CN104099573B - depositing device - Google Patents
depositing device Download PDFInfo
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- CN104099573B CN104099573B CN201310647758.XA CN201310647758A CN104099573B CN 104099573 B CN104099573 B CN 104099573B CN 201310647758 A CN201310647758 A CN 201310647758A CN 104099573 B CN104099573 B CN 104099573B
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- Prior art keywords
- daughter board
- magnetic cell
- supporting member
- adhesion plate
- magnetic
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- 238000000151 deposition Methods 0.000 title claims abstract description 98
- 230000008021 deposition Effects 0.000 claims abstract description 72
- 239000000463 material Substances 0.000 claims abstract description 53
- 239000000758 substrate Substances 0.000 claims abstract description 26
- 239000013078 crystal Substances 0.000 description 16
- 230000010355 oscillation Effects 0.000 description 11
- 230000004927 fusion Effects 0.000 description 8
- 230000008859 change Effects 0.000 description 7
- 238000001704 evaporation Methods 0.000 description 6
- 230000008020 evaporation Effects 0.000 description 4
- 238000005259 measurement Methods 0.000 description 3
- 230000008901 benefit Effects 0.000 description 2
- 238000000354 decomposition reaction Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- TVEXGJYMHHTVKP-UHFFFAOYSA-N 6-oxabicyclo[3.2.1]oct-3-en-7-one Chemical compound C1C2C(=O)OC1C=CC2 TVEXGJYMHHTVKP-UHFFFAOYSA-N 0.000 description 1
- 230000002776 aggregation Effects 0.000 description 1
- 238000004220 aggregation Methods 0.000 description 1
- 238000005452 bending Methods 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000003344 environmental pollutant Substances 0.000 description 1
- 230000005284 excitation Effects 0.000 description 1
- 230000005283 ground state Effects 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 239000011368 organic material Substances 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 231100000719 pollutant Toxicity 0.000 description 1
- 238000001556 precipitation Methods 0.000 description 1
- 230000002035 prolonged effect Effects 0.000 description 1
- 230000004224 protection Effects 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 239000007921 spray Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 230000000007 visual effect Effects 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B33/00—Electroluminescent light sources
- H05B33/10—Apparatus or processes specially adapted to the manufacture of electroluminescent light sources
Abstract
A kind of depositing device includes：Substrate support, it is configured to support base；Sedimentary origin, it is configured to supply deposition materials；Sensor unit, it is configured to sense the deposition of deposition materials；First anti-adhesion plate, it is attached to sensor unit and including one or more first magnetic cells；Second anti-adhesion plate, it is attached to sensor unit and including one or more second magnetic cells；With three proofings lamina affixad, it is attached to the first anti-adhesion plate and the second anti-adhesion plate, below sensor unit, and including one or more 3rd magnetic cells, wherein, first anti-adhesion plate, the second anti-adhesion plate and three proofings lamina affixad are bonded to each other by the first magnetic cell, the second magnetic cell and the 3rd magnetic cell, the each magnetic cell adjoined in the first magnetic cell, the second magnetic cell and the 3rd magnetic cell, and wherein, the first anti-adhesion plate, the second anti-adhesion plate and three proofings lamina affixad jointly cover a part for sensor unit.
Description
Patent application claims on April 3rd, 2013 the 10-2013-0036529 korean patent applications submitted it is excellent
First power and rights and interests, the full content of the patent application are contained in this by quoting.
Technical field
This disclosure relates to depositing device.
Background technology
In recent years, OLED is because of its excellent brightness and visual angle and because when compared with liquid crystal display
It need not include single light source and highlightedly be used as display device of future generation.Therefore, OLED has slim
And the advantages of in light weight.In addition, OLED has the characteristic of rapid response speed, low-power consumption, high brightness etc..
OLED includes organic luminescent device, and organic luminescent device includes anode, organic luminous layer and negative electrode.
Hole and electronics inject organic luminous layer by anode and negative electrode respectively, and compound in organic luminous layer, produce exciton（Electricity
Son-hole pair）.Exciton emission energy, when returning to ground state from excitation state, energy discharges in the form of light.
Depositing device for manufacturing OLED includes the sedimentary origin for being used for basad upper supply deposition materials
With the sensor unit of the thickness for measuring the deposition materials being deposited in substrate.Sensor unit measurement is evaporated from sedimentary origin
Deposition materials amount, and measure the deposition velocity of deposition materials.The thickness for the deposition materials being deposited in substrate depends on
Evaporation capacity and deposition velocity.The deposition materials that substrate is fed to from sedimentary origin are stacked on sensor unit, turn into pollutant.Cause
This, sensor unit breaks down.
The content of the invention
The invention provides a kind of precipitation equipment with anti-adhesion plate, the anti-adhesion plate easily can adhere to and depart from
Protect sensor unit simultaneously.
The embodiment of present inventive concept provides a kind of depositing device, and the depositing device includes：Substrate support, construction
For support base；Sedimentary origin, it is configured to basad supply deposition materials；Sensor unit, it is configured to receive the one of deposition materials
Part, to sense the deposition of deposition materials；First anti-adhesion plate, it is attached to sensor unit and including one or more the
One magnetic cell；Second anti-adhesion plate, it is attached to sensor unit and including one or more second magnetic cells, second is anti-adhesion
Plate is relative with the first anti-adhesion plate relative to sensor unit；With three proofings lamina affixad, the first anti-adhesion plate and second are attached to
Anti-adhesion plate, below sensor unit, and including one or more 3rd magnetic cells, wherein, the first anti-adhesion plate, the
Two anti-adhesion plates and three proofings lamina affixad are bonded to each other by the first magnetic cell, the second magnetic cell and the 3rd magnetic cell, adjoin
Corresponding magnetic cell in one magnetic cell, the second magnetic cell and the 3rd magnetic cell, and wherein, it is the first anti-adhesion plate, second anti-attached
Plate and three proofings lamina affixad jointly covers a part for sensor unit.
Sensor unit may include：First supporting member；Second supporting member, it is attached to the lower surface and first of the first supporting member
Anti-adhesion plate, Longitudinal extending and extend laterally in a second direction in a first direction, second direction is substantially perpendicular to the
One direction；3rd supporting member, lower surface that is adjacent with one end of the second supporting member and being attached to the second supporting member, in first party
Extend laterally upwards and the Longitudinal extending on third direction, third direction are substantially perpendicular to first direction and second direction；
Sensor housing, for accommodating sensor unit；Sender unit cap, it is attached to sensor housing and limits sensor unit reception
Deposition materials the hole that passes therethrough of a part；And sensor connecting piece, with reference to the 3rd supporting member and sensor housing.
The depositing device may also include vacuum chamber, wherein, substrate support is configured to cause basal surface to vacuum chamber
In sedimentary origin, and wherein, the upper surface of the first supporting member is attached to vacuum chamber and is configured to adjacent with substrate.
First anti-adhesion plate, the second anti-adhesion plate and three proofings lamina affixad can cover the lateral edges of the second supporting member, the 3rd
Supporting member, sensor connecting piece, a part for sensor housing and sender unit cap, and it is the first anti-adhesion plate, second anti-adhesion
Plate and three proofings lamina affixad can expose the region of the lower end of sender unit cap.
First anti-adhesion plate may also include：First-the first daughter board, the preceding surface of the second supporting member is arranged essentially parallel to, the
The preceding surface of two supporting members is substantially perpendicular to the upper surface of the second supporting member and extended in a first direction；First-the second
Daughter board, is arranged essentially parallel to the left surface of the second supporting member, and the left surface of the second supporting member is substantially perpendicular to the second supporting member
Upper surface and extend in a second direction；First-the three daughter board, the right surface of the second supporting member is arranged essentially parallel to, the
The right surface of two supporting members is relative with the left surface of the second supporting member；First connection unit, it is attached to the upper of the first-the second daughter board
Portion and extend in a first direction；With the second connection unit, the top and in a first direction of the first-the three daughter board is attached to
Upper extension, wherein, the first magnetic cell is located on the first-the second daughter board and the first-the three daughter board, wherein, the first-the second daughter board
One end and one end of the first-the three daughter board are attached to the respective edges of the first-the first daughter board, wherein, the first-the second daughter board and
One-the three daughter board extends into than the second support distal, and wherein in a second direction, the first-the first daughter board to first-the three
Daughter board is upwardly extended with stacked second supporting member and the 3rd supporting member in third party.
The inner surface on the top of the first-the first daughter board can contact the preceding surface of the second supporting member, the first-the second daughter board it is upper
The inner surface in portion can contact the left surface of the second supporting member, accessible second supporting of inner surface on the top of the first-the three daughter board
The right surface of part, and each lower surface in the first connection unit and the second connection unit can contact the upper of the second supporting member
Surface.
First magnetic cell may include：First-the first magnetic cell and the first-the second magnetic cell, in the another of the first-the second daughter board
It is separated from one another on the inner surface of one end；First-the three magnetic cell and the first-the four magnetic cell, in the another of the first-the three daughter board
It is separated from one another on the inner surface of one end；First-the five magnetic cell, in the bottom adjacent with one end of the first-the second daughter board
On inner surface；With the first-the six magnetic cell, on the inner surface of the bottom adjacent with one end of the first-the three daughter board.
Second anti-adhesion plate may also include：Second-the first daughter board, in face of relative with the preceding surface of the second supporting member second
The rear surface of supporting member；Second-the second daughter board, it is arranged essentially parallel to the left surface of the second supporting member；With the second-the three daughter board,
The right surface of the second supporting member is arranged essentially parallel to, wherein, the second magnetic cell is in the second-the second daughter board and the second-the three daughter board
On, wherein, the second-the second daughter board and the second-the three daughter board upwardly extend in third party, with stacked second supporting member and the 3rd
Bearing member, wherein, the inner surface adjacent with one end of the second-the second daughter board contacts the adjacent with the other end of the first-the second daughter board
Outer surface, wherein, the inner surface adjacent with one end of the second-the three daughter board contacts the adjacent with the other end of the first-the three daughter board
Outer surface, and wherein, the other end of the other end of the second-the second daughter board and the second-the three daughter board is attached to second-the first
Daughter board.
Second magnetic cell may include：Second-the first magnetic cell and the second-the second magnetic cell, the second-the second daughter board with
On the adjacent outer surface in one end；Second-the three magnetic cell and the second-the four magnetic cell, in the second-the three daughter board and one end phase
On adjacent outer surface；Second-the five magnetic cell, on the inner surface of the bottom adjacent with the other end of the second-the second daughter board；With
Second-the six magnetic cell, on the inner surface of the bottom adjacent with the other end of the second-the three daughter board, wherein, first-the first
Magnetic cell is stacked the second-the first magnetic cell to the first-the four magnetic cell to the second-the four magnetic cell respectively, and wherein, the
The corresponding polarity of one-the first magnetic cell to the first-the four magnetic cell and the second-the first magnetic cell to the second-the four magnetic cell permits
Perhaps the phase in the first-the first magnetic cell to the first-the four magnetic cell and the second-the first magnetic cell to the second-the four magnetic cell
Attraction is formed between the magnetic cell that should be stacked.
First-the first magnetic cell to the first-the four magnetic cell and the second-the first magnetic cell to the second-the four magnetic cell can
Longitudinal extending and it can be extended laterally in a second direction on third direction.
Three proofings lamina affixad may also include：3rd-the first daughter board, in face of the lower surface of the second supporting member；3rd-the second son
Plate, it is arranged essentially parallel to the preceding surface of the second supporting member；3rd-the three daughter board is relative with the 3rd-the second daughter board and substantially
Parallel to the rear surface of the second supporting member；3rd-the four daughter board and the 3rd-the five daughter board, it is arranged essentially parallel to the second supporting member
Left surface；3rd-the six daughter board and the 3rd-the seven daughter board are relative with the 3rd-the four daughter board and the 3rd-the five daughter board respectively
And it is arranged essentially parallel to the right surface of the second supporting member；First twisted plate, for combining the 3rd-the four daughter board and the 3rd-the
Five daughter boards, the first twisted plate are arranged essentially parallel to the lateral edges of one end of the second-the second daughter board and are attached to the second-the second son
The bottom of the lateral edges of one end of plate；And second twisted plate, for combining the 3rd-the six daughter board and the 3rd-the seven daughter board, the
Two twisted plates are arranged essentially parallel to the lateral edges of one end of the second-the three daughter board and are attached to one end of the second-the three daughter board
Lateral edges bottom, wherein, the 3rd magnetic cell on the 3rd-the four daughter board to the 3rd-the seven daughter board, wherein, the 3rd-the second
Daughter board is attached to the border table of the 3rd-the first daughter board to the bottom of the 3rd-the seven daughter board and the first twisted plate and the second twisted plate
Face, wherein, the 3rd-the second daughter board, the 3rd-the four daughter board and the 3rd-the six daughter board be bonded to each other and be respectively incorporated to first-
The bottom of first daughter board, the first-the second daughter board and the first-the three daughter board, and wherein, the 3rd-the three daughter board, the 3rd-the five
Daughter board and the 3rd-the seven daughter board are bonded to each other and are respectively incorporated to the second-the first daughter board, the second-the second daughter board and second-the
The bottom of three daughter boards.
The outer surface of the bottom of accessible first-the first daughter board of the inner surface on the top of the 3rd-the second daughter board, the 3rd-the
The inner surface on the top of three daughter boards can contact the outer surface of the bottom of the second-the first daughter board, the top of the 3rd-the four daughter board it is interior
The outer surface of the bottom of the daughter board of Surface accessible first-the second, the inner surface on the top of the 3rd-the five daughter board accessible second-
The outer surface of the bottom of second daughter board, the inner surface on the top of the 3rd-the six daughter board can contact the bottom of the first-the three daughter board
Outer surface, the inner surface on the top of the 3rd-the seven daughter board can contact the outer surface of the bottom of the second-the three daughter board, the first bending
The inner surface on the top of plate can contact the bottom of the side surface of one end of the second-the second daughter board, and the top of the second twisted plate
Inner surface can contact the second-the three daughter board one end side surface bottom.
One end of 3rd-the four daughter board and one end of the 3rd-the six daughter board can be coupled to the 3rd-the second daughter board, and first is curved
Bent plate can combine the other end of the 3rd-the four daughter board and one end of the 3rd-the five daughter board, and the second twisted plate can combine the 3rd-the
One end of the other end of six daughter boards and the 3rd-the seven daughter board, the other end of the 3rd-the five daughter board and the 3rd-the seven daughter board it is another
One end can be coupled to the 3rd-the three daughter board, between the inner surface of the 3rd-the four daughter board and the inner surface of the 3rd-the six daughter board
Distance is substantially equal to the distance between the outer surface of the first-the second daughter board and the outer surface of the first-the three daughter board, and
The distance between the inner surface of three-the five daughter boards and the inner surface of the 3rd-the seven daughter board are substantially equal to the second-the second daughter board
Outer surface and the second-the three daughter board the distance between outer surface.
3rd magnetic cell may include：3rd-the first magnetic cell, in the outer surface on the top of one end of the 3rd-the four daughter board
On；3rd-the second magnetic cell, on the outer surface on the top adjacent with the other end of the 3rd-the five daughter board；3rd-the three magnetic
Unit, on the outer surface on the top adjacent with one end of the 3rd-the six daughter board；With the 3rd-the four magnetic cell, the 3rd-the
On the outer surface on the top adjacent with the other end of seven daughter boards, wherein, the 3rd-the first magnetic cell, the 3rd-the second magnetic cell,
Three-the three magnetic cells and the 3rd-the four magnetic cell are stacked the first-the five magnetic cell, the second-the five magnetic cell, first-the respectively
Six magnetic cells and the second-the six magnetic cell, and the 3rd-the first magnetic cell, the 3rd-the second magnetic cell, the 3rd-the three magnetic list
Member, the 3rd-the four magnetic cell, the first-the five magnetic cell, the second-the five magnetic cell, the first-the six magnetic cell and second-the six
The corresponding polarity of magnetic cell allow the 3rd-the first magnetic cell, the 3rd-the second magnetic cell, the 3rd-the three magnetic cell, the 3rd-
In 4th magnetic cell, the first-the five magnetic cell, the second-the five magnetic cell, the first-the six magnetic cell and the second-the six magnetic cell
Accordingly stacked magnetic cell between form attraction.
First-the five magnetic cell, the first-the six magnetic cell, the second-the five magnetic cell, the second-the six magnetic cell and
Three-the first magnetic cells to the 3rd-the four magnetic cell Longitudinal extending and can laterally be prolonged on third direction in a second direction
Stretch.
3rd-the first daughter board can limit the open region in the region of the bottom for exposing sender unit cap.
Open region Longitudinal extending and can extend laterally in a first direction in a second direction, and sensor connects
Part may be structured to movable sensor housing, with movable sensor lid in a second direction.
Therefore, the depositing device of embodiments of the invention includes anti-adhesion plate, and anti-adhesion plate easily can adhere to and take off
From sensor device and protect sensor device.
Brief description of the drawings
By referring to the detailed description considered below in conjunction with the accompanying drawings, the above and other advantage of the disclosure will become easily bright
In vain, in the accompanying drawings：
Fig. 1 is the view for the depositing device for showing the exemplary embodiment according to the disclosure；
Fig. 2 is the decomposition diagram of the sensor device of embodiment for showing to show in Fig. 1；
Fig. 3 is the perspective view for showing the sensor unit according to an embodiment of the invention for being attached to the first anti-adhesion plate；
Fig. 4 is the perspective for showing the second anti-adhesion plate according to an embodiment of the invention for being attached to the first anti-adhesion plate
Figure；
Fig. 5 be along Fig. 4 in show I-I' lines interception sectional view；
Fig. 6 is to show the anti-adhesion plate of first to be bonded to each other and second anti-adhesion according to an embodiment of the invention of being attached to
The perspective view of the three proofings lamina affixad of plate；
Fig. 7 be along Fig. 6 in show II-II' lines interception sectional view；
Fig. 8 be along Fig. 6 in show III-III' lines interception sectional view；With
Fig. 9 is the lower plan view of the sensor device of embodiment for showing to show in Fig. 1.
Embodiment
Hereinafter, embodiments of the invention be will be explained in more detail with reference to the drawing.
Fig. 1 is the view for the depositing device for showing the exemplary embodiment according to the disclosure.
Reference picture 1, depositing device 100 include vacuum chamber 10, sedimentary origin 110, substrate 120 and sensor device 130.
Vacuum chamber 10 reduces or prevents foreign substance from entering, and keeps high vacuum state to ensure the line of deposition materials
Property.
Sedimentary origin 110 is located at the bottom of vacuum chamber 10.For convenience of description, a sedimentary origin is only shown in Fig. 1
110, although the quantity of sedimentary origin is not limited to one.Deposition materials are comprised in sedimentary origin such as organic material, metal material
In 110 and it will be deposited in substrate 120.Deposition materials are evaporated to substrate 120 by sedimentary origin 110.
Sedimentary origin 110 includes fusion pot 111, the deposition materials 112 in fusion pot 111 and nozzle 113, and nozzle 113 is used to evaporating/
The deposition materials 112 that evaporate from fusion pot 111 are sprayed so that material 112 is delivered into substrate 120.Nozzle 113 is located at sedimentary origin 110
Upper surface at.Although not shown in figure, sedimentary origin 110 can include heater inside fusion pot 111, be filled for evaporating
Deposition materials 112 in fusion pot 111.
Substrate 120 is located at top in vacuum chamber 10, in face of sedimentary origin 110.Substrate 120 is fixed to by substrate support 20
The top of vacuum chamber 10.
Sensor device 130 is adjacent with substrate 120 and is attached to the top of vacuum chamber 10.Sensor device 130 receives/
A part for the deposition materials 112 evaporated from sedimentary origin 110 is sensed, with the deposition materials 112 of sensing deposition on the substrate 120
Thickness.
Sensor device 130 includes being used to sense the sensor unit S_U of the deposition of deposition materials 112 and for covering
The anti-adhesion plate P in sensor unit S_U region.Fig. 1 shows the sensor unit S_U area not covered by anti-adhesion plate P
Domain, but the sensor unit S_U covered by anti-adhesion plate P is not shown.Then, sensor list is described in detail in reference picture 2
First S_U and anti-adhesion plate P.
Deposition materials 112 in fusion pot 111 are evaporated because of the heat of the heater inside fusion pot 111, and pass through nozzle
113 evaporate/spray from fusion pot 111.The deposition materials 112 evaporated by nozzle 113 are deposited in substrate 120.In addition, by heavy
The deposition materials 112 that the nozzle 113 in product source 110 evaporates（For example, one part）It is provided to sensor device 130 or is passed
Sensor arrangement 130 receives.
The deposition materials 112 evaporated by the nozzle 113 of sedimentary origin 110 are not stacked/are gathered in being covered by anti-adhesion plate P
Corresponding to the region of lid on sensor unit S_U.Therefore, sensor unit S_U region can be protected by anti-adhesion plate P
Shield.
The measurement of sensor device 130 is evaporated to the evaporation capacity and deposition of the deposition materials 112 of substrate 120 by nozzle 113
Speed.The thickness of the deposition materials 112 of deposition on the substrate 120 corresponds to evaporation capacity and deposition velocity.
Although not shown in figure, sensor is located in the sensor unit S_U of sensor device 130.Pass through nozzle
The deposition materials 112 of 113 evaporations are by being provided to sensor unit S_U sensor through sensor unit S_U hole.Will
Sensor unit S_U this structure is described in detail in reference picture 2.By the amount of the deposition materials 112 of stacking/aggregation on a sensor
To determine/the thickness of estimation deposition deposition materials 112 on the substrate 120（For example, corresponding thickness）.
Sensor of the crystal oscillator as sensor unit S_U can be used.With the table for being deposited on crystal oscillator
The amount increase of deposition materials 112 on face, the frequency of oscillation change or reduction of crystal oscillator.By sensing crystal oscillator
Frequency of oscillation changes to measure/estimate the deposition of deposition materials 112 and deposition velocity.It is although brilliant not shown in figure
The change of the frequency of oscillation of oscillation body device is applied to peripheral control unit.The change of frequency of oscillation of the controller based on crystal oscillator
Change to calculate the deposition of deposition materials 112 and deposition velocity.
When the thickness for the deposition materials 112 being deposited on crystal oscillator surface exceedes given thickness, crystal oscillator
It can become unavailable.That is, when the deposition materials 112 due to being deposited on sensor unit S_U sensor surface
When amount and the frequency of oscillation of crystal oscillator that reduces decrease below the frequency of oscillation of given/user's selection, it can use another
One sensor changes the sensor.
In order to change the sensor, anti-adhesion plate P and sensor unit S_U can be separated.It will easily can prevent attached
Plate P and sensor unit S_U to separate.In addition, after the sensor has been changed with another new sensor, can be easily
By anti-adhesion plate P combinations/recombine sensor unit S_U.
Therefore, depositing device 100 includes being readily adhered to and departing from sensor device 130 and protect sensor device
130 anti-adhesion plate P.
Fig. 2 is the decomposition diagram of the sensor device of embodiment for showing to show in Fig. 1.Reference picture 2, sensor device
130 is anti-attached to adapt to the first of sensor unit S_U region with sensor unit S_U is attached to including sensor unit S_U
Plate P1, the second anti-adhesion plate P2 and three proofings lamina affixad P3.By the first anti-adhesion plate P1, the second anti-adhesion plate P2 and three proofings
Lamina affixad P3 forms anti-adhesion plate P.
Sensor unit S_U connects including supporting member 131,132 and 133, sensor connecting piece 134 and 135 and sensor
Receptacle S_H and S_C.Supporting member 131,132 and 133 is disposed adjacently with substrate 120 and is attached to the top of vacuum chamber 10.
Supporting member 131,132 and 133 is attached to sensor and receives container S_H and S_C by sensor connecting piece 134 and 135.Sensor position
Received in sensor in container S_H and S_C.
Supporting member 131,132 and 133 include the first supporting member 131, be attached to the first supporting member 131 lower surface second
Supporting member 132 and be attached to the second supporting member 132 lower surface the 3rd supporting member 133.
The upper surface of first supporting member 131 is disposed adjacently with substrate 120 and is attached to the top of vacuum chamber 10.First
Supporting member 131 has in a first direction on DX（For example, Longitudinal extending on DX in a first direction）Long side and in second direction DY
On（For example, extended laterally on second direction DY）Short side, second direction DY is substantially vertical with first direction DX（For example,
Vertically/orthogonal）.As shown in Figure 2, when from plan, the first supporting member 131 has octagonal or octagonal shape
Shape, although the shape of the first supporting member 131 is not particularly limited.For example, the first supporting member 131 can have the shape of polygon
Shape.
As shown in Figure 2, when from plan, the size of the second supporting member 132 is more than the chi of the first supporting member 131
It is very little, but the size of the second supporting member 132 should not necessarily be limited by this or be limited by this.For example, when from plan, second
The size of bearing member 132 can be optionally less than the size of the first supporting member 131.Second supporting member 132（For example, in Fig. 2
The top surface of two supporting members 132）Extend with the field side/edge extended in a first direction on DX and on second direction DY short
Side/edge.When from plan, the second supporting member 132 has rectangular shape.
It is vertical among side surface/lateral edges of second supporting member 132（It is for example, vertical/orthogonal）In the second supporting member 132
Upper surface and be defined as the preceding table of the second supporting member 132 parallel to a side surface of the long side of the second supporting member 132
Face FS, and the preceding surface of itself and the second supporting member 132 is defined as the in face of the side surface of/relative the second supporting member 132
The rear surface BS of two supporting members 132.
It is vertical and parallel when the upper surface level of the second supporting member 132 among the side surface of second supporting member 132
It is defined as the left surface LS of the second supporting member 132, the second supporting member in a side surface of the short side of the second supporting member 132
132 with the left surface LS of the second supporting member 132 are defined as the right surface of the second supporting member 132 in face of/relative side surface
RS。
Any side of 3rd supporting member 133 and the second supporting member 132 is disposed adjacently.For example, the 3rd supporting member 133 and
One in two long sides of two supporting members 132 is disposed adjacently to be attached to the lower surface of the second supporting member 132.In this implementation
In example, the 3rd supporting member 133 deviates the center of the second supporting member 132.
3rd supporting member 133 extends on third direction DZ, substantially perpendicular to the horizontal following table of the second supporting member 132
Face.Third direction DZ is substantially vertical（It is for example, orthogonal/vertical）In first direction DX and second direction DY.3rd supporting member 133
With short side/edge on the long side/edge and first direction DX on third direction DZ.Towards the following table of the second supporting member 132
The surface of 3rd supporting member 133 of the point below the core in face is defined as the inner surface of the 3rd supporting member 133, with interior table
The relative surface in face is defined as the outer surface of the 3rd supporting member 133.
3rd supporting member 133 is attached to sensor and receives container S_H and S_C by sensor connecting piece 134 and 135.In detail
Ground, sensor connecting piece 134 and 135 include first sensor connector 134 and a pair of second sensor connectors 135.First
One end of sensor connecting piece 134 is attached to the inner surface of the 3rd supporting member 133, and first sensor connector 134 is in second party
On to DY/extend along second direction DY.The other end of first sensor connector 134 is incorporated in second sensor connector
Between 135 end.
Second sensor connector 135 dips down at a certain angle tiltedly to be extended.Although not shown in figure, second passes
One end combined with the other end of first sensor connector 134 of sensor connector 135 connects relative to first sensor
The other end of part 134（That is, the rotary shaft of second sensor connector 135）Angularly rotate.Second sensor connects
The other end of part 135 is attached to sensor and receives container S_H and S_C.
Sensor receives container S_H and S_C and is construed as including the sensor for being attached to sensor connecting piece 134 and 135
Housing S_H and be attached to sensor housing S_H bottom sender unit cap S_C.Sensor housing S_H upper surface is attached to
The other end of two sensor connecting pieces 135.In the present embodiment, sensor is located in sensor housing S_H.
Sensor housing S_H bottom is attached to sender unit cap S_C.Sender unit cap S_C is limited by by sender unit cap S_C
Both ends open and the hole H that limits（For example, the hole H inside sender unit cap S_C）And the shape with cylinder.Sender unit cap
S_C hole H is used through the flow path that the deposition materials 112 that nozzle 113 evaporates/sprayed flow through.
The deposition materials 112 for flowing through sender unit cap S_C hole H are provided to sensing inside sensor housing S_H
Device.With the increase of the amount of the deposition materials 112 deposited on sensor surface, the frequency of oscillation of crystal oscillator reduces.It is logical
The change of the frequency of oscillation of sensing crystal oscillator is crossed, measures the deposition and deposition velocity of deposition materials 112.
First anti-adhesion plate P1 is attached to sensor unit S_U at a sensor unit S_U side surface.Second is anti-
Lamina affixad P2 be attached to the first anti-adhesion plate P1 and positioned at sensor unit S_U be combined with the first anti-adhesion plate P1 that
At the relative apparent surface in individual side surface.Three proofings lamina affixad P3 is attached to the first anti-adhesion anti-adhesion plate P2 of plate P1 and second simultaneously
And below sensor unit S_U.
First anti-adhesion plate P1, the second anti-adhesion plate P2 and three proofings lamina affixad P3 pass through stacked on top of each other（For example, adjoin）
The group M1_1 of first, second, and third magnetic cell/magnetic cell tied each other to M1_6, M2_1 to M2_6 and M3_1 to M3_4
Close, therefore, the first anti-adhesion plate P1, the second anti-adhesion plate P2 and three proofings lamina affixad P3 covering sensor unit S_U region.
First anti-adhesion plate P1, the second anti-adhesion plate P2 and three proofings lamina affixad P3 cover the side surface of the second supporting member 132, the 3rd
Side surface, the side surface of sensor connecting piece 134 and 135 and the sensor housing S_H side surface of bearing member 133, also covering pass
Sensor lid S_C region and the region of exposure sender unit cap S_C bottom.The structure is described in detail in reference picture 3 to Fig. 9.
First anti-adhesion plate P1 includes the first-the first-the three daughter board S1_3 of daughter board S1_1 to first, the first magnetic cell M1_1
To M1_6, the first connection unit C1 and the second connection unit C2.First-the first-the three daughter board S1_3 of daughter board S1_1 to first are
With rectangular shape, extend all on third direction DZ and be stacked the second supporting member 132 and the 3rd supporting member 133.
First-the first daughter board S1_1（For example, the first-the first daughter board S1_1 inner surface）It is configured in face of the second supporting
The preceding surface FS of part 132.First-the second daughter board S1_2 one end and the first-the three daughter board S1_3 one end are respectively incorporated to
One-the first daughter board S1_1 border surface/edge.
First-the second daughter board S1_2 and the first-the three daughter board S1_3 also extend on second direction DY, than the second supporting member
132 short side length.That is, the first-the second daughter board S1_2 and the first-the three daughter board S1_3 are including direction DY and direction DZ
Plane in extend.First-the second daughter board S1_2 is arranged essentially parallel to the left surface LS of the second supporting member 132.First-the three son
Plate S1_3 is arranged essentially parallel to the right surface RS of the second supporting member 132.First-the second daughter board S1_2 inner surface and first-the
The distance between three daughter board S1_3 inner surface is approximately equal to the length of the long side of the second supporting member 132.
First anti-adhesion plate P1 the first magnetic cell M1_1 to M1_6 includes the first-the first magnetic cell M1_1 to first-the
Six magnetic cell M1_6.First-the first-the four magnetic cell M1_4 of magnetic cell M1_1 to first have what is extended on third direction DZ
Long side and the short side extended on second direction DY.First-the five magnetic cell M1_5 and the first-the six magnetic cell M1_6 has
The long side extended on second direction DY and the short side extended on third direction DZ.
First-the first magnetic cell M1_1 and the first-the second magnetic cell M1_2 is located at the first-the second daughter board S1_2 inner surface
On, the other end with the first-the second daughter board S1_2（For example, it is attached to the first-the first daughter board with the first-the second daughter board S1_2
The relative one end in S1_2 one end）The adjacent and certain distance that is separated.First-the three magnetic cell M1_3 and first-the four
Magnetic cell M1_4 is located on the first-the three daughter board S1_3 inner surface, the other end with the first-the three daughter board S1_3（For example, with
The relative one end in first-the three daughter board S1_3 one end for being attached to the first-the first daughter board S1_1）It is adjacent and be separated one
Set a distance.
First-the five magnetic cell M1_5 is located on the first-the second daughter board S1_2 inner surface, with the first-the second daughter board S1_
2 one end（For example, the first-the second daughter board S1_2 one end for being attached to the first-the first daughter board S1_2）Bottom it is adjacent.The
One-the six magnetic cell M1_6 is located on the first-the three daughter board S1_3 inner surface, one end with the first-the three daughter board S1_3（Example
Such as, the first-the three daughter board S1_3 one end for being attached to the first-the first daughter board S1_1）Bottom it is adjacent.
First connection unit C1 is attached to the first-the second daughter board S1_2 uper side surface.First connection unit C1 is first
Extend on the DX of direction（For example, extend in the plane corresponding to direction DX and DY）, in the first-the second daughter board S1_2
Surface.First connection unit C1 is adjacent with the first-the first daughter board S1_1.
Second connection unit C2 is attached to the first-the three daughter board S1_3 uper side surface, relative with first direction DX
Side upwardly extends（For example, extend in the plane corresponding to direction DX and DY）, perpendicular to the first-the three daughter board S1_3 interior table
Face.Second connection unit C2 is adjacent with the first-the first daughter board S1_1.
Second anti-adhesion plate P2 includes the second-the first daughter board S2_1 to second-the three daughter board S2_3 and the second magnetic cell M2_
1 to M2_6.Second-the first-the three daughter board S2_3 of daughter board S2_1 to second have rectangular shape, prolong on third direction DZ
Stretch, be stacked the second supporting member 132 and the 3rd supporting member 133.
Second-the first daughter board S2_1（For example, the second-the first daughter board S2_1 inner surface）In face of the second supporting member 132
Surface BS afterwards.The other end of second-the second daughter board S2_2 end face to the first-the second daughter board S1_2.Second-the three daughter board
The other end of the S2_3 end face to the first-the three daughter board S1_3.Second-the second daughter board S2_2 other end and second-the three
The daughter board S2_3 other end is attached to the second-the first daughter board S2_1 border surface/edge.
Second-the second daughter board S2_2 and the second-the three daughter board S2_3 upwardly extend in the side relative with second direction DY（Example
Such as, extend in the plane extended along direction DY and DZ）.Second-the second daughter board S2_2 is arranged essentially parallel to the second supporting member 132
Left surface LS.Second-the three daughter board S2_3 is arranged essentially parallel to the right surface RS of the second supporting member 132.Second-the second daughter board
The distance between S2_2 inner surface and the second-the three daughter board S2_3 inner surface is approximately equal to the outer of the first-the second daughter board S1_2
The distance between surface and the first-the three daughter board S1_3 outer surface.
Second anti-adhesion plate P2 the second magnetic cell M2_1 to M2_6 includes the second-the first magnetic cell M2_1 to second-the
Six magnetic cell M2_6.Second-the first-the four magnetic cell M2_4 of magnetic cell M2_1 to second have the long side on third direction DZ
With the short side on second direction DY.Second-the five magnetic cell M2_5 and the second-the six magnetic cell M2_6 has in second direction
Long side on DY and the short side on third direction DZ.
Second-the first magnetic cell M2_1 and the second-the second magnetic cell M2_2 is separated certain distance, and positioned at the
It is adjacent with the second-the second daughter board S1_2 one end on two-the second daughter board S2_2 outer surface.Second-the three magnetic cell M2_3 and
Second-the four magnetic cell M2_4 is separated certain distance, and on the second-the three daughter board S2_3 outer surface, with the
Two-the three daughter board S2_3 one end is adjacent.
Second-the first-the four magnetic cell M2_4 of magnetic cell M2_1 to second are provided to respectively correspond to the first-the first magnetic
The magnetic cell M1_4 of unit M1_1 to first-the four.Therefore, when the first anti-adhesion anti-adhesion plate P2 of plate P1 and second it is aligned with each other/
With reference to when, each stacked first-the first magnetic cell M1_ in the second-the first-the four magnetic cell M2_1 of magnetic cell M2_1 to second
Corresponding magnetic cell in 1 to the first-the four magnetic cell M1_4.The structure is described in detail in reference picture 3 to Fig. 9.
Second-the five magnetic cell M2_5 be located on the second-the second daughter board S2_2 inner surface and with its another side
Bottom is adjacent.Second-the six magnetic cell M2_6 be located on the second-the three daughter board S2_3 inner surface and with its another side
Bottom is adjacent.
Three proofings lamina affixad P3 include the 3rd-the first daughter board S3_1 to the 3rd-the seven daughter board S3_7, the first twisted plate B1 and
Second twisted plate B2 and the 3rd magnetic cell M3_1 to M3_4.3rd-the first daughter board S3_1（For example, three proofings lamina affixad P3
The top surface of bottom）It is configured to face the second supporting member 132.3rd-the second daughter board S3_2 to the 3rd-the seven daughter board S3_7 and
First twisted plate B1 and the second twisted plate B2 are on the direction relative with third direction DZ（For example, up）Extension, perpendicular to
3rd-the first daughter board S3_1.
3rd-the second daughter board S3_2 faces the preceding surface FS of the second supporting member 132.3rd-the three daughter board S3_3 is in face of the
The rear surface BS of two supporting members 132.3rd-the four daughter board S3_4 and the 3rd-the five daughter board S3_5 is arranged essentially parallel to second
The left surface LS of bearing member 132.3rd-the six daughter board S3_6 and the 3rd-the seven daughter board S3_7 is arranged essentially parallel to the second supporting member
132 right surface RS.
3rd-the second daughter board S3_2, the 3rd-the four daughter board S3_4 and the 3rd-the six daughter board S3_6 be bonded to each other and by
It is configured to be attached to the first-the first daughter board S1_1, the first-the second daughter board S1_2 and the first-the three daughter board S1_3 bottom.
3rd-the three daughter board S3_3, the 3rd-the five daughter board S3_5 and the 3rd-the seven daughter board S3_7 are bonded to each other and are configured to point
The second-the first daughter board S2_1, the second-the second daughter board S2_2 and the second-the three daughter board S2_3 bottom are not attached to.By reference picture
3 to Fig. 9 are described in detail the structure.
3rd-the four daughter board S3_4 one end and the 3rd-the six daughter board S3_6 one end are attached to the 3rd-the second daughter board
S3_2 border surface/edge.3rd-the four daughter board S3_4 and the 3rd-the six daughter board S3_6 is on second direction DY（For example,
From the 3rd-the second daughter board S3_2）Extension, perpendicular to the 3rd-the second daughter board S3_2.
3rd-the four daughter board S3_4 is attached to the 3rd-the five daughter board S3_5 by the first twisted plate B1, and the second twisted plate B2 will
3rd-the six daughter board S3_6 is attached to the 3rd-the seven daughter board S3_7.In detail, the first twisted plate B1 is incorporated in the 3rd-the four son
Between the plate S3_4 other end and the 3rd-the five daughter board S3_5 one end, and the second twisted plate B2 is incorporated in the 3rd-the six daughter board
Between the S3_6 other end and the 3rd-the seven daughter board S3_7 one end.First twisted plate B1 is arranged essentially parallel to the second-the second son
Plate S2_2 side surface/lateral edges（For example, extend in the plane perpendicular to the second-the second daughter board S2_2 inner surface）.The
Two twisted plate B2 are arranged essentially parallel to the second-the three daughter board S2_3 side surface/edge（For example, perpendicular to the second-the three son
Extend in the plane of plate S2_3 inner surface）.
3rd-the five daughter board S3_5 other end and the 3rd-the seven daughter board S3_7 other end are attached to the 3rd-the three
Daughter board S3_3 border surface.3rd-the five daughter board S3_5 and the 3rd-the seven daughter board S3_7 is in the side relative with second direction DY
Upwardly extend, substantially perpendicular to the 3rd-the three daughter board S3_3.
Each bottom and the first twisted plate B1 in 3rd-the second daughter board S3_2 to the 3rd-the seven daughter board S3_7 and
Each bottom in two twisted plate B2 is attached to the 3rd-the first daughter board S3_1 border surface/edge.
The distance between 3rd-the four daughter board S3_4 inner surface and the 3rd-the six daughter board S3_6 inner surface are approximately equal to
The distance between first-the second daughter board S1_2 outer surface and the first-the three daughter board S1_3 outer surface.3rd-the five daughter board
The distance between S3_5 inner surface and the 3rd-the seven daughter board S3_7 inner surface is approximately equal to the outer of the second-the second daughter board S2_2
The distance between surface and the second-the three daughter board S2_3 outer surface.
Three proofings lamina affixad P3 the 3rd magnetic cell M3_1 to M3_4 includes the 3rd-the first magnetic cell M3_1 to the 3rd-the
Four magnetic cell M3_4, the 3rd-the first magnetic cell M3_1 is respectively provided with to the 3rd-the four magnetic cell M3_4 to be extended on second direction DY
Long side and the short side that extends on third direction DZ.
3rd-the first magnetic cell M3_1 be located on the 3rd-the four daughter board S3_4 outer surface and with the top of its one end
It is adjacent.3rd-the second magnetic cell M3_2 be located on the 3rd-the five daughter board S3_5 outer surface and with the top phase of its other end
It is adjacent.3rd-the three magnetic cell M3_3 is located on the 3rd-the six daughter board S3_6 outer surface and adjacent with the top of its one end.
3rd-the four magnetic cell M3_4 is located on the 3rd-the seven daughter board S3_7 outer surface and adjacent with the top of its other end.
3rd-the first magnetic cell M3_1, the 3rd-the second magnetic cell M3_2, the 3rd-the three magnetic cell M3_3 and the 3rd-the
Four magnetic cell M3_4 position corresponds respectively to the first-the five magnetic cell M1_5, the second-the five magnetic cell M2_5, first-the six
Magnetic cell M1_6 and the second-the six magnetic cell M2_6.Therefore, when three proofings lamina affixad P3 is attached to the first anti-adhesion plate P1 and
During two anti-adhesion plate P2, the 3rd-the first magnetic cell M3_1, the 3rd-the second magnetic cell M3_2, the 3rd-the three magnetic cell M3_3 and
Each and the first-the five magnetic cell M1_5, the second-the five magnetic cell M2_5 in 3rd-the four magnetic cell M3_4, first-the
Corresponding magnetic cell in six magnetic cell M1_6 and the second-the six magnetic cell M2_6 is stacked.
3rd-the first daughter board S3_1 includes open region OP, open region OP have the long side that extends on second direction DY and
The short side extended in a first direction on DX.When the first anti-adhesion plate P1, the second anti-adhesion plate P2 and three proofings lamina affixad P3 each other
During connection, the region of sender unit cap S_C bottom is exposed by open region OP.The structure is described in detail in reference picture 3 to Fig. 9.
Fig. 3 is the perspective view for showing to be attached to the sensor unit of the first anti-adhesion plate.Reference picture 3, shown in Fig. 2
One anti-adhesion plate P1 is moved on second direction DY, to be attached to sensor unit S_U the second supporting member 132.
First connection unit C1 lower surface and the second connection unit C2 lower surface and the upper surface of the second supporting member 132
Form contact.First-the first daughter board S1_1 inner surface contacts the upper with the first-the first daughter board S1_1 of the second supporting member 132
The adjacent preceding surface FS in portion.
The region of first-the second daughter board S1_2 inner surface adjacent with its top contacts the left-handed watch of the second supporting member 132
Face LS.The region of first-the three daughter board S1_3 inner surface adjacent with its top contacts the right surface of the second supporting member 132
RS。
As described above, short sides of the first-the second daughter board S1_2 and the first-the three daughter board S1_3 than the second supporting member 132（Example
Such as, left side LS and the right RS）It is long.Therefore, the first-the first-the four magnetic cell M1_4 of magnetic cell M1_1 to first do not have overlapping
The left surface LS of two supporting members 132 and right surface RS.
Fig. 4 is the perspective view for showing to be attached to the first anti-adhesion plate P1 the second anti-adhesion plate P2, and Fig. 5 is along in Fig. 4
The sectional view of the I-I' lines interception shown.
The second anti-adhesion plate P2 in reference picture 4 and Fig. 5, Fig. 2 moves up in the side relative with second direction DY, with knot
Close to the first anti-adhesion plate P1.
Second-the first daughter board S2_1 inner surface faces the preceding surface FS of the second supporting member 132.With the second-the second daughter board
The inner surface that S2_2 one end is adjacent contacts the outer surface adjacent with the first-the second daughter board S1_2 other end.With second-the three
The inner surface that daughter board S2_3 one end is adjacent contacts the outer surface adjacent with the first-the three daughter board S1_3 other end.
As described above, the second-the first-the four magnetic cell M2_4 of magnetic cell M2_1 to second position corresponds respectively to
One-the first-the four magnetic cell M1_4 of magnetic cell M1_1 to first.Therefore, as the first anti-adhesion anti-adhesion plate P2 of plate P1 and second
When being connected to each other, in the first-the first-the four magnetic cell M1_4 of magnetic cell M1_1 to first it is each respectively with the second-the first magnetic
Corresponding magnetic cell in the magnetic cell M2_4 of unit M2_1 to second-the four is stacked.
For example, as shown in Figure 5, the first-the first magnetic cell M1_1 be located on the first-the second daughter board S1_2 inner surface and
It is adjacent with its other end, and with the second-the second daughter board S2_2 outer surface and adjacent with its one end second-the first
Magnetic cell M2_1 is stacked.Although not shown in figure, in the first-the second-the four magnetic cell M1_4 of magnetic cell M1_2 to first
Each be stacked respectively with the corresponding magnetic cell in the second-the second-the four magnetic cell M2_4 of magnetic cell M2_2 to second.
First-the first-the four magnetic cell M1_4 of magnetic cell M1_1 to first polarity and the second-the first magnetic cell M2_1 are extremely
Second-the four magnetic cell M2_4 polarity cause the first-the first-the four magnetic cell M1_4 and second of magnetic cell M1_1 to first-
Attraction be present between corresponding magnetic cell in first-the four magnetic cell M2_4 of magnetic cell M2_1 to second.Therefore, can pass through
Second-the first-the four magnetic cell M2_4 of magnetic cell M2_1 to second and the first-the first-the four magnetic lists of magnetic cell M1_1 to first
The first anti-adhesion anti-adhesion plate P2 of plate P1 and second are bonded to each other by the magnetic attachment between corresponding magnetic cell in first M1_4.
When the first-the first-the four magnetic cell M1_4 of magnetic cell M1_1 to first and the second-the first magnetic cell can be passed through
When the first anti-adhesion anti-adhesion plate P2 of plate P1 and second are bonded to each other by the magnetic cell M2_4 of M2_1 to second-the four, compared to logical
Cross screw the first anti-adhesion anti-adhesion plate P2 of plate P1 and second are bonded to each other, the first anti-adhesion anti-adhesion plate P2 of plate P1 and second
Easily it can be disengaged from and adhere to.
Fig. 6 is the three proofings lamina affixad for showing to be attached to the anti-adhesion plate P2 of the anti-adhesion plate P1 and second of first to be bonded to each other
P3 perspective view.Fig. 7 be along Fig. 6 in show II-II' lines interception sectional view.Fig. 8 be along Fig. 6 in the III- that shows
The sectional view of III' lines interception.Fig. 9 is the lower plan view of sensor device for showing to show in Fig. 1.
Reference picture 6, the three proofings lamina affixad P3 shown in Fig. 3 move towards the direction relative with third direction DZ（For example,
Move up）, to be attached to the first anti-adhesion anti-adhesion plate P2 of plate P1 and second being bonded to each other.
3rd-the first daughter board S3_1 inner surface faces the lower surface of the second supporting member 132.3rd-the second daughter board S3_2,
3rd-the four daughter board S3_4 and the 3rd-the six daughter board S3_6 is bonded to each other, and be respectively incorporated to the first-the first daughter board S1_1,
First-the second daughter board S1_2 and the first-the three daughter board S1_3 bottom.3rd-the three daughter board S3_3, the 3rd-the five daughter board S3_
5 and the 3rd-the seven daughter board S3_7 be bonded to each other, and be respectively incorporated to the second-the first daughter board S2_1, the second-the second daughter board S2_
2 and second-the three daughter board S2_3 bottom.
In detail, a part for the 3rd-the second daughter board S3_2 inner surface adjacent with top contacts the first-the first daughter board
A part for the S1_1 outer surface adjacent with bottom.One of 3rd-the three daughter board S3_3 inner surface adjacent with top
Tap touches a part for the second-the first daughter board S2_1 outer surface adjacent with bottom.
A part for 3rd-the four daughter board S3_4 inner surface adjacent with top contacts the first-the second daughter board S1_2's
A part for the outer surface adjacent with bottom, this part of the first-the second daughter board do not contact the second-the second daughter board S2_2.3rd-
A part for the 5th daughter board S3_5 inner surface adjacent with top contact the second-the second daughter board S2_2 it is adjacent with bottom outside
The part on surface.
Although being not shown in figure 6, a part for the 3rd-the six daughter board S3_6 inner surface adjacent with top contacts
A part for first-the three daughter board S1_3 outer surface adjacent with bottom, the first-the three daughter board S1_3 this part do not contact
Second-the three daughter board S2_3.A part for 3rd-the seven daughter board S3_7 inner surface adjacent with top contacts second-the three
A part for the daughter board S2_3 outer surface adjacent with bottom.
A part for the first twisted plate B1 adjacent with the first twisted plate B1 top inner surface contacts the second-the second son
The bottom of plate S2_2 side surface（For example, the side of the second-the second daughter board S2_2 in the plane comprising DX directions and DZ directions
Edge/surface）.Although being not shown in figure 6, a part for the second twisted plate B1 inner surface adjacent with top contacts the
The bottom of two-the three daughter board S2_3 side surface（For example, the second-the three daughter board in the plane comprising DX directions and DZ directions
S2_3 edge/surface）.
As described above, the 3rd-the first magnetic cell M3_1, the 3rd-the second magnetic cell M3_2, the 3rd-the three magnetic cell M3_3
With the 3rd-the four magnetic cell M3_4 position correspond respectively to the first-the five magnetic cell M1_5, the second-the five magnetic cell M2_5,
First-the six magnetic cell M1_6 and the second-the six magnetic cell M2_6.Therefore, as three proofings lamina affixad P3, to be attached to first anti-attached
When the anti-adhesion plate P2 of plate P1 and second, the 3rd-the first magnetic cell M3_1, the 3rd-the second magnetic cell M3_2, the 3rd-the three magnetic
In unit M3_3 and the 3rd-the four magnetic cell M3_4 it is each respectively with the first-the five magnetic cell M1_5, the second-the five magnetic list
Corresponding magnetic cell in first M2_5, the first-the six magnetic cell M1_6 and the second-the six magnetic cell M2_6 is stacked.
For example, as shown in Figure 7, be disposed adjacent with the bottom of one end of the first-the second daughter board S1_2 inner surface
One-the five magnetic cell M1_5 is stacked the 3rd-the be disposed adjacent with the top of one end of the 3rd-the four daughter board S3_4 outer surface
One magnetic cell M3_1.As shown in Figure 7, set on the second-the second daughter board S2_2 inner surface adjacent with the bottom of the other end
The second-the five magnetic cell M2_5 be stacked the 3rd-the five daughter board S3_5 the outer surface adjacent with the top of the other end on set
The the 3rd-the second magnetic cell M3_2.In an embodiment of the present invention, the 3rd-the three magnetic cell M3_3 and the 3rd-the four magnetic cell
M3_4 is stacked the first-the six magnetic cell M1_6 and the second-the six magnetic cell M2_6 respectively.
3rd-the first magnetic cell M3_1, the 3rd-the second magnetic cell M3_2, the 3rd-the three magnetic cell M3_3, the 3rd-the four
Magnetic cell M3_4, the first-the five magnetic cell M1_5, the second-the five magnetic cell M2_5, the first-the six magnetic cell M1_6 and second-
6th magnetic cell M2_6 polarity is arranged to allow in the 3rd-the first magnetic cell M3_1, the 3rd-the second magnetic cell M3_2, the
Three-the three magnetic cell M3_3, the 3rd-the four magnetic cell M3_4 and the first-the five magnetic cell M1_5, the second-the five magnetic cell M2_
5th, attraction is formed between each magnetic cell in the first-the six magnetic cell M1_6 and the second-the six magnetic cell M2_6.Therefore,
The the 3rd-the first magnetic cell M3_1, the 3rd-the second magnetic cell M3_2, the 3rd-the three magnetic cell M3_3, the 3rd-the four can be passed through
Magnetic cell M3_4, the first-the five magnetic cell M1_5, the second-the five magnetic cell M2_5, the first-the six magnetic cell M1_6 and second-
6th magnetic cell M2_6 combines the first anti-adhesion anti-adhesion plate P2 of plate P1 and second（For example, magnetic combines）It is anti-adhesion to the 3rd
Plate P3.
When passing through the 3rd-the first magnetic cell M3_1, the 3rd-the second magnetic cell M3_2, the 3rd-the three magnetic cell M3_3,
Three-the four magnetic cell M3_4 and the first-the five magnetic cell M1_5, the second-the five magnetic cell M2_5, the first-the six magnetic cell M1_
6th, when three proofings lamina affixad P3 is attached to the anti-adhesion plate P2 of the first anti-adhesion plate P1 and second by the second-the six magnetic cell M2_6,
Can be relatively easily by three proofings lamina affixad P3 departs from, to adhere to/be re-attached to the first anti-adhesion plate P1 and second anti-adhesion
Plate P2（Three proofings lamina affixad P3 is attached to the first anti-adhesion anti-adhesion plates of plate P1 and second compared to by screw for example, working as
During P2 situation）.
As shown in Figure 9, sender unit cap S_C region is exposed by three proofings lamina affixad P3 open region OP.Sensor
The movable sensor housing of connector 134 and 135, to allow long side directions of the sender unit cap S_C along open region OP to move back and forth.
In detail, the second sensor connector 135 combined with the other end of first sensor connector 134 is relative to
The other end of one sensor connecting piece 134 moves at a certain angle.The angle can be configured to allow sender unit cap S_C opening
Moved on mouth region OP long side direction.Therefore, the inflow angle of deposition materials 112 can be adjusted.
Due to above-mentioned structure, the first anti-adhesion plate P1, the second anti-adhesion plate P2 and three proofings lamina affixad P3 are each other
With reference to cover the second supporting member 132, the 3rd supporting member 133, first sensor connector 134 and second sensor connector
135th, sensor housing S_H and sender unit cap S_C region.
Sensor is located in the sensor unit S_U of sensor device 130.The deposition materials 112 evaporated by nozzle 113
Sensor is reached by the hole H through sensor unit S_U.The thickness of the deposition materials 112 of deposition on the substrate 120 corresponds to
Stack deposition materials on a sensor.
The deposition materials 112 evaporated by the nozzle 113 of sedimentary origin 110 are not stacked on the first anti-adhesion plate being combined
On the region for the sensor unit S_U that P1, the second anti-adhesion plate P2 and three proofings lamina affixad P3 are covered.In detail, due to each other
With reference to the first anti-adhesion plate P1, the second anti-adhesion plate P2 and three proofings lamina affixad P3, deposition materials 112 are not stacked on second
Supporting member 132, the 3rd supporting member 133, first sensor connector 134 and second sensor connector 135, sensor housing S_
On H or sender unit cap S_C region.Therefore, sensor unit S_U can be by the first anti-adhesion plate P1 being bonded to each other,
Two anti-adhesion plate P2 and three proofings lamina affixad P3 protections.
Crystal oscillator may be used as sensor.With the deposition materials 112 being deposited on the surface of crystal oscillator
Amount increase, the frequency of oscillation of crystal oscillator reduce.Pass through the change for the frequency of oscillation for sensing crystal oscillator, measurement（For example,
Approximate estimation/calculating）The deposition and deposition velocity of deposition materials 112.
When the thickness for the deposition materials 112 being deposited on the surface of crystal oscillator exceedes setting value（For example, predetermined thickness
Degree）When, crystal oscillator can not used.When this happens, can be by the first anti-adhesion plate P1, the second anti-adhesion plate
P2 and three proofings lamina affixad P3 and sensor unit S_U is separated, with more emat sensor.Because the first anti-adhesion plate P1, second prevent
Lamina affixad P2 and three proofings lamina affixad P3 by the group M1_1 of first, second, and third magnetic cell stacked on top of each other/magnetic cell extremely
M1_6, M2_1 are bonded to each other to M2_6 and M3_1 to M3_4, therefore, the first anti-adhesion plate P1, the second anti-adhesion plate P2 and
Three proofings lamina affixad P3 can easily be disengaged from and be attached to each other/adhere to again.
Therefore, depositing device 100 includes easily being attached to sensor device 130 and departing from sensor device 130 simultaneously
And the anti-adhesion plate P of sensor device 130 can be protected.
Although exemplary embodiments of this invention have been described, it is to be understood that the present invention should not be limited to these examples
Property embodiment, but one of ordinary skill in the art can be by claims and its equivalent claimed invention
Spirit and scope in carry out variations and modifications.
Claims (10)
1. a kind of depositing device, the depositing device includes：
Substrate support, it is configured to support base；
Sedimentary origin, it is configured to basad supply deposition materials；
Sensor unit, it is configured to receive a part for deposition materials, to sense the deposition of deposition materials；
First anti-adhesion plate, it is attached to sensor unit and including one or more first magnetic cells；
Second anti-adhesion plate, it is attached to sensor unit and including one or more second magnetic cells, the second anti-adhesion plate phase
It is relative with the first anti-adhesion plate for sensor unit；With
Three proofings lamina affixad, the first anti-adhesion plate and the second anti-adhesion plate are attached to, below sensor unit, and including
One or more 3rd magnetic cells,
Wherein, the first anti-adhesion plate, the second anti-adhesion plate and three proofings lamina affixad pass through the first magnetic cell, the second magnetic cell and
Three magnetic cells are bonded to each other near the corresponding magnetic cell in the first magnetic cell, the second magnetic cell and the 3rd magnetic cell, and
Wherein, the first anti-adhesion plate, the second anti-adhesion plate and three proofings lamina affixad jointly cover a part for sensor unit.
2. depositing device according to claim 1, wherein, sensor unit includes：
First supporting member；
Second supporting member, it is attached to the lower surface of the first supporting member and is attached to the first anti-adhesion plate, in a first direction longitudinal direction
Extend and extend laterally in a second direction, second direction is substantially perpendicular to first direction；
3rd supporting member, lower surface that is adjacent with one end of the second supporting member and being attached to the second supporting member, in a first direction
On extend laterally and the Longitudinal extending on third direction, third direction are substantially perpendicular to first direction and second direction；
Sensor housing, for accommodating sensor unit；
Sender unit cap, the part for being attached to sensor housing and limiting the deposition materials of sensor unit reception pass therethrough
Hole；With
Sensor connecting piece, with reference to the 3rd supporting member and sensor housing.
3. depositing device according to claim 2, the depositing device also includes vacuum chamber,
Wherein, substrate support is configured to cause basal surface to the sedimentary origin in vacuum chamber, and
Wherein, the upper surface of the first supporting member is attached to vacuum chamber and is configured to adjacent with substrate.
4. depositing device according to claim 2, wherein, the first anti-adhesion plate, the second anti-adhesion plate and the 3rd are anti-adhesion
Plate covers one of the lateral edges of the second supporting member, the 3rd supporting member, sensor connecting piece, sensor housing and sender unit cap
Point, and
Wherein, the first anti-adhesion plate, the second anti-adhesion plate and three proofings lamina affixad expose the region of the lower end of sender unit cap.
5. depositing device according to claim 2, wherein, the first anti-adhesion plate also includes：
First-the first daughter board, is arranged essentially parallel to the preceding surface of the second supporting member, and the preceding surface of the second supporting member is substantially vertical
Extend in the upper surface of the second supporting member and in a first direction；
First-the second daughter board, is arranged essentially parallel to the left surface of the second supporting member, and the left surface of the second supporting member is substantially vertical
Extend in the upper surface of the second supporting member and in a second direction；
First-the three daughter board, it is arranged essentially parallel to the right surface of the second supporting member, the right surface of the second supporting member and the second supporting
The left surface of part is relative；
First connection unit, it is attached to the top of the first-the second daughter board and extends in a first direction；With
Second connection unit, it is attached to the top of the first-the three daughter board and extends in a first direction,
Wherein, the first magnetic cell is located on the first-the second daughter board and the first-the three daughter board,
Wherein, one end of the first-the second daughter board and one end of the first-the three daughter board are attached to the corresponding of the first-the first daughter board
Edge,
Wherein, the first-the second daughter board and the first-the three daughter board extend into than the second support distal in a second direction, and
First-the first daughter board to the first-the three daughter board is upwardly extended with stacked second supporting member and the 3rd supporting member in third party.
6. depositing device according to claim 5, wherein, the inner surface on the top of the first-the first daughter board contacts second
The preceding surface of bearing member,
Wherein, the inner surface on the top of the first-the second daughter board contacts the left surface of the second supporting member,
Wherein, the inner surface on the top of the first-the three daughter board contacts the right surface of the second supporting member, and
Wherein, each lower surface in the first connection unit and the second connection unit contacts the upper surface of the second supporting member.
7. depositing device according to claim 6, wherein, the first magnetic cell includes：
First-the first magnetic cell and the first-the second magnetic cell, divide each other on the inner surface of the other end of the first-the second daughter board
Separate；
First-the three magnetic cell and the first-the four magnetic cell, divide each other on the inner surface of the other end of the first-the three daughter board
Separate；
First-the five magnetic cell, on the inner surface of the bottom adjacent with one end of the first-the second daughter board；With
First-the six magnetic cell, on the inner surface of the bottom adjacent with one end of the first-the three daughter board.
8. depositing device according to claim 7, wherein, the second anti-adhesion plate also includes：
Second-the first daughter board, in face of the rear surface relative with the preceding surface of the second supporting member of the second supporting member；
Second-the second daughter board, it is arranged essentially parallel to the left surface of the second supporting member；With
Second-the three daughter board, the right surface of the second supporting member is arranged essentially parallel to,
Wherein, the second magnetic cell is on the second-the second daughter board and the second-the three daughter board,
Wherein, the second-the second daughter board and the second-the three daughter board upwardly extend in third party, to be stacked the second supporting member and the 3rd
Supporting member,
Wherein, the inner surface adjacent with one end of the second-the second daughter board contacts the adjacent with the other end outer of the first-the second daughter board
Surface,
Wherein, the inner surface adjacent with one end of the second-the three daughter board contacts the adjacent with the other end outer of the first-the three daughter board
Surface, and
Wherein, the other end of the other end of the second-the second daughter board and the second-the three daughter board is attached to the second-the first daughter board.
9. depositing device according to claim 8, wherein, the second magnetic cell includes：
Second-the first magnetic cell and the second-the second magnetic cell, on the outer surface adjacent with one end of the second-the second daughter board；
Second-the three magnetic cell and the second-the four magnetic cell, on the outer surface adjacent with one end of the second-the three daughter board；
Second-the five magnetic cell, on the inner surface of the bottom adjacent with the other end of the second-the second daughter board；With
Second-the six magnetic cell, on the inner surface of the bottom adjacent with the other end of the second-the three daughter board,
Wherein, the first-the first magnetic cell to the first-the four magnetic cell is stacked the second-the first magnetic cell to the second-the four magnetic respectively
Unit, and
Wherein, the first-the first magnetic cell to the first-the four magnetic cell and the second-the first magnetic cell to the second-the four magnetic cell
Corresponding polarity allows in the first-the first magnetic cell to the first-the four magnetic cell and the second-the first magnetic cell to the second-the four magnetic
Attraction is formed between accordingly stacked magnetic cell in unit.
10. depositing device according to claim 9, wherein, the first-the first magnetic cell to the first-the four magnetic cell and
Two-the first magnetic cells to the second-the four magnetic cell Longitudinal extending and extend laterally in a second direction on third direction.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR10-2013-0036529 | 2013-04-03 | ||
| KR1020130036529A KR102051641B1 (en) | 2013-04-03 | 2013-04-03 | Deposition apparatus |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN104099573A CN104099573A (en) | 2014-10-15 |
| CN104099573B true CN104099573B (en) | 2018-04-06 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201310647758.XA Expired - Fee Related CN104099573B (en) | 2013-04-03 | 2013-12-04 | depositing device |
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| Country | Link |
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| KR (1) | KR102051641B1 (en) |
| CN (1) | CN104099573B (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR101984659B1 (en) * | 2017-05-17 | 2019-05-31 | 삼성중공업 주식회사 | Welding machine protecting apparatus |
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| CN1182203A (en) * | 1996-11-12 | 1998-05-20 | 三星电管株式会社 | Device for measuring thickness of metal film on inner surface of panel |
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| CN1800433A (en) * | 2005-01-06 | 2006-07-12 | 三星Sdi株式会社 | Deposition system using noise canceller and its method of control |
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| WO2012032831A1 (en) * | 2010-09-09 | 2012-03-15 | 株式会社アルバック | Method of cutting out graph within specific time period |
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| US6970532B2 (en) * | 2000-05-10 | 2005-11-29 | Rigaku Corporation | Method and apparatus for measuring thin film, and thin film deposition system |
| JP4468883B2 (en) * | 2005-01-06 | 2010-05-26 | 三星モバイルディスプレイ株式會社 | Deposition system using noise eliminator and control method thereof |
| KR100611666B1 (en) * | 2005-01-11 | 2006-08-10 | 삼성에스디아이 주식회사 | apparatus for detecting a thickness of a vapor deposition including a cover |
| KR101348583B1 (en) * | 2007-06-27 | 2014-01-10 | 에스엔유 프리시젼 주식회사 | Sensor apparatus of evaporation equipment |
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- 2013-04-03 KR KR1020130036529A patent/KR102051641B1/en active IP Right Grant
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|---|---|---|---|---|
| JPH06172977A (en) * | 1992-04-28 | 1994-06-21 | Yaskawa Electric Corp | Atomic-absorption type vapor deposition rate sensor |
| CN1182203A (en) * | 1996-11-12 | 1998-05-20 | 三星电管株式会社 | Device for measuring thickness of metal film on inner surface of panel |
| CN1382827A (en) * | 2001-04-20 | 2002-12-04 | 伊斯曼柯达公司 | Reusable substance amount sensor in prodn. of organic luminous device |
| CN1800433A (en) * | 2005-01-06 | 2006-07-12 | 三星Sdi株式会社 | Deposition system using noise canceller and its method of control |
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| WO2012032831A1 (en) * | 2010-09-09 | 2012-03-15 | 株式会社アルバック | Method of cutting out graph within specific time period |
Also Published As
| Publication number | Publication date |
|---|---|
| KR102051641B1 (en) | 2019-12-04 |
| KR20140120581A (en) | 2014-10-14 |
| CN104099573A (en) | 2014-10-15 |
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