CN104155314A - Inspection method of internal state of optical material, and method for manufacturing optical element - Google Patents
Inspection method of internal state of optical material, and method for manufacturing optical element Download PDFInfo
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- CN104155314A CN104155314A CN201410321518.5A CN201410321518A CN104155314A CN 104155314 A CN104155314 A CN 104155314A CN 201410321518 A CN201410321518 A CN 201410321518A CN 104155314 A CN104155314 A CN 104155314A
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- optical material
- inspection method
- internal state
- bearing surface
- inspection
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Abstract
To provide an inspection method capable of securing a wide visual field, while using a short inspection system, and inspecting accurately the internal state of an optical material, and to provide a method for manufacturing an optical element capable of manufacturing a high-quality optical element in a short time. The inspection method for inspecting the internal state of the optical material OM has a process for irradiating the optical material OM with diffused light from a light source, and inspecting the internal state of the optical material OM based on transmitted light transmitted through the optical material OM.
Description
The application is the applying date: on November 01st, 2010, and application number: 201010541865.0, denomination of invention: the dividing an application of the inspection method of the internal state of optical material and the manufacture method of optical element.
Technical field
The present invention relates to the inspection method of internal state and the manufacture method of optical element of optical material.
Background technology
In the past, the inspection of the internal state of optical material (for example vein), adopt schlieren method and carry out, on optical material, irradiate the light beam after using gun sight parallel, with imaging len, assemble transmitted light again, by being disposed near the knife edge (knife-edge) focus, obtain having the picture (for example,, with reference to patent documentation 1) of excellent contrast.
Patent documentation 1: Japanese kokai publication hei 10-239236 communique
Summary of the invention
But, due in method in the past, in image, there will be ghost image, flare as shown in Figure 8 to mix or dust is exaggerated situation about mapping out, therefore there is the correct problem that checks optical material internal state that hinders.In addition,, because the field of view generating is narrow and small, therefore at particular range, continue to check that internal state needs the long period.If want the visual field of expanded view picture, should increase the length of check system, in order to suppress the length of check system, if use specularly reflected light, the image generating is easily fuzzy.
The present invention completes in view of above situation, object is to provide can be used the short check system of length and guarantee the wide visual field, can correctly check the inspection method of internal state of optical material and the manufacture method that can manufacture at short notice the optical element of high-quality optical element.
The inventor finds, by making the light of illumination optical material, is diffused light, after transmitted light is assembled, carries out imaging, can use the short check system of length and guarantee the wide visual field, can correctly check the internal state of optical material, thereby complete the present invention.Particularly, the invention provides following scheme.
(1) check an inspection method for the internal state of optical material, this inspection method comprises following operation:
To optical material, irradiate diffused light, the transmitted light based on this optical material of transmission, checks the internal state of described optical material.
(2) inspection method as described in (1), it comprises assembles described transmitted light with convergent lens, then based on imaging in imaging len, check the operation of the internal state of described optical material.
(3) inspection method as described in (2), it further comprises the operation that the form of at least one party in described convergent lens and described imaging len is regulated.
(4) inspection method as described in (3), wherein, the adjusting of described form is not change described convergent lens and described imaging len carries out with respect to the position of described optical material.
(5) inspection method as described in any one in (2) to (4), wherein, described convergent lens has planar convex lens.
(6) inspection method as described in any one in (2) to (5), wherein, described convergent lens has effective diameter more than 45mm.
(7) inspection method as described in any one in (2) to (6), wherein, described imaging len is concave-convex lens.
(8) inspection method as described in any one in (1) to (7), wherein, the inspection of the internal state of described optical material, is to be undertaken by the transmitted light of convergence is converted to electronic signal.
(9) inspection method as described in (8), wherein, adopts CMOS to carry out to the conversion of described electronic signal.
(10) inspection method as described in any one in (1) to (9), it further comprises the form of described optical material and the operation that highly regulates.
(11) inspection method as described in (10), wherein, the adjusting of the form of described optical material, is to use mounting table and link, by making bearing surface and being slided to carry out with magnetic connection status by bearing surface; Described mounting table mounting has described optical material and has the described bearing surface of partial sphere shape; Described link has and is symmetric shape with described bearing surface and has can be connected with described bearing surface magnetic described by bearing surface.
(12) inspection method as described in any one in (1) to (11), the internal state of described optical material is containing veined degree.
(13) a kind of manufacture method of optical element, it comprises following operation: use the inspection method as described in any one in (1) to (12), internal state to the optical material of the candidate volume as optical element checks, according to this internal state, meet special datum, from described candidate volume, select optical element.
According to the present invention, by making the light of illumination optical material, be diffused light, after being assembled, transmitted light carries out imaging, and can use the short check system of length and guarantee the wide visual field, can correctly check the internal state of optical material.
Accompanying drawing explanation
Fig. 1 is for carrying out the side view of check system of the inspection method of one embodiment of the present invention.
Fig. 2 is the planimetric map of the check system of Fig. 1.
Fig. 3 is the front view of convergent lens of the check system of pie graph 1.
Fig. 4 is the local amplification profile diagram of the form adjusting portion of Fig. 1.
Fig. 5 means the photo of the image that the inspection method of use one embodiment of the present of invention produces.
Fig. 6 means the photo of the image that the inspection method of use comparative example produces.
Fig. 7 means the photo of the image that the inspection method of use another embodiment of the present invention generates.
Fig. 8 means the photo of the image that the related inspection method of use comparative example produces.
symbol description
10 check systems
20 illumination parts
21 light sources
23 light source supports
30 location divisions
31 portions
34 pars contractiliss
35 form adjusting portions
351 bolsters
352 bearing surfaces
353 links
354 by bearing surface
36 magnetic shield panels
40 convergent portion
41 convergent lenses
43 assemble support
45 frameworks
46 turning axles
47 flange parts
50 imaging portions
51 imaging lens
53 imaging supports
60 test sections
61 eyepieces
62 cameras
63 eyepiece supports
64 camera supports
70 display parts
OM optical material
Embodiment
Below, with reference to accompanying drawing, the related inspection method of embodiments of the present invention is described.
Fig. 1 is that Fig. 2 is the planimetric map of the check system 10 of Fig. 1 for carrying out the side view of the check system 10 of the related inspection method of an embodiment of the invention.Check system 10 comprises: the display part 70 that irradiates the illumination part 20 of light, the location division 30 that optical material OM is positioned, the convergent portion 40 that light is assembled, the imaging portion 50 that carries out imaging, the test section 60 that image is detected and show image.
Inspection method involved in the present invention comprises following operation: the diffused light that the light source from illumination part 20 21 is sent, be radiated on the optical material OM loading in the platform portion 31 of location division 30, again by the transmitted light of this optical material of transmission OM, with the convergent lens 41 of convergent portion 40, assemble, then imaging in the imaging len of imaging portion 50 51 is detected with the camera 62 of test section 60, finally based on this imaging, check the internal state of optical material OM.From the existing inspection method of illumination optical material after diffused light parallelization is different with convergent lens, in the present invention, illumination optical material is diffused light, and transmitted light is converged.Thus, can use the short check system of length 10 and guarantee the wide visual field, can correctly check the internal state of optical material OM.Should illustrate, in this instructions, the length of check system refers to the longest length in the size of check system, typically refers to the distance to test section from illumination part.
Light source 21 is by 23 supportings of light source support, platform portion 31 is by pars contractilis 34, form adjusting portion 35 and magnetic shield panel 36 supportings, convergent lens 41 is by assembling support 43 supportings, imaging len 51 is by 53 supportings of imaging support, eyepiece 61 is by 63 supportings of eyepiece support, camera 62, by 64 supportings of camera support, regulates the height of light source 21, convergent lens 41, imaging len 51, eyepiece 61 and camera 62, and they are positioned in same light path.And, on platform portion 31, convergent lens 41, imaging len 51, eyepiece 61 and camera 62, be respectively arranged with distance adjustment portion 33,48,57,67,68, can suitably regulate distance each other, so that the image producing change is clear.
Optical material OM can be made by any starting material such as glass, plastics.For the correct internal state of evaluating optical material, the roughness that is at least positioned over the surperficial S in light path in optical material OM is low.Surperficial S like this, can wait formation by grinding, but considers grinding cost, preferably pulverizes optics and makes optical material OM, and the upper broken-out section forming of this optical material OM is used as surperficial S.
But, due to broken-out section generally have irregularly shaped, so easy scattering of transmitted light.Therefore, be preferably, with respect to optical material OM, regulate the form of at least one party in convergent lens 41 and imaging len 51.Thus, can more correctly check the internal state of optical material OM.
Should illustrate, in prior art, when directional light irradiates broken-out section, due to the scattering of transmitted light height, therefore be necessary to make the rotation in the horizontal direction centered by optical material of imaging len and test section, but this embodiment is from guaranteeing revolution space aspect, not preferred.But, in the present invention, to broken-out section, irradiate scattered light as mentioned above, so nephelometric turbidity unit reduces in transmitted light on the contrary.Therefore, even if convergent portion 40, imaging portion 50 and test section 60 are rotated in the horizontal direction, also can not change the position of convergent lens 41 and imaging len 51, and their form is regulated, thus, can further reduce the necessary space of check system 10 for checking.
For the internal state at particular range interior focusing material OM continues to check, must be with respect to light path mobile optical material OM.Therefore, preferably regulate form and the height of optical material OM.In Fig. 1, by the pars contractilis 34 that is connected in platform portion 31 is stretched up and down, the optical material OM that can make to load in platform portion 31 moves in the vertical direction with respect to light path.And, it is desirable to as mentioned above, therefore because broken-out section has irregularly shapedly, optical material OM can be adjusted to any form.
Fig. 4 is the local amplification profile diagram of form adjusting portion 35.In the bottom of platform portion 31, be provided with bolster 351, this bolster 351 has the bearing surface 352 of partial sphere shape.On the other hand, link 353 have with the shape of bearing surface 352 symmetries and have can be connected with bearing surface 352 magnetic by bearing surface 354, by bearing surface 354, fixed with the state that bearing surface 352 is connected with magnetic.Therefore,, by bearing surface 352 is slided with the state being connected with magnetic by bearing surface 354, the optical material OM in platform portion 31 can be adjusted to form arbitrarily.And, can carry out this operation with a hand, another hand can regulate the form of convergent lens 41, imaging len 51 simultaneously, from this starting point, can significantly shorten the supervision time.
The adjustable extent of the form of optical material OM, can be by changing bearing surface 352 and suitably being set by the distance of the radius-of-curvature of bearing surface 354, platform portion 31 and link 353 etc.
In Fig. 4, bearing surface 352 is convex surfaces, by bearing surface 354, is concave surfaces, but also can be contrary, and, bearing surface 352 be positioned at bolster 351 below, but be not limited to this, can be also side.And link 353 is connected to pars contractilis 34 by the magnetic shield panel 36 of being made by non magnetic starting material.In addition, platform portion 31 and bolster 351 form mounting table.
Fig. 3 is the front view of convergent portion 40.Convergent lens 41 is by turning axle 46a, 46b, and sky is opened minim gap and is connected with framework 45, by rotation turning axle 46a, 46b, makes convergent lens 41 rotations.Turning axle 46a, 46b arrange in the horizontal direction, and along with the rotation of turning axle 46a, 46b, convergent lens 41 rotates in the vertical direction.And, being fixed on the convergence support 43 vertically extending in framework 45, can rotate in the horizontal direction.Therefore, by making to assemble support 43, rotate in the horizontal direction, can make convergent lens 41 rotate in the horizontal direction.Thus, convergent lens 41 can rotate with horizontal direction in the vertical direction, therefore can set various forms.On turning axle 46a, 46b, be provided with flange part 47a, 47b, these flange parts 47a, 47b are blocked by framework 45, therefore can suppress convergent lens 41 and depart from from framework 45.Should illustrate, as long as play such effect, concrete structure is not limited to structure shown in Fig. 3.And, though not shown, also can there is the structure identical with imaging portion 50.
As long as convergent lens 41 can be assembled transmitted light and is not particularly limited, but from the viewpoint of the sharpening of convergence ability and image, be preferably planar convex lens.And, from expanding the viewpoint in the visual field of produced image, preferably convergent lens 41 have be preferably 45mm above, more preferably 100mm above, most preferably be effective diameter more than 120mm.Effective diameter in this instructions is measured according to the method for the aperture on the focus face of JIS B 7095 defineds.
As long as can make the photoimaging penetrating from convergent lens 41 imaging len 51 is not particularly limited, but from the viewpoint of the sharpening of imaging capability and image, be preferably concave-convex lens.And, from expanding the viewpoint in the visual field of generated image, imaging len 51 be preferably 0.5 times of effective diameter of convergent lens 41 above, more preferably 0.8 times above, most preferably be more than 1.0 times.Should illustrate, from the viewpoint in the visual field of expanded view picture, there is no need especially to exceed the effective diameter of convergent lens 41.
Penetrate the light of imaging len 51, by eyepiece 61, inject camera 62, with this camera 62, detect.Imaging len 51 and eyepiece 61 can be known lens (fixed-focus lens, zoom lens, zoom lens (zoom lens) etc.) in the past, omit the explanation of structure in detail.Wherein, imaging len 51 and eyepiece 61 also can consist of identical lens.Thus, can reduce the number of the lens that use in check system 10, thereby can reduce the crooked of generated image by suppressing the movement etc. of optical axis.And, due to light imaging in lens, therefore can easily arrange or adjust the position of lens.In addition, camera 62 can be existing known camera head, omits the explanation of detailed structure.Preferably, by the transmitted light of convergence is converted to electronic signal, as electronic signal, carry out detected image.Thus, can check objectively the internal state of optical material OM.Transmitted light, to the conversion of electronic signal, can adopt any device such as CCD, CMOS to carry out, and from cheap viewpoint, preferably uses CMOS.In addition, the mode that imaging len 51 as shown in Figure 1 and eyepiece 61 and camera 62 arrange is circumscribed not, can be also the lens will with imaging len 51 and eyepiece 61 effects, is assembled on not shown mirror body and is equipped on the mode of camera 62.Thus, the optical axis between imaging len 51 and eyepiece 61 and camera 62 is fixed, thereby can produce the more image of high image quality.
Preferably, by electronic signal is converted to view data, on the display part 70 that makes to be connected with camera 62, as image, show.Thus, by observing the shown image of display part 70, can easily check the internal state of optical material OM, and can more than enough people be observed by image, therefore can expect further to improve evaluation precision.
As the internal state of checkable optical material, can enumerate having or not and degree etc. of vein, bubble, devitrification, impurity etc.The degree of the vein having difficulties in existing inspection method, also can inspection method according to the present invention correctly check.
The present invention also comprises the manufacture method of the optical element with following operation, that is, use above inspection method, the internal state of the optical material of the candidate volume of optical element is checked, based on this internal state, meet specific benchmark, from candidate volume, select the operation of optical element.As mentioned above, by adopting inspection method involved in the present invention, can guarantee the wide visual field and can correctly check internal state, therefore according to manufacture method involved in the present invention, can manufacture at short notice high-quality optical element.
Embodiment
< embodiment 1>
As optical material, use standard sample B and the C of Japanese optics nitre industry meeting (JOGIS) 1175 appointments, use the check system shown in Fig. 1, the internal state of optical material is checked.Should illustrate, light source 21 is green light source, and convergent lens 41 is that planar convex lens (flat face is light source side), imaging len 51 are concave-convex lens (face that curvature is large is light source side).The result that Fig. 5 is is the more standard sample C of vein about (a) for the less standard sample B of vein, (b).
(comparative example)
Except the check system this point shown in the embodiment 1 of use TOHKEMY 2008-267985 communique, adopt the order identical with embodiment 1, the internal state of optical material is checked.In Fig. 6, be to be that standard sample B, (b) are the result of standard sample C about (a).
In embodiment, the texture suitable with vein almost do not observe (Fig. 5 (a)) in standard sample B, and in standard sample C, observes a lot (Fig. 5 (b)).In contrast, in comparative example, be difficult to see the difference (Fig. 6 (a), (b)) between standard sample B and C.Hence one can see that, can correctly check the degree of vein according to the inspection method of embodiment.
(test example)
As convergent lens 41, use effective diameter is the lens of 45mm (test example 1), 70mm (test example 2), 90mm (test example 3), and the scope in the visual field of the image of display part 70 outputs is evaluated.Should illustrate, the effective diameter of imaging len 51 is 70mm, and the distance from illumination part 20 to test section 60 is 1040mm.In Fig. 7, represent respectively that (a) is that test example 1, (b) are that test example 2, (c) are the result of test example 3.
As shown in Figure 7, according to the check system of using in embodiment, the visual field has scope more than diameter 4mm.Should illustrate, while wanting to adopt the check system of using in comparative example to obtain the visual field of equal scope, light source to the distance of pick-up unit is 2650mm, and the image slanting obtaining is serious, deficiency in light quantity, therefore can not check the internal state of optical material.Hence one can see that, according to the inspection method of embodiment, can use the short check system of length and guarantee the wide visual field.
Claims (13)
1. check an inspection method for the internal state of optical material, this inspection method comprises following operation:
To optical material, irradiate diffused light, the transmitted light based on this optical material of transmission, checks the internal state of described optical material.
2. inspection method as claimed in claim 1, it comprises assembles described transmitted light with convergent lens, then based on imaging in imaging len, check the operation of the internal state of described optical material.
3. inspection method as claimed in claim 2, it further comprises the operation that the form of at least one party in described convergent lens and described imaging len is regulated.
4. inspection method as claimed in claim 3, wherein, the adjusting of described form is not change described convergent lens and described imaging len carries out with respect to the position of described optical material.
5. inspection method as claimed in claim 4, wherein, described convergent lens has planar convex lens.
6. inspection method as claimed in claim 2, wherein, described convergent lens has effective diameter more than 45mm.
7. inspection method as claimed in claim 2, wherein, described imaging len is concave-convex lens.
8. inspection method as claimed in claim 1, wherein, the inspection of the internal state of described optical material, is to be undertaken by the transmitted light of convergence is converted to electronic signal.
9. inspection method as claimed in claim 8, wherein, adopts CMOS to carry out to the conversion of described electronic signal.
10. inspection method as claimed in claim 1, it further comprises the form of described optical material and the operation that highly regulates.
11. inspection methods as claimed in claim 10, wherein, the adjusting of the form of described optical material, be by use load described optical material and have partial sphere shape bearing surface mounting table with have with the shape of described bearing surface symmetry and have can be connected with described bearing surface magnetic by the link of bearing surface, make described bearing surface and describedly by bearing surface, with magnetic connection status, slided to regulate.
12. inspection methods as claimed in claim 1, the internal state of described optical material is containing veined degree.
The manufacture method of 13. 1 kinds of optical elements, it comprises following operation: use the inspection method as described in any one in claim 1 to 12, internal state to the optical material of the candidate volume as optical element checks, according to this internal state, meet special datum, from described candidate volume, select optical element.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2009253756 | 2009-11-05 | ||
| JP2009-253756 | 2009-11-05 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2010105418650A Division CN102053094A (en) | 2009-11-05 | 2010-11-01 | Inspection method for inspecting internal state of optical material and manufacture method for optical element |
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| CN104155314A true CN104155314A (en) | 2014-11-19 |
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| CN201410321518.5A Pending CN104155314A (en) | 2009-11-05 | 2010-11-01 | Inspection method of internal state of optical material, and method for manufacturing optical element |
| CN2010105418650A Pending CN102053094A (en) | 2009-11-05 | 2010-11-01 | Inspection method for inspecting internal state of optical material and manufacture method for optical element |
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| CN2010105418650A Pending CN102053094A (en) | 2009-11-05 | 2010-11-01 | Inspection method for inspecting internal state of optical material and manufacture method for optical element |
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| JP7186640B2 (en) | 2019-03-04 | 2022-12-09 | 株式会社東芝 | Measuring method and measuring device |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH08152414A (en) * | 1994-11-28 | 1996-06-11 | Asahi Optical Co Ltd | Optical parts inspecting device |
| CN2404191Y (en) * | 2000-01-03 | 2000-11-01 | 郑建平 | Adjustable magnetic support for instruments and apparatus |
| JP2008267985A (en) * | 2007-04-20 | 2008-11-06 | Ohara Inc | Method of inspecting optical glass |
Family Cites Families (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01131437A (en) * | 1987-11-16 | 1989-05-24 | Sharp Corp | Transparent flat plate inspecting instrument |
| JPH06235624A (en) * | 1992-12-15 | 1994-08-23 | Hitachi Ltd | Inspecting method and apparatus for transparent sheet |
| JP3340596B2 (en) * | 1995-07-03 | 2002-11-05 | 旭光学工業株式会社 | Optical member inspection apparatus and inspection method |
| JPH09287920A (en) * | 1996-04-23 | 1997-11-04 | Asahi Glass Co Ltd | Method for evaluating shape of object to be measured, shape of bubble inside glass and degree of defect of glass |
| JPH11281584A (en) * | 1998-03-30 | 1999-10-15 | Minolta Co Ltd | Method and apparatus for inspection |
| US7142295B2 (en) * | 2003-03-05 | 2006-11-28 | Corning Incorporated | Inspection of transparent substrates for defects |
| JP4494984B2 (en) * | 2005-01-07 | 2010-06-30 | 浜松ホトニクス株式会社 | Transparent body inspection apparatus and transparent body inspection method |
-
2010
- 2010-10-28 JP JP2010242298A patent/JP2011117951A/en active Pending
- 2010-11-01 CN CN201410321518.5A patent/CN104155314A/en active Pending
- 2010-11-01 CN CN2010105418650A patent/CN102053094A/en active Pending
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH08152414A (en) * | 1994-11-28 | 1996-06-11 | Asahi Optical Co Ltd | Optical parts inspecting device |
| CN2404191Y (en) * | 2000-01-03 | 2000-11-01 | 郑建平 | Adjustable magnetic support for instruments and apparatus |
| JP2008267985A (en) * | 2007-04-20 | 2008-11-06 | Ohara Inc | Method of inspecting optical glass |
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| JP2011117951A (en) | 2011-06-16 |
| CN102053094A (en) | 2011-05-11 |
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Application publication date: 20141119 |