CN104143581A - 钯硅纳米线室温红外探测器及其制作方法 - Google Patents
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- 229910052710 silicon Inorganic materials 0.000 title claims abstract description 99
- 239000010703 silicon Substances 0.000 title claims abstract description 99
- KDLHZDBZIXYQEI-UHFFFAOYSA-N Palladium Chemical compound [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 title claims abstract description 94
- 239000002070 nanowire Substances 0.000 title claims abstract description 53
- 229910052763 palladium Inorganic materials 0.000 title claims abstract description 45
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 9
- 239000000758 substrate Substances 0.000 claims abstract description 49
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims abstract description 20
- 238000005516 engineering process Methods 0.000 claims abstract description 17
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims abstract description 16
- 229910052782 aluminium Inorganic materials 0.000 claims abstract description 16
- 239000000377 silicon dioxide Substances 0.000 claims abstract description 5
- 235000012239 silicon dioxide Nutrition 0.000 claims abstract description 5
- 238000000034 method Methods 0.000 claims description 28
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 claims description 24
- 239000004411 aluminium Substances 0.000 claims description 14
- 229910004298 SiO 2 Inorganic materials 0.000 claims description 13
- 229910052697 platinum Inorganic materials 0.000 claims description 12
- 239000011248 coating agent Substances 0.000 claims description 11
- 238000000576 coating method Methods 0.000 claims description 11
- 238000001259 photo etching Methods 0.000 claims description 9
- 229910052581 Si3N4 Inorganic materials 0.000 claims description 7
- 239000004020 conductor Substances 0.000 claims description 7
- 230000003287 optical effect Effects 0.000 claims description 7
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims description 7
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 claims description 6
- 238000000137 annealing Methods 0.000 claims description 6
- 238000011065 in-situ storage Methods 0.000 claims description 6
- NICDRCVJGXLKSF-UHFFFAOYSA-N nitric acid;trihydrochloride Chemical compound Cl.Cl.Cl.O[N+]([O-])=O NICDRCVJGXLKSF-UHFFFAOYSA-N 0.000 claims description 6
- 230000002093 peripheral effect Effects 0.000 claims description 6
- 238000004544 sputter deposition Methods 0.000 claims description 6
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 claims description 3
- 229910052796 boron Inorganic materials 0.000 claims description 3
- 238000005260 corrosion Methods 0.000 claims description 3
- 230000007797 corrosion Effects 0.000 claims description 3
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- 230000003628 erosive effect Effects 0.000 claims description 3
- 238000005530 etching Methods 0.000 claims description 3
- 238000002347 injection Methods 0.000 claims description 3
- 239000007924 injection Substances 0.000 claims description 3
- 238000001755 magnetron sputter deposition Methods 0.000 claims description 3
- 230000001590 oxidative effect Effects 0.000 claims description 3
- -1 phosphonium ion Chemical class 0.000 claims description 3
- 238000001020 plasma etching Methods 0.000 claims description 3
- 238000005498 polishing Methods 0.000 claims description 3
- 239000000243 solution Substances 0.000 claims description 3
- 229910052681 coesite Inorganic materials 0.000 abstract 2
- 229910052906 cristobalite Inorganic materials 0.000 abstract 2
- 229910052682 stishovite Inorganic materials 0.000 abstract 2
- 229910052905 tridymite Inorganic materials 0.000 abstract 2
- 238000003491 array Methods 0.000 abstract 1
- 230000005855 radiation Effects 0.000 description 7
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 6
- 230000004888 barrier function Effects 0.000 description 4
- VLJQDHDVZJXNQL-UHFFFAOYSA-N 4-methyl-n-(oxomethylidene)benzenesulfonamide Chemical compound CC1=CC=C(S(=O)(=O)N=C=O)C=C1 VLJQDHDVZJXNQL-UHFFFAOYSA-N 0.000 description 3
- 238000009825 accumulation Methods 0.000 description 3
- 239000007788 liquid Substances 0.000 description 3
- 229910052757 nitrogen Inorganic materials 0.000 description 3
- 229910021340 platinum monosilicide Inorganic materials 0.000 description 3
- 238000002360 preparation method Methods 0.000 description 3
- 230000005540 biological transmission Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- XRZCZVQJHOCRCR-UHFFFAOYSA-N [Si].[Pt] Chemical compound [Si].[Pt] XRZCZVQJHOCRCR-UHFFFAOYSA-N 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 230000005669 field effect Effects 0.000 description 1
- 238000005036 potential barrier Methods 0.000 description 1
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Abstract
一种钯硅纳米线室温红外探测器,包括抗反射膜层、P型外延硅衬底层、光敏层、SiO2光腔介质层和铝镜反射膜层;所述抗反射膜层、P型外延硅衬底层、光敏层、SiO2光腔介质层和铝镜反射膜层依次层叠在一起形成红外探测器;其改进在于:所述光敏层由钯硅纳米线阵列形成;所述红外探测器的工作模式采用背照方式;所述红外探测器工作于室温环境下。本发明的有益技术效果是:采用钯硅纳米线制作技术,在提高红外探测器性能的同时,大幅度提高Pd2Si/P-Si红外探测器的信噪比,探测器可在室温环境下工作。
Description
技术领域
本发明涉及一种红外探测器,尤其涉及一种钯硅纳米线室温红外探测器及其制作方法。
背景技术
发明人早先提出过一件主题名称为“铂硅纳米线红外探测器及其制作方法”的发明专利申请(申请号:201410081602.4),由该技术获得的红外探测器虽然性能得到了提升,但其工作时,需要用液氮来进行制冷,而液氮制冷结构复杂、体积较大,不利于装置的小型化。
发明内容
针对背景技术中的问题,本发明提出了一种钯硅纳米线室温红外探测器,包括抗反射膜层、P型外延硅衬底层、光敏层、SiO2光腔介质层和铝镜反射膜层;所述抗反射膜层、P型外延硅衬底层、光敏层、SiO2光腔介质层和铝镜反射膜层依次层叠在一起形成红外探测器;
创新在于:所述光敏层由钯硅纳米线阵列形成;所述红外探测器的工作模式采用背照方式;所述红外探测器工作于室温环境下。
前述钯硅纳米线室温红外探测器的工作原理是:红外辐射从探测器背面入射,经抗反射膜层进入P型外延硅衬底层, 光子能量小于Si禁带宽度的红外辐射穿过P型外延硅衬底层后透射进入由钯硅纳米线阵列构成的光敏层中,一部分红外辐射被钯硅纳米线阵列吸收,激发出电子-空穴对,另一部分红外辐射从光敏区透射出去并进入光学谐振腔,经铝镜反射膜层反射后,重新折回光敏层并被钯硅纳米线吸收,激发出电子-空穴对;由钯硅纳米线光敏层产生的电子-空穴对中,能量超过势垒高度的热空穴越过Pd2Si/P-Si势垒,进入P型外延硅衬底层,从而在钯硅纳米线光敏层内形成电子积累,同时P型外延硅衬底层内也形成空穴积累,光敏层内积累的电子被输出二极管收集,完成对红外辐射的探测。由于红外辐射在钯硅纳米线之间多次反射,增加了光敏层对红外辐射的吸收,此外,钯硅纳米线阵列与P型外延硅衬底层形成肖特基势垒接触,存在较大的边缘场效应,产生很大的边缘电场,导致光生电子发生雪崩倍增效应,提高了红外探测器的量子效率。Pd2Si/P-Si肖特基势垒高度为0.33eV,PtSi/P-Si肖特基势垒高度为0.21eV,故在相同制冷温度下,Pd2Si/P-Si红外探测器的暗电流比PtSi/P-Si红外探测器的暗电流小几十倍,PtSi/P-Si红外探测器需要在液氮制冷温度(80K)下工作。而本发明的Pd2Si/P-Si红外探测器可在无制冷器条件下工作于室温环境。
与现有技术相同地,所述钯硅纳米线室温红外探测器上还设置有输出二极管、P+沟阻、电极引线、P+扩散地和N保护环。
优选地,所述抗反射膜层由硅纳米线阵列形成。
一种钯硅纳米线室温红外探测器制作方法,按如下步骤制作钯硅纳米线室温红外探测器:
1)提供双面抛光的P型外延硅衬底层;
2)在P型外延硅衬底层上双面生长二氧化硅介质层,在P型外延硅衬底层正面的二氧化硅介质层上淀积氮化硅介质层;
3)采用硼扩散工艺在P型外延硅衬底层上分别形成P+沟阻和P+扩散地;
4)采用磷离子注入工艺在P型外延硅衬底层上分别形成输出二极管和N保护环;
5)采用光刻工艺在P型外延硅衬底层正面形成光敏区;采用等离子刻蚀工艺将光敏区内的氮化硅介质层刻蚀干净;采用湿法工艺腐蚀光敏区和P型外延硅衬底层背面,将光敏区和P型外延硅衬底层背面的二氧化硅介质层去掉;获得工艺片;
6)采用超高真空溅射工艺,在工艺片双面淀积铂膜并原位退火;采用铂辅助刻蚀工艺在光敏区和P型外延硅衬底层背面制作硅纳米线,然后用王水去除铂膜;P型外延硅衬底层背面的铂膜被去除后,P型外延硅衬底层背面的硅纳米线阵列即形成抗反射膜层;
7)用稀氢氟酸溶液去除光敏区内硅纳米线上的自然氧化层,采用超高真空溅射工艺在光敏区淀积钯膜并原位退火,形成钯硅纳米线阵列,钯硅纳米线阵列即为光敏层,用王水腐蚀去除光敏区外围未反应的钯膜;
8)利用PECVD工艺在光敏区及外围淀积低温二氧化硅光腔介质薄膜,形成SiO2光腔介质层;
9)采用光刻工艺,刻蚀出引线孔;
10)采用磁控溅射工艺在SiO2光腔介质层上淀积铝膜,然后采用光刻工艺形成铝镜反射膜层和电极引线压点。
本发明的有益技术效果是:采用钯硅纳米线制作技术,在提高红外探测器性能的同时,大幅度提高Pd2Si/P-Si红外探测器的信噪比,探测器可在室温环境下工作。
附图说明
图1、本发明的结构示意图;
图中各个标记所对应的名称分别为:抗反射膜层1、P型外延硅衬底层2、光敏层3、SiO2光腔介质层4、铝镜反射膜层5、输出二极管6、P+沟阻7、电极引线8、P+扩散地9、N保护环10、二氧化硅介质层11、氮化硅介质层12。
具体实施方式
一种钯硅纳米线室温红外探测器,包括抗反射膜层1、P型外延硅衬底层2、光敏层3、SiO2光腔介质层4和铝镜反射膜层5;所述抗反射膜层1、P型外延硅衬底层2、光敏层3、SiO2光腔介质层4和铝镜反射膜层5依次层叠在一起形成红外探测器;
其创新在于:所述光敏层3由钯硅纳米线阵列形成;所述红外探测器的工作模式采用背照方式;所述红外探测器工作于室温环境下。
进一步地,所述钯硅纳米线室温红外探测器上还设置有输出二极管6、P+沟阻7、电极引线8、P+扩散地9和N保护环10。
进一步地,所述抗反射膜层1由硅纳米线阵列形成。
一种钯硅纳米线室温红外探测器制作方法,按如下步骤制作钯硅纳米线室温红外探测器:
1)提供双面抛光的P型外延硅衬底层2;
2)在P型外延硅衬底层2上双面生长二氧化硅介质层11,在P型外延硅衬底层2正面的二氧化硅介质层11上淀积氮化硅介质层12;
3)采用硼扩散工艺在P型外延硅衬底层2上分别形成P+沟阻7和P+扩散地9;
4)采用磷离子注入工艺在P型外延硅衬底层2上分别形成输出二极管6和N保护环10;
5)采用光刻工艺在P型外延硅衬底层2正面形成光敏区;采用等离子刻蚀工艺将光敏区内的氮化硅介质层12刻蚀干净;采用湿法工艺腐蚀光敏区和P型外延硅衬底层2背面,将光敏区和P型外延硅衬底层2背面的二氧化硅介质层11去掉;获得工艺片;
6)采用超高真空溅射工艺,在工艺片双面淀积铂膜并原位退火;采用铂辅助刻蚀工艺在光敏区和P型外延硅衬底层2背面制作硅纳米线,然后用王水去除铂膜;P型外延硅衬底层2背面的铂膜被去除后,P型外延硅衬底层2背面的硅纳米线阵列即形成抗反射膜层1;
7)用稀氢氟酸溶液去除光敏区内硅纳米线上的自然氧化层,采用超高真空溅射工艺在光敏区淀积钯膜并原位退火,形成钯硅纳米线阵列,钯硅纳米线阵列即为光敏层3,用王水腐蚀去除光敏区外围未反应的钯膜;
8)利用PECVD工艺在光敏区及外围淀积低温二氧化硅光腔介质薄膜,形成SiO2光腔介质层4;
9)采用光刻工艺,刻蚀出引线孔;
10)采用磁控溅射工艺在SiO2光腔介质层4上淀积铝膜,然后采用光刻工艺形成铝镜反射膜层5和电极引线压点。
Claims (4)
1.一种钯硅纳米线室温红外探测器,包括抗反射膜层(1)、P型外延硅衬底层(2)、光敏层(3)、SiO2光腔介质层(4)和铝镜反射膜层(5);所述抗反射膜层(1)、P型外延硅衬底层(2)、光敏层(3)、SiO2光腔介质层(4)和铝镜反射膜层(5)依次层叠在一起形成红外探测器;
其特征在于:所述光敏层(3)由钯硅纳米线阵列形成;所述红外探测器的工作模式采用背照方式;所述红外探测器工作于室温环境下。
2.根据权利要求1所述的钯硅纳米线室温红外探测器,其特征在于:所述钯硅纳米线室温红外探测器上还设置有输出二极管(6)、P+沟阻(7)、电极引线(8)、P+扩散地(9)和N保护环(10)。
3.根据权利要求1所述的钯硅纳米线室温红外探测器,其特征在于:所述抗反射膜层(1)由硅纳米线阵列形成。
4.一种钯硅纳米线室温红外探测器制作方法,其特征在于:按如下步骤制作钯硅纳米线室温红外探测器:
1)提供双面抛光的P型外延硅衬底层(2);
2)在P型外延硅衬底层(2)上双面生长二氧化硅介质层(11),在P型外延硅衬底层(2)正面的二氧化硅介质层(11)上淀积氮化硅介质层(12);
3)采用硼扩散工艺在P型外延硅衬底层(2)上分别形成P+沟阻(7)和P+扩散地(9);
4)采用磷离子注入工艺在P型外延硅衬底层(2)上分别形成输出二极管(6)和N保护环(10);
5)采用光刻工艺在P型外延硅衬底层(2)正面形成光敏区;采用等离子刻蚀工艺将光敏区内的氮化硅介质层(12)刻蚀干净;采用湿法工艺腐蚀光敏区和P型外延硅衬底层(2)背面,将光敏区和P型外延硅衬底层(2)背面的二氧化硅介质层(11)去掉;获得工艺片;
6)采用超高真空溅射工艺,在工艺片双面淀积铂膜并原位退火;采用铂辅助刻蚀工艺在光敏区和P型外延硅衬底层(2)背面制作硅纳米线,然后用王水去除铂膜;P型外延硅衬底层(2)背面的铂膜被去除后,P型外延硅衬底层(2)背面的硅纳米线阵列即形成抗反射膜层(1);
7)用稀氢氟酸溶液去除光敏区内硅纳米线上的自然氧化层,采用超高真空溅射工艺在光敏区淀积钯膜并原位退火,形成钯硅纳米线阵列,钯硅纳米线阵列即为光敏层(3),用王水腐蚀去除光敏区外围未反应的钯膜;
8)利用PECVD工艺在光敏区及外围淀积低温二氧化硅光腔介质薄膜,形成SiO2光腔介质层(4);
9)采用光刻工艺,刻蚀出引线孔;
10)采用磁控溅射工艺在SiO2光腔介质层(4)上淀积铝膜,然后采用光刻工艺形成铝镜反射膜层(5)和电极引线压点。
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