CN104155527A - Detection method of material of X wave band quasi-optical cavity and detection method of dielectric constant thereof - Google Patents

Detection method of material of X wave band quasi-optical cavity and detection method of dielectric constant thereof Download PDF

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CN104155527A
CN104155527A CN201410367101.2A CN201410367101A CN104155527A CN 104155527 A CN104155527 A CN 104155527A CN 201410367101 A CN201410367101 A CN 201410367101A CN 104155527 A CN104155527 A CN 104155527A
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optical cavity
quasi
quasi optical
cavity
inductive capacity
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CN104155527B (en
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张娜
成俊杰
张国华
高春彦
杨初
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Beijing Institute of Radio Metrology and Measurement
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Beijing Institute of Radio Metrology and Measurement
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Abstract

The invention discloses a detection method of a material of an X wave band quasi-optical cavity, and the method comprises the following steps: 1) confirming the skin depth according to the material of the quasi-optical cavity or the material of a cladding layer; 2) confirming the value range of the cavity length D according to the quality factor and the skin depth Q of the quasi-optical cavity; 3) confirming the value range of the curvature radius R of a spherical mirror according to curvature factor and intrinsic spectral line purity of the quasi-optical cavity; 4) confirming the caliber A1 of the spherical mirror of the quasi-optical cavity to be 350 mm; 5) confirming the diameter A2 of the plane mirror of the quasi-optical cavity to be 250 mm; 6) confirming the signal coupling of the quasi-optical cavity, wherein the top end of the spherical mirror of the quasi-optical cavity is fixedly connected with the bottom end of a coupling waveguide. The detection method is simple and convenient and is higher in measurement accuracy.

Description

The assay method of X-band quasi optical cavity material and dielectric constant measurement method thereof
Technical field
The present invention relates to a kind of quasi optical cavity material dielectric constant measuring method, particularly relate to a kind of assay method and dielectric constant measurement method thereof of X-band quasi optical cavity material.
Background technology
Quasi optical cavity method with non-destructive, be suitable for the advantages such as little consumable material high-acruracy survey and be widely adopted at millimeter wave frequency band.Measure little consumable material in centimeter wave frequency range and extensively adopt sealing resonator cavity, but the method is strict to materials processing requirement, be difficult for realizing temperature environment simulation, and determine that the quality factor of little loss measurement ability are difficult to exceed 10,000.
Quasi optical cavity method ultimate principle is that measured material is put into front and back resonance frequency or chamber is long, the variation of quality factor by comparing, and in conjunction with parameters such as measured material thickness, initial cavity length, derives specific inductive capacity and loss tangent.Quasi optical cavity measurement belongs to Resonant-cavity Method, has many-valued feature, and measuring accuracy and resonance frequency, sample thickness are closely related.Only have resonance frequency, sample thickness all to select the suitable sufficiently high measuring accuracy that just can obtain.This needs to know the estimated value of sample specific inductive capacity before just requiring to measure, and could design suitable thickness of sample according to survey frequency, obtains accurately unique dielectric constant measurement result.But in most cases,, how specific inductive capacity the unknown of tested print, design sample thickness and just can obtain the dielectric constant measurement result of pin-point accuracy.Traditional solution is that the sample by measuring two different-thickness is determined its specific inductive capacity.But not only bother through theoretical validation the method, and the many-valued problem of solution specific inductive capacity that can not be fully effective.
Adopt quasi optical cavity to measure when material dielectric constant, conventionally require sample to put into the frequency interval that resonance frequency shift amount after quasi optical cavity is less than adjacent pattern.In actual measurement process, the frequency interval of adjacent pattern is generally hundreds of megahertz, if sample specific inductive capacity is large or thickness is thicker, putting into the frequency deviation causing after quasi optical cavity will be greater than the frequency interval of adjacent pattern, finds have the carry pattern identical with cavity mode and becomes very difficult.Traditional measurement method restriction specific inductive capacity is at a very little measurable range.
Summary of the invention
For above the deficiencies in the prior art, the invention provides a kind of assay method and dielectric constant measurement method thereof of X-band quasi optical cavity material, improve the quality factor of X-band quasi optical cavity, can realize the high-acruracy survey of the little consumable material specific inductive capacity of X-band simultaneously.
The present invention adopts following technical proposals:
The assay method of X-band quasi optical cavity material, this assay method comprises the steps:
1) determine skin depth according to quasi optical cavity cavity material or coating material;
2) determine the long D span in chamber according to quasi optical cavity quality factor and skin depth Q;
3) determine spherical mirror radius of curvature R span according to quasi optical cavity Curvature factor and intrinsic Spectral Purity;
4) determine that quasi optical cavity spherical mirror bore A1 is 350mm;
5) determine that quasi optical cavity level crossing diameter A2 is 250mm;
6) determine the signal coupling of quasi optical cavity, the spherical mirror top of described quasi optical cavity is fixedly connected with the bottom of coupled waveguide.
Further, when described cavity material adopts brass, in 8.2GHz～12.4GHz frequency range, skin depth δ=(1.14～1.4) um;
Described quality factor q is greater than at 80,000 o'clock, obtains D be greater than 224.4mm by formula (1), chooses D=250mm;
D＞2δQ (1)
Described spherical mirror radius of curvature R ∈ [320mm, 333mm];
Between the coupling aperture of described coupled waveguide, be provided with the gap of 0.5mm.
The method of X-band quasi optical cavity Materials Measurement specific inductive capacity, the method comprises the steps:
1) in X-band quasi optical cavity working frequency range, uniformly-spaced select multiple test frequencies;
2) under described multiple test frequencies, sample carries out dielectric constant measurement, obtains each specific inductive capacity result;
3) described each specific inductive capacity result is carried out to described point, obtain the fluctuating curve of specific inductive capacity;
4) get the central value of described fluctuating curve, this central value is the final specific inductive capacity result of sample.
Beneficial effect of the present invention is as follows:
The present invention proposes a kind of new X-band quasi optical cavity measuring method, and new measuring method is simple and convenient, and accuracy of measurement is higher, for new measurement thinking has been opened up in the application of quasi optical cavity method.A kind of multi-mode combination measurement method that the present invention proposes, has expanded the measurable range of specific inductive capacity, has strengthened the availability of the method.
Brief description of the drawings
Below in conjunction with accompanying drawing, the specific embodiment of the present invention is described in further detail.
Fig. 1 (a) illustrates quasi optical cavity spherical mirror vertical view;
Fig. 1 (b) illustrates coupled waveguide bottom upward view;
Fig. 1 (c) illustrates coupled waveguide side view.
Fig. 2 illustrates coupled waveguide and spherical mirror position view;
Fig. 3 illustrates multiple resonance frequency figure under quasi optical cavity different mode.
Embodiment
In order to be illustrated more clearly in the present invention, below in conjunction with preferred embodiments and drawings, the present invention is described further.Parts similar in accompanying drawing represent with identical Reference numeral.It will be appreciated by those skilled in the art that specifically described content is illustrative and nonrestrictive below, should not limit the scope of the invention with this.
The invention provides a kind of X-band quasi optical cavity, quality factor are up to more than 50,000, realize the high-acruracy survey of the little consumable material specific inductive capacity of X-band (8.2GHz～12.4GHz); Propose a kind of new X-band quasi optical cavity measuring method simultaneously, in the time that specific inductive capacity is unknown, obtain its specific inductive capacity true value by measuring the sample of an any thickness; Also propose a kind of multi-mode combination measurement method, expanded the measurable range of specific inductive capacity.The invention solves the high-acruracy survey problem of the little consumable material specific inductive capacity of X-band, for the measurement of the little consumable material specific inductive capacity of other centimeter wave frequency range provides reference frame.New measuring method is simple and convenient, and accuracy of measurement is higher, for new measurement thinking has been opened up in the application of quasi optical cavity method.Multi-mode combination measurement method has been widened the measurement range of quasi optical cavity, has strengthened the availability of the method.
X-band quasi optical cavity adopts conveying type hemihedry structure, and the assay method of X-band quasi optical cavity material comprises following content.
1) calculate skin depth according to cavity material or coating material, the present invention adopts brass processing quasi optical cavity, in 8.2GHz～12.4GHz frequency range, and skin depth δ=(1.14～1.4) um.
2) determine the long D span in target release chamber according to quality factor q, propose meter Q and be greater than 80,000, obtain D by formula (1) and be greater than 224.4mm, choose D=250mm.
D＞2δQ (1)
3) determine spherical mirror radius of curvature R span according to Curvature factor and intrinsic Spectral Purity.
First, the general value of Curvature factor (0.2,0.6), can release R ∈ [312.5mm, 625mm].
Quasi optical cavity is operated in TEM 00qpattern, its two adjacent higher modes are respectively TEM 10 (q-1), TEM 11 (q-1). Δ f 1 = c 2 D [ 2 π tan - 1 D / ( R - D ) - 1 ] Or Δ f 2 = c 2 D [ 3 π tan - 1 D / ( R - D ) - 1 ]
Therefore R interval [250mm, 333mm] guarantee obtains Δ f 1with Δ f 2all large as far as possible, now R answers value [312.5mm, 333mm].Because D value is relevant to R, in order to reduce system dimension, the to sum up interval curtate 320mm of R.
3) design spherical aperture of mirror A1 is 350mm.Selection A1 is the beam radius of 5 times, can effectively limit the generation of higher mode, ensures again quasi optical cavity work TEM 00qpattern.
4) design plane mirror diameter A2 is 250mm.Selecting A2 is 5 times of beam angles.
5) signal coupling design.Quasi optical cavity adopts aperture coupled transfer signal.Wall thickness is typically chosen in 0.5mm, coupling aperture diameter 3.8mm, coupling aperture spacing 11.16mm.The proposition that this invention is bold the ball top of spherical mirror center is moved on coupled waveguide, and become one with coupled waveguide, and in the middle of two coupling apertures, cut out the gap of 0.5mm, and the wave guide wall welding between two waveguide mouths of input and output, has completely cut off the leakage between two waveguides from hardware configuration.As shown in Figure 1, Fig. 1 (a) is quasi optical cavity spherical mirror vertical view to this structure, its dome place circular hole and coupled waveguide assembling; Fig. 1 (b) is coupled waveguide bottom upward view; Fig. 1 (c) is coupled waveguide side view.The more common Coupled Passive Waveguide Structure of this structure reduces the leakage coupling between two waveguide mouths of coupled waveguide greatly, and after calibration, system dynamically can reach 120dB.
As shown in Figure 2, because the position that quality factor coordinate with spherical mirror coupled waveguide is very responsive, according to design theory, coupling aperture 1 should be positioned at the summit of spherical mirror 2, but due to coupled waveguide 3 and spherical mirror parts processing, coupled waveguide bottom is plane, the vertex position that conventionally can not just be positioned at spherical mirror that coordinates of this plane and spherical mirror.This need to shorten coupled waveguide length slightly, and as shown in Figure 2, in embodiment, coupled waveguide changes to 5 places, position from position 4.Although difference is very little between position 4 and position 5, be only hundreds of micron, be no more than 1mm, this gap is very violent on the impact of quality factor.It is most suitable that process evidence coupled waveguide and spherical mirror are engaged in 2 places, position.
Determine behind the position of coupled waveguide and spherical mirror, X-band quasi optical cavity has designed.Coordinate network analyzer, control platform etc. can carry out the high-acruracy survey of the little consumable material specific inductive capacity of 8.2GHz～12.4GHz frequency range, more than loss angle measurement ability reaches 2E-5.
The present invention also provides a kind of X-band quasi optical cavity measuring method.
In the time of certain sample of Measuring Dielectric Constant the unknown, in X-band full bandwidth, uniformly-spaced select multiple frequencies, recommended frequency is spaced apart 500MHz, and interval is less, and measuring accuracy is higher.The specific inductive capacity result that each frequency is recorded is carried out described point and obtains the fluctuating curve of specific inductive capacity.This interval central value is dielectric constant measurement result ε, and this outcome measurement error is less than 1%～3%, meets engineering application requirements.
The present invention can also realize X-band quasi optical cavity multi-mode and measure.
Quasi optical cavity is operated in TEM 00qpattern.After quasi optical cavity chamber length is fixing, there are multiple resonance frequencies in corresponding different mode, and putting into of sample will cause resonance frequency shift, as shown in Figure 3.Solid line represents the cavity resonance frequency that each pattern is corresponding, dotted line represent each pattern corresponding have carry a resonance frequency.
Conventionally the cavity resonance frequency that preference pattern is identical and have the resonance frequency of carrying to carry out dielectric constant measurement.But in the time that the frequency offset of sample introducing is greater than the frequency interval of adjacent pattern, finds the have carrier frequency rate identical with cavity resonance frequency mode and become very difficult.At this moment adopt Frequency varying method still become chamber regular way measure be all difficult to ensure to select have the pattern of carrying consistent with cavity mode.Adopt while becoming chamber regular way measurement, in the process that changes chamber length, will occur that the resonance frequency of carrying that has corresponding to multiple change of cavity length amounts equals cavity resonance frequency, but only have a change of cavity length amount to there being the pattern of year resonance frequency to equal the pattern of cavity resonance frequency.Adopt Frequency varying method measure time, adjacent cavities resonance frequency have carry a resonance frequency, its pattern be can not determine identical with cavity mode.How to judge that rational frequency offset or change of cavity length amount are one of difficult points.For this problem, conventionally select specific inductive capacity sample little and thinner thickness to make frequency offset be less than the frequency interval of adjacent pattern.This has restricted the measurable range of quasi optical cavity system specific inductive capacity theoretically.The present invention proposes: adopt the cavity resonance frequency of Frequency varying method and arbitrary patterns to have the long change amount combination of cavity resonance frequency and arbitrary patterns chamber of carrying combination of resonant frequencies or adopting change chamber regular way all can obtain correct specific inductive capacity result, its error is about 3%, meets engineering application requirements.
Illustrate specific embodiment of the invention process below.
X-band quasi optical cavity material dielectric constant is measured concrete implementation step: X-band spherical mirror radius-of-curvature is 320mm, and actinal surface diameter is 350mm, and spherical crown height is 52.09mm, and machining precision is 10um; X-band level crossing diameter is 250mm, and thickness is 5mm, and machining precision is 50um; The processing of employing brass, and through grinding step, surface smoothness reaches Δ more than 10 grades; Coordinate network analyzer, Splices cable etc. to set up X-band quasi optical cavity measuring system.It is S that network analyzer measurement parameter is set 21, number of scan points is 201, and power level is 0dBm, and intermediate-frequency bandwidth is 30Hz, adopts transmission isolation calibration steps to carry out after system calibration, and regulating quasi optical cavity chamber long is 272.53mm, and State selective measurements frequency is 10.436GHz, and corresponding measurement pattern is TEM 0013, recording cavity quality factor is 17396.Standard sample of photo teflon thickness is 10mm, and diameter is 115mm.Adopting this systematic survey polytetrafluoroethylstandard standard print to obtain specific inductive capacity result is 2.03, and loss angle result is 0.0028, and the standard value of the teflon providing with list of references meets better.
In the time measuring the tested print of certain specific inductive capacity the unknown, in X-band full bandwidth, interval selects 8 to measure frequency 8.5GHz, 9GHz, 9.5GHz, 10GHz, 10.5GHz, 11GHz, 11.5GHz, 12GHz, at each measurement frequency, to same sample, (thickness is 20mm, diameter is 115mm) measure dielectric constant measurement result and be respectively 2.13, 1.90, 1.85, 1.87, 2.01, 2.19, 2.24, 2.19, Tg delta measurement result is 0.0014, 0.0018, 0.0012, 0.0003, 0.0011, 0.0008, 0.0001, 0.0000.Between dielectric constant measurement fruiting area, central value is 2.045, and loss tangent is 0.0009.The standard value of the teflon providing with list of references meets better.
Choose TEM 0016, cavity resonance chamber is long is 216.1896mm, cavity resonance frequency is 11.992GHz.Adopt and become chamber regular way measurement polytetrafluoroethylstandard standard print (thickness of sample is 10mm, diameter 115mm).Cavity mode and have the pattern combination of resonant frequencies of carrying to obtain specific inductive capacity result of calculation as shown in table 1.Have arbitrarily the change of cavity length amount of pattern of carrying or frequency offset and cavity mode combination all to obtain comparatively reliable result of calculation, the standard value of the teflon providing with list of references meets better.
The each mode of resonance of table 1 combines the specific inductive capacity result (Frequency varying method) obtaining
Obviously; the above embodiment of the present invention is only for example of the present invention is clearly described; and be not the restriction to embodiments of the present invention; for those of ordinary skill in the field; can also make other changes in different forms on the basis of the above description; here cannot give all embodiments exhaustively, everyly belong to apparent variation or the still row in protection scope of the present invention of variation that technical scheme of the present invention extends out.

Claims (3)

  1. The assay method of 1.X wave band quasi optical cavity material, is characterized in that, this assay method comprises the steps:
    1) determine skin depth according to quasi optical cavity cavity material or coating material;
    2) determine the long D span in chamber according to quasi optical cavity quality factor and skin depth Q;
    3) determine spherical mirror radius of curvature R span according to quasi optical cavity Curvature factor and intrinsic Spectral Purity;
    4) determine that quasi optical cavity spherical mirror bore A1 is 350mm;
    5) determine that quasi optical cavity level crossing diameter A2 is 250mm;
    6) determine the signal coupling of quasi optical cavity, the spherical mirror top of described quasi optical cavity is fixedly connected with the bottom of coupled waveguide.
  2. 2. the assay method of X-band quasi optical cavity material according to claim 1, is characterized in that,
    When described cavity material adopts brass, in 8.2GHz～12.4GHz frequency range, skin depth δ=(1.14～1.4) um;
    Described quality factor q is greater than at 80,000 o'clock, obtains D be greater than 224.4mm by formula (1), chooses D=250mm;
    D＞2δQ (1)
    Described spherical mirror radius of curvature R ∈ [320mm, 333mm];
    Between the coupling aperture of described coupled waveguide, be provided with the gap of 0.5mm.
  3. The method of 3.X wave band quasi optical cavity Materials Measurement specific inductive capacity, is characterized in that, the method comprises the steps:
    1) in X-band quasi optical cavity working frequency range, uniformly-spaced select multiple test frequencies;
    2) under described multiple test frequencies, sample carries out dielectric constant measurement, obtains each specific inductive capacity result;
    3) described each specific inductive capacity result is carried out to described point, obtain the fluctuating curve of specific inductive capacity;
    4) get the central value of described fluctuating curve, this central value is the final specific inductive capacity result of sample.
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US12078727B2 (en) 2020-09-14 2024-09-03 Rohde & Schwarz Gmbh & Co. Kg Imaging system and method for material characterization of a sample

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