CN104141107A - Al-Cu-N wear-resistant hard coating and preparation method thereof - Google Patents
Al-Cu-N wear-resistant hard coating and preparation method thereof Download PDFInfo
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Abstract
The invention discloses an Al-Cu-N wear-resistant hard coating, comprising an AlN crystal phase and a Cu crystal phase, wherein the Cu crystal phase is dispersed in the AlN crystal phase, the interface between the Cu crystal phase and the AlN crystal phase is bonded through a Cu-Al bond, and the Al-Cu-N wear-resistant hard coating is composed of, on the basis of atomic percentage, 74.6 to 89% of Al and N with and 11 to 25.4% of elemental Cu. The Al-Cu-N wear-resistant hard coating has good hardness and excellent wear resistance; the wear rate of the coating is less than 4.0 * 10<-16> m3/Nm, meeting requirements for wear resistance; and the coating can be extensively used in fields like dies and machine parts. The invention further discloses a preparation method for the Al-Cu-N wear-resistant hard coating. The method adopts magnetron sputtering, has good operationality and controllability, can easily realize industrial production and has wide application prospects and good economic benefits.
Description
Technical field
The present invention relates to wear-resistant coating and preparation field thereof, be specifically related to wear-resisting hard coat of a kind of Al-Cu-N and preparation method thereof.
Background technology
Friction is the phenomenon that we often run into, and has in the world 1/3rd to 1/2nd the energy to be consumed by friction, and damages machine and engineering structure, reduces working efficiency.Become a kind of effective way that reduces frictional dissipation at the surface-coated wear-resistant coating of machine and device.So far, find and develop wear-resistant coating is material technology expert's a vital task always.
Researchist for example finds, for example, by the metallic element (: Ni, Ag, Cu etc.) of doping appropriate amount in metal nitride (: CrN, TiN, AlN etc.), prepare hard phase/soft phase nano-composite coating, the mechanical properties such as hardness, wear resistance and the toughness of coating obtain improvement in various degree.The coatings such as common transition metal nitride, carbide, boride have high hardness, but toughness is relatively low.Metal has good plasticity and toughness, but hardness is lower.
The hardness of block AlN only has 12GPa left and right, is not used as traditionally wear-resistant coating.But, add appropriate metallographic phase at AlN, can improve the over-all properties of AlN coating, existing research mainly concentrates in the hardness that improves coating.If the people such as J.Musil are at 573K, direct current (DC) bias is-prepare Al-Cu-N coating under the condition of 100V, work as P
n2while being less than 0.09Pa, coating is by Al
2cu forms mutually with AlN, and is increased to 0.12Pa or when higher as P, formation be amorphous coating, coating hardness reduces.
By document being done to further retrieval and being analyzed, also do not find that wear rate is lower than 4.0 × 10
-16m
3the wear-resisting hard coat of Al-Cu-N of/Nm nano composite structure.
Application publication number is that the Chinese invention patent application of CN102534493A discloses V-Al-N hard coat of a kind of nano composite structure and preparation method thereof, wherein, the V-Al-N hard coat of nano composite structure comprises AlN external phase and several VN crystal grains of crystalline structure, each VN crystal grain is wrapped up by the AlN external phase of crystalline structure, the AlN external phase of VN crystal grain and crystalline structure forms coherent interface, and its component list is shown (V
1-xal
x) N, wherein, 1-x is that 0.41～0.6, x is 0.4～0.59.The V-Al-N hard coat preparation of this nano composite structure: adopt magnetron sputtering technique, by direct current cathode sputtering metal V, sputter Al on intermediate frequency negative electrode, and with vacuum chamber in N
2solid/liquid/gas reactions generates the V-Al-N hard coat of nano composite structure.But the hardness of the V-Al-N hard coat of this nano composite structure and frictional behaviour need further to improve.
Summary of the invention
The deficiency existing in order to overcome prior art, the invention provides the wear-resisting hard coat of a kind of Al-Cu-N, and wear resistance is good.
The wear-resisting hard coat of a kind of Al-Cu-N, by AlN crystal phase and the phase composite of Cu crystal, wherein, Cu crystal is dispersed in AlN crystal mutually, and the interface between Cu crystal phase and AlN crystal phase is with Cu-Al key bonding;
In the wear-resisting hard coat of described Al-Cu-N, the atomic percentage conc of each element is as follows:
Al and N 74.6%～89%;
Cu 11%～25.4%；
Wherein, the atomic ratio of Al and N is 0.9～1:1.
When the atomic percentage conc of Cu is lower than 11% time, in coating, Cu exists with non-crystalline state, in use, because crystallisation procedure can occur the amorphous Cu of rising of temperature, therefore, affect the stable of coating, the wear resisting property of the wear-resisting hard coat of Al-Cu-N is not good, and when the atomic percentage conc of Cu is higher than 25.4% time, the hardness of coating significantly reduces, affect the abrasion resistance properties of coating, in the time that the atomic percentage conc of Cu is 11.0%～25.4%, the atomic ratio of Al and N is 0.9～1:1, and the wear-resisting hard coat of Al-Cu-N of the present invention has high-wearing feature.
As preferably, in the wear-resisting hard coat of described Al-Cu-N, the atomic percentage conc of each element is as follows:
Al and N 80%～89%;
Cu 11%～20%。
The atomic percentage conc of Cu is controlled at 11%～20%, the wear-resisting hard coat of Al-Cu-N forming under this atomic percentage conc, and its defective reduces, and has reduced the internal stress of the wear-resisting hard coat of Al-Cu-N, has improved the hardness of the wear-resisting hard coat of Al-Cu-N.
Further preferably, in the wear-resisting hard coat of described Al-Cu-N, the atomic percentage conc of each element is as follows:
Al and N 82.1%～85.3%;
Cu 14.7%～17.9%；
Wherein, the atomic ratio of Al and N is 1:1.
Known according to the wear-resisting hard coat of Al-Cu-N of embodiment 2,3,6,7,12 preparations, the wear-resisting hard coat of Al-Cu-N under this condition has very excellent abrasion resistance properties, and has good hardness.
More a step is preferred, and in the wear-resisting hard coat of described Al-Cu-N, the atomic percentage conc of each element is as follows:
Al 41.15%；
N 41.15%；
Cu 17.7%。
The wear-resisting hard coat of Al-Cu-N of preparing according to embodiment 7 is known, and the wear rate of the wear-resisting hard coat of Al-Cu-N under this condition is 1.2 × 10
-16m
3/ Nm, has the most excellent abrasion resistance properties, and can keep good hardness, and its hardness is close to 30GPa, and this hardness has been enough to meet user demand, thereby can greatly extend the work-ing life of mould, mechanical component etc.
In the wear-resisting hard coat of Al-Cu-N of the present invention, Cu and the N generation nitride that is difficult for reacting, there is certain interaction and form afterwards the hard phase/soft phase nano composite structure with Cu-Al key bonding in AlN and Cu, has improved hardness and the wear resistance of the wear-resisting hard coat of Al-Cu-N of the present invention at two-phase interface place.As preferably, the diffraction surfaces of described AlN crystal phase is 0002, also claim (0002) face, the diffraction surfaces of described Cu crystal phase is 111, also claim (111) face, interface between the Cu crystal phase of above-mentioned crystalline state and AlN crystal phase, with Cu-Al key bonding, forms more stable hard phase/soft phase nano composite structure, can improve better hardness and the wear resistance of the wear-resisting hard coat of Al-Cu-N of the present invention.
As preferably, the particle diameter of described Cu crystal phase is 1～10nm, the Cu crystal of this particle diameter can be dispersed in better mutually AlN crystal mutually in, Cu crystal phase can form stable interface with AlN crystal phase, thereby can further improve hardness and the wear resistance of the wear-resisting hard coat of Al-Cu-N of the present invention.
The wear-resisting hard coat of Al-Cu-N of the present invention, has the growth structure without column crystal densification, and its surfaceness, lower than 6.1nm, has improved the abrasion resistance properties of the wear-resisting hard coat of Al-Cu-N of the present invention greatly.
The present invention also provides a kind of Al-Cu-N preparation method of wear-resisting hard coat, adopts reaction magnetocontrol sputtering method, and workable, controllability is good, is easy to suitability for industrialized production.
A preparation method for the wear-resisting hard coat of Al-Cu-N, comprises the following steps:
Al target is arranged on intermediate frequency negative electrode, Cu target is arranged on direct current negative electrode, matrix is arranged on anode, the temperature of matrix is 200 DEG C～400 DEG C, pass into nitrogen, adopt the method for two target reaction magnetocontrol sputterings, by regulating dividing potential drop, the power density of Al target and the power density of Cu target of nitrogen, matrix is carried out to sputtering sedimentation, obtain the wear-resisting hard coat of Al-Cu-N.
In the present invention, adopt the sputter simultaneously of Al target and Cu target in two target reaction magnetocontrol sputterings, in the rete that has ensured to prepare, the homogeneity of composition, has avoided the uppity problem of composition in mechanical combination target.In addition, Cu is difficult for reacting with N, thereby the final coating forming is the nano-composite coating that AlN phase forms mutually with Cu.
As preferably, the dividing potential drop of described nitrogen is 0.2Pa～0.5Pa, and the power density of described Al target is 4.5～5.5W/cm
2, the power density of described Cu target is 0.1～0.5W/cm
2the power density of the power density of the dividing potential drop of nitrogen, Al target and Cu target is controlled in above-mentioned scope, can obtain the wear-resisting hard coat of elementary composition Al-Cu-N of specific atoms percentage composition, and the wear-resisting hard coat of Al-Cu-N is by AlN crystal phase and the phase composite of Cu crystal, Cu crystal is dispersed in AlN crystal mutually, interface between Cu crystal phase and AlN crystal phase is with Cu-Al key bonding, and the wear-resisting hard coat of Al-Cu-N of above-mentioned preparation has excellent abrasion resistance properties and good hardness.
As preferably, the intermediate frequency bias voltage of apply on intermediate frequency negative electrode-50V～-90V, suitably apply bias voltage, can impel the wear-resisting hard coat structure of prepared Al-Cu-N more fine and close, there is the growth structure without column crystal densification, greatly improved the wear resistance of the wear-resisting hard coat of Al-Cu-N of the present invention.
Compared with prior art, tool of the present invention has the following advantages:
One, the wear-resisting hard coat of Al-Cu-N of the present invention, there is certain interaction and form afterwards the hard phase/soft phase nano composite structure with Cu-Al key bonding in AlN crystal phase and Cu crystal, has greatly improved hardness and the wear resistance of the wear-resisting hard coat of Al-Cu-N of the present invention at two-phase interface place.The wear-resisting hard coat of Al-Cu-N of the present invention is the growth structure without column crystal densification, and coatingsurface roughness is little, and the hardness of rete and wear resisting property are good.
Two, the ratio H/E* of hardness and modulus can be used as an index weighing material wear-resistant performance, high H/E* ratio correspondence low wear rate, but be not that higher its wear rate of H/E* ratio is lower, the H/E* ratio of the wear-resisting hard coat of Al-Cu-N of the present invention was close to 0.1 o'clock, can obtain excellent abrasion resistance properties, its wear rate is 4.0 × 10
-16m
3below/Nm.In addition, also will consider and mate (as the rapid steel) of matrix modulus in actual application, the modulus of coating will approach and just be of practical significance with matrix modulus.Can be by improving hardness H, the method that reduces E* improves H/E*, but high rigidity is corresponding high-modulus often, thereby, wish that hardness still remains in a higher scope when modulus reduces, and the H/E* value of the wear-resisting hard coat of Al-Cu-N of the present invention wants high with respect to the coating and the Cu atomic percentage conc that do not add Cu lower than 11.0% coating, it is worth in 0.1 left and right, and therefore, the wear-resisting hard coat of Al-Cu-N of the present invention demonstrates excellent abrasion resistance properties.
Three, with respect to prior art, the wear-resisting hard coat of Al-Cu-N of the present invention has excellent abrasion resistance properties, and wear rate is lower than 4.0 × 10
-16m
3/ Nm, has reached the requirement of high-wearing feature, can be widely used in the fields such as the surfacecti proteon of mould, mechanical component, other frictional wear.
Four, the preparation method of the wear-resisting hard coat of Al-Cu-N of the present invention, adopts reaction magnetocontrol sputtering method, and it is workable, controllability good, be easy to suitability for industrialized production, has broad application prospects and good economic benefit.
Brief description of the drawings
Fig. 1 is the structural representation of the wear-resisting hard coat of Al-Cu-N of the present invention;
Fig. 2 is X-ray diffraction (XRD) figure of the wear-resisting hard coat of Al-Cu-N prepared of the coating prepared of comparative example 1 and comparative example 2 and embodiment 5, embodiment 6, embodiment 7 and embodiment 9;
In Fig. 3, scanning electronic microscope (SEM) sectional view of the coating that in Fig. 3, (a) prepared for comparative example 1, scanning electronic microscope (SEM) sectional view of the wear-resisting hard coat of Al-Cu-N that in Fig. 3, (b) prepared for embodiment 7;
In Fig. 4, x-ray photoelectron power spectrum (XPS) figure that Fig. 4 (a) is pure Cu, x-ray photoelectron power spectrum (XPS) figure of the wear-resisting hard coat of Al-Cu-N that Fig. 4 (b) is prepared for embodiment 7.
Embodiment
Comparative example 1～2 and embodiment 1～13
First matrix (M42 rapid steel 15mm × 16mm × 3mm) is cleaned, the ultrasonic cleaning 3 minutes at the temperature of 60 DEG C of first matrix to be put into model that Borer company produces be HT1401 washing composition, then the ultrasonic cleaning 3 minutes at the temperature of 50 DEG C of to put into model that Borer company produces be HT1233 washing composition, clean 0.5 minute the deionized water for ultrasonic of 45 DEG C again, the vacuum drying oven of finally matrix after cleaning being put into 95 DEG C toasts 3 minutes, puts on the rotatable base frame of vacuum chamber after oven dry.
Al target is arranged on intermediate frequency negative electrode, and the intermediate frequency bias voltage of apply-50V～-90V, Cu target is arranged on direct current negative electrode, M42 matrix be arranged in sample table and and anodic bonding, sample table temperature is 200 DEG C～400 DEG C, be 200 DEG C～400 DEG C by the temperature of matrix after thermal conduction, pass into nitrogen, regulate N
2dividing potential drop be 0.2Pa～0.5Pa, adopt the method for two target reaction magnetocontrol sputterings, by regulating the Sputtering power density of Al target and Cu, regulate the content of Cu in coating, matrix is deposited, obtain the wear-resisting hard coat of Al-Cu-N.The Sputtering power density of Al target is 4.5～5.5W/cm
2, the Sputtering power density of Cu target is 0.1～0.5W/cm
2.
In the method for two target reaction magnetocontrol sputterings, the experiment parameter of comparative example 1～2 and embodiment 1～13 is as shown in table 1, and wherein, Cu content is Cu atomic percentage conc, and the atomic percentage conc of Al and N is 100%-Cu atomic percentage conc.
Table 1
Adopt structural parameter and the physicals of the coating in following experimental technique assessment comparative example and embodiment.
The composition of coating
Adopt EDS to measure the composition that each film is, its configuration EDAX Si (Li) probe, calibrates by ZAF, and the selected area of each sample is not less than 4000 μ m
2region, measures the mean value of its composition.
The crystalline structure of coating
Adopt German Bruker D8Advance diffractometer, utilize the incident of Cu K alpha-ray, X-ray tube is controlled at 40KV and 40mA, measures the crystalline structure that each film is, utilizes nickel filter to filter out K
βray, it is 20 °～80 ° that search angle is set.
The measurement of hardness and modulus
The model that adopts American MTS to produce is that NANO G200 nano-hardness tester is measured hardness and the Young's modulus that each film is, its configuration tetrahedron Berkvich pressure head, by setting compression distance (80～100nm), load changes with compression distance, after 6 matrix dots of each sample measurement, averages.
Chemical state
Adopt the Axis ULTRA DLD x-ray photoelectron power spectrum (XPS) of Kratos company to analyze the inside chemical environment of coating, wherein light source is monochromatic Al Ka (1486.6eV), and when work, chamber internal gas pressure is better than 5 × 10
-9torr.
Wear rate
Frictional wear experiment adopts CETR UMT-3 frictional wear instrument, and temperature is room temperature (25 DEG C), and relative humidity is 50 ± 5%, the WC-Co ball that antithesis ball is 6.0mm, and loading force is 2N, planing speed 0.05m/s, coasting distance 1000m.
The structural representation of the wear-resisting hard coat of Al-Cu-N of the present invention, as shown in Figure 1, the wear-resisting hard coat of Al-Cu-N is by AlN crystal phase and the phase composite of Cu crystal, wherein, Cu crystal is dispersed in AlN crystal mutually, and the interface between Cu crystal phase and AlN crystal is with Cu-Al key bonding.
X-ray diffraction (XRD) figure of the wear-resisting hard coat of Al-Cu-N prepared by coating prepared by comparative example 1 and comparative example 2 and embodiment 5, embodiment 6, embodiment 7 and embodiment 9, as shown in Figure 2, in the time that the content of Cu is 0, be in comparative example 1, in coating, be mainly diffraction surfaces for (0002) face and (10-11) AlN of face; In the time that the atomic percentage conc of Cu is 7.3%, be in comparative example 2, AlN(10-11 in coating) peak disappear, and in XRD, there is no a peak of Cu, this explanation Cu be non-crystal structure, this coating in use, because crystallisation procedure can occur the amorphous Cu of rising of temperature, therefore, can affect the stability of coating.And in the XRD figure of the wear-resisting hard coat of Al-Cu-N of preparing at embodiments of the invention 5,6,7,9, in the wear-resisting hard coat of Al-Cu-N, only there is Cu(111) peak and AlN(0002) peak, illustrate that the wear-resisting hard coat of Al-Cu-N is made up of mutually the Cu phase of crystalline state and the AlN of crystalline state.
Fig. 3 is scanning electronic microscope (SEM) sectional view of the wear-resisting hard coat of Al-Cu-N prepared of the coating prepared of comparative example 1 and embodiment 7, wherein, scanning electronic microscope (SEM) sectional view of the coating that in Fig. 3, (a) prepared for comparative example 1, scanning electronic microscope (SEM) sectional view of the wear-resisting hard coat of Al-Cu-N that in Fig. 3, (b) prepared for embodiment 7, as shown in Figure 3, in Fig. 3 (a), in the time that the content of Cu is 0, be in comparative example 1, coating is the columnar crystal structure of short texture, its hardness and wear resisting property are very low, in Fig. 3 (b), the wear-resisting hard coat of Al-Cu-N of the present invention is the growth structure without column crystal densification, and surfaceness is little, hardness and the wear resisting property of the wear-resisting hard coat of Al-Cu-N of the present invention are good.
In Fig. 4, x-ray photoelectron power spectrum (XPS) figure that Fig. 4 (a) is pure Cu, x-ray photoelectron power spectrum (XPS) figure of the wear-resisting hard coat of Al-Cu-N that Fig. 4 (b) is prepared for embodiment 7.As shown in Figure 4, in the wear-resisting hard coat of Al-Cu-N prepared by embodiment 7, having Cu-Al key, there is chemical action in interface in this explanation AlN and Cu two-phase, and the interface between Cu crystal phase and AlN crystal is with Cu-Al key bonding.
Known by electron scanning micrograph, in the wear-resisting hard coat of Al-Cu-N of embodiment 1～13 preparation, the particle diameter of Cu crystal phase is 1～10nm.
Part-structure parameter and the physicals of the coating of the wear-resisting hard coat of Al-Cu-N of the embodiment of the present invention 1～13 and comparative example 1,2 preparations are as shown in table 2.
Table 2
As known from Table 2, the wear-resisting hard coat of Al-Cu-N of the present invention, its hardness is far above the coating (comparative example 1) of not adding Cu, H/E* value is substantially close to 0.1, and what this H/E* value was corresponding is low wear rate and low roughness, as embodiment 7, in the time that the content of Cu is 17.7%, its hardness is close to 30GPa, and H/E* value is 0.11, and wear rate and roughness only have 1.2 × 10
-16m
3/ Nm and 3.4nm, have very excellent abrasion resistance properties.
Claims (9)
1. the wear-resisting hard coat of Al-Cu-N, is characterized in that, by AlN crystal phase and the phase composite of Cu crystal, wherein, Cu crystal is dispersed in AlN crystal mutually, and the interface between Cu crystal phase and AlN crystal phase is with Cu-Al key bonding;
In the wear-resisting hard coat of described Al-Cu-N, the atomic percentage conc of each element is as follows:
Al and N 74.6%～89%;
Cu 11%～25.4%；
Wherein, the atomic ratio of Al and N is 0.9～1:1.
2. the wear-resisting hard coat of Al-Cu-N according to claim 1, is characterized in that, in the wear-resisting hard coat of described Al-Cu-N, the atomic percentage conc of each element is as follows:
Al and N 80%～89%;
Cu 11%～20%。
3. the wear-resisting hard coat of Al-Cu-N according to claim 2, is characterized in that, in the wear-resisting hard coat of described Al-Cu-N, the atomic percentage conc of each element is as follows:
Al and N 82.1%～85.3%;
Cu 14.7%～17.9%；
Wherein, the atomic ratio of Al and N is 1:1.
4. the wear-resisting hard coat of Al-Cu-N according to claim 3, is characterized in that, in the wear-resisting hard coat of described Al-Cu-N, the atomic percentage conc of each element is as follows:
Al 41.15%；
N 41.15%；
Cu 17.7%。
5. according to the wear-resisting hard coat of Al-Cu-N described in claim 1～4 any one, it is characterized in that, the diffraction surfaces of described AlN crystal phase is 0002, and the diffraction surfaces of described Cu crystal phase is 111.
6. according to the wear-resisting hard coat of Al-Cu-N described in claim 1～4 any one, it is characterized in that, the particle diameter of described Cu crystal phase is 1～10nm.
7. according to the preparation method of the wear-resisting hard coat of Al-Cu-N described in claim 1～6 any one, it is characterized in that, comprise the following steps:
Al target is arranged on intermediate frequency negative electrode, Cu target is arranged on direct current negative electrode, matrix is arranged on anode, the temperature of matrix is 200 DEG C～400 DEG C, pass into nitrogen, adopt the method for two target reaction magnetocontrol sputterings, by regulating dividing potential drop, the power density of Al target and the power density of Cu target of nitrogen, matrix is carried out to sputtering sedimentation, obtain the wear-resisting hard coat of Al-Cu-N.
8. the preparation method of the wear-resisting hard coat of Al-Cu-N according to claim 7, is characterized in that, the dividing potential drop of described nitrogen is 0.2Pa～0.5Pa, and the power density of described Al target is 4.5～5.5W/cm
2, the power density of described Cu target is 0.1～0.5W/cm
2.
9. the preparation method of the wear-resisting hard coat of Al-Cu-N according to claim 7, is characterized in that, the intermediate frequency bias voltage of apply on intermediate frequency negative electrode-50V～-90V.
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2017212879A1 (en) * | 2016-06-07 | 2017-12-14 | 株式会社コベルコ科研 | Al alloy sputtering target |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101660160A (en) * | 2009-09-14 | 2010-03-03 | 南昌航空大学 | Nitride compound protective coating with high hardness and high thermal shock stability |
| TW201226601A (en) * | 2010-12-20 | 2012-07-01 | Hon Hai Prec Ind Co Ltd | Housing and method for making the same |
| CN102534493A (en) * | 2012-01-13 | 2012-07-04 | 中国科学院宁波材料技术与工程研究所 | V-Al-N hard coating with nano composite structure and preparation method thereof |
| CN102560355A (en) * | 2012-01-11 | 2012-07-11 | 中国科学院宁波材料技术与工程研究所 | V-Si-N nanometer composite hard coating and preparation method thereof |
-
2013
- 2013-05-10 CN CN201310174222.0A patent/CN104141107B/en active Active
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101660160A (en) * | 2009-09-14 | 2010-03-03 | 南昌航空大学 | Nitride compound protective coating with high hardness and high thermal shock stability |
| TW201226601A (en) * | 2010-12-20 | 2012-07-01 | Hon Hai Prec Ind Co Ltd | Housing and method for making the same |
| CN102560355A (en) * | 2012-01-11 | 2012-07-11 | 中国科学院宁波材料技术与工程研究所 | V-Si-N nanometer composite hard coating and preparation method thereof |
| CN102534493A (en) * | 2012-01-13 | 2012-07-04 | 中国科学院宁波材料技术与工程研究所 | V-Al-N hard coating with nano composite structure and preparation method thereof |
Non-Patent Citations (2)
| Title |
|---|
| J.MUSIL ET AL.: "Hard and superhard nanocomposite Al-Cu-N films prepared by magnetron sputtering", 《SURFACE AND COATINGS TECHNOLOGY》, vol. 142144, 31 December 2001 (2001-12-31) * |
| M.SHARIATI ET AL.: "Effect of annealing temperature on properties of Al-Cu-N thin films deposited by DC magnetron sputtering", 《SURFACE AND COATINGS TECHNOLOGY》, vol. 201, 10 August 2006 (2006-08-10) * |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2017212879A1 (en) * | 2016-06-07 | 2017-12-14 | 株式会社コベルコ科研 | Al alloy sputtering target |
| JP2017218627A (en) * | 2016-06-07 | 2017-12-14 | 株式会社コベルコ科研 | Al alloy sputtering target |
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