CN104103564A - Substrate transfer method and system - Google Patents

Substrate transfer method and system Download PDF

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Publication number
CN104103564A
CN104103564A CN201310129916.2A CN201310129916A CN104103564A CN 104103564 A CN104103564 A CN 104103564A CN 201310129916 A CN201310129916 A CN 201310129916A CN 104103564 A CN104103564 A CN 104103564A
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China
Prior art keywords
substrate
support plate
portal frame
row
listed
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Granted
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CN201310129916.2A
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Chinese (zh)
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CN104103564B (en
Inventor
赵海洋
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Beijing North Microelectronics Co Ltd
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Beijing North Microelectronics Co Ltd
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Priority to CN201310129916.2A priority Critical patent/CN104103564B/en
Publication of CN104103564A publication Critical patent/CN104103564A/en
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
    • H01L21/67778—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading involving loading and unloading of wafers
    • H01L21/67781—Batch transfer of wafers

Abstract

The embodiment of the invention provides a substrate transfer method and a system, so as to solve the problem that the working efficiency is low as a support plate is not fully provided with cells in the prior art. The method comprises steps: when substrates are transferred to the support plate from a charging platform and the positions where the substrates need to be placed on the support plate are acquired, wherein the support plate is a support plate of M rows*N columns; according to the fact of whether positions where the substrates need to be placed exist in each row on the support plate, a gantry is controlled to acquire substrates from the charging platform, wherein the gantry is a gantry of M rows*1 column; starting from the first column of the support plate, the gantry is controlled to sequentially place the substrates on the positions where the substrates need to be placed on the support plate; and whether positions where the substrates are not placed but the substrates need to be placed on the support plate exist are judged, if the positions exist, the step in which the gantry is controlled to acquire substrates from the charging platform according to the fact of whether positions where the substrates need to be placed exist in each row on the support plate is carried out. According to the embodiment of the invention, the efficiency of transferring the substrates from the charging platform and transferring the substrates to a discharging platform form the support plate is improved.

Description

A kind of substrate transmission method and system
Technical field
The embodiment of the present invention relates to apparatus and process control technology field, particularly relates to a kind of substrate transmission method and system.
Background technology
In apparatus and process control procedure, relate to the transmission of substrate.For example, in the manufacturing process of solar battery sheet, during material loading, need to during blanking, cell piece need to be transmitted to blanking bench from support plate by cell piece (substrate) from feeding platform to carrier plate transmission, etc.
With plasma enhanced chemical vapor deposition (Plasma Enhanced Chemical Vapor Deposition, PECVD) be example, PECVD refers to by microwave or radio frequency etc. and makes the gas ionization that contains film composed atom, in part, form plasma, and plasma chemistry activity is very strong, be easy to react, on substrate, deposit desired film.
In the manufacturing process of solar battery sheet, adopt pecvd process more.With reference to Fig. 1, be the basic framework figure of PECVD system, this system can comprise: 1, loading stage; 2, load chamber; 3, process cavity; 4, unloading chamber; 5, relieving platform; 6, recovery system.In PECVD system, cell piece (substrate) is loaded onto on support plate in loading stage region, enter loading chamber and carry out the pre-heat treatment, after substrate reaches technological temperature requirement, be transferred into process cavity and carry out pecvd process, then by unloading chamber, spread out of and arrive relieving platform (relieving platform and loading stage are all can lifting), after relieving platform drops to lower floor by support plate, pass to recovery system, be then transferred to loading stage below, be raised to loading stage upper strata.
Wherein, loading stage can comprise feeding platform and blanking bench, and the primary structure of loading stage is portal frame, and cell piece is all used portal frame to complete while transmitting from feeding platform to carrier plate transmission with from support plate to blanking bench.
At present, cell piece is during from feeding platform to carrier plate transmission, by manipulator, from feeding platform, get cell piece, be placed on transmission belt, from the first row of support plate, first portal frame judges that the row of n on support plate need the position of placing battery plate, then according to this position, from transmission belt, gets cell piece, then the n that cell piece is placed into support plate is listed; Then return to according to the method described above transmission belt and get the cell piece of n+1 row, n+1 row cell piece is placed on support plate.When cell piece transmits from support plate to blanking bench, from last row of support plate, portal frame takes off the cell piece of n row, and the cell piece of n row is placed into blanking bench; Then return to support plate and get the cell piece of n-1 row, the cell piece of n-1 row is placed into blanking bench.
Said method is applicable to occupy on support plate the situation of substrate.But, when carrying out the demands such as system experimentation or judgement substrate technique inequality, on support plate, be not need to occupy substrate.In this case, adopt each row on said method support plate all to need portal frame to come and go operation once, therefore will greatly reduce operating efficiency.
Summary of the invention
The embodiment of the present invention provides a kind of substrate transmission method and system, the low problem of operating efficiency while not occupying cell piece to solve current technology on support plate.
In order to address the above problem, the invention discloses a kind of substrate transmission method, it is characterized in that, comprising:
When substrate is transferred to support plate from feeding platform, obtain the position that needs to place substrate on support plate, described support plate be M capable * support plate of N row, M, N are positive integer;
According to whether there being the position that need to place substrate in every a line on support plate, control portal frame and obtain substrate from feeding platform, described portal frame be M capable * portal frame of 1 row;
From the first row of support plate, control portal frame and successively described substrate is placed into the position that needs to place substrate on support plate;
Judge on support plate and need to place the position that in the position of substrate, whether also substrate is not placed in existence, if exist, return according to whether there being the position that need to place substrate in every a line on support plate, control portal frame and from feeding platform, obtain the step of substrate.
Alternatively, described according to whether there being the position that need to place substrate in every a line on support plate, control portal frame and obtain substrate from feeding platform, comprising:
From the first row of support plate, judge line by line in the current line of support plate whether have the position that need to place substrate;
If exist, control portal frame and obtain a substrate from feeding platform, and a described substrate is placed in row corresponding with the current line of described support plate on portal frame.
Alternatively, described from the first row of support plate, control portal frame and successively described substrate is placed into the position that needs to place substrate on support plate, comprising:
When portal frame m is capable while there is substrate, judge on support plate whether n is listed as m capable is the position that need to place substrate;
When n is listed as the position of m behavior needs placement substrate on support plate, judge on support plate, the capable n+1 of m is listed as in the capable N row of m whether have the position that need to place substrate;
When the capable n+1 of m is listed as and does not have the position that need to place substrate in the capable N of m row on support plate, control portal frame and the capable substrate of portal frame m is placed on to n on support plate to be listed as m capable;
On support plate, the capable n+1 of m is listed as in the capable N of m row and exists in the time of need to placing the position of substrate, controls portal frame and the capable substrate of portal frame m is not placed on to n on support plate to be listed as m capable;
Wherein, m=1,2,3 ..., M; N=1,2,3 ..., N.
On the other hand, the invention also discloses a kind of substrate transmission method, it is characterized in that, comprising:
When substrate is during from carrier plate transmission to blanking bench, obtain the position of having placed substrate on support plate, described support plate be M capable * support plate of N row, M, N are positive integer;
According to whether there being the position of having placed substrate in every a line on support plate, from the N row of support plate, control portal frame has been placed successively the position of substrate and has been taken off substrate from support plate, and described substrate is placed into blanking bench; Described portal frame be M capable * 1 row portal frame;
Judge the substrate that on support plate, whether also existence is not taken off, if exist, return according to whether there being the position of having placed substrate in every a line on support plate, from the N row of support plate, control portal frame and from support plate, placed successively the step that substrate is taken off in the position of substrate.
Alternatively, described according to whether there being the position of having placed substrate in every a line on support plate, from the N row of support plate, control portal frame has been placed successively the position of substrate and has been taken off substrate from support plate, comprising:
When the position of substrate has been placed in the capable existence of m on support plate, judge on support plate whether n is listed as m capable is the position of having placed substrate;
When n is listed as m behavior and has placed the position of substrate on support plate, judge the capable substrate that whether exists of m of portal frame;
When the m of portal frame is capable while there is not substrate, control portal frame and take off n on support plate and be listed as the substrate that m is capable, and n on described support plate is listed as to substrate that m is capable, and to be placed into the m of portal frame capable;
When the m of portal frame is capable while there is substrate, control portal frame and do not take off n on support plate and be listed as the substrate that m is capable;
Wherein, m=1,2,3 ..., M; N=N, N-1, N-2 ..., 1.
On the other hand, the invention also discloses a kind of substrate transmission system, it is characterized in that, comprising:
Material loading position acquisition module, for when substrate is transferred to support plate from feeding platform, obtains the position that needs to place substrate on support plate, described support plate be M capable * support plate of N row, M, N are positive integer;
Substrate acquisition module, for whether having according to every a line on support plate the position that need to place substrate, controls portal frame and obtains substrate from feeding platform, described portal frame be M capable * portal frame of 1 row;
Substrate placement module, for the first row from support plate, controls portal frame and successively described substrate is placed into the position that needs to place substrate on support plate;
Position judging module, for judging the position whether also substrate is not placed in existence, position that needs to place substrate on support plate;
When judgment result is that of described position judging module exists, described substrate acquisition module, again according to whether there being the position that need to place substrate in every a line on support plate, is controlled portal frame and is obtained substrate from feeding platform.
Alternatively, described substrate acquisition module comprises:
Judge line by line submodule, for the first row from support plate, judge line by line in the current line of support plate whether have the position that need to place substrate;
Obtain submodule, for, controlling portal frame and obtain a substrate from feeding platform, and a described substrate is placed in row corresponding with the current line of described support plate on portal frame while judging that line by line judgment result is that of submodule exists when described.
Alternatively, described substrate placement module comprises:
The first material loading judgement submodule, for when portal frame m is capable while there is substrate, judges on support plate whether n is listed as m capable is the position that need to place substrate;
The second material loading judgement submodule, when being listed as m behavior needs and placing the position of substrate for judge on support plate n when described the first material loading judgement submodule, judges on support plate that the capable n+1 of m is listed as the capable N of m and whether has the position that need to place substrate in being listed as;
Place submodule, when being listed as the capable N row of m and not having the position that need to place substrate for judge on support plate the capable n+1 of m when described the second material loading judgement submodule, control portal frame is placed on n on support plate by the capable substrate of portal frame m, and to be listed as m capable; When described the second material loading judgement submodule, judge on support plate the capable n+1 of m and be listed as and in the capable N row of m, exist need to place the position of substrate time, control portal frame and the capable substrate of portal frame m is not placed on to n on support plate to be listed as m capable;
Wherein, m=1,2,3 ..., M; N=1,2,3 ..., N.
On the other hand, the invention also discloses a kind of substrate transmission system, it is characterized in that, comprising:
Blanking position acquisition module, for when substrate is during from carrier plate transmission to blanking bench, obtains the position of having placed substrate on support plate, described support plate be M capable * support plate of N row, M, N are positive integer;
Substrate takes off module, and for whether having the position of having placed substrate according to every a line on support plate, from the N row of support plate, control portal frame has been placed successively the position of substrate and taken off substrate from support plate, and described substrate is placed into blanking bench; Described portal frame be M capable * 1 row portal frame;
Substrate judge module, for the substrate that judges on support plate, whether also existence is not taken off;
When judgment result is that of described substrate judge module exists, described substrate takes off module again according to whether there being the position of having placed substrate in every a line on support plate, from the N row of support plate, control portal frame has been placed successively the position of substrate and has been taken off substrate from support plate.
Alternatively, described substrate takes off module and comprises:
The first blanking judgement submodule, while having placed the position of substrate for the capable existence of m on support plate, judges on support plate whether n is listed as m capable is the position of having placed substrate;
The second blanking judgement submodule, when judging that when described the first blanking submodule is judged on support plate n and is listed as m behavior and placed the position of substrate, judges the capable substrate that whether exists of m of portal frame;
Take off submodule, while there is not substrate for the m that judges portal frame when described the second blanking judgement submodule is capable, control portal frame and take off n on support plate and be listed as the substrate that m is capable, and n on described support plate is listed as to substrate that m is capable, and to be placed into the m of portal frame capable; The m that judges portal frame when described the second blanking judgement submodule is capable while there is substrate, controls portal frame and does not take off n on support plate and be listed as the substrate that m is capable;
Wherein, m=1,2,3 ..., M; N=N, N-1, N-2 ..., 1.
Compared with prior art, the embodiment of the present invention comprises following advantage:
First, in the embodiment of the present invention, when substrate is transferred to support plate from feeding platform, can first obtain the position that needs to place substrate on support plate; Then control portal frame according to whether existing the position that need to place substrate to obtain substrate from feeding platform in every a line on support plate; Last from the first row of support plate, control portal frame and successively described substrate is placed into the position that needs to place substrate on support plate.The position that can be no longer need to place substrate for each row on support plate by said method portal frame all comes and goes operation and once substrate is placed on support plate, but in a film releasing process, according to the total line number that needs to place the position of substrate on support plate, obtain substrate, then disposable these substrates are placed on support plate, thereby have greatly improved efficiency when substrate is transferred to support plate from feeding platform.
Secondly, in the embodiment of the present invention, when substrate is during from carrier plate transmission to blanking bench, can first obtain the position of having placed substrate on support plate; Then according to whether there being the position of having placed substrate in every a line on support plate, from the N row of support plate, control portal frame has been placed successively the position of substrate and has been taken off substrate from support plate; Finally described substrate is placed into blanking bench.By said method portal frame, can no longer for each row substrate on support plate, all come and go operation and once substrate is placed into blanking bench, but in once getting sheet process, according to total line number of having placed the position of substrate on support plate, from support plate, take off substrate, then disposable these substrates are placed into blanking bench, thus the efficiency while greatly having improved substrate from carrier plate transmission to blanking bench.
Accompanying drawing explanation
Fig. 1 is the basic framework figure of PECVD system in prior art;
Fig. 2 is the structure chart of carrying out described substrate transmission method in the embodiment of the present invention;
Fig. 3 is the flow chart of a kind of substrate transmission method described in the embodiment of the present invention one;
Fig. 4 is the flow chart of a kind of substrate transmission method described in the embodiment of the present invention two;
Fig. 5 is the flow chart of a kind of substrate transmission method described in the embodiment of the present invention three;
Fig. 6 places the schematic diagram of substrate on a kind of support plate described in the embodiment of the present invention three;
Fig. 7 places the schematic diagram of substrate on another support plate described in the embodiment of the present invention three;
Fig. 8 adopts the method in background technology for the situation shown in Fig. 6 and Fig. 7, to carry out the flow chart of feeding process;
Fig. 9 carries out the flow chart of feeding process for the situation shown in Fig. 6 and Fig. 7 in the embodiment of the present invention three;
Figure 10 carries out the flow chart of blanking process for the situation shown in Fig. 6 and Fig. 7 in the embodiment of the present invention three;
Figure 11 is the structured flowchart of a kind of substrate transmission system described in the embodiment of the present invention four;
The structured flowchart of a kind of substrate transmission system described in Figure 12 embodiment of the present invention five.
Embodiment
For above-mentioned purpose of the present invention, feature and advantage can be become apparent more, below in conjunction with the drawings and specific embodiments, the present invention is further detailed explanation.
The embodiment of the present invention is in film releasing and get in the process of sheet, portal frame is can be according to the situation on support plate disposable to be obtained substrate as much as possible and is placed on support plate, or disposablely from support plate, take off substrate as much as possible, thereby reduce the round number of run of portal frame, greatly improved substrate and be transferred to support plate and efficiency during from carrier plate transmission to blanking bench from feeding platform.
The PECVD system of mainly take in the embodiment of the present invention describes as example, but the substrate transmission method that the embodiment of the present invention proposes is not limited to be applied in PECVD system process, it is applied in any other technique with substrate transmitting procedure is all feasible.Wherein, PECVD system can be applied to the manufacturing process of solar battery sheet, and now, cell piece is substrate, and certainly, PECVD system also can be applied to other technical processs, and the embodiment of the present invention is not limited this.
At present in substrate transmitting procedure, when substrate is transferred to support plate or during from carrier plate transmission to blanking bench from feeding platform, portal frame is all according to the situation of each row on support plate, each, come and go in running, from feeding platform, obtain the substrate of the row of one corresponding support plate, and substrate is placed in the respective column on support plate; Or from support plate, get the substrate of next column, and substrate is placed in blanking bench.
Said method is applicable to occupy on support plate the situation of substrate.But, when carrying out the demands such as system experimentation or judgement substrate technique inequality, on support plate, be not need to occupy substrate.In this case, adopt each row on said method support plate all to need portal frame to come and go operation once, therefore will greatly reduce operating efficiency.
For the problems referred to above, the embodiment of the present invention has proposed a kind of substrate transmission method, and the method can improve substrate and be transferred to support plate and efficiency during from carrier plate transmission to blanking bench from feeding platform.
First, introduce the structure chart of carrying out described substrate transmission method in the embodiment of the present invention, as shown in Figure 2.
In Fig. 2, manipulator is used for obtaining substrate from the magazine of feeding platform, and substrate is placed on transmission belt, controls servomotor (not marking in figure) drive transmission belt to rotate by electric cylinder.During material loading, first, can pass through upper industrial computer or computer or programmable logic controller (PLC) (Programmable Logic Controller, PLC) and set the position that needs to place substrate on support plate; Then, by the sucker on solenoid control portal frame, from transmission belt, draw substrate (i.e. cell piece in figure); Last portal frame is placed into substrate on support plate; During blanking, portal frame takes off substrate from support plate, then substrate is placed into blanking bench.
Utilize the structure shown in Fig. 2, when the substrate transmission method in employing background technology is transferred to support plate by substrate from feeding platform, if all place 8 substrates in each row of support plate, transmitting procedure is: first manipulator is sent on transmission belt position 1 from magazine obtains a substrate, now transmission belt high speed rotating under the drive of servomotor, is sent to position 2 by substrate; Then manipulator again obtains a substrate from magazine and is sent to position 1, and now transmission belt high speed rotating under the drive of servomotor, is sent to position 3 by first substrate, and second substrate is sent to position 2; Manipulator obtains a substrate from magazine again, till this process repeats to belt position 8 and has substrate.After transmission belt position is carried completely, portal frame runs to transmission belt place and inhales sheet, then runs on support plate, substrate is placed into the first row of support plate.After this repeat action above, until support plate is filled, material loading finishes.
The situation of all piling substrate for each row on support plate, it is feasible adopting said method.But, if need the substrate negligible amounts of placement on support plate, adopt said method can reduce the efficiency of material loading and blanking.
Below, by following embodiment, discuss a kind of substrate transmission method that utilizes the structure shown in Fig. 2 to carry out in the embodiment of the present invention respectively.
Embodiment mono-:
With reference to Fig. 3, show the flow chart of a kind of substrate transmission method described in the embodiment of the present invention one, this flow chart is mainly the process of (material loading) when substrate is transferred to support plate from feeding platform.
Described method can comprise:
Step 301, when substrate is transferred to support plate from feeding platform, obtains the position that needs to place substrate on support plate.
When substrate is transferred to support plate from feeding platform, can obtain the position that needs to place substrate on support plate by upper industrial computer or computer or PLC, then according to the position getting, can determine how portal frame obtains substrate from feeding platform.
In the embodiment of the present invention, described support plate can be capable for M * support plate of N row, and the portal frame that described portal frame can * 1 row capable for M, described portal frame can, along the row of support plate, move line by line on support plate.Wherein, M, N are positive integer.
Step 302, according to whether there being the position that need to place substrate in every a line on support plate, controls portal frame and obtains substrate from feeding platform.
In the embodiment of the present invention, can judge on support plate in every a line, whether have the position that need to place substrate by upper industrial computer or computer or PLC, then according to situation about judging, control portal frame and obtain substrate from feeding platform.
Concrete, can first by manipulator, from feeding platform, obtain substrate, then substrate is placed on transmission belt, last portal frame obtains substrate from transmission belt.
For example, if there is the position that need to place substrate in the first row of support plate, can control portal frame and obtain a substrate from feeding platform, and this substrate is placed into the first row of portal frame.For concrete process, will discuss in detail in the following embodiments.
Step 303, from the first row of support plate, controls portal frame and successively described substrate is placed into the position that needs to place substrate on support plate.
Portal frame, after obtaining substrate by above-mentioned steps 303, can, from the first row of support plate, be placed into by described substrate the position that needs to place substrate on support plate successively.
For example, if there is the position that need to place substrate in the first row on support plate, this position is the first row first row, when portal frame moves to the first row of support plate, the substrate in self the first row can be placed on support plate in the first row first row.For concrete process, will discuss in detail in the following embodiments.
Step 304, judges in the position that needs to place substrate on support plate whether also have the position of not placing substrate.
When portal frame moves to the N row of support plate from the first row of support plate, after substrate on it is all placed on support plate, can judge in the position that needs to place substrate on support plate whether also have the position of not placing substrate by upper industrial computer or computer or PLC.
If existed, return to step 302, control portal frame and continue according to whether there being the position that need to place substrate in every a line on support plate, from feeding platform, obtain substrate; If there is no (being on support plate, to need the position of placing substrate all to place substrate), finishes substrate and from feeding platform, is transferred to the process of support plate.
In the embodiment of the present invention, the processes such as above-mentioned judgement, control are not limited to utilize upper industrial computer or computer or PLC to carry out, and can also adopt other equipment to control.
The said method proposing by the embodiment of the present invention, the position that portal frame can be no longer need to be placed substrate for each row on support plate all comes and goes operation and once substrate is placed on support plate, but in a film releasing process, according to the total line number that needs to place the position of substrate on support plate, obtain substrate, then disposable these substrates are placed on support plate, have greatly improved efficiency when substrate is transferred to support plate from feeding platform.
Embodiment bis-:
With reference to Fig. 4, show the flow chart of a kind of substrate transmission method described in the embodiment of the present invention two, this flow chart is mainly the process of (blanking) during from carrier plate transmission to blanking bench by substrate.
Described method can comprise:
Step 401, when substrate is during from carrier plate transmission to blanking bench, obtains the position of having placed substrate on support plate.
When substrate is during from carrier plate transmission to blanking bench, can obtain the position of having placed substrate on support plate by upper industrial computer or computer or PLC, then according to the position getting, can determine how portal frame takes off substrate from support plate.
In the embodiment of the present invention, described support plate can be capable for M * support plate of N row, and the portal frame that described portal frame can * 1 row capable for M, described portal frame can, along the row of support plate, move line by line on support plate.Wherein, M, N are positive integer.
Step 402, according to whether there being the position of having placed substrate in every a line on support plate, from the N row of support plate, control portal frame has been placed successively the position of substrate and has been taken off substrate from support plate, and described substrate is placed into blanking bench.
In the embodiment of the present invention, can judge on support plate, in every a line, whether there is the position of having placed substrate by upper industrial computer or computer or PLC, then according to situation about judging, control portal frame from the N row of support plate, substrate is taken off in the position of having placed substrate successively from support plate, and described substrate is placed into blanking bench.
For example, if there is the position that need to place substrate in the first row on support plate, this position is the first row N row, when portal frame moves to the N row of support plate, can take off the substrate in the first row N row on support plate, and this substrate is placed into the first row of portal frame.For concrete process, will discuss in detail in the following embodiments.
Step 403, judges the substrate that on support plate, whether also existence is not taken off.
When portal frame moves to the first row of support plate from the N row of support plate, from support plate, take off after corresponding substrate is placed into blanking bench, can judge the substrate that on support plate, whether also existence is not taken off by upper industrial computer or computer or PLC.
If existed, return to step 402, portal frame continues according to whether there being the position of having placed substrate in every a line on support plate, and from the N row of support plate, control has been placed successively the position of substrate and has been taken off substrate from support plate; If there is no (be substrate all take off) on support plate, finishes the process of substrate from carrier plate transmission to blanking bench.
By the said method proposing in the embodiment of the present invention, portal frame can no longer all come and go operation for each row substrate on support plate and once substrate is placed into blanking bench, but in once getting sheet process, according to total line number of having placed the position of substrate on support plate, from support plate, take off substrate, then disposable these substrates are placed into blanking bench, thus the efficiency while greatly having improved substrate from carrier plate transmission to blanking bench.
Embodiment tri-:
With reference to Fig. 5, show the flow chart of a kind of substrate transmission method described in the embodiment of the present invention three, this flow chart is mainly substrate overall process of (blanking) when (material loading) and substrate are from carrier plate transmission to blanking bench while being transferred to support plate from feeding platform.
Described method can comprise:
Step 501, determines and currently need to carry out material loading flow process or blanking flow process.
If need to carry out material loading flow process, perform step 502; If need to carry out blanking flow process, perform step 503.
In the embodiment of the present invention, material loading flow process is substrate and from feeding platform, is transferred to the process of support plate, and blanking flow process is the process of substrate from carrier plate transmission to blanking bench.
Step 502, carries out material loading flow process.
This material loading flow process can comprise following sub-step:
Sub-step 5021, obtains the position that needs to place substrate on support plate.
Wherein, described support plate be M capable * support plate of N row, M, N are positive integer.
Sub-step 5022, according to whether there being the position that need to place substrate in every a line on support plate, controls portal frame and obtains substrate from feeding platform.
Wherein, described portal frame be M capable * 1 row portal frame.
This sub-step 5022 can comprise:
A1, from the first row of support plate, judges in the current line of support plate whether have the position that need to place substrate line by line.
If exist, carry out a2; If do not exist, carry out a3.
A2, controls portal frame and obtains a substrate from feeding platform, and a described substrate is placed in row corresponding with the current line of described support plate on portal frame.
A3, controls portal frame and from feeding platform, does not obtain the substrate in row corresponding with the current line of described support plate portal frame.
Sub-step 5023, from the first row of support plate, controls portal frame and successively described substrate is placed into the position that needs to place substrate on support plate.
This sub-step 5023 can comprise:
B1, when portal frame m is capable while there is substrate, judges on support plate whether n is listed as m capable is the position that need to place substrate;
If so, carry out b2; If not, carry out b4.
When portal frame m is capable while there is not substrate, can illustrate on support plate that m does not exist the position that need to place substrate in capable, therefore can not judge the m on support plate is capable.
B2, judges on support plate, the capable n+1 of m is listed as in the capable N row of m whether have the position that need to place substrate;
If exist, carry out b4; If do not exist, carry out b3.
B3, controls portal frame and the capable substrate of portal frame m is placed on to n on support plate to be listed as m capable;
B4, controls portal frame and the capable substrate of portal frame m is not placed on to n on support plate to be listed as m capable.
On support plate, to be listed as m capable be not in the time of need to placing the position of substrate to n; Or n is listed as the position that m behavior needs is placed substrate on support plate, and on support plate, the capable n+1 of m is listed as in the capable N row of m and exists in the time of need to placing the position of substrate, and the capable substrate of portal frame m not being placed on to n on support plate, to be listed as m capable.
Wherein, m=1,2,3 ..., M; N=1,2,3 ..., N.
Sub-step 5024, judges in the position that needs to place substrate on support plate whether also have the position of not placing substrate.
If exist, return to sub-step 5022; If do not exist, finish material loading flow process.
Step 503, carries out blanking flow process.
This blanking flow process can comprise following sub-step:
Sub-step 5031, obtains the position of having placed substrate on support plate.
Sub-step 5032, according to whether there being the position of having placed substrate in every a line on support plate, from the N row of support plate, control portal frame has been placed successively the position of substrate and has been taken off substrate from support plate.
This sub-step 5032 can comprise:
C1, when the position of substrate has been placed in the capable existence of m on support plate, judges on support plate whether n is listed as m capable is the position of having placed substrate;
If so, carry out c2; If not, carry out c4.
On support plate, m is capable while there is not the position of having placed substrate, can illustrate portal frame not from support plate m take off substrate in capable, therefore can to the m on support plate is capable, not judge.
C2, when n is listed as m behavior and has placed the position of substrate on support plate, judges the capable substrate that whether exists of m of portal frame;
If exist, carry out c4; If do not exist, carry out c3.
C3, controls portal frame and takes off n on support plate and be listed as the substrate that m is capable, and n on described support plate is listed as to substrate that m is capable, and to be placed into the m of portal frame capable;
C4, control portal frame does not take off n on support plate and is listed as the substrate that m is capable.
Wherein, m=1,2,3 ..., M; N=N, N-1, N-2 ..., 1.
On support plate, to be listed as m capable be not while having placed the position of substrate to n; Or n is listed as the position that substrate has been placed in m behavior on support plate, and the m of portal frame is capable while there is substrate, and portal frame does not take off n on support plate and is listed as the substrate that m is capable.
Sub-step 5033, controls portal frame described substrate is placed into blanking bench.
Sub-step 5034, judges the substrate that on support plate, whether also existence is not taken off.
If exist, return to sub-step 5032; If there is no, finish blanking flow process.
Below, introduce for example the substrate transmission method described in the embodiment of the present invention.
Fig. 6 places the schematic diagram of substrate on a kind of support plate described in the embodiment of the present invention three, Fig. 7 places the schematic diagram of substrate on another support plate described in the embodiment of the present invention three.As can be seen from Figures 6 and 7, support plate is the support plate of 8 row * 8 row, and portal frame is the portal frame of 8 row * 1 row.
If the method in employing background technology is carried out feeding process for the situation shown in Fig. 6 and Fig. 7, as shown in Figure 8, feeding process can comprise flow process:
Step 801, manipulator obtains substrate from feeding platform.
Step 802, manipulator is placed into transmission belt by substrate, and portal frame moves to transmission belt place.
Step 803, portal frame obtains a substrate according to the substrate situation of placing of n row on support plate from transmission belt, and is placed into the n row of support plate.
Make n=n+1, and return to step 801, wherein, n=1,2 ..., 7.
Blanking process is substantially similar to feeding process, and the embodiment of the present invention is discussed no longer in detail at this.
With reference to Fig. 9, for carry out the flow chart of feeding process in the embodiment of the present invention three for the situation shown in Fig. 6 and Fig. 7, feeding process can comprise:
Step 901, manipulator obtains substrate from feeding platform, and substrate is placed into transmission belt.
Step 902, the situation that portal frame need to be placed substrate according to every a line on support plate is obtained substrate from transmission belt.
Step 903, portal frame moves to the n row on support plate, and corresponding substrate is placed into the n row on support plate.
Step 904, portal frame moves to the n+1 row on support plate, and corresponding substrate is placed into the n+1 row on support plate, n=1,2 ..., 7.
Step 905, judges on support plate, whether to have placed substrate.
If so, finish feeding process; If not, return to step 901.
With reference to Figure 10, for carry out the flow chart of blanking process in the embodiment of the present invention three for the situation shown in Fig. 6 and Fig. 7, blanking process can comprise:
Step 1001, portal frame moves to the n row on support plate, takes off the substrate of n row, is placed into the relevant position of portal frame.
Wherein, n=8,7,6 ..., 2.
Step 1002, portal frame moves to n-1 row from N row, takes off the substrate of n-1 row, is placed into the relevant position of portal frame.
Step 1003, is placed into blanking bench by the substrate on portal frame.
Step 1004, judges whether the substrate on support plate takes.
If so, finish blanking process; If not, return to step 1001.
Below, for Fig. 6 and Fig. 7, be introduced respectively.
For Fig. 6:
As can be seen from Figure 6, on support plate, in each row, only place a substrate, in every a line, also only place a substrate.
For Fig. 6, if the method execution feeding process that adopts background technology to propose is as follows: first, portal frame obtains a substrate from transmission belt, is placed into the first row of portal frame, then the substrate of portal frame the first row is placed into the first row the first row on support plate, and returns to transmission belt place; Then, portal frame obtains a substrate from transmission belt, is placed into the second row of portal frame, then the substrate of portal frame the second row is placed into the 8th row the second row on support plate, and return to transmission belt place, and by that analogy, until the 7th being listed as the 8th row and having placed substrate position on support plate.
Visible, adopt the method in background technology on support plate, to place substrate, portal frame need to come and go operation and just can complete for 8 times.
Same, for blanking process, portal frame is also from support plate, to get the substrate in next column at every turn, is then placed into blanking bench, still needs to come and go operation and just can complete for 8 times, the embodiment of the present invention is discussed no longer in detail at this.
For Fig. 6, adopt method described in the embodiment of the present invention to carry out feeding process as follows: first, manipulator obtains 8 substrates from feeding platform, and 8 substrates are placed into transmission belt; Then judge each provisional capital on support plate and need to place a substrate, portal frame obtains 8 substrates from transmission belt, and is placed into respectively the first row to the eight row of portal frame; Finally, portal frame moves to the first row of support plate, the substrate of portal frame the first row is placed into the first row the first row of support plate, then moves to the secondary series of support plate, the substrate of portal frame the third line is placed into secondary series the third line of support plate.By that analogy, until move to the 8th row of support plate, the substrate of portal frame the second row is placed into the 8th row the second line position of support plate.
After the substrate of portal frame the second row being placed into the 8th row the second line position of support plate, through judgement, on support plate, place substrate, now can finish feeding process.
Therefore,, for the situation shown in Fig. 6, the feeding process of the embodiment of the present invention only needs the round operation of portal frame once can complete.
For Fig. 6, adopt method described in the embodiment of the present invention to carry out blanking process as follows: first, portal frame moves to the 8th row of support plate, takes off the substrate of the 8th row the second row on support plate, is placed into the second row of portal frame; Then, portal frame moves to the 7th row of support plate, takes off on support plate the 7th substrate that is listed as the 8th row, is placed into the 8th row of portal frame; By that analogy, last portal frame moves to the first row of support plate, takes off the substrate of first row the first row on support plate, is placed into the first row of portal frame.
Take off the substrate of first row the first row on support plate, after being placed into the first row of portal frame, portal frame is placed into blanking bench by substrate.Then through judgement, the substrate on support plate takes, now can finish blanking process.
Therefore,, for the situation shown in Fig. 6, the blanking process of the embodiment of the present invention only needs the round operation of portal frame once can complete.
For Fig. 7:
As can be seen from Figure 7, place two substrates on support plate in first row, the second row is also placed two substrates, in all the other each row, only places a substrate, also only places a substrate in every a line.
For Fig. 7, adopt method described in the embodiment of the present invention to carry out feeding process as follows: first, manipulator obtains 8 substrates from feeding platform, and 8 substrates are placed into transmission belt; Then judge each provisional capital on support plate and need to place substrate, portal frame obtains 8 substrates from transmission belt, and is placed into respectively the first row to the eight row of portal frame; Finally, portal frame moves to the first row of support plate, the substrate of portal frame the first row is placed into the first row the first row of support plate, then moves to the secondary series of support plate, the substrate of portal frame the second row is placed into secondary series second row of support plate.By that analogy, until move to the 8th row of support plate, the substrate of portal frame the 8th row is placed into the 8th of support plate and is listed as the 8th line position.
The substrate of portal frame the 8th row is placed into after the 8th of support plate is listed as the 8th line position, through judgement, on support plate, first row the second row is not also placed substrate, now portal frame returns to transmission belt place and obtains a substrate, be placed into the second row of portal frame, then portal frame moves to the first row of support plate, the substrate of portal frame the second row is placed into first row second row of support plate, finishes feeding process.
In the embodiment of the present invention, in feeding process, not according to the situation operation of preferentially having placed support plate previous column, first do not place the first row and second row of first row on support plate, but skip the second row of first row, after discharging all substrates of portal frame, last portal frame comes and goes the substrate that first row the second row is once placed in operation again.
In feeding process, when there is a plurality of substrate with a line on support plate, preferentially will on portal frame, the substrate that should go be placed into portal frame stroke position far away.
Therefore,, for the situation shown in Fig. 7, the feeding process of the embodiment of the present invention only needs the round operation of portal frame can complete for twice.
For Fig. 7, adopt method described in the embodiment of the present invention to carry out blanking process as follows: first, portal frame moves to the 8th row of support plate, take off on support plate the 8th substrate that is listed as the 8th row, be placed into the 8th row of portal frame; Then, portal frame moves to the 7th row of support plate, takes off on support plate the 7th substrate that is listed as the 7th row, is placed into the 7th row of portal frame; By that analogy, last portal frame moves to the first row of support plate, takes off the substrate of first row the first row on support plate, is placed into the first row of portal frame.
Portal frame is placed into blanking bench by substrate, and then, through judgement, on support plate, the substrate of first row the second row does not also take off, and now portal frame returns on support plate, takes off the substrate of first row the second row on support plate, and substrate is placed into blanking bench, finishes blanking process.
In the embodiment of the present invention, in blanking process, not according to the situation operation that preferentially takes support plate previous column, first do not take the first row and second row of first row, but skip the second row of first row, get after sheet completing all of portal frame, last portal frame comes and goes the substrate that first row the second row is once got in operation again.
In blanking process, when there is a plurality of substrate with a line on support plate, preferentially take off portal frame stroke locational substrate far away, be placed in the row that portal frame is corresponding.
Therefore,, for the situation shown in Fig. 7, the blanking process of the embodiment of the present invention only needs the round operation of portal frame can complete for twice.
The embodiment of the present invention is in film releasing and get in the process of sheet, portal frame is can be according to the situation on support plate disposable to be obtained substrate as much as possible and is placed on support plate, or disposablely from support plate, take off substrate as much as possible, thereby reduce the round number of run of portal frame, greatly improved substrate and be transferred to support plate and efficiency during from carrier plate transmission to blanking bench from feeding platform.
Embodiment tetra-:
With reference to Figure 11, show the structured flowchart of a kind of substrate transmission system described in the embodiment of the present invention four, this system is mainly the process of (material loading) when carrying out substrate and being transferred to support plate from feeding platform.This system can comprise: material loading position acquisition module 111, substrate acquisition module 112, substrate placement module 113 and position judging module 114.
Wherein,
Material loading position acquisition module 111, for when substrate is transferred to support plate from feeding platform, obtains the position that needs to place substrate on support plate, described support plate be M capable * support plate of N row, M, N are positive integer;
Substrate acquisition module 112, for whether having according to every a line on support plate the position that need to place substrate, controls portal frame and obtains substrate from feeding platform, described portal frame be M capable * portal frame of 1 row;
Described substrate acquisition module 112 can comprise:
Judge line by line submodule 1121, for the first row from support plate, judge line by line in the current line of support plate whether have the position that need to place substrate;
Obtain submodule 1122, for, controlling portal frame and obtain a substrate from feeding platform, and a described substrate is placed in row corresponding with the current line of described support plate on portal frame while judging that line by line judgment result is that of submodule exists when described.
Substrate placement module 113, for the first row from support plate, controls portal frame and successively described substrate is placed into the position that needs to place substrate on support plate;
Described substrate placement module 113 can comprise:
The first material loading judgement submodule 1131, for when portal frame m is capable while there is substrate, judges on support plate whether n is listed as m capable is the position that need to place substrate;
The second material loading judgement submodule 1132, when being listed as m behavior needs and placing the position of substrate for judge on support plate n when described the first material loading judgement submodule, judge on support plate that the capable n+1 of m is listed as the capable N of m and whether has the position that need to place substrate in being listed as;
Place submodule 1133, when being listed as the capable N row of m and not having the position that need to place substrate for judge on support plate the capable n+1 of m when described the second material loading judgement submodule, control portal frame is placed on n on support plate by the capable substrate of portal frame m, and to be listed as m capable; When described the second material loading judgement submodule, judge on support plate the capable n+1 of m and be listed as and in the capable N row of m, exist need to place the position of substrate time, control portal frame and the capable substrate of portal frame m is not placed on to n on support plate to be listed as m capable;
Wherein, m=1,2,3 ..., M; N=1,2,3 ..., N.
Position judging module 114, for judging the position whether also substrate is not placed in existence, position that needs to place substrate on support plate.
When judgment result is that of described position judging module exists, described substrate acquisition module, again according to whether there being the position that need to place substrate in every a line on support plate, is controlled portal frame and is obtained substrate from feeding platform.
In the embodiment of the present invention, when substrate is transferred to support plate from feeding platform, can first obtain the position that needs to place substrate on support plate; Then control portal frame according to whether existing the position that need to place substrate to obtain substrate from feeding platform in every a line on support plate; Last from the first row of support plate, control portal frame and successively described substrate is placed into the position that needs to place substrate on support plate.The position that can be no longer need to place substrate for each row on support plate by said method portal frame all comes and goes operation and once substrate is placed on support plate, but in a film releasing process, according to the total line number that needs to place the position of substrate on support plate, obtain substrate, then disposable these substrates are placed on support plate, thereby have greatly improved efficiency when substrate is transferred to support plate from feeding platform.
Embodiment five:
With reference to Figure 12, show the structured flowchart of a kind of substrate transmission system described in the embodiment of the present invention five, this system is mainly the process of (blanking) while carrying out substrate from carrier plate transmission to blanking bench.This system can comprise: blanking position acquisition module 121, substrate take off module 122 and substrate judge module 123.
Wherein,
Blanking position acquisition module 121, for when substrate is during from carrier plate transmission to blanking bench, obtains the position of having placed substrate on support plate, described support plate be M capable * support plate of N row, M, N are positive integer;
Substrate takes off module 122, and for whether having the position of having placed substrate according to every a line on support plate, from the N row of support plate, control portal frame has been placed successively the position of substrate and taken off substrate from support plate, and described substrate is placed into blanking bench; Described portal frame be M capable * 1 row portal frame;
Described substrate takes off module 122 and can comprise:
The first blanking judgement submodule 1221, while having placed the position of substrate for the capable existence of m on support plate, judges on support plate whether n is listed as m capable is the position of having placed substrate;
The second blanking judgement submodule 1222, when judging that when described the first blanking submodule is judged on support plate n and is listed as m behavior and placed the position of substrate, judges the capable substrate that whether exists of m of portal frame;
Take off submodule 1223, when judging that when described the second blanking submodule judges that the m of portal frame is capable does not exist substrate, control portal frame and take off n on support plate and be listed as the substrate that m is capable, and n on described support plate is listed as to substrate that m is capable, and to be placed into the m of portal frame capable; The m that judges portal frame when described the second blanking judgement submodule is capable while there is substrate, controls portal frame and does not take off n on support plate and be listed as the substrate that m is capable;
Wherein, m=1,2,3 ..., M; N=N, N-1, N-2 ..., 1.
Substrate judge module 123, for the substrate that judges on support plate, whether also existence is not taken off.
When judgment result is that of described substrate judge module exists, described substrate takes off module again according to whether there being the position of having placed substrate in every a line on support plate, from the N row of support plate, control portal frame has been placed successively the position of substrate and has been taken off substrate from support plate.
In the embodiment of the present invention, when substrate is during from carrier plate transmission to blanking bench, can first obtain the position of having placed substrate on support plate; Then according to whether there being the position of having placed substrate in every a line on support plate, from the N row of support plate, control portal frame has been placed successively the position of substrate and has been taken off substrate from support plate; Finally described substrate is placed into blanking bench.By said method portal frame, can no longer for each row substrate on support plate, all come and go operation and once substrate is placed into blanking bench, but in once getting sheet process, according to total line number of having placed the position of substrate on support plate, from support plate, take off substrate, then disposable these substrates are placed into blanking bench, thus the efficiency while greatly having improved substrate from carrier plate transmission to blanking bench.
For said system embodiment, because it is substantially similar to embodiment of the method, so description is fairly simple, relevant part is referring to the part explanation of embodiment of the method.
Each embodiment in this specification all adopts the mode of going forward one by one to describe, and each embodiment stresses is the difference with other embodiment, between each embodiment identical similar part mutually referring to.
The embodiment of the present invention can be described in the general context of the computer executable instructions of being carried out by computer, for example program module.Usually, program module comprises the routine carrying out particular task or realize particular abstract data type, program, object, assembly, data structure etc.Also can in distributed computing environment (DCE), put into practice the present invention, in these distributed computing environment (DCE), by the teleprocessing equipment being connected by communication network, be executed the task.In distributed computing environment (DCE), program module can be arranged in the local and remote computer-readable storage medium that comprises memory device.
For aforesaid each embodiment of the method, for simple description, therefore it is all expressed as to a series of combination of actions, but those skilled in the art should know, the present invention is not subject to the restriction of described sequence of movement, because according to the present invention, some step can adopt other orders or carry out simultaneously.Secondly, those skilled in the art also should know, the embodiment described in specification all belongs to preferred embodiment, and related action and module might not be that the present invention is necessary.
Finally, also it should be noted that, in this article, relational terms such as the first and second grades is only used for an entity or operation to separate with another entity or operating space, and not necessarily requires or imply and between these entities or operation, have the relation of any this reality or sequentially.And, term " comprises ", " comprising " or its any other variant are intended to contain comprising of nonexcludability, thereby the process, method, commodity or the equipment that make to comprise a series of key elements not only comprise those key elements, but also comprise other key elements of clearly not listing, or be also included as the intrinsic key element of this process, method, commodity or equipment.The in the situation that of more restrictions not, the key element being limited by statement " comprising ... ", and be not precluded within process, method, commodity or the equipment that comprises described key element and also have other identical element.
Above to a kind of substrate transmission method provided by the present invention and system, be described in detail, applied specific case herein principle of the present invention and execution mode are set forth, the explanation of above embodiment is just for helping to understand method of the present invention and core concept thereof; , for one of ordinary skill in the art, according to thought of the present invention, all will change in specific embodiments and applications, in sum, this description should not be construed as limitation of the present invention meanwhile.

Claims (10)

1. a substrate transmission method, is characterized in that, comprising:
When substrate is transferred to support plate from feeding platform, obtain the position that needs to place substrate on support plate, described support plate be M capable * support plate of N row, M, N are positive integer;
According to whether there being the position that need to place substrate in every a line on support plate, control portal frame and obtain substrate from feeding platform, described portal frame be M capable * portal frame of 1 row;
From the first row of support plate, control portal frame and successively described substrate is placed into the position that needs to place substrate on support plate;
Judge on support plate and need to place the position that in the position of substrate, whether also substrate is not placed in existence, if exist, return according to whether there being the position that need to place substrate in every a line on support plate, control portal frame and from feeding platform, obtain the step of substrate.
2. method according to claim 1, is characterized in that, described according to whether there being the position that need to place substrate in every a line on support plate, controls portal frame and obtains substrate from feeding platform, comprising:
From the first row of support plate, judge line by line in the current line of support plate whether have the position that need to place substrate;
If exist, control portal frame and obtain a substrate from feeding platform, and a described substrate is placed in row corresponding with the current line of described support plate on portal frame.
3. method according to claim 1, is characterized in that, described from the first row of support plate, controls portal frame and successively described substrate is placed into the position that needs to place substrate on support plate, comprising:
When portal frame m is capable while there is substrate, judge on support plate whether n is listed as m capable is the position that need to place substrate;
When n is listed as the position of m behavior needs placement substrate on support plate, judge on support plate, the capable n+1 of m is listed as in the capable N row of m whether have the position that need to place substrate;
When the capable n+1 of m is listed as and does not have the position that need to place substrate in the capable N of m row on support plate, control portal frame and the capable substrate of portal frame m is placed on to n on support plate to be listed as m capable;
On support plate, the capable n+1 of m is listed as in the capable N of m row and exists in the time of need to placing the position of substrate, controls portal frame and the capable substrate of portal frame m is not placed on to n on support plate to be listed as m capable;
Wherein, m=1,2,3 ..., M; N=1,2,3 ..., N.
4. a substrate transmission method, is characterized in that, comprising:
When substrate is during from carrier plate transmission to blanking bench, obtain the position of having placed substrate on support plate, described support plate be M capable * support plate of N row, M, N are positive integer;
According to whether there being the position of having placed substrate in every a line on support plate, from the N row of support plate, control portal frame has been placed successively the position of substrate and has been taken off substrate from support plate, and described substrate is placed into blanking bench; Described portal frame be M capable * 1 row portal frame;
Judge the substrate that on support plate, whether also existence is not taken off, if exist, return according to whether there being the position of having placed substrate in every a line on support plate, from the N row of support plate, control portal frame and from support plate, placed successively the step that substrate is taken off in the position of substrate.
5. method according to claim 4, is characterized in that, described according to whether there being the position of having placed substrate in every a line on support plate, and from the N row of support plate, control portal frame has been placed successively the position of substrate and taken off substrate from support plate, comprising:
When the position of substrate has been placed in the capable existence of m on support plate, judge on support plate whether n is listed as m capable is the position of having placed substrate;
When n is listed as m behavior and has placed the position of substrate on support plate, judge the capable substrate that whether exists of m of portal frame;
When the m of portal frame is capable while there is not substrate, control portal frame and take off n on support plate and be listed as the substrate that m is capable, and n on described support plate is listed as to substrate that m is capable, and to be placed into the m of portal frame capable;
When the m of portal frame is capable while there is substrate, control portal frame and do not take off n on support plate and be listed as the substrate that m is capable;
Wherein, m=1,2,3 ..., M; N=N, N-1, N-2 ..., 1.
6. a substrate transmission system, is characterized in that, comprising:
Material loading position acquisition module, for when substrate is transferred to support plate from feeding platform, obtains the position that needs to place substrate on support plate, described support plate be M capable * support plate of N row, M, N are positive integer;
Substrate acquisition module, for whether having according to every a line on support plate the position that need to place substrate, controls portal frame and obtains substrate from feeding platform, described portal frame be M capable * portal frame of 1 row;
Substrate placement module, for the first row from support plate, controls portal frame and successively described substrate is placed into the position that needs to place substrate on support plate;
Position judging module, for judging the position whether also substrate is not placed in existence, position that needs to place substrate on support plate;
When judgment result is that of described position judging module exists, described substrate acquisition module, again according to whether there being the position that need to place substrate in every a line on support plate, is controlled portal frame and is obtained substrate from feeding platform.
7. system according to claim 6, is characterized in that, described substrate acquisition module comprises:
Judge line by line submodule, for the first row from support plate, judge line by line in the current line of support plate whether have the position that need to place substrate;
Obtain submodule, for, controlling portal frame and obtain a substrate from feeding platform, and a described substrate is placed in row corresponding with the current line of described support plate on portal frame while judging that line by line judgment result is that of submodule exists when described.
8. system according to claim 6, is characterized in that, described substrate placement module comprises:
The first material loading judgement submodule, for when portal frame m is capable while there is substrate, judges on support plate whether n is listed as m capable is the position that need to place substrate;
The second material loading judgement submodule, when being listed as m behavior needs and placing the position of substrate for judge on support plate n when described the first material loading judgement submodule, judges on support plate that the capable n+1 of m is listed as the capable N of m and whether has the position that need to place substrate in being listed as;
Place submodule, when being listed as the capable N row of m and not having the position that need to place substrate for judge on support plate the capable n+1 of m when described the second material loading judgement submodule, control portal frame is placed on n on support plate by the capable substrate of portal frame m, and to be listed as m capable; When described the second material loading judgement submodule, judge on support plate the capable n+1 of m and be listed as and in the capable N row of m, exist need to place the position of substrate time, control portal frame and the capable substrate of portal frame m is not placed on to n on support plate to be listed as m capable;
Wherein, m=1,2,3 ..., M; N=1,2,3 ..., N.
9. a substrate transmission system, is characterized in that, comprising:
Blanking position acquisition module, for when substrate is during from carrier plate transmission to blanking bench, obtains the position of having placed substrate on support plate, described support plate be M capable * support plate of N row, M, N are positive integer;
Substrate takes off module, and for whether having the position of having placed substrate according to every a line on support plate, from the N row of support plate, control portal frame has been placed successively the position of substrate and taken off substrate from support plate, and described substrate is placed into blanking bench; Described portal frame be M capable * 1 row portal frame;
Substrate judge module, for the substrate that judges on support plate, whether also existence is not taken off;
When judgment result is that of described substrate judge module exists, described substrate takes off module again according to whether there being the position of having placed substrate in every a line on support plate, from the N row of support plate, control portal frame has been placed successively the position of substrate and has been taken off substrate from support plate.
10. system according to claim 9, is characterized in that, described substrate takes off module and comprises:
The first blanking judgement submodule, while having placed the position of substrate for the capable existence of m on support plate, judges on support plate whether n is listed as m capable is the position of having placed substrate;
The second blanking judgement submodule, when judging that when described the first blanking submodule is judged on support plate n and is listed as m behavior and placed the position of substrate, judges the capable substrate that whether exists of m of portal frame;
Take off submodule, while there is not substrate for the m that judges portal frame when described the second blanking judgement submodule is capable, control portal frame and take off n on support plate and be listed as the substrate that m is capable, and n on described support plate is listed as to substrate that m is capable, and to be placed into the m of portal frame capable; The m that judges portal frame when described the second blanking judgement submodule is capable while there is substrate, controls portal frame and does not take off n on support plate and be listed as the substrate that m is capable;
Wherein, m=1,2,3 ..., M; N=N, N-1, N-2 ..., 1.
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