CN1041558C - Sealed type optical grid line displacement sensor - Google Patents
Sealed type optical grid line displacement sensor Download PDFInfo
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- CN1041558C CN1041558C CN93104273A CN93104273A CN1041558C CN 1041558 C CN1041558 C CN 1041558C CN 93104273 A CN93104273 A CN 93104273A CN 93104273 A CN93104273 A CN 93104273A CN 1041558 C CN1041558 C CN 1041558C
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Abstract
The present invention relates to a sealed type linear displacement sensor which is composed of a grating reading head, a transmission type scale grating, a head assembly, a pressure spring, a scale shell main body, a sealing strip, a cable, etc. The grating reading head reads a number in a single-chip equivalent double-head mode, the rolling and slipping motion of the reading head is ensured by a combined type friction assembly, and a constant force ball head is arranged between the reading head and the scale grating and is combined with the pressure spring pair to position in a floating contact mode. A measuring system is composed of the sensor and a number displaying meter, and is used for the number display and the numerical control of machine tool manufacture and technical innovation, and the measurement of geometrical length.
Description
The present invention relates to a kind of optical grid line displacement sensor of linear measure longimetry.Especially a kind of numeral that is used for lathe manufacturing and measurement of geometric length that is fit to non-parallel illumination shows and numerically controlled sealed type optical grid line displacement sensor.It is to belong to lineal measure instrumentation technical field.
Existing sealed type optical grid line displacement sensor, its measuring principle is: the light that is sent by luminotron passes through the scale grating, when the indication grating translation, produce and the corresponding Moire fringe light signal of displacement of the lines amount, convert light signal to its corresponding electric signal by photoelectric receiving device, again electric signal is inputed to grating digital readout, through after the processing of circuit, the displacement of the lines amount is shown with numeral exactly, the measuring principle of Here it is common Moire fringe, can be to this referring to " sensor sensing components and parts complete works " book, chapter 7, the long grating digital display instrument in, and related optical grid line displacement sensor in " SX-5, the long Grating Digital display system of SX-6 series operation instructions ".But there is following shortcoming in existing optical grid line displacement sensor:
1. the read head in the sensor all adopts the grating reading head of single head reading, and its shortcoming is, sensor part adopts non-parallel rayed usually, the measuring error equation of the Moire fringe of releasing according to Gwild striped equation, i.e. the additional displacement error of Moire fringe:
In the formula, Φ is the angle of divergence of light source; Xs be in the Moire fringe visual field reference point to the distance at center, visual field; θ is the angle of the crossing that two gratings are paid grid line; ω is a pitch; △ t is the variable quantity of the gap value between grating is paid.
From following formula as seen, when designing this sensor, the strain line that grating is paid need adopt thicker, promptly, pitch ω is increased, and the visual field of the Moire fringe number of winning the confidence need adopt less, promptly, reference point in the Moire fringe visual field is reduced to the distance X s at center, visual field, could reduce measuring error effectively thus.But, according to the adjustment expression formula of Moire fringe:
In the formula, δ
XStandard deviation for the Moire fringe position; δ is the standard deviation of single grid line position; N is for participating in forming the grid line number of Moire fringe.
This shows that when pitch ω increases, and reference point is when visual field centre distance reduces in the visual field, the grid line that participates in the formation Moire fringe is counted n and will be reduced in large quantities, and δ is the fixed amount that remains unchanged.So grid line is counted n and reduced, just make δ
XIncrease, that is, the adjustment effect of Moire fringe reduces, and that is to say, Moire fringe is in order to eliminate the short period of measuring basis, and the function of middle cycle and local error is weakened significantly.
The reducing of adjustment effect will influence the acquisition high quality Moire fringe signal, promptly the drift equal error to the sine of signal, contrast, orthogonality, constant amplitude, DC level can not be well controlled, this will influence the raising of sensor measurement precision, the electronic fine-grained use and the raising of Measurement Resolution.
And the adjustment effect of existing grating reading head is subjected to weakening significantly, does not have the function of second compensation again, so limited the raising of sensor accuracy and Measurement Resolution.
2. the material of the grid line lines that the grating in the existing sensor is paid all adopts single rete.Its shortcoming is, the reflectivity height, and this makes the poor performance that is in the light of rete.This will cause the fundamental radiation of Moire fringe undesirable, and the higher harmonic content of signal increases, and have influence on the contrast of moire frange signal and the raising of signal sine.
3. what adopt in the existing sensor is the optical gate type striped, and these two grid lines that just need grating to pay are parallel to each other., the move mode of existing grating reading head all adopts the rolling friction assembly of single formula, or adopts the sliding friction assembly of single formula.The former is difficult to debug.And all be difficult to guarantee accuracy requirement by its rectilinearity of independent rails and the physical dimension that long tinsel is made, cause the collimation variation of two grid lines.The latter is the chi back of the body direction guiding by the scale grating, and the easy abrasion of rubbing surface also will cause the collimation variation of two grid lines, thereby increase the measuring error of sensor.
4. existing read head and scale grating adopt to float contact locatees transmission, and it is to pay by a stage clip that has a bulb to realize.Because stage clip and scale grating line are placed orthogonally,, make a side that is blocked that light path can't be set so 1/2 of indication grating frame on the read head and element frame will be blocked.The structural limitations of this layout do not extending original read head size and adopt the method for bull reading to increase the possibility of grating adjustment effect paying with a pair of grating.
5. the bulb stage clip in the existing sensors is paid, promptly, the collocation gap value of ball-and-socket on bulb stage clip and the indication grating frame between the two is bigger, this will cause at grating and pay the bigger idle running of generation in the measurement that relatively moves, thereby the repeatable accuracy that the accuracy of measurement of having influence on, especially influence are measured.
The objective of the invention is to propose a kind of non-parallel illumination that is applicable at existing defective in the existing sensor, the short-term error of----scale grating to measuring basis, middle circular error, local error has the second compensation function, have High-Quality Signal from Moire Fringes, be suitable for the sealed type optical grid line displacement sensor of electronic fine-grained pin-point accuracy.
Purpose of the present invention will realize by following technical scheme proposed by the invention.For ease of understanding, will in conjunction with the accompanying drawings technical scheme of the present invention be done detailed explanation to technical scheme of the present invention.
The overall cut-open view of accompanying drawing 1 expression sealed type optical grid line displacement sensor of the present invention.
The cut-open view of A-A section in accompanying drawing 2 presentation graphs 1.
The synoptic diagram of the optoelectronic information converting system of forming by equivalent double end grating reading head and scale grating in the accompanying drawing 3 expressions sensor of the present invention.
The synoptic diagram that the delineation pattern of accompanying drawing 4 expressions indication grating of the present invention and delineation district distribute.
The synoptic diagram that the delineation pattern of accompanying drawing 5 expressions another kind of indication grating of the present invention and delineation district distribute.
Referring to attached Fig. 1 and 2, the main ingredient of sealed type optical grid line displacement sensor of the present invention comprises: head assembly 2, the grating reading head 11 of monolithic equivalence double end reading; Scale grating 12; Constant force bulb combination stage clip pays 4,8,9,10; Chi shell main body 13, sealing rubber strip 1 and cable 6.Wherein, the present invention is not increasing existing grating reading head physical dimension and is paying with a pair of grating, adopted and had an absolute zero position four grating reading heads that split phase identical, the grating reading head of monolithic equivalence double end reading promptly of the present invention with two groups of photoelectric conversion results.
Referring to accompanying drawing 3, the grating reading head 11 of monolithic equivalence double end reading of the present invention is by indication grating 11-5; Indication grating frame 11-2; Element frame 11-7; Combined type friction component 11-1,11-3,11-6,11-8; Adjusting pin 5; Gallium arsenide infrarede emitting diode 11-4 and silicon photoelectric receiving diode 11-9 form.Its principle of work is, the directional light or the non-parallel light that are sent by nine gallium arsenide infrarede emitting diode 11-4 incide on the scale grating 12, when indication grating 11-5 is mobile abreast with respect to scale grating 12, just produced bright, loop optical gate type moire frange signal and one road absolute zero position light pulse signal that two groups of secretly alternate phasing degree mutual deviations are 90 °, the signal that is produced by be placed on accept with coaxial nine silicon photoelectric diodes of each luminotron after, convert the sinusoidal electric signals and one road absolute zero position electric impulse signal of the amplitudes such as loop of 90 ° of two groups of phasing degree mutual deviations to, again (two tunnel equal corresponding respectively the synthesizing of phasing degree in two group of four tunnel sinusoidal electric signals, reformulate four tunnel phasing degree) sinusoidal signal of 90 ° of mutual deviations successively, with their zero signal when exhausted, by cable 6 (seeing accompanying drawing 1), output is amplified for grating digital readout, shaping, segmentation, sensing, discriminating direction and count decoding show the displacement of the lines amount that will measure at last with numeral.
Referring to attached Figure 4 and 5, the delineation pattern on the indication grating 11-5 that is adopted in the monolithic equivalence double end grating reading head of the present invention and the number and the distribution in delineation district are as follows:
Said indication grating 11-5 is made up of the grating ruling district 11-5b that the district 11-5a of slit zero-bit more than and eight pitch equate with the pitch of scale grating.Wherein, preceding four delineation districts are one group, and back four delineation districts are another group, and two groups various parameters are all identical.Four delineation district phase places in each group are mutual deviation 1/4d successively.Referring to accompanying drawing 4, the phase relation between above-mentioned two groups, promptly the respective distances between these two groups is Nd, and wherein d is a pitch, and n is 1,2,3 ... positive integer, N is 1,2,3 of n ... positive integer doubly.The pattern of many slits zero-bit district 11-5a and rose method are zero-bit district and the two groups of phase relations of delineating any one 0 ° delineation district among distinguishing that need guarantee indication grating, and the zero-bit district of scale grating 12 and the phase relation of delineating the district, make both phase relations want corresponding consistent, the Moire fringe light signal can be taken out exactly in the time of will guaranteeing to use simultaneously, the light signal of zero pulse can be taken out again exactly.
In the present invention, the position of adopting article one bright line and 0 ° of delineation in last group in the zero-bit district of indication grating 11-5 to distinguish article one bright line differs 1/8nd, in article one bright line in the zero-bit district of scale grating 12 and the grating ruling district from the alternate position spike 1/8d of its nearest bright line.In addition, the delineation pattern of indication grating of the present invention can also delineate the two matrix patterns as shown in accompanying drawing 5 except delineating two in-lines arrangements as shown in Figure 4, and each phase relation among the figure is constant.
The present invention reaches the Moire fringe speech number that makes monolithic equivalence double end grating reading head can obtain eliminate stray light, high density and high-contrast, and indication grating grid line lines have been adopted the lines that have same substrate and material with the scale grating.These lines are crome metal by bottom, and the upper strata is that the duplicature of chrome green is made.The technical parameter of lines is: about 3000 of thickness, and optical density (OD) is about 2.6, and reflectivity is about 5% when near infrared light incident.The delineation of described lines is the corrosive liquids that adopt two kinds of different formulations, duplicature is carried out stopping-out, earlier with quick corrosive liquid ammonium ceric nitrate corrosion chrome green, carry out with the method for corrosive liquid cerous sulfate corrosion chromium at a slow speed again, finally obtain have high density, the lines of antiradar reflectivity.
Scale grating 12 among Fig. 1 is that employing is substrate with glass, has the transmission-type metering scale grating of a plurality of zero-bits, and wherein zero-bit is every one of 50mm, and the scale grating constitutes grating with indication grating to be paid, and becomes the mete-wand of sensor.
The technical parameter of scale grating is among the present invention: the maximum delineation of total length cumulative errors is 1/2 of a sensor overall measurement error; Short period, middle cycle, local error are 1/2 of cumulative maximum error; Homogeneity error is (8～12) %; Strain line density is 25 pairs of lines per millimeter-100 pair lines per millimeters; Light-dark ratio is 1: 11, and the delineation pattern of grid line and zero-bit and indication grating 11-5's is corresponding, and the material of grid line lines is identical with indication grating.
The present invention makes grating reading head can realize monolithic equivalence double end reading for reaching, and can avoid producing the purpose of measuring error again, specialized designs a kind of rolling, the combined type friction component that slides and deposit.Referring to accompanying drawing 1 and Fig. 2, description is made in described rolling and slip, wherein, the web joint 11-1 of indication grating frame 11-2 and element frame 11-7 goes up the single-row radial ball bearing 11-8 that settles two C levels or D level, the rolling friction campaign that these two bearings can come and go along the side back of the body of scale grating 12 is to satisfy the location needs of read head on this direction.Adopt this structure can dispense independent tinsel positioning guide rail in the existing product, and help guaranteeing that the two grid line angles that grating is paid are tending towards constant.In addition, there is the wear-resisting non-metallic friction boss 11-6 of three coplanes in the front of the indication grating frame 11-2 of read head, when carrying out relative sliding friction campaign between three boss and the scale grating face, pay at constant force bulb combination stage clip under 4,9,10 the pressure effect (referring to Fig. 1), can guarantee between boss and the scale grating face closely contact, and make the gap △ t of grating between paying be tending towards constant.
The concrete structure that the designed constant force bulb combination stage clip of the present invention is paid is, referring to Fig. 1 and 2, wherein the two ends of spring steel wire 10 are rigidly connected with spring leaf 4 and steel ball 9 respectively, spring leaf 4 upper ends are connected with head assembly 2 rigidity, and steel ball 9 is pressed on the ball-and-socket center pit that studs with lining 8 on the indication grating frame 11-2.
The effect that described constant force bulb combination stage clip is paid is: on the direction vertical with indication grating direction of motion, provide one grating to be paid in the process that relatively moves, remain suitable constant pressure, guaranteeing that the gap △ t of grating between paying is tending towards constant, and on the direction consistent, enough rigidity is arranged with the indication grating motion.This is by spring leaf because of described pressure and spring wire is common produces, so when extraneous stress condition changed, they can compensate mutually looking into of the two, makes pressure keep constant.In addition, the size of pressure can be adjusted by the angle of bend that changes spring leaf and spring wire.Form grinding by the two with the lining ball-and-socket center pit that wringing fit is set on the indication grating frame owing to bulb with it, thus adopt this design can avoid special sensor when coming and going measurement, to produce backlash, thus can improve the repeatable accuracy of measurement.
Referring to accompanying drawing 1, the installation of sealing optical grid line displacement sensor of the present invention is to adopt, allow the scale grating with having certain flexible bonding agent and elastic press 7 is bonding with it, be fixed in the elongated slot of chi shell main body 13 bottoms, the effect that grating reading head 11 is paid by constant force bulb combination stage clip, floating ground is installed on the scale grating 12, and installation can overcome the error that micro-deformation brought that produces because of scale grating 12 when measuring like this.Next, read head 11 is realized along the spacing dependence top stage clip 3 of the rolling friction campaign that the direction of the scale side back of the body is done.Wherein, stage clip 3 upper ends in top are connected on the top assembly 2, the lower end is pressed in going up on the back of the body central point of combined type friction component 11-1, adjusting pin 5 is used for the phase place adjustment between read head 11 and the scale grating 12, article two, sealing rubber strip 1 is set in respectively in two elongated slots on chi shell main body 13 tops, in order to play the sealing function that prevents that dust, greasy dirt, metal fillings etc. from entering.One end of cable 6 is fixed on the top assembly 2, connect with circuit on the grating reading head, and the other end is input to the grating digital readout (not shown).
The embodiment of monolithic equivalence double end grating reading head of the present invention and scale grating is: adopt nine infraluminescence pipes, for example model is the gallium arsenide infraluminescence pipe of LN68, external diameter Φ=3mm, IF==50mA, P
o=2.5mW, VFmax=11.5V, λ p=9400A, θ=± 10 °, the main photoelectric parameter of nine selected gallium arsenide infraluminescence pipes is identical as far as possible; The photoelectric receiving diode of respective numbers and layout, its model are PIN001, and photosensitive area is 3 * 3mm
2, peak wavelength is 9400 , dark current＜130mA, and photocurrent 〉=50 μ A, operating voltage is 15V.Select the main photoelectric parameter of nine photoelectric receiving diodes identical as far as possible, be beneficial to export the electric signal of nine tunnel constant amplitudes.Be arranged on nine infraluminescence pipes on the circuit board 11-3 that is fixed on the indication grating frame 11-2 by certain spacing, in the corresponding setting mode nine photoelectric receiving tubes are installed on the element frame 11-7 symmetrically, between luminotron and the receiving tube relative position determine realize that by the web joint 11-1 in the middle of fixedly indication grating frame 11-2 and the element frame 11-7 indication grating 11-5 sticks with glue and is connected on the indication grating frame 11-2.The technical parameter of indication grating is: split the phase precision generally select for use the scale grating the cumulative maximum error about 1/2, two group of four phase relation error of splitting mutually between the delineation district selected for use and split the equal error of precision mutually.
The special sensor of optical grid line displacement of the present invention can be formed the measuring system of lineal measure with digital display meter, and realizes that digitizing dynamic, the Express Order Wire displacement shows.Described sensor is mainly used in the measurement of digital display, numerical control and geometrical length in lathe manufacturing and the technological transformation.
Claims (5)
1, a kind of sealed type optical grid line displacement sensor, by the grating reading head that adopts non-parallel optical illumination, transmission-type scale grating, head assembly, stage clip, chi shell main body, sealing strip and cable are formed, wherein, grating reading head (11) is by indication grating (11-5), indication grating frame (11-2), element frame (11-7), combined type friction component (11-1,11-3,11-6,11-8), adjusting pin (5), infrarede emitting diode (11-4) and photoelectric receiving diode (11-9) are formed, it is characterized in that: described grating reading head (11) is the grating reading head of monolithic equivalence double end reading, its indication grating (11-5) is made up of with the grating ruling district (11-5b) that the pitch of scale grating (12) equates the district of slit zero-bit more than (11-5a) and eight pitch, preceding four delineation districts are one group, four delineation districts, back are another group, four delineation district phase places in each group are mutual deviation 1/4d successively, and delineation district phase place corresponding in two groups is identical, corresponding two groups of grating ruling districts, described infrarede emitting diode (11-4) and photoelectric receiving diode (11-9) also respectively have two groups, each is made up of each group four pipes, and the delineation patterned arrangement of described indication grating is arranged by in-line.
2, optical grid line displacement sensor as claimed in claim 1 is characterized in that: the delineation patterned arrangement of described indication grating is to adopt two matrix patterns.
3, optical grid line displacement sensor as claimed in claim 1 or 2 is characterized in that: described scale grating is identical with indication grating grid line lines material, and bottom is a crome metal, and the upper strata is high density, the antiradar reflectivity lines that the duplicature of chrome green is made.
4, optical grid line displacement sensor as claimed in claim 1 or 2, it is characterized in that: adopt a kind of combined type friction component on the described grating reading head, wherein indication grating frame (11-2) is gone up with the web joint (11-1) of element frame (11-7) and is settled two single-row radial ball bearings (11-8), the rolling friction campaign that these two bearings can come and go along the side back of the body of scale grating (12), in addition, the wear-resisting friction boss (11-6) that three coplanes are arranged in the front of indication grating frame (11-2) provides between boss and the scale grating face and carries out relative sliding friction campaign.
5, optical grid line displacement sensor as claimed in claim 1 or 2, it is characterized in that: described indication grating (11-5) is to pay by constant force bulb combination stage clip to realize with the unsteady location that contacts of scale grating (12), described combination stage clip is paid by the elastic part that comprises spring leaf (4), spring steel wire (10), steel ball (9) and lining (8) and is constituted, and the riding position of described elastic part is parallel with the grating line direction of aforementioned scale grating (12).
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN93104273A CN1041558C (en) | 1993-04-14 | 1993-04-14 | Sealed type optical grid line displacement sensor |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN93104273A CN1041558C (en) | 1993-04-14 | 1993-04-14 | Sealed type optical grid line displacement sensor |
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| CN1086011A CN1086011A (en) | 1994-04-27 |
| CN1041558C true CN1041558C (en) | 1999-01-06 |
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| CN93104273A Expired - Fee Related CN1041558C (en) | 1993-04-14 | 1993-04-14 | Sealed type optical grid line displacement sensor |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN100365390C (en) * | 2005-10-14 | 2008-01-30 | 清华大学 | Counter-type lattice belt for switch type digital displacement sensor |
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| CN102607430B (en) * | 2012-03-30 | 2014-03-12 | 中国科学院长春光学精密机械与物理研究所 | Grating line displacement transducer |
| CN102607419B (en) * | 2012-03-30 | 2014-03-12 | 中国科学院长春光学精密机械与物理研究所 | Positioning and splicing device of indicating grating |
| CN102607429A (en) * | 2012-03-30 | 2012-07-25 | 中国科学院长春光学精密机械与物理研究所 | Method for measuring grating line displacement and measurement device |
| CN104713484A (en) * | 2015-03-09 | 2015-06-17 | 北京奥特普森精密机械有限公司 | Closed type optical grating linear displacement sensor structure for ultra-precise machine tool |
| CN105486213B (en) * | 2016-01-18 | 2018-06-15 | 磐石电气（常州）有限公司 | A kind of number shows ruler and its measuring method |
| CN106524921B (en) * | 2016-11-05 | 2019-09-06 | 中北大学 | A kind of high precision and large measuring range double-layer nanometer grating micro-displacement detection device |
| CN106988897A (en) * | 2017-03-31 | 2017-07-28 | 合肥德通科贸有限公司 | A kind of high precision electro electronic throttle of quick response |
| CN106979834B (en) * | 2017-04-14 | 2023-03-14 | 贵阳新天光电科技有限公司 | Abbe head force measuring system of length measuring machine and control system thereof |
| CN107525470B (en) * | 2017-10-17 | 2023-12-26 | 东莞市普迈精密测量科技有限公司 | Grating displacement sensor |
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| US4385836A (en) * | 1980-02-27 | 1983-05-31 | Dr. Johannes Heidenhain Gmbh | Photoelectric digital position measuring system |
| EP0501453A2 (en) * | 1991-02-26 | 1992-09-02 | Mitutoyo Corporation | Combination optical and capacitive absolute position measurement apparatus |
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Patent Citations (2)
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|---|---|---|---|---|
| US4385836A (en) * | 1980-02-27 | 1983-05-31 | Dr. Johannes Heidenhain Gmbh | Photoelectric digital position measuring system |
| EP0501453A2 (en) * | 1991-02-26 | 1992-09-02 | Mitutoyo Corporation | Combination optical and capacitive absolute position measurement apparatus |
Non-Patent Citations (1)
| Title |
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| 光学计量仪器设计第一版，上册 1982.2.1 王因明 机械工业出版社 * |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN100365390C (en) * | 2005-10-14 | 2008-01-30 | 清华大学 | Counter-type lattice belt for switch type digital displacement sensor |
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