration transfer member in the same manner as length direction one end of oscillating plate 411.
Such as shown in Fig. 5, oscillating plate 411 arranges multiple at spaced intervals on the throughput direction of glass ribbon 14.The spacing P (with reference to Fig. 5) of oscillating plate 411 is preferably 200mm ~ 700mm.When spacing P is below 200mm, in device layout, support roll 490 described later cannot be set.On the other hand, when spacing P is more than 700mm, be difficult to float non-contactly.The spacing P of oscillating plate 411 is more preferably 300mm ~ 500mm.
But owing to being arranged at spaced intervals by multiple oscillating plate 411, therefore there is deflection deformation in glass ribbon 14 under gravity slightly.Glass ribbon 14 is far away apart from oscillating plate 411, more sagging under gravity.
Therefore, the shape of cross section of the upper surface of oscillating plate 411 is illustrated in figure 5 upwards convex.At this, " convex " refer to the part of go-and-retum and link two ends line segment compared be in top.Following effect can be obtained thus.(1) the width two-end part of the almost non-radiative acoustic wave in the upper surface of oscillating plate 411, below width central part, can prevent the contact at the glass ribbon 14 and width both ends of oscillating plate 411 bent because of gravity.(2) widen outside the width of oscillating plate 411 from the upper surface of oscillating plate 411 towards the sound wave of glass ribbon 14, therefore, it is possible to prevent the contact at the glass ribbon 14 and width both ends of oscillating plate 411 bent because of gravity.
The upper surface of oscillating plate 411 as shown in Figure 5 under cross-sectional view, the straight section with level and the curved surface portion extended from the two ends of straight section.Curved surface portion has with the shape more raised up to width (left and right directions in figure) outer row and then mode more downward.The radius-of-curvature r11 of curved surface portion is such as 150mm ~ 1000mm.Width (the being left and right directions size in the drawings) W12 of curved surface portion is 5% ~ 30% of the width W 11 of oscillating plate 411.
The shape of cross section of the lower surface of oscillating plate 411 also can be the linearity of level.
The upper surface of oscillating plate 411 to flat board grinds and easily obtains.
Width (when from top view, when oscillating plate 411 is tetragon, the minor face of oscillating plate 411 the is long) W11 of oscillating plate 411 is preferably 50mm ~ 200mm.If width W 11 is less than 50mm, then the area in the sound radiation face of oscillating plate 411 is too small, and glass ribbon 14 floats difficulty from oscillating plate 411.When width W 11 is more than 200mm, the vibration modes of oscillating plate 411 is difficult to become fringe, and the radiation pressure of sound wave reduces.The width W 11 of oscillating plate 411 is more preferably 70mm ~ 150mm, more preferably 80mm ~ 120mm.
The width W 11 of oscillating plate 411 is preferably 50% ~ 150% of the width W 21 of tamper 450.When W11 is less than 50% of W21, tamper 450 easily contacts with glass ribbon 14.On the other hand, when W11 more than W21 150% time, oscillating plate 411 is difficult to float from tamper 450.
The length L1 (with reference to Fig. 3) of oscillating plate 411 is preferably 95% ~ 200% of the width W 0 of glass ribbon 14.When L1 is less than 95% of W0, the end of oscillating plate 411 contacts with glass ribbon 14 and produces scar.On the other hand, when L1 more than W0 200% time, in device layout arrange become difficulty.L1 is more preferably 100% ~ 200% of W0.
The length L1 (with reference to Fig. 3) of oscillating plate 411 is preferably 50% ~ 120% of the length L2 of tamper 450.When L1 is less than 50% of L2, oscillating plate 411 bends to lower convexity, and the length direction central part of oscillating plate 411 hangs down downwards.On the other hand, when L1 more than L2 120% time, in device layout arrange become difficulty.
Oscillating plate 411 is such as formed by stainless steel, carbon, aluminum or aluminum alloy, titanium or titanium alloy or nickel or nickelalloy etc.The excellent heat resistance of stainless steel or carbon, the tenacity excellent of aluminum or aluminum alloy.When using carbon, also the atmosphere in leer 402 can be set to the inert atmosphere of nitrogen atmosphere etc.And oscillating plate 411 also can be formed by pottery or manganese steel, cast iron etc.As the material of oscillating plate 411, be preferably stainless steel, aluminum or aluminum alloy, be more preferably stainless steel.When the material of oscillating plate 411 is stainless steel, aluminum or aluminum alloy, the thickness of oscillating plate 411 is such as 0.5mm ~ 5mm, is preferably 1mm ~ 4mm.
Oscillating plate 411, in order to improve erosion resistance or scale resistance, also can carry out surface application.As coating method, such as sputtering process, plating, vapour deposition method (comprising PVD method and CVD) etc. can be enumerated.The overlay formed by sputtering process comprises the superhard materials such as such as wolfram varbide, pottery or the refractory alloy such as Ni system alloy, Cr system alloy.The overlay formed by plating comprises such as Cr system alloy or Ni system alloy.The overlay formed by vapour deposition method comprises such as quasi-diamond (DLC).
A part for oscillating plate 411 is exposed to the outside of leer 402.Such as shown in Fig. 3, the through leer 402 of oscillating plate 411, the length direction both ends of oscillating plate 411 are exposed to the outside of leer 402.Oscillator 412 can be configured in the outside of leer 402, oscillator 412 is supported the first lifting device 460 etc. for being elevated.
(oscillator)
Oscillator 412 makes oscillating plate 411 vibrator, arranges according to each oscillating plate 411.Multiple oscillator 412 can vibrate with same phase, also can vibrate with out of phase.
Oscillator 412 can be ultrasonic oscillator, such as, be made up of piezoelectric element or magneticstrain element etc.Oscillator 412, under the control of computer equal controller, carries out longitudinal vibration.When this longitudinal vibration is transmitted to oscillating plate 411, oscillating plate 411 carries out flexural vibration along the vertical direction, vertically produces sound wave from oscillating plate 411.
Oscillator 412, in order to suppress the deterioration caused by heat, is arranged on the outside of leer 402 as shown in Figure 3.Be provided with the hot box 430 of accommodating oscillator 412 etc. in the outside of leer 402, the temperature in hot box 430 remains desired temperature range by water cooler 440.
(hot box)
Hot box 430 also can arrange multiple.Oscillator 412, first lifting device 460 etc. is configured with in a hot box 430.The second lifting device 470 etc. is configured with in another hot box 430.
Hot box 430 is such as made up of housing 432 and the lagging material 434 etc. be pasted onto on the inner-wall surface of housing 432.Housing 432 is such as made up of the high temperature steel etc. of SS material etc., plays a role as the sound-insulation member blocked by the noise produced by oscillator 412 etc.Lagging material 434 is such as made up of glass wool, plasterboard etc., also plays a role as by the sound absorbent material of the noise absorption produced by oscillator 412 etc.
Hot box 430 can be fixed in the mode contacted with leer 402, but in order to limit the heat trnasfer from leer 402, such as, shown in Fig. 3, also can be separated fixing relative to leer 402.
(water cooler)
Water cooler 440 is for remaining desired temperature range by the temperature in hot box 430.Water cooler 440 is arranged according to each hot box 430, and is fixed on hot box 430.
Water cooler 440 is such as blown into cooling gas in hot box 430, or cools the outer wall of hot box 430, thus the inside of hot box 430 is remained desired temperature range.
(tamper)
Tamper 450 has the upper surface reflected towards oscillating plate 411 by the sound wave of the lower surface radiation from oscillating plate 411.By the radiation pressure of this reflection wave, oscillating plate 411 floats to the top of tamper 450, and the deformation induced by gravity of oscillating plate 411 reduces.This effect is remarkable when length direction the other end of oscillating plate 411 is free end.
Tamper 450 in order to improve section second moment, and has such as roughly corner ring-type, inverted U-shaped, I shape, T-shaped, the cross-sectional shape of L-shaped or Z-shaped (in the drawings for roughly corner ring-type) of falling.It should be noted that, tamper 450 also can be tabular.When considering the rigidity of tamper 450, the cross-sectional shape of tamper 450 is preferably roughly corner ring-type.
Tamper 450 arranges multiple at spaced intervals on the throughput direction of glass ribbon 14.Tamper 450 is arranged according to each oscillating plate 411, and the length direction of tamper 450 is parallel with the width of glass ribbon 14.The width of tamper 450 relative to the width of glass ribbon 14 and above-below direction vertical.
The sound wave of the lower surface radiation from oscillating plate 411 reflects towards oscillating plate 411 by the upper surface of tamper 450.The shape of cross section of the upper surface of tamper 450 also can be the linearity of level.The manufacture (processing) of tamper 450 is easy.
Under the state that the mean value in the gap between tamper 450 and oscillating plate 411 vibrates at oscillating plate 411, be preferably 30 μm ~ 120 μm.When the mean value in the gap between tamper 450 and oscillating plate 411 is less than 30 μm, oscillating plate 411 easily contacts with tamper 450.On the other hand, the situation of mean value more than 120 μm in the gap between tamper 450 and oscillating plate 411 means that the amplitude of oscillating plate 411 is excessive, means that oscillating plate 411 is easily damaged.Under the state that the mean value in the gap between tamper 450 and oscillating plate 411 vibrates at oscillating plate 411, be more preferably 50 μm ~ 100 μm.
The width W 21 of tamper 450 is preferably 50mm ~ 200mm.When the width W 21 of tamper 450 is less than 50mm, the area of the plane of reflection of tamper 450 is too small, and oscillating plate 411 floats difficulty from tamper 450.On the other hand, when the width W 21 of tamper 450 is more than 200mm, be difficult to tamper 450 and support roll 490 described later to be alternately arranged.The width W 21 of tamper 450 is more preferably 70mm ~ 150mm, more preferably 80mm ~ 120mm.
Young's modulus under the room temperature (25 DEG C) of tamper 450 is preferably more than 70GPa.By being set to more than 70GPa, can the deformation induced by gravity of inhibitory reflex body 450 fully.Preferred scope is more than 190GPa, and preferred scope is more than 210GPa further.
The fusing point of tamper 450 is preferably more than 1300 DEG C.By being set to more than 1300 DEG C, can abundant inhibitory reflex body 450 softening.Preferred scope is more than 1500 DEG C, and preferred scope is more than 1700 DEG C further.
Tamper 450 is formed by the pottery such as high temperature steel, silica of such as stainless steel etc.As stainless steel, such as SUS310S etc. can be enumerated.
A part for tamper 450 is exposed to the outside of leer 402.Such as shown in Fig. 3, the through leer 402 of tamper 450, the length direction both ends of tamper 450 are exposed to the outside of leer 402.Thus, first and second lifting device 460,470 supported by tamper 450 as being elevated can be set in the outside of annealing furnace 402.
(the first lifting device)
First lifting device 460 is such as made up of whisky jack etc., via oscillator 412 by an overhang bracket of oscillating plate 411 for being elevated.Oscillating plate 411 is elevated relative to the siege of leer 402, can realize the optimization with the position relationship of glass ribbon 14 thus.First lifting device 460 is arranged according to each oscillating plate 411.
In addition, the first lifting device 460 by an overhang bracket of tamper 450 for being elevated.The mode that oscillating plate 411 and tamper 450 can regulate with its position relationship can separately be elevated.
(the second lifting device)
Second lifting device 470 is such as made up of whisky jack etc., by the other end of tamper 450 supporting for being elevated.Second lifting device 470 and the first lifting device 460 synchronously make tamper 450 be elevated relative to the siege of leer 402.Second lifting device 470 is arranged according to each tamper 450.
It should be noted that, the lifting device supported by tamper 450 as being elevated of more than 1 also can be set between the first lifting device 460 and the second lifting device 470.The flexure of tamper 450 reduces, and floating of oscillating plate 411 can stabilization.
(conveying roller)
Conveying roller 480 arranges multiple along the throughput direction of glass ribbon 14 at spaced intervals.Conveying roller 480 is driven by rotating machine, is flatly carried by glass ribbon 14.
Conveying roller 480 is configured in the low region of the temperature of glass ribbon 14 in order to avoid making glass ribbon 14 damage.Such as, as shown in Figure 1, conveying roller 480 is preferably arranged on the downstream part of leer 402.
It should be noted that, conveying roller 480 also can be arranged on the inside of leer 402.In this case, in the mode making conveying roller 480 and the contact pressure of glass ribbon 14 reduce, conveying roller 480 and oscillating plate 411 are alternately arranged.
(support roll)
Support roll 490 is arranged on the inside of leer 402, can supporting glass band 14 from below.Support roll 490 arranges multiple at spaced intervals on the throughput direction of glass ribbon 14.
Between adjacent support roll 490, be configured with the oscillating plate 411 of each, support roll 490 and oscillating plate 411 alternate repetition are arranged.It should be noted that, support roll 490 can for varied with putting in order of oscillating plate 411.
Support roll 490 and oscillating plate 411 can relatively be elevated.Such as, support roll 490 can be elevated relative to the siege of leer 402, although details is described below, but according to the difference of situation, and move between the retreating position (with reference to Fig. 1) be separated with from glass ribbon 14 in the position (with reference to Fig. 2) of supporting glass band 14 from below.
It should be noted that, in the present embodiment, although support roll 490 is elevated, oscillating plate 411 also can be elevated.Be elevated by oscillating plate 411, support roll 490 can supporting glass band 14 from below, or is separated from glass ribbon 14.
(using method of support roll)
Such as, when the starting of sheet glass manufacturing installation 100, the thickness of glass ribbon 14, shape become uneven.Therefore, be only the radiation pressure of the sound wave from oscillating plate 411, be sometimes difficult to glass ribbon 14 is floated to the top of oscillating plate 411.
Therefore, when the starting of sheet glass manufacturing installation 100, as shown in Figure 2, support roll 490 is supporting glass band 14 from below, prevents glass ribbon 14 from contacting with oscillating plate 411.Support roll 490 is rotated by rotating machine, is carried by glass ribbon 14 to prescribed direction.
On the other hand, when sheet glass manufacturing installation 100 stable (when sheet glass manufactures), as shown in Figure 1, support roll 490 is separated from glass ribbon 14, and under the radiation pressure of the sound wave from oscillating plate 411, glass ribbon 14 floats to the top of oscillating plate 411.Because support roll 490 does not contact with glass ribbon 14, therefore, it is possible to prevent the damage of glass ribbon 14.At support roll 490 from after glass ribbon 14 is separated, the stopping of rotating machine that support roll 490 is rotated.
It should be noted that, by by multiple oscillating plate 411 compact configuration, also can not use support roll 490.
Above, describe one embodiment of the present invention and variation thereof, but the present invention is not defined in above-mentioned embodiment etc., in the scope of the aim of the present invention recorded in the scope of claims, can various distortion, change be carried out.
Such as shown in Fig. 6, oscillating plate 411 can have multiple communicating pores 411a.Be configured with the tamper 450 of square tube shape in the below of this oscillating plate 411, be formed with multiple squit hole 450a externally sprayed by the gas be supplied in the inner space of tamper 450 on the top of tamper 450.The following table top blast of gas by the communicating pores 411a of oscillating plate 411 to glass ribbon 14 sprayed from squit hole 450a is attached, and glass ribbon 14 is floated.And, due to supply gas in leer 402, therefore, it is possible to regulate the temperature in leer 402.And the gas sprayed from squit hole 450a can be SO
2gas.SO
2gas can be formed at the lower surface of glass ribbon 14 and anti-ly hinder film.
In addition, the sound wave float-up device 410A of Fig. 7 has oscillating plate 411A and tamper 450.The upper surface of oscillating plate 411A under cross-sectional view, have level straight section and from the two ends of this straight section oliquely downward to the sloping portion extended.Sloping portion is to be formed along with to width (left and right directions in figure) outer row and then mode downward.Formed by sloping portion and horizontal direction, angle θ is such as 15 ° ~ 60 °.Width (the being left and right directions size in the drawings) W12 of sloping portion is 5% ~ 30% of the width W 11 of such as oscillating plate 411A.Like this, the shape of cross section of the upper surface of oscillating plate 411A becomes upwards convex.Therefore, in this variation, also same with above-mentioned embodiment, the effect of above-mentioned (1) ~ (2) can be obtained.It should be noted that, the shape of cross section of the lower surface of oscillating plate 411A is the linearity of level.
In addition, the sound wave float-up device 410B of Fig. 8 has oscillating plate 411B and tamper 450.The shape of cross section of the upper surface of oscillating plate 411B is convex curve-like.Therefore, even if in this variation, also same with above-mentioned embodiment, the effect of above-mentioned (1) ~ (2) can be obtained.And, in this variation, (3) between the glass ribbon 14 bent because of gravity and oscillating plate 411B, form uniform gap, contribute to floating of glass ribbon 14 from the sound wave of most of radiation of the upper surface of oscillating plate 411B, also can be floated power fully.When gap is wide, cannot be floated power fully, when gap is narrow, glass ribbon 14 contacts with oscillating plate 411B.
The radius of curvature R 11 of the upper surface of oscillating plate 411B is respectively 150mm ~ 10000mm.When the radius of curvature R 11 of the upper surface of oscillating plate 411B is less than 150mm, the gap formed between the glass ribbon 14 bent because of gravity and oscillating plate 411B becomes uneven, glass ribbon 14 is difficult to utilize the sound wave from most of radiation of the upper surface of oscillating plate 411B and float, and floats power and weakens.On the other hand, when the radius of curvature R 11 of the upper surface of oscillating plate 411B is more than 10000mm, the glass ribbon 14 bent because of gravity easily contacts with the width both ends of oscillating plate 411B.The radius of curvature R 11 of the upper surface of oscillating plate 411B is preferably 300mm ~ 8000mm, is more preferably 500mm ~ 7000mm.It should be noted that, the shape of cross section of the lower surface of oscillating plate 411B is the linearity of level.
In addition, the sound wave float-up device 410C of Fig. 9 has oscillating plate 411C and tamper 450C.The shape of cross section of the upper surface of oscillating plate 411C is convex curve-like.Therefore, even if in this variation, also same with the variation of Fig. 8, the effect of above-mentioned (1) ~ (3) can be obtained.And in this variation, the shape of cross section of the lower surface of oscillating plate 411C is the curve-like of convex (to recessed).It can be the radius of curvature R 12 of the lower surface of oscillating plate 411C reduces oscillating plate 411C thickness of slab amount than the radius of curvature R 11 of the upper surface of oscillating plate 411C.Oscillating plate 411C carries out bending machining to flat board and easily obtains.It should be noted that, oscillating plate 411C also can grind flat board and manufacture.
In the curvilinear situation that the shape of cross section of the lower surface of oscillating plate 411C is convex, when the shape of cross section of the upper surface of tamper 450C is convex curve-like, uniform gap is formed between oscillating plate 411C and tamper 450C, the sound wave reflected from the major part of the upper surface of tamper 450C contributes to floating of oscillating plate 411C, can be floated power fully.
The radius of curvature R 21 of the upper surface of tamper 450C is preferably 90% ~ 110% (preferably 90% ~ 100%) of the radius of curvature R 12 of the lower surface of oscillating plate 411C, to form uniform gap between tamper 450C and oscillating plate 411C.The radius of curvature R 21 of the upper surface of tamper 450C, more preferably compared with the radius of curvature R 12 of the lower surface of oscillating plate 411C, reduces the gap value between tamper 450C and oscillating plate 411C.
In addition, the sound wave float-up device 410D of Figure 10 has the tamper 450 of oscillating plate 411C and Fig. 8 of Fig. 9.Therefore, even if in this variation, also same with the variation of Fig. 8, the effect of above-mentioned (1) ~ (3) can be obtained.And in this variation, same with the example of Fig. 9, the manufacture (processing) of oscillating plate 411C is easy, and tooling cost and the working accuracy of oscillating plate 411C are good.And in this variation, same with the example of Fig. 5 ~ Fig. 8, the manufacture (processing) of tamper 450 is easy, and tooling cost and the working accuracy of tamper 450 are good.At this, when the radius of curvature R 12 of the radius of curvature R 11 of the upper surface of oscillating plate 411C and the lower surface of oscillating plate 411C is more than 500mm, gap uniformity ground between oscillating plate 411C and tamper 450 is close, the sound wave reflected from the major part of the upper surface of tamper 450 contributes to floating of oscillating plate 411C, effectively can be floated power, therefore particularly preferably.
Figure 11 is the figure of the variation of the shape representing oscillating plate.In fig. 11, the flexure of oscillating plate, the flexure of glass ribbon are illustrated turgidly than reality.
The roller such as runner 504, conveying roller 480 shown in Fig. 1 etc. is supported at axial both ends place, is not supported at axial central part place.Therefore, because of deadweight, the axial central part of roller can decline than the axial both ends of roller sometimes.Consequently, the width central part of glass ribbon 14 declines than the width both ends of glass ribbon 14 sometimes.And have nothing to do with the flexure of roller, the width central part of glass ribbon 14 declines than the width both ends of glass ribbon 14 sometimes.
Therefore, under vibration halted state, the upper end of the first part 411D-1 corresponding to glass ribbon width central part of oscillating plate 411D can be in below compared with the respective upper end of the second section 411D-2 corresponding to the glass ribbon width both ends of oscillating plate 411D and Part III 411D-3.At this, the part corresponding to glass ribbon width both ends refers to the part immediately below being positioned at glass ribbon width both ends.If the length of oscillating plate 411D is more than 95% of the width of glass ribbon 14, then the second section 411D-2 corresponding to glass ribbon width both ends of oscillating plate 411D and Part III 411D-3 exists.It should be noted that, in oscillating plate length than glass ribbon width slightly in short-term (more than 95% and be less than 100%), the both ends of the length direction of oscillating plate are equivalent to aforementioned 411D-2 and 411D-3.
Like this, if the upper end of first part 411D-1 is in below compared with the respective upper end of second section 411D-2 and Part III 411D-3, then glass ribbon 14 downward convex bend time, glass ribbon 14 is difficult to contact with oscillating plate 411D, and glass ribbon 14 is difficult to damage.
It should be noted that, in the present embodiment, the upper end of first part 411D-1 is in below compared with the respective upper end of second section 411D-2 and Part III 411D-3, but also can be in equal height.Highly refer to the position of above-below direction.If the upper end of first part 411D-1 is not in top compared with the respective upper end of second section 411D-2 and Part III 411D-3, then can limit the contact of glass ribbon 14 and oscillating plate 411D to a certain extent.
The difference of height H3 of the upper end of the difference of height H2 of the upper end of first part 411D-1 and the upper end of second section 411D-2 and the upper end of first part 411D-1 and Part III 411D-3 is respectively 0% ~ 0.1% (be preferably 0.01% ~ 0.1%, be more preferably 0.02% ~ 0.1%) of the width W 0 of glass ribbon 14.
It should be noted that, in the present embodiment, the lower end of first part 411D-1 is in top compared with the respective lower end of second section 411D-2 and Part III 411D-3, but can be also equal height, can also be in below.
The application advocates the right of priority of No. 2012-105514, the Japanese Patent Application of filing an application to the Japanese Patent Room based on May 2nd, 2012, and quotes the full content of No. 2012-105514, Japanese Patent Application in this international application.
[label declaration]
10 frits
12 melten glass
14 glass ribbons
100 sheet glass manufacturing installations
200 dissolvers
300 building mortions
400 annealing devices
402 leers
410 sound wave float-up devices
411 oscillating plates
412 oscillators
430 hot boxes
440 water coolers
450 tampers
460 first lifting devices
470 second lifting devices
480 conveying rollers (supply unit)
490 support rolls
500 lifting gears
Claims (14)
1. a sound wave float-up device, when carrying the glass ribbon pulled straight from sheet glass building mortion, utilizes the radiation pressure of sound wave that this glass ribbon is floated, wherein,
Described sound wave float-up device possesses:
Oscillating plate, has and is 1m ~ 8m and the thickness of slab of width central part is temperature in the described glass ribbon of 0.05mm ~ 3mm is the upper surface of the partial radiation sound wave of 300 DEG C ~ 800 DEG C to width; And
Tamper, has the upper surface reflected the sound wave of the lower surface radiation from this oscillating plate,
The length direction of described oscillating plate is parallel with the width of described glass ribbon,
The shape of cross section of the upper surface of described oscillating plate is upwards convex.
2. sound wave float-up device according to claim 1, wherein,
Under vibration halted state, the upper end of the first part corresponding with described glass ribbon width central part of described oscillating plate is positioned at the second section corresponding with described glass ribbon width both ends of described oscillating plate and the below of Part III upper end separately or is in sustained height
The difference of height of the upper end of the difference of height of the upper end of described first part and the upper end of described second section and the upper end of described first part and described Part III is respectively 0% ~ 0.1% of the width of described glass ribbon.
3. sound wave float-up device according to claim 1 and 2, wherein,
Young's modulus under the room temperature of described tamper is more than 70GPa.
4. the sound wave float-up device according to any one of claims 1 to 3, wherein,
The fusing point of described tamper is more than 1300 DEG C.
5. the sound wave float-up device according to any one of Claims 1 to 4, wherein,
Described oscillating plate is formed by stainless steel.
6. the sound wave float-up device according to any one of Claims 1 to 4, wherein,
Described oscillating plate is formed by aluminum or aluminum alloy.
7. the sound wave float-up device according to any one of Claims 1 to 5, wherein,
The frequency of described oscillating plate when utilizing the radiation pressure of sound wave that the described part of described glass ribbon is floated is 15kHz ~ 50kHz.
8. the sound wave float-up device according to any one of claim 1 ~ 7, wherein,
Utilizing the radiation pressure of sound wave to make the temperature of described glass ribbon be the amplitude of the part of 300 DEG C ~ 800 DEG C described oscillating plate when floating is 0.25 μm ~ 50 μm.
9. the sound wave float-up device according to any one of claim 1 ~ 8, wherein,
Described sound wave float-up device also possesses the supply unit carrying described glass ribbon along prescribed direction.
10. sound wave float-up device according to claim 9, wherein,
Described sound wave float-up device also possesses the support roll that can support described glass ribbon from below,
Described support roll relatively can be elevated relative to described oscillating plate.
11. 1 kinds of sheet glass manufacturing installations, have the sound wave float-up device according to any one of claim 1 ~ 10.
12. 1 kinds of sound waves float method, when carrying the glass ribbon pulled straight from sheet glass building mortion, utilize the radiation pressure of sound wave that this glass ribbon is floated, wherein,
Utilize and make width for 1m ~ 8m and the part that temperature the thickness of slab of the width central part described glass ribbon that is 0.05mm ~ 3mm is 300 DEG C ~ 800 DEG C is floated from described oscillating plate from the radiation pressure of the sound wave of the upper surface radiation of oscillating plate, and utilize the sound wave of the upper surface of tamper to the lower surface from described oscillating plate to reflect
The length direction of described oscillating plate is parallel with the width of described glass ribbon,
The shape of cross section of the upper surface of described oscillating plate is upwards convex.
13. sound waves according to claim 11 float method, wherein,
Under vibration halted state, the upper end of the first part corresponding with described glass ribbon width central part of described oscillating plate is positioned at the second section corresponding with described glass ribbon width both ends of described oscillating plate and the below of Part III upper end separately or is in sustained height
The difference of height of the upper end of the difference of height of the upper end of described first part and the upper end of described second section and the upper end of described first part and described Part III is respectively 0% ~ 0.1% of the width of described glass ribbon.
14. 1 kinds of sheet glass manufacture method, wherein,
There is following operation: when carrying the glass ribbon pulled straight from sheet glass building mortion, floating method by the sound wave described in claim 12 or 13, utilizing the radiation pressure of sound wave that described glass ribbon is floated.
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2012-105514 | 2012-05-02 | ||
| JP2012105514A JP2015131731A (en) | 2012-05-02 | 2012-05-02 | Sound wave floatation device and sound wave flotation method |
| PCT/JP2013/061925 WO2013164964A1 (en) | 2012-05-02 | 2013-04-23 | Sound wave levitation device, sound wave levitation method, plate glass manufacturing apparatus, and plate glass manufacturing method |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN104271520A true CN104271520A (en) | 2015-01-07 |
| CN104271520B CN104271520B (en) | 2016-09-21 |
Family
ID=49514364
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201380022995.5A Expired - Fee Related CN104271520B (en) | 2012-05-02 | 2013-04-23 | Sound wave float-up device, sound wave float method, glass sheet manufactures device and glass sheet manufacture method |
Country Status (5)
| Country | Link |
|---|---|
| JP (1) | JP2015131731A (en) |
| KR (1) | KR20150016223A (en) |
| CN (1) | CN104271520B (en) |
| TW (1) | TW201350447A (en) |
| WO (1) | WO2013164964A1 (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107555097A (en) * | 2016-07-01 | 2018-01-09 | 昕芙旎雅有限公司 | Vibratory feed |
| CN114988388A (en) * | 2022-06-08 | 2022-09-02 | 电子科技大学 | Integrated device for preparing carbon material by acoustic suspension CVD of electric spark synthesis catalyst |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP6413697B2 (en) * | 2014-11-25 | 2018-10-31 | 株式会社豊田自動織機 | Electrode manufacturing method and electrode manufacturing apparatus |
| JP7265553B2 (en) * | 2017-10-30 | 2023-04-26 | コーニング インコーポレイテッド | Thin glass ribbon processing system and method |
| TWI782126B (en) * | 2017-10-31 | 2022-11-01 | 美商康寧公司 | Systems and methods for processing thin glass ribbons |
| KR20210100165A (en) | 2018-12-13 | 2021-08-13 | 코닝 인코포레이티드 | Conveyor and Ribbon Conveyor |
| CN113248127A (en) * | 2021-05-28 | 2021-08-13 | 河北光兴半导体技术有限公司 | Glass belt on-line cutting device |
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| JP2005112517A (en) * | 2003-10-06 | 2005-04-28 | Toyota Industries Corp | Object levitating and transporting device |
| TW200538370A (en) * | 2004-02-19 | 2005-12-01 | Toyota Jidoshokki Kk | A sound wave floating device |
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| JP2802883B2 (en) * | 1993-07-12 | 1998-09-24 | 株式会社カイジョー | Object levitating device, object conveying device equipped with the device, and object levitating method |
| JPH09169427A (en) * | 1995-12-22 | 1997-06-30 | Kaijo Corp | Floating device and board carrying device provided with this floating device |
| JP3967855B2 (en) * | 1999-09-28 | 2007-08-29 | 株式会社豊田自動織機 | Object levitation device |
| JP2005119808A (en) * | 2003-10-16 | 2005-05-12 | Toyota Industries Corp | Tabular member conveying system |
| JP4811647B2 (en) * | 2006-01-17 | 2011-11-09 | 独立行政法人産業技術総合研究所 | Manufacturing method of glass molded product |
-
2012
- 2012-05-02 JP JP2012105514A patent/JP2015131731A/en active Pending
-
2013
- 2013-04-23 CN CN201380022995.5A patent/CN104271520B/en not_active Expired - Fee Related
- 2013-04-23 KR KR1020147030362A patent/KR20150016223A/en not_active Application Discontinuation
- 2013-04-23 WO PCT/JP2013/061925 patent/WO2013164964A1/en active Application Filing
- 2013-05-02 TW TW102115765A patent/TW201350447A/en unknown
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2005112517A (en) * | 2003-10-06 | 2005-04-28 | Toyota Industries Corp | Object levitating and transporting device |
| TW200538370A (en) * | 2004-02-19 | 2005-12-01 | Toyota Jidoshokki Kk | A sound wave floating device |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107555097A (en) * | 2016-07-01 | 2018-01-09 | 昕芙旎雅有限公司 | Vibratory feed |
| CN114988388A (en) * | 2022-06-08 | 2022-09-02 | 电子科技大学 | Integrated device for preparing carbon material by acoustic suspension CVD of electric spark synthesis catalyst |
| CN114988388B (en) * | 2022-06-08 | 2023-09-15 | 电子科技大学 | Acoustic suspension CVD (chemical vapor deposition) carbon material preparation integrated device for electric spark synthesis catalyst |
Also Published As
| Publication number | Publication date |
|---|---|
| CN104271520B (en) | 2016-09-21 |
| TW201350447A (en) | 2013-12-16 |
| KR20150016223A (en) | 2015-02-11 |
| JP2015131731A (en) | 2015-07-23 |
| WO2013164964A1 (en) | 2013-11-07 |
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