CN104241165B - A kind of distance piece control device and method - Google Patents
A kind of distance piece control device and method Download PDFInfo
- Publication number
- CN104241165B CN104241165B CN201310245120.3A CN201310245120A CN104241165B CN 104241165 B CN104241165 B CN 104241165B CN 201310245120 A CN201310245120 A CN 201310245120A CN 104241165 B CN104241165 B CN 104241165B
- Authority
- CN
- China
- Prior art keywords
- ratchet wheel
- inner rear
- along
- inner front
- rotating spring
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 238000000034 method Methods 0.000 title claims abstract description 35
- 125000006850 spacer group Chemical group 0.000 claims description 88
- 230000009471 action Effects 0.000 claims description 20
- 239000000758 substrate Substances 0.000 abstract description 24
- 238000010586 diagram Methods 0.000 description 5
- 230000008569 process Effects 0.000 description 4
- 239000004065 semiconductor Substances 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000005286 illumination Methods 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Transmission Devices (AREA)
Abstract
The invention provides a kind of distance piece control device and method, including：Round wires torsional spring, interior rear ratchet, interior preceding ratchet and outer ratchet；Wherein, the outer ratchet has a stress surface；The interior rear ratchet and interior preceding ratchet are in the outer ratchet；Stress surface of the interior preceding ratchet close to the outer ratchet；The round wires torsional spring, the interior rear ratchet and the interior preceding ratchet sequential.When the stress surface for thering is an external force F to promote outer ratchet, realize that distance piece control device drives distance piece propulsion and the motion for the both direction retracted automatically by round wires torsional spring, interior rear ratchet, interior preceding ratchet and outer ratchet.In addition, distance piece is limited in limit range during automatic promote with automatic retract by fixture and spring guide and limit part, it is to avoid produce damage to substrate.
Description
Technical Field
The invention relates to the field of semiconductors, in particular to a spacer control device and method.
Background
In semiconductor processing, an alignment system is a kit for substrate bonding that is used to align two substrates (substrates) before bonding occurs.
In the prior art, the alignment method of the current alignment system includes: indirect alignment and direct alignment. The indirect alignment is performed by using a mode of drawing a cross line to record the position of a mark; direct alignment is suitable for use in the case of markings where the upper and lower substrates can be viewed simultaneously. Further, the illumination mode of the current alignment system includes: visible bottom lighting and near infrared top lighting.
In the prior art, alignment systems include machine vision systems and motion stage systems. The work piece platform of the motion platform system bears the motion of the substrate, the microscope objective of the machine vision system shoots the mark of the substrate, the light path conversion is carried out through a spectroscope, a reflector and the like, the lens barrel lens images the CCD camera, and finally the image is displayed on the interface of the industrial personal computer. In particular, the microscope objective can carry out X, Y, Z three-freedom-degree movement by the optical path adjusting movement mechanism, thereby realizing the shooting of the marks of different position areas.
After a first substrate is mounted, the objective lens and the workpiece table are moved to enable the mark center of the first substrate to be located near the center of the field of view of the CCD camera, then a cross line is drawn at the mark center on the interface of the industrial personal computer, the objective lens is not moved at the moment, the first substrate is lifted, a second substrate is loaded, the workpiece table is moved and adjusted to enable the mark center of the second substrate to be overlapped with the cross line, and therefore mark alignment of the two substrates is achieved.
In the process, a spacer needs to be placed between the first substrate and the second substrate to separate the first substrate from the second substrate, and a carrier for loading the two substrates is a clamp. In the prior art, after a first substrate is loaded, a second substrate is loaded only after a spacer is manually shifted in or out by using a clamp, and the movement of the spacer in two directions of pushing and retracting cannot be realized under the action of unidirectional axial force.
Disclosure of Invention
The invention aims to provide a spacer control device and a spacer control method, which aim to solve the problem that the prior art can not realize the movement of the spacer in two directions of pushing and retracting under the action of unidirectional axial force.
In order to solve the technical problems, the invention adopts the technical scheme that: a spacer control device comprising: a round wire rotating spring, an inner rear ratchet wheel, an inner front ratchet wheel and an outer ratchet wheel; wherein,
the outer ratchet wheel is provided with a stress surface;
the inner rear ratchet wheel and the inner front ratchet wheel are arranged in the outer ratchet wheel;
the inner front ratchet wheel is close to the stress surface of the outer ratchet wheel;
the round wire rotating spring, the inner rear ratchet wheel and the inner front ratchet wheel are arranged in sequence.
Optionally, in the spacer control device, the spacer control device further includes: the round wire rotating spring, the inner rear ratchet wheel, the inner front ratchet wheel and the outer ratchet wheel are all arranged in the fixing piece; the fixing piece is fixedly connected with a clamp.
Optionally, in the spacer control device, the spacer control device further includes: the spring guide limiting part is arranged in the middle of the circular wire rotating spring.
Optionally, in the spacer control device, the inner rear ratchet wheel can be overlapped with the structure before rotation after rotating for 90 degrees.
Optionally, in the spacer control device, the outer ratchet wheel has 8 inclined slots and 4 guide slots uniformly distributed along a circle, and one surface of the guide slot and one surface of the inclined slot parallel to the shaft are coplanar.
Meanwhile, the invention also provides a spacer control method, which uses the spacer control device and comprises the following steps:
applying an external force F to the stress surface of the outer ratchet wheel to enable the inner front ratchet wheel to push the inner rear ratchet wheel along the outer ratchet wheel, and when the advancing distance of the inner rear ratchet wheel exceeds the length/distance L1, under the tangential force of the inner front ratchet wheel and the resilience force of the round wire rotating spring, the inner rear ratchet wheel rotates along the inclined surface of the inner front ratchet wheel for the first time; removing the external force F, retracting the inner rear ratchet wheel under the action of the resilience force of the round wire rotating spring, and performing second rotation along the inclined plane of the outer ratchet wheel, wherein at the moment, the spacer control device drives the spacer to advance;
applying an external force F to the stress surface of the outer ratchet wheel again to enable the inner front ratchet wheel to push the inner rear ratchet wheel along the outer ratchet wheel again, and when the advancing distance of the inner rear ratchet wheel exceeds the length/distance L2, under the tangential force of the inner front ratchet wheel and the resilience force of the round wire rotating spring, performing third rotation on the inner rear ratchet wheel along the inclined surface of the inner front ratchet wheel; and (3) removing the external force F again, retracting the inner and rear ratchet wheels under the action of the resilience force of the circular wire rotating spring, and performing fourth rotation along the inclined plane of the outer ratchet wheel, wherein at the moment, the spacer control device drives the spacer to retract.
Optionally, in the spacer control method, the apparatus further includes: the fixing piece and the spring guide limiting piece;
when the inner rear ratchet wheel advance distance is greater than length/distance L1-L2, the inner rear ratchet wheel advance advances the spring guide stop into contact with the fixed member to place the spacer control device in an extreme position.
Optionally, in the spacer control method,
the inner rear ratchet wheel rotates along the inclined plane of the inner front ratchet wheel for the first time, retracts and rotates along the inclined plane of the outer ratchet wheel for the second time, and the sum of the rotation amount of the first rotation and the second rotation is 45 degrees;
and the inner rear ratchet wheel rotates along the slope of the inner front ratchet wheel for the third time, retracts and rotates along the slope of the outer ratchet wheel for the fourth time, wherein the sum of the rotation amounts of the third rotation and the fourth rotation is 45 degrees.
Optionally, in the spacer control method, the outer ratchet wheel has a guide groove;
and applying an external force F to the stress surface of the outer ratchet wheel to enable the inner front ratchet wheel to push the inner rear ratchet wheel along the outer ratchet wheel, when the advancing distance of the inner rear ratchet wheel exceeds a length/distance L1, under the action of the tangential force of the inner front ratchet wheel and the resilience force of the round wire rotating spring, the inner rear ratchet wheel rotates along the inclined surface of the inner front ratchet wheel for the first time, the inner front ratchet wheel pushes the inner rear ratchet wheel along the guide groove of the outer ratchet wheel, when the advancing distance of the inner rear ratchet wheel exceeds a length/distance L1, the inner rear ratchet wheel is separated from the guide groove of the outer ratchet wheel, and under the action of the tangential force of the inner front ratchet wheel and the resilience force of the round wire rotating spring, the inner rear ratchet wheel rotates along the inclined surface of the inner front ratchet wheel for the first time.
Optionally, in the spacer control method, the outer ratchet wheel is provided with an inclined groove;
and removing the external force F, wherein in the step of retracting the inner rear ratchet wheel and performing second rotation along the inclined plane of the outer ratchet wheel under the action of the resilience force of the circular wire rotating spring, the inner rear ratchet wheel retracts, performs second rotation along the inclined plane of the outer ratchet wheel and finally stops in the chute.
Optionally, in the spacer control method,
and applying an external force F to the stress surface of the outer ratchet wheel again to enable the inner front ratchet wheel to push the inner rear ratchet wheel along the outer ratchet wheel again, when the advancing distance of the inner rear ratchet wheel exceeds a length/distance L2, under the action of tangential force of the inner front ratchet wheel and resilience force of the round line rotating spring, the inner rear ratchet wheel rotates third along the inclined surface of the inner front ratchet wheel, the inner front ratchet wheel pushes the inner rear ratchet wheel along the guide groove of the outer ratchet wheel again, when the advancing distance of the inner rear ratchet wheel exceeds a length/distance L2, the inner rear ratchet wheel is separated from the guide groove of the outer ratchet wheel, and under the action of tangential force of the inner front ratchet wheel and resilience force of the round line rotating spring, the inner rear ratchet wheel rotates third along the inclined surface of the inner front ratchet wheel.
Optionally, in the spacer control method,
and withdrawing the external force F again, wherein under the action of the resilience force of the circular line rotating spring, the inner rear ratchet wheel retracts and rotates for the fourth time along the inclined plane of the outer ratchet wheel, and finally the inner rear ratchet wheel retracts, rotates for the fourth time along the inclined plane of the outer ratchet wheel and resets.
The invention provides a spacer control device and a method, which have the beneficial effects that: when an external force F pushes the stress surface of the outer ratchet wheel, the spacer control device drives the spacer to move in two directions of propelling and automatically retracting through the round wire rotating spring, the inner rear ratchet wheel, the inner front ratchet wheel and the outer ratchet wheel. In addition, the spacing piece is limited within a limit range in the processes of automatic advancing and automatic retracting through the fixing piece and the spring guide limiting piece, and damage to the substrate is avoided.
Drawings
FIG. 1 is a schematic diagram of a spacer control apparatus and method according to an embodiment of the present invention;
FIG. 2 is a schematic top view of the principles of a spacer control apparatus and method according to an embodiment of the present invention;
FIG. 3 is a schematic structural view of a spacer control apparatus and method according to an embodiment of the present invention;
FIG. 4 is a schematic structural view of the inner rear ratchet of the spacer control apparatus and method of the present invention;
FIG. 5 is a schematic structural view of an inner front ratchet of the spacer control apparatus and method of the present invention;
FIG. 6 is a schematic structural view of an outer ratchet of the spacer control apparatus and method of the present invention;
FIG. 7 is a schematic structural view of a guide groove of an outer ratchet of the spacer control apparatus and method according to the embodiment of the present invention;
FIG. 8 is a schematic structural view of the length of the guide slot of the outer ratchet wheel of the spacer control apparatus and method in accordance with an embodiment of the present invention;
fig. 9 is a schematic view of the advancement process of the spacer control apparatus and method according to the embodiment of the present invention.
Detailed Description
The spacer control apparatus and method according to the present invention will be described in further detail with reference to the accompanying drawings and specific embodiments. Advantages and features of the present invention will become apparent from the following description and from the claims. It is to be noted that the drawings are in a very simplified form and are not to precise scale, which is merely for the purpose of facilitating and distinctly claiming the embodiments of the present invention.
Please refer to fig. 1, which is a schematic diagram of a spacer control device according to an embodiment of the present invention. As shown in fig. 1, the substrate 104 is loaded by the fixture 105, the spacers 103a, 103b and 103c are uniformly distributed at 120 °, an external force F (in particular, the external force F is provided by an air cylinder in the embodiment of the present invention) provides a unidirectional axial pushing force, the air cylinder 101a, the air cylinder 101b and the air cylinder 101c push the spacer control devices 102a, 102b and 102c, respectively, and the spacers 103a, 103b and 103c are fixed with the spacer control devices 102a, 102b and 102c, respectively. When the cylinder 101a provides unidirectional axial thrust, the spacer 103a is driven by the spacer control device 102a to realize the movement in two directions of self-propulsion and self-retraction.
As shown in fig. 2, when the cylinder 101b provides a unidirectional axial thrust, the spacer control device 102b drives the spacer 103b to realize the movement in two directions of self-propulsion and self-retraction; wherein the gripper 105 loads the spacer 103b onto the substrate 104.
Please refer to fig. 3, which is a schematic structural diagram of a spacer control device according to an embodiment of the present invention. As shown in fig. 3, a spacer control device 102a includes: a round wire rotating spring, an inner rear ratchet 204, an inner front ratchet 205 and an outer ratchet 206; wherein, the outer ratchet 206 has a force bearing surface;
the inner rear ratchet 204 and the inner front ratchet 205 are in the outer ratchet 206;
the inner front ratchet 204 is close to the force bearing surface of the outer ratchet 206;
the round wire rotating spring, the inner rear ratchet 204 and the inner front ratchet 205 are arranged in sequence.
Further, the spacer control device 102a further includes: a fixed part 201, wherein the round wire rotating spring, the inner rear ratchet 204, the inner front ratchet 205 and the outer ratchet 206 are arranged in the fixed part 201; the fixing member 201 is fixedly connected to a clamp 105, and the clamp 105 carries a spacer 103.
Further, the spacer control device 102a further includes: the spring guide limiting piece 203 is arranged in the middle of the circular wire rotating spring, and the spring guide limiting piece 203 is arranged in the middle of the circular wire rotating spring; dividing the round wire rotating spring into a round wire rotating spring 202a and a round wire rotating spring 202 b;
further, the spacer control device 102a provides a unidirectional axial thrust to the force-bearing surface of the outer ratchet 206 by an external force F;
further, please refer to fig. 4, which is a schematic structural diagram of the inner rear ratchet of the spacer control device according to the embodiment of the present invention. As shown in FIG. 4, the inner rear ratchet 204 can be rotated 90 to coincide with the rotation before.
Further, please refer to fig. 5, which is a schematic structural diagram of an inner front ratchet of a spacer control device according to an embodiment of the present invention. As shown in FIG. 5, the inner front ratchet 205 has a ramped surface 51.
Further, please refer to fig. 6-8, which are schematic structural views of an outer ratchet of a spacer control device according to an embodiment of the present invention. As shown in fig. 6-8, the outer ratchet 206 has a slope 61, and the outer ratchet 206 has 4 guide grooves 501 and 8 inclined grooves 503 uniformly distributed along a circle, and one side of the guide groove 501 and one side of the inclined groove 503 parallel to the axis are coplanar. The 4 guide grooves 501 are distributed in axial symmetry, and the length of the guide groove 502 is shown in fig. 8.
Meanwhile, the invention also provides a spacer control method, which uses the spacer control device and comprises the following steps:
as shown in fig. 2 and 8, an external force F is applied to the force-bearing surface of the outer ratchet 206 (specifically, the external force F is provided by an air cylinder in the embodiment of the present invention), so that the inner front ratchet 205 pushes the inner rear ratchet 204 along the outer ratchet 206, specifically, the inner front ratchet 205 pushes the inner rear ratchet 204 along the guide groove of the outer ratchet 206, and an axial pushing force and a tangential force are applied to the inner rear ratchet 204 through the inclined surface 51 of the inner front ratchet 205, because the inner rear ratchet 204 is still in the guide groove of the outer ratchet 206 at this time, it can only advance, but cannot rotate.
When the inner rear ratchet 204 advances beyond the length/distance L1, the inner rear ratchet 204 disengages from the guiding groove of the outer ratchet 206, and the inner rear ratchet 204 makes a first rotation along the inclined surface 51 of the inner front ratchet 205 under the tangential force of the inner front ratchet 205 and the resilient force of the circular wire rotation spring 202;
the external force F is removed, and under the action of the resilient force of the round wire rotating spring 202, the inner rear ratchet 204 retracts and performs a second rotation along the inclined surface 61 of the outer ratchet 206, and finally stops in the inclined groove of the outer ratchet 206.
Further, the sum of the rotation amounts of the first rotation and the second rotation is 45 °, and at this time, the spacer control device 102a drives the spacer 103 to advance;
an external force F is applied to the force bearing surface of the outer ratchet wheel again, so that the inner front ratchet wheel 205 pushes the inner rear ratchet wheel 204 along the outer ratchet wheel 206 again. Specifically, the inner front ratchet wheel 205 pushes the inner rear ratchet wheel 204 along the guiding groove of the outer ratchet wheel 206 again, and an axial pushing force and a tangential force are given to the inner rear ratchet wheel 204 through the inclined surface 51 of the inner front ratchet wheel 205, because the inner rear ratchet wheel 204 is still in the guiding groove of the outer ratchet wheel 206 at this time, only can advance, and cannot rotate.
When the inner rear ratchet 204 advances beyond the length/distance L2, the inner rear ratchet 204 disengages from the guiding groove of the outer ratchet 206, and the inner rear ratchet 204 makes a third rotation along the inclined surface 51 of the inner front ratchet 205 under the tangential force of the inner front ratchet 205 and the resilient force of the circular wire rotation spring 202;
the external force F is removed again, and under the action of the resilient force of the circular wire rotating spring 202, the inner rear ratchet 204 retracts and rotates fourth along the inclined surface 61 of the outer ratchet 206, and finally, the outer rear ratchet is reset.
Further, the sum of the rotation amounts of the third rotation and the fourth rotation is 45 °, at this time, since the rotation of the inner rear ratchet wheel by 90 ° is consistent with the structure when the inner rear ratchet wheel is not rotated, the inner rear ratchet wheel can move back along the guide groove of the outer ratchet wheel until the inner rear ratchet wheel is reset, and the spacer control device 102a drives the spacer 103 to retract.
Specifically, after four rotations, the inner rear ratchet 204 rotates 90 °, and since the inner rear ratchet 204 can coincide with the one before rotation after rotating 90 °, the spacer control device 102a is reset, and the spacer control device 102a drives the spacer 103 to move in two directions again when an external force F is applied to the stressed surface of the outer ratchet, which is the same as the initial state.
In addition, the spacer control device 102a further includes: a fixed member 201 and a spring guide limit member 203;
when the inner rear ratchet wheel advances a distance greater than the length/distance L1-L2, the spring guide limiting piece 203 divides the circular wire rotating spring into a circular wire rotating spring 202a and a circular wire rotating spring 202b, when the inner rear ratchet wheel 204 pushes the compressed circular wire rotating spring forward, the spring guide limiting piece 203 compresses the circular wire rotating spring 202a to contact with the fixed piece 201 to perform mechanical limiting, so that the spacer control device 102a is at the limit position, that is, the spacer 103 on the clamp 105 is also at the limit position, and meanwhile, the circular wire rotating spring 202b is compressed to complete the motion functions of automatic advance and retraction, thereby ensuring that the spacer 103 does not exceed the limit position during the motion process, and avoiding the damage to the substrate.
The above description is only for the purpose of describing the preferred embodiments of the present invention, and is not intended to limit the scope of the present invention, and any variations and modifications made by those skilled in the art based on the above disclosure are within the scope of the appended claims.
Claims (9)
1. A spacer control device, comprising: a round wire rotating spring, an inner rear ratchet wheel, an inner front ratchet wheel and an outer ratchet wheel; wherein, the outer ratchet wheel is provided with a stress surface;
the inner rear ratchet wheel and the inner front ratchet wheel are arranged in the outer ratchet wheel;
the inner front ratchet wheel is close to the stress surface of the outer ratchet wheel;
the round wire rotating spring, the inner rear ratchet wheel and the inner front ratchet wheel are arranged in sequence;
further comprising: the round wire rotating spring, the inner rear ratchet wheel, the inner front ratchet wheel and the outer ratchet wheel are all arranged in the fixing piece; the fixing piece is fixedly connected with a clamp;
further comprising: the spring guide limiting part is arranged in the middle of the circular wire rotating spring; when the inner rear ratchet wheel pushes forwards to compress the round wire rotating spring, the spring guide limiting part compresses the round wire rotating spring until the round wire rotating spring is contacted with the fixing part, and mechanical limiting is carried out.
2. A spacer control device as claimed in claim 1 wherein the inner rear ratchet wheel is capable of coinciding with it before rotation after 90 ° of rotation.
3. The spacer control device as claimed in claim 1 wherein said outer ratchet wheel has 8 angled slots evenly distributed along a circle and 4 guide slots, and wherein a face of said guide slots is coplanar with a face of said angled slots parallel to the axis.
4. A spacer control method using the spacer control device according to claim 1, comprising:
applying an external force F to the stress surface of the outer ratchet wheel to enable the inner front ratchet wheel to push the inner rear ratchet wheel along the outer ratchet wheel, and when the advancing distance of the inner rear ratchet wheel exceeds the length/distance L1, under the tangential force of the inner front ratchet wheel and the resilience force of the round wire rotating spring, the inner rear ratchet wheel rotates along the inclined surface of the inner front ratchet wheel for the first time; removing the external force F, retracting the inner rear ratchet wheel under the action of the resilience force of the round wire rotating spring, and performing second rotation along the inclined plane of the outer ratchet wheel, wherein at the moment, the spacer control device drives the spacer to advance;
applying an external force F to the stress surface of the outer ratchet wheel again to enable the inner front ratchet wheel to push the inner rear ratchet wheel along the outer ratchet wheel again, and when the advancing distance of the inner rear ratchet wheel exceeds L2, under the tangential force of the inner front ratchet wheel and the resilience force of the circular line rotating spring, performing third rotation on the inner rear ratchet wheel along the inclined surface of the inner front ratchet wheel; withdrawing the external force F again, retracting the inner rear ratchet wheel under the action of the resilience force of the round wire rotating spring, and performing fourth rotation along the inclined plane of the outer ratchet wheel, wherein at the moment, the spacer control device drives the spacer to retract;
the device further comprises: the fixing piece and the spring guide limiting piece;
when the inner rear ratchet wheel advance distance is greater than length/distance L1-L2, the inner rear ratchet wheel advance advances the spring guide stop into contact with the fixed member to place the spacer control device in an extreme position.
5. The spacer control method as claimed in claim 4,
the inner rear ratchet wheel rotates along the inclined plane of the inner front ratchet wheel for the first time, retracts and rotates along the inclined plane of the outer ratchet wheel for the second time, and the sum of the rotation amount of the first rotation and the second rotation is 45 degrees;
and the inner rear ratchet wheel rotates along the slope of the inner front ratchet wheel for the third time, retracts and rotates along the slope of the outer ratchet wheel for the fourth time, wherein the sum of the rotation amounts of the third rotation and the fourth rotation is 45 degrees.
6. The spacer control method as claimed in claim 4, wherein the outer ratchet wheel has a guide groove;
and applying an external force F to the stress surface of the outer ratchet wheel to enable the inner front ratchet wheel to push the inner rear ratchet wheel along the outer ratchet wheel, when the advancing distance of the inner rear ratchet wheel exceeds L1, under the action of tangential force of the inner front ratchet wheel and resilience force of the round wire rotating spring, the inner rear ratchet wheel rotates along the inclined surface of the inner front ratchet wheel for the first time, the inner front ratchet wheel pushes the inner rear ratchet wheel along the guide groove of the outer ratchet wheel, when the advancing distance of the inner rear ratchet wheel exceeds L1, the inner rear ratchet wheel is separated from the guide groove of the outer ratchet wheel, and under the action of tangential force of the inner front ratchet wheel and resilience force of the round wire rotating spring, the inner rear ratchet wheel rotates along the inclined surface of the inner front ratchet wheel for the first time.
7. The spacer control method as claimed in claim 6, wherein the outer ratchet wheel has a tapered slot;
and removing the external force F, wherein in the step of retracting the inner rear ratchet wheel and performing second rotation along the inclined plane of the outer ratchet wheel under the action of the resilience force of the circular wire rotating spring, the inner rear ratchet wheel retracts, performs second rotation along the inclined plane of the outer ratchet wheel and finally stops in the chute.
8. The spacer control method as claimed in claim 7,
and applying an external force F to the stress surface of the outer ratchet wheel again to enable the inner front ratchet wheel to push the inner rear ratchet wheel along the outer ratchet wheel again, when the advancing distance of the inner rear ratchet wheel exceeds L2, under the action of the tangential force of the inner front ratchet wheel and the resilience force of the round wire rotating spring, the inner rear ratchet wheel rotates third along the inclined surface of the inner front ratchet wheel, the inner front ratchet wheel pushes the inner rear ratchet wheel along the guide groove of the outer ratchet wheel again, when the advancing distance of the inner rear ratchet wheel exceeds L2, the inner rear ratchet wheel is separated from the guide groove of the outer ratchet wheel, and under the action of the tangential force of the inner front ratchet wheel and the resilience force of the round wire rotating spring, the inner rear ratchet wheel rotates third along the inclined surface of the inner front ratchet wheel.
9. The spacer control method as claimed in claim 8,
and withdrawing the external force F again, wherein under the action of the resilience force of the circular line rotating spring, the inner rear ratchet wheel retracts and rotates for the fourth time along the inclined plane of the outer ratchet wheel, and finally the inner rear ratchet wheel retracts, rotates for the fourth time along the inclined plane of the outer ratchet wheel and resets.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310245120.3A CN104241165B (en) | 2013-06-19 | 2013-06-19 | A kind of distance piece control device and method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310245120.3A CN104241165B (en) | 2013-06-19 | 2013-06-19 | A kind of distance piece control device and method |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN104241165A CN104241165A (en) | 2014-12-24 |
| CN104241165B true CN104241165B (en) | 2017-08-29 |
Family
ID=52229009
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201310245120.3A Active CN104241165B (en) | 2013-06-19 | 2013-06-19 | A kind of distance piece control device and method |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN104241165B (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109426152A (en) * | 2017-09-05 | 2019-03-05 | 财团法人金属工业研究发展中心 | The system conversion parameter optimization method of automatic aligning equipment |
| CN110660723B (en) * | 2018-06-29 | 2022-05-10 | 上海微电子装备（集团）股份有限公司 | Manipulator, bonding cavity, wafer bonding system and bonding method |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5722275A (en) * | 1996-05-09 | 1998-03-03 | Strattec Security Corporation | Pushbutton console latch |
| CN2298908Y (en) * | 1997-06-20 | 1998-12-02 | 陈纯琼 | Strong ratchet change-over article structure |
| US6575503B1 (en) * | 1998-03-09 | 2003-06-10 | Southco, Inc. | Latch |
| CN101107414A (en) * | 2004-10-23 | 2008-01-16 | 索斯科公司 | Slam latch with pop-up knob |
| CN201047329Y (en) * | 2007-05-24 | 2008-04-16 | 句帅 | Electromagnetical mobile starters |
-
2013
- 2013-06-19 CN CN201310245120.3A patent/CN104241165B/en active Active
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5722275A (en) * | 1996-05-09 | 1998-03-03 | Strattec Security Corporation | Pushbutton console latch |
| CN2298908Y (en) * | 1997-06-20 | 1998-12-02 | 陈纯琼 | Strong ratchet change-over article structure |
| US6575503B1 (en) * | 1998-03-09 | 2003-06-10 | Southco, Inc. | Latch |
| CN101107414A (en) * | 2004-10-23 | 2008-01-16 | 索斯科公司 | Slam latch with pop-up knob |
| CN201047329Y (en) * | 2007-05-24 | 2008-04-16 | 句帅 | Electromagnetical mobile starters |
Also Published As
| Publication number | Publication date |
|---|---|
| CN104241165A (en) | 2014-12-24 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US10016902B2 (en) | Robot end effectors that carry objects | |
| US9969052B2 (en) | Sanding device including means for changing a sanding disk | |
| TW201140730A (en) | Edge grip device and robot including the same | |
| CN104241165B (en) | A kind of distance piece control device and method | |
| US9931730B2 (en) | Automatic handling apparatus with positioning pins | |
| CN204051993U (en) | Automatic spraying machine | |
| CN203804971U (en) | Multilayer feeding and blanking linkage manipulator | |
| US20170036867A1 (en) | An apparatus for picking and placing a plate-like product | |
| CN113697166B (en) | Film sticking machine | |
| TWI818979B (en) | Application apparatus and application method for applying protective tape to a semiconductor wafer | |
| TW201250912A (en) | A system and method using multiple component pane handlers configured to handle and transfer component panes | |
| JP2012212947A (en) | Mounting component mounting method | |
| KR101802344B1 (en) | Multi-bonding machine | |
| TWI820117B (en) | Application apparatus and application method for applying protective tape to a semiconductor wafer | |
| US10889498B2 (en) | Drawing device and drawing method | |
| TWM472315U (en) | LED chip selection equipment | |
| JP2004061274A (en) | Ferrule eccentricity measuring device | |
| CN219493779U (en) | Image acquisition device | |
| TWM463904U (en) | Rotary die sorting apparatus | |
| CN107414877A (en) | A kind of eyeglass automatic pick-up device | |
| CN214012924U (en) | Clamping device of ultra-thin silicon chip | |
| KR101227884B1 (en) | Unit for attaching window film to touch panel | |
| CN108723978A (en) | A kind of tool bar automatic grinding equipment | |
| CN112736021B (en) | Clamping device for ultrathin silicon wafer | |
| CN210742592U (en) | Infrared lens capable of rapidly switching view field |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| CB02 | Change of applicant information | ||
| CB02 | Change of applicant information |
Address after: 201203 Pudong New Area East Road, No. 1525, Shanghai Applicant after: Shanghai microelectronics equipment (Group) Limited by Share Ltd Address before: 201203 Pudong New Area East Road, No. 1525, Shanghai Applicant before: Shanghai Micro Electronics Equipment Co., Ltd. |
|
| GR01 | Patent grant | ||
| GR01 | Patent grant |