CN104213190B - Mounting plate assembly for monocrystalline silicon growth furnace - Google Patents
Mounting plate assembly for monocrystalline silicon growth furnace Download PDFInfo
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- CN104213190B CN104213190B CN201410411807.4A CN201410411807A CN104213190B CN 104213190 B CN104213190 B CN 104213190B CN 201410411807 A CN201410411807 A CN 201410411807A CN 104213190 B CN104213190 B CN 104213190B
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- hanging plate
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Abstract
The invention relates to the field of monocrystalline silicon growth furnaces and aims at providing a mounting plate assembly for a monocrystalline silicon growth furnace. The mounting plate assembly for the monocrystalline silicon growth furnace comprises a connector bolt, a mounting plate and switch assemblies, wherein the switch assemblies comprise a switch assembly A and a switch assembly B; the switch assembly A is used for controlling a secondary furnace chamber and a furnace lid of the monocrystalline silicon growth furnace to move or not; the switch assembly B is used for controlling the secondary furnace chamber to move independently or move together with the furnace lid; by matching of the connector bolt and the mounting plate, the secondary furnace chamber and the furnace lid of the monocrystalline silicon growth furnace can be connected or disconnected. The mounting plate assembly can be used for conveniently and safely taking monocrystalline silicon at any time in the middle, the monocrystalline silicon can be taken out without waiting for the monocrystalline silicon is slowly cooled in the furnace body, and thus, the material cooling time and the residual material reheating time can be saved, the production cost can be lowered, and the production efficiency can be improved.
Description
Technical field
The present invention is with regard to monocrystalline silicon growing furnace field, more particularly to a kind of hanging plate group for monocrystalline silicon growing furnace
Part.
Background technology
Monocrystalline silicon is major function material of the photovoltaic generation using solar energy, more and more crucial for present information-intensive society.
Single crystal growing furnace in process of production, needs midway to take crystalline substance, because body of heater also has silicon material to exist, needs the shapes such as pressure and temperature in holding furnace
State is constant, needs individually to open secondary furnace chamber.Bell and secondary furnace chamber need to be opened when thermal field crucible and charging etc. are operated installing.It is existing
Technical scheme be lifting device elder generation lifting pair furnace chamber, to after certain altitude, lift shaft top bar top is further same to bell bracket
Lifted.Cause hoisting mechanism complicated, lift stroke is shared for two steps, and range of lift is longer；Bell rotation also needs manually to grasp
Make or single rotating mechanism.
The content of the invention
Present invention is primarily targeted at overcoming deficiency of the prior art, there is provided one kind can be realized using same lifting
Device performs the mounting board component of the independent lifting of secondary furnace chamber and secondary furnace chamber and bell synchronization lifting.Ask to solve above-mentioned technology
Inscribe, the solution of the present invention is：
A kind of mounting board component for monocrystalline silicon growing furnace, including connector screw, hanging plate and switch module are provided,
By the cooperation of connector screw and hanging plate, being connected and disconnected between the secondary furnace chamber of monocrystalline silicon growing furnace and bell can be realized；
Hanging plate is loop configuration, and on the secondary furnace chamber lower flange of monocrystalline silicon growing furnace, and hanging plate can be with secondary stove
Room lower flange is rotated for axle, and hanging plate is provided with least two deep-slotted chip breakers, deep-slotted chip breaker include the big arc being connected with each other and
Little arc, a diameter of d1 of big arc, a diameter of d2 of little arc；
The secondary furnace chamber lower flange upper surface of monocrystalline silicon growing furnace is provided with least two through holes, and through hole is right with hanging plate respectively
The deep-slotted chip breaker connection answered, a diameter of d3 of through hole, connector screw can be entered in deep-slotted chip breaker through through hole, and by rotating mounting
Plate, connector screw can be changed in the big arc of deep-slotted chip breaker and little arc, make connector screw that mounting is completed on hanging plate
And disengaging, realize the connection of bell and secondary furnace chamber and separate；Secondary furnace chamber lower flange upper surface is additionally provided with two deep holes, for realizing
Positioning of the hanging plate after two positions are rotated to；
Switch module includes that switch module A and switch module B, switch module A are used to control the secondary stove of monocrystalline silicon growing furnace
Can room, bell be moved (judge safe condition when lifting secondary furnace chamber and bell motion simultaneously), and switch module B is used to control
The secondary furnace chamber of system is independently moving or moves simultaneously with bell (judge that secondary furnace chamber and bell are connected or disengaged position)；
Switch module A includes spring catch main body, stage clip lid, handle cap, axis pin of the spring, spring and switch A, spring catch main body
On hanging plate, switch A is also mounted on hanging plate, and stage clip lid is arranged in spring catch main body, and handle cap is arranged on bullet
On spring bearing pin, axis pin of the spring is connected by spring with spring catch main body；By rotating hanging plate, in connector screw and hanging plate
When completing two positions for mounting and departing from, axis pin of the spring under spring tension, during two deep holes can be respectively fallen in, bullet
Spring bearing pin upper surface declines trigger switch A and realizes auto-lock function；
Switch module B includes switch B and collision block, and switch B is arranged on hanging plate, and collision block is arranged on secondary furnace chamber lower flange
Side, collision block is provided with a ramp structure；By rotating hanging plate, when axis pin of the spring slides between two deep holes, switch B
Rotate at collision block with hanging plate, the slide assemblies for switching B slide (pressure contact) along the ramp structure of collision block, realize slow
(when connector screw is in the big arc of hanging plate deep-slotted chip breaker, switch B is in closure state, secondary furnace chamber for the effect that punching is oriented to
Can move alone, when connector screw is in the little arc of hanging plate deep-slotted chip breaker, switch B is in normally open, secondary furnace chamber energy
Move simultaneously with bell).
As further improvement, in the switch module A, a cavity is provided with the main body of spring catch, for accommodating bullet
The activity in chamber of spring bearing pin and spring；Axis pin of the spring is included for stopping the seam disk of spring, for pinning mounting Board position
Roundlet axis of a cylinder；Handle cap includes the small column for manual hand manipulation, the big disk for trigger switch A；Before switch A
End carries a retractable contact, and contact is can reduce the roller for rubbing, and by triggering contact, is operated in normally opened and normally closed two
Under kind of state, and feed back signal to outside (PLC) and judged.
As further improvement, in the switch module B, switch the front end of B with one can retractable contact, touch
Head is the roller that can reduces friction, for as the slide assemblies for switching B, by triggering contact, being operated in normally opened and normally closed two
Under kind of state, and feed back signal to outside (PLC) and judged.
Used as further improvement, the mounting board component for monocrystalline silicon growing furnace is additionally provided with protection device, protects
Device is used to prevent the lowering or hoisting gear of monocrystalline silicon growing furnace, when jacking conditions is not reaching to, bell to monocrystalline silicon growing furnace,
Secondary furnace chamber is lifted；Jacking conditions referred in the deep hole that switch module A axis pin of the spring falls into secondary furnace chamber lower flange upper surface, bullet
Spring bearing pin upper surface declines trigger switch A and realizes auto-lock function.
Used as further improvement, the hanging plate is provided with handle, for realizing the rotation of hanging plate by rotary handle
Turn.
Used as further improvement, the connector screw includes top surface, upper cylinder, middle cylinder, the lower circle being sequentially connected
Post, and be arranged on the bell upper flange of monocrystalline silicon growing furnace by lower cylinder, bell upper flange is provided with least two connections
Body screw；The top surface is the circular cone spherical structure for being oriented to, and circular cone spherical structure refers to that the apex of circular cone is sphere
Structure, the external diameter of upper cylinder, middle cylinder and lower cylinder is followed successively by D1, D2, D3.
Used as further improvement, the connector screw, hanging plate, through hole meet：D2, d2, D1, d1 increase successively,
And d3 is more than D1, d3 is more than D3.
Secondary furnace chamber individually lifting and secondary furnace chamber and bell synchronization lifting are performed by the present invention, concrete operating principle is：
Mechanical part：Connector screw is different from hanging plate deep-slotted chip breaker relative position, and its mated condition is different；Design concept
It is that face of cylinder external diameter is D1 on connector screw, middle face of cylinder external diameter is D2, and hanging plate Baltimore groove has 2 arcs of different sizes
Groove connection composition, big deep-slotted chip breaker external diameter is d1, and little deep-slotted chip breaker external diameter is d2.Deep-slotted chip breaker is D2 with the characteristic relation of connector screw
＜ d2 ＜ D1 ＜ d1；When connector screw is at deep-slotted chip breaker d1：Due to d1 ＞ D1, connector screw cannot be articulated in hanging plate
On, it is in released state with bell when secondary furnace chamber is lifted；When connector screw is at deep-slotted chip breaker d2：Due to D1 ＞ d2, connection
Body screw D1 sections are articulated on hanging plate, and when lifting pair furnace chamber, bell is together lifted with secondary furnace chamber, and bell is with secondary furnace chamber in company
Connect state.
There is the deep hole for coordinating axis pin of the spring at two on secondary furnace chamber lower flange, to connector screw d1 or d2 arcs are completely in
During groove, connector screw lower end can be fallen in the deep hole of secondary furnace chamber lower flange.Axis pin of the spring trigger switch is made by spring effect
A, ensures safety when lifting secondary furnace chamber and bell motion simultaneously.
Switch B is also mounted on hanging plate, and collision block is arranged on secondary furnace chamber flange side, in rotation hanging plate, axis pin of the spring
During two positions in deep hole, by the ramp structure of collision block, collision block is different from switch B relative status, when switch B is in closing
During conjunction state, d1 position of the connector screw in hanging plate deep-slotted chip breaker, secondary furnace chamber is in released state with bell.As switch B
In normally open when, d2 position of the connector screw in hanging plate deep-slotted chip breaker, secondary furnace chamber and bell are in connection status.
Electric part：Reflected by switching A and switch B secondary furnace chamber and bell be connected situation and lead programmer is grasped
Make.When A triggerings are switched, determine that axis pin of the spring is normally inserted in secondary furnace chamber laxative remedy flange aperture, it is ensured that while lifting secondary furnace chamber
Safety when moving with bell.The different situations that switch B is in reflect the connection of secondary furnace chamber and bell.Lead programmer pair
Therebetween the operation of different conditions.
The normally open for assuming switch A is 0, and closure state is 1；The normally open of switch B is 0, and closure state is 1.2
Switch forms 4 groups of unlike signals and feeds back to program, programable action such as following table：
Compared with prior art, the invention has the beneficial effects as follows：
At any time crystalline substance can be taken midway is convenient and safe, without slowly cooling down with body of heater after just realize taking brilliant action, save cold
Material time and again clout heat time, production cost is reduced, improve production efficiency.
Present configuration is simple compact and lifting travel is short, can easily and safely realize that a set of lowering or hoisting gear performs secondary stove again
Room individually lifts or secondary furnace chamber and bell synchronization lifting.
Description of the drawings
Fig. 1 is the installation diagram of hanging plate and connector screw in the present invention.
Fig. 2 is breaker in middle component A schematic diagrames of the present invention.
Fig. 3 is breaker in middle component B right views of the present invention.
Fig. 4 is the released state figure of hanging plate and connector screw in the present invention.
Fig. 5 is the connection status figure of hanging plate and connector screw in the present invention.
Reference in figure is：1 hanging plate；2 connector screws；3 secondary furnace chambers；4 bells；5 axis pin of the spring；6 springs；7
Switch A；8 spring catch main bodys；9 stage clip lids；10 handle caps；11 switch B；12 collision blocks；13 handles.
Specific embodiment
Below in conjunction with the accompanying drawings the present invention is described in further detail with specific embodiment：
A kind of mounting board component for monocrystalline silicon growing furnace as shown in Figure 1, including connector screw 2, hanging plate 1,
Handle 13 and switch module.
Connector screw 2 includes top surface, upper cylinder, middle cylinder, the lower cylinder being sequentially connected, and is arranged on by lower cylinder
On the upper flange of bell 4 of monocrystalline silicon growing furnace, the upper flange of bell 4 is provided with least two connector screws 2；The top surface is round
Cone spherical structure, circular cone spherical structure refers to the structure of the apex for sphere of circular cone, outside upper cylinder, middle cylinder and lower cylinder
Footpath is followed successively by D1, D2, D3.
Hanging plate 1 is loop configuration, and on the lower flange of secondary furnace chamber 3 of monocrystalline silicon growing furnace, hanging plate 1 is provided with hand
Handle 13, realizes that hanging plate 1 is rotated with the lower flange of secondary furnace chamber 3 as axle by rotary handle 13, and rotating range is on hanging plate 1
Arc hole length.Hanging plate 1 is provided with least two deep-slotted chip breakers, and deep-slotted chip breaker includes the big arc being connected with each other and little arc, greatly
A diameter of d1 of arc, a diameter of d2 of little arc.
The lower flange of secondary furnace chamber 3 of monocrystalline silicon growing furnace is provided with least two through holes, and through hole is corresponding with hanging plate 1 respectively
Deep-slotted chip breaker is connected, a diameter of d3 of through hole, and connector screw 2, hanging plate 1, through hole meet：D2, d2, D1, d1 increase successively, and
D3 is more than D1, and d3 is more than D3.As shown in Figure 2 and Figure 3, connector screw 2 can be entered in deep-slotted chip breaker through through hole, and by rotation
Hanging plate 1, connector screw 2 can be changed in the big arc of deep-slotted chip breaker and little arc.When connector screw 2 is in the big of deep-slotted chip breaker
When in arc, because d1 is more than D1, connector screw 2 cannot be articulated on hanging plate 1, and secondary furnace chamber 3 is in when being lifted with bell 4
Released state；When connector screw 2 is in the little arc of deep-slotted chip breaker, due to D1 ＞ d2, cylinder is articulated on connector screw 2
On hanging plate 1, when lifting secondary furnace chamber 3, bell 4 is together lifted with secondary furnace chamber 3.
Secondary furnace chamber 3 or secondary furnace chamber 3 are operated together with bell 4 for matching program, hanging plate 1 is provided with switch module, opens
Closing component includes that switch module A and switch module B, switch module A are used to control secondary furnace chamber 3, the energy of bell 4 of monocrystalline silicon growing furnace
No to be moved, it is to move alone or move simultaneously with bell 4 that switch module B is used to control secondary furnace chamber 3.
As shown in Fig. 2 switch module A includes spring catch main body 8, stage clip lid 9, handle cap 10, axis pin of the spring 5, the and of spring 6
Switch A7, spring catch main body 8 is arranged on hanging plate 1, and switch A7 is also mounted on hanging plate 1, and stage clip lid 9 is arranged on spring catch
In main body 8, handle cap 10 is arranged on axis pin of the spring 5, and axis pin of the spring 5 is connected by spring 6 with spring catch main body 8；By rotation
Fishplate bar 1 is turned linked to, when connector screw 2 and hanging plate 1 complete two positions for mounting and departing from, axis pin of the spring 5 is in spring 6
Under tension force effect, in respectively falling in two deep holes, the upper surface of axis pin of the spring 5 declines trigger switch A7 and realizes auto-lock function.Its
In, a cavity is provided with the main body of spring catch, for accommodating the up and down activity in chamber of axis pin of the spring 5 and spring 6；Spring catch
Axle 5 is included for stopping the seam disk of spring 6, the roundlet axis of a cylinder for pinning the position of hanging plate 1；Handle cap 10 include for
The small column of manual hand manipulation, for the big disk of trigger switch A7；The front end of switch A7 carries a retractable contact,
Contact is the roller that can reduce friction, by triggering contact, under being operated in normally opened and normally closed two states, and is fed back signal to outer
The PLC in portion is judged.
As shown in figure 3, switch module B includes switch B11 and collision block 12, switch B11 is arranged on hanging plate 1, collision block 12
Installed in the side of the lower flange of secondary furnace chamber 3, collision block 12 is provided with a ramp structure；By rotating hanging plate 1, axis pin of the spring 5 exists
When sliding between two deep holes, switch B11 is rotated at collision block 12 with hanging plate 1, and the slide assemblies edge for switching B11 is hit
The ramp structure of block 12 slides (pressure contact), realizes that the effect of buffer-oriented, i.e. connector screw 2 are in the arc of hanging plate 1
When in the big arc of groove, switch B11 is in closure state, and secondary furnace chamber 3 can move alone, and connector screw 2 is in the arc of hanging plate 1
When in the little arc of shape groove, switch B11 is in normally open, and secondary furnace chamber 3 can simultaneously be moved with bell 4.Wherein, switch module B
In, switch B11 front end with one can retractable contact, contact be can reduce rub roller, for as switch B11
Slide assemblies, by triggering contact, under being operated in normally opened and normally closed two states, and feed back signal to outside PLC and carry out
Judge.
Mounting board component for monocrystalline silicon growing furnace is additionally provided with protection device, and protection device is used to prevent monocrystalline silicon growing
The lowering or hoisting gear of stove, when jacking conditions is not reaching to, the bell 4, secondary furnace chamber 3 to monocrystalline silicon growing furnace is lifted；Lifting
Condition refers in the deep hole that switch module A axis pin of the spring 5 falls into the lower flange upper surface of secondary furnace chamber 3 that the upper surface of axis pin of the spring 5 declines
Trigger switch A7 realizes auto-lock function.
During installation, hanging plate 1 is arranged on the secondary lower flange of furnace chamber 3, connector screw 2 is arranged on the upper flange of bell 4,
And through the through hole on the lower flange of secondary furnace chamber 3.Switch A7 is arranged on hanging plate 1, and axis pin of the spring 5 has 2 different conditions,
When secondary furnace chamber 3 and bell 4 are fully connected or disengage, axis pin of the spring 5 may be at a specific position, trigger switch
A7.Switch B11 is arranged on hanging plate 1, and collision block 12 is arranged on the secondary lower flange of furnace chamber 3, is connected completely in secondary furnace chamber 3 and bell 4
When connecing or disengage, collision block 12 and switch B11 are in 2 different conditions, and feed back to program.
When using, hanging plate 1 is horizontally rotated by joystick 13, make axis pin of the spring 5 fall into the one of the upper flange of secondary furnace chamber 3
Position in deep hole, connector screw 2 at deep-slotted chip breaker d1 positions, axis pin of the spring 5 under the tension force effect of spring 6, handle cap 10
Big disk declines and trigger switch A7, and switch A7 is in closure state, and feeds back signal to PLC, illustrates that axis pin of the spring 5 is correctly inserted
Enter in hole, status safety, switch B11 and contact is triggered by the ramp structure of collision block 12, into normally off, and feed back signal to
PLC, illustrates connector screw 2 in Baltimore groove d1 positions, due to d1 ＞ D1, so in the case of it, connector screw 2 cannot be hung
It is connected on hanging plate 1, realizes that secondary furnace chamber 3 is separated in uphill process with bell 4；By the reverse rotating suspension of the level of joystick 13
Fishplate bar 1, makes axis pin of the spring 5 fall into position in another deep hole of the upper flange of secondary furnace chamber 3, and connector screw 2 is in deep-slotted chip breaker d2 positions
When, under the tension force effect of spring 6, the big disk of handle cap 10 declines and trigger switch A7 axis pin of the spring 5, and switch A7 is in closure
State, and PLC is fed back signal to, illustrating that axis pin of the spring 5 is correctly inserted in hole, status safety, switch B11 is touched less than collision block 12
Face, into normally open, and feeds back signal to PLC, connector screw 2 is illustrated in Baltimore groove d2 positions, due to D1 ＞ d2, connector
Screw 2 is firmly linked with hanging plate 1, realizes secondary furnace chamber 3 and the lifting of bell 4 one.
Finally it should be noted that listed above is only specific embodiment of the invention.It is clear that the invention is not restricted to
Above example, can also there is many variations.One of ordinary skill in the art can directly lead from present disclosure
The all deformations for going out or associating, are considered as protection scope of the present invention.
Claims (5)
1. a kind of mounting board component for monocrystalline silicon growing furnace, including connector screw, hanging plate and switch module, its feature
Be, by the cooperation of connector screw and hanging plate, can realize connection between the secondary furnace chamber of monocrystalline silicon growing furnace and bell and
Depart from；
Hanging plate is loop configuration, and on the secondary furnace chamber lower flange of monocrystalline silicon growing furnace, and hanging plate can be with secondary furnace chamber
Flange is rotated for axle, and hanging plate is provided with least two deep-slotted chip breakers, and deep-slotted chip breaker includes the big arc being connected with each other and little arc
Shape, a diameter of d1 of big arc, a diameter of d2 of little arc；
The connector screw includes top surface, upper cylinder, middle cylinder, the lower cylinder being sequentially connected, and is arranged on by lower cylinder
On the bell upper flange of monocrystalline silicon growing furnace, bell upper flange is provided with least two connector screws；The top surface be for
The circular cone spherical structure of guiding, circular cone spherical structure refers to the apex of circular cone for the structure of sphere, upper cylinder, middle cylinder and under
The external diameter of cylinder is followed successively by D1, D2, D3；
The secondary furnace chamber lower flange upper surface of monocrystalline silicon growing furnace is provided with least two through holes, and through hole is corresponding with hanging plate respectively
Deep-slotted chip breaker is connected, a diameter of d3 of through hole；Connector screw, hanging plate, through hole meet：D2, d2, D1, d1 increase successively, and d3
More than D1, d3 can be entered in deep-slotted chip breaker more than D3, i.e. connector screw through through hole, and by rotating hanging plate, connector spiral shell
Nail can be changed in the big arc of deep-slotted chip breaker and little arc, make connector screw complete to mount and depart from hanging plate, be realized
The connection of bell and secondary furnace chamber and separate；Secondary furnace chamber lower flange upper surface is additionally provided with two deep holes, for realizing hanging plate in rotation
Go to the positioning behind two positions；
Switch module includes that switch module A and switch module B, switch module A are used to control secondary furnace chamber, the stove of monocrystalline silicon growing furnace
Can lid be moved, and it is to move alone or move simultaneously with bell that switch module B is used to control secondary furnace chamber；
Switch module A includes spring catch main body, stage clip lid, handle cap, axis pin of the spring, spring and switch A, and spring catch main body is installed
On hanging plate, switch A is also mounted on hanging plate, and stage clip lid is arranged in spring catch main body, and handle cap is arranged on spring catch
On axle, axis pin of the spring is connected by spring with spring catch main body；By rotating hanging plate, complete in connector screw and hanging plate
Mounting and depart from two positions when, axis pin of the spring under spring tension, during two deep holes can be respectively fallen in, spring catch
Axle upper surface declines trigger switch A and realizes auto-lock function；
Switch module B includes switch B and collision block, and switch B is arranged on hanging plate, and collision block is arranged on the side of secondary furnace chamber lower flange
Side, collision block is provided with a ramp structure；By rotating hanging plate, when axis pin of the spring slides between two deep holes, switch B is with extension
Fishplate bar is rotated to together at collision block, and the slide assemblies for switching B slide along the ramp structure of collision block, realize the effect of buffer-oriented.
2. a kind of mounting board component for monocrystalline silicon growing furnace according to claim 1, it is characterised in that the switch
In component A, a cavity is provided with the main body of spring catch, for accommodating the activity in chamber of axis pin of the spring and spring；Axis pin of the spring bag
Include for stopping the seam disk of spring, the roundlet axis of a cylinder for pinning mounting Board position；Handle cap is included for manually
The small column of operation, for the big disk of trigger switch A；The front end of switch A carries a retractable contact, and contact is to subtract
The roller of few friction, by triggering contact, under being operated in normally opened and normally closed two states, and feeds back signal to outside and is sentenced
It is disconnected.
3. a kind of mounting board component for monocrystalline silicon growing furnace according to claim 1, it is characterised in that the switch
In component B, the front end for switching B carries a retractable contact, and contact is the roller that can reduce friction, for as switch B
Slide assemblies, by triggering contact, under being operated in normally opened and normally closed two states, and feed back signal to outside and judged.
4. a kind of mounting board component for monocrystalline silicon growing furnace according to claim 1, it is characterised in that described to be used for
The mounting board component of monocrystalline silicon growing furnace is additionally provided with protection device, and protection device is used to prevent the lifting of monocrystalline silicon growing furnace from filling
Put, when jacking conditions is not reaching to, the bell, secondary furnace chamber to monocrystalline silicon growing furnace is lifted；Jacking conditions refers to switch
Component A axis pin of the spring is fallen in the deep hole of secondary furnace chamber lower flange upper surface, and axis pin of the spring upper surface declines trigger switch A and realizes certainly
Lock function.
5. a kind of mounting board component for monocrystalline silicon growing furnace according to claim 1, it is characterised in that the mounting
Plate is provided with handle, for realizing the rotation of hanging plate by rotary handle.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410411807.4A CN104213190B (en) | 2014-08-20 | 2014-08-20 | Mounting plate assembly for monocrystalline silicon growth furnace |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410411807.4A CN104213190B (en) | 2014-08-20 | 2014-08-20 | Mounting plate assembly for monocrystalline silicon growth furnace |
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| CN104213190A CN104213190A (en) | 2014-12-17 |
| CN104213190B true CN104213190B (en) | 2017-05-10 |
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| CN201410411807.4A Active CN104213190B (en) | 2014-08-20 | 2014-08-20 | Mounting plate assembly for monocrystalline silicon growth furnace |
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Families Citing this family (2)
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| CN107151819B (en) * | 2017-06-08 | 2023-06-23 | 浙江晶盛机电股份有限公司 | Furnace chamber locking mechanism for monocrystalline silicon growth furnace |
| CN114717649B (en) * | 2022-02-25 | 2023-03-24 | 连城凯克斯科技有限公司 | Upward pulling open type single crystal furnace |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| JP4166316B2 (en) * | 1998-02-27 | 2008-10-15 | Ｓｕｍｃｏ Ｔｅｃｈｘｉｖ株式会社 | Single crystal manufacturing equipment |
| CN102206853A (en) * | 2011-05-20 | 2011-10-05 | 浙江星宇能源科技有限公司 | Method for taking monocrystal bar out of monocrystal furnace |
| CN102409398B (en) * | 2011-12-20 | 2014-03-26 | 北京京仪世纪电子股份有限公司 | Taking-out device of long monocrystalline silicon rods |
| CN204174311U (en) * | 2014-08-20 | 2015-02-25 | 浙江晶盛机电股份有限公司 | A kind of hanging plate assembly for monocrystalline silicon growing furnace |
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