CN104671795A - A kind of single-phase α-Si3N4 ultrafine powder and its preparation method - Google Patents

A kind of single-phase α-Si3N4 ultrafine powder and its preparation method Download PDF

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CN104671795A
CN104671795A CN201510062292.6A CN201510062292A CN104671795A CN 104671795 A CN104671795 A CN 104671795A CN 201510062292 A CN201510062292 A CN 201510062292A CN 104671795 A CN104671795 A CN 104671795A
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ultrafine powder
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CN104671795B (en
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梁峰
张海军
张少伟
李发亮
鲁礼林
段红娟
刘江昊
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Wuhan University of Science and Engineering WUSE
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Abstract

本发明涉及一种单相α-Si3N4超细粉体及其制备方法。其技术方案是:先将5~30wt%的单质硅粉、15~45wt%的固态氮源和40~80wt%的卤化物粉混合均匀,制得混合物;再将所述混合物置入管式电炉内,在氮气气氛下以2~10℃/min的升温速率升至1000~1300℃,保温2~6小时;然后将所得产物用去离子水反复清洗,直至分别用AgNO3和Ca(NO3)2溶液滴定不再出现白色沉淀为止;最后在110℃条件下干燥10~24小时,即得单相α-Si3N4超细粉体。本发明具有反应温度低、成本低、合成工艺简单、过程易于控制、产率高和产业化前景大的特点;所制备的单相α-Si3N4超细粉体粒度为100~500nm,无杂相、活性高、颗粒团聚小和粒度分布均匀。<u/>

The invention relates to a single-phase α-Si 3 N 4 ultrafine powder and a preparation method thereof. The technical solution is: first mix 5~30wt% elemental silicon powder, 15~45wt% solid nitrogen source and 40~80wt% halide powder to make a mixture; then put the mixture into a tubular electric furnace In a nitrogen atmosphere, the temperature was raised to 1000-1300°C at a rate of 2-10°C/min, and kept at a temperature of 2-6 hours; then the obtained product was repeatedly washed with deionized water until it was washed with AgNO 3 and Ca(NO 3 ) 2 Titrate the solution until no white precipitate appears; finally dry at 110°C for 10-24 hours to obtain single-phase α-Si 3 N 4 ultrafine powder. The invention has the characteristics of low reaction temperature, low cost, simple synthesis process, easy process control, high yield and great industrialization prospect; the prepared single-phase α-Si 3 N 4 ultrafine powder has a particle size of 100-500nm, No impurity phase, high activity, small particle agglomeration and uniform particle size distribution. <u/>

Description

一种单相α-Si3N4超细粉体及其制备方法A kind of single-phase α-Si3N4 ultrafine powder and its preparation method

技术领域technical field

本发明属于Si3N4超细粉体技术领域。具体涉及一种单相α-Si3N4超细粉体及其制备方法。The invention belongs to the technical field of Si 3 N 4 ultrafine powder. It specifically relates to a single-phase α-Si 3 N 4 ultrafine powder and a preparation method thereof.

背景技术Background technique

氮化硅(Si3N4)陶瓷及其复合材料作为一种性能优异的功能材料,在机械、电学/光学器件、耐火材料等多种领域内有着广泛的应用。Si3N4常见的主要有两种晶体结构:α相与β相,α相与β相均属于六方晶系。形成两种不同变体的原因是[Si-N4]面体结构以不同的方式堆砌成两种二维网络晶形:α-Si3N4的堆垛顺序为ABCDAB…,β-Si3N4的堆垛顺序为ABABAB…。α-Si3N4为颗粒状而β-Si3N4为长柱状。α-Si3N4在热力学上为不稳定相,在1300~1600℃时,α-Si3N4四面体以c轴垂线为轴心旋转180°,转变成为高温相β-Si3N4。相较与β-Si3N4,α-Si3N4有利于陶瓷材料中柱状晶的发育,更易于烧结致密化和自增强,Si3N4陶瓷材料的机械强度和断裂韧性会随着原料中α-Si3N4相含量的增加而提高。同时,纳米或亚微米级α-Si3N4超细粉体具有的体积效应和表面效应可以实现氮化硅陶瓷材料的低温烧结,并赋予材料优异的力学性能。因此,氮化硅粉体的粒径、α相含量和杂质含量决定了其质量的好坏,并直接影响陶瓷制品的品质。Silicon nitride (Si 3 N 4 ) ceramics and their composites, as a functional material with excellent performance, are widely used in various fields such as machinery, electrical/optical devices, and refractory materials. There are mainly two common crystal structures of Si 3 N 4 : α phase and β phase, both of which belong to the hexagonal crystal system. The reason for the formation of two different variants is that the [Si-N 4 ] plane structures are stacked in different ways to form two two-dimensional network crystal forms: the stacking order of α-Si 3 N 4 is ABCDAB…, β-Si 3 N 4 The stacking sequence is ABABAB.... α-Si 3 N 4 is granular and β-Si 3 N 4 is long columnar. α-Si 3 N 4 is a thermodynamically unstable phase. At 1300-1600°C, the α-Si 3 N 4 tetrahedron rotates 180° around the vertical line of the c-axis and transforms into the high-temperature phase β-Si 3 N 4 . Compared with β-Si 3 N 4 , α-Si 3 N 4 is conducive to the development of columnar grains in ceramic materials, and is easier to sinter densification and self-reinforcement. The mechanical strength and fracture toughness of Si 3 N 4 ceramic materials will increase with the The increase of α-Si 3 N 4 phase content in the raw material increases. At the same time, the volume effect and surface effect of nano or submicron α-Si 3 N 4 ultrafine powder can realize low-temperature sintering of silicon nitride ceramic materials and endow the materials with excellent mechanical properties. Therefore, the particle size, α-phase content and impurity content of silicon nitride powder determine its quality and directly affect the quality of ceramic products.

氮化硅粉体质量取决于其制备方法。目前,制备Si3N4粉体的主要方法有:硅粉直接氮化法、碳热还原法和化学气相沉积法等。The quality of silicon nitride powder depends on its preparation method. At present, the main methods for preparing Si 3 N 4 powder are: silicon powder direct nitriding method, carbothermal reduction method and chemical vapor deposition method.

硅粉直接氮化法指纯净硅粉在N2、N2+H2或NH3的还原性气氛中发生反应,生成氮化硅微粉,此法在较低温度下得到的是α-Si3N4和β-Si3N4的混合物,高温下得到的只有β-Si3N4。如“一种高含量α晶型氮化硅粉末的生产方法”(CN 102173396 A)专利技术,采用机械活化预处理硅粉原料8h,以α-Si3N4和纳米非晶Si3N4为稀释剂,常压下通入氮气,在1350℃下直接氮化,产物再经过立式研磨机研磨7~10h,制备出α相含量为97.6的亚微米、微米级氮化硅粉末。但该制备法对硅粉粒径的要求比较高,而且反应后仍有部分硅粉剩余,工艺复杂,能耗高。The direct nitriding method of silicon powder refers to the reaction of pure silicon powder in a reducing atmosphere of N 2 , N 2 +H 2 or NH 3 to produce silicon nitride micropowder. This method obtains α-Si 3 at a lower temperature A mixture of N 4 and β-Si 3 N 4 , only β-Si 3 N 4 can be obtained at high temperature. For example, the patented technology of "a production method of high-content α-crystalline silicon nitride powder" (CN 102173396 A) uses mechanical activation to pretreat silicon powder raw materials for 8 hours, and α-Si 3 N 4 and nano-amorphous Si 3 N 4 As a diluent, nitrogen gas is introduced under normal pressure, and the product is directly nitrided at 1350 ° C. The product is then ground by a vertical grinder for 7 to 10 hours to prepare sub-micron and micron-sized silicon nitride powders with an α-phase content of 97.6. However, this preparation method has relatively high requirements on the particle size of the silicon powder, and some silicon powder remains after the reaction, so the process is complicated and the energy consumption is high.

碳热还原法是指SiO2和C的粉末在高温下的N2气氛中发生氮化和还原反应,生成Si3N4微粉。但是该法反应温度高,α相含量低,杂质含量特别是碳的含量较高,粉体颗粒粒径分布不均匀;化学气相沉积法是将硅的卤化物(SiCl4,SiBr4等)或硅的氢卤化物(SiHCl3、SiH2Cl2等)在N2、N2+H2或NH3的还原性气氛中直接发生化学气相反应生成氮化硅,此种方法生产的Si3N4粉体纯度高,颗粒超细且均匀,α相含量高,但反应过程不易控制,原料价格昂贵,对生产设备要求高。The carbothermal reduction method refers to the nitriding and reduction reaction of SiO 2 and C powder in N 2 atmosphere at high temperature to generate Si 3 N 4 fine powder. However, the reaction temperature of this method is high, the α phase content is low, the impurity content, especially the carbon content, is high, and the particle size distribution of the powder is uneven; the chemical vapor deposition method uses silicon halides (SiCl 4 , SiBr 4 , etc.) or Silicon hydrohalides (SiHCl 3 , SiH 2 Cl 2 , etc.) undergo a chemical vapor phase reaction directly in a reducing atmosphere of N 2 , N 2 +H 2 or NH 3 to form silicon nitride. Si 3 N produced by this method 4 The powder has high purity, ultra-fine and uniform particles, and high α-phase content, but the reaction process is not easy to control, the raw materials are expensive, and the requirements for production equipment are high.

因此,目前针对单相α-Si3N4超细粉体开展的制备技术,都存在一定的不足。如原料价格较高、工艺过程复杂、不易控制、能耗高或工业化程度低;所制备的产品纯度较低、粉体颗粒粒径分布不均匀或α相含量低。Therefore, the current preparation technologies for single-phase α-Si 3 N 4 ultrafine powders have certain deficiencies. For example, the price of raw materials is high, the process is complicated, difficult to control, high energy consumption or low degree of industrialization; the prepared product has low purity, uneven particle size distribution of powder or low α phase content.

发明内容Contents of the invention

本发明旨在克服现有技术存在的不足,提供一种反应温度低、成本低、合成工艺简单、过程易于控制、产率高和产业化前景大的单相α-Si3N4超细粉体的制备方法;用该方法制备的单相α-Si3N4超细粉体活性高、颗粒团聚小、粉体粒径分布均匀和纯度高。The present invention aims to overcome the deficiencies in the prior art and provide a single-phase α-Si 3 N 4 superfine powder with low reaction temperature, low cost, simple synthesis process, easy process control, high yield and great industrialization prospect The preparation method of the body; the single-phase α-Si 3 N 4 ultrafine powder prepared by the method has high activity, small particle agglomeration, uniform particle size distribution and high purity of the powder.

为实现上述目的,本发明采用的技术方案是:先将5~30wt%的单质硅粉、15~45wt%的固态氮源和40~80wt%的卤化物粉混合均匀,制得混合物;再将所述混合物置入管式电炉内,在氮气气氛下以2~10℃/min的升温速率升至1000~1300℃,保温2~6小时;然后将所得产物用去离子水反复清洗,直至分别用AgNO3和Ca(NO3)2溶液滴定不再出现白色沉淀为止;最后在110℃条件下干燥10~24小时,即得单相α-Si3N4超细粉体。In order to achieve the above object, the technical solution adopted in the present invention is: firstly mix 5-30wt% elemental silicon powder, 15-45wt% solid nitrogen source and 40-80wt% halide powder to prepare the mixture; The mixture is placed in a tubular electric furnace, raised to 1000-1300°C at a rate of 2-10°C/min under a nitrogen atmosphere, and kept at a temperature of 2-6 hours; then the resulting product is repeatedly washed with deionized water until the Titrate with AgNO 3 and Ca(NO 3 ) 2 solutions until no white precipitate appears; finally dry at 110°C for 10-24 hours to obtain single-phase α-Si 3 N 4 ultrafine powder.

所述单质硅粉中的Si含量≥95wt%,粒径≤50μm。The Si content in the elemental silicon powder is ≥95wt%, and the particle size is ≤50 μm.

所述固态氮源为工业纯或为分析纯,粒径均≤200μm;所述固态氮源为氯化铵、尿素和三聚氰胺的中的一种以上。The solid nitrogen source is industrially pure or analytically pure, and the particle size is ≤200 μm; the solid nitrogen source is at least one of ammonium chloride, urea and melamine.

所述卤化物粉为工业纯或为分析纯,粒径均≤200μm;所述卤化物粉为氯化钠、氟化钾和氟化钠中的一种以上。The halide powder is industrially pure or analytically pure, and the particle size is ≤200 μm; the halide powder is more than one of sodium chloride, potassium fluoride and sodium fluoride.

由于采用上述技术方案,本发明与现有技术相比具有如下积极效果和突出特点:Due to the adoption of the above technical solution, the present invention has the following positive effects and outstanding features compared with the prior art:

1、本发明在熔融盐中实现反应物原子尺度的混合,使反应成分在液相中的流动性增强,扩散速率显著提高;能有效控制反应进程、降低反应温度和缩短反应时间;1. The present invention realizes the atomic-scale mixing of the reactants in the molten salt, enhances the fluidity of the reaction components in the liquid phase, and significantly increases the diffusion rate; it can effectively control the reaction process, reduce the reaction temperature and shorten the reaction time;

2、本发明通过熔盐法能更容易地控制晶体颗粒的形状和尺寸,粉体粒度为100~500nm,合成产物各组分配比准确,成分均匀,无偏析;2. The present invention can more easily control the shape and size of crystal particles through the molten salt method. The particle size of the powder is 100-500nm. The proportion of each component of the synthetic product is accurate, the composition is uniform, and there is no segregation;

3、本发明在反应过程以及随后的清洗过程中,有利于杂质的清除,形成高纯的反应物,无杂相;3. The present invention is beneficial to the removal of impurities during the reaction process and the subsequent cleaning process, forming high-purity reactants without impurity phases;

4、本发明的原料来源广泛和价格低廉,生产成本低,具有很大的产业化前景;4. The raw material source of the present invention is extensive and cheap, and production cost is low, has very big industrialization prospect;

5、本发明制备的产物的颗粒均匀分散于熔融盐中,避免了相互连接,使得颗粒分散性很好,极大地降低了溶解洗涤后团聚现象的发生。5. The particles of the product prepared by the present invention are uniformly dispersed in the molten salt, avoiding interconnection, making the particles dispersible well, and greatly reducing the occurrence of agglomeration after dissolution and washing.

因此,本发明具有反应温度低、成本低、合成工艺简单、过程易于控制、产率高和产业化前景大的特点;所制备的单相α-Si3N4超细粉体粒度为100~500nm,无杂相、活性高、颗粒团聚小和粒度分布均匀。Therefore, the present invention has the characteristics of low reaction temperature, low cost, simple synthesis process, easy process control, high yield and great industrialization prospect; the prepared single-phase α-Si 3 N 4 ultrafine powder has a particle size of 100- 500nm, no impurity phase, high activity, small particle agglomeration and uniform particle size distribution.

附图说明Description of drawings

图1是本发明制备的一种单相α-Si3N4粉体的XRD图谱;Fig. 1 is the XRD spectrum of a kind of single-phase α-Si 3 N 4 powder prepared by the present invention;

图2是图1所示的单相α-Si3N4粉体的SEM图;Figure 2 is an SEM image of the single-phase α-Si 3 N 4 powder shown in Figure 1;

图3是图2中箭头所指位置的EDS图。Fig. 3 is an EDS diagram of the position indicated by the arrow in Fig. 2 .

具体实施方式Detailed ways

下面结合附图和具体实施方式对本发明做进一步的描述,并非对其保护范围的限制。The present invention will be further described below in conjunction with the accompanying drawings and specific embodiments, which are not intended to limit the protection scope thereof.

为避免重复,先将本具体实施方式所涉及的原料统一描述如下,实施例中不再赘述:In order to avoid repetition, the raw materials involved in this specific embodiment are first described as follows, and are not repeated in the examples:

所述单质硅粉中的Si含量≥95wt%,粒径≤50μm。The Si content in the elemental silicon powder is ≥95wt%, and the particle size is ≤50 μm.

所述氯化铵、尿素和三聚氰胺均为工业纯或均为分析纯,粒径均≤200μm。The ammonium chloride, urea and melamine are all industrially pure or analytically pure, and the particle diameters are all ≤200 μm.

所述氯化钠、氟化钾和氟化钠均为工业纯或均为分析纯,粒径均≤200μm。The sodium chloride, potassium fluoride and sodium fluoride are all industrial pure or analytical pure, and the particle diameters are all ≤200 μm.

实施例1Example 1

一种单相α-Si3N4超细粉体及其制备方法。先将10~20wt%的单质硅粉、15~30wt%的固态氮源和60~75wt%的卤化物粉混合均匀,制得混合物;再将所述混合物置入管式电炉内,在氮气气氛下以2~5℃/min的升温速率升至1200~1300℃,保温2~4小时;然后将所得产物用去离子水反复清洗,直至分别用AgNO3和Ca(NO3)2溶液滴定不再出现白色沉淀为止;最后在110℃条件下干燥10~24小时,即得单相α-Si3N4超细粉体。A single-phase α-Si 3 N 4 ultrafine powder and a preparation method thereof. First mix 10-20wt% elemental silicon powder, 15-30wt% solid nitrogen source and 60-75wt% halide powder to prepare a mixture; The temperature was raised to 1200-1300°C at a rate of 2-5°C/min, and kept for 2-4 hours; then, the obtained product was repeatedly washed with deionized water until it was titrated with AgNO 3 and Ca(NO 3 ) 2 solutions respectively. Until white precipitate appears again; finally dry at 110°C for 10-24 hours to obtain single-phase α-Si 3 N 4 ultrafine powder.

本实施例中:所述固态氮源为三聚氰胺;所述卤化物粉为70~90wt%的氯化钠和10~30wt%的氟化钠的混合物。In this embodiment: the solid nitrogen source is melamine; the halide powder is a mixture of 70-90 wt% sodium chloride and 10-30 wt% sodium fluoride.

图1是实施例制备的一种单相α-Si3N4粉体的XRD图谱;图2是图1所示的单相α-Si3N4粉体的SEM图;图3是图2中箭头所指位置的EDS图。从图1~图3可以看出:本实施例所制备的单相α-Si3N4超细粉体纯度高,颗粒无团聚,粒度为100~200nm。Fig. 1 is an XRD pattern of a single-phase α-Si 3 N 4 powder prepared in the example; Fig. 2 is an SEM image of the single-phase α-Si 3 N 4 powder shown in Fig. 1; Fig. 3 is a graph of Fig. 2 The EDS map of the location indicated by the middle arrow. It can be seen from Figures 1 to 3 that the single-phase α-Si 3 N 4 ultrafine powder prepared in this example has high purity, no particle agglomeration, and a particle size of 100-200 nm.

实施例2Example 2

一种单相α-Si3N4超细粉体及其制备方法。先将10~20wt%的单质硅粉、15~30wt%的固态氮源和60~75wt%的卤化物粉混合均匀,制得混合物;再将所述混合物置入管式电炉内,在氮气气氛下以2~5℃/min的升温速率升至1100~1200℃,保温2~4小时;然后将所得产物用去离子水反复清洗,直至分别用AgNO3和Ca(NO3)2溶液滴定不再出现白色沉淀为止;最后在110℃条件下干燥10~24小时,即得单相α-Si3N4超细粉体。A single-phase α-Si 3 N 4 ultrafine powder and a preparation method thereof. First mix 10-20wt% elemental silicon powder, 15-30wt% solid nitrogen source and 60-75wt% halide powder to prepare a mixture; 2-5°C/min heating rate to 1100-1200°C and keep warm for 2-4 hours; then the product obtained was washed repeatedly with deionized water until it was titrated with AgNO 3 and Ca(NO 3 ) 2 solutions respectively. Until white precipitate appears again; finally dry at 110°C for 10-24 hours to obtain single-phase α-Si 3 N 4 ultrafine powder.

本实施例中:所述固态氮源为50~70wt%的三聚氰胺和30~50wt%的氯化铵的混合物;所述卤化物粉为氟化钠。In this embodiment: the solid nitrogen source is a mixture of 50-70 wt% melamine and 30-50 wt% ammonium chloride; the halide powder is sodium fluoride.

本实施例所制备的单相α-Si3N4超细粉体体纯度高,颗粒无团聚,粒度为150~250nm。The single-phase α-Si 3 N 4 ultrafine powder prepared in this example has high purity, no particle agglomeration, and a particle size of 150-250 nm.

实施例3Example 3

一种单相α-Si3N4超细粉体及其制备方法。先将5~15wt%的单质硅粉、10~25wt%的固态氮源和70~80wt%的卤化物粉混合均匀,制得混合物;再将所述混合物置入管式电炉内,在氮气气氛下以5~10℃/min的升温速率升至1000~1100℃,保温4~6小时;然后将所得产物用去离子水反复清洗,直至分别用AgNO3和Ca(NO3)2溶液滴定不再出现白色沉淀为止;最后在110℃条件下干燥10~24小时,即得单相α-Si3N4超细粉体。A single-phase α-Si 3 N 4 ultrafine powder and a preparation method thereof. Firstly mix 5-15wt% elemental silicon powder, 10-25wt% solid nitrogen source and 70-80wt% halide powder to make a mixture; 1000-1100°C at a heating rate of 5-10°C/min, and kept warm for 4-6 hours; then the resulting product was washed repeatedly with deionized water until it was titrated with AgNO 3 and Ca(NO 3 ) 2 solutions respectively. Until white precipitate appears again; finally dry at 110°C for 10-24 hours to obtain single-phase α-Si 3 N 4 ultrafine powder.

本实施例中:所述固态氮源为尿素;所述卤化物粉为氟化钾。In this embodiment: the solid nitrogen source is urea; the halide powder is potassium fluoride.

本实施例所制备的单相α-Si3N4超细粉体纯度高,颗粒无团聚,粒度为300~400nm。The single-phase α-Si 3 N 4 ultrafine powder prepared in this example has high purity, no particle agglomeration, and a particle size of 300-400 nm.

实施例4Example 4

一种单相α-Si3N4超细粉体及其制备方法。先将5~15wt%的单质硅粉、10~25wt%的固态氮源和70~80wt%的卤化物粉混合均匀,制得混合物;再将所述混合物置入管式电炉内,在氮气气氛下以5~10℃/min的升温速率升至1100~1200℃,保温4~6小时;然后将所得产物用去离子水反复清洗,直至分别用AgNO3和Ca(NO3)2溶液滴定不再出现白色沉淀为止;最后在110℃条件下干燥10~24小时,即得单相α-Si3N4超细粉体。A single-phase α-Si 3 N 4 ultrafine powder and a preparation method thereof. Firstly mix 5-15wt% elemental silicon powder, 10-25wt% solid nitrogen source and 70-80wt% halide powder to make a mixture; 1100-1200°C at a heating rate of 5-10°C/min, and kept warm for 4-6 hours; then the resulting product was washed repeatedly with deionized water until it was titrated with AgNO 3 and Ca(NO 3 ) 2 solutions respectively. Until white precipitate appears again; finally dry at 110°C for 10-24 hours to obtain single-phase α-Si 3 N 4 ultrafine powder.

本实施例中:所述固态氮源为50~70wt%的尿素和30~50wt%的三聚氰胺的混合物;所述卤化物粉为50~60wt%的氯化钠和40~50wt%的氟化钾的混合物。In this embodiment: the solid nitrogen source is a mixture of 50-70 wt% urea and 30-50 wt% melamine; the halide powder is 50-60 wt% sodium chloride and 40-50 wt% potassium fluoride mixture.

本实施例所制备的单相α-Si3N4超细粉体纯度高,颗粒无团聚,粒度为350~500nm。The single-phase α-Si 3 N 4 ultrafine powder prepared in this example has high purity, no particle agglomeration, and a particle size of 350-500 nm.

实施例5Example 5

一种单相α-Si3N4超细粉体及其制备方法。先将15~30wt%的单质硅粉、25~45wt%的固态氮源和40~60wt%的卤化物粉混合均匀,制得混合物;再将所述混合物置入管式电炉内,在氮气气氛下以5~10℃/min的升温速率升至1000~1100℃,保温4~6小时;然后将所得产物用去离子水反复清洗,直至分别用AgNO3和Ca(NO3)2溶液滴定不再出现白色沉淀为止;最后在110℃条件下干燥10~24小时,即得单相α-Si3N4超细粉体。A single-phase α-Si 3 N 4 ultrafine powder and a preparation method thereof. First mix 15-30wt% elemental silicon powder, 25-45wt% solid nitrogen source and 40-60wt% halide powder to prepare a mixture; 1000-1100°C at a heating rate of 5-10°C/min, and kept warm for 4-6 hours; then the resulting product was washed repeatedly with deionized water until it was titrated with AgNO 3 and Ca(NO 3 ) 2 solutions respectively. Until white precipitate appears again; finally dry at 110°C for 10-24 hours to obtain single-phase α-Si 3 N 4 ultrafine powder.

本实施例中:所述固态氮源为氯化铵;所述卤化物粉为氯化钠。In this embodiment: the solid nitrogen source is ammonium chloride; the halide powder is sodium chloride.

本实施例所制备的单相α-Si3N4超细粉体纯度高、颗粒无团聚,粒度为150~200nm。The single-phase α-Si 3 N 4 ultrafine powder prepared in this example has high purity, no particle agglomeration, and a particle size of 150-200 nm.

实施例6Example 6

一种单相α-Si3N4超细粉体及其制备方法。先将15~30wt%的单质硅粉、25~45wt%的固态氮源和40~60wt%的卤化物粉混合均匀,制得混合物;再将所述混合物置入管式电炉内,在氮气气氛下以2~5℃/min的升温速率升至1200~1300℃,保温4~6小时;然后将所得产物用去离子水反复清洗,直至分别用AgNO3和Ca(NO3)2溶液滴定不再出现白色沉淀为止;最后在110℃条件下干燥10~24小时,即得单相α-Si3N4超细粉体。A single-phase α-Si 3 N 4 ultrafine powder and a preparation method thereof. First mix 15-30wt% elemental silicon powder, 25-45wt% solid nitrogen source and 40-60wt% halide powder to prepare a mixture; The heating rate was raised to 1200-1300°C at a rate of 2-5°C/min, and the temperature was kept for 4-6 hours; then, the obtained product was repeatedly washed with deionized water until it was titrated with AgNO 3 and Ca(NO 3 ) 2 solutions respectively. Until white precipitate appears again; finally dry at 110°C for 10-24 hours to obtain single-phase α-Si 3 N 4 ultrafine powder.

本实施例中:所述固态氮源为50~60wt%的三聚氰胺、20~30wt%的氯化铵和20~30wt%的尿素的混合物;所述卤化物粉为45~60wt%的氯化钠、25~35wt%的氟化钠和15~20的wt%氟化钾的混合物。In this embodiment: the solid nitrogen source is a mixture of 50-60 wt% melamine, 20-30 wt% ammonium chloride and 20-30 wt% urea; the halide powder is 45-60 wt% sodium chloride , A mixture of 25-35 wt% sodium fluoride and 15-20 wt% potassium fluoride.

本实施例所制备的单相α-Si3N4超细粉体纯度高、颗粒无团聚,粒度为200~300nm。The single-phase α-Si 3 N 4 ultrafine powder prepared in this example has high purity, no particle agglomeration, and a particle size of 200-300 nm.

实施例7Example 7

一种单相α-Si3N4超细粉体及其制备方法。先将15~30wt%的单质硅粉、25~45wt%的固态氮源和40~60wt%的卤化物粉混合均匀,制得混合物;再将所述混合物置入管式电炉内,在氮气气氛下以2~5℃/min的升温速率升至1100~1200℃,保温2~4小时;然后将所得产物用去离子水反复清洗,直至分别用AgNO3和Ca(NO3)2溶液滴定不再出现白色沉淀为止;最后在110℃条件下干燥10~24小时,即得单相α-Si3N4超细粉体。A single-phase α-Si 3 N 4 ultrafine powder and a preparation method thereof. First mix 15-30wt% elemental silicon powder, 25-45wt% solid nitrogen source and 40-60wt% halide powder to prepare a mixture; 2-5°C/min heating rate to 1100-1200°C and keep warm for 2-4 hours; then the product obtained was washed repeatedly with deionized water until it was titrated with AgNO 3 and Ca(NO 3 ) 2 solutions respectively. Until white precipitate appears again; finally dry at 110°C for 10-24 hours to obtain single-phase α-Si 3 N 4 ultrafine powder.

本实施例中:所述固态氮源为50~70wt%的氯化铵和30~50wt%的尿素的混合物;所述卤化物粉为50~60wt%的氟化钠和40~50wt%的氟化钾的混合物。In this embodiment: the solid nitrogen source is a mixture of 50-70 wt% ammonium chloride and 30-50 wt% urea; the halide powder is 50-60 wt% sodium fluoride and 40-50 wt% fluorine Potassium mixture.

本实施例所制备的单相α-Si3N4超细粉体纯度高、颗粒无团聚,粒度为250~350nm。The single-phase α-Si 3 N 4 ultrafine powder prepared in this example has high purity, no particle agglomeration, and a particle size of 250-350 nm.

本具体实施方式与现有技术相比具有如下积极效果和突出特点:Compared with the prior art, this specific embodiment has the following positive effects and outstanding features:

1、本具体实施方式在熔融盐中实现反应物原子尺度的混合,使反应成分在液相中的流动性增强,扩散速率显著提高;能有效控制反应进程和降低反应温度;1. In this specific embodiment, the atomic scale mixing of the reactants is realized in the molten salt, so that the fluidity of the reaction components in the liquid phase is enhanced, and the diffusion rate is significantly improved; the reaction process can be effectively controlled and the reaction temperature can be reduced;

2、本具体实施方式通过熔盐法能更容易地控制晶体颗粒的形状和尺寸,粉体粒度为100~500nm。合成产物各组分配比准确,成分均匀,无偏析;2. In this specific embodiment, the shape and size of the crystal particles can be more easily controlled by the molten salt method, and the particle size of the powder is 100-500 nm. The proportion of each component of the synthetic product is accurate, the composition is uniform, and there is no segregation;

3、本具体实施方式在反应过程以及随后的清洗过程中,有利于杂质的清除,形成高纯的反应物,无杂相;3. In the reaction process and the subsequent cleaning process of this specific embodiment, it is beneficial to the removal of impurities and forms a high-purity reactant without impurities;

4、本具体实施方式制备的产物的颗粒均匀分散于熔融盐中,避免了相互连接,使得颗粒分散性很好,极大地降低了溶解洗涤后团聚现象的发生;4. The particles of the product prepared in this specific embodiment are evenly dispersed in the molten salt, avoiding interconnection, making the particle dispersibility very good, and greatly reducing the occurrence of agglomeration after dissolution and washing;

5、本具体实施方式的原料来源广泛和价格低廉,生产成本低,具有很大的产业化生产前景。5. The source of raw materials in this specific embodiment is wide and cheap, the production cost is low, and it has great prospects for industrialized production.

因此,本具体实施方式具有反应温度低、成本低、合成工艺简单、过程易于控制、产率高的特点;所制备的单相α-Si3N4超细粉体粒度为100~500nm,无杂相、活性高、颗粒团聚小和粒度分布均匀。Therefore, this embodiment has the characteristics of low reaction temperature, low cost, simple synthesis process, easy process control, and high yield; the prepared single-phase α-Si 3 N 4 ultrafine powder has a particle size of 100-500 nm, without heterogeneous phase, high activity, small particle agglomeration and uniform particle size distribution.

Claims (1)

1.一种单相α-Si3N4超细粉体的制备方法,其特征在于先将5~30wt%的单质硅粉、15~45wt%的固态氮源和40~80wt%的卤化物粉混合均匀,制得混合物;再将所述混合物置入管式电炉内,在氮气气氛下以2~10℃/min的升温速率升至1000~1300℃,保温2~6小时;然后将所得产物用去离子水反复清洗,直至分别用AgNO3和Ca(NO3)2溶液滴定不再出现白色沉淀为止;最后在110℃条件下干燥10~24小时,即得单相α-Si3N4超细粉体。 1. A preparation method of single-phase α-Si 3 N 4 ultrafine powder, which is characterized in that 5~30wt% elemental silicon powder, 15~45wt% solid nitrogen source and 40~80wt% halide Mix the powder evenly to prepare the mixture; put the mixture into a tube electric furnace, raise the temperature to 1000-1300°C at a rate of 2-10°C/min under a nitrogen atmosphere, and keep it warm for 2-6 hours; then the obtained The product was washed repeatedly with deionized water until no white precipitate appeared after titration with AgNO 3 and Ca(NO 3 ) 2 solutions respectively; finally, it was dried at 110°C for 10-24 hours to obtain single-phase α-Si 3 N 4 ultrafine powder.
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CN105483823A (en) * 2015-12-04 2016-04-13 烟台同立高科新材料股份有限公司 Silicon nitride powder for solar polysilicon ingot casting and preparation method thereof
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CN112794332A (en) * 2021-01-12 2021-05-14 北京科技大学 A method for nitriding-purifying removal of boron impurities in metallurgical silicon

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