CN104204844B - Ultrasonic sensor and method for measuring an object distance - Google Patents
Ultrasonic sensor and method for measuring an object distance Download PDFInfo
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- CN104204844B CN104204844B CN201380015759.0A CN201380015759A CN104204844B CN 104204844 B CN104204844 B CN 104204844B CN 201380015759 A CN201380015759 A CN 201380015759A CN 104204844 B CN104204844 B CN 104204844B
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- 238000000034 method Methods 0.000 title claims abstract description 46
- 238000013016 damping Methods 0.000 claims abstract description 15
- 239000000919 ceramic Substances 0.000 claims description 67
- 238000005259 measurement Methods 0.000 claims description 26
- 238000001514 detection method Methods 0.000 claims description 15
- 230000007246 mechanism Effects 0.000 claims description 11
- 230000001105 regulatory effect Effects 0.000 claims description 10
- 230000001276 controlling effect Effects 0.000 claims description 7
- 230000008520 organization Effects 0.000 claims description 7
- 238000010276 construction Methods 0.000 claims description 4
- 238000009331 sowing Methods 0.000 claims 1
- 239000012528 membrane Substances 0.000 abstract description 3
- 150000001875 compounds Chemical class 0.000 abstract 1
- 230000005284 excitation Effects 0.000 description 8
- 230000010355 oscillation Effects 0.000 description 6
- 230000001052 transient effect Effects 0.000 description 6
- 238000010586 diagram Methods 0.000 description 5
- 238000004519 manufacturing process Methods 0.000 description 4
- 238000002604 ultrasonography Methods 0.000 description 4
- 230000033228 biological regulation Effects 0.000 description 3
- 230000002349 favourable effect Effects 0.000 description 3
- 238000007639 printing Methods 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 230000010287 polarization Effects 0.000 description 2
- 230000009467 reduction Effects 0.000 description 2
- 241000406668 Loxodonta cyclotis Species 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 239000004744 fabric Substances 0.000 description 1
- 230000008676 import Effects 0.000 description 1
- 229910052573 porcelain Inorganic materials 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 230000002035 prolonged effect Effects 0.000 description 1
- 230000000284 resting effect Effects 0.000 description 1
- 238000007790 scraping Methods 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
- G01S7/00—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
- G01S7/52—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S15/00
- G01S7/521—Constructional features
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
- B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
- B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
- B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
- B06B1/06—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction
- B06B1/0607—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using multiple elements
- B06B1/0622—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using multiple elements on one surface
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- Computer Networks & Wireless Communication (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Radar, Positioning & Navigation (AREA)
- Remote Sensing (AREA)
- Mechanical Engineering (AREA)
- Measurement Of Velocity Or Position Using Acoustic Or Ultrasonic Waves (AREA)
- Transducers For Ultrasonic Waves (AREA)
Abstract
The invention relates to an ultrasonic sensor (10) for measuring the distance of an object, having a housing (20) and a damping compound (21). The latter at least partly fills the housing (20). The ultrasonic sensor (10) further comprises a membrane (30), a piezoceramic (40) and an electric contact member (22). The electric contact member (22) comprises at least one electrode (23) and a ground electrode (25). Furthermore, the piezoceramic (40) is divided into at least three segments (41, 42, 43), wherein a first segment (41) is connected to the ground electrode (25) and contact is respectively made with a second (42) and a third segment (43) via separate electrodes (23, 24). The invention further relates to a method for measuring an object distance by means of an ultrasonic sensor (10) having a piezoceramic (40), the rear side (31) of which has a first segment (41), a second segment (42) and a third segment (43). The method comprises a method step in which an opposing vibration is introduced into the vibrating membrane (30) by means of the second segment (42).
Description
Technical field
The present invention relates to a kind of ultrasonic sensor of the spacing for detection object and for being passed by means of ultrasound wave
The method of sensor measurement object spacing.
Background technology
DE19507650A1 discloses a kind of ultrasonic sensor, and which is applied to and sends and receives ultrasonic signal.Ultrasound
Wave sensor here has sensor diaphragm, and the sensor diaphragm is divided into main film and two or more diaphragms.Main film
Corresponding detection mission is matched with secondary diaphragm here.The sectional here of sensor diaphragm determines the damping row of sensor diaphragm
For and the thus detection feature of ultrasonic sensor.
By document US3, a kind of ultrasonic sensor for the examination of materials known to 698,051, its plate-like ground construction and
It is provided with radial gap.Additionally, metal polarization layer is along the circumferential direction concentrically disposed with, the metal polarization layer is to the more of plane of crystal
The curved section of brilliant material arranges piezoelectric property.Additionally, according to document US3,698,051 sensor is 10kHz-500kHz's
Run under resonant frequency.
Document DE19605502C1 discloses a kind of ultrasonic transducer for distance measurement, and which has damping mechanism,
The damping mechanism is so structured that piezoelectric element.Ultrasonic transducer shakes to undamped during ultrasonic signal is sent first
It is dynamic.Damping mechanism is directed to into the diaphragm after ultrasonic signal is sent and the damping mechanism is so that the diaphragm is controlled is located in
In resting state.
According to prior art ultrasonic sensor disadvantageously, they are designed for right in several meters of operating distance
As detection and be not suitable for same precision reliably and detect exactly little object spacing, particularly it is little
In 20 centimetres of object spacing.
The content of the invention
Ultrasonic sensor according to the spacing for detection object of the present invention has housing, and the housing is at least part of
Filled with damping mass on ground.Additionally, having diaphragm according to the ultrasonic sensor of the present invention, the diaphragm can be produced by vibrating
Raw ultrasonic pulse.Additionally, the diaphragm is applied to the echo of detecting ultrasonic wave impulse.According to the ultrasonic sensor of the present invention
Piezoelectric ceramics is provided with, which is connected with diaphragm and is electrically connected.The portion of electrically connecting of piezoelectric ceramics includes at least one electrode and at least
One ground electrode.Can be set up by adhesive that can be conductive with electrically connecting for piezoelectric ceramics.Connection portion here is prolonged
Damping mass is extended through, the damping mass fills the housing of ultrasonic sensor at least in part.The pressure of ultrasonic sensor
Electroceramics is divided at least three sections, and wherein, the first section is connected with ground electrode.Second section and the 3rd section lead to respectively
Cross detached electrode to electrically connect.
Second section of piezoelectric ceramics is configured to reduce the vibration of diaphragm.Additionally, the 3rd section is configured to detect film
The vibration of piece.
Piezoelectric ceramics can have at least one other section, and described at least one other section is configured to detection
The vibration of diaphragm and/or the vibration for reducing diaphragm.Additionally, the first section, the second section and the 3rd section can be same respectively
Heart surround.
These sections so can be mechanically coupled to each other by here, so as to these sections are used as the measuring mechanism of regulating loop
With controlling organization.These sections can be constructed so as in piezoelectric ceramics so that be introduced in laser in the surface of piezoelectric ceramics
Disconnected portion.Additionally, the discontinuities can be manufactured by scraping (Ritzen) quarter of piezoelectric ceramics or by method for printing screen.
The method for measurement object spacing according to the present invention is implemented by means of ultrasonic sensor, and the ultrasound wave is passed
Sensor includes diaphragm and piezoelectric ceramics.Here, piezoelectric ceramics is divided at least three sections, wherein, the first section is used as second
Section and the 3rd section load-carrying unit.Additionally, produce in the first section second and the 3rd section electric field.Firstth area
Section is connected by ground electrode, and the second section and the 3rd section are connected by detached electrode respectively.According to the side of the present invention
Method includes first method step, passes through the second section of electrode electric excitation and/or the 3rd section extremely according to the first method step
Piezoelectric deforming (Piezo-Deformation) and cause the vibration of diaphragm.The vibration of diaphragm produces ultrasonic pulse, and which is sent out
Send.In other method step, by the deflection of the vibrational state and measuring diaphragm of the 3rd zone detection diaphragm.In the opposing party
In method step, the second section of excitation is used for producing correspondence vibration, and the correspondence vibration reduces the deflection of diaphragm.Vibrational state it is strong
Degree is characterized by least one physical parameter of vibration, the amplitude of such as diaphragm deflection or frequency.In back to back method and step
In, the echo of the ultrasonic pulse sent in above-mentioned first method step is received and by means of piezoelectric ceramics by diaphragm
Second section and/or echo described in the 3rd zone detection.In subsequent method and step, that detects ultrasonic pulse is sending super
The propagation time passed through between sound wave pulse and detection ultrasonic pulse.It is to be measured right to be asked for according to the striked propagation time
As spacing.
In an embodiment of the invention, the deflection by the 3rd zone detection diaphragm can be implemented in adjustment ring
Method and step and the method and step by means of the corresponding vibration of the second section generation.Here, detecting when that the deflection of diaphragm is less than
Threshold value.If being less than the threshold value, terminate to produce the method and step of correspondence vibration.
In another embodiment of the present invention, other section, the other area can be constructed in piezoelectric ceramics
Section is coupled with the second section and the 3rd section.Here so connects the other section and second and the 3rd section so that institute
Measuring mechanism and/or controlling organization that section is realized in regulating loop is stated, the regulating loop reduces the deflection of diaphragm.
Ultrasonic sensor according to the present invention can be used between measurement object especially in motor vehicle driving aid system
Away from.
Ultrasonic sensor according to the present invention has piezoelectric ceramics, and the piezoelectric ceramics is divided at least three sections.It is logical
Cross favourable mode, these sections of piezoelectric ceramics functionally mutually decoupling and can with the running status of other sections without
Realize detached function with closing.Sectorized section of piezoelectric ceramics is allowed：Directly by encouraging the second section and/or the 3rd section
Pass through the deflection of the 3rd zone detection diaphragm after sending ultrasonic pulse.Furthermore, it is possible to the second section is targetedly encouraged,
To produce correspondence vibration, the correspondence oscillating component ground eliminates the vibration for having existed of diaphragm and thus lowers the inclined of diaphragm
Turn.The transient state of diaphragm can be reacted in the ultrasonic sensor according to the present invention after ultrasonic pulse is sent directly
Vibration (Nachschwingen).By second and the 3rd section functional separation can not interrupt and while implement diaphragm it is inclined
The measurement for turning and correspondence effect (Gegenwirken).The generation of the detection and correspondence vibration of diaphragm deflection can be with here enduringly
Coordinated by adjustment ring.Piezoelectric ceramics second and the 3rd section be used as regulating loop measurement and controlling organization, the regulation
Loop causes the transient oscillation of diaphragm quickly to minimize.
In transient oscillation, the quick minimum of diaphragm deflection causes：Diaphragm can be detected on diaphragm after in short-term again
The arrival of the echo of ultrasonic pulse.Thus can also be reliable and accurate by the ultrasonic pulse with the only little propagation time
Measurement of the ground for object spacing.Thus the present invention allows, and reduces the minimum range of ultrasonic sensor.According to the present invention
Ultrasonic sensor can serve as the sensor for low object spacing.It is possible thereby to do not merely have to measurement it is high and
Detached Proximity Sensor is saved in the case of low object spacing in motor vehicle driving aid system for example.
Can arrange other in piezoelectric ceramics in an embodiment of the ultrasonic sensor according to the present invention
Section, the other section are applied to the vibration and/or the vibration for reducing diaphragm of detection diaphragm.Piezoelectric ceramics it is another
Sectional allows the multiple sections for measuring of construction, the measurement signal of the plurality of section for measuring mutually can carry out
Improve relatively and thus the certainty of measurement of diaphragm deflection.Additionally, another sectional of piezoelectric ceramics allows construction equably to divide
The excitation section of cloth, the excitation section can quickly reduce the transient oscillation of diaphragm.Thus further reduce up to diaphragm again
The time of the echo of ultrasonic pulse can be detected.
Additionally, the present invention allows to reduce the decay of diaphragm, thus film is produced in the case where the excitation holding of diaphragm is constant
The higher deflection of piece.This can realize the generation of high sound pressure, and thus high sensor operating distance is possible.Additionally, diaphragm
Reduction decay allow：Weak excitation is detected by the diaphragm and the weak excitation is detected by means of piezoelectric ceramics.
By present invention improves the detection range of pitch sensors in a motor vehicle, particularly such to belong to side vision aid application
Pitch sensors.
Additionally, these sections are advantageously mechanically coupled to each other and are configured to the measuring mechanism of regulating loop and control machine
Structure.These sections are the parts of identical piezoelectric ceramics and are based on identical physics original as measurement sensor and executor
Reason.If detecting ultrasonic echo during the transient oscillation of diaphragm, can be existed by the sensing by means of the 3rd section
Ultrasonic echo filters transient oscillation after reaching from the deflection for being detected of diaphragm by way of calculating.Thus improve super
The certainty of measurement of sonic sensor.Additionally, allowing simply to realize on regulation technology according to the ultrasonic sensor of the present invention.
Additionally, second and the 3rd section be connected as regulating loop and allow：These sections can be made by simple ways and means
Regulation behavior be matched with different application requirements.Therefore the present invention improves answering for the ultrasonic sensor for distance measurement
Use scope.
Additionally, these sections on piezoelectric ceramics surface can be changed by laser discontinuities.Laser Processing can be with
Realization of High Speed and simply can be joined to production chain in.Alternatively, can by carve scrape or method for printing screen manufacture in
Disconnected portion.It can be to be simply integrated into the production stage produced in chain to scrape at quarter with method for printing screen.According to the ultrasound of the present invention
Thus wave sensor allows to realize the reduction of minimum range with relatively simple device.Similarly, according to the super of the present invention
Sonic sensor needs each section to control by detached electrode.Electrode can be by simple ways and means in manufacturer
Introduce in method.
Additionally, the present invention allows to reduce the electric stress of diaphragm in run duration by actively introducing the correspondence vibration of diaphragm.
Which thereby enhance the life-span of ultrasonic sensor.Furthermore, it is possible to due to diaphragm in the ultrasonic sensor according to the present invention
Little damping and save changer ().Here reduces the quantity of the component of ultrasonic sensor, simplifies structure
The production of part and save structure space.
Description of the drawings
Accompanying drawing is illustrated：
Fig. 1：According to the top view of the piezoelectric ceramics of prior art；
Fig. 2：The cross-sectional view of ultrasonic sensor；
Fig. 3：According to the schematic diagram of the piezoelectric ceramics of the ultrasonic sensor of the present invention；
Fig. 4：According to the schematic diagram of the embodiment of the piezoelectric ceramics of the ultrasonic sensor of the present invention；
Fig. 5：According to the schematic diagram of the piezoelectric ceramics of the ultrasonic sensor of the present invention；
Fig. 6：According to the schematic diagram of the piezoelectric ceramics of the ultrasonic sensor of the present invention；
Fig. 7：It is used for the schematic diagram of the method for measurement object spacing according to the present invention.
The piezoelectric ceramics 40 according to prior art is depicted in FIG.Piezoelectric ceramics 40 has surface 60, and which passes through edge
70 gauges.Piezoelectric ceramics 40 is divided into the first section 41 and the second section 42 according to its surface 60.Here, the first section 41 is annular
Ground is around the second section 42.First section 41 is electrically connected by ground electrode 25, and the ground electrode is electrically on of portion 22
Point.Second section 42 is electrically connected by detached electrode 23.
Specific embodiment
Figure 2 illustrates the cross section of ultrasonic sensor.Ultrasonic sensor 10 includes housing 20, the housing section
Ground is divided to fill with damping mass 21.Diaphragm 30 is constructed on an end of housing 20, and the diaphragm can be produced by vibrating
Ultrasonic pulse.Additionally, diaphragm 30 is applied to the echo for receiving and detecting ultrasonic pulse.Pacify on the rear side 31 of diaphragm 30
Dress piezoelectric ceramics 40, the piezoelectric ceramics can encourage diaphragm 30 to be vibrated by electric excitation.Additionally, piezoelectric ceramics 40 is suitable
For detect diaphragm 30 vibration and by it is described vibration be converted to the signal of telecommunication.The damping mass 21 for being partially filled with housing 20 exists
This surrounds piezoelectric ceramics 40.Piezoelectric ceramics 40 is connected by electrically connecting portion 22, and the portion of electrically connecting allows electrical connection and controls super
Sonic sensor 10.Electrically connect 22 here of portion and extend through damping mass 21.
The piezoelectric ceramics of advantageous embodiment of ultrasonic sensor according to the present invention is depicted in figure 3
Top view.The surface 60 of piezoelectric ceramics 40 passes through 70 gauge of edge.41 ring of the first section on the surface 60 of piezoelectric ceramics 40
Shape ground is around the second section 42 and the 3rd section 43.Second section 42 and the 3rd section 43 are disposed adjacently and are respectively used to subtract
The vibration or the vibration for detecting diaphragm 30 of the diaphragm 30 of few ultrasonic sensor 10.For this purpose, the second section 42 and the 3rd
Section 43 is electrically connected by detached electrode 23,24 respectively.The grounding connection of piezoelectric ceramics 40 realized by ground electrode 25, institute
State ground electrode to be connected with piezoelectric ceramics 40 in ground connection zone 45.First section 41, the second section 42 and the 3rd section
43 are separated from each other by laser discontinuities 50 respectively, and the laser interrupts cage structure on the surface 60 of piezoelectric ceramics 40.
Figure 4 illustrates a favourable embodiment party of the piezoelectric ceramics 40 according to ultrasonic sensor 10 of the invention
Formula.Wherein, the surface 60 of piezoelectric ceramics 40 has the first section 41, the second section 42 and the 3rd section 43.Here, the first section
41 circlewise around the 3rd section 43, and the 3rd section is again circlewise around the second section 42.Section 41,42,43 is in this base
It is concentrically disposed with this.Second section 42 is substantially provided in the center of piezoelectric ceramics 40, has in the vibration of the center diaphragm 30
There is amplitude peak.The deflection of diaphragm 30 is greatly decreased by the correspondence vibration that the second section 42 is imported.3rd section 43 is arranged on
In the region below on the surface 60 of piezoelectric ceramics, the vibration of diaphragm 30 in this region has moderate range.In moderate range
In the case of high measurement is guaranteed by the high measurement skew of the 3rd section 43 so record (register), the high measurement skew
Precision but the insufficient whole working region for utilizing the 3rd section 43 of here.First section 41 is used as the ground connection of piezoelectric ceramics 40 and connects
Connect, the grounding connection is guaranteed by ground electrode 25, the ground electrode in ground connection zone 45 with piezoelectric ceramics 40
Connection.
Figure 5 illustrates another favourable embodiment party of the piezoelectric ceramics 40 according to ultrasonic sensor 20 of the invention
Formula.The surface 60 of piezoelectric ceramics 40 is divided into the first section 41, the second section 42, the 3rd section 43 and other section 44, institute
State other section 44 to electrically connect by additional electrode 26.Second section 42 and other section 44 it is substantially consistent and from
The center of piezoelectric ceramics 40 is extended in marginal area 70, and the marginal area is limited by the first section 41.Thus, the secondth area
Section 42 and other section 44 can be sensed in wide radial zone or encourage diaphragm 30.If not only the second section 42 but also
Other section 44 is used for detecting the vibration of diaphragm 30 that then the second section 42 to allow which with the consistent shape of other section 44
Measurement signal directly compares.
Fig. 6 schematically illustrates another advantageous embodiment of the piezoelectric ceramics 40 of the ultrasonic sensor according to the present invention
Top view.Wherein, the surface 60 of piezoelectric ceramics 40 is divided into the first section 41, the second section 42, the 3rd section 43 and in addition
Section 44.Laser discontinuities 50 on surface 60 of the section 41,42,43,44 by piezoelectric ceramics 40 are formed.First section 41
Circlewise around the 3rd section 43, the 3rd section is again circlewise around the second section 42 and other section 44.Secondth area
Section 42 and other section 44 are constructed substantially consistently.Additionally, the first section 41 is electrically connected with ground electrode 25, and second
Section 42, the 3rd section 43 and other section 44 are electrically connected by detached electrode 23,24,26 respectively.It is located substantially on pressure
Second section 42 at the center of electroceramics 40 can import correspondence vibration in the region of the maximum vibration amplitude of diaphragm 30, and
Thus quickly eliminate the vibration of diaphragm 30.3rd section 43 substantially circlewise surround the center of piezoelectric ceramics 40 and extends to
In the marginal area 70 of piezoelectric ceramics 40, the marginal area is limited by the first section 41.3rd section 43 allows sensing membrane
Vibration of the piece 30 in region below：The Oscillation Amplitude of diaphragm 30 reaches the big order of magnitude in this region, in the big order of magnitude
In ensure that high certainty of measurement, but do not make full use of the completely working region of the 3rd section 43.If other area
Section 44 is used as measuring mechanism, then can be than the deflection that only more accurately detects diaphragm 30 only by a unique measuring mechanism.
If other section 44 is used as controlling organization, effectively corresponding vibration can be incorporated into the cooperation of the second section 42
In diaphragm 30.Thus reduce the time that the deflection of diaphragm 30 is minimized.
Schematically depict according to the present invention in the figure 7 for the side by means of ultrasonic sensor measurement object spacing
The flow process of one advantageous embodiment of method.By encouraging the second section 42 and/or the 3rd area in first method step 110
Section 43 is encouraging diaphragm 30 to be vibrated and produced ultrasonic pulse.Subsequently made pottery by piezoelectricity in second method step 120
3rd section 43 of porcelain 40 detects the deflection of diaphragm 30.In other method step 130, encourage the second section 42 right to produce
Should vibrate, second section eliminates the vibration of diaphragm 30.Here, reducing the deflection of diaphragm 30.Second method step 120 and
Three method and steps 130 are intercoupled by adjustment ring 160.Check whether that the deflection of diaphragm 30 is less than threshold value in adjustment ring 160.
If being less than threshold value, the vibration of diaphragm 30 is so low so that described to vibrate the echo for being able to record that ultrasonic pulse.Second party
Method step 120 and third method step 130 are repeated always by adjustment ring, until being less than threshold value.Second method step 120 and
Three method and steps 130 form regulating loop 170 together with adjustment ring 160.It is after third method step 130 is derived, cubic the
The echo of the ultrasonic pulse 110 sent in first method step is detected in method step 140 by diaphragm 30.
The echo received by diaphragm 30 of the ultrasonic pulse sent in first method step is by piezoelectric ceramics 40
Second section 42 and/or 43 here of the 3rd section are converted to measured value.Ask in back to back 5th method and step 150
Ultrasonic pulse is sent in one method and step 110 and is flowed between the echo of reception ultrasonic pulse in fourth method step 140
The time died.The propagation time of ultrasonic pulse is drawn by the time of the passage, and it is right to ask for according to the propagation time
The spacing of elephant.
Claims (9)
1. the ultrasonic sensor (10) of a kind of spacing for detection object, the ultrasonic sensor have housing (20) and
Damping mass (21) and have and diaphragm (30) and piezoelectric ceramics (40) and electrically connect portion (22), the damping mass is at least part of
Housing (20) are filled on ground, and the portion of electrically connecting has at least one electrode (23) and at least one ground electrode (25), its
In, piezoelectric ceramics (40) are divided at least three sections (41,42,43), and wherein, the first section (41) and the ground connection are electric
Pole (25) connects, and the second section (42) is connected by detached electrode (23,24) respectively with the 3rd section (43), and its feature exists
In the second section (42) are configured to reduce the vibration of the diaphragm (30), and its mode is that the second section (42) set
The center in the piezoelectric ceramics (40) is put, there is amplitude peak, the 3rd area in the vibration of diaphragm (30) described in the center
Section (43) is configured to detect the vibration of the diaphragm (30) that its mode is that the 3rd section (43) is arranged on the piezoelectricity
In the region below of ceramic (40)：The vibration of diaphragm (30) has moderate range in this region.
2. it is ultrasonic sensor (10) according to claim 1, it is characterised in that at least one other section (44) structure
Make for detecting the vibration of diaphragm (30) in the piezoelectric ceramics (40) and/or being used for reducing shaking for the diaphragm (30)
Dynamic, its mode is that the second section (42) and the other section (44) are constructed substantially consistently.
3. ultrasonic sensor according to any one of claim 1 to 2, it is characterised in that the first section (41),
Second section (42) and the 3rd section (43) concentrically around.
4. it is ultrasonic sensor (10) according to claim 2, it is characterised in that first section, secondth area
Section, the 3rd section and at least one other section are configured to the survey of regulating loop (170) with being mechanically coupled to each other
Measuring mechanism and controlling organization.
5. it is ultrasonic sensor (10) according to claim 1 and 2, it is characterised in that described section (41,42,43) lead to
The laser discontinuities (50) crossed on the surface (60) of the piezoelectric ceramics (40) are formed.
6. for the method by means of ultrasonic sensor (10) measurement object spacing, the ultrasonic sensor includes film to one kind
Piece (30) and piezoelectric ceramics (40), wherein, piezoelectric ceramics (40) are divided at least three sections (41,42,43), wherein,
The first section (41) for carrying the second section (42) and the 3rd section (43) is connected with ground electrode (25), and second section
(42) connected by detached electrode (23,24) with the 3rd section (43) respectively, methods described has following methods step：
A) vibration by encouraging the second section (42) and/or the 3rd section (43) to produce diaphragm (30) is used for
Send ultrasonic pulse；
B) deflection of diaphragm (30) is detected by the 3rd section (43)；
C) described second section (42) are encouraged to be used for producing correspondence vibration, the correspondence vibration is suitable for reducing diaphragm (30)
Deflection；
D) the second section (42) and/or the 3rd section (43) by the diaphragm (30) by means of the piezoelectric ceramics (40) is examined
Survey the echo of the ultrasonic pulse sent in step a)；And
E) detect propagation time that the ultrasonic pulse passed through between step a) and step d) and according to striked biography
The object spacing is asked between sowing time.
7. the method for by means of ultrasonic sensor (10) measurement object spacing according to claim 6, it is characterised in that
The implementation steps b) and c in adjustment ring (160)), wherein, if the deflection for detecting the diaphragm (30) in step b) is less than
Threshold value, then end step c).
8. according to claim 6 or 7 for the method by means of ultrasonic sensor (10) measurement object spacing, its feature exists
In, at least one other section (44) of construction in the piezoelectric ceramics (40), wherein, the other section (44) and institute
State the second section (42) and the 3rd section (43) is coupled as the measurement in regulating loop (170) and/or controlling organization, institute
State the deflection that regulating loop reduces diaphragm (30) in step c) by applying correspondence vibration, wherein, the other area
Section (44) is used as measuring mechanism and detects the deflection of the diaphragm (30), or, wherein, the other section (44) is used as
Controlling organization and produce it is described correspondence vibrate.
9., according to the application of the ultrasonic sensor (10) any one of claim 1 to 5, which is used in motor vehicle driving
Measurement object spacing in aid system.
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE102012204638A DE102012204638A1 (en) | 2012-03-22 | 2012-03-22 | Ultrasonic sensor and method for measuring an object distance |
| DE102012204638.0 | 2012-03-22 | ||
| PCT/EP2013/053326 WO2013139550A1 (en) | 2012-03-22 | 2013-02-20 | Ultrasonic sensor and method for measuring an object distance |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN104204844A CN104204844A (en) | 2014-12-10 |
| CN104204844B true CN104204844B (en) | 2017-03-22 |
Family
ID=47780039
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201380015759.0A Expired - Fee Related CN104204844B (en) | 2012-03-22 | 2013-02-20 | Ultrasonic sensor and method for measuring an object distance |
Country Status (4)
| Country | Link |
|---|---|
| EP (1) | EP2828681A1 (en) |
| CN (1) | CN104204844B (en) |
| DE (1) | DE102012204638A1 (en) |
| WO (1) | WO2013139550A1 (en) |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102014014389A1 (en) * | 2014-10-02 | 2016-04-07 | Hella Kgaa Hueck & Co. | A sensor device and method for detecting at least one touch event on a vehicle |
| DE102015110776A1 (en) * | 2015-07-03 | 2017-01-05 | Valeo Schalter Und Sensoren Gmbh | Ultrasonic sensor device for a motor vehicle with two piezo elements, driver assistance system, motor vehicle and method |
| DE102016115260B3 (en) * | 2016-08-17 | 2018-02-08 | Infineon Technologies Ag | SOUND WAVE SENSOR |
| JP6748966B2 (en) * | 2016-09-30 | 2020-09-02 | パナソニックＩｐマネジメント株式会社 | Detecting device, detecting method, and detecting program |
| DE102016221542A1 (en) * | 2016-11-03 | 2018-05-03 | Robert Bosch Gmbh | Membrane pot for an ultrasonic transducer and ultrasonic transducer |
| CN111405441B (en) * | 2020-04-16 | 2021-06-15 | 瑞声声学科技(深圳)有限公司 | Piezoelectric type MEMS microphone |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE19609443C1 (en) * | 1996-03-11 | 1997-05-22 | Siemens Ag | Ultrasound converter e.g. for non-destructive testing |
| CN1942020A (en) * | 2005-09-27 | 2007-04-04 | 精工爱普生株式会社 | Electrostatic ultrasonic transducer and design method thereof, and ultrasonic speaker |
Family Cites Families (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3698051A (en) | 1970-02-06 | 1972-10-17 | North American Rockwell | Method of making an acoustical transducer |
| JPS56141700A (en) * | 1980-04-04 | 1981-11-05 | Nec Corp | Piezo-oscillator |
| JPH02159266A (en) * | 1988-12-14 | 1990-06-19 | Matsushita Electric Ind Co Ltd | Ultrasonic probe |
| JP2745147B2 (en) * | 1989-03-27 | 1998-04-28 | 三菱マテリアル 株式会社 | Piezoelectric transducer |
| DE19507650A1 (en) | 1995-03-06 | 1996-09-12 | Gregor Verpoorten | Ultrasonic sensor for determining distance of objects with pan shaped housing |
| DE19605502C1 (en) | 1996-02-14 | 1997-04-24 | Fraunhofer Ges Forschung | Ultrasonic transducer for distance measurement |
| DE10361316B4 (en) * | 2003-12-19 | 2015-08-27 | Valeo Schalter Und Sensoren Gmbh | Ultrasonic transducer device |
| DE102004022838A1 (en) * | 2004-05-08 | 2005-12-01 | Forschungszentrum Karlsruhe Gmbh | Ultrasonic transducer and method for producing the same |
| JP4513596B2 (en) * | 2004-08-25 | 2010-07-28 | 株式会社デンソー | Ultrasonic sensor |
| JP4622574B2 (en) * | 2005-02-21 | 2011-02-02 | 株式会社デンソー | Ultrasonic element |
| EP1736739A3 (en) * | 2005-04-15 | 2007-12-05 | Avinash Shrikrishna Vaidya | Sensor devices |
-
2012
- 2012-03-22 DE DE102012204638A patent/DE102012204638A1/en not_active Withdrawn
-
2013
- 2013-02-20 CN CN201380015759.0A patent/CN104204844B/en not_active Expired - Fee Related
- 2013-02-20 WO PCT/EP2013/053326 patent/WO2013139550A1/en active Application Filing
- 2013-02-20 EP EP13707138.7A patent/EP2828681A1/en not_active Withdrawn
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE19609443C1 (en) * | 1996-03-11 | 1997-05-22 | Siemens Ag | Ultrasound converter e.g. for non-destructive testing |
| CN1942020A (en) * | 2005-09-27 | 2007-04-04 | 精工爱普生株式会社 | Electrostatic ultrasonic transducer and design method thereof, and ultrasonic speaker |
Also Published As
| Publication number | Publication date |
|---|---|
| DE102012204638A1 (en) | 2013-09-26 |
| WO2013139550A1 (en) | 2013-09-26 |
| EP2828681A1 (en) | 2015-01-28 |
| CN104204844A (en) | 2014-12-10 |
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