CN1041018C - L-shaped Fizeau interferometer for detecting large laser amplifier - Google Patents

Abstract

An L-shaped Fizeau interferometer for detecting a large laser amplifier. Comprises a laser beam emitted from a point light source, a parallel beam emitted in the vertical direction through an aperture diaphragm, a beam splitter prism and a collimating objective lens, and divided into a reference beam I through a standard flat plate_aAnd an inspection beam I_bInspection beam I_bThe light beam I is converted into horizontal direction by a standard reflector, then passes through a reflector which is vertically placed by a detected system and returns along the original light path from the standard reflector_a、I_bThe interference fringe display is recorded in the camera and processing system. Thereby giving accurate quantitative results. The whole structure is L-shaped, which is reasonable, simple and compact.

Description

Detect the L shaped Feisuo interferometer of large laser amplifier

The invention belongs to the optical tooling system field, is a kind of L shaped Feisuo interferometer, is mainly used in heavy caliber large laser amplifier system, and the interference detection of optical parametric such as beam system and quality is restrainted/contracted in long size laser bar material of heavy caliber and expansion.

Interfere the primary structure that detects this type systematic to have:

1. with placing detected system in arm of mach-zehnder (Mach-Zender) interferometer, another arm is interfered detection (Shanghai Optics and Precision Mechanics institute, Chinese Academy of Sciences, laser 12 as the reference arm ^#The laser 12 that experimental provision general technical group is done ^#The report of experimental provision development work, 1987, p.525-531).Checking system as shown in Figure 1, mainly by pointolite 1, collimator objective 2, many saturating few anti-standard mirrors 3, semi-transparent semi-reflecting standard mirror 4, total reflection standard flat catoptron 5 and 6, condenser system 7 and observation screen 8 constitute, tested disk amplifier 9 (or long neodymium glass rod 10 expands and restraints/contract beam system 11 etc.) is put into one of them arm.

With prism shearing interferometer or plate shearing interferometer also can detect said system (shearing interferometer and application thereof, China Machine Press, Beijing, in August, 1987, p.256-257).As Fig. 2, shown in Figure 3, wherein by pointolite 1, collimator objective 2, prism shearing interferometer 12 or plate shearing interferometer 13 are formed, and detected system 9,10 or 11 is placed in the light path.

3. vertical or horizontal Feisuo interferometer as shown in Figure 4, enters Amici prism 15 by pointolite 1 through aperture 14, penetrates parallel beam through collimator objective 16 again, and this parallel beam is divided into sub-fraction folded light beam I through behind the dressing plate 17 _aBe reference beam, most of transmitted light beam I _bBe the check light beam, check light beam I _bBehind detected material 9, by returning two light beam I along original optical path with standard reflection mirror 18 reflections of dressing plate 17 parallel storings _aWith I _bInterference fringe enters through Amici prism 15 and videotapes and disposal system 21 (translating " optical workshop check ", China Machine Press in 1985, P16～31 referring to white Guoqiang etc.).

The shortcoming that said structure mainly exists is:

1. prior art 1 needs 4 heavy caliber standard flat mirrors, and wherein has two to be to see through to use, and surface working precision and material internal technical indicator extremely difficulty meet the demands and price will be very expensive.For example, detect the amplifier system of Φ 250mm bore, then need the high precision flat board of 4 bore Φ 360mm, still do not have heavy caliber mach-zehnder interferometer like this so far and using.

2. though prior art 2 needs dressing plate quantity to reduce, conduct is the system of Fig. 3 wherein, and the bore that satisfies the high precision shear interference flat board that detects bore Φ 250mm is at least Φ 400mm, and thickness is 40-50mm, and also nobody used both at home and abroad so far.

3. prior art 2 all belongs to qualitative interference detection as Fig. 2, system shown in Figure 3, if quantitatively check suitable the trouble with high precision.

4. in the prior art 3, vertical Feisuo interferometer is inapplicable to detecting large-scale sheet laser amplifier, because this laser amplifier can not vertically be put.For horizontal Feisuo interferometer, if above-mentioned large-scale sheet laser amplifier is placed in check light beam I _bLight path in, this will draw the light path of interferometer very long, will make interferometer not only long but also big, takes up an area of very greatly, actual use is very unrealistic.

Purpose of the present invention: for overcoming above-mentioned all shortcomings, for similar detected system 9,10,11 provides a kind of new detecting instrument, this instrument can solve the combination precision problem that must detect in the large-scale sheet main amplifier of light laser, and can provide digitized high Precision Detection result, and compact conformation, advantages of simple.

The concrete formation of L shaped Feisuo interferometer of the present invention is as shown in Figure 5: by pointolite 1 outgoing laser beam, through aperture 14, Amici prism 15 and the collimator objective 16 outgoing parallel beam in vertical direction, wherein sub-fraction reflects conduct with reference to light beam I through the lower surface of dressing plate 17 along the light path direct of travel _a, most of dressing plate 17 that sees through is check light beam I _b, check light beam I _bThrough the standard reflection mirror 18 that the relative vertical direction of reflecting surface becomes miter angle to put the parallel beam introducing horizontal direction of vertical direction is advanced, the standard reflection mirror 20 back autocollimatics of injecting vertical placement after detected system 19 (for the large laser disk amplifier) return along original optical path, and check light beam I behind dressing plate 17 _bWith reference beam I _aThe interference fringe that two-beam interferes the back to form enters through Amici prism 15 and videotapes and disposal system 21, finally provides quantitative result.The L-shaped system of whole interferometer constitutes.

In the conventional vertical Feisuo interferometer that uses, reference beam I _aWith detection light beam I _bTwo arm journey length are bordering on equal, and as 17,18 among Fig. 4, the additional optical path difference that the micro-out of focus Δ f of collimator objective 16 causes is negligible.But in the present invention,, must accurately measure defocusing amount and calculate the additional optical path difference, when handling interference fringe, in program, write this value and in net result, deduct and get final product because two brachiums differ greatly.

The lower surface of the dressing plate 17 of interferometer is a plated film face not among Fig. 5, upper surface plating anti-reflection film, its reference beam light intensity I _aBe 4%.After check light beam bilateral sees through detected laser disk amplifier 19, detect total light intensity I of light beam _bCan with I _aCoupling, the interference fringe of formation good contrast.

Major advantage of the present invention is: 1. L shaped Feisuo interferometer of the present invention is with standard reflection mirror 18 during with dressing plate 17 parallel storings, it is exactly vertical Feisuo interferometer, so, the present invention plays the effect of dual-use, do not possessing or particularly important during unable making heavy caliber mach-zehnder interferometer, 2. the present invention is simple and practical, volume constitutes compact and reasonable, cheap, be easy to apply, 3. compared with the system of the single-pass mach-zehnder interferometer of routine check, this bilateral check structural sensitivity is doubled.Description of drawings:

The structural representation of the mach-zehnder interferometer when Fig. 1 inserts detected system for prior art 1.

Fig. 2 is the detection system synoptic diagram of two collimator objectives of prior art 2 usefulness and prism shearing interferometer.

Fig. 3 is the detection system synoptic diagram of collimator objective of prior art 2 usefulness and one flat plate shearing interferometer.

Fig. 4 is the optical system synoptic diagram of a conventional vertical Feisuo interferometer that uses.

Fig. 5 detects the L shaped Feisuo interferometer structure synoptic diagram of large laser amplifier system for the present invention.

Embodiment:

Do pointolite 1 with the He-Ne laser instrument, when a detected system 19 by every 250mm * 500mm ellipse, its clear aperture is that amplifier level that totally eight sheets of Φ 250mm are formed is placed between the completely reflecting mirror 20 of standard reflection mirror 18 and vertical storings, and calculating does not wait the additional optical path difference Δ of introducing owing to out of focus Δ f=0.50mm causes reference arm and detection arm: $\mathrm{\Δ}=\frac{{\mathrm{\Δf}}^{2}l{D}^2}{8f^4}---\left(1\right)$

(1) in the formula: Δ f---the defocusing amount of collimator objective 16 in the interferometer, herein

Δf＝0.50mm，

L---the optical path difference of maximum between reference arm and the detection arm in the interferometer,

In this sheet amplifier installation, because of twice by the device light path

Difference is about l=8000mm,

D---Feisuo interferometer collimator objective 16 bores, this instrument

D＝250mm，

F---the focal length of Feisuo interferometer collimator objective 16, this instrument

F=1250mm with above-mentioned numerical value substitution (1) formula, calculates

Δ ≈ 0.0064 μ m is when λ=0.6328 μ m, and this value is equivalent to p=Δ/λ ≈ 1/100 striped.This Confirmation Of Number do not influence measuring accuracy.

With the L shaped Feisuo interferometer of detection large laser amplifier of the present invention system, can obtain digitized fast quantitative measurement result to the detection of large-scale optical system.

Claims (1)

1. a L shaped Feisuo interferometer that detects large laser amplifier contains by pointolite (1) emitting laser bundle, enters Amici prism (15) through aperture, it is characterized in that:

(1) penetrates in vertical direction parallel beam by the light beam of Amici prism (15) outgoing by more small additional optical path difference Δ little collimator objective (16) back of trying one's best that can make of a defocusing amount Δ f;

(2) parallel beam on the above-mentioned vertical direction through above be coated with anti-reflection film and behind the dressing plate (17) of following not plated film, be divided into the light beam of two bundle capwises, wherein Fan She sub-fraction folded light beam is reference beam I _a, the most of light beam that sees through is check light beam I _b

(3) the check light beam I of the most of capwise that sees through by dressing plate (17) _bBehind the standard reflection mirror (18) that the relative vertical direction of process reflecting surface becomes miter angle to put the light beam introducing level of capwise is moved towards;

(4) the check light beam I of level trend _bReturn along original optical path by standard reflection mirror (20) the back autocollimatic of injecting vertical storing after the detected system (19);

(5) the check light beam I that returns _bBy dressing plate (17) back and reference beam I _aForm interference fringe, pass through Amici prism (15) again and enter and videotape and disposal system (21) provides the quantitative measurment result, the L-shaped structure of whole interferometer.

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