CN102252617A - Morphology registration analysis-based method for detecting precision of precise main shaft rotation - Google Patents
Morphology registration analysis-based method for detecting precision of precise main shaft rotation Download PDFInfo
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Abstract
The invention provides a morphology registration analysis-based method for detecting precision of precise main shaft rotation. A surface sample is installed on a to-be-detected precise main shaft; a control system controls the to-be-detected precise main shaft to be at a position at an angle theta; surface morphology graphs of the surface sample are collected in order, wherein the surface morphology graphs are obtained when the to-be-detected precise main shaft at complete circumference positions. A morphology data registration analysis processing system analyzes the plurality of surface morphology graphs and error evaluation is simultaneously carried out. According to the invention, a morphology of a surface sample that makes rotation with a precise main shaft is measured and subsequent morphology registration is analyzed and processed; there is no high precision requirement on the surface sample; and an expensive standard external circle profile or a complex testing system and a testing process are not needed. If a two-dimensional morphology/image sensor is selected for utilization, a radial rotation error of the main shaft can be measured; If a three-dimensional morphology measurement sensor is selected for usage, radial and axial rotation errors of the main shaft can be measured simultaneously. The utilization of a measurement sensor with high resolution enables main shaft rotation error detection with nanometer-level precision to be realized.
Description
Technical field
The present invention relates to a kind of detection method of accurate main shaft turn error.
Background technology
The precision rotating main shaft is the critical component of precision finishing machine and testing apparatus.Development along with ultraprecise processing and nanometer technology, people require more and more higher to the precision level of mechanical component and surveying instrument, especially high-precision rotary body component, as ultra-precision machine tool main shaft, test table, lasergyro rotor, circle standard, laser fusion target device etc., it makes franchise generally between several nanometers～tens nanometers, and this has reached or has been higher than the precision level of existing accurate roundness measuring equipment (radially turn error about 10～50nm).The rotating accuracy that improves main shaft becomes a problem that has challenge to satisfy the accuracy that part processing under the ultimate limit state required and guaranteed measurement result.In addition, because the manufacturing of accurate main shaft building block itself also is under the ultimate precision state, only depend on the machining precision that improves spindle unit to guarantee it is that difficulty is proved effective merely.Error separating and compensation technique are the effective ways of the raising accurate main shaft rotating accuracy of generally acknowledging at present.Accurate main shaft, particularly the turn error of static pressure air-bearing main shaft (conditions such as rotating speed, temperature) under certain condition of work is comparatively constant systematic error, this guarantees to realize that with regard to making the turn error nano-precision of accurate main shaft detect problem, becoming turn error separates and the key that compensates, improves spindle rotation accuracy.
According to the national standard files specify, spindle rotation error is meant the displacement of the instantaneous axis of rotation of main shaft with respect to average axis (being in the mean place place of instantaneous axis of rotation).Spindle rotation error can roughly be divided into two kinds of citation forms: axial end is beated and turn error (comprising diameter run-out and angle swinging) radially.Research to the precision measurement method of accurate main shaft turn error can be traced back to earlier 1900s, quantitative measuring method of the machine tool chief axis of setting up the earliest as Scheslinger etc.Nineteen fifties, Tlustry and Bryan have set up complete main shaft quantitative measuring method and expressed error result in polar coordinate systems, become the founder of generally acknowledged modern main shaft measuring technology.Twentieth century six the seventies, in order to develop Ultraprecision Machining, U.S.'s Lao Lunsi-livermore national laboratory is studied spindle rotation error, has solved description, test and the spindle error motion of spindle motion error characteristic and the problem that concerns three aspects of workpiece form accuracy; Donaldson has proposed the error separating theory and has made that spindle rotation error is obtained by sensor accuracy, data only and structural design etc. influences; International production technology research association (CIRP) has formally delivered " about the unification of revolving shaft performance requirement and error determine " file through in a few years work in 1976.These files all become the basis (again this standard being made some modifications in 2004) of B89.3.4M international standard foundation in 1985.Enter after the nineties, carried out a series of high precision roundness measurement contrast in the world again, there are the Italian First Astronautic Research Institute for Measurement and Test (IMGC), Germany (PTB), Britain Tayor Hobson or the like in the unit that participates in, by these contrasts further perfect the basic theories of spindle rotation error.Again Error-motion in Rotation is decomposed into synchronous error motion and asynchronous error motion etc. in the ISO/FDIS230-7 international standard.At home; units such as national universities Measurement Techniques of Mechanic Engineering research association, Chinese Mechanical Engineering Society, machining association begin to hold the academic discussion of national high-precision rotary main shaft test aspect from early eighties, and obtained achievement has greatly promoted the development of China's spindle rotation error basic theories.
Aspect the measurement and analytical approach of spindle rotation error, the introducing of each new technology all makes the turn error test job produce very big leap.For example, digital processing technology and rotary encoder that Vanherck and Peters adopt have not only promoted the development of turn error measuring technology, and have been used widely at precision machine tool main shaft manufacture view; Arora and Murthy adopt rotary transformer and digital notch filter to handle the revolution eccentricity issues respectively; What Chapman adopted that capacitance displacement sensor realized 5nm resolution radially, axially reaches the banking motion error measure; Britain professor Whitehouse has carried out system summary in theory to error separating technology, makes theoretical methodizations such as " multistep processes ", " reverse method ", and Chetwynd has carried out the error separating experiment according to said method, obtains nano level separation reproducibility error; The reversal process measuring technique that Estler and Donaldson adopt has effectively been removed the turn error of main shaft, and the correlation theory of further having inquired into Multiple probe technique and multi-index method is separated with turn error, compensation work.
At home, also carried out multiple turn error Measurement Study in recent years.Adopt the lathe spindle turn error test macro based on double testing head of two-point method foundation as the yellow Long March of University of Science and Technology for National Defence, two sensors install and fix in the circumferencial direction 180 ° of symmetries of being separated by, lathe spindle when revolution sensor is motionless and pick up signal, try to achieve the Error-motion in Rotation of main shaft by eliminating eccentric measure and error separating technology then, and can try to achieve the deviation from circular from of test axle; Tan of Harbin Institute of Technology refined gyration error that waits the circle contour sum of errors main shaft that adopts multiple multistep processes identification and separation criterion device of a specified duration, mainly solve harmonic wave and suppressed problem, to eliminate the errors of principles, solve the simplification problem of error separating process simultaneously, to reduce or to eliminate the influence of machinery, electric drift and external interference; Lee of Shanghai Communications University adopts three transducer probe assemblies that do not wait at interval to obtain measurement data, and presses secondary phase shift principle recombination data, thereby isolate turn error from the gyration error of the online detection main shafts of employing secondary phase shift three point method such as army; Chinese University of Science and Technology's Wang Weidong etc. utilizes digital image processing techniques, set up the CCD measuring system of a cover spindle rotation accuracy, adopt optical CCD to detect the light source position that is installed on the main shaft, and then the kinematic error amount when obtaining main shaft gyration, data are handled and error evaluation is inquired into.
Summarize in fact, the measuring method of present spindle rotation error mainly contains static measurement method, dynamic many gauge heads method, repeatedly localization method and measuring method etc.Wherein, the static measurement method is a kind of comparatively original measuring method, and it adopts sensor measurement standard circle contour under main shaft manually turns round at a slow speed, thereby measuring accuracy can't further improve.Dynamic many gauge heads method adopts two or more accurate gauge heads that same circle contour is measured simultaneously, and the efficiency of measurement height is fit to on-line measurement; Yet because the restriction of the consistance of the biasing of many gauge heads and sensor characteristic is used not as repeatedly localization method is extensive in high-precision application scenario.Dynamically repeatedly the implementation method of location has multiple, as two-step approach, reversal process, multistep processes or the like, the method is easy to realize, can reach higher characteristics such as turn error separation accuracy, its shortcoming is the method error that (also there is similar problem in many gauge heads method) existence is brought by harmonic wave inhibition problem, needs the analyzing and processing and the reconstruction of further measurement data; Measuring method can be realized not by standard (ball) and non-contacting metering system, use CCD to detect the light source position that is installed on the main shaft, and then the beating information when obtaining main shaft gyration, yet because influences such as optical diffraction, the method can't realize nano level cross measure resolution, and the turn error that therefore also just can't satisfy nano-precision detects problem.As can be seen, the rotating accuracy level of accurate main shaft is desired to reach nanometer scale and is detected and also to have some important theory and key technical problem.
Summary of the invention
The objective of the invention is in order to solve the expensive standard excircle configuration of traditional accurate main shaft turn error measuring method needs or the problem of complicated test macro and test process, and then a kind of accurate main shaft rotating accuracy detection method of analyzing based on the pattern registration is provided.
The objective of the invention is to be achieved through the following technical solutions:
At first, surface sample is installed on the accurate main shaft to be measured, adjusts the position of surface sample, make it near the centre of gyration of accurate main shaft to be measured; Two, regulate the position of surface microscopic topographic survey sensor, make the centre of gyration position when measurement range of surface microscopic topographic survey sensor covers surface sample with accurate main shaft rotation to be measured with respect to surface sample; Three, control system is controlled accurate main shaft to be measured to a certain angle position, measures a width of cloth surface topography map by the surface microscopic topographic survey sensor; Control system is controlled accurate main shaft to a to be measured angle θ position, measures a width of cloth surface topography map once more; According to said process, gather the surface topography map of accurate main shaft to be measured successively at full circumferences position upper surface sample; Four, topographic data registration analysis process system is analyzed the some surface topography maps that obtained, and can obtain the turn error data of accurate main shaft to be measured, and carries out error assessment.
Beneficial effect of the present invention: the present invention is by using survey sensor, to measuring and follow-up pattern registration analyzing and processing with the rotating surface sample pattern of accurate main shaft, realize the composite measurement of accurate main shaft turn error data, measuring method is simple, surface sample does not have very high accuracy requirement, do not need expensive standard excircle configuration or complicated test macro and test process,, can measure the radially turn error of main shaft so if select two-dimentional pattern/imageing sensor for use; If select the measuring three-dimensional morphology sensor for use, can measure the radial and axial turn error of main shaft simultaneously; Adopt the survey sensor of high resolving power (comprising vertical and horizontal), can realize that then the spindle rotation error of nano-precision detects.
Description of drawings
Fig. 1 is the measuring principle synoptic diagram of the inventive method, and Fig. 2 is that the pattern registration of the inventive method is analyzed synoptic diagram.
Embodiment
Preferred implementation of the present invention is seen Fig. 1 and Fig. 2, at first, surface sample 2 is installed on the accurate main shaft 3 to be measured, adjusts the position of surface sample 2, makes it near the centre of gyration of accurate main shaft 3 to be measured; Two, regulate the position of surface microscopic topographic survey sensor 1, make the centre of gyration position when measurement range of surface microscopic topographic survey sensor 1 covers surface sample 2 with accurate main shaft 3 rotations to be measured with respect to surface sample 2; Three, control system 4 controls accurate main shaft 3 to be measured is measured a width of cloth surface topography map to a certain angle position (such as to 0 ° of position or origin position) by surface microscopic topographic survey sensor 1; 3 to angle θ positions of control system 4 control accurate main shafts to be measured (can by angle uniformly-spaced in circumference some positions that evenly distribute) are measured a width of cloth surface topography map once more; According to said process, gather the surface topography map of accurate main shaft 3 to be measured successively at full circumferences position upper surface sample 2, these shape appearance figures are actually the same area on the surface sample 2 so, only along with the rotation of accurate main shaft 3 to be measured, these shape appearance figures are different on the locus, but all comprised accurate main shaft 3 turn error information to be measured.Four, topographic data registration analysis process system 5 is analyzed the some surface topography maps that obtained, and can obtain the turn error data of accurate main shaft 3 to be measured, and carries out error assessment.
The measuring accuracy of turn error and measuring error item depend primarily on the measuring accuracy and the ability of surface microscopic topographic survey sensor 1 in the inventive method.If surface microscopic topographic survey sensor 1 is two-dimentional pattern/imageing sensor (as optical microscope and a CCD system), the present invention can be used to measure the radially turn error of accurate main shaft 3 to be measured so; If surface microscopic topographic survey sensor 1 is three-dimensional appearance sensor (as white light interference microscope and an or atomic force microscope system), the present invention then can be used to measure simultaneously the radial and axial turn error of accurate main shaft 3 to be measured so.The turn error measuring accuracy of accurate main shaft 3 to be measured and resolution mainly are subjected to the influence of the precision and the resolution of surface microscopic topographic survey sensor 1.
Turn error computing method based on the analysis of topographic data registration also are to guarantee one of key that obtains high precision accurate main shaft turn error data.The embodiment of the topographic data registration analysis process system 5 of the inventive method is based on that the homogeneous coordinate transformation matrix theory of three-dimensional (or two dimension, the data that obtain at dimension sensor) rigid motion calculates.If accurate main shaft on a certain position, has obtained a width of cloth shape appearance figure of surface sample 2, a unique point (x is arranged on it
1, y
1, z
1), behind a certain known angle θ of main axis rotation, this unique point changes to the (x on another width of cloth shape appearance figure
2, y
2, z
2), establish the centre of gyration at (x
c, y
c, z
c), then, have by how much variation relations of rigid body around the rotation of Z axle
In the following formula, two characteristic of correspondence point coordinate, the anglec of rotation are all known, so the rotation center coordinate can calculate.Since surface sample 2 in turning course only the locus variation has taken place, point on the surface topography should be around some instantaneous centre points in revolution, therefore a plurality of unique points on the surface topography are carried out the registration analytical calculation, just can be turned round the instantaneous centre position accurately.By the instantaneous variation of the revolution of calculating all shape appearance figures, just can obtain the turn error data of tested accurate main shaft 3 on each angle position.
The homogeneous coordinate transformation matrix theory of rigid motion that topographic data registration analysis process system 5 of the present invention has adopted is three-dimensional (or two dimension, the data that obtain at dimension sensor) is calculated the turn error data of accurate main shaft 3 to be measured.Since surface sample 2 in turning course only the locus variation has taken place, point on the surface topography should be around a common ground in revolution, therefore a plurality of unique points on the surface topography are carried out the registration analytical calculation, just can be turned round the instantaneous centre position accurately.Calculate the instantaneous variation of the revolution of accurate main shaft on each angle position, promptly can obtain the turn error data of tested main shaft.
Claims (4)
1. an accurate main shaft rotating accuracy detection method of analyzing based on the pattern registration is characterized in that, at first, surface sample is installed on the accurate main shaft to be measured, adjusts the position of surface sample, makes it near the centre of gyration of accurate main shaft to be measured; Two, regulate the position of surface microscopic topographic survey sensor, make the centre of gyration position when measurement range of surface microscopic topographic survey sensor covers surface sample with accurate main shaft rotation to be measured with respect to surface sample; Three, control system is controlled accurate main shaft to be measured to a certain angle position, measures a width of cloth surface topography map by the surface microscopic topographic survey sensor; Control system is controlled accurate main shaft to a to be measured angle θ position, measures a width of cloth surface topography map once more; According to said process, gather the surface topography map of accurate main shaft to be measured successively at full circumferences position upper surface sample; Four, topographic data registration analysis process system is analyzed the some surface topography maps that obtained, and can obtain the turn error data of accurate main shaft to be measured, and carries out error assessment.
2. method according to claim 1 is characterized in that, the surface microscopic topographic survey sensor is two-dimentional pattern/imageing sensor.
3. method according to claim 2 is characterized in that, the surface microscopic topographic survey sensor is the three-dimensional appearance sensor.
4. according to claim 1,2 or 3 described methods, it is characterized in that topographic data registration analysis process system adopts the homogeneous coordinate transformation matrix theory of three-dimensional rigid body motion to calculate the turn error data of accurate main shaft to be measured.
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| CN103294894A (en) * | 2013-05-06 | 2013-09-11 | 深圳先进技术研究院 | Optimal computation method of rotating shaft in three-dimensional scanning system |
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| CN110017797B (en) * | 2019-04-24 | 2020-08-21 | 中国兵器科学研究院宁波分院 | Dimension measurement result uncertainty evaluation method based on image isosurface segmentation method |
| CN112405112A (en) * | 2020-12-03 | 2021-02-26 | 中国工程物理研究院机械制造工艺研究所 | Five-axis machine tool linkage error detection device and measurement method |
| CN115541225A (en) * | 2022-10-29 | 2022-12-30 | 通用技术集团机床工程研究院有限公司 | Online precision analysis method and system for main shaft of ultra-precision machine tool |
| CN115541225B (en) * | 2022-10-29 | 2023-09-05 | 通用技术集团机床工程研究院有限公司 | Method and system for analyzing online precision of spindle of ultra-precise machine tool |
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