CN104165615A - Surface microtexture detecting method - Google Patents
Surface microtexture detecting method Download PDFInfo
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- CN104165615A CN104165615A CN201410413943.7A CN201410413943A CN104165615A CN 104165615 A CN104165615 A CN 104165615A CN 201410413943 A CN201410413943 A CN 201410413943A CN 104165615 A CN104165615 A CN 104165615A
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Abstract
The invention discloses a surface microtexture detecting method by which the three-dimensional size of a micron-dimension surface microtexture is obtained through a two-dimensional detecting device. The detection result contains the depth, diameter, section profile and volume parameters of the microtexture. The method comprises the steps of acquiring a section of profile curve of the microtexture surface through the two-dimensional detecting device; importing profile curve data into a computer, conducting denoising, segmentation, extraction, interpolation and fitting, and then obtaining a single morphology three-dimensional curved surface. The detection result is the manifestation of concentration and homogenization of multiple microtextures and reflects the overall machining quality of the surface microtexture technology. The method has the advantages that the requirement for surface microtexture detecting devices is reduced, the detection result is more objective, detection efficiency is improved greatly, and the method is suitable for surface microtexture detection of a plane or the inner surface of a cylinder.
Description
Technical field
The present invention relates to the detection method of the micro-texture in a kind of surface, the micro-texture in surface that is applicable to single shape array detects, and belongs to field of micro-Na manufacture.
Background technology
The micro-texture technology in surface, across multiple subjects, is applied increasingly extensive.It material surface form size at micron the micromorphology to nanometer scale, micromorphology mostly is cavity and projection, and the macro property of material is made a significant impact.At mechanical engineering field, surperficial micro-texture technology is applied to cylinder sleeve-piston, mould, cutter, roll, cam, sealing ring, bearing etc., makes component surface rub, wipe the performances such as, mechanics and significantly promotes.In materialogy field, the application of surperficial micro-texture technology on solar power silicon plate, has significantly improved the S. E. A. of solar panels; For polycrystalline material, make the unique microstructure of its inner each grain orientation close to monocrystalline, give full play to the performance of polycrystalline material.
The three-D space structure of micromorphology has determined the external performance of micro-textured surfaces, and therefore the judge of micro-texture technological effect has to be conceived to the accurate measurement to micromorphology three-dimensional dimension.The checkout equipment of current micro-textured surfaces, is divided into optical detection apparatus and contact pin type checkout equipment substantially by detecting principle.Optical detection apparatus utilizes the principle such as diffraction of light, reflection, obtains the three-dimensional appearance of micro-texture in conjunction with computer graphics analysis, and result is accurate, and precision can reach nanometer.Contact pin type checkout equipment utilizes probe or contact to contact with measured surface, obtains the pattern of measured surface via mechanics, displacement transducer.Because of probe or contact sweeping along a straight line in one-shot measurement process, so the surface inspection apparatus based on this principle can only obtain the two-dimensional silhouette information on sweeping straight line.Because optical detection apparatus and contact pin type checkout equipment measurement result exist the difference (three peacekeeping two dimensions) of dimension, and three-dimensional testing result comprised and more crossed quantity of information and more directly perceived, therefore to the oriented three dimensional stress development trend of the detection of micro-textured surfaces.In theoretical research, more and more adopt optical detection apparatus but not contact pin type checkout equipment.
Optical detection apparatus has testing result accurately and advantage intuitively, but also Shortcomings.First it is expensive, is 5 ~ 10 times of the contact pin type checkout equipment of same accuracy of detection; Secondly, smooth finish, the flatness of most optical detection apparatus to measured surface requires high, is difficult to detect curved surface; In the time that micro-textured surfaces of cylinder hole inwall is measured, cylinder hole need be cut, preparation plane sample, process bothers, and does not catch up with the detection beat of large-scale production.Compared with optical detection apparatus, contact pin type checkout equipment is measured fast, precision still can, but its two-dimentional metering system very easily causes the loss of surface information, more cannot accurately detect the three-dimensional dimension of micromorphology; Meanwhile, the two-dimensional curve that testing result is surface profile, not directly perceived.Therefore contact pin type checkout equipment can not meet the detection operation of micro-textured surfaces equally.
Prior art is in the time that micro-textured surfaces detects operation, and the array format of having ignored the micromorphology that forms micro-textured surfaces is artificial controlled.As Chinese patent 200810155787.3 discloses a kind of laser surface micro forming device and method, by controlling transmitting and the active position of laser pulse, realize the processing of micro-textured surfaces.
Summary of the invention
The object of the invention is to solve the test problems of micro-textured surfaces, particularly curved surface.This method is completed by contact pin type checkout equipment the detection of micro-textured surfaces, in the time detecting the curved surfaces such as cylinder hole, does not need to prepare plane sample, and testing result has comprised whole three-dimensional dimension information of micromorphology.
The technical scheme that the micro-texture detection method in a kind of surface of the inventive method is taked is: obtain the contour curve of one section of micro-textured surfaces by two-dimensional surface pick-up unit, by the anti-calculate to contour curve, Mathematical Fitting goes out the three-dimensional appearance of micromorphology.
The concrete technical scheme of the micro-texture detection method in a kind of surface of the inventive method is: for micro-textured surfaces of array of the micromorphology launching with column direction in the row direction, the micromorphology of its array line space is in the row direction identical with the column pitch on column direction, 30 ° ~ 90 ° of the angles of line direction and column direction.By two-dimensional surface pick-up unit in micro-textured surfaces, along particular detection direction, obtain the sampling contour curve on one section of this surface, on sampling contour curve, comprise and be more than or equal to three in the row direction or the cross section profile of column direction continuous arrangement micromorphology, the profile information that above-mentioned cross section profile comprises each micromorphology particular cross section position.The sectional profile curve lin of every micromorphology in sampling contour curve is extracted, above-mentioned sectional profile curve lin is all considered as to the contour curve of reverse pattern under different cross section.By array micromorphology in the row direction with column direction on spacing, determine the spacing of each sectional profile curve lin place plane.By the method for Mathematical Fitting, obtained the three-dimensional space of reverse pattern by sectional profile curve lin, tried to achieve the volume of reverse pattern by three-dimensional space.
The beneficial effect of the inventive method is:
1, acquisition that can be cheap accurately, the testing result of the micro-textured surfaces of three dimensional stress intuitively, significantly reduced the cost of three-dimensional detection.
2, be applicable to the detection of micro-textured surfaces of plane and curved surface, detect fast, success ratio 100%, is suitable for the required detection beat of large-scale production.
3, the testing result of reverse pattern derives from multiple micromorphologies, is concentrated expression and the homogenizing of multiple micromorphologies, has avoided people to choose the possibility that detects micromorphology, and therefore this method is more accurate and objective to the detection of micro-textured surfaces.
Brief description of the drawings
Fig. 1 is line direction and column direction out of plumb array schematic diagram.
Fig. 2 is line direction and column direction out of plumb array measurement track schematic diagram.
Fig. 3 is sampling profile tracing analysis schematic diagram.
Fig. 4 is extracted feature interpolation and matching schematic diagram.
Fig. 5 is line direction and column direction orthogonal array schematic diagram.
Fig. 6 is that line direction and column direction orthogonal array are measured track schematic diagram.
In figure, 1, micro-textured surfaces; 2, micromorphology; 3, pattern border; 4, diameter; 5, column pitch; 6, line space; 10, preferably measuring route; 11, actual measurement the first path; 12, error angle; 13, secondary series direction; 14 actual measurement the second paths; 15, angle.
Embodiment
Below in conjunction with accompanying drawing, the specific embodiment of the present invention is described in further detail.
Fig. 1, Fig. 2, Fig. 5 and Fig. 6 are the schematic diagram that has intercepted the micro-texture of part surface.Surface outline curves in Fig. 3 is that the T1000 contact pin type checkout equipment of German the Mearl Corporation suddenly obtains, and other checkout equipment with identical function all can obtain the surface outline curves shown in Fig. 3.Fig. 4 is Matlab running software sectional drawing.
The upper figure of Fig. 3 is original pattern, and it has comprised some scales and label information; In Fig. 3, figure is the pattern after rough handling, and scale information and mark are removed; Fig. 3 figure below is the cross section profile pattern extracting, and only contain the cross section profile information of micromorphology 2, and plane information is removed in this pattern.
Pay particular attention to, all carry out taking circular nick chamber as object for ease of narration embodiment mono-and embodiment bis-, the inventive method is suitable for the detection that comprises micro-textured surfaces 1 of the array micromorphology 2 with any cavity or projection with protection domain.
Embodiment mono-.
The embodiment of the inventive method in embodiment mono-comprises the steps:
(a) micro-textured surfaces 1 of array of the micromorphology 2 that processing launches with column direction in the row direction, its array pattern is jointly definite by the angle of line space 6, column pitch 5 and line direction and column direction.
(b) obtain above-mentioned micro-textured surfaces 1 sampling of a section in vertical direction contour curve in the row direction by two-dimensional detection device, for the array pattern of embodiment mono-, preferably the direction of measuring route 10 is the direction vertical with line direction, as Fig. 2; There is error angle 12 with preferred measuring route 10 in actual measurement the first path 11, error angle 12 is less than 10 degree; The original pattern of sampling contour curve is shown in the upper figure of Fig. 3.
(c) original pattern that will sampling contour curve imports computing machine, makes an uproar, cuts apart, obtains after extraction, interpolation and matching the three-dimensional space curved surface of single pattern through removing.As shown in Figure 3, the upper figure of Fig. 3 is original pattern to the above-mentioned process except making an uproar, cut apart, extract feature, comprises 3 cross section profiles that contact the micromorphologies 2 of arrangement at column direction in pattern, and the cross section profile degree of depth changes in gradient.Can read roughly the degree of depth of single pattern by original pattern, its degree of depth is more than or equal to the maximum cavity degree of depth in original pattern.The above-mentioned degree of depth is the maximal value of the miniature looks degree of depth.The original pattern of sampling contour curve through except make an uproar and dividing processing after obtain the pattern after the rough handling of figure in Fig. 3, then obtain through extraction the pattern that Fig. 3 figure below only contains micromorphology 2 cross section profiles.The above-mentioned method of making an uproar and cut apart of removing is, the artificial true origin of determining original pattern, on it, each pixel changes into a two-dimensional coordinate, coordinate set of view picture pattern formation, the coordinate of non-micromorphology 2 cross section profiles is removed from coordinate set, and these pixels are removed.The method of said extracted feature is, is all some cross section profiles of reverse pattern as single micromorphology 2 using the each cross section profile in the cross section profile pattern of extraction.By array micromorphology 2 in the row direction with column direction on spacing, determine the interplanar spacing in each sectional profile curve lin place.In the present embodiment, the spacing of each sectional profile curve lin place plane is the product of column pitch 5 and line direction and column direction included angle cosine value.Above-mentioned some cross section profiles are repainted in three-dimensional system of coordinate, as left figure in Fig. 4.Interpolation and fit procedure are the 3 d space coordinate points supplementary by mathematics method of interpolation, form the three-dimensional testing result of micromorphology 2.First extract the point coordinate that is positioned at material surface, above-mentioned point coordinate is carried out to two-dimentional matching, acquired results is actual measurement pattern border 3.Using pattern border 3 as boundary condition, jointly fit to the space curved surface of reverse pattern with some cross section profiles, as shown in figure as right in Fig. 4.
(d), by above-mentioned space curved surface, obtain final detected parameters.As by the volume of the integration of curved surface being tried to achieve to reverse pattern, or the degree of depth of miniature looks, diameter 4 and bottom irregularity degree.
Embodiment bis-.
Embodiment bis-is with the difference of embodiment mono-, and the line direction in embodiment bis-and secondary series direction 13 angles are 90 °.Ensure sampling comprise on contour curve be more than or equal to three in the row direction or the prerequisite of the cross section profile of column direction continuous arrangement micromorphology 2 under, there is angle 15 with secondary series direction 13 in actual measurement second path 14 of two-dimensional surface pick-up unit, the spacing of so each sectional profile curve lin place plane is the product of column pitch 5 and angle 15 sine values.Other step of embodiment bis-is identical with embodiment mono-.
Claims (5)
1. a detection method for the micro-texture in surface, is characterized in that, comprises the steps:
A) for micro-textured surfaces (1) of array of the micromorphology (2) launching with column direction in the row direction, column pitch (5) on the micromorphology (2) of described array line space (6) and column direction is in the row direction identical, 45 ° ~ 90 ° of the angles of line direction and column direction; Along straight line direction in textured surfaces, obtain one section of sampling contour curve along micromorphology corresponding to described rectilinear direction (2) by two-dimensional surface pick-up unit, in described rectilinear direction, comprise and be more than or equal to three in the row direction or the cross section profile of column direction continuous arrangement micromorphology (2), the profile information that described cross section profile comprises each micromorphology (2) different cross section position in described rectilinear direction;
B) by steps A) sectional profile curve lin of micromorphology (2) in the sampling contour curve that obtains extracts, and above-mentioned sectional profile curve lin is all considered as to the contour curve of a micromorphology (2) under different cross section;
C) by array micromorphology (2) in the row direction with column direction on spacing, determining step B) in the spacing of each sectional profile curve lin place plane;
D) by the method for Mathematical Fitting, obtained the three-dimensional space of a micromorphology (2) by sectional profile curve lin reverse, and show with the form of three-dimension curved surface, integration is tried to achieve the volume of reverse micromorphology.
2. the detection method of the micro-texture in a kind of surface according to claim 1, is characterized in that, described steps A) in two-dimensional surface pick-up unit be contact pin type surface profiler, resolution is 0.01 ~ 0.001 μ m.
3. the detection method of the micro-texture in a kind of surface according to claim 1, it is characterized in that, described steps A) in micromorphology (2) for open top be that circular cavity or bottom is circular projection, the diameter (4) of described circular-shaped, concave cavity or projection is greater than 0.1 μ m, and the cavity degree of depth or height of projection are greater than 0.1 μ m.
4. the detection method of the micro-texture in a kind of surface according to claim 1 and 2, it is characterized in that, in the time that line direction and column direction angle are 90 °, the detection side of two-dimensional surface pick-up unit is to having angle (15) with column direction (13), and the spacing of each sectional profile curve lin place plane is the product of column pitch (5) and angle (15) sine value.
5. according to the detection method of claim 1 or the described micro-texture in a kind of surface, it is characterized in that, under line direction and column direction angle are not the situation of 90 °, the detection side of two-dimensional surface pick-up unit is to being 90 ° with line direction, and the spacing of each sectional profile curve lin place plane is the cosine value that column pitch (5) is multiplied by line direction and Lie Fang angle.
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Cited By (3)
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| CN105783842A (en) * | 2016-03-25 | 2016-07-20 | 哈尔滨理工大学 | Detection method for distribution characteristic of large-pitch outside-thread processing surface morphology |
| CN108253894A (en) * | 2018-02-06 | 2018-07-06 | 中原内配集团股份有限公司 | A kind of detection method of cylinder-barrel surface bulge-structure |
| CN109059838A (en) * | 2018-08-28 | 2018-12-21 | 沈阳建筑大学 | A kind of rough surface parameter characterization method with the micro- texture in surface |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105783842A (en) * | 2016-03-25 | 2016-07-20 | 哈尔滨理工大学 | Detection method for distribution characteristic of large-pitch outside-thread processing surface morphology |
| CN108253894A (en) * | 2018-02-06 | 2018-07-06 | 中原内配集团股份有限公司 | A kind of detection method of cylinder-barrel surface bulge-structure |
| CN108253894B (en) * | 2018-02-06 | 2020-08-18 | 中原内配集团股份有限公司 | Detection method for surface convex structure of cylinder sleeve |
| CN109059838A (en) * | 2018-08-28 | 2018-12-21 | 沈阳建筑大学 | A kind of rough surface parameter characterization method with the micro- texture in surface |
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