CN104261360A - Silicon nitride powder based on catalytic nitridation and preparation method thereof - Google Patents

Silicon nitride powder based on catalytic nitridation and preparation method thereof Download PDF

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CN104261360A
CN104261360A CN201410492640.9A CN201410492640A CN104261360A CN 104261360 A CN104261360 A CN 104261360A CN 201410492640 A CN201410492640 A CN 201410492640A CN 104261360 A CN104261360 A CN 104261360A
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silicon nitride
nitride powder
nitrogenize
beta
catalysis
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CN104261360B (en
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张海军
邓先功
张少伟
李发亮
鲁礼林
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Shandong Industry Research Institute Zhongke High End Chemical Industry Technology Research Institute Co ltd
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Wuhan University of Science and Engineering WUSE
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Abstract

The invention relates to a silicon nitride powder based on catalytic nitridation and a preparation method thereof. The technical scheme is as follows: the method comprises the following steps: mixing a dispersing agent, silicon powder and distilled water in a mass ratio of 1:200:(10000-16000), stirring, and carrying out ultrasonic dispersion to obtain a suspension; adding 0.88 mol/L water-soluble chromium salt into the suspension according to the Si:Cr2O3 mass ratio of 1:(0.005-0.050) to obtain a mixed solution; adding a precipitant into the mixed solution until the pH value is 7.5-8.5, and stirring for 0.5-1 hour; carrying out vacuum filtration and vacuum drying to obtain a powder mixture; and putting the powder mixture into a tubular atmosphere furnace, heating to 1250-1400 DEG C in a nitrogen atmosphere, and keeping the temperature for 2-8 hours to obtain the silicon nitride powder based on catalytic nitridation. The method has the characteristics of low synthesis temperature, short period, simple technique and high yield, and is easy to control. The silicon nitride powder based on catalytic nitridation has the advantages of high purity and small particle size, and is partially crystal whiskers.

Description

A kind of beta-silicon nitride powder based on catalysis nitrogenize and preparation method thereof
Technical field
The invention belongs to nitride powder technical field.Be specifically related to a kind of beta-silicon nitride powder based on catalysis nitrogenize and preparation method thereof.
Background technology
Silicon nitride ceramics is as a kind of high-temperature structural ceramics, there is the excellent specific properties such as intensity is high, hardness is large, high temperature creep is little, heat-resistant knocking stability is good, wear-resisting, corrosion-resistant, chemical stability is good, be widely used in the fields such as machinery, chemical industry, thermal technology and aerospace.Beta-silicon nitride powder is the basis of preparation high-performance silicon nitride ceramics, and the preparation of preparation and property to silicon nitride ceramics of beta-silicon nitride powder has very important effect.
At present, the preparation method of beta-silicon nitride powder mainly contains: carbothermic reduction titanium dioxide silicon process, self-propagating method, thermal decomposition method, gas-phase reaction method and silica flour direct nitridation method etc.
SiO in carbothermic reduction titanium dioxide silicon process 2be difficult to be completely reduced nitrogenize, in reaction, easily generate SiC, and temperature of reaction high (1400 ~ 1550 DEG C) and energy consumption large.Self-propagating legal system is high for the purity of beta-silicon nitride powder, and has energy-conservation and timesaving advantage in preparation process; But the method is higher to equipment requirements, production cost is expensive and be difficult to heavy industrialization.The beta-silicon nitride powder purity that thermal decomposition method obtains is high, particle diameter is little and sintering character good, but cost is high and energy consumption large (1400 ~ 1600 DEG C of thermolysiss), and complex process, large-scale industrialization application is restricted.Although gas-phase reaction method can obtain high-purity silicon nitride powder at short notice, cost is high, is not easy to suitability for industrialized production.
Silica flour direct nitridation method is the preparation method of most widely used beta-silicon nitride powder, and the method has that technique is simple, equipment requirements is low and the advantage such as advantage of lower cost.But also there is the problems such as the long and energy dissipation of nitriding temperature high (>=1400 DEG C), nitrogenize cycle is serious, and the pattern of silicon nitride difficulty controls, and can not obtain crystal whisker-shaped silicon nitride.In recent years, be the beta-silicon nitride powder of obtained super quality and competitive price, researchist adds catalyzer such as iron powder, iron(ic) chloride, cobalt salt etc. in silicon powder nitride process, and (Liu Song Zhe, direct nitridation method prepares Si 3n 4powder process research [J]. Rare Metals Materials and engineering. 2008,37 (1): 378-381; CN 101983947A; CN103496679A), although the method improves nitriding rate, and can difform beta-silicon nitride powder be obtained, iron add the high-temperature behavior reducing beta-silicon nitride powder, and cobalt salt price is relatively high, is difficult to suitability for industrialized production.
In a word, existing silicon nitride powder Antibody Production Techniques all comes with some shortcomings: cost is high, and temperature of reaction is high, the nitrogenize cycle is long, and purity is low, complex technical process, wayward, powder is not crystal whisker-shaped etc., and the application and the industrialization that significantly limit beta-silicon nitride powder are produced.
Summary of the invention
The present invention is intended to overcome prior art defect, and object is to provide that a kind of temperature of reaction is low, cost is low, the nitrogenize cycle is short, technological process is simple, be easy to control and the preparation method of the beta-silicon nitride powder based on catalysis nitrogenize that productive rate is high; The beta-silicon nitride powder purity based on catalysis nitrogenize prepared by the method is high, diameter of particle is little and part is crystal whisker-shaped.
For achieving the above object, the preparation process of the technical solution used in the present invention is:
Step one, be 1 ︰ 200 ︰ (10000 ~ 16000) by the mass ratio of Fen San Ji ︰ Gui Fen ︰ distilled water, dispersion agent, silica flour and distilled water mixed, stirs 20 ~ 30min, then ultrasonic disperse 20 ~ 30min, obtained suspension.
Step 2, in described suspension, add the water-soluble chromic salts that concentration is 0.88mol/L, obtained mixed solution; Wherein, the add-on of water-soluble chromic salts is Si ︰ Cr 2o 3mass ratio be 1 ︰ (0.005 ~ 0.050).
Step 3, under agitation, in described mixed solution, add precipitation agent to pH value is 7.5 ~ 8.5, continues stirring 0.5 ~ 1h; Suction filtration, vacuum-drying 10 ~ 12h, obtained mixed powder.
Step 4, be placed in tube-type atmosphere furnace by described mixed powder, under nitrogen atmosphere and temperature rise rate are the condition of 2 ~ 8 DEG C/min, are warming up to 1250 ~ 1400 DEG C, insulation 2 ~ 8h, obtains the beta-silicon nitride powder based on catalysis nitrogenize.
Si content >=95wt% in described silica flour, particle diameter≤88 μm.
Described dispersion agent is the one in polyvinyl alcohol, Sodium dodecylbenzene sulfonate and polyvinylpyrrolidone, and the purity of the purity of polyvinyl alcohol, the purity of Sodium dodecylbenzene sulfonate and polyvinylpyrrolidone is analytical pure or is technical pure.
Described water-soluble chromic salts is chromium chloride or is chromium nitrate; The purity of chromium chloride and the purity of chromium nitrate are analytical pure or are technical pure.
Described precipitation agent is the one in urea, ammoniacal liquor and hydrazine hydrate, and the purity of the purity of urea, the purity of ammoniacal liquor and hydrazine hydrate is analytical pure or is technical pure.
Owing to adopting technique scheme, the present invention compared with prior art has following positively effect:
1, the present invention adopts chromic oxide nano-powder as catalyzer, catalysis silicon powder nitride.Silica flour at 1250 ~ 1400 DEG C by complete nitrogenize.Therefore productive rate of the present invention is high, synthesis temperature is low and the nitrogenize cycle is short.
2, the present invention utilizes nano-powder to control whisker growth, and gained is little based on the silicon nitride particle particle diameter of catalysis nitrogenize, and the diameter of whisker is 120 ~ 180nm, and length-to-diameter ratio is 15 ~ 25; The whisker of synthesis is silicon nitride.
3, the present invention only introduces the nanocatalyst of trace in reaction process, and without other impurity, product purity is high.
4, raw material sources of the present invention are extensive and cheap, and production cost is low, have very large industrialization prospect.
Therefore, the present invention has that Nitration synthesis temperature is low, cost is low, the nitrogenize cycle is short, synthesis technique is simple, be easy to the feature that controls and productive rate is high; The prepared beta-silicon nitride powder purity based on catalysis nitrogenize is high, particle diameter is little and part is crystal whisker-shaped, and industrialization prospect is large.
Accompanying drawing explanation
Fig. 1 is the XRD figure spectrum of a kind of beta-silicon nitride powder based on catalysis nitrogenize prepared by the present invention;
Fig. 2 is that the SEM based on the beta-silicon nitride powder of catalysis nitrogenize shown in Fig. 1 schemes.
Embodiment
Below in conjunction with the drawings and specific embodiments, the present invention will be further described, the restriction not to its protection domain.
For avoiding repetition, first by as follows for the raw material Unify legislation involved by this embodiment, repeat no more in embodiment:
Si content >=95wt% in described silica flour, particle diameter≤88 μm.
The purity of described polyvinyl alcohol, Sodium dodecylbenzene sulfonate and polyvinylpyrrolidone is analytical pure or is technical pure.
The purity of described chromium chloride and the purity of chromium nitrate are analytical pure or are technical pure.
The purity of the purity of described urea, the purity of ammoniacal liquor and hydrazine hydrate is analytical pure or is technical pure.
embodiment 1
A kind of beta-silicon nitride powder based on catalysis nitrogenize and preparation method thereof.The step of described preparation method is:
Step one, be 1 ︰ 200 ︰ (10000 ~ 12000) by the mass ratio of Ju Yi Xi Chun ︰ Gui Fen ︰ distilled water, polyvinyl alcohol, silica flour and distilled water mixed, stirs 20 ~ 30min, then ultrasonic disperse 20 ~ 30min, obtained suspension.
Step 2, in described suspension, add the chromium nitrate that concentration is 0.88mol/L, obtained mixed solution; Wherein, the add-on of chromium nitrate is Si ︰ Cr 2o 3mass ratio be 1 ︰ (0.005 ~ 0.020).
Step 3, under agitation, in described mixed solution, add urea to pH value is 7.5 ~ 8.5, continues stirring 0.5 ~ 1h; Suction filtration, vacuum-drying 10 ~ 12h, obtained mixed powder.
Step 4, be placed in tube-type atmosphere furnace by described mixed powder, under nitrogen atmosphere and temperature rise rate are the condition of 2 ~ 4 DEG C/min, are warming up to 1250 ~ 1300 DEG C, insulation 2 ~ 5h, obtains the beta-silicon nitride powder based on catalysis nitrogenize.
embodiment 2
A kind of beta-silicon nitride powder based on catalysis nitrogenize and preparation method thereof.The step of described preparation method is:
Step one, be 1 ︰ 200 ︰ (14000 ~ 16000) by the mass ratio of Shi dialkyl benzene sulfonic acids Na ︰ Gui Fen ︰ distilled water, Sodium dodecylbenzene sulfonate, silica flour and distilled water are mixed, stir 20 ~ 30min, then ultrasonic disperse 20 ~ 30min, obtained suspension.
Step 2, in described suspension, add the chromium chloride that concentration is 0.88mol/L, obtained mixed solution; Wherein, the add-on of chromium chloride is Si ︰ Cr 2o 3mass ratio be 1 ︰ (0.025 ~ 0.040).
Step 3, under agitation, in described mixed solution, add ammoniacal liquor to pH value is 7.5 ~ 8.5, continues stirring 0.5 ~ 1h; Suction filtration, vacuum-drying 10 ~ 12h, obtained mixed powder.
Step 4, be placed in tube-type atmosphere furnace by described mixed powder, under nitrogen atmosphere and temperature rise rate are the condition of 2 ~ 4 DEG C/min, are warming up to 1350 ~ 1400 DEG C, insulation 2 ~ 5h, obtains the beta-silicon nitride powder based on catalysis nitrogenize.
embodiment 3
A kind of beta-silicon nitride powder based on catalysis nitrogenize and preparation method thereof.The step of described preparation method is:
Step one, be 1 ︰ 200 ︰ (10000 ~ 12000) by the mass ratio of Ju Yi Xi Chun ︰ Gui Fen ︰ distilled water, polyvinyl alcohol, silica flour and distilled water mixed, stirs 20 ~ 30min, then ultrasonic disperse 20 ~ 30min, obtained suspension.
Step 2, in described suspension, add the chromium chloride that concentration is 0.88mol/L, obtained mixed solution; Wherein, the add-on of chromium chloride is Si ︰ Cr 2o 3mass ratio be 1 ︰ (0.010 ~ 0.025).
Step 3, under agitation, in described mixed solution, add hydrazine hydrate to pH value is 7.5 ~ 8.5, continues stirring 0.5 ~ 1h; Suction filtration, vacuum-drying 10 ~ 12h, obtained mixed powder.
Step 4, be placed in tube-type atmosphere furnace by described mixed powder, under nitrogen atmosphere and temperature rise rate are the condition of 4 ~ 6 DEG C/min, are warming up to 1300 ~ 1350 DEG C, insulation 3 ~ 7h, obtains the beta-silicon nitride powder based on catalysis nitrogenize.
embodiment 4
A kind of beta-silicon nitride powder based on catalysis nitrogenize and preparation method thereof.The step of described preparation method is:
Step one, be 1 ︰ 200 ︰ (12000 ~ 14000) by the mass ratio of Ju Yi Xi Bi Ka Wan Tong ︰ Gui Fen ︰ distilled water, polyvinylpyrrolidone, silica flour and distilled water mixed, stirs 20 ~ 30min, then ultrasonic disperse 20 ~ 30min, obtained suspension.
Step 2, in described suspension, add the chromium nitrate that concentration is 0.88mol/L, obtained mixed solution; Wherein, the add-on of chromium nitrate is Si ︰ Cr 2o 3mass ratio be 1 ︰ (0.020 ~ 0.035).
Step 3, under agitation, in described mixed solution, add urea to pH value is 7.5 ~ 8.5, continues stirring 0.5 ~ 1h; Suction filtration, vacuum-drying 10 ~ 12h, obtained mixed powder.
Step 4, be placed in tube-type atmosphere furnace by described mixed powder, under nitrogen atmosphere and temperature rise rate are the condition of 4 ~ 6 DEG C/min, are warming up to 1250 ~ 1300 DEG C, insulation 3 ~ 7h, obtains the beta-silicon nitride powder based on catalysis nitrogenize.
embodiment 5
A kind of beta-silicon nitride powder based on catalysis nitrogenize and preparation method thereof.The step of described preparation method is:
Step one, be 1 ︰ 200 ︰ (12000 ~ 14000) by the mass ratio of Shi dialkyl benzene sulfonic acids Na ︰ Gui Fen ︰ distilled water, Sodium dodecylbenzene sulfonate, silica flour and distilled water are mixed, stir 20 ~ 30min, then ultrasonic disperse 20 ~ 30min, obtained suspension.
Step 2, in described suspension, add the chromium nitrate that concentration is 0.88mol/L, obtained mixed solution; Wherein, the add-on of chromium nitrate is Si ︰ Cr 2o 3mass ratio be 1 ︰ (0.035 ~ 0.050).
Step 3, under agitation, in described mixed solution, add hydrazine hydrate to pH value is 7.5 ~ 8.5, continues stirring 0.5 ~ 1h; Suction filtration, vacuum-drying 10 ~ 12h, obtained mixed powder.
Step 4, be placed in tube-type atmosphere furnace by described mixed powder, under nitrogen atmosphere and temperature rise rate are the condition of 6 ~ 8 DEG C/min, are warming up to 1350 ~ 1400 DEG C, insulation 4 ~ 8h, obtains the beta-silicon nitride powder based on catalysis nitrogenize.
embodiment 6
A kind of beta-silicon nitride powder based on catalysis nitrogenize and preparation method thereof.The step of described preparation method is:
Step one, be 1 ︰ 200 ︰ (14000 ~ 16000) by the mass ratio of Ju Yi Xi Bi Ka Wan Tong ︰ Gui Fen ︰ distilled water, polyvinylpyrrolidone, silica flour and distilled water mixed, stirs 20 ~ 30min, then ultrasonic disperse 20 ~ 30min, obtained suspension.
Step 2, in described suspension, add the chromium chloride that concentration is 0.88mol/L, obtained mixed solution; Wherein, the add-on of chromium chloride is Si ︰ Cr 2o 3mass ratio be 1 ︰ (0.035 ~ 0.050).
Step 3, under agitation, in described mixed solution, add ammoniacal liquor to pH value is 7.5 ~ 8.5, continues stirring 0.5 ~ 1h; Suction filtration, vacuum-drying 10 ~ 12h, obtained mixed powder.
Step 4, be placed in tube-type atmosphere furnace by described mixed powder, under nitrogen atmosphere and temperature rise rate are the condition of 6 ~ 8 DEG C/min, are warming up to 1300 ~ 1350 DEG C, insulation 4 ~ 8h, obtains the beta-silicon nitride powder based on catalysis nitrogenize.
This embodiment compared with prior art has following positively effect and outstanding feature:
1, this embodiment adopts chromic oxide nano particle as catalyzer, catalysis silicon powder nitride.The XRD figure spectrum of a kind of beta-silicon nitride powder based on catalysis nitrogenize of Fig. 1 prepared by embodiment 1, only has the diffraction peak of silicon nitride, silica flour nitrogenize completely is at such a temperature described in this XRD figure spectrum.Result shows that this embodiment productive rate is high, synthesis temperature is low and the nitrogenize cycle is short.
2, this embodiment utilizes nano particle to control whisker growth, Fig. 2 for described in Fig. 1 based on the picture of the beta-silicon nitride powder of catalysis nitrogenize, as can be seen from Figure 2, gained is little based on the silicon nitride particle particle diameter of catalysis nitrogenize, the diameter of whisker is 100 ~ 150nm, and length-to-diameter ratio is 15 ~ 25.
3, this embodiment only introduces the nanocatalyst of trace in reaction process, and without other impurity, product purity is high.
4, the raw material sources of this embodiment are extensive and cheap, and production cost is low, have very large industrialization prospect of production.
Therefore, this embodiment has that Nitration synthesis temperature is low, cost is low, the nitrogenize cycle is short, synthesis technique is simple, be easy to the feature that controls and productive rate is high; The prepared beta-silicon nitride powder particle diameter based on catalysis nitrogenize is little, part is that crystal whisker-shaped and purity are high, and the prospect that industrialization is produced is large.

Claims (6)

1., based on a preparation method for the beta-silicon nitride powder of catalysis nitrogenize, it is characterized in that the step of described preparation method is:
Step one, be 1 ︰ 200 ︰ (10000 ~ 16000) by the mass ratio of Fen San Ji ︰ Gui Fen ︰ distilled water, dispersion agent, silica flour and distilled water mixed, stirs 20 ~ 30min, then ultrasonic disperse 20 ~ 30min, obtained suspension;
Step 2, in described suspension, add the water-soluble chromic salts that concentration is 0.88mol/L, obtained mixed solution; Wherein, the add-on of water-soluble chromic salts is Si ︰ Cr 2o 3mass ratio be 1 ︰ (0.005 ~ 0.050);
Step 3, under agitation, in described mixed solution, add precipitation agent to pH value is 7.5 ~ 8.5, continues stirring 0.5 ~ 1h; Suction filtration, vacuum-drying 10 ~ 12h, obtained mixed powder;
Step 4, be placed in tube-type atmosphere furnace by described mixed powder, under nitrogen atmosphere and temperature rise rate are the condition of 2 ~ 8 DEG C/min, are warming up to 1250 ~ 1400 DEG C, insulation 2 ~ 8h, obtains the beta-silicon nitride powder based on catalysis nitrogenize.
2., according to claim 1 based on the preparation method of the beta-silicon nitride powder of catalysis nitrogenize, it is characterized in that the Si content >=95wt% in described silica flour, particle diameter≤88 μm.
3. according to claim 1 based on the preparation method of the beta-silicon nitride powder of catalysis nitrogenize, it is characterized in that described dispersion agent is the one in polyvinyl alcohol, Sodium dodecylbenzene sulfonate and polyvinylpyrrolidone, the purity of the purity of polyvinyl alcohol, the purity of Sodium dodecylbenzene sulfonate and polyvinylpyrrolidone is analytical pure or is technical pure.
4., according to claim 1 based on the preparation method of the beta-silicon nitride powder of catalysis nitrogenize, it is characterized in that described water-soluble chromic salts is chromium chloride or is chromium nitrate; The purity of chromium chloride and the purity of chromium nitrate are analytical pure or are technical pure.
5. according to claim 1 based on the preparation method of the beta-silicon nitride powder of catalysis nitrogenize, it is characterized in that described precipitation agent is the one in urea, ammoniacal liquor and hydrazine hydrate, the purity of the purity of urea, the purity of ammoniacal liquor and hydrazine hydrate is analytical pure or is technical pure.
6., based on a beta-silicon nitride powder for catalysis nitrogenize, it is characterized in that the described beta-silicon nitride powder based on catalysis nitrogenize is based on the beta-silicon nitride powder based on catalysis nitrogenize prepared by the preparation method of the beta-silicon nitride powder of catalysis nitrogenize according to any one of claim 1 ~ 5.
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CN105036097A (en) * 2015-07-30 2015-11-11 武汉科技大学 One-dimensional Si3N4 nanometer powder and preparation method thereof
CN106478107A (en) * 2016-10-17 2017-03-08 武汉科技大学 A kind of silicon nitride crystal whisker silicon carbide porous ceramicss and preparation method thereof
CN106477538A (en) * 2016-11-03 2017-03-08 清华大学 Beta-silicon nitride nanowire preparation method, beta-silicon nitride nanowire, beta-silicon nitride powder and silicon nitride submicron powder
CN108622864A (en) * 2018-04-13 2018-10-09 浙江东瓷新材料有限公司 A kind of reaction system for synthesizing silicon nitride powder
CN109970035A (en) * 2019-04-04 2019-07-05 天津大学 A kind of α-siliconnitride raw powder's production technology
CN110937604A (en) * 2019-12-20 2020-03-31 武汉科技大学 Si @ SiC-Si based on catalytic nitridation method3N4Electrode material and preparation method thereof
CN113493191A (en) * 2020-04-08 2021-10-12 新疆晶硕新材料有限公司 Method for preparing high-purity alpha-silicon nitride powder and high-purity alpha-silicon nitride powder
CN113564687A (en) * 2021-08-24 2021-10-29 安徽工业大学 Chromium-catalyzed silicon carbide whisker and preparation method thereof
CN116216662A (en) * 2023-02-01 2023-06-06 江苏富乐华功率半导体研究院有限公司 Synthesis method of silicon nitride powder

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US5334565A (en) * 1991-03-08 1994-08-02 Nakama Syokai Company Method of manufacturing silicon nitride whiskers
CN103496679A (en) * 2013-10-18 2014-01-08 武汉科技大学 Silicon nitride powder and method for preparing same

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CN105036097A (en) * 2015-07-30 2015-11-11 武汉科技大学 One-dimensional Si3N4 nanometer powder and preparation method thereof
CN106478107B (en) * 2016-10-17 2019-05-10 武汉科技大学 A kind of silicon nitride crystal whisker silicon carbide porous ceramics and preparation method thereof
CN106478107A (en) * 2016-10-17 2017-03-08 武汉科技大学 A kind of silicon nitride crystal whisker silicon carbide porous ceramicss and preparation method thereof
CN106477538A (en) * 2016-11-03 2017-03-08 清华大学 Beta-silicon nitride nanowire preparation method, beta-silicon nitride nanowire, beta-silicon nitride powder and silicon nitride submicron powder
CN108622864B (en) * 2018-04-13 2019-10-29 浙江东瓷新材料有限公司 A kind of reaction system for synthesizing silicon nitride powder
CN108622864A (en) * 2018-04-13 2018-10-09 浙江东瓷新材料有限公司 A kind of reaction system for synthesizing silicon nitride powder
CN109970035A (en) * 2019-04-04 2019-07-05 天津大学 A kind of α-siliconnitride raw powder's production technology
CN110937604A (en) * 2019-12-20 2020-03-31 武汉科技大学 Si @ SiC-Si based on catalytic nitridation method3N4Electrode material and preparation method thereof
CN110937604B (en) * 2019-12-20 2022-10-21 武汉科技大学 Si @ SiC-Si based on catalytic nitridation method 3 N 4 Electrode material and preparation method thereof
CN113493191A (en) * 2020-04-08 2021-10-12 新疆晶硕新材料有限公司 Method for preparing high-purity alpha-silicon nitride powder and high-purity alpha-silicon nitride powder
CN113493191B (en) * 2020-04-08 2022-11-22 新疆晶硕新材料有限公司 Method for preparing high-purity alpha-silicon nitride powder and high-purity alpha-silicon nitride powder
CN113564687A (en) * 2021-08-24 2021-10-29 安徽工业大学 Chromium-catalyzed silicon carbide whisker and preparation method thereof
CN113564687B (en) * 2021-08-24 2022-07-22 安徽工业大学 Chromium-catalyzed silicon carbide whisker and preparation method thereof
CN116216662A (en) * 2023-02-01 2023-06-06 江苏富乐华功率半导体研究院有限公司 Synthesis method of silicon nitride powder
CN116216662B (en) * 2023-02-01 2023-10-27 江苏富乐华功率半导体研究院有限公司 Synthesis method of silicon nitride powder

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