CN104142209B - Mass cg measurement apparatus and method - Google Patents

Abstract

The invention provides a kind of mass cg measurement apparatus and method, by regulation level to governor motion position in described chute；The position of the strong point of parts to be measured measured by horizontal survey chi；Reading according to vertical precision measurement apparatus adjusts the vertical distance of each vertical governor motion；First vertical force of strong point during small-sized force sensor measuring parts to be measured holding level, determines the quality of described parts to be measured according to the first vertical force；Distance and the first vertical force between quality according to parts to be measured, adjacent two strong points determine that the level of parts to be measured is to center of gravity；For axle, parts to be measured are rotated α angle with the line of the most adjacent two strong points of parts to be measured；Second vertical force of small-sized force sensor measuring two other strong point of parts to be measured；Determining the vertical center gravity of parts to be measured, the present invention can accurately measure quality and the position of centre of gravity thereof of the moving component of parts to be measured such as lithographic equipment, and the testing time is short and precision is high.

Description

Mass cg measurement apparatus and method

Technical field

The present invention relates to a kind of mass cg measurement apparatus and method.

Background technology

Along with the development of semicon industry, increasing advanced technology has been applied in the middle of this industry.Existing Lithographic equipment is generally divided into two classes, and a class is stepping lithographic equipment, and mask pattern single exposure is imaged on an exposure of eyeglass Light region；Another kind of is step-scan lithographic equipment, and mask pattern is not single exposure imaging, but sweeping by projection light field Retouch and be moved into picture.The important aspect weighing lithographic equipment is exactly the positioning precision of moving component, described moving component bag Include: the mask platform of carrying mask pattern, the silicon wafer stage of carrying silicon chip.In reality, with moving component motor driving center it is generally Focus point, but measuring center often takes centroid point, so, when realizing SERVO CONTROL, exists for control signal from centre of form position Putting the conversion of position of centre of gravity, this conversion is closely related with the position deviation of the centre of form with center of gravity, if center of gravity and position of form center The most well calibrating, if deviation is relatively big, control performance is just unable to reach the precision of the Nano grade of needs.In order to obtain relatively Good lithographic equipment performance, the center of gravity of moving component needs accurate calibration.

In the prior art, by adding closed loop control, its feedback signal to moving component Rz axle (level is to rotary shaft) Measured conversion by testing agency to obtain.X and the Y degree of freedom direction open loop of moving component is not controlled.When only giving Rz to injection Movement locus signal, if the center of gravity of moving component and the centre of form (i.e. the measuring center of measuring mechanism) level are in time being completely superposed, Measuring, through measuring mechanism, the measured value of moving component Rz degree of freedom that conversion obtains is to follow input trajectory value, and X and Y degree of freedom Measured value should be zero.But, when moving component center of gravity and the centre of form are misaligned, i.e. center of gravity exists X and (or) Y side relative to the centre of form To eccentric time, measure the X of value that conversion obtains and (or) Y-direction have certain displacement output, and this displacement output is big Little angle and the center of gravity rotated with Rz is relevant relative to the bias of centre of form X, Y-direction, thus can be by measuring the defeated of sensor Go out and the rotational movement amount of mobile of Rz is to obtain the center of gravity bias relative to the centre of form.Although this method need not extra measurement dress Putting, but due to various noise factor, center of gravity measurement precision cannot ensure, meanwhile, this method measuring process is cumbersome, surveys Examination process tedious.

Summary of the invention

It is an object of the invention to provide a kind of mass cg measurement apparatus and method, using the teaching of the invention it is possible to provide simple in construction is effective Mass cg measurement apparatus, utilizes principle of moment balance, accurately measures the matter of the moving component of parts to be measured such as lithographic equipment Amount and position of centre of gravity thereof, the testing time is short and precision is high.

For solving the problems referred to above, the present invention provides a kind of mass cg measurement apparatus,

Including pedestal and multiple supporting mechanism, each supporting mechanism includes that the level that is sequentially connected with is to governor motion, vertical Governor motion and small-sized force transducer, wherein,

A plurality of chute and multiple horizontal survey chi it is provided with on described pedestal；

Described level is respectively arranged in described chute to governor motion so that described level to governor motion in chute Sliding；

Described vertical governor motion, for supporting parts to be measured, each vertical governor motion is provided with vertical precision Measurement apparatus；

Described small-sized force transducer is for measuring the vertical force of the strong point of described parts to be measured.

Further, in said apparatus, each level is provided with fixing screw on governor motion, for by described water Put down and be fixed on described pedestal to governor motion.

Further, in said apparatus, the top of described small-sized force transducer is provided with ball-and-socket hinge device.

Further, in said apparatus, each vertical governor motion is provided with antiskid parts, is used for preventing described Parts slide to be measured.

Further, in said apparatus, described parts to be measured are the moving component of a lithographic equipment.

Further, in said apparatus, described vertical precision measurement apparatus is micrometer or slide gauge.

Further, in said apparatus, the quantity of described supporting mechanism, chute and horizontal survey chi is four, institute State the diagonal setting along described pedestal of chute and horizontal survey chi.

Another side according to the present invention, it is provided that a kind of mass cg measurement side using above-mentioned mass cg measurement apparatus Method, including:

Regulate described level to governor motion position in described chute, so that described vertical governor motion supports institute State parts to be measured；

Select a position on described parts to be measured as initial point, set up the X centered by described initial point and Y-direction is sat Parameter, described horizontal survey chi is measured the position of the strong point of described parts to be measured, thus is obtained between adjacent two strong points Distance；

Reading according to described vertical precision measurement apparatus adjusts the vertical distance of each vertical governor motion, so that described Parts to be measured keep level；

Parts to be measured described in described small-sized force sensor measuring keep the first vertical force of strong point during level, according to Described first vertical force determines the quality of described parts to be measured；

Distance between quality according to described parts to be measured, adjacent two strong points and the first vertical force are treated described in determining Measure the level of parts to center of gravity；

For axle, described parts to be measured are rotated α with the line of the most adjacent two strong points of described parts to be measured Angle；

Second vertical force of two other strong point of parts to be measured described in described small-sized force sensor measuring；

Distance between quality according to described parts to be measured, adjacent two strong points, the first vertical force, level are to weight The heart, α angle and the second vertical force determine the vertical center gravity of described parts to be measured.

Further, in the above-mentioned methods,

Described parts to be measured are cuboid, and the quantity of described supporting mechanism, chute and horizontal survey chi is four, determines The level of described parts to be measured, in the step of center of gravity, obtains the level of described parts to be measured to weight according to following formula The heart:

$\{\begin{array}{c}m=F1+F2+F3+F4\\ m\·x_o=[(F3+F4)-(F1+F2)]\·\frac{a}{2}\\ m\·y_o=[(F1+F4)-(F2+F3)]\·\frac{b}{2}\end{array}$

Wherein, (x_o,y_o) represent described level to center of gravity, m represents the quality of described parts to be measured, and a represents that line is parallel In X distance between the two of coordinate axes strong points, b represents between two strong points that line is parallel to Y-direction coordinate axes Distance, F1, F2, F3 and F4 represent the first vertical force of four strong points respectively.

Further, in the above-mentioned methods,

Determine in the step of vertical center gravity of described parts to be measured, determine described parts to be measured according to following formula Vertical center gravity:

$(F11+F22)\·a\·\cos \mathrm{\α}=m\·(\frac{a}{2}-x_o-z_o\·\tan \mathrm{\α})\·\cos \mathrm{\α}$

Wherein, F11 and F22 represents the second vertical force of two other strong point, z respectively_oRepresent described parts to be measured Vertical center gravity.

Compared with prior art, the present invention provides a kind of simple in construction effective mass cg measurement apparatus, by regulation Described level is to governor motion position in described chute, so that described vertical governor motion supports described portion to be measured Part；Select a position on described parts to be measured as initial point, set up the X centered by described initial point and Y-direction coordinate axes, The position of the strong point of described parts to be measured measured by described horizontal survey chi, thus obtain between adjacent two strong points away from From；Reading according to described vertical precision measurement apparatus adjusts the vertical distance of each vertical governor motion, so that described to be measured Amount parts keep level；Strong point when parts to be measured described in described small-sized force sensor measuring keep level first vertical Power, determines the quality of described parts to be measured according to described first vertical force；Quality according to described parts to be measured, adjacent two Distance and the first vertical force between the strong point determine that the level of described parts to be measured is to center of gravity；With described parts to be measured The line of the most adjacent two strong points is that described parts to be measured are rotated α angle by axle；Described in described small-sized force sensor measuring Second vertical force of two other strong point of parts to be measured；Quality according to described parts to be measured, adjacent two strong points it Between distance, the first vertical force, level determine the vertical center gravity of described parts to be measured, energy to center of gravity, α angle and the second vertical force Enough utilize principle of moment balance, accurately measure quality and the position of centre of gravity thereof of the moving component of parts to be measured such as lithographic equipment, Testing time is short and precision is high.

Accompanying drawing explanation

Fig. 1 is the structure chart of the mass cg measurement apparatus of one embodiment of the invention；

Fig. 2 is the structure chart of the supporting mechanism of one embodiment of the invention；

Fig. 3 is the instrumentation plan of the rectangle parts to be measured of one embodiment of the invention；

Fig. 4 is the instrumentation plan of the rhombus parts to be measured of one embodiment of the invention；

Fig. 5 is the flow chart of the mass cg measuring method of one embodiment of the invention；

Fig. 6 is the vertical demension measurement schematic diagram of one embodiment of the invention；

Fig. 7 is the schematic diagram at the parts to be measured rotation α angle of one embodiment of the invention.

Detailed description of the invention

Understandable for enabling the above-mentioned purpose of the present invention, feature and advantage to become apparent from, real with concrete below in conjunction with the accompanying drawings The present invention is further detailed explanation to execute mode.

Embodiment one

As illustrated in fig. 1 and 2, the present invention provides a kind of mass cg measurement apparatus, including pedestal 1 and four supporting mechanisms 2, Each supporting mechanism 2 includes that the level being sequentially connected with is to governor motion 21, vertical governor motion 22 and small-sized force transducer 23.

Four chutes 11 and four horizontal survey chis 12, described horizontal survey chi diagonally it is provided with on described pedestal 1 12 can be used for the position measuring described level to governor motion 21.

Described level is respectively arranged in described chute 11 to governor motion 21, so that described level exists to governor motion 21 Sliding in chute 11.Preferably, each level is provided with fixing screw on governor motion 21, is used for described level to regulation Mechanism 21 is fixed on described pedestal 1.Concrete, in chute 11, it is slid onto the position of needs to governor motion 21 in level After, by fixing screw, level can be fixed on pedestal 1 to governor motion 21.

Described vertical governor motion 22 is for supporting four strong points A, B, C, D of parts 3 to be measured, each vertical tune It is provided with vertical precision measurement apparatus, such as micrometer and slide gauge etc. in joint mechanism 22.The present embodiment uses micrometer, institute Stating vertical governor motion 22 and can realize vertical movement, micrometer can realize the vertical position accurate measurement of parts 3 to be measured. Preferably, described vertical governor motion 22 is provided with antiskid parts, is used for preventing the sliding of described parts to be measured 3, thus protects Card measuring accuracy also ensures safety.Described parts to be measured 3 are the moving component of a lithographic equipment.

Described small-sized force transducer 23 is for measuring the vertical of four strong points A, B, C and D of described parts to be measured 3 Power.Preferably, the top of described small-sized force transducer 23 is provided with ball-and-socket hinge device, and described ball-and-socket hinge device can ensure that small-sized power passes The accuracy of the vertical force that sensor 23 is measured.

As shown in Figures 3 and 4, for the shape of different parts to be measured 3, four levels of scalable are to governor motion 21 points The not position in described chute 11, so that four vertical governor motions 22 support parts 3 to be measured simultaneously, in portion to be measured Part 3 can obtain four common effective supports of vertical governor motion 22, could pass through small-sized force transducer 23 and obtain to be measured Effective vertical force numerical value at four angles of parts 3.

Shown in Fig. 3, parts 3 to be measured are the moving component of a lithographic equipment, and it is shaped as rectangular-shaped.Can be surveyed by regulation The vertical governor motion 22 of amount device, make moving component upper surface guarantee level or with the base-plates surface bevel of device.

The present embodiment provides simple in construction effective mass cg measurement apparatus, it is possible to utilize principle of moment balance, accurately Measuring quality and the position of centre of gravity thereof of the moving component of parts to be measured such as lithographic equipment, the testing time is short and precision is high.

Embodiment two

As it is shown in figure 5, the present invention also provides for the quality of a kind of employing mass cg measurement apparatus as described in embodiment one Center of gravity measurement method, including:

Step S1, regulates described level to governor motion 21 position of 11 in described chute, so that vertical governor motion 22 support described parts to be measured.

Step S2, selects a position on described parts to be measured 3 as initial point o, sets up centered by described initial point o X and Y-direction coordinate axes, described horizontal survey chi 12 is measured the position of four strong points of described parts to be measured 3, thus is obtained Distance a between adjacent two strong points and b.

Step S3, adjusts the vertical distance of each vertical governor motion 22 according to the reading of described micrometer, so that described Parts 3 to be measured keep level.

Step S4, four strong points when described parts to be measured 3 holding level measured by described small-sized force transducer 23 First vertical force, determines the quality of described parts to be measured 3 according to described first vertical force.

Step S5, determines described portion to be measured according to the quality of parts 3 to be measured, described distance a and b, the first vertical force The level of part 3 is to center of gravity.

Preferably, in step S5, determine the level of described parts to be measured 3 in the step of center of gravity, according to following formula Obtain the level of described parts to be measured to center of gravity:

$\{\begin{array}{c}m=F1+F2+F3+F4\\ m\·x_o=[(F3+F4)-(F1+F2)]\·\frac{a}{2}\\ m\·y_o=[(F1+F4)-(F2+F3)]\·\frac{b}{2}\end{array}$

Wherein, (x_o,y_o) represent described level to center of gravity, m represents the quality of described parts to be measured, and a represents that line is parallel In X distance between the two of coordinate axes strong points, b represents between two strong points that line is parallel to Y-direction coordinate axes Distance, F1, F2, F3 and F4 represent the support force of four strong points, the most described first vertical force respectively.

Step S6, with the line of the most adjacent two strong points of described parts 3 to be measured for axle by described portion to be measured Part rotates α angle.

Step S7, it is second vertical that described two other strong point of parts to be measured 3 measured by described small-sized force transducer 23 Power.

Step S8, determines described according to described distance a and b, the first vertical force, level to center of gravity, α angle and the second vertical force The vertical center gravity of parts 3 to be measured.

Preferably, step S8 determines the vertical center gravity of described parts to be measured according to following formula:

$(F11+F22)\·a\·\cos \mathrm{\α}=m\·(\frac{a}{2}-x_o-z_o\·\tan \mathrm{\α})\·\cos \mathrm{\α}$

Wherein, F11 and F22 represents second vertical force at two other angle, z respectively_oRepresent hanging down of described parts to be measured To center of gravity.

As shown in Figure 6, with the centre of form (geometric center) the o point of moving component as initial point in the present embodiment, in other embodiments Other any one position selecting to be alternatively on described parts to be measured of initial point, sets up coordinate system X centered by described initial point o With Y-direction axle, o_mFor parts center of gravity to be measured, barycentric coodinates value is (x_o,y_o,z_o).The position of initial point o is determined by horizontal survey chi 12 Put, and determine on described parts to be measured distance a between adjacent two strong points and b.Regulate vertical governor motion 22 to keep treating Measuring parts surface level, the support force testing four strong points A, B, C, D with small-sized force transducer 23 is respectively F1, F2, F3 And F4.Thereby determine that parts gross mass to be measured is m.By formula (1), determine that component level to be measured is to center of gravity x_o,y_o。

$\{\begin{array}{c}m=F1+F2+F3+F4\\ m\·x_o=[(F3+F4)-(F1+F2)]\·\frac{a}{2}\\ m\·y_o=[(F1+F4)-(F2+F3)]\·\frac{b}{2}\end{array}---\left(1\right)$

As it is shown in fig. 7, parts to be measured are rotated α angle with CD for axle, test the support force of four strong points A, B, C, D, It is respectively F11, F22, F33 and F44.By formula (2), determine parts vertical center gravity z to be measured_o。

$(F11+F22)\·a\·\cos \mathrm{\α}=m\·(\frac{a}{2}-x_o-z_o\·\tan \mathrm{\α})\·\cos \mathrm{\α}---\left(2\right)$

By above-mentioned steps, finally give complete barycentric coodinates value (x_o,y_o,z_o)。

Parts to be measured 3 in the present invention can be various shape, the such as rhombus shown in Fig. 4, is the most also not limited to square Shape and rhombus；The quantity of supporting mechanism 2 and corresponding chute 11 is more than or equal to 3, can be designed according to actual needs.To sum up Described, the present invention provides a kind of simple in construction effective mass cg measurement apparatus, it is possible to utilizes principle of moment balance, accurately surveys Measuring quality and the position of centre of gravity thereof of the moving component of parts to be measured such as lithographic equipment, the testing time is short and precision is high.

In this specification, each embodiment uses the mode gone forward one by one to describe, and what each embodiment stressed is and other The difference of embodiment, between each embodiment, identical similar portion sees mutually.For system disclosed in embodiment For, owing to corresponding to the method disclosed in Example, so describe is fairly simple, relevant part sees method part explanation ?.

Professional further appreciates that, in conjunction with the unit of each example that the embodiments described herein describes And algorithm steps, it is possible to electronic hardware, computer software or the two be implemented in combination in, in order to clearly demonstrate hardware and The interchangeability of software, the most generally describes composition and the step of each example according to function.These Function performs with hardware or software mode actually, depends on application-specific and the design constraint of technical scheme.Specialty Technical staff specifically should can be used for using different methods to realize described function to each, but this realization should not Think beyond the scope of this invention.

Obviously, those skilled in the art can carry out various change and the modification spirit without deviating from the present invention to invention And scope.So, if the present invention these amendment and modification belong to the claims in the present invention and equivalent technologies thereof scope it In, then the present invention is also intended to change and including modification include these.

Claims (3)

1. a mass cg measuring method for mass cg measurement apparatus, mass cg measurement apparatus includes pedestal and multiple Support mechanism, each supporting mechanism include the level being sequentially connected with to governor motion, vertical governor motion and small-sized force transducer, its In, described pedestal is provided with a plurality of chute and multiple horizontal survey chi；Described level is respectively arranged at described to governor motion In chute, so that described level is to governor motion sliding in chute；Described vertical governor motion is for supporting a portion to be measured Part, each vertical governor motion is provided with vertical precision measurement apparatus；Described small-sized force transducer is used for measuring described to be measured The vertical force of the strong point of amount parts；It is characterized in that, described measuring method includes:

Regulate described level to governor motion position in described chute so that described vertical governor motion support described in treat Measure parts；

Select a position on described parts to be measured as initial point, set up the X centered by described initial point and Y-direction coordinate Axle, described horizontal survey chi is measured the position of the strong point of described parts to be measured, thus is obtained between adjacent two strong points Distance；

Reading according to described vertical precision measurement apparatus adjusts the vertical distance of each vertical governor motion, so that described to be measured Amount parts keep level；

Parts to be measured described in described small-sized force sensor measuring keep the first vertical force of strong point during level, according to described First vertical force determines the quality of described parts to be measured；

Distance and the first vertical force between quality according to described parts to be measured, adjacent two strong points determine described to be measured The level of parts is to center of gravity；

For axle, described parts to be measured are rotated α angle with the line of the most adjacent two strong points of described parts to be measured；

Second vertical force of two other strong point of parts to be measured described in described small-sized force sensor measuring；

Distance between quality according to described parts to be measured, adjacent two strong points, the first vertical force, level are to center of gravity, α angle With the vertical center gravity that the second vertical force determines described parts to be measured.

2. mass cg measuring method as claimed in claim 1, it is characterised in that described parts to be measured are cuboid, institute The quantity stating supporting mechanism, chute and horizontal survey chi is four, determines that the level of described parts to be measured is to the step of center of gravity In, obtain the level of described parts to be measured to center of gravity according to following formula:

$\left\{\begin{array}{c}m=F1+F2+F3+F4\\ m\·x_0=\[(F3+F4)-(F1+F2)\]\·\frac{a}{2}\\ m\·y_0=\[(F1+F4)-(F2+F3)\]\·\frac{b}{2}\end{array}\right.$

Wherein, (x₀,y₀) represent described level to center of gravity, m represents the quality of described parts to be measured, and a represents that line is parallel to X Distance between the two of coordinate axes strong points, b represent that line is parallel between two strong points of Y-direction coordinate axes away from From, F1, F2, F3 and F4 represent the first vertical force of four strong points respectively.

3. mass cg measuring method as claimed in claim 2, it is characterised in that determine the vertical heavy of described parts to be measured In the step of the heart, determine the vertical center gravity of described parts to be measured according to following formula:

$(F11+F22)\·a\·cos\mathrm{\α}=m\·(\frac{a}{2}-x_0-z_0\·tan\mathrm{\α})\·cos\mathrm{\α}$

Wherein, F11 and F22 represents the second vertical force of two other strong point, z respectively₀Represent the vertical of described parts to be measured Center of gravity.