CN104176466B - Workpiece transmitting device with cleaning function - Google Patents
Workpiece transmitting device with cleaning function Download PDFInfo
- Publication number
- CN104176466B CN104176466B CN201310207280.9A CN201310207280A CN104176466B CN 104176466 B CN104176466 B CN 104176466B CN 201310207280 A CN201310207280 A CN 201310207280A CN 104176466 B CN104176466 B CN 104176466B
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- China
- Prior art keywords
- workpiece
- guide rail
- transmitting device
- transmission
- support component
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- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Cleaning In General (AREA)
Abstract
The present invention provides a kind of workpiece transmitting device with cleaning function, is related to semiconductor processing and manufacturing technical field.The workpiece transmitting device, for connecting workpiece offer device and Workpiece processing apparatus.Wherein, the workpiece transmitting device includes：It is arranged on the support component between the workpiece offer device and Workpiece processing apparatus；It is arranged in the support component, for receiving the workpiece of workpiece offer device offer, and the workpiece is sent to the transmission component of the Workpiece processing apparatus；Be arranged in the support component, for for the transmission component provide transmission power Power Component；The transmission component side is arranged on, the cleaning assembly for carrying out cleaning treatment to the workpiece.Technical scheme by the way of transmission, can also carry out cleaning treatment in transmit process to workpiece in addition to workpiece, can reduce the time loss of workpiece transmission and cleaning treatment, improve workpiece treatment effeciency.
Description
Technical field
The present invention relates to semiconductor processing and manufacturing technical field, a kind of workpiece transmission dress with cleaning function is particularly related to
Put.
Background technology
Semiconductor devices（Such as integrated circuit, LED）During processing, phase is completed to workpiece in a processing stations
After should processing, generally require to be transferred to another processing stations from current processing stations and be for further processing, prior art
In be usually workpiece is carried between processing stations by Workpiece processing apparatus, due to there is certain distance between processing stations, and
The movement velocity of Workpiece processing apparatus is limited, thus workpiece transmission and treatment effeciency than relatively low, and then cause the production of workpiece
Cost is higher.
In addition, before workpiece enters Workpiece processing apparatus, in addition it is also necessary to carry out various pretreatments to workpiece, further increase
Time loss.
The content of the invention
The technical problem to be solved in the present invention is to provide a kind of workpiece transmitting device with cleaning function, and workpiece is used
The mode of transmission, and cleaning treatment is carried out to workpiece in transmit process, the time that can reduce workpiece transmission and pretreatment disappears
Consumption, improves workpiece treatment effeciency.
In order to solve the above technical problems, embodiments of the invention offer technical scheme is as follows：
On the one hand, there is provided a kind of workpiece transmitting device, for connecting workpiece offer device and Workpiece processing apparatus, the work
Part transmitting device includes：
It is arranged on the support component between the workpiece offer device and Workpiece processing apparatus；
It is arranged in the support component, the workpiece for receiving the offer of workpiece offer device, and the workpiece is transmitted
To the transmission component of the Workpiece processing apparatus；
Be arranged in the support component, for for the transmission component provide transmission power Power Component；
The transmission component side is arranged on, the cleaning assembly for carrying out cleaning treatment to the workpiece.
Specifically, the transmission component includes：
It is arranged on the guide rail in the support component；
Be arranged on the guide rail, can be along the sliding block of the slide；
Be fixed on the sliding block, the workpiece brace for carrying the workpiece；
Be arranged on guide rail inner side, for driving the workpiece brace rotation so as to drive the sliding block along the guide rail
The Timing Belt of slip.
Further, the guide rail is circular guideway, oval guide rail or straight song guide rail.
Further, the transmission component is driven by Power Component, realizes workpiece transmission automatically and accurately.
Further, the Power Component includes：
Motor；
The first belt wheel of corresponding connection with the first wheel shaft of the motor connection and with first wheel shaft；
The second band of corresponding connection with the second wheel shaft that first wheel shaft is oppositely arranged and with second wheel shaft
Wheel；
Wherein, first belt wheel and the second belt wheel are engaged with the Timing Belt, and first belt wheel can be in the electricity
Rotated in the presence of machine, rotated by the drive Timing Belt that engages with the Timing Belt, and then be driven second belt wheel
Rotation.
Further, first wheel shaft passes through shaft coupling and the motor connection.
Further, the support component includes：
Supporting substrate；
It is arranged on the upper supporting plate column on the supporting substrate；
It is arranged on the upper supporting plate on the upper supporting plate column；
Wherein, the motor is fixed on the upper supporting plate, and first wheel shaft and the second wheel shaft are arranged on the upper branch
Between plate and supporting substrate.
Specifically, the transmission component includes：
The guide rail in the support component is arranged on, the guide rail is circular guideway, oval guide rail or straight song guide rail；
On the guide rail, can be along the sliding block of the slide；
It is fixed on the sliding block, the workpiece brace for carrying the workpiece；
The Power Component includes：
It is arranged in the support component, with the guide rail as stator, the motor with the sliding block as mover.Further
Ground, the sliding block can drive workpiece brace to realize that workpiece automatically and accurately is transmitted as electric mover.
Further, the support component includes：
Supporting substrate；
Wherein, the motor is fixed on the supporting substrate.
Wherein, the cleaning assembly includes but is not limited to be arranged on the dust catcher and air blower above guide rail.
Embodiments of the invention have the advantages that：
In such scheme, to workpiece by the way of transmission, the passing time of workpiece can be reduced, improve workpiece treatment effect
Rate.Cleaning treatment can also be carried out to workpiece, further save the production time of workpiece, improve workpiece in transmit process in addition
Production efficiency, so as to can finally reduce the production cost of workpiece.
Brief description of the drawings
Fig. 1 is the structural representation of the workpiece transmitting device of the embodiment of the present invention one；
Fig. 2 is the exploded perspective view of workpiece transmitting device shown in Fig. 1；
Fig. 3 is another structural representation of the workpiece transmitting device of the embodiment of the present invention one；
Fig. 4 is another structural representation of the workpiece transmitting device of the embodiment of the present invention one；
Fig. 5 is the structural representation of the workpiece transmitting device of the embodiment of the present invention two.
Specific embodiment
For the technical problem, technical scheme and the advantage that to be solved embodiments of the invention are clearer, below in conjunction with
Drawings and the specific embodiments are described in detail.
Embodiments of the invention cause workpiece treatment effeciency to be asked than relatively low for the transmission means of workpiece in the prior art
Topic, there is provided a kind of workpiece transmitting device with cleaning function, to workpiece by the way of transmission, and to work in transmit process
Part carries out cleaning treatment, can reduce the time loss of workpiece transmission and pretreatment, improves workpiece treatment effeciency.
The workpiece transmitting device of the embodiment of the present invention, for connecting workpiece offer device and Workpiece processing apparatus, the work
Part transmitting device includes：
It is arranged on the support component between the workpiece offer device and Workpiece processing apparatus；
It is arranged in the support component, the workpiece for receiving the offer of workpiece offer device, and the workpiece is transmitted
To the transmission component of the Workpiece processing apparatus；
Be arranged in the support component, for for the transmission component provide transmission power Power Component；
The transmission component side is arranged on, the cleaning assembly for carrying out cleaning treatment to the workpiece.
Specifically, the transmission component includes：
It is arranged on the guide rail in the support component；
Be arranged on the guide rail, can be along the sliding block of the slide；
Be fixed on the sliding block, the workpiece brace for carrying the workpiece；
Be arranged on guide rail inner side, for driving the workpiece brace rotation so as to drive the sliding block along the guide rail
The Timing Belt of slip.
Further, the guide rail is circular guideway, oval guide rail or straight song guide rail.
Further, the Power Component includes：
Motor；
The first belt wheel of corresponding connection with the first wheel shaft of the motor connection and with first wheel shaft；
The second band of corresponding connection with the second wheel shaft that first wheel shaft is oppositely arranged and with second wheel shaft
Wheel；
Wherein, first belt wheel and the second belt wheel are engaged with the Timing Belt, and first belt wheel can be in the electricity
Rotated in the presence of machine, rotated by the drive Timing Belt that engages with the Timing Belt, and then be driven second belt wheel
Rotation.
Further, first wheel shaft passes through shaft coupling and the motor connection.
Further, the support component includes：
Supporting substrate；
It is arranged on the upper supporting plate column on the supporting substrate；
It is arranged on the upper supporting plate on the upper supporting plate column；
Wherein, the motor is fixed on the upper supporting plate, and first wheel shaft and the second wheel shaft are arranged on the upper branch
Between plate and supporting substrate.
Specifically, the transmission component includes：
The guide rail in the support component is arranged on, the guide rail is circular guideway, oval guide rail or straight song guide rail；
On the guide rail, can be along the sliding block of the slide；
It is fixed on the sliding block, the workpiece brace for carrying the workpiece；
The Power Component includes：
It is arranged in the support component, with the guide rail as stator, the motor with the sliding block as mover.
Further, the sliding block can drive workpiece brace to realize that workpiece automatically and accurately is passed as electric mover
It is defeated.
Further, the support component includes：
Supporting substrate；
Wherein, the motor is fixed on the supporting substrate.
Specifically, the cleaning assembly includes but is not limited to be arranged on the dust catcher and air blower above guide rail.
Workpiece transmitting device with cleaning function of the invention, to workpiece by the way of transmission, can reduce workpiece
Passing time, improve workpiece treatment effeciency.Cleaning treatment can also be carried out to workpiece, further section in transmit process in addition
The production time of workpiece is saved, the production efficiency of workpiece is improved, so as to can finally reduce the production cost of workpiece.
The workpiece transmitting device with cleaning function of the invention is carried out with reference to specific embodiment and accompanying drawing
Further illustrate：
Embodiment one
As shown in Figure 1 to 4, in workpiece transmitting device of the invention, support component, transmission component, power packages are included
Part and the cleaning assembly 3 for carrying out cleaning treatment to the workpiece.
Wherein, support component includes：It is arranged on the supporting substrate 16 on whole machine bench 14；It is fixedly installed on supporting substrate 16
On upper supporting plate column 7；It is fixed by screws in the upper supporting plate 5 on upper supporting plate column 7.
Transmission component includes：It is arranged on the guide rail 10 of the top of supporting substrate 16；Be arranged on guide rail 10, can be along guide rail 10
The sliding block 11 of slip；It is fixed on the workpiece brace 2 on sliding block 11；The Timing Belt 17 of the inner side of guide rail 10 is arranged on, workpiece brace 2 leads to
Screws clamp is crossed on Timing Belt 17, such Timing Belt 17 can drive workpiece brace 2 to rotate so as to band movable slider 11 is along guide rail
10 slide.Its middle guide 10 can be circular guideway, oval guide rail or straight song guide rail, in the present embodiment, specifically, guide rail 10
It can be oval straight song guide rail.
Power Component includes：It is fixed on the motor 13 on upper supporting plate 5；The first round being connected with motor 13 by shaft coupling 9
Axle 15, the first belt wheel 8 with the corresponding connection of the first wheel shaft 15；The second wheel shaft 4 being oppositely arranged with the first wheel shaft 15；With the second wheel
Second belt wheel 6 of the correspondence connection of axle 4.Wherein, the first wheel shaft 15 and the second wheel shaft 4 are located between upper supporting plate 5 and supporting substrate 16,
First belt wheel 8 and the second belt wheel 6 are engaged with Timing Belt 17.However, it is to be understood that those skilled in the art can also be used
Other mounting structures being readily apparent that install the first belt wheel 8 and the second belt wheel 6, do not influence the reality of the present embodiment technical scheme
Apply.
Cleaning assembly 3 can be provided in the dust catcher or air blower of the top of guide rail 10, but be not limited to dust catcher and air blast
Machine.
When the workpiece transmitting device of the present embodiment works, when motor 13 rotates, first band is driven by the first wheel shaft 15
Wheel 8 is rotated, and the first belt wheel 8 is rotated by the drive Timing Belt 17 that engages with Timing Belt 17, and then the second belt wheel 6 of transmission rotates,
Workpiece brace 2 drives workpiece brace 2 to rotate by screws clamp on Timing Belt 17, when Timing Belt 17 is rotated, the band of workpiece brace 2
Movable slider 11 is slided along guide rail 10, and when workpiece brace 2 is rotated to cleaning assembly 3, cleaning assembly 3 can be by workpiece brace
2 and the dust and other residues of workpiece surface residual remove, realize to the cleaning treatment of workpiece, and can realize to work
The cleaning of part brace 2 and be its place workpiece prepare.Afterwards, next workpiece brace 2 is rotated under cleaning assembly 3 again
Side, then complete cleaning action.So it is repeated, after realizing to the cleaning treatment of workpiece, workpiece is sent to workpiece treatment dress
Put.
Wherein, one end of guide rail 10 is close to workpiece offer device, and the other end is near Workpiece processing apparatus.Dress is provided in workpiece
End is put, and be placed on pending workpiece on workpiece brace 2 by workpiece offer device, workpiece is sent to by workpiece transmitting device
Workpiece processing apparatus end；At Workpiece processing apparatus end, Workpiece processing apparatus remove workpiece from workpiece brace 2, and to workpiece
Processed.
Workpiece described in the present embodiment includes but is not limited to chip, chip etc..
When being installed, Each part can be attached the workpiece transmitting device of the present embodiment with screw, for example：With
Be fixed on supporting substrate 16 on whole machine bench 14 by screw, leveling guide rail 10 and sliding block 11, makes the upper datum level of sliding block 11 will
In the error range asked；With mode connects for screw upper supporting plate column 7 and supporting substrate 16, with mode connects for screw upper supporting plate column 7 and upper branch
Plate 5；First belt wheel 8, the second belt wheel 6, the first wheel shaft 15 and the second wheel shaft 4 to upper supporting plate 5 are installed by bearing and bearing gland
With supporting substrate 16, with mode connects for screw motor 13 to upper supporting plate 5, motor shaft and the first wheel shaft 15 are connected by shaft coupling 9, installed
The belt wheel 8 of Timing Belt 17 and first, the second belt wheel 6, with mode connects for screw workpiece brace 2 to sliding block 11, with screws clamp Timing Belt 17
With workpiece brace 2, workpiece brace 2 and sliding block 11 can be driven to be moved along guide rail 10 by the driving of Timing Belt 17.
In the present embodiment, workpiece is loaded onto on workpiece brace at workpiece offer device end, and by configuration outside guide rail
The cleaning assembly of side receives cleaning treatment, and then being obtained by Workpiece processing apparatus at Workpiece processing apparatus end carries out next step behaviour
Make.On the one hand such mode ensures that Workpiece processing apparatus can obtain workpiece in shorter distance；On the other hand due to multiple
Workpiece can parallel receive cleaning treatment on workpiece transmitting device, can further save the process time of workpiece so that work
Part processing unit can continuously obtain the workpiece for having completed cleaning treatment, improve the production efficiency of workpiece, finally
The production cost of workpiece can be reduced.
Embodiment two
In workpiece transmitting device of the invention, support component, transmission component, Power Component and for the work are included
Part carries out the cleaning assembly of cleaning treatment.
Wherein, support component includes the supporting substrate being arranged on whole machine bench.
As shown in figure 5, transmission component includes：It is fixedly installed on the guide rail 21 on supporting substrate；It is arranged on guide rail 21, energy
Enough sliding blocks 22 slided along guide rail 21；It is fixed on the workpiece brace 23 on sliding block 22.
Power Component includes：It is fixedly installed on supporting substrate, the electricity with guide rail 21 as stator, with sliding block 22 as mover
Machine.Motor can drive all mover sliding blocks 22 to be moved along stator guiding track 21, so as to drive workpiece brace 23 to move.Its middle guide
21 can be circular guideway, oval guide rail or straight song guide rail.In the present embodiment, specifically, as shown in figure 4, guide rail 21 can be with
It is oval straight song guide rail.
Cleaning assembly can be provided in the dust catcher or air blower of the top of guide rail 21, but be not limited to dust catcher and air blast
Machine.
When the workpiece transmitting device of the present embodiment works, electric mover sliding block 22 drives workpiece brace 23 so as to band is started building
Part moves to Workpiece processing apparatus end by workpiece offer device end.At workpiece offer device end, workpiece offer device 24 will be waited to locate
The workpiece of reason is placed in the workpiece brace 23 on mover sliding block 22, and workpiece brace 23 is moved under the drive of motor along guide rail 21
Dynamic, when workpiece brace 23 is rotated to cleaning assembly, cleaning assembly can remain workpiece brace 23 and workpiece surface
Dust and other residues remove, realize to the cleaning treatment of workpiece, and can realize to the cleaning of workpiece brace 23
Workpiece is placed for it to prepare.Afterwards, next workpiece brace 23 is rotated to cleaning assembly lower section again, then completes to clean dynamic
Make.So it is repeated, after realizing to the cleaning treatment of workpiece, workpiece is sent to Workpiece processing apparatus 25.In workpiece treatment
Device end, Workpiece processing apparatus 25 remove workpiece from workpiece brace, and workpiece is processed.
Workpiece described in the present embodiment includes but is not limited to chip, chip etc..
When being installed, straight song stator guiding track 21 can be fixed on branch support group to the workpiece transmitting device of the present embodiment with screw
On plate or it is connected directly between on whole machine bench, so that whole transmitting device is fixed.The workpiece brace 23 of workpiece is carried, it is and dynamic
The connection of sub- sliding block 22 can use mode connects for screw or other connected modes, such as magnetic force connection.At workpiece offer device 24, workpiece
Reason device 25 and cleaning assembly are screwed on whole machine bench.
In the present embodiment, workpiece is loaded onto on workpiece brace at workpiece offer device end, and by configuration outside guide rail
The cleaning assembly of side receives cleaning treatment, and then being obtained by Workpiece processing apparatus at Workpiece processing apparatus end carries out next step behaviour
Make.On the one hand such mode ensures that Workpiece processing apparatus can obtain workpiece in shorter distance；On the other hand due to multiple
Workpiece can parallel receive cleaning treatment on workpiece transmitting device, can further save the process time of workpiece so that work
Part processing unit can continuously obtain the workpiece for having completed cleaning treatment, improve the production efficiency of workpiece, finally
The production cost of workpiece can be reduced.
The above is the preferred embodiment of the present invention, it is noted that for those skilled in the art
For, on the premise of principle of the present invention is not departed from, some deformations, improvements and modifications can also be made, these deform, change
Enter and retouch and also should be regarded as protection scope of the present invention.
Claims (10)
1. a kind of workpiece transmitting device with cleaning function, for connecting workpiece offer device and Workpiece processing apparatus, it is special
Levy and be, the workpiece transmitting device includes：
It is arranged on the support component between the workpiece offer device and Workpiece processing apparatus；
It is arranged in the support component, for receiving the workpiece of workpiece offer device offer, and the workpiece is sent to institute
State the transmission component of Workpiece processing apparatus；
Be arranged in the support component, for for the transmission component provide transmission power Power Component；
The transmission component side is arranged on, the cleaning assembly for carrying out cleaning treatment to the workpiece；
Wherein, the transmission component includes the guide rail being arranged in support component, and the cleaning assembly is arranged on outside the guide rail
Side；
The cleaning assembly includes being arranged on the dust catcher and air blower above guide rail.
2. workpiece transmitting device according to claim 1, it is characterised in that the transmission component includes：
It is arranged on the guide rail in the support component；
Be arranged on the guide rail, can be along the sliding block of the slide；
Be fixed on the sliding block, the workpiece brace for carrying the workpiece；
Be arranged on guide rail inner side, for driving the workpiece brace rotation so as to drive the sliding block along the slide
Timing Belt.
3. workpiece transmitting device according to claim 2, it is characterised in that the guide rail is that circular guideway, ellipse are led
Rail or straight song guide rail.
4. workpiece transmitting device according to claim 2, it is characterised in that the transmission component is driven by Power Component,
Realize workpiece transmission automatically and accurately.
5. workpiece transmitting device according to claim 2, it is characterised in that the Power Component includes：
Motor；
The first belt wheel of corresponding connection with the first wheel shaft of the motor connection and with first wheel shaft；
The second belt wheel of corresponding connection with the second wheel shaft that first wheel shaft is oppositely arranged and with second wheel shaft；
Wherein, first belt wheel and the second belt wheel are engaged with the Timing Belt, and first belt wheel can be in the motor
The lower rotation of effect, is rotated, and then be driven the second belt wheel rotation by the drive Timing Belt that engages with the Timing Belt.
6. workpiece transmitting device according to claim 5, it is characterised in that first wheel shaft by shaft coupling with it is described
Motor connection.
7. workpiece transmitting device according to claim 5, it is characterised in that the support component includes：
Supporting substrate；
It is arranged on the upper supporting plate column on the supporting substrate；
It is arranged on the upper supporting plate on the upper supporting plate column；
Wherein, the motor is fixed on the upper supporting plate, first wheel shaft and the second wheel shaft be arranged on the upper supporting plate and
Between supporting substrate.
8. workpiece transmitting device according to claim 1, it is characterised in that the transmission component includes：
The guide rail in the support component is arranged on, the guide rail is circular guideway, oval guide rail or straight song guide rail；
On the guide rail, can be along the sliding block of the slide；
It is fixed on the sliding block, the workpiece brace for carrying the workpiece；
The Power Component includes：
It is arranged in the support component, with the guide rail as stator, the motor with the sliding block as mover.
9. workpiece transmitting device according to claim 8, it is characterised in that the sliding block can drive as electric mover
Workpiece brace realizes workpiece transmission automatically and accurately.
10. workpiece transmitting device according to claim 8, it is characterised in that the support component includes：
Supporting substrate；
Wherein, the motor is fixed on the supporting substrate.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310207280.9A CN104176466B (en) | 2013-05-28 | 2013-05-28 | Workpiece transmitting device with cleaning function |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310207280.9A CN104176466B (en) | 2013-05-28 | 2013-05-28 | Workpiece transmitting device with cleaning function |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN104176466A CN104176466A (en) | 2014-12-03 |
| CN104176466B true CN104176466B (en) | 2017-06-09 |
Family
ID=51957869
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201310207280.9A Expired - Fee Related CN104176466B (en) | 2013-05-28 | 2013-05-28 | Workpiece transmitting device with cleaning function |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN104176466B (en) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107413767A (en) * | 2017-05-24 | 2017-12-01 | 大连智云自动化装备股份有限公司 | Cleaning plant |
| CN109822666B (en) * | 2019-04-03 | 2021-01-26 | 南京深农智能装备有限公司 | Automatic cut-flower equipment |
| CN112678455B (en) * | 2021-03-22 | 2021-06-04 | 湖南工业职业技术学院 | Automatic change conveyer |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1118934A (en) * | 1994-06-30 | 1996-03-20 | 精工爱普生株式会社 | Method and apparatus for processing wafers and substrates, and apparatus for transferring the wafers and substrates |
| CN201095526Y (en) * | 2007-10-10 | 2008-08-06 | 张家港市港威超声电子有限公司 | Cleaning and conveying device for bearing finished products |
| CN201109628Y (en) * | 2007-12-17 | 2008-09-03 | 重庆江增机械有限公司 | Main gearing of multi-position cleaning machine |
| CN102361806A (en) * | 2009-01-22 | 2012-02-22 | 马雷尔·斯托克家禽加工处理有限公司 | Overhead conveyor system for conveying packaging trays |
| CN1978356B (en) * | 2005-12-05 | 2012-03-21 | 东京毅力科创株式会社 | Substrate conveying system, substrate conveying device and substrate treatment device |
| CN102470994A (en) * | 2010-04-22 | 2012-05-23 | 克朗斯股份公司 | Transporting apparatus and transporting method for container-handling installation, and container-handling installation with such a transporting apparatus |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6823984B2 (en) * | 2001-03-28 | 2004-11-30 | Fuji Photo Film Co., Ltd. | Automatic developing device, roller washing method, photosensitive material processing device, and preparation method for processing liquid |
-
2013
- 2013-05-28 CN CN201310207280.9A patent/CN104176466B/en not_active Expired - Fee Related
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1118934A (en) * | 1994-06-30 | 1996-03-20 | 精工爱普生株式会社 | Method and apparatus for processing wafers and substrates, and apparatus for transferring the wafers and substrates |
| CN1978356B (en) * | 2005-12-05 | 2012-03-21 | 东京毅力科创株式会社 | Substrate conveying system, substrate conveying device and substrate treatment device |
| CN201095526Y (en) * | 2007-10-10 | 2008-08-06 | 张家港市港威超声电子有限公司 | Cleaning and conveying device for bearing finished products |
| CN201109628Y (en) * | 2007-12-17 | 2008-09-03 | 重庆江增机械有限公司 | Main gearing of multi-position cleaning machine |
| CN102361806A (en) * | 2009-01-22 | 2012-02-22 | 马雷尔·斯托克家禽加工处理有限公司 | Overhead conveyor system for conveying packaging trays |
| CN102470994A (en) * | 2010-04-22 | 2012-05-23 | 克朗斯股份公司 | Transporting apparatus and transporting method for container-handling installation, and container-handling installation with such a transporting apparatus |
Also Published As
| Publication number | Publication date |
|---|---|
| CN104176466A (en) | 2014-12-03 |
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Granted publication date: 20170609 Termination date: 20190528 |