CN104112969A - Method for acquiring stable laser tube formed by multiple discharging tubes in parallel - Google Patents
Method for acquiring stable laser tube formed by multiple discharging tubes in parallel Download PDFInfo
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- CN104112969A CN104112969A CN201310134945.8A CN201310134945A CN104112969A CN 104112969 A CN104112969 A CN 104112969A CN 201310134945 A CN201310134945 A CN 201310134945A CN 104112969 A CN104112969 A CN 104112969A
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Abstract
Provided is a method for acquiring a stable laser tube formed by multiple discharging tubes in parallel. The method is mainly used for improving the performance of a sealed carbon dioxide laser device. The method is mainly characterized in that the laser tube formed by multiple discharging tubes in parallel is composed of two or more discharge tubes and a laser resonator; the optical elements of the laser resonator are all installed on an optical bridge with good rigid such that laser resonator with good stability is formed; and all discharging tubes are flexibly connected with the optical bridge through elastic or flexible bellows assemblies. The laser tube produced by such method is not affected by the discharging tubes. The heating and deformed states of the discharging tubes are independent of the laser resonator. The laser tube may operate stably.
Description
Technical field
The invention belongs to laser field, be mainly used in improving the performance of seal-off carbon dioxide laser.
Background technology
Seal-off carbon dioxide laser refers to a kind of glass tube laser (being designated hereinafter simply as laser tube).Principal character is that the disposable working gas that laser is mixed is filled with in laser tube, then be closed, no longer open, working gas is excited and produces laser in process gas discharge, as long as electric discharge just can make Laser output work, until laser tube work is to scrapping.The power level of this laser tube is generally middle low power (referring to that 500W is following), and the life-span is 1000-5000 hour.For example, due to this laser tube low price (the laser tube price of a 60W is 1000 yuans of left and right), the laser tube market demand is large at present, and laser tube has just exceeded 100000 in Chinese annual requirement, has just exceeded 200000 in the whole world.Current international power level is 50-100W/M, and the power of 1 meter of long laser tube is 50-100W in other words.If do the laser tube of a 500W, laser tube will be accomplished to 10M is long.Obviously so long laser tube is very inconvenient in application, has greatly limited the application of laser tube.Therefore, people are and way manufacture laser tube that laserresonator (hereinafter to be referred as optical cavity) is connected in parallel with two-tube or multitube (refer to 3 pipes and 3 more than pipe) just, obtains the shorter laser tube of the higher length of power with this.For example, can obtain the laser tube of 500W power by the laser tube way in parallel and optical cavity series connection of 4 2.5M, laser tube entirety just only has 2.5M length instead of 10M length.Strictly speaking, then laser tube is at this moment added optical cavity and is formed by several discharge tube parallel connections; And these discharge tubes are wherein separately and be laser tube when lens combination, optical cavity is the optical cavity that all discharge tubes are together in series; In order to narrate conveniently, this specification is not made any distinction between laser tube and discharge tube unit wherein, is completely called laser tube or discharge tube; Below the laser of this more than two or two discharge tube parallel connection, optical cavity series connection is called to multitube parallel laser tube.But the most obvious problem of this multitube parallel laser tube is laser tube job insecurity.If the single laser tube of a 120W can be worked 2000 hours, stable work time in parallel with 4 laser tubes and the 500W laser tube that optical cavity series connection obtains even can not exceed 100 hours.The short problem outstanding main cause like this of working life is: the optical cavity of common laser pipe sticks with glue or other method is fixed in glass discharge vessel, the existing electric discharge of glass discharge vessel makes the function that gas excites have again the function that supports optical cavity, and when laser tube work, heating and other reason generation distortion cause optical cavity imbalance.One need not be only had an output coupling mirror and a completely reflecting mirror by single laser tube in parallel, they directly fixing (bonding or firmly envelope) at the two ends of glass tube, if glass tube does not deform at work, laser just can steady in a long-term be exported, just affect Laser output if deformed, distortion does not seriously just have Laser output.And glass tube in parallel will increase the quantity of completely reflecting mirror, 1 glass tube of every multi-parallel will be turned back light path 1 time and be increased by 1 or 2 completely reflecting mirror, and cavity length has also increased the length of 1 pipe thereupon.The laser tube that is for example 2.5M by 4 length cavity length in parallel and the 500W laser tube that optical cavity series connection obtains is 10M, has 7 the quantity of completely reflecting mirror more.Long optical cavity and many like this eyeglasses like this, if the actual effect of the laser tube obtaining according to the above-mentioned way that is directly fixed on glass tube two ends be glass tube at work due to gas discharge heating or other is former thereby produce distortion, so in many eyeglasses, have the position distortion accumulation serious or multiple slight deformation of will cause laser tube not work.Generally speaking, the incident ray of the eyeglass of laser tube or reflected ray overlap in the ideal situation with optical axis, and the incident ray of concrete laser tube eyeglass or reflected ray and optical axis always have certain angle to depart from.The angle of the laser tube that length is 1M departs from and does not allow to exceed 3 seconds (within 1 second, be 1 degree 1/3600th), more just can not work greatly.It is harsher that this angle of the laser tube of a 10M departs from requirement, do not allow to depart from 1 second, this means that the flexural deformation of glass tube and the deflection distortion of eyeglass all must be controlled in several microns.The distortion of solid space can occur during glass tube actual two-tube or multitube parallel discharges, and meeting this deflection is impossible in the harshness requirement of micron number magnitude.Therefore, laser tube more than 400W is little in actual applications, can not meet the needs of actual production far away.
Summary of the invention
The shortcoming of, job insecurity shorter for traditional multitube parallel laser tube life-span, the object of this invention is to provide a kind of method that obtains stable multitube parallel laser tube.Like this, multitube parallel laser tube can long-term stable operation.
To achieve these goals, main method of the present invention is: two or many laser tubes are together in parallel, and the optical cavity (comprising the optical element of all composition optical cavities) of series connection is arranged on the light bridge that stability is very high, light bridge is connected with glass laser pipe flexibility or elasticity, in fact optical cavity departs from glass tube like this, and optical cavity is not subject to the impact of glass tube distortion; Because light bridge is an absolute construction that substantially departs from, is not subject to other component affects with other parts, so just stable as long as light bridge is stablized optical cavity, laser tube work is also therefore stable.Light bridge described here refers to the support of a rigidity, and basic structure has multiple, and its core is to have two light bridge end plates and 3 or 4 light bridge support bars to become the overall structure of a rigidity or be directly welded as the overall structure of a rigidity through nut check; Can also be round tubular structure or square tubular structure or other structure; These structures can be screw threads for fastening structure or direct Welding Structure; The material of composition light bridge can be metal material or nonmetallic materials.The light bridge of design be generally symmetrical, because the single laser tube of the Length Ratio of light bridge is slightly long and less in width and short transverse symmetry and yardstick, only there is obvious variation and change and do not remember to ignore compared with I in other direction at length direction if therefore run into variation of ambient temperature, only having length variations and the industry or the medical laser optical cavity that do not have lens angle to change also can be ignored and not remember the impact of Laser output.This is because a small amount of variation of cavity length only can affect laser beam longitudinal mode and substantially not affect transverse mode, and most industrial processes or therapeutic medical laser tube are not consider longitudinal mode and only consider transverse mode.
The glass tube that laser tube of the present invention discharges in specific works is still the same with original laser tube can produce heating, distortion, but its heating, distortion only limit to glass tube self, and because optical cavity is independent of glass tube, therefore optical cavity can not produce distortion.In this structure, even if exceeding 500 microns, glass tube distortion can not produce substantial effect to Laser output yet.
According to different needs; it is even higher to 1000W that such laser tube power can be designed as 100W, and laser beam mode is basic mode or low-order mode, and the life-span can reach more than 5000 hours; if the gas in electric discharge can be decomposed effectively and suppresses, the life-span can exceed 10000 hours.In addition, if the valve that can repeatedly change gas is installed on such laser tube, realize the repeatedly regeneration of laser gas, the life-span can extend to several ten thousand hours; Or in laser tube, increase a vacuum exhaust and gas charging system, realize the repeatedly replacing of laser gas, equally also can be by the life of laser tube to several ten thousand hours.
Visible, superiority of the present invention is: 1, the optical cavity of laser tube is stable, thereby realizes the long-term stable operation of laser tube; 2, can realize being multiplied of laser power by the way of multitube parallel and optical cavity series connection, power accomplishes that 1000W also can realize above; 3, by Gas reclamation or more transducing realize the long-life work of laser tube; 4, be conducive to laser tube practical of mid power cheaply.
Brief description of the drawings
The signal of one of basic structure that the present invention adopts, as Fig. 1, be mainly the structure that has represented two-tube parallel connection, but this structure is easy to be extrapolated to the situation of multitube parallel in Fig. 1.In Fig. 1, (1) and (2) is two glass discharge vessel assemblies; (3), (4), (5) and (6) are 4 elastic bellows assemblies (enlarged drawing of bellows component is Fig. 2, and bellows component can be replaced by other flexible member) with adpting flange; (7) and (8) be the completely reflecting mirrors (as required, the angle of turnover can be any value of wishing according to designer) that make light path turnover 90 degree; (9) be the completely reflecting mirror of optical cavity; (10) be laser output window; (11) be light axle assemble; (12) be the turning mirror mount pad (being called for short turnover microscope base) with potted component; (13) be speculum with potted component and the mount pad (output microscope base) of output window; (14) and (15) be respectively two groups by turnover microscope base and output microscope base be fixed on the screw on light bridge.Because what difference other element and simple glass laser tube do not have, this specification is not described other parts.
The basic structure of above-mentioned smooth bridge has several, wherein two kinds of this description, and signal is as Fig. 3 and Fig. 4 respectively.In Fig. 3, (16) and (17) be two light bridge end plates, (18), (19), (20) and (21) 4 light bridge support bars (solid or hollow can), (22), (23), (24) and (25) are 4 locking nuts, also can directly two light bridge end plates and 4 light bridge support bars be welded without locking nut.Fig. 4 is identical with Fig. 3 basic thought, and different is only to have adopted 3 light bridge support bars.Be not difficult to find out, light bridge can adopt other structure, and for example round tubular structure or square tubular structure can be to use screw fastening structure, can be also Welding Structures.
From Fig. 1, obviously find out, all optical cavity elements of laser tube of the present invention are mounted on light bridge (11), optical cavity and discharge glass tube flexibly connect by flexible member, and therefore optical cavity is independent of discharge glass tube after regulating, and are not subject to the impact of discharge glass tube distortion.Because light bridge is symmetric design, as long as the rigidity of light bridge is enough good, just can not produce torsional deformation, therefore optical cavity energy long-term stable operation.
Embodiment
Specific embodiments of the invention is as follows: by the glass tube laser tube of 4 1800mm, according to mode parallel connection of the present invention, discharge tube diameter 15mm, is filled with CO after vacuumizing
2: N
2: the mist that the mixed proportion of He is 1: 3: 5 is operation material, gas pressure is 4kPa, trigger voltage 24-32kV, electric discharge operating voltage 18-26kV, single tube discharging current 20-30mA, the total current 80-120mA of 4 pipes, the gold-plated completely reflecting mirror that optical cavity is 10000mm by radius of curvature, 6 turning mirrors are the plane ZnSe mirror composition that plane completely reflecting mirror and output transmitance are 70%, connect Laser Power Devices, under discharge condition, optical cavity is adjusted to optimum state, more than such laser tube power can reach 500W, laser beam mode is basic mode, life-span can reach more than 5000 hours, if the gas in electric discharge can be decomposed effectively and suppresses, life-span can exceed 10000 hours.
Claims (3)
1. one kind obtains the method for stable multitube parallel laser tube, it is characterized in that: two or many laser tubes are together in parallel, and the optical cavity (comprising the optical element of all composition optical cavities) of series connection is arranged on the light bridge that stability is very high, light bridge is connected with glass laser pipe flexibility or elasticity, in fact optical cavity departs from glass tube like this, and optical cavity is not subject to the impact of glass tube distortion; This method has nothing to do the states such as the heating distortion of discharge tube and optical cavity, does not affect work and the Laser output of laser tube.
2. by a kind of method that obtains stable multitube parallel laser tube claimed in claim 1, it is characterized in that: the basic structure of light bridge has multiple, its core is to have two light bridge end plates and 3 or 4 light bridge support bars to become the overall structure of a rigidity or be directly welded as the overall structure of a rigidity through nut check; Can also be round tubular structure or square tubular structure or other structure; These structures can be screw threads for fastening structure or direct Welding Structure; The material of composition light bridge can be metal material or nonmetallic materials.
3. by a kind of method that obtains stable multitube parallel laser tube claimed in claim 1; it is characterized in that: according to different needs; it is even higher to 1000W that such laser tube power can be designed as 100W; laser beam mode is basic mode or low-order mode; life-span can reach more than 5000 hours; if the gas in electric discharge can be decomposed effectively and suppresses, the life-span can exceed 10000 hours.In addition, if the valve that can repeatedly change gas is installed on such laser tube, realize the repeatedly regeneration of laser tube, the life-span can extend to several ten thousand hours; Or in laser tube, increase a vacuum exhaust and gas charging system, realize the repeatedly replacing of laser gas, equally also can be by the life of laser tube to several ten thousand hours.
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CN201310134945.8A CN104112969A (en) | 2013-04-18 | 2013-04-18 | Method for acquiring stable laser tube formed by multiple discharging tubes in parallel |
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CN201310134945.8A CN104112969A (en) | 2013-04-18 | 2013-04-18 | Method for acquiring stable laser tube formed by multiple discharging tubes in parallel |
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Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN105514769A (en) * | 2016-02-01 | 2016-04-20 | 上海凯溯激光科技有限公司 | Industrial sealed-off carbon dioxide laser tube |
CN108923229A (en) * | 2018-07-25 | 2018-11-30 | 蔡鼎福 | A kind of novel carbon dioxide laser tube |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1255912C (en) * | 2003-11-24 | 2006-05-10 | 周迅 | Middle power carbon dioxide laser tube |
CN201113208Y (en) * | 2007-09-20 | 2008-09-10 | 陈清明 | Sealed carbon dioxide laser employing multi-pipe parallel connection and optical cavity cascade connection |
CN201345496Y (en) * | 2009-01-22 | 2009-11-11 | 丁健君 | Static gas laser generating device |
US20140247845A1 (en) * | 2011-09-05 | 2014-09-04 | Alltec Angewandte Laserlicht Technologie Gmbh | Laser Device and Method for Generating Laser Light |
-
2013
- 2013-04-18 CN CN201310134945.8A patent/CN104112969A/en active Pending
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1255912C (en) * | 2003-11-24 | 2006-05-10 | 周迅 | Middle power carbon dioxide laser tube |
CN201113208Y (en) * | 2007-09-20 | 2008-09-10 | 陈清明 | Sealed carbon dioxide laser employing multi-pipe parallel connection and optical cavity cascade connection |
CN201345496Y (en) * | 2009-01-22 | 2009-11-11 | 丁健君 | Static gas laser generating device |
US20140247845A1 (en) * | 2011-09-05 | 2014-09-04 | Alltec Angewandte Laserlicht Technologie Gmbh | Laser Device and Method for Generating Laser Light |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN105514769A (en) * | 2016-02-01 | 2016-04-20 | 上海凯溯激光科技有限公司 | Industrial sealed-off carbon dioxide laser tube |
CN108923229A (en) * | 2018-07-25 | 2018-11-30 | 蔡鼎福 | A kind of novel carbon dioxide laser tube |
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Application publication date: 20141022 |