CN104713484A - Closed type optical grating linear displacement sensor structure for ultra-precise machine tool - Google Patents
Closed type optical grating linear displacement sensor structure for ultra-precise machine tool Download PDFInfo
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- CN104713484A CN104713484A CN201510101945.7A CN201510101945A CN104713484A CN 104713484 A CN104713484 A CN 104713484A CN 201510101945 A CN201510101945 A CN 201510101945A CN 104713484 A CN104713484 A CN 104713484A
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Abstract
The invention discloses a closed type optical grating linear displacement sensor structure for an ultra-precise machine tool. The closed type optical grating linear displacement sensor comprises a metal optical grating ruler, a first stop block, a second stop block, a fundamental plane shell, a non-fundamental-plane shell, a reading head and a reading head support. The metal optical grating ruler is integrally fixed to the fundamental plane shell through an elastic adhesion agent. The first stop block and the second stop block are fixed to the two ends of the metal grating ruler. The non-fundamental-plane shell is fixed to the fundamental plane shell through screws. Sealing strips are fixed to the inner side of the upper edge of the fundamental plane shell. The two ends of the fundamental plane shell seal a ruler base of the metal optical grating ruler through fixing and adjusting blocks in the shell. The reading head is inlaid in the reading head support. A gap exists between the reading head and the metal optical grating ruler. After the optical grating linear displacement sensor is debugged, the position and the precision of the reading head are locked through a reading head fixing frame. According to the closed type optical grating linear displacement sensor structure for the ultra-precise machine tool, the precision of the optical grating linear displacement sensor is improved, the metal optical grating ruler and the shells are made of stainless steel materials, and the expansion coefficients of the stainless steel materials are identical with that of an ultra-precise machine tool body.
Description
Technical field
The present invention relates to ultra precise measurement technical field, be specifically related to the closed optical grid line displacement sensor structure of a kind of ultra-precision machine tool.
Background technology
Accurate and ultra precise measurement feedback technique is the basis that accurate ultra manufactures.The precision of closed optical grid line displacement sensor directly affects the machining precision of precision machine tool, and therefore it is the core component of ultra-precision machine tool, not only wants precision high, and wants the good precision stability of tool and adaptability, can mate with ultra-precision machine tool.
Current closed optical grid line displacement sensor is owing to adopting aluminium shell as guard section, and inner grating scale mostly is glass raster chi, the difference of the two expansion coefficient, to support the use precision adaptability poor with ultra-precision machine tool, internal guide rail many employings miniature bearing and glass raster chi are as guiding, inevitable generation vibration, noise and minor-cyclic error signal, affect the precision of optical grid line displacement sensor.
Summary of the invention
Because the above-mentioned defect of prior art, the invention provides the closed optical grid line displacement sensor structure of a kind of ultra-precision machine tool, its precision stability, precision adaptability, precision stability are good.
For achieving the above object, the invention provides the closed optical grid line displacement sensor structure of a kind of ultra-precision machine tool, comprise metal grating chi, first block, second block, basal plane shell, non-basal plane shell, read head and read head support, metal grating chi is fixed as one by elastic binder and basal plane shell, metal grating chi two ends are fixed with the first block and the second block respectively, non-basal plane shell is fixed together by screw and basal plane shell, fixing seal bar inside basal plane shell coboundary, shell two ends are arranged in shell by fixed adjustment block by closed for the chi base of metal grating chi, read head is embedded in read head support, read head and metal grating chi gap are arranged, after optical grid line displacement sensor has been debugged, by position and the precision of the locked read head of read head fixed mount.
As preferably, described read head is enclosed in basal plane shell and non-basal plane enclosure, and without inner drive rail, utilizes outside erecting equipment precise guide rail to realize Precision Linear Moving.
As preferably, described grating reading head bracket and non-basal plane housing contacts part are sealing strip.
As preferably, described metal grating chi and shell adopt stainless steel, and the lathe bed of its expansion coefficient and precision machine tool keeps consistency.
As preferably, the thickness of described metal grating chi is 8mm-10mm, and grating fringe is directly inscribed on grating related scale.
Beneficial effect of the present invention:
1, basal plane shell, non-basal plane shell, metal grating chi, read head composition " low friction multiple degrees of freedom " without the contactless structure of guide rail, guarantee kinematic accuracy basis on, improve the precision of optical grid line displacement sensor.
2, metal grating chi and shell all adopt stainless steel, have consistance with the expansion coefficient of precision machine tool lathe bed, guarantee the precision stability of grating scale on precision machine tool.
Be described further below with reference to the technique effect of accompanying drawing to design of the present invention, concrete structure and generation, to understand object of the present invention, characteristic sum effect fully.
Accompanying drawing explanation
Fig. 1 is structural drawing of the present invention;
Fig. 2 is read head adjustment structure figure of the present invention;
Fig. 3 is that the A-A of Fig. 2 is to cut-open view;
Fig. 4 is optical grid line displacement sensor structure cut-open view of the present invention.
Embodiment
With reference to Fig. 1, this embodiment is by the following technical solutions: the closed optical grid line displacement sensor structure of a kind of ultra-precision machine tool, comprise the first end cap 1, block 2, basal plane shell 3, metal grating chi 4, read head fixed mount 5, read head 6, read head support 7, sealing strip 8, non-basal plane shell 10, be coated on basal plane shell 3 inner bottom surface uniformly with elastic binder, metal grating chi 4 is placed in coating, make the two be bonded together, realization flexibly connects, special tooling ensures linearity and the verticality requirement of metal grating scale 4 simultaneously, be screwed one end block 2, be screwed other end block 11 simultaneously, by size fixing seal bar 8 on the upside of basal plane shell 3, read head 6 is fixed on read head support 7, read head fixed mount 5 is connected with read head support 7, by read head 6, read head support 7, the zoarium of read head fixed mount 5 three is placed on the upside of basal plane shell 3, detect the gap confirming read head 6 and metal grating chi 4, guarantee that its gap width is within usable range, signal-testing apparatus detection signal figure, sealing strip 8 is fixed on non-basal plane shell 10, on side screw fixed base shell 3 and non-basal plane shell 10, read head fixed mount 5 opposite side screw is fixed on the upside of non-basal plane shell 10, respectively by the first end cap 1, second end cap 12 inner face is coated with fluid sealant, and screw is fixed on basal plane shell 3 and non-basal plane shell 10.
With reference to Fig. 2-3, read head adjust structure is made up of adjustment of displacement plate 13, fixed head 14, substrate 15, read head 6, substrate 15 two ends are a reserved mounting hole respectively, uniform four screw holes of fixed head 14 are used for fixing with substrate 15, adjustment of displacement plate 13 moves up and down, regulate read head support 7 upper and lower displacement value, make the gap of read head 6 and metal grating chi 4 within normal operating range.
With reference to Fig. 4, optical grid line displacement sensor structure cut-open view includes basal plane shell 3, non-basal plane shell 10, adjustment of displacement plate 13, feature dotted line 20, read head 6, metal grating chi 4, feature dotted line 20 is only crossing with the sealing strip 8 of both sides, clearly sees that " low friction multiple degrees of freedom " is without the contactless structure of guide rail.
It should be noted that, basal plane shell 3 of the present invention, non-basal plane shell 10, metal grating chi 4, read head support 7 can be varying sized, form serial optical grid line displacement sensor, the occasion that ultra-precision machine tool and measuring equipment have special size requirement can be used in, improve the range of this invention application.
The present invention adopts " low friction multiple degrees of freedom " without the contactless structure of guide rail, utilize the precise guide rail of ultra-precision machine tool or measuring equipment, realize the relative precise motion between read head with grating scale, reduce multiple intermediate link error, ensure the stability of gap width between read head and grating scale, strengthen the quality of grating reading head signal, improve the precision of optical grid line displacement sensor; Metal grating chi and shell all adopt stainless steel simultaneously, have consistance with the expansion coefficient of precision machine tool lathe bed.
More than describe preferred embodiment of the present invention in detail.Should be appreciated that those of ordinary skill in the art just design according to the present invention can make many modifications and variations without the need to creative work.Therefore, all technician in the art, all should by the determined protection domain of claims under this invention's idea on the basis of existing technology by the available technical scheme of logical analysis, reasoning, or a limited experiment.
Claims (5)
1. the closed optical grid line displacement sensor structure of ultra-precision machine tool, it is characterized in that, comprise metal grating chi, first block, second block, basal plane shell, non-basal plane shell, read head and read head support, metal grating chi is fixed as one by elastic binder and basal plane shell, metal grating chi two ends are fixed with the first block and the second block respectively, non-basal plane shell is fixed together by screw and basal plane shell, fixing seal bar inside basal plane shell coboundary, shell two ends are arranged in shell by fixed adjustment block by closed for the chi base of metal grating chi, read head is embedded in read head support, read head and metal grating chi gap are arranged.
2. the closed optical grid line displacement sensor structure of a kind of ultra-precision machine tool according to claim 1, it is characterized in that, described read head is enclosed in basal plane shell and non-basal plane enclosure, and without inner drive rail, utilizes outside erecting equipment precise guide rail to realize Precision Linear Moving.
3. the closed optical grid line displacement sensor structure of a kind of ultra-precision machine tool according to claim 1, is characterized in that, described grating reading head bracket and non-basal plane housing contacts part are sealing strip.
4. the closed optical grid line displacement sensor structure of a kind of ultra-precision machine tool according to claim 1, is characterized in that, described metal grating chi and shell adopt stainless steel, and the lathe bed of its expansion coefficient and precision machine tool keeps consistency.
5. the closed optical grid line displacement sensor structure of a kind of ultra-precision machine tool according to claim 1, is characterized in that, the thickness of described metal grating chi is 8mm-10mm, and grating fringe is directly inscribed on grating related scale.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
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| CN201510101945.7A CN104713484A (en) | 2015-03-09 | 2015-03-09 | Closed type optical grating linear displacement sensor structure for ultra-precise machine tool |
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| CN201510101945.7A CN104713484A (en) | 2015-03-09 | 2015-03-09 | Closed type optical grating linear displacement sensor structure for ultra-precise machine tool |
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Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107592787A (en) * | 2017-09-21 | 2018-01-16 | 杭州纽登科技有限公司 | With the positioner of plastic grating chi positioning mounting head |
| CN108168438A (en) * | 2017-12-28 | 2018-06-15 | 长春禹衡光学有限公司 | A kind of closed grating |
| CN109307475A (en) * | 2018-09-04 | 2019-02-05 | 西安交通大学 | Difference frequency active scan formula grating displacement sensor and measurement method |
| CN110186377A (en) * | 2019-07-03 | 2019-08-30 | 长春禹衡光学有限公司 | A kind of grating scale and its ruler shell |
| CN111678434A (en) * | 2020-06-16 | 2020-09-18 | 中国工程物理研究院机械制造工艺研究所 | Device and method for simultaneously detecting six-degree-of-freedom errors of machine tool linear shaft operation |
| CN113681354A (en) * | 2021-08-20 | 2021-11-23 | 北京工研精机股份有限公司 | Feedback element mounting structure and ultra-precise hydrostatic guide rail applying same |
| CN115682892A (en) * | 2022-11-02 | 2023-02-03 | 四川大学 | Guide rail motion error synchronous measuring device based on position triggering |
| CN116465312A (en) * | 2023-05-29 | 2023-07-21 | 通用技术集团国测时栅科技有限公司 | Non-contact type closed linear displacement sensor structure |
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| CN1086011A (en) * | 1993-04-14 | 1994-04-27 | 北京超精细工程研究所 | Sealed type optical grid line displacement sensor |
| CN2423568Y (en) * | 2000-06-08 | 2001-03-14 | 李宏仁 | High-pressure switch displacement velocity sensor |
| CN201434668Y (en) * | 2009-04-16 | 2010-03-31 | 贵阳新天光电科技有限公司 | Raster ball screw stroke dynamic detector |
| CN201463841U (en) * | 2009-04-16 | 2010-05-12 | 贵阳新天光电科技有限公司 | Six-point locating straight-line motion mechanism of square gauging spindle of length measuring instrument |
| CN101988819A (en) * | 2009-07-30 | 2011-03-23 | 廊坊开发区莱格光电仪器有限公司 | Sealed laser grating remote safe linear displacement sensor |
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| CN203364769U (en) * | 2013-08-05 | 2013-12-25 | 申莉云 | Enclosed grating scale |
| CN203518950U (en) * | 2013-10-29 | 2014-04-02 | 北京微纳精密机械有限公司 | Open type linear guide rail grid stroke displacement sensor |
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2015
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| CN1086011A (en) * | 1993-04-14 | 1994-04-27 | 北京超精细工程研究所 | Sealed type optical grid line displacement sensor |
| CN2423568Y (en) * | 2000-06-08 | 2001-03-14 | 李宏仁 | High-pressure switch displacement velocity sensor |
| CN201434668Y (en) * | 2009-04-16 | 2010-03-31 | 贵阳新天光电科技有限公司 | Raster ball screw stroke dynamic detector |
| CN201463841U (en) * | 2009-04-16 | 2010-05-12 | 贵阳新天光电科技有限公司 | Six-point locating straight-line motion mechanism of square gauging spindle of length measuring instrument |
| CN101988819A (en) * | 2009-07-30 | 2011-03-23 | 廊坊开发区莱格光电仪器有限公司 | Sealed laser grating remote safe linear displacement sensor |
| CN102519367A (en) * | 2011-12-26 | 2012-06-27 | 中国科学院长春光学精密机械与物理研究所 | Sliding framework apparatus of grating ruler |
| CN203364769U (en) * | 2013-08-05 | 2013-12-25 | 申莉云 | Enclosed grating scale |
| CN203518950U (en) * | 2013-10-29 | 2014-04-02 | 北京微纳精密机械有限公司 | Open type linear guide rail grid stroke displacement sensor |
Cited By (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107592787A (en) * | 2017-09-21 | 2018-01-16 | 杭州纽登科技有限公司 | With the positioner of plastic grating chi positioning mounting head |
| CN108168438A (en) * | 2017-12-28 | 2018-06-15 | 长春禹衡光学有限公司 | A kind of closed grating |
| CN108168438B (en) * | 2017-12-28 | 2020-02-14 | 长春禹衡光学有限公司 | Closed grating |
| CN109307475A (en) * | 2018-09-04 | 2019-02-05 | 西安交通大学 | Difference frequency active scan formula grating displacement sensor and measurement method |
| CN109307475B (en) * | 2018-09-04 | 2020-01-14 | 西安交通大学 | Difference frequency active scanning type grating displacement sensor and measuring method |
| CN110186377A (en) * | 2019-07-03 | 2019-08-30 | 长春禹衡光学有限公司 | A kind of grating scale and its ruler shell |
| CN111678434A (en) * | 2020-06-16 | 2020-09-18 | 中国工程物理研究院机械制造工艺研究所 | Device and method for simultaneously detecting six-degree-of-freedom errors of machine tool linear shaft operation |
| CN113681354A (en) * | 2021-08-20 | 2021-11-23 | 北京工研精机股份有限公司 | Feedback element mounting structure and ultra-precise hydrostatic guide rail applying same |
| CN113681354B (en) * | 2021-08-20 | 2022-05-20 | 北京工研精机股份有限公司 | Feedback element mounting structure and ultra-precise hydrostatic guide rail applying same |
| CN115682892A (en) * | 2022-11-02 | 2023-02-03 | 四川大学 | Guide rail motion error synchronous measuring device based on position triggering |
| CN116465312A (en) * | 2023-05-29 | 2023-07-21 | 通用技术集团国测时栅科技有限公司 | Non-contact type closed linear displacement sensor structure |
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Application publication date: 20150617 |