CN104238065B - A kind of locking latches for movable agency in photoetching projection objective lens - Google Patents
A kind of locking latches for movable agency in photoetching projection objective lens Download PDFInfo
- Publication number
- CN104238065B CN104238065B CN201410428000.1A CN201410428000A CN104238065B CN 104238065 B CN104238065 B CN 104238065B CN 201410428000 A CN201410428000 A CN 201410428000A CN 104238065 B CN104238065 B CN 104238065B
- Authority
- CN
- China
- Prior art keywords
- picture frame
- locking
- driving mechanism
- locking device
- driving part
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Landscapes
- Lens Barrels (AREA)
Abstract
The present invention provides a kind of locking latches for movable agency in photoetching projection objective lens, solves existing photoetching projection objective lens moving element assembly and driving mechanism in transport and handling process and there is the problem damaged. This device comprises driving mechanism, the driving part of moving element assembly, locking device and trip bolt; The driving part of moving element assembly comprises picture frame fixed body, picture frame can kinetoplast and picture frame driving part, described picture frame fixed body arranges trip bolt open holes, locking device holds groove, locking screw hole and driving mechanism mounting face, locking device comprises positive stop lug boss and locking screw post, what arrange multiple circumference uniform distribution on positive stop lug boss screws groove, screw groove and centre hole is set for screw-in or back-out, positive stop lug boss and the locking screw post center making locking device in locking device accommodation groove; Described locking screw post is arranged in locking screw hole, and coordinates with locking screw hole; Driving mechanism is applied on picture frame driving part through centre hole.
Description
Technical field
The invention belongs to movable agency in photoetching projection objective lens and drive spacing locking field, be specifically related to a kind of locking latches for movable agency in photoetching projection objective lens.
Background technology
Lithographic projection technology is large-scale integrated circuit manufacturing technology and micro-optic, the guide of micro mechanical technology and basis, it is resolved that the integrated level of unicircuit. The image quality that photoetching projection objective lens is higher, it is desired to multiple movable optical element is set in object lens system for functional adjustment. The action of this movable optical element promotes moving element assembly to be achieved often through the translational motion that Piezoelectric Driving device or motor driver produce, driving mechanism front end is not fixedly connected with moving element assembly, and directly contacting moving element modularity by driving mechanism front end can only provide the mode of thrust to drive. After installing driving mechanism, may there is bigger impact in transport and handling process, cause producing between moving element assembly and driving mechanism greater impact or disengaging, moving element assembly and driving mechanism exist dangerous greatly, directly cause the image quality projecting object lens to deteriorate even object lens self existence and destroy danger greatly.
Summary of the invention
There is, in order to solve existing photoetching projection objective lens moving element assembly and driving mechanism in transport and handling process, the problem damaged, the present invention provides a kind of locking latches for movable agency in photoetching projection objective lens.
The technical scheme that technical solution problem of the present invention is taked is as follows:
A kind of locking latches for movable agency in photoetching projection objective lens, comprise: the driving part of driving mechanism, moving element assembly and trip bolt, described locking latches also comprises locking device, the driving part of described moving element assembly comprise picture frame fixed body, picture frame can kinetoplast and picture frame driving part, picture frame driving part can be connected by kinetoplast with picture frame fixed body and picture frame respectively;Described picture frame fixed body arranges trip bolt open holes, locking device holds groove, locking screw hole and driving mechanism mounting face, and trip bolt open holes is for installing trip bolt, and driving mechanism mounting face is used for the connection of driving mechanism and picture frame fixed body; Described locking device comprises positive stop lug boss and locking screw post, positive stop lug boss and locking screw post connect, what arrange multiple circumference uniform distribution on positive stop lug boss screws groove, screw groove and centre hole is set for screw-in or back-out, positive stop lug boss and the locking screw post center making locking device in locking device accommodation groove; Described locking screw post is arranged in locking screw hole, and coordinates with locking screw hole; Driving mechanism is applied on picture frame driving part through centre hole.
Driving mechanism of the present invention comprises drive shaft, driving mechanism installs boss and drive body, and driving mechanism is installed boss and is connected with driving mechanism mounting face, and drive shaft is applied on picture frame driving part through centre hole.
Arranging two long and narrow sheet structures on picture frame driving part of the present invention, two long and narrow sheet structures connect picture frame fixed body respectively and picture frame can kinetoplast.
What arrange eight circumference uniform distributions on positive stop lug boss of the present invention screws groove.
The invention has the beneficial effects as follows: the present invention provides a kind of locking latches for movable agency in photoetching projection objective lens, contrast mutually with prior art, the locking latches of the present invention can avoid photoetching projection objective lens in transport and handling process due to the problem impacted or vibrations cause driving mechanism and moving element assembly to damage, and then reduce the danger that photoetching projection objective lens image quality deteriorates even object lens self damage, it is simple that this device has structure, convenient operation, reliability height and the versatility outstanding advantage such as well, the driving mechanism that can well be applicable to all kinds movable agency installs position, realize reliable locking.
Accompanying drawing explanation
Fig. 1 is the three-dimensional assembling schematic diagram of the present invention for the locking latches of movable agency in photoetching projection objective lens;
Fig. 2 is the partly cut-away schematic diagram of the present invention for the locking latches of movable agency in photoetching projection objective lens;
Fig. 3 is the driving part schematic perspective view of moving element assembly of the present invention;
Fig. 4 is the schematic top plan view of the driving part of moving element assembly of the present invention;
Fig. 5 is that facing of the driving part of moving element assembly of the present invention partly cuts open schematic diagram;
Fig. 6 is the perspective view that the present invention locks device;
Fig. 7 is that the present invention locks facing of device and partly cuts open schematic diagram.
Embodiment
Below in conjunction with accompanying drawing, the present invention is described in further details.
As depicted in figs. 1 and 2, the present invention is used for the locking latches of movable agency in photoetching projection objective lens, comprising: the driving part 2 of driving mechanism 1, moving element assembly, locking device 3 and trip bolt 4, described driving mechanism 1 comprises drive shaft 1-1, driving mechanism installs boss 1-2 and drive body 1-3.
As shown in Fig. 3, Fig. 4 and Fig. 5, the driving part 2 of moving element assembly comprises picture frame fixed body 2-1, picture frame can kinetoplast 2-2 and picture frame driving part 2-3; Picture frame fixed body 2-1 is used for installation of driver 1, locking device 3 and trip bolt 4; Picture frame can be used for supporting optical component and realize mechanism kinematic by kinetoplast 2-2; Picture frame driving part 2-3 is for contacting with driver drives axle 1-1, and can be connected by kinetoplast 2-2 with picture frame with picture frame fixed body 2-1 respectively by two long and narrow sheet structures, can on kinetoplast 2-2 to picture frame by the Movement transmit of driver drives axle 1-1;
Described picture frame fixed body 2-1 is provided with trip bolt open holes 2-1-1, locking device accommodation groove 2-1-2, locking screw hole 2-1-3 and driving mechanism mounting face 2-1-4. Trip bolt open holes 2-1-1 is for installing trip bolt 4; Locking device holds groove 2-1-2 for holding the positive stop lug boss 3-1 of locking device 3 and provides the revolution space screwing groove 3-1-1 locking device 3, ensures that locking device 3 is not interfered with driving mechanism 1; Locking screw hole 2-1-3 is for installing locking device 3, and its threaded hole matches with the locking screw post 3-2 of locking device 3; Driving mechanism mounting face 2-1-4 has four threaded holes, the installation of boss 1-2 and picture frame fixed body is installed for driving mechanism; Trip bolt 4, for fixing and locking device 3 after position adjusted by locking device 3, avoids it impacting or occur in vibrations process to loosen and cause locking the problem lost efficacy.
As shown in Figure 6 and Figure 7, described locking device 3 comprises positive stop lug boss 3-1 and locking screw post 3-2, positive stop lug boss 3-1 and locking screw post 3-2 connects, and positive stop lug boss 3-1 is used for carrying out slightly spacing to locking device, avoids locking device to screw in length and causes picture frame driving part 2-3 to destroy; Locking screw post 3-2 be used for locking screw hole 2-1-3 with the use of, it on, screw thread adopts superfine screw thread dental structure, and pitch is little, it is provided that locking force and be easy to control lock device locked position; Positive stop lug boss 3-1 and locking screw post 3-2 center arrange centre hole 3-3, for allowing, the drive shaft 1-1 of driving mechanism 1 is applied to picture frame driving part 2-3 through locking device 3 to centre hole 3-3, can realize picture frame motor function without the need to dismounting locking device under non-locking state; The individual groove that screws of groove 3-1-1,8 that screws being provided with 8 circumference uniform distributions on positive stop lug boss 3-1 for screwing locking device 3 and makes locking device 3 can hold in the little space of groove 2-1-2 at locking device and screws in or back-out.
Assembling and the working process of the locking latches for movable agency in photoetching projection objective lens of the present invention are as follows:
Locking device 3 is installed in the locking screw hole 2-1-3 of driving part 2 of moving element assembly, it is ensured that the locking screw post 3-2 and picture frame driving part 2-3 of locking device 3 leave about 1mm space; By driving mechanism, driving mechanism 1 is installed boss 1-2 be connected with driving mechanism mounting plane 2-1-4; Trip bolt 4 is screwed in cone end trip bolt open holes 2-1-1 so that it is do not contact with locking device 3; Movement needs according to movable picture frame, the drive shaft 1-1 of adjusting driver 1 so that it is reach correct position; Before carrying and transport, by just making locking device 3 screw in and contact picture frame driving part 2-3 to the groove 3-1-1 that screws stirring locking device 3, according to the requirement calculated, the screw-in length of control locking device 3, makes the drive shaft 1-1 of driving mechanism 1 depart from picture frame driving part 2-3 and ensure reliable lock; Screw in trip bolt 4, trip bolt 4 is contacted with the locking screw post 3-2 of locking device 3, reaches the effect of fastening locking device 3.
When not needing locking mechanism, first trip bolt 4 is screwed out a segment distance, make the locking screw post 3-2 that it departs from locking device 3, by oppositely stirring the groove 3-1-1 that screws of locking device 3, locking device 3 is screwed out, depart from picture frame driving part 2-3, and make locking device 3 screw out maximum position, ensure that the motion of movable agency in object lens normal course of operation can not by the restriction of locking device 3, being screwed in by trip bolt 4 makes it contact with the locking screw post 3-2 of locking device 3 again, can fastening locking device 3.In handling process, the drive shaft 1-1 of driving mechanism 1 does not move all the time; moving element assembly is made to carry front and back when removing locking mechanism; picture frame driving part 2-3 is all in same position; while protection driving mechanism and moving element assembly, ensure that the position of moving element assembly before and after carrying repeatability.
A kind of locking mechanism for movable agency in photoetching projection objective lens that the present invention proposes, can avoid photoetching projection objective lens in transport with handling process due to the problem impacted or vibrations cause driving mechanism and moving element assembly to damage, and then reduce the danger that photoetching projection objective lens image quality deteriorates even object lens self damage. This structure has that structure is simple, convenient operation, reliability height and the outstanding advantage such as versatility is good, it is possible to be well applicable to the driving mechanism installation position of all kinds movable agency, it is achieved reliably lock.
Claims (4)
1., for a locking latches for movable agency in photoetching projection objective lens, comprising:
The driving part (2) of driving mechanism (1), moving element assembly and trip bolt (4), it is characterised in that, described locking latches also comprises locking device (3);
The driving part (2) of described moving element assembly comprise picture frame fixed body (2-1), picture frame can kinetoplast (2-2) and picture frame driving part (2-3), picture frame driving part (2-3) can be connected by kinetoplast (2-2) with picture frame fixed body (2-1) and picture frame respectively;
Described picture frame fixed body (2-1) arranges trip bolt open holes (2-1-1), locking device holds groove (2-1-2), locking screw hole (2-1-3) and driving mechanism mounting face (2-1-4), trip bolt open holes (2-1-1) is for installing trip bolt (4), and driving mechanism mounting face (2-1-4) is for the connection of driving mechanism (1) Yu picture frame fixed body (2-1);
Described locking device (3) comprises positive stop lug boss (3-1) and locking screw post (3-2), positive stop lug boss (3-1) and locking screw post (3-2) connect, what arrange multiple circumference uniform distribution on positive stop lug boss (3-1) screws groove (3-1-1), locking device (3) holds the screw-in in groove (2-1-2) or back-out at locking device for making to screw groove (3-1-1), by just making locking device (3) screw in and contact picture frame driving part (2-3) to the groove (3-1-1) that screws stirring locking device (3), positive stop lug boss (3-1) center and locking screw post (3-2) center arrange centre hole (3-3), described locking screw post (3-2) is arranged in locking screw hole (2-1-3), and coordinates with locking screw hole (2-1-3), driving mechanism (1) is applied on picture frame driving part (2-3) through centre hole (3-3).
2. a kind of locking latches for movable agency in photoetching projection objective lens according to claim 1, it is characterized in that, described driving mechanism (1) comprises drive shaft (1-1), driving mechanism installs boss (1-2) and drive body (1-3), driving mechanism is installed boss (1-2) and is connected with driving mechanism mounting face (2-1-4), and drive shaft (1-1) is applied on picture frame driving part (2-3) through centre hole (3-3).
3. a kind of locking latches for movable agency in photoetching projection objective lens according to claim 1, it is characterized in that, arranging two long and narrow sheet structures on described picture frame driving part (2-3), two long and narrow sheet structures connect picture frame fixed body (2-1) respectively and picture frame can kinetoplast (2-2).
4. a kind of locking latches for movable agency in photoetching projection objective lens according to claim 1, it is characterised in that, what described positive stop lug boss (3-1) arranged eight circumference uniform distributions screws groove (3-1-1).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410428000.1A CN104238065B (en) | 2014-08-27 | 2014-08-27 | A kind of locking latches for movable agency in photoetching projection objective lens |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410428000.1A CN104238065B (en) | 2014-08-27 | 2014-08-27 | A kind of locking latches for movable agency in photoetching projection objective lens |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN104238065A CN104238065A (en) | 2014-12-24 |
| CN104238065B true CN104238065B (en) | 2016-06-15 |
Family
ID=52226492
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201410428000.1A Expired - Fee Related CN104238065B (en) | 2014-08-27 | 2014-08-27 | A kind of locking latches for movable agency in photoetching projection objective lens |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN104238065B (en) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104991327B (en) * | 2015-07-02 | 2017-05-03 | 中国科学院上海光学精密机械研究所 | Locking cage type mounting rack |
| CN106772882A (en) * | 2016-12-10 | 2017-05-31 | 中国科学院长春光学精密机械与物理研究所 | A kind of position limiting structure of iris diaphgram mechanism and iris diaphgram mechanism |
| CN110119013B (en) * | 2018-02-06 | 2020-06-16 | 上海微电子装备（集团）股份有限公司 | Movable mechanism locking structure and mounting method thereof and objective lens |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3330668B2 (en) * | 1993-04-13 | 2002-09-30 | 株式会社トプコン | Large lens support method |
| DE60132320T2 (en) * | 2000-04-25 | 2008-05-08 | Asml Holding, N.V. | METHOD, SYSTEM AND DEVICE FOR PRECISELY POSITIONING AND ORIENTATION OF A LENS IN AN OPTICAL SYSTEM |
| CN103246040B (en) * | 2013-04-25 | 2015-04-22 | 中国科学院长春光学精密机械与物理研究所 | High-accuracy repeated positioning structure capable of achieving rapid changing and used in photoetching projection lens |
| CN103472559B (en) * | 2013-09-25 | 2015-06-10 | 中国科学院长春光学精密机械与物理研究所 | Axial macro-micro adjusting device for optical element in photoetching projection objective lens system |
-
2014
- 2014-08-27 CN CN201410428000.1A patent/CN104238065B/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| CN104238065A (en) | 2014-12-24 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| WO2019101028A1 (en) | Drifting abutting connection device, battery replacing robot, and locking, unlocking and locking-unlocking methods | |
| CN104238065B (en) | A kind of locking latches for movable agency in photoetching projection objective lens | |
| CN103471460B (en) | A kind of quick locking anti-loose locking device | |
| KR20210021318A (en) | LED mounting mount, an adjustment mechanism including the LED mounting mount, and a red dot site including the adjustment mechanism | |
| CN103182692A (en) | Clamp capable of achieving quick regulation through four freedom degrees | |
| CN204118409U (en) | A kind of mounting structure to socket, connector | |
| CN203054323U (en) | Simple optical axis adjusting mechanism | |
| AU2018274857A1 (en) | Lifting beam and lifting device | |
| CN106921115A (en) | A kind of power equipment case mounting seat | |
| CN204802098U (en) | Stop device and have this stop device's unmanned vehicles | |
| CN103791001B (en) | Azimuth axle mechanical brake | |
| CN201398272Y (en) | Circuit board clamping and positioning device of small-sized case | |
| CN112532811A (en) | Sensor circuit board rotating assembly and camera with same | |
| CN101625929B (en) | Multi-capacitor assembly way and device therefor | |
| EP3650934B1 (en) | Optical module | |
| CN104459937A (en) | Precise adjusting apparatus of reflector | |
| CN213279385U (en) | Motor mounting position fine-tuning | |
| CN202073276U (en) | Mounting fastener for marbles | |
| CN204496858U (en) | A kind of display screen section difference regulating device | |
| CN103257447A (en) | Deformable mirror | |
| CN104576169A (en) | Insulation pole and circuit breaker using same | |
| CN208294661U (en) | A kind of diesel generating set cloud controller | |
| CN103736821A (en) | Judging mechanism and detecting method thereof | |
| CN112526740B (en) | Large-stroke high-precision zero adjustment mechanism | |
| CN219796660U (en) | Automatic limiting deviation rectifying device |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20160615 Termination date: 20170827 |