CN104163640A - 低压铸造用高纯氮化硅陶瓷升液管的微波烧结制备方法 - Google Patents
低压铸造用高纯氮化硅陶瓷升液管的微波烧结制备方法 Download PDFInfo
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- CN104163640A CN104163640A CN201410349995.2A CN201410349995A CN104163640A CN 104163640 A CN104163640 A CN 104163640A CN 201410349995 A CN201410349995 A CN 201410349995A CN 104163640 A CN104163640 A CN 104163640A
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- silicon nitride
- microwave
- high purity
- sintering
- lift tube
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- 229910052581 Si3N4 Inorganic materials 0.000 title claims abstract description 127
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 title claims abstract description 127
- 239000000919 ceramic Substances 0.000 title claims abstract description 98
- 238000009768 microwave sintering Methods 0.000 title claims abstract description 73
- 238000005266 casting Methods 0.000 title claims abstract description 70
- 238000002360 preparation method Methods 0.000 title claims abstract description 44
- 238000005245 sintering Methods 0.000 claims abstract description 57
- 239000000463 material Substances 0.000 claims abstract description 46
- 229910002804 graphite Inorganic materials 0.000 claims abstract description 44
- 239000010439 graphite Substances 0.000 claims abstract description 44
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims abstract description 42
- 239000000843 powder Substances 0.000 claims abstract description 28
- 229910052863 mullite Inorganic materials 0.000 claims abstract description 24
- 239000000654 additive Substances 0.000 claims abstract description 19
- 238000000034 method Methods 0.000 claims abstract description 18
- 230000000996 additive effect Effects 0.000 claims abstract description 16
- 239000000758 substrate Substances 0.000 claims description 38
- WMFOQBRAJBCJND-UHFFFAOYSA-M Lithium hydroxide Chemical compound [Li+].[OH-] WMFOQBRAJBCJND-UHFFFAOYSA-M 0.000 claims description 18
- 229910052594 sapphire Inorganic materials 0.000 claims description 17
- 239000010980 sapphire Substances 0.000 claims description 17
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 claims description 12
- 229910010271 silicon carbide Inorganic materials 0.000 claims description 12
- 230000008569 process Effects 0.000 claims description 10
- 238000001816 cooling Methods 0.000 claims description 8
- 229910003460 diamond Inorganic materials 0.000 claims description 8
- 239000010432 diamond Substances 0.000 claims description 8
- 238000000227 grinding Methods 0.000 claims description 8
- 238000001694 spray drying Methods 0.000 claims description 8
- 229910052810 boron oxide Inorganic materials 0.000 claims description 6
- JKWMSGQKBLHBQQ-UHFFFAOYSA-N diboron trioxide Chemical compound O=BOB=O JKWMSGQKBLHBQQ-UHFFFAOYSA-N 0.000 claims description 6
- 239000007789 gas Substances 0.000 claims description 6
- WHXSMMKQMYFTQS-UHFFFAOYSA-N Lithium Chemical compound [Li] WHXSMMKQMYFTQS-UHFFFAOYSA-N 0.000 claims description 5
- JNDMLEXHDPKVFC-UHFFFAOYSA-N aluminum;oxygen(2-);yttrium(3+) Chemical compound [O-2].[O-2].[O-2].[Al+3].[Y+3] JNDMLEXHDPKVFC-UHFFFAOYSA-N 0.000 claims description 5
- 229910052744 lithium Inorganic materials 0.000 claims description 5
- XGZVUEUWXADBQD-UHFFFAOYSA-L lithium carbonate Chemical compound [Li+].[Li+].[O-]C([O-])=O XGZVUEUWXADBQD-UHFFFAOYSA-L 0.000 claims description 5
- 230000005855 radiation Effects 0.000 claims description 5
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 4
- KGBXLFKZBHKPEV-UHFFFAOYSA-N boric acid Chemical compound OB(O)O KGBXLFKZBHKPEV-UHFFFAOYSA-N 0.000 claims description 4
- 239000004327 boric acid Substances 0.000 claims description 4
- 239000003795 chemical substances by application Substances 0.000 claims description 4
- 238000000748 compression moulding Methods 0.000 claims description 4
- FUJCRWPEOMXPAD-UHFFFAOYSA-N lithium oxide Chemical compound [Li+].[Li+].[O-2] FUJCRWPEOMXPAD-UHFFFAOYSA-N 0.000 claims description 4
- 229910001947 lithium oxide Inorganic materials 0.000 claims description 4
- 239000012298 atmosphere Substances 0.000 claims description 3
- 238000005469 granulation Methods 0.000 claims description 3
- 230000003179 granulation Effects 0.000 claims description 3
- 235000019628 coolness Nutrition 0.000 claims description 2
- 238000003754 machining Methods 0.000 claims description 2
- 229910052757 nitrogen Inorganic materials 0.000 claims description 2
- 238000005265 energy consumption Methods 0.000 abstract description 4
- 238000000498 ball milling Methods 0.000 abstract 2
- 239000002131 composite material Substances 0.000 abstract 2
- 239000002002 slurry Substances 0.000 abstract 2
- 229910052593 corundum Inorganic materials 0.000 abstract 1
- 239000010431 corundum Substances 0.000 abstract 1
- KZHJGOXRZJKJNY-UHFFFAOYSA-N dioxosilane;oxo(oxoalumanyloxy)alumane Chemical compound O=[Si]=O.O=[Si]=O.O=[Al]O[Al]=O.O=[Al]O[Al]=O.O=[Al]O[Al]=O KZHJGOXRZJKJNY-UHFFFAOYSA-N 0.000 abstract 1
- 238000001035 drying Methods 0.000 abstract 1
- 239000008187 granular material Substances 0.000 abstract 1
- 238000003825 pressing Methods 0.000 abstract 1
- 238000010438 heat treatment Methods 0.000 description 21
- 238000004519 manufacturing process Methods 0.000 description 8
- 238000002791 soaking Methods 0.000 description 8
- 230000000694 effects Effects 0.000 description 7
- 239000012299 nitrogen atmosphere Substances 0.000 description 7
- 238000000465 moulding Methods 0.000 description 6
- 230000003245 working effect Effects 0.000 description 6
- 238000010521 absorption reaction Methods 0.000 description 5
- 238000005452 bending Methods 0.000 description 5
- 229910052751 metal Inorganic materials 0.000 description 5
- 239000002184 metal Substances 0.000 description 5
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 4
- 229910010293 ceramic material Inorganic materials 0.000 description 4
- 238000005336 cracking Methods 0.000 description 4
- 230000008859 change Effects 0.000 description 3
- 230000007797 corrosion Effects 0.000 description 3
- 238000005260 corrosion Methods 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 3
- 238000002347 injection Methods 0.000 description 3
- 239000007924 injection Substances 0.000 description 3
- 238000009413 insulation Methods 0.000 description 3
- 229910001338 liquidmetal Inorganic materials 0.000 description 3
- 230000035939 shock Effects 0.000 description 3
- 229910000838 Al alloy Inorganic materials 0.000 description 2
- 229910001018 Cast iron Inorganic materials 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 2
- 230000008878 coupling Effects 0.000 description 2
- 238000010168 coupling process Methods 0.000 description 2
- 238000005859 coupling reaction Methods 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 229910052742 iron Inorganic materials 0.000 description 2
- 239000007791 liquid phase Substances 0.000 description 2
- 230000003647 oxidation Effects 0.000 description 2
- 238000007254 oxidation reaction Methods 0.000 description 2
- 229910000505 Al2TiO5 Inorganic materials 0.000 description 1
- 229910000861 Mg alloy Inorganic materials 0.000 description 1
- 230000001133 acceleration Effects 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- SNAAJJQQZSMGQD-UHFFFAOYSA-N aluminum magnesium Chemical compound [Mg].[Al] SNAAJJQQZSMGQD-UHFFFAOYSA-N 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 238000009770 conventional sintering Methods 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 239000003989 dielectric material Substances 0.000 description 1
- 239000006185 dispersion Substances 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 230000003628 erosive effect Effects 0.000 description 1
- 206010016256 fatigue Diseases 0.000 description 1
- 230000005484 gravity Effects 0.000 description 1
- 230000003993 interaction Effects 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
- 238000005457 optimization Methods 0.000 description 1
- 230000035699 permeability Effects 0.000 description 1
- 238000004321 preservation Methods 0.000 description 1
- AABBHSMFGKYLKE-SNAWJCMRSA-N propan-2-yl (e)-but-2-enoate Chemical compound C\C=C\C(=O)OC(C)C AABBHSMFGKYLKE-SNAWJCMRSA-N 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 238000002310 reflectometry Methods 0.000 description 1
- 230000011514 reflex Effects 0.000 description 1
- 230000001360 synchronised effect Effects 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
- 238000005303 weighing Methods 0.000 description 1
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Cited By (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN105315009A (zh) * | 2015-11-30 | 2016-02-10 | 衡阳凯新特种材料科技有限公司 | 用于氮化硅升液管的涂层及其制备方法 |
CN106810263A (zh) * | 2015-11-27 | 2017-06-09 | 衡阳凯新特种材料科技有限公司 | 一种氮化硅升液管的制备方法 |
CN106810264A (zh) * | 2015-11-27 | 2017-06-09 | 衡阳凯新特种材料科技有限公司 | 一种氮化硅陶瓷的制备方法 |
CN112759401A (zh) * | 2020-12-02 | 2021-05-07 | 兆山科技(北京)有限公司 | 一种利用微波烧结制备高熵硼陶瓷表面材料的方法 |
CN113387688A (zh) * | 2020-03-13 | 2021-09-14 | 上海交通大学 | 用于制备陶瓷升液管的材料、陶瓷升液管及其制备方法 |
CN116120073A (zh) * | 2022-12-29 | 2023-05-16 | 滁州用朴新材料科技有限公司 | 一种氮化硅陶瓷刀具及其制备方法 |
CN118239787A (zh) * | 2024-03-22 | 2024-06-25 | 江苏富乐华功率半导体研究院有限公司 | 一种研磨的氮化硅瓷片 |
CN118239787B (zh) * | 2024-03-22 | 2024-10-25 | 江苏富乐华功率半导体研究院有限公司 | 一种研磨的氮化硅瓷片 |
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CN101152980A (zh) * | 2006-09-30 | 2008-04-02 | 郜长福 | 氮化硅陶瓷发热体的微波炉烧结制备方法及专用设备 |
CN102070341A (zh) * | 2009-11-19 | 2011-05-25 | 长沙平拓新材料科技有限公司 | 一种自增韧氮化硅陶瓷微波固相合成制备方法 |
CN103224398A (zh) * | 2013-04-26 | 2013-07-31 | 湖南凯新陶瓷科技有限公司 | 一种微波烧结氮化物陶瓷材料的方法 |
CN103588489A (zh) * | 2013-09-30 | 2014-02-19 | 淄博硅元泰晟陶瓷新材料有限公司 | 低压铸造用氮化硅复合陶瓷升液管及其制备方法 |
CN103880435A (zh) * | 2014-04-04 | 2014-06-25 | 新化县天和材料科技有限公司 | 一种高质量氮化铝陶瓷基片的微波快速烧结方法 |
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CN101152980A (zh) * | 2006-09-30 | 2008-04-02 | 郜长福 | 氮化硅陶瓷发热体的微波炉烧结制备方法及专用设备 |
CN102070341A (zh) * | 2009-11-19 | 2011-05-25 | 长沙平拓新材料科技有限公司 | 一种自增韧氮化硅陶瓷微波固相合成制备方法 |
CN103224398A (zh) * | 2013-04-26 | 2013-07-31 | 湖南凯新陶瓷科技有限公司 | 一种微波烧结氮化物陶瓷材料的方法 |
CN103588489A (zh) * | 2013-09-30 | 2014-02-19 | 淄博硅元泰晟陶瓷新材料有限公司 | 低压铸造用氮化硅复合陶瓷升液管及其制备方法 |
CN103880435A (zh) * | 2014-04-04 | 2014-06-25 | 新化县天和材料科技有限公司 | 一种高质量氮化铝陶瓷基片的微波快速烧结方法 |
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Cited By (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN106810263A (zh) * | 2015-11-27 | 2017-06-09 | 衡阳凯新特种材料科技有限公司 | 一种氮化硅升液管的制备方法 |
CN106810264A (zh) * | 2015-11-27 | 2017-06-09 | 衡阳凯新特种材料科技有限公司 | 一种氮化硅陶瓷的制备方法 |
CN105315009A (zh) * | 2015-11-30 | 2016-02-10 | 衡阳凯新特种材料科技有限公司 | 用于氮化硅升液管的涂层及其制备方法 |
CN105315009B (zh) * | 2015-11-30 | 2017-07-18 | 衡阳凯新特种材料科技有限公司 | 用于氮化硅升液管的涂层及其制备方法 |
CN113387688A (zh) * | 2020-03-13 | 2021-09-14 | 上海交通大学 | 用于制备陶瓷升液管的材料、陶瓷升液管及其制备方法 |
CN112759401A (zh) * | 2020-12-02 | 2021-05-07 | 兆山科技(北京)有限公司 | 一种利用微波烧结制备高熵硼陶瓷表面材料的方法 |
CN116120073A (zh) * | 2022-12-29 | 2023-05-16 | 滁州用朴新材料科技有限公司 | 一种氮化硅陶瓷刀具及其制备方法 |
CN116120073B (zh) * | 2022-12-29 | 2023-11-24 | 滁州用朴新材料科技有限公司 | 一种氮化硅陶瓷刀具及其制备方法 |
CN118239787A (zh) * | 2024-03-22 | 2024-06-25 | 江苏富乐华功率半导体研究院有限公司 | 一种研磨的氮化硅瓷片 |
CN118239787B (zh) * | 2024-03-22 | 2024-10-25 | 江苏富乐华功率半导体研究院有限公司 | 一种研磨的氮化硅瓷片 |
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