CN104097395A - Selective electrode type solar cell grid line printing position precision detecting method - Google Patents
Selective electrode type solar cell grid line printing position precision detecting method Download PDFInfo
- Publication number
- CN104097395A CN104097395A CN201310128281.4A CN201310128281A CN104097395A CN 104097395 A CN104097395 A CN 104097395A CN 201310128281 A CN201310128281 A CN 201310128281A CN 104097395 A CN104097395 A CN 104097395A
- Authority
- CN
- China
- Prior art keywords
- grid line
- cell piece
- marker graphic
- printing position
- printing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
The invention relates to the field of detection control, in particular to a selective electrode type solar cell grid line printing position precision detecting method. A mark pattern is generated on a light-receiving surface of a cell plate; after a metal grid line is printed, the distance between the metal grid line and the mark pattern is measured; the superposition precision between a grid line printing position and a selective re-diffusion area is judged by combining the distance between the mark pattern and the selective re-diffusion area. The superposition precision between the grid line printing position and the selective re-diffusion, i.e. the grid line printing position precision can be detected.
Description
Technical field
The present invention relates to detect control field, be specifically related to the detection method in manufacture of solar cells process.
Background technology
Electron hole pair in crystal silicon solar batteries enters excitation state by stable state under photon effect, and the electron hole pair of part excitation state is separated into electronics and hole, externally in the situation of circuit turn-on, forms current loop, realizes luminous energy to the conversion of electric energy.
So-called electrodes selective type solar cell, is also selective emitter crystalline silicon solar cell, in metal gates (electrode) and silicon chip contact site, carries out heavy doping, and between electrode, light dope is carried out in position.Such structure makes electrodes selective type crystal silicon solar batteries sensitive surface have high square resistance characteristic, can improve photoelectric conversion rate, and grid line printing zone has low square resistance Chong Kuo district, can improve electric conductivity, so electrodes selective type crystal silicon solar batteries has better comprehensive photoelectric transformation efficiency.
The electrodes selective preparation technology who adopts in industrialization volume production at present mainly contains several as follows:
One, before diffusion technique, adopt wax spray technology to carry out selective spray to predetermined grid line Printing Zone, for P type solar cell, in wax liquid, carry high concentration N-type donor impurity, and will, to grid line Printing Zone doped with high concentration carrier in diffusion technique, realize the selectively heavily diffusion to grid line Printing Zone.
Two, the whole front surface of cell piece is carried out after low square resistance heavily spreads, adopting silk-screen printing technique to sensitive surface region printing etching slurry.Etching slurry to the corrasion on sensitive surface top layer under, new sensitive surface will have the diffusion concentration reducing along with etching depth.By the protection of web plate figure, etching slurry is not printed in grid line Printing Zone, therefore will retain the heavy diffusion concentration of diffusion technique formation.
Three, the whole front surface of cell piece is carried out after the low diffusion of high square resistance, the method that adopts laser ablation is by outside high concentration carrier diffusion to grid line printing zone, and sensitive surface high square resistance characteristic remains unchanged.
The low square resistance that no matter adopts which kind of method to realize grid line Printing Zone heavily spreads, the antireflective coating forming in postchannel process all can reduce the optics identifiability of Yu Di diffusion region, Chong Kuo district, thereby the screen printing apparatus in generally using at present can not effectively be identified Chong Kuo district, metal grid lines silk-screen printing technique can only be take technique edges or central point and be carried out contraposition printing as basis of reference, and have to continue to continue to use Qian Daochongkuo district and form the silicon chip localization method adopting in technique, in metal grid lines printing position fixing process, strict corresponding precalculated position, grid line Printing Zone is heavily spread in supposition simultaneously.For improving the location accuracy that heavily spreads grid line Printing Zone, Qian Daochongkuo district forms process equipment must increase cost input lifting positioning precision grade.
In actual volume production, Qian road heavily spreads grid line Printing Zone and forms between technique Yu Hou road metal grid lines silk-screen printing technique, technique that silicon chip also needs to carry out prepared by dephosphorization silex glass and antireflective coating etc.But with the flow work pattern, be mutually connected independent of one another between each technique, once the reference technique edges that therefore Qian Daochongkuo district forms in technique occurs chaotic in antireflective coating technique, rear road silk-screen printing technique carries out grid line printing by take the reference edge of " mistake " as benchmark, consequently " the blind seal " of metal grid lines.The dimensional tolerance of accurate square piece or rhombus sheet and cell piece also will make serigraphy location more complicated.As can be seen here, take in the locate mode that technique edges or central point be benchmark, front postchannel process has the dependence of height, and the position error that Qian Daochongkuo district forms in the position error Ye Huiyuhou road metal grid lines silk-screen printing technique in technique totally becomes the repeatability deviation between grid line Yu Chongkuo district together.
Continuous reduction along with metal grid lines width, the reduction of heavily expanding sector width not only can further improve the conversion efficiency of electrodes selective type cell piece, also can reduce production costs, especially all the more so for adopting the technique of the selective heavy diffusion region of wax spray technology realization.Yet the reduction of heavily expanding sector width has further improved the aligning accuracy requirement in silk-screen printing technique.At opposite side or in to the alignment mode of central point, the dependence of front and back technique and error accumulation characteristic have become the bottleneck that restriction electrodes selective type cell piece is brought into play its technical advantage.
Yi Chongkuo district pattern recognition technique is basic figure localization method, by the physical location of selective heavy diffusion region on the pattern recognition technique identification cell piece of knowing altogether, and carry out grid line printing contraposition according to the position of heavily expanding zone position adjustment web plate or cell piece of actual measurement.Thisly take the figure localization method that actual measured results is benchmark, no longer adopt the heavily expansion position of supposition to be set to benchmark, not only can effectively isolate Qian Daochongkuo district and form the deviations in technique, also can evade the problem of losing reference data in the middle process such as antireflective coating due to cell piece upset simultaneously.Even if pin is aimed at the cell piece of square piece, rhombus sheet and large scale tolerance, it is benchmark and do not depend on cell piece shape that Jiang Yichongkuo district graph position is printed also in the contraposition of metal grid lines.The accuracy of figure location also heavily expands sector width for further reduction provides feasibility.
Yet, adopt figure location technology to carry out after grid line printing, conventional optical detecting method cannot detect the actual print position of metal grid lines and heavily spread the registration accuracy of grid line Printing Zone.This is not only because antireflective coating reduces the identifiability between He Dikuo district, Liao Chongkuo district, even more important reason is that metal grid lines is much higher than the albedo of cell piece surface to light to the albedo of detection light source, the reverberation of metal grid lines will bring light pollution to metal grid lines neighboring area, cause cannot visual identity Chong Kuo district position.
Although luminescence generated by light technology does not have incident light source in image acquisition process, therefore can avoid metal grid lines reverberation to cause the problem of light pollution, but due to the interference of limitation, antireflective coating and the lattice of photoluminescence efficiency, heavily spread the identification of grid line Printing Zone unreliable.Therefore and be not suitable as the solution of volume production production line simultaneously, because luminescence generated by light detection part need to be worked under ultra-low temperature surroundings, cost is high, and environmental requirement is harsh.
Summary of the invention
The object of the invention is to, provide the detection method of electrodes selective type solar cell grid line printing position precision, to address the above problem.
Technical problem solved by the invention can realize by the following technical solutions:
The detection method of electrodes selective type solar cell grid line printing position precision, it is characterized in that, on cell piece sensitive surface, generate a marker graphic, after metal grid lines printing, measure the distance between metal grid lines and marker graphic, incorporation of markings figure and the selective distance that weighs diffusion region, the registration accuracy of judgement grid line printing position and selective heavy diffusion region.Adopt this method can detect metal grid lines printing position and the selective registration accuracy that weighs diffusion region, i.e. grid line printing position precision.
Described marker graphic is preferably placed between metal grid lines, to avoid the light pollution problem that in testing process, bring metal grid lines reverberation counterweight diffusion grid line Printing Zone.Described marker graphic can be generic graphic, can be also X-Y scheme, can also be combined by a plurality of single figures.5 mark line segments that equidistantly distribute for example.On cell piece sensitive surface, can generate marker graphic described at least one.
As a kind of preferred version, the marker graphic group that marker graphic is comprised of a plurality of single labelled figures, in test process, first select the most clear reliable single figure as reference position reference point, and by measuring this marker graphic of Distance Judgment of this single labelled figure and other single labelled figures as the position reliability of reference position reference point.
Marker graphic generate two groups along cell piece surface grid line direction on cell piece sensitive surface described in, by measuring respectively the method for distance between the upper and lower zones of different metal grid lines of cell piece and described marker graphic, judge the registration accuracy of metal grid lines printing position with the selective heavy diffusion region of the upper and lower zones of different of cell piece, and further judge the registration accuracy of metal grid lines printed pattern Yu Chongkuo district figure in Plane Rotation direction.
Marker graphic generate two groups along cell piece main grid line direction on cell piece sensitive surface described in, by measuring respectively the method for distance between cell piece left and right zones of different metal grid lines and described marker graphic, judge the registration accuracy of metal grid lines printing position with the selective heavy diffusion region of cell piece left and right zones of different, and further judge web plate tension variation situation, reach the technique object of web plate service life supervision.
After metal grid lines printing, measure the distance between metal grid lines and marker graphic, incorporation of markings figure and the selective relative distance that heavily spreads grid line Printing Zone center line, calculate grid line printing position and the selective registration accuracy that weighs diffusion region, to avoid the light pollution problem of metal grid lines reverberation to grid line periphery in conventional optical detecting method.
As another kind of preferred version, described marker graphic is X-Y scheme, by measuring respectively the distance of described X-Y scheme and cell piece grid line and cell piece main grid line, in conjunction with described marker graphic with heavily spread grid line Printing Zone center line and heavily spread the distance of main grid line Printing Zone center line, in cell piece left and right with judge up and down the printing position precision of metal grid lines on both direction.
This detection method is applied to the online position probing of high speed on production line, and by the position probing information of real-time measurement, side-play amount is controlled in correction graph setting movement, realizes the high-precision high-speed closed-loop control of screen printing apparatus figure location.
Can be along cell piece surface grid line direction on cell piece sensitive surface, the cell piece upper left corner and the lower left corner respectively generate one group described in marker graphic, by measuring respectively the distance between two the regional metal grid lines in the cell piece upper left corner and the lower left corner and described marker graphic, judge the registration accuracy of the cell piece upper left corner and metal grid lines printing position with the selective heavy diffusion region in Liang Ge region, the lower left corner, and further judge cell piece grid line figure in Plane Rotation direction with the registration accuracy that weighs diffusion region.
Also can be along cell piece main grid line direction on cell piece sensitive surface; on the cell piece left side and region, two, the right, generate described marker graphic; by measuring respectively the distance between cell piece two of left and right regional metal grid line and marker graphic; judge the registration accuracy of metal grid lines printing position with the selective heavy diffusion region of cell piece left and right zones of different; and in conjunction with the alignment method of figure positioning printing; web plate use state is carried out to dynamic monitoring; thereby improve web plate utilization rate, and reduction changes to web plate downtime and the slurry wastage that number of times is directly proportional.
The present invention can be simultaneously to carrying out printing position precision discrimination on cell piece surface grid line and cell piece main grid line both direction.
Described marker graphic adopts the technique identical with the generating process of selective heavy diffusion region, when generating selective heavy diffusion region, on cell piece sensitive surface, generates marker graphic.As, adopt the spray of wax spray technique to go out marker graphic, adopt etching slurry silk-screen printing technique to go out marker graphic, adopt laser doping technology utilization laser scoring to go out marker graphic with the mode negative of web plate figure.The present invention can complete the generation of heavy diffusion region and marker graphic under a silicon chip location, guarantees the accuracy of marker graphic relative position.
The present invention can utilize the position detecting device on manufacture of solar cells line to detect distance between metal grid lines and marker graphic.The detected distance value of the present invention also can be used as the feedback parameter of solar cell silk screen printing equipment to level controlling system closed-loop control.
The present invention is applicable to the online position probing of high speed of screen printing apparatus, is also applicable to off-line device.The present invention can be applied to metal grid lines actual print position with respect to heavily spreading grid line Printing Zone precision and carry out online or off-line test, the equipment performance test of screen printing apparatus printing precision, and take this detection method as basic process function expansion, such as, but be not limited to the process-monitor to the web plate life-span.
After metal grid lines printing, measure the distance between metal grid lines and marker graphic, incorporation of markings figure and the selective relative distance that heavily spreads grid line Printing Zone center line, calculate grid line printing position and the selective registration accuracy that weighs diffusion region.The method can be avoided the light pollution problem of metal grid lines reverberation to grid line periphery in conventional optical detecting method.
In cell piece left area and region, the right, marker graphic is set respectively, and measures respectively the registration accuracy of grid line printing position with the selective heavy diffusion region in cell piece left area and region, the right;
If the figure positioning datum in silk-screen printing technique adopt cell piece left area selectively heavy diffusion pattern position as with reference to information, work as so the marker graphic of cell piece left area and the metal grid lines distance between center line of left area and equal the marker graphic of cell piece left area and the heavily diffusion grid line Printing Zone distance between center line of cell piece left area, and the metal grid lines distance between center line in the marker graphic in region, cell piece the right and region, cell piece the right is while being greater than the heavily diffusion grid line Printing Zone distance between center line in region on the right of the marker graphic in region, cell piece the right and cell piece, assert step-down of web plate tension force, when two distance value differences are greater than a setting value, need to change web plate.
Beneficial effect: the present invention can detect and feed back measured value by real-time online, and the verification method of the equipment printing precision of measurement directly perceived can be provided for solar cell silk screen printing equipment.Measurement result of the present invention can be used as the closed-loop control parameter of metal grid lines figure contraposition printing in silk-screen printing technique, is conducive to reduce production costs, simplify technique.
Accompanying drawing explanation
Fig. 1 is for detecting grid line printing position precision by one dimension marker graphic;
Fig. 2 is for passing through two-dimensional marker test pattern grid line printing position precision;
Fig. 3 is for passing through in the cell piece upper left corner and the lower left corner two group echo test pattern grid lines the printing position precision in direction of rotation;
Fig. 4 is for passing through in the cell piece left side and the right at least two group echo test pattern web plate tension variation.
The specific embodiment
For technological means, creation characteristic that the present invention is realized, reach object and effect is easy to understand, below in conjunction with concrete diagram, further set forth the present invention.
With reference to Fig. 1, Fig. 2, Fig. 3 and Fig. 4, the detection method of electrodes selective type solar cell grid line printing position precision, on cell piece sensitive surface, generate a marker graphic, after metal grid lines printing, measure the distance between metal grid lines and marker graphic, incorporation of markings figure and the selective distance that weighs diffusion region center line, the registration accuracy of judgement grid line printing position and selective heavy diffusion region.Adopt this method can detect metal grid lines printing position and the selective registration accuracy that weighs diffusion region, i.e. grid line printing position precision.
Marker graphic is preferably placed between metal grid lines, to avoid the light pollution problem that in testing process, bring metal grid lines reverberation counterweight diffusion grid line Printing Zone.Marker graphic can be generic graphic, can be also X-Y scheme, can also be combined by a plurality of single figures.5 mark line segments that equidistantly distribute for example.On cell piece sensitive surface, can generate at least one marker graphic.
Can be simultaneously to carrying out printing position precision discrimination on cell piece surface grid line and cell piece main grid line both direction.
Can be along cell piece surface grid line direction on cell piece sensitive surface, the cell piece upper left corner and the lower left corner respectively generate one group described in marker graphic, by measuring respectively the distance between two the regional metal grid lines in the cell piece upper left corner and the lower left corner and described marker graphic, judge the registration accuracy of the cell piece upper left corner and metal grid lines printing position with the selective heavy diffusion region in Liang Ge region, the lower left corner, and further judge cell piece grid line figure in Plane Rotation direction with the registration accuracy that weighs diffusion region.
Also can be along cell piece main grid line direction on cell piece sensitive surface; on the cell piece left side and region, two, the right, generate described marker graphic; by measuring respectively the distance between cell piece two of left and right regional metal grid line and marker graphic; judge the registration accuracy of metal grid lines printing position with the selective heavy diffusion region of cell piece left and right zones of different; and in conjunction with the alignment method of figure positioning printing; web plate use state is carried out to dynamic monitoring; thereby improve web plate utilization rate, and reduction changes to web plate downtime and the slurry wastage that number of times is directly proportional.
The present invention can adopt the technique identical with heavy diffusion region generating process to generate marker graphic on cell piece sensitive surface.The present invention can complete the generation of heavy diffusion region and marker graphic under a silicon chip location, guarantees the accuracy of marker graphic relative position.Particularly, in wax spray technique, adopt wax spray technology spray marker graphic between two adjacent metal grid lines Printing Zones, synchronous Chong Kuo district and the marker graphic of forming in Bing Hou road diffusion technique; Or the mode with the protection of web plate latex film retains marker graphic between two adjacent grid line Printing Zones in etching slurry silk-screen printing technique; Or employing laser ablation technique etching marker graphic between two adjacent grid line Printing Zones; Or other are applicable to generate the technique generation marker graphic of selective heavy diffusion region.
The present invention can utilize the position detecting device on manufacture of solar cells line to detect distance between metal grid lines and marker graphic.The detected distance value of the present invention also can be used as the feedback parameter of solar cell silk screen printing equipment to level controlling system closed-loop control.
The present invention is applicable to the online position probing of high speed of screen printing apparatus, is also applicable to off-line device.The present invention can carry out online or off-line test, to the equipment performance of screen printing apparatus printing precision, provide effective method of testing with respect to heavily spreading grid line Printing Zone precision metal grid lines actual print position, and realization be take this detection method as basic process function expansion, such as, but be not limited to the process-monitor to the web plate life-span.
After metal grid lines printing, measure the distance between metal grid lines and marker graphic, incorporation of markings figure and the selective relative distance that heavily spreads grid line Printing Zone center line, judge grid line printing position and the selective registration accuracy that weighs diffusion region.The method can be avoided the light pollution problem of metal grid lines reverberation to grid line periphery in conventional optical detecting method, obtain metal grid lines actual print position and heavily spread the registration accuracy information of grid line Printing Zone, to screen printing apparatus feedback actual print position offset, realize the high precision closed loop of screen printing apparatus figure navigation system and control, and for adopting the screen printing apparatus of figure location technology that effective Linear Positioning Accuracy Measurement Methods is provided.In addition, by this detection method, also can realize the functions such as web plate life-span monitoring.
The irregular lattice structure that class monocrystalline or polymorphic electrodes selective type crystal silicon solar batteries have may be brought interference for the identification of marker graphic.Visual identifying system also has the measure error that depends on resolution ratio and angular field of view simultaneously.For guaranteeing accurately definition datum reference point of detection system, when marker graphic is combined by a plurality of single figures, after IMAQ, first select a most single figure as reference pattern.Can, by measuring the relative distance between this single figure and other single figure, judge that this single figure is as the position reliability of benchmark reference point.
Fig. 1 for example understands a kind of combination of marker graphic, amounts to 5 mark line segments 32 that equidistantly distribute and is distributed between 6 metal grid lines 10.Within the scope of camera perspective, 5 mark line segments are set and can guarantee that visual identifying system has sufficiently high resolution ratio and measuring accuracy within the scope of form, also can at utmost make up the interference to marker graphic identification of class monocrystalline or polysilicon lattice.
The positional information of 6 metal grid lines 10 of the disposable collection of vision detection system and 5 mark line segments 32 being wherein evenly distributed.In 5 mark line segments of detection system software selection, the most clear reliable mark line segment is as benchmark reference point, calculate this mark line segment and other 4, or at least one phase mutual edge distance between can the mark line segment of clear identification, and judge that according to result of calculation this mark line segment is as the reliability of benchmark reference point.Then calculate respectively the distance between adjacent two metal grid lines 10 in reference point left and right and benchmark reference point 32, in conjunction with weighing the mark line segment of setting in diffusion technique and heavily spreading the distance of grid line Printing Zone center line, calculate metal grid lines actual print position and heavily spread the registration accuracy deviation between the center line of grid line Printing Zone.In actual production, because metal grid lines location measurement information is accurately credible comparatively speaking, can, in conjunction with concrete cell piece work simplification program, only calculate the distance between a metal grid lines 10 and reference point 32, and different tolerance standards is set, optimize stability and the accuracy of test macro operation.
Above example is only measured metal grid lines printing position precision in one degree of freedom.By in cell piece surface zones of different, a few group echo figures being set, and in conjunction with single marking graphical set the measurement result on single position freedom, COMPREHENSIVE CALCULATING multiple degrees of freedom printing position precision.As shown in Figure 2, can pass through one group of cross marker graphic 32, X-Y scheme is measured the printing position precision on cell piece grid line 10 and main grid line 11 both directions.As shown in Figure 3, by being arranged in the two group echo graphical set in the cell piece upper left corner and the lower left corner, can measure the positional precision of cell piece grid line figure in Plane Rotation direction.As upper left corner camera C
lOthe marker graphic 32 and the metal grid lines 10 distance between center line X that measure
oIbe not equal to lower left corner camera C
lUthe marker graphic 32 and the metal grid lines 10 distance between center line X that measure
uI, can assert that metal grid lines rotates skew with respect to grid line Printing Zone.
As shown in Figure 4, by marker graphic group being set and measuring respectively grid line printing position precision in cell piece left side district and the right district, can realize the monitoring to the web plate life-span.When cell piece left area metal grid lines can accurately overlap with heavily spreading grid line Printing Zone, i.e. left side camera C
lOthe marker graphic 32 and the metal grid lines 10 distance between center line X that measure
lIequal marker graphic 32 and heavily spread grid line Printing Zone 31 distance between center line X
lS, and cell piece the right regional metal grid line printing position generation skew to the right, i.e. the right camera C
rthe marker graphic 33 and the metal grid lines 10 distance between center line X that measure
rIgreater than flag figure 32 with heavily spread grid line Printing Zone 31 distance between center line X
rS, can assert step-down of web plate tension force.If but now is still heavily spreading in grid line Printing Zone 31 the actual print position of metal grid lines 10, still can continue to use web plate, until having approached to depart from, regional metal grid line 10 actual print positions in the right heavily spread grid line Printing Zone 31, position deviation information Δ X=X in measurement result
rI-X
rSgive the alarm with the rear trigger of Tolerance Parameters contrast by technique initialization, alert is changed web plate.This function is for guaranteeing that cell piece quality, reduction cell piece production cost tool are of great significance.On the one hand can use potentiality by maximum performance web plate, at web plate tension force, close on when reaching technique minimum requirements and change web plate by system automatic-prompting, thereby reduce web plate usage quantity and reduce production costs; On the other hand, due to the reduction of web plate quantity and replacement frequency, the total down-time that replacing web plate causes will decline thereupon, improve the practical efficiency of screen printing apparatus; In addition, change web plate at every turn and all must consume a certain amount of Precious Metal, along with the reduction of web plate replacing number of times, Precious Metal reactive power consumption amount also will decrease.Web plate process monitoring function will be simplified technology controlling and process work, improve the uniformity of technology stability, product quality and product quality.
More than show and described basic principle of the present invention and principal character and advantage of the present invention.The technical staff of the industry should understand; the present invention is not restricted to the described embodiments; that in above-described embodiment and description, describes just illustrates principle of the present invention; without departing from the spirit and scope of the present invention; the present invention also has various changes and modifications, and these changes and improvements all fall in the claimed scope of the invention.The claimed scope of the present invention is defined by appending claims and equivalent thereof.
Claims (10)
1. the detection method of electrodes selective type solar cell grid line printing position precision, it is characterized in that, on cell piece sensitive surface, generate a marker graphic, after metal grid lines printing, measure the distance between metal grid lines and marker graphic, incorporation of markings figure and the selective distance that weighs diffusion region, the registration accuracy of judgement grid line printing position and selective heavy diffusion region.
2. the detection method of electrodes selective type solar cell grid line according to claim 1 printing position precision, it is characterized in that: described marker graphic is between metal grid lines, and adopt the technique identical with the generating process of selective heavy diffusion region, when generating selective heavy diffusion region, on cell piece sensitive surface, generate marker graphic.
3. the detection method of electrodes selective type solar cell grid line according to claim 1 and 2 printing position precision, it is characterized in that: the marker graphic group that marker graphic is comprised of a plurality of single labelled figures, in test process, first select the most clear reliable single figure as reference position reference point, and by measuring this marker graphic of Distance Judgment of this single labelled figure and other single labelled figures as the position reliability of reference position reference point.
4. the detection method of electrodes selective type solar cell grid line according to claim 1 and 2 printing position precision, it is characterized in that: marker graphic generate two groups along cell piece surface grid line direction on cell piece sensitive surface described in, by measuring respectively the method for distance between the upper and lower zones of different metal grid lines of cell piece and described marker graphic, judge the registration accuracy of metal grid lines printing position with the selective heavy diffusion region of the upper and lower zones of different of cell piece, and further judge the registration accuracy of metal grid lines printed pattern Yu Chongkuo district figure in Plane Rotation direction.
5. the detection method of electrodes selective type solar cell grid line according to claim 1 and 2 printing position precision, it is characterized in that: marker graphic generate two groups along cell piece main grid line direction on cell piece sensitive surface described in, by measuring respectively the method for distance between cell piece left and right zones of different metal grid lines and described marker graphic, judge the registration accuracy of metal grid lines printing position with the selective heavy diffusion region of cell piece left and right zones of different, and further judge web plate tension variation situation, reach the technique object of web plate service life supervision.
6. the detection method of electrodes selective type solar cell grid line according to claim 1 and 2 printing position precision, it is characterized in that: after metal grid lines printing, measure the distance between metal grid lines and marker graphic, incorporation of markings figure and the selective relative distance that heavily spreads grid line Printing Zone center line, calculate grid line printing position and the selective registration accuracy that weighs diffusion region, to avoid the light pollution problem of metal grid lines reverberation to grid line periphery in conventional optical detecting method.
7. the detection method of electrodes selective type solar cell grid line according to claim 1 and 2 printing position precision, it is characterized in that: described marker graphic is X-Y scheme, by measuring respectively the distance of described X-Y scheme and cell piece grid line and cell piece main grid line, in conjunction with described marker graphic with heavily spread grid line Printing Zone center line and heavily spread the distance of main grid line Printing Zone center line, in cell piece left and right with judge up and down the printing position precision of metal grid lines on both direction.
8. the detection method of electrodes selective type solar cell grid line according to claim 1 and 2 printing position precision, it is characterized in that: this detection method is applied to the online position probing of high speed on production line, by the position probing information of real-time measurement, side-play amount is controlled in correction graph setting movement, realizes the high-precision high-speed closed-loop control of screen printing apparatus figure location.
9. the detection method of electrodes selective type solar cell grid line according to claim 1 and 2 printing position precision, is characterized in that: this detection method is applicable to the online position probing of high speed of screen printing apparatus.
10. the detection method of electrodes selective type solar cell grid line according to claim 1 and 2 printing position precision, is characterized in that: this detection method is applicable to off-line screen printing apparatus.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310128281.4A CN104097395A (en) | 2013-04-12 | 2013-04-12 | Selective electrode type solar cell grid line printing position precision detecting method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310128281.4A CN104097395A (en) | 2013-04-12 | 2013-04-12 | Selective electrode type solar cell grid line printing position precision detecting method |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN104097395A true CN104097395A (en) | 2014-10-15 |
Family
ID=51666121
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201310128281.4A Pending CN104097395A (en) | 2013-04-12 | 2013-04-12 | Selective electrode type solar cell grid line printing position precision detecting method |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN104097395A (en) |
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109470139A (en) * | 2018-10-29 | 2019-03-15 | 东莞市微大软件科技有限公司 | Solar energy surveys multi-thread method without net knot thin one screen of grid center line of printing screen plate |
| CN109802001A (en) * | 2018-12-11 | 2019-05-24 | 北京铂阳顶荣光伏科技有限公司 | The localization method and device of cell piece |
| CN110370830A (en) * | 2019-07-29 | 2019-10-25 | 百力达太阳能股份有限公司 | A kind of method of sight check printing quality |
| CN112455108A (en) * | 2020-10-30 | 2021-03-09 | 江苏润阳悦达光伏科技有限公司 | Process method for preventing printing offset in SE battery production process |
| CN112510099A (en) * | 2020-11-30 | 2021-03-16 | 晶科能源科技（海宁）有限公司 | Solar cell module, solar cell and manufacturing method thereof |
| CN112683170A (en) * | 2020-12-28 | 2021-04-20 | 荣旗工业科技(苏州)股份有限公司 | Method for detecting soldering position precision of soldering tin |
| CN114603988A (en) * | 2020-12-08 | 2022-06-10 | 阜宁阿特斯阳光电力科技有限公司 | Printing precision monitoring method for battery piece |
-
2013
- 2013-04-12 CN CN201310128281.4A patent/CN104097395A/en active Pending
Cited By (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109470139A (en) * | 2018-10-29 | 2019-03-15 | 东莞市微大软件科技有限公司 | Solar energy surveys multi-thread method without net knot thin one screen of grid center line of printing screen plate |
| CN109470139B (en) * | 2018-10-29 | 2019-07-23 | 东莞市微大软件科技有限公司 | Solar energy surveys multi-thread method without net knot thin one screen of grid center line of printing screen plate |
| CN109802001A (en) * | 2018-12-11 | 2019-05-24 | 北京铂阳顶荣光伏科技有限公司 | The localization method and device of cell piece |
| CN110370830A (en) * | 2019-07-29 | 2019-10-25 | 百力达太阳能股份有限公司 | A kind of method of sight check printing quality |
| CN110370830B (en) * | 2019-07-29 | 2020-11-10 | 百力达太阳能股份有限公司 | Method for visually inspecting printing quality |
| CN112455108A (en) * | 2020-10-30 | 2021-03-09 | 江苏润阳悦达光伏科技有限公司 | Process method for preventing printing offset in SE battery production process |
| CN112510099A (en) * | 2020-11-30 | 2021-03-16 | 晶科能源科技（海宁）有限公司 | Solar cell module, solar cell and manufacturing method thereof |
| CN112510099B (en) * | 2020-11-30 | 2022-05-20 | 晶科能源(海宁)有限公司 | Solar cell module, solar cell and manufacturing method thereof |
| CN114603988A (en) * | 2020-12-08 | 2022-06-10 | 阜宁阿特斯阳光电力科技有限公司 | Printing precision monitoring method for battery piece |
| CN112683170A (en) * | 2020-12-28 | 2021-04-20 | 荣旗工业科技(苏州)股份有限公司 | Method for detecting soldering position precision of soldering tin |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN104097395A (en) | Selective electrode type solar cell grid line printing position precision detecting method | |
| CN107256568A (en) | A kind of high-accuracy mechanical arm trick camera calibration method and calibration system | |
| CN102968000A (en) | Dual-sided processing method and exposure device | |
| CN108845480A (en) | A kind of position alignment of inner layer plates accuracy measurement method | |
| CN102445858B (en) | Technical matching method for photo-etching machines | |
| CN106477125A (en) | A kind of automatic labeling device and labeling method | |
| CN108901119A (en) | For measuring the jig and method of laser drill hole position accuracy | |
| CN104567673B (en) | A kind of home position degree school detecting method of workpiece hole | |
| CN106595646B (en) | A kind of spot detection module and the laser orientation system based on spot detection | |
| CN203825358U (en) | Photomask | |
| CN203941362U (en) | Liquid crystal panel | |
| CN102799062A (en) | Mask, wafer and monitor method | |
| CN107941279B (en) | For measuring the measuring device of air film various parameters in air-flotation system | |
| CN207197407U (en) | A kind of tool for being used to measure the borehole accuracy of X Ray drilling machines | |
| CN204807074U (en) | Plane measuring device of large -scale lid type product | |
| CN101504266B (en) | Silicon slice detection tool and detection method | |
| CN103645743A (en) | Vision alignment control system and method thereof | |
| CN102130214A (en) | Wet-method etching monitoring method | |
| CN207676919U (en) | A kind of arachnoid MWT battery electrode structure at right side | |
| CN103867862B (en) | A kind of wireless senser seal box fixing device | |
| CN103832966B (en) | Formation method and the detection method of semiconductor devices | |
| CN103075954B (en) | Micro-nano manufacturing method for curved surface structure electric field type time grating angular displacement sensor | |
| CN108008608B (en) | A kind of method of back side alignment | |
| CN103646885A (en) | A method for reducing errors in the observation of wafers by an electron microscope | |
| CN105607308B (en) | A kind of surveyors' staff and manufacturing method and application method |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C02 | Deemed withdrawal of patent application after publication (patent law 2001) | ||
| WD01 | Invention patent application deemed withdrawn after publication |
Application publication date: 20141015 |